Chip processing equipment and chip processing method

Abstract

The invention discloses chip processing equipment and a chip processing method, and relates to the technical field of chip processing, materials can be automatically conveyed into a fixing assembly through a feeding assembly in the process of driving the fixing assembly, and manual feeding is not needed, so that the production process can be enhanced, and the production efficiency is improved. When gas enters a storage pipe, the storage density and volume of the gas in the storage pipe are increased, at the moment, the gas pushes a piston A and an outer pipe to extend outwards, a rod A connected with the interior of the outer pipe extends towards the interior of a transverse pipe in the extending process, and a pushing plate connected with the rod A moves forwards in the extending process to push a chip located in a feeding cavity out; the air in the side pipe can directly enter the air distributing pipe, then the air is distributed to the multiple air bags through the air distributing pipe, and the air bags can expand in the storage process.

Description

Technical Field

[0001] The present invention relates to the technical field of chip processing, and specifically to a chip processing device and a chip processing method. Background Art

[0002] A chip punching and fixing device is a device used to fix a chip or wafer to be processed at a specific position during the chip punching process. This device plays an important role in semiconductor manufacturing, ensuring the accuracy and consistency of the punching process.

[0003] According to Chinese Invention Patent CN110676210B, a disclosed chip fixing device includes a platform. A support frame is arranged on the platform, and the shape of the support frame is a U-shaped. Both ends of the opening of the support frame are drivingly connected with clamping components. The clamping components include a driving structure and two fixing plates arranged at the opening of the support frame. The two fixing plates are arranged parallel to each other, and clamping grooves are formed on the opposite side surfaces of the two fixing plates. The first electric telescopic push rod, the first moving rod, the first connecting rod, the support frame, the first connecting block, the first sliding hole, the fixing plate, and the first sliding rod are convenient for driving the two fixing plates to move towards each other to clamp the chip or move in the opposite direction to release the chip. A chip is placed in the middle position between the two fixing plates, and the distances between the chip and the two fixing plates are the same. When the first electric telescopic push rod is started, the first electric telescopic push rod extends to drive the first moving rod to move forward, and the first sliding rod is driven to move towards each other through the traction of the first connecting rod, so that the fixing plates move towards each other to clamp the chip. When it is necessary to release the chip, the first electric telescopic push rod is reset. The first electric telescopic push rod contracts to drive the first moving rod to move backward, and the first sliding rod is driven to move in the opposite direction through the traction of the first connecting rod, so that the fixing plates move in the opposite direction to release the chip.

[0004] Although the above patent can clamp the chip, the bottom of the above clamping mechanism does not adopt a flexible mechanism, which causes the surface to be stressed during processing, easily leading to chip surface cracking, resulting in a decline in the production process. Moreover, when the above fixing mechanism performs repetitive work on multiple chips, it cannot be quickly disassembled in time, and can only be clamped one by one manually, which reduces the processing efficiency and cannot improve the production process. Summary of the Invention

[0005] The purpose of the present invention is to add a flexible member to the bottom of the clamping mechanism, thereby avoiding damage to the chip caused by the inability to absorb energy during processing, and accelerating the rapid replacement of the chip during the up and down movement, and then avoiding the decline in the chip production work efficiency, and providing a chip processing device and a chip processing method.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solution: comprising a processing table, a fixing opening is opened in the middle section of the top of the processing table, a loading assembly is arranged on one side of the fixing opening, the loading assembly and the top of the processing table are inlaid and installed, the bottom of one side of the loading assembly is fixedly connected to the fixing assembly, the bottom of the fixing assembly is fixedly connected to the lower surface of the processing table, one side of the fixing assembly is fixedly connected to a pump, the bottom of the pump is fixedly connected to the lower surface of the processing table, and the other side of the fixing assembly is fittedly connected with a unloading assembly.

