Vacuum winding coating equipment

Abstract

The present invention belongs to the field of vacuum coating technology, and discloses a vacuum winding coating equipment, including a winding chamber, a transition chamber and a coating chamber, wherein the transition chamber is connected to the winding chamber and the coating chamber respectively, a sealing support plate is provided in the transition chamber, a sealing vacuum plate is slidably provided in the transition chamber, the sealing vacuum plate is located below the sealing support plate, a sealing heating plate is provided below the sealing vacuum plate, an adsorption groove is provided on the lower surface of the sealing vacuum plate, a sealing elastic component is provided on the upper surface of the sealing vacuum plate, the upper end of the sealing elastic component is connected to the transition chamber above the sealing support plate, and the lower end of the sealing elastic component is connected to the adsorption groove. The transition chamber of the present invention allows the winding chamber and the coating chamber to remain relatively independent, so that the high vacuum degree in the coating chamber can be kept stable, and when the equipment is working, the substrate is clamped and flattened between the sealing vacuum plate and the heat spreader on the sealing heating plate, and the residual gas of the substrate will enter the transition chamber, thereby avoiding this part of the residual gas from entering the coating chamber as much as possible.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum coating, and in particular relates to a vacuum winding coating device. Background Art

[0002] In modern industrial production, vacuum winding coating technology is widely used in the preparation of various thin film materials. The vacuum winding coating equipment is mainly composed of a winding and unwinding system and a coating chamber. The substrate is placed in the unwinding system, and the material is sent to the coating chamber through the unwinding roller. The coating chamber is equipped with a coating roller, and the coated material is sent to the winding device through the tension roller.

[0003] The higher the vacuum degree of the coating equipment, the easier it is for the material to vaporize, and the lower the required temperature. Flexible substrates suitable for roll-to-roll vacuum coating are generally paper, cloth, plastic, etc. The surface area of ​​these rolled substrates is large, and their degassing volume is also relatively large. In addition, the gas adsorbed by the substrate inside the roll is difficult to be extracted through the narrow gap between the two layers of substrate, and a large amount of gas will be released when unwinding. Therefore, the current vacuum winding coating equipment generally separates the vacuum chamber into two chambers, one for the winding chamber and the other for the coating chamber. When unwinding, a large amount of gas released by the substrate is extracted in the winding chamber, reducing the degassing volume of the substrate, and then enters the coating chamber. This is conducive to obtaining a higher vacuum degree in the coating chamber.

[0004] Usually, the vacuum degree of the coating chamber is one order of magnitude higher than that of the winding chamber. In the process of realizing the present invention, the inventors found that there are at least the following problems in the prior art: the vacuum chamber is often simply separated by a partition, and a hole for the substrate to pass through needs to be opened on the partition, so the vacuum isolation between the coating chamber and the winding chamber is not good.

[0005] The above description of the background technology is only for facilitating an in-depth understanding of the technical solution of the present invention (the technical means used, the technical problems solved, the technical effects produced, etc.), and should not be regarded as an admission or any form of implication that the information constitutes prior art already known to those skilled in the art. Summary of the invention

[0006] The present invention aims to solve the above technical problems at least to a certain extent. To this end, the present invention aims to provide a vacuum winding coating device.

[0007] The technical solution adopted by the present invention is:

[0008] A vacuum winding coating equipment comprises a winding chamber, a transition chamber and a coating chamber, wherein the transition chamber is connected to the winding chamber and the coating chamber respectively, a reeling system is arranged in the coating chamber, and a coating system is arranged in the winding chamber; the coating chamber, the winding chamber and the transition chamber are all connected to the vacuum system; a sealing support plate is arranged in the transition chamber, a sealing vacuum plate is arranged to slide up and down in the transition chamber, the sealing vacuum plate is located below the sealing support plate, a sealing heating plate is arranged below the sealing vacuum plate, an adsorption groove is arranged on the lower surface of the sealing vacuum plate, a sealing elastic component is arranged on the upper surface of the sealing vacuum plate, the upper end of the sealing elastic component is connected to the transition chamber above the sealing support plate, and the lower end of the sealing elastic component is connected to the adsorption groove.