[0007] As a further solution of the present invention: the feeding assembly includes a longitudinal tube, a side tube, a storage tube, a transverse tube, a feeding cavity, a pushing plate, a rod A, a chip, a force reducing roller, an outer tube, an inner port, a rubber stopper, a piston A, and a cavity A. The top of the longitudinal tube and the top of the processing table are embedded and installed, the insides of both sides of the longitudinal tube are fixedly connected to the side tubes, the bottom of the side tube and the two ends of the bottom of one side of the storage tube are fixedly connected, the bottom of the longitudinal tube is fixedly connected to the transverse tube, the inside of the transverse tube is provided with a feeding cavity, the top of the other side of the feeding cavity and the inside of the longitudinal tube are connected to each other, and the other side of the feeding cavity is movably connected to the pushing plate A sending plate, the outer wall of the pushing plate is fixedly connected to a rod A, the outer wall of the other side of the rod A is movably sleeved with the other side of the transverse tube, a plurality of chips are longitudinally filled inside the longitudinal tube, both ends of the chips are frictionally connected to the force reducing rollers, the force reducing rollers are located on both sides of the interior of the longitudinal tube, a rubber plug is fixedly installed on the outer wall of the other side of the rod A, the outer wall and the inner opening of the rubber plug are inlaid and installed, the inner opening is located inside the outer tube, the outer tube and the interior of the storage tube are movably sleeved, the other side of the outer tube is fixedly connected to a piston A, the piston A is located inside the cavity A, and the cavity A is located inside the storage tube.

[0008] As a further scheme of the present invention: the force reducing roller includes a frame, an air distribution pipe, a connecting pipe A, a connecting shaft, and an airbag. The outer walls on both sides of the force reducing roller are movably connected to the frame, the back side of the frame is fixedly connected to the air distribution pipe, and the back side of the air distribution pipe is fixedly connected to the connecting pipe A. Transverse grooves are provided inside the two sides of the frame, and the interior of the transverse grooves is movably sleeved with the connecting shaft. The outer wall of the connecting shaft is fixedly connected to the force reducing roller, and the back side of the force reducing roller is frictionally connected to the airbag. The back side of the airbag is fixedly connected to one side of the frame, and the airbag and the air distribution pipe are connected to each other. A partition cavity is provided inside the longitudinal tube, and openings are connected on both sides of the partition cavity, and the inside of the opening and the outer wall of the frame are clamped to each other. The air distribution pipe is placed inside the partition cavity, and the side tube extends into the partition cavity and is fixedly connected to the connecting pipe A.

[0009] As a further solution of the present invention: the interior of the fixed component includes an airbag supporting plate, an extrusion plate, a rod B, a cylinder, a piston B, an air inlet, and a storage chamber; the side of the transverse tube is fitted and connected to the airbag supporting plate, the bottom of the airbag supporting plate is fixedly installed with an extrusion plate, the bottom of the extrusion plate is fixedly connected to the rod B, the bottom of the rod B is fixedly connected to the piston B, the piston B is located inside the storage chamber, the storage chamber is arranged inside the cylinder, an air inlet is opened on one side of the storage chamber, and the interior of the air inlet is connected to the pump through a pipeline.

[0010] As a further solution of the present invention: the interior of the airbag supporting plate includes an air storage cavity and a raised side edge, the raised side edges are fixedly connected to the top sides of the airbag supporting plate, the airbag supporting plate and the raised side edges are both provided with an air storage cavity, and the interior of the air storage cavity is filled with nitrogen.

[0011] As a further solution of the present invention: the interior of the unloading assembly includes an exhaust box A, a column, a connecting panel, a storage panel, an air supply pipe, a placement cavity, a tube, a ring, a baffle panel, a tube C, a limiting ring, an air outlet, a pipe mouth, and an exhaust cavity. One side of the pump is fixedly connected to the exhaust box A, the bottom of the exhaust box A is fixedly connected to one side of the lower surface of the processing table, the interior of the exhaust box A is clamped with the column, the top of the column is clamped with the connecting panel, the top of the connecting panel is clamped with the storage panel, the interior of the exhaust box A is provided with a placement cavity, the interior of the placement cavity is clamped with the air supply pipe, the outer wall of the air supply pipe is fixedly connected to the tube, a ring is arranged on the side of the tube, the ring is located inside the air supply pipe, the surface of the ring is fitted and connected to the baffle panel, the outer wall of the baffle panel is fixedly connected to the tube C, the outer wall of the tube C is fixedly installed with a limiting ring, the circumferential outer wall of the tube C is provided with an air outlet, the outer wall of the air outlet is frictionally connected to the interior of the ring, the interiors of the tube C and the limiting ring are both provided with pipe mouths, and the interior of the tube is provided with an exhaust cavity.

[0012] As a further solution of the present invention: the interior of the column barrel includes a lifting rod, an outer ring groove, an air outlet cavity, a piston C, a cavity B, an exhaust box B, a sealing plate, a connecting pipe B, an air inlet circular port, a piston D, an internal threaded pipe, and a limiting ring groove; the interior of the column barrel is movably sleeved with the lifting rod, the top circumference of the lifting rod is provided with an outer ring groove, the interior of the lifting rod is provided with an air outlet cavity, the bottom of the lifting rod is fixedly installed with a piston C, the interior of the column barrel is provided with a cavity B, the outer wall of the cavity B and the piston C are frictionally connected, the bottom of the column barrel is fixedly installed with an exhaust box B, the bottom of the exhaust box B is fitted and connected with a sealing plate, the bottom of the sealing plate is fixedly connected to the connecting pipe B, the circumferential outer wall of the connecting pipe B is provided with an air inlet circular port, the bottom of the air inlet circular port is fixedly installed with a piston D, the piston D is located inside the internal threaded pipe, the top of the internal threaded pipe and the interior of the exhaust box B are connected to each other, the top of the internal threaded pipe is provided with a limiting ring groove, the diameter of the piston D is twice the diameter of the limiting ring groove, and the air inlet circular port is frictionally connected to the inner circumference of the internal threaded pipe.

[0013] As a further solution of the present invention: a bottom opening is formed at the bottom of the connection panel, a rubber ring is fixedly installed inside the bottom opening, and the outer wall of the rubber ring and the outer ring groove are adapted to each other.

[0014] As a further solution of the present invention: a spacing rod is fixedly installed on the top of the storage panel, guide blocks are fixedly installed at both ends of the bottom of the storage panel, the surface of the guide block is fixedly connected with a plug-in cylinder, and a matching groove is provided at the bottom of the guide block, the groove is located at both ends of one side of the base plate, and a plug-in circular opening is opened on the other side of the groove, and the plug-in circular opening and the plug-in cylinder are adapted to each other.

[0015] As a further solution of the present invention: comprising the following steps:

[0016] S1 loading step: the chip is put into the feeding chamber from the top of the longitudinal tube. When the chip is put into the feeding chamber, the potential reducing roller is driven to rotate. The rotation can reduce the potential energy generated when the chip is dropped, so that the chip slowly falls into the feeding chamber. When the fixing assembly works, the rod A moves forward, and the chip dropped into the feeding chamber is pushed out during the movement, so that the chip can be embedded in the airbag carrier plate.

[0017] S2 Fixing step: When the airbag carrier plate and the bottom of the fixing port are attached to each other, the raised sides fixedly connected at both ends of the top of the airbag carrier plate will be squeezed, and the gas stored inside the raised sides will move downward and accumulate inside the gas storage cavity. When accumulating, the gas density inside the gas storage cavity increases, causing the plane of the carrier chip to expand. When expanding, the chip will be lifted upward, making it fit tightly to the bottom of the fixing port, thereby forming a fixing effect.