[0009] Preferably, the sealing elastic component includes a first disc spring and a second disc spring that are arranged opposite to each other, the first disc spring and the second disc spring are of the same size, one end of the first disc spring is connected to the sealing vacuum plate, the other end of the first disc spring is connected to one end of the second disc spring, and the other end of the second disc spring is connected to the sealing support plate.

[0010] Preferably, a limiting ring is detachably mounted on the lower surface of the sealing support plate, the limiting ring is arranged on the periphery of the second disc spring, and the diameter of the limiting ring is smaller than the outer diameter of the second disc spring.

[0011] Preferably, the vacuum degree of the coating chamber is greater than the vacuum degree of the winding chamber, and the vacuum degree of the transition chamber is greater than or equal to the vacuum degree of the winding chamber.

[0012] Preferably, the vacuum system includes a fore-stage vacuum pump, a first Roots pump, a second Roots pump, a third Roots pump and a diffusion pump, the fore-stage vacuum pump is connected to the first Roots pump, the second Roots pump and the third Roots pump respectively, the first Roots pump is connected to the winding chamber, the second Roots pump is connected to the transition chamber, the third Roots pump is connected to the coating chamber and the diffusion pump respectively, and the diffusion pump is connected to the coating chamber.

[0013] Preferably, a vacuum sensor is provided in the transition chamber, and the vacuum sensor is connected to the control system through a wire. A sealing assembly is provided on the wire. A through hole for the wire to pass through is opened on the side wall of the transition chamber, and a circle of limit platforms is convexly provided in the through hole. A fixing ring connected to the through hole is provided on the outer wall of the transition chamber, and an external thread is provided on the outer wall of the fixing ring; the sealing assembly includes a deformable sealing member installed in the through hole and a fixing cap threadedly connected to the fixing ring, a wire passing hole is provided on the fixing cap, and a flat hole for the wire to pass through is provided on the deformable sealing member.

[0014] Preferably, two limiting strips arranged along the axial direction of the through hole are symmetrically provided on the inner wall of the through hole, and a limiting groove matching the shape of the limiting strips is provided on the outer wall of the deformable sealing member.

[0015] Preferably, the upper surface of the sealed heating plate is provided with an installation space, a heating element is provided in the installation space, and a heat diffusion plate is provided on the upper cover of the installation space. The coating system includes a magnetron target or an evaporator. A guide rail is provided in the transition chamber, and the sealed vacuum plate is slidably installed on the guide rail.

[0016] The beneficial effects of the present invention are:

[0017] The transition chamber of the vacuum winding coating equipment provided by the present invention allows the winding chamber and the coating chamber to remain relatively independent, so that the high vacuum degree in the coating chamber can be kept stable. During operation, the substrate is clamped and flattened between the sealed vacuum plate and the heat spreader on the sealed heating plate, and the residual gas in the substrate will enter the transition chamber, thereby minimizing the entry of this residual gas into the coating chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the principle of the vacuum winding coating equipment of the present invention.

[0019] Figure 2 It is a partial cross-sectional view of the winding chamber, transition chamber and coating chamber of the present invention.

[0020] Figure 3 yes Figure 2 The large picture of part A in the middle.

[0021] Figure 4 1 is a top view of the deformable seal of the present invention.

[0022] In the figure: 1-winding chamber; 2-transition chamber; 3-coating chamber; 4-sealing support plate; 5-guide rail; 6-sealing vacuum plate; 7-sealing heating plate; 8-adsorption groove; 9-first connecting hole; 10-second connecting hole; 11-first disc spring; 12-second disc spring; 13-limiting ring; 14-installation space; 15-heat spreader; 16-front vacuum pump; 17-first Roots pump; 18-second Roots pump; 19-third Roots pump; 20-diffusion pump; 21-limiting table; 22-fixing ring; 23-deformable sealing element; 24-fixing cap; 25-wire hole; 26-flat hole; 27-limiting strip; 28-substrate. DETAILED DESCRIPTION

[0023] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and are not to be construed as limiting the present invention. The components of the embodiments of the present invention generally described and shown in the drawings herein may be arranged and designed in a variety of different configurations.