[0018] S3 unloading steps: When the work is completed, the gas inside the fixed component is extracted through the pump, and the fixed component is slowly lowered. When the extrusion plate fits the surface of the cylinder, the gas can be injected into the fixed component through the pump to make the fixed component slowly rise. When it rises to the same level as the horizontal tube, the new chip will enter the inside of the airbag carrier plate, and the processed chip will be pushed from the inside of the airbag carrier plate into the storage panel for storage. It should be noted that during the exhaust process of the pump, the gas will be stored inside the column. As the density increases, the height of the storage panel will also increase, making it easier for different storage panels to fit each other with the other side of the airbag carrier plate, thereby achieving the purpose of unloading.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. The feeding component can be used to automatically transport the material into the interior of the fixed component during the process of driving the fixed component, without the need for manual feeding, thereby strengthening the production process. When the gas enters the interior of the storage tube, the gas will increase in internal storage density and volume. At this time, the gas will push the piston A and the outer tube to extend outward. During the extension process, the rod A connected to the inner part of the outer tube will extend toward the inner part of the transverse tube. During the extension, the push plate connected to the rod A moves forward to push out the chip located inside the feeding chamber, and the gas inside the side tube will directly enter the interior of the gas distribution pipe, which will then distribute the gas to multiple air bags. The air bags will expand during the storage process, and when expanding, they can push the force reduction roller and the connecting shaft forward, so that when the force reduction roller extends out, it will form a relative force on the chip rubbed against the outer wall. At the same time, during the expansion process, the other side of the force reduction roller will be wrapped, making it unable to rotate. Therefore, when the push plate pushes out the chip that falls into the feeding chamber, the top chip will not fall into the interior of the feeding chamber, which is convenient for subsequent feeding and improves the overall work efficiency.

[0021] 2. The unloading assembly and the loading assembly are used in combination, so that manual conveying is not required during the loading process, and the processed chips can be pushed into the unloading assembly for storage during unloading. As the density continues to increase, the piston C and the lifting rod will be slowly lifted up, which can increase the height of the storage panel and the connection panel connected to the top of the lifting rod, so that different storage panels can fit with the other side of the airbag carrier plate. When the storage panel and the airbag carrier plate fit with each other, the new chip will enter the interior of the airbag carrier plate, and the processed chip will be pushed from the interior of the airbag carrier plate into the storage panel for storage, thereby avoiding the need to manually take it out, and then the production efficiency can be improved;

[0022] 3. When the fixed component moves upward, gas can be transported into the airbag carrier plate to make it swell and expand to lift the chip, and then a flexible mechanism is added to its bottom to avoid damage during work. Through the upward movement of rod B, the airbag carrier plate and the bottom of the fixed port are fitted together, and then an extrusion force can be formed on the airbag carrier plate through the extrusion plate, and the top of the raised side is first in contact with the fixed port and squeezed. At this time, the gas stored in the raised side will move downward and stay on the chip-carrying plane of the airbag carrier plate for storage. During storage, the airbag carrier plate makes the chip-carrying plane expand, and when it expands, it will lift the chip upward, so that it fits tightly to the bottom of the fixed port, thereby forming a fixed effect, and at the same time forming a support for the bottom of the chip, which can absorb energy and enhance stability during processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a structural schematic diagram of the present invention;

[0024] Figure 2 is a schematic diagram of the present invention;

[0025] Figure 3 It is a longitudinal cross-sectional view of the present invention;

[0026] Figure 4 It is a schematic diagram of the cross-sectional structure of the cylinder of the present invention;

[0027] Figure 5 This is a schematic diagram of the connection structure of the potential reducing wheel of the present invention;

[0028] Figure 6 It is a schematic diagram of the overall internal structure of the airbag bearing plate of the present invention;

[0029] Figure 7 It is a schematic diagram of the overall internal structure of the exhaust box A of the present invention;

[0030] Figure 8 It is a schematic diagram of the internal parts structure of the air supply pipe of the present invention;

[0031] Fig. 9 It is a schematic diagram of the overall internal structure of the column of the present invention;

[0032] Fig.10 This is a schematic diagram of the overall structure of the bottom of the connecting plate surface of the present invention;

[0033] Fig.11 It is a schematic diagram of the overall structure of the storage panel of the present invention.

[0034] In the figure: 100, processing table; 200, fixing port; 300, loading assembly; 301, longitudinal tube; 302, side tube; 303, storage tube; 304, transverse tube; 305, feeding cavity; 306, pushing plate; 307, rod A; 308, chip; 309, reducing roller; 3091, frame; 3092, air distribution pipe; 3093, connecting pipe A; 3094, connecting shaft; 3095, air bag; 301 0, outer tube; 3011, inner port; 3012, rubber plug; 3013, piston A; 3014, cavity A; 400, fixing assembly; 401, airbag bearing plate; 402, extrusion plate; 403, rod B; 404, cylinder; 405, piston B; 406, air inlet; 407, storage cavity; 4011, air storage cavity; 4012, raised side; 500, unloading assembly; 501, exhaust box A; 502, Column; 5021, lifting rod; 5022, outer ring groove; 5023, air outlet cavity; 5024, piston C; 5025, cavity B; 5026, exhaust box B; 5027, sealing plate; 5028, connecting pipe B; 5029, air inlet round port; 50210, piston D; 50211, internal threaded pipe; 50212, limit ring groove; 503, connecting panel; 5031, bottom port; 5032, rubber ring; 5 04, storage panel; 5041, spacing rod; 5042, guide block; 5043, plug-in cylinder; 5044, groove; 5045, bottom plate; 5046, plug-in round mouth; 505, air supply pipe; 506, placement cavity; 507, tube; 508, ring; 509, flow control panel; 510, tube C; 511, limiting ring; 513, pipe mouth; 512, air outlet; 514, exhaust cavity; 600, pump. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "set" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal connection of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. The following is an explanation of an embodiment of the present invention based on the overall structure of the present invention.

[0037] Example 1

[0038] See also Figures 1 to 11 The present embodiment provides a processing table 100, wherein a fixing opening 200 is provided in the middle of the top of the processing table 100, a loading assembly 300 is provided on one side of the fixing opening 200, the loading assembly 300 is embedded and installed with the top of the processing table 100, a fixing assembly 400 is fixedly connected to the bottom of one side of the loading assembly 300, the bottom of the fixing assembly 400 is fixedly connected to the lower surface of the processing table 100, a pump 600 is fixedly connected to one side of the fixing assembly 400, the bottom of the pump 600 is fixedly connected to the lower surface of the processing table 100, and a discharge assembly 500 is fittedly connected to the other side of the fixing assembly 400;

[0039] The processed chip is placed in the loading component 300, and then the pump 600 is started to make the fixing component 400 move upward. At the same time, the pump 600 will also inject part of the gas into the inside of the loading component 300. When the fixing component 400 and the loading component 300 are flush, the chip will be directly pushed into the top of the fixing component 400 and supported by the fixing component 400. As the gas is continuously injected into the fixing component 400 to move upward, when the fixing component 400 and the bottom of the fixing port 200 fit each other, a squeezing force can be formed to fix the chip in the fixing port. 200, processing is carried out. It should be noted that the interior of the fixing port 200 is inlaid with a silicone strip, which prevents damage to the chip during the extrusion process. When the processing is completed, the gas is exhausted through the pump 600, and the gas is allowed to enter the internal storage of the unloading component 500, so that it can be raised to be level with the loading component 300, and the pump 600 is started to cause the fixing component 400 to move upward. During the movement, the loading component 300 will push the processed chips into the internal storage of the unloading component 500, thereby achieving a self-unloading effect.