[0024] like Figures 1 to 4As shown, the vacuum winding coating equipment of this embodiment includes a winding chamber 1, a transition chamber 2 and a coating chamber 3. The transition chamber 2 is connected to the winding chamber 1 and the coating chamber 3 respectively. The coating chamber 3 is provided with an unwinding system, and the winding chamber 1 is provided with a coating system. Both the unwinding system and the coating system are prior art. There are two options for the coating system, one of which includes a coating roller and a magnetron target, and the other includes a coating roller and an evaporator.

[0025] The winding chamber 1, the transition chamber 2 and the coating chamber 3 are all connected to the vacuum system; the vacuum system includes a front vacuum pump 16, a first Roots pump 17, a second Roots pump 18, a third Roots pump 19 and a diffusion pump 20. The front vacuum pump 16 is respectively connected to the first Roots pump 17, the second Roots pump 18 and the third Roots pump 19, the first Roots pump 17 is connected to the winding chamber 1, the second Roots pump 18 is connected to the transition chamber 2, the third Roots pump 19 is respectively connected to the coating chamber 3 and the diffusion pump 20, and the diffusion pump 20 is connected to the coating chamber 3. The front vacuum pump 16, the first Roots pump 17, the second Roots pump 18, the third Roots pump 19 and the diffusion pump 20 are all electrically connected to the control system, and the control system controls the operation of each pump to ensure that the vacuum degree of the coating chamber 3 is greater than the vacuum degree of the winding chamber 1, and the vacuum degree of the transition chamber 2 is greater than or equal to the vacuum degree of the winding chamber 1.

[0026] like Figure 2 As shown, a sealing support plate 4 and two vertically installed guide rails 5 are provided in the transition chamber 2, and the sealing support plate 4 is sealed and connected to the inner wall of the transition chamber 2 on all sides; the guide rails 5 are located below the sealing support plate 4, and the sealing vacuum plate 6 is slidably installed on the guide rails 5. An adsorption groove 8 is provided on the lower surface of the sealing vacuum plate 6, and a support net (not shown in the figure) is provided at the lower end of the adsorption groove 8, and the support net is flush with the lower surface of the sealing vacuum plate 6. A sealing heating plate 7 is provided below the sealing vacuum plate 6, and the height of the sealing heating plate 7 in the transition chamber 2 can be adjusted as needed. An installation space 14 is recessed on the upper surface of the sealing heating plate 7, and a heating element is provided in the installation space 14. A heat spreader 15 is provided on the upper cover of the installation space 14, and the heat generated by the heating element can be transferred to the heat spreader 15.

[0027] A first connecting hole 9 connected to the adsorption groove 8 is provided on the sealing vacuum plate 6, a second connecting hole 10 is provided on the sealing support plate 4, and a sealing elastic component is provided on the upper surface of the sealing vacuum plate 6. The upper end of the sealing elastic component is connected to the transition chamber 2 above the sealing support plate 4 through the second connecting hole 10, and the lower end of the sealing elastic component is connected to the adsorption groove 8 through the first connecting hole 9.

[0028] When the vacuum winding coating equipment is working, the substrate 28 enters the coating chamber 3 after passing through the transition chamber 2 from the winding chamber 1. Specifically, the substrate 28 passes between the lower surface of the sealed vacuum plate 6 and the upper surface of the heat soaking plate 15, and the sealing elastic component is in a compressed state, so that the sealed vacuum plate 6 and the heat soaking plate 15 clamp the substrate 28 together, ensuring that the substrate 28 can pass through, while keeping the winding chamber 1 and the coating chamber 3 relatively independent, so that the high vacuum degree in the coating chamber 3 can be kept stable, and the coating quality can be improved. When the substrate 28 is clamped, the sealed vacuum plate 6 has a flattening effect on the substrate 28; the heat soaking plate 15 can preheat the substrate 28, increase the temperature of the substrate 28 entering the coating chamber 3, and make it easier to react with the coating material during the coating process.

[0029] When the substrate 28 is unwound in the winding chamber 1, most of the gas adsorbed by the substrate 28 is released, but a small amount will still remain. When the substrate 28 is flattened, the residual gas will continue to be released and enter the transition chamber 2 through the adsorption groove 8, the first connecting hole 9, the sealing elastic component and the second connecting hole 10, thereby avoiding this part of the residual gas from entering the coating chamber 3 as much as possible, and further allowing the high vacuum degree in the coating chamber 3 to remain stable.