[0040] Example 2

[0041] The feeding assembly 300 includes a longitudinal tube 301, a side tube 302, a storage tube 303, a transverse tube 304, a feeding cavity 305, a pushing plate 306, a rod A307, a chip 308, a force reducing roller 309, an outer tube 3010, an inner port 3011, a rubber stopper 3012, a piston A3013, and a cavity A3014. The top of the longitudinal tube 301 is embedded in the top of the processing table 100, and the insides of both sides of the longitudinal tube 301 are fixedly connected to the side tube 302. The bottom of the side tube 302 is fixedly connected to the bottom ends of one side of the storage tube 303. The bottom of the longitudinal tube 301 is fixedly connected to the transverse tube 304. The inside of the transverse tube 304 is provided with a feeding port. The material cavity 305, the top of the other side of the feeding cavity 305 and the interior of the longitudinal tube 301 are interconnected, the other side of the feeding cavity 305 is movably sleeved with a push plate 306, the outer wall of the push plate 306 is fixedly connected to a rod A307, the outer wall of the other side of the rod A307 is movably sleeved with the other side of the transverse tube 304, a plurality of chips 308 are longitudinally filled in the longitudinal tube 301, both ends of the chip 308 are frictionally connected to a force reducing roller 309, the force reducing rollers 309 are located on both sides of the interior of the longitudinal tube 301, a rubber plug 3012 is fixedly installed on the outer wall of the other side of the rod A307, the outer wall of the rubber plug 3012 and the inner mouth 3011 are inlaid and installed, and the inner mouth 3011 is located inside the outer tube 3010, and the outer tube 3010 and the storage tube 303 are movably connected. The other side of the outer tube 3010 is fixedly connected to the piston A3013, and the piston A3013 is located inside the cavity A3014, and the cavity A3014 is located inside the storage tube 303. The force reduction roller 309 includes a frame 3091, an air distribution pipe 3092, a connecting pipe A3093, a connecting shaft 3094, and an air bag 3095. The outer walls of both sides of the force reduction roller 309 are movably connected to the frame 3091, the back side of the frame 3091 is fixedly connected to the air distribution pipe 3092, and the back side of the air distribution pipe 3092 is fixedly connected to the connecting pipe A3093 , transverse grooves are provided inside the two sides of the frame 3091, and the connecting shaft 3094 is movably sleeved inside the transverse grooves, and the outer wall of the connecting shaft 3094 is fixedly connected to the force reducing roller 309, and the back of the force reducing roller 309 is frictionally connected to the airbag 3095, and the back of the airbag 3095 is fixedly connected to one side of the frame 3091, and the airbag 3095 and the air distribution pipe 3092 are connected to each other, and a partition cavity is provided inside the longitudinal tube 301, and openings are connected on both sides of the partition cavity, and the inside of the opening and the outer wall of the frame 3091 are clamped to each other, and the air distribution pipe 3092 is placed inside the partition cavity, and the side tube 302 extends into the interior of the partition cavity and is fixedly connected to the connecting pipe A3093;

[0042] The chip 308 is placed from the top of the longitudinal tube 301. When placed, it will rub against the potential reducing roller 309 and drive the potential reducing roller 309 to rotate. When the potential reducing roller 309 rotates, it consumes the potential energy generated when the chip 308 falls, so that it can slowly enter the feeding chamber 305. At this time, several chips 308 can be placed by the above method. Then, a part of the gas is injected into the storage tube 303 and the side tube 302 by starting the pump 600. When the gas enters the storage tube 303, the gas The internal storage density and volume will increase, and the gas will push the piston A3013 and the outer tube 3010 to extend outward. During the extension process, the rod A307 connected to the inner part of the outer tube 3010 will extend toward the inner part of the transverse tube 304. During the extension, the push plate 306 connected to the rod A307 moves forward to push out the chip 308 located in the feeding cavity 305, and the gas in the side tube 302 will directly enter the inner part of the gas distribution pipe 3092, and then the gas distribution pipe 3092 will distribute the gas to the multiple airbags 3 095, the airbag 3095 will expand during the storage process, and when expanding, it can push the force-reducing roller 309 and the connecting shaft 3094 forward, so that when the force-reducing roller 309 extends out, it will form a relative force on the chip 308 rubbing against the outer wall. At the same time, during the expansion process, the other side of the force-reducing roller 309 will be wrapped, making it unable to rotate. Therefore, when the push plate 306 pushes out the chip 308 that falls into the feeding cavity 305, the top chip 308 will not fall into the inside of the feeding cavity 305. During the process of the pump 600 pumping air, suction will be formed inside the storage tube 303, and the piston A3013 can be pulled back to its original position. At the same time, the connected push plate 306 and rod A307 will move to their original positions, and the side tube 302 connected to the storage tube 303 will extract the gas stored in the airbag 3095. At this time, the airbag 3095 will become smaller, causing the relative force of the force-reducing roller 309 to disappear, and the limiting force will also disappear, allowing the chip 308 to continue to move downward, facilitating the next push.

[0043] Example 3

[0044] The interior of the fixing assembly 400 includes an airbag bearing plate 401, an extrusion plate 402, a rod B403, a cylinder 404, a piston B405, an air inlet 406, and a storage chamber 407. The side of the transverse tube 304 is fitted and connected to the airbag bearing plate 401. The bottom of the airbag bearing plate 401 is fixedly installed with the extrusion plate 402. The bottom of the extrusion plate 402 is fixedly connected to the rod B403. The bottom of the rod B403 is fixedly connected to the piston B405. The piston B405 is located inside the storage chamber 407. The storage chamber 407 is arranged inside the cylinder 404, and an air inlet 406 is provided on one side of the storage chamber 407. The inside of the air inlet 406 is connected to the pump 600 through a pipeline. The inside of the airbag support plate 401 includes an air storage chamber 4011 and a raised side edge 4012. The raised side edges 4012 are fixedly connected to the top sides of the airbag support plate 401. The insides of the airbag support plate 401 and the raised side edges 4012 are both provided with air storage chambers 4011, and the inside of the air storage chamber 4011 is filled with nitrogen.

[0045] When the pump 600 delivers gas to the interior of the fixed component 400, the gas will be stored in the storage chamber 407, thereby pushing the piston B405 and the rod B403 to move slowly upward. When the airbag supporting plate 401 and the transverse tube 304 are level with each other, the chip 308 will extend from the inside of the transverse tube 304 and be stuck in the inside of the airbag supporting plate 401. The raised side edge 4012 fixedly connected to the top of the airbag supporting plate 401 can play a guiding and clamping role. Then, it continues to move upward through the rod B403, so that the airbag supporting plate 401 and the bottom of the fixed port 200 are fitted together. Then, a squeezing force can be formed on the airbag supporting plate 401 through the squeezing plate 402, and the top of the raised side edge 4012 is first in contact with the fixed port 200. When in contact and squeezed, the gas stored in the raised side 4012 will move downward and stay on the plane of the chip 308 carried by the airbag carrier plate 401 for storage. During storage, the airbag carrier plate 401 causes the plane of the chip 308 to expand, and when expanded, the chip 308 will be lifted upward to fit tightly to the bottom of the fixing port 200, thereby forming a fixing effect and forming a support for the bottom of the chip 308, which can absorb energy and enhance stability during the processing. It should be noted that the contact surface between the airbag carrier plate 401, the fixing port 200 and the chip 308 is made of silicone.