[0030] The sealing elastic component includes a plurality of overlapping disc springs. In this embodiment, the sealing elastic component includes a first disc spring 11 and a second disc spring 12 which are arranged opposite to each other. The first disc spring 11 and the second disc spring 12 are of the same size. One end of the first disc spring 11 is sealed and connected to the sealing vacuum plate 6, and the first disc spring 11 covers the first connecting hole 9; the other end of the first disc spring 11 is sealed and connected to one end of the second disc spring 12, and the other end of the second disc spring 12 is sealed and connected to the sealing support plate 4, and the second disc spring 12 covers the second connecting hole 10. When the sealing elastic component is compressed, the first disc spring 11 and the second disc spring 12 will deform synchronously, but the first connecting hole 9 and the second connecting hole 10 can still be connected.

[0031] A limit ring 13 is detachably mounted on the bottom of the sealing support plate 4. The limit ring 13 is arranged on the periphery of the second disc spring 12. The diameter of the limit ring 13 is smaller than the outer diameter of the second disc spring 12. The limit ring 13 can limit the degree of compression of the entire sealing elastic component.

[0032] A vacuum sensor is provided in the transition chamber 2, which is connected to the control system through a wire. A sealing component is provided on the wire. The transition chamber 2 is the main difference between the vacuum winding coating equipment of this embodiment and the prior art, so a new sealing component needs to be designed.

[0033] like Figure 3As shown, in this embodiment, a through hole for the wire to pass through is provided on the side wall of the transition chamber 2, a circle of limit platform 21 is convexly provided in the through hole, a fixing ring 22 connected to the through hole is provided on the outer wall of the transition chamber 2, and an external thread is provided on the outer wall of the fixing ring 22; the sealing assembly includes a deformable seal 23 and a fixing cap 24 threadedly connected to the fixing ring 22, a wire passing hole 25 is provided on the fixing cap 24, and a flat hole 26 for the wire to pass through is provided on the deformable seal 23. The deformable seal 23 is installed in the through hole, and the two ends of the deformable seal 23 are in contact with the limit platform 21 and the fixing cap 24 respectively, and the wire passes through the inner circle of the limit platform 21, the flat hole 26 and the wire passing hole 25 in sequence and then is connected to the control system. It is only necessary to tighten the fixing cap 24, the internal protrusion of the fixing cap 24 will squeeze the deformable seal 23, the flat hole 26 of the deformable seal 23 will close and tightly seal the wire. Since the flat hole 26 is arranged along the length direction of the deformable seal 23, the sealing distance is long; at the same time, the outer surface of the deformable seal 23 will also form a pressure seal with the inner wall of the through hole, the upper surface of the limit platform 21, and the lower surface of the internal protrusion of the fixing cap 24, and multiple seals ensure the sealing effect.

[0034] In order to prevent the deformable seal 23 from rotating when the fixing cap 24 is tightened, two limiting strips 27 arranged along the axial direction of the through hole are symmetrically provided on the inner wall of the through hole, and a limiting groove matching the shape of the limiting strips 27 is provided on the outer wall of the deformable seal 23. When the fixing cap 24 is tightened, the deformable seal 23 is restricted by the limiting strips 27 and does not rotate. Figure 4 In the direction shown, the two limit strips 27 are arranged opposite to the two ends of the flat hole 26. When the deformable seal 23 is under pressure, the upper part above the flat hole 26 and the upper part below the flat hole 26 are more likely to squeeze the flat hole 26 from the top and bottom directions, making the flat hole 26 close more tightly.

[0035] The present invention is not limited to the above-mentioned optional implementation modes. Anyone can derive other various forms of products under the inspiration of the present invention. However, no matter what changes are made in the shape or structure, all technical solutions that fall within the scope defined by the claims of the present invention fall within the protection scope of the present invention.

Claims

1. A vacuum winding coating device, characterized in that: The invention comprises a winding chamber (1), a transition chamber (2) and a coating chamber (3), wherein the transition chamber (2) is connected to the winding chamber (1) and the coating chamber (3) respectively, a coating system is arranged in the coating chamber (3), and an unwinding system is arranged in the winding chamber (1); the coating chamber (3), the winding chamber (1) and the transition chamber (2) are all connected to a vacuum system; a sealing support plate (4) is arranged in the transition chamber (2), a sealing vacuum plate (6) is arranged in the transition chamber (2) to slide up and down, the sealing vacuum plate (6) is located below the sealing support plate (4), a sealing heating plate (7) is arranged below the sealing vacuum plate (6), an adsorption groove (8) is arranged on the lower surface of the sealing vacuum plate (6), a sealing elastic component is arranged on the upper surface of the sealing vacuum plate (6), the upper end of the sealing elastic component is connected to the transition chamber (2) above the sealing support plate (4), and the lower end of the sealing elastic component is connected to the adsorption groove (8).

2. The vacuum winding coating equipment according to claim 1, characterized in that: The sealing elastic component comprises a first disc spring (11) and a second disc spring (12) which are arranged opposite to each other, the first disc spring (11) and the second disc spring (12) being of the same size, one end of the first disc spring (11) being connected to the sealing vacuum plate (6), the other end of the first disc spring (11) being connected to one end of the second disc spring (12), and the other end of the second disc spring (12) being connected to the sealing support plate (4).

3. The vacuum winding coating equipment according to claim 1, characterized in that: A limit ring (13) is detachably mounted on the bottom surface of the sealing support plate (4), the limit ring (13) being arranged on the periphery of the second disc spring (12), the diameter of the limit ring (13) being smaller than the outer diameter of the second disc spring (12).

4. The vacuum winding coating equipment according to claim 1, characterized in that: The vacuum degree of the coating chamber (3) is greater than the vacuum degree of the winding chamber (1), and the vacuum degree of the transition chamber (2) is greater than or equal to the vacuum degree of the winding chamber (1).

5. The vacuum winding coating equipment according to claim 1, characterized in that: The vacuum system comprises a front vacuum pump (16), a first Roots pump (17), a second Roots pump (18), a third Roots pump (19) and a diffusion pump (20); the front vacuum pump (16) is connected to the first Roots pump (17), the second Roots pump (18) and the third Roots pump (19), respectively; the first Roots pump (17) is connected to the winding chamber (1); the second Roots pump (18) is connected to the transition chamber (2); the third Roots pump (19) is connected to the coating chamber (3) and the diffusion pump (20), respectively; and the diffusion pump (20) is connected to the coating chamber (3).

6. The vacuum winding coating equipment according to claim 1, characterized in that: The transition chamber (2) is provided with a vacuum sensor, which is connected to a control system via a wire, and a sealing assembly is provided on the wire. A through hole for the wire to pass through is provided on the side wall of the transition chamber (2), and a circle of limit platforms (21) is protruding in the through hole. A fixing ring (22) connected to the through hole is provided on the outer wall of the transition chamber (2), and an external thread is provided on the outer wall of the fixing ring (22); the sealing assembly comprises a deformable sealing member (23) installed in the through hole and a fixing cap (24) threadedly connected to the fixing ring (22), the fixing cap (24) being provided with a wire passing hole (25), and a flat hole (26) for the wire to pass through is provided on the deformable sealing member (23).

7. The vacuum winding coating equipment according to claim 6, characterized in that: Two limiting strips (27) arranged symmetrically along the axial direction of the through hole are provided on the inner wall of the through hole, and limiting grooves matching the shape of the limiting strips (27) are provided on the outer wall of the deformable sealing member (23).

8. The vacuum winding coating equipment according to claim 1, characterized in that: The upper surface of the sealed heating plate (7) is provided with an installation space (14) in a recessed manner, a heating element is provided in the installation space (14), and a heat diffusion plate (15) is provided on the upper cover of the installation space (14).

9. The vacuum winding coating equipment according to claim 1, characterized in that: The coating system includes a magnetron target or an evaporator.

10. The vacuum winding coating equipment according to claim 1, characterized in that: A guide rail (5) is provided in the transition chamber (2), and a sealing vacuum plate (6) is slidably mounted on the guide rail (5).

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