[0046] Example 4

[0047] The interior of the unloading component 500 includes an exhaust box A501, a column 502, a connecting panel 503, a storage panel 504, an air supply pipe 505, a placement cavity 506, a tube 507, a ring 508, a baffle panel 509, a tube C510, a limiting ring 511, an air outlet 512, a pipe mouth 513, and an exhaust cavity 514. One side of the pump 600 is fixedly connected to the exhaust box A501, and the bottom of the exhaust box A501 is fixedly connected to one side of the lower surface of the processing table 100. The interior of the exhaust box A501 is clamped with the column 502, the top of the column 502 is clamped with the connecting panel 503, and the top of the connecting panel 503 is clamped with the storage panel 504. The interior of the exhaust box A501 is provided with a placement cavity 506, and the interior of the placement cavity 506 is clamped with the air supply pipe 505, the outer wall of the air supply pipe 505 is fixedly connected to the pipe 507, and a circular ring 508 is arranged on the side of the pipe 507, and the circular ring 508 is located inside the air supply pipe 505. The surface of the circular ring 508 is connected to the baffle panel 509 in a fitting manner, and the outer wall of the baffle panel 509 is fixedly connected to the pipe C510, and a limiting ring 511 is fixedly installed on the outer wall of the pipe C510, and an air outlet 512 is arranged on the circumferential outer wall of the pipe C510, and the outer wall of the air outlet 512 is frictionally connected with the inner part of the circular ring 508, and the inner parts of the pipe C510 and the limiting ring 511 are both provided with pipe openings 513, and the inner part of the pipe 507 is provided with an exhaust chamber 514. The inner part of the column 502 includes a lifting rod 5021, an outer ring groove 5022, an exhaust chamber 5023, a piston C5024, a chamber B5025, an exhaust chamber 514, and a piston C5024. Box B5026, sealing plate 5027, connecting pipe B5028, air inlet circular port 5029, piston D50210, internal threaded pipe 50211, limiting ring groove 50212, the interior of the column 502 is movably sleeved with the lifting rod 5021, the top circumference of the lifting rod 5021 is provided with an outer ring groove 5022, the interior of the lifting rod 5021 is provided with an air outlet cavity 5023, the bottom of the lifting rod 5021 is fixedly installed with a piston C5024, the interior of the column 502 is provided with a cavity B5025, the outer wall of the cavity B5025 is frictionally connected with the piston C5024, the bottom of the column 502 is fixedly installed with an exhaust box B5026, the bottom of the exhaust box B5026 is fitted and connected with the sealing plate 5027, and the bottom of the sealing plate 5027 is fixedly connected Tube B5028, an air inlet circular port 5029 is provided on the circumferential outer wall of the connecting tube B5028, a piston D50210 is fixedly installed at the bottom of the air inlet circular port 5029, the piston D50210 is located inside the internal threaded tube 50211, the top of the internal threaded tube 50211 and the inside of the exhaust box B5026 are communicated with each other, a limiting ring groove 50212 is provided on the top of the internal threaded tube 50211, the diameter of the piston D50210 is twice the diameter of the limiting ring groove 50212, the air inlet circular port 5029 and the inner circumference of the internal threaded tube 50211 are frictionally connected, a bottom port 5031 is provided at the bottom of the connecting panel 503, a rubber ring 5032 is fixedly installed inside the bottom port 5031, and the outer wall of the rubber ring 5032 and the outer ring groove 5022 are adapted to each other,A spacing rod 5041 is fixedly installed on the top of the storage panel 504, and guide blocks 5042 are fixedly installed at both ends of the bottom of the storage panel 504. A plug-in cylinder 5043 is fixedly connected to the surface of the guide block 5042. A matching groove 5044 is provided at the bottom of the guide block 5042. The groove 5044 is located at both ends of one side of the bottom plate 5045. A plug-in round opening 5046 is opened on the other side of the groove 5044. The plug-in round opening 5046 and the plug-in cylinder 5043 are adapted to each other.

[0048] When the processing is completed, the pump 600 is started again. At this time, the gas stored in the storage tube 303, the side tube 302, and the storage chamber 407 is extracted. During the extraction process, the gas will be discharged into the air supply pipe 505 through the pump 600. Because the air supply pipe 505 is provided with a baffle panel 509, the baffle panel 509 will fit tightly against the inside of the ring 508 when the gas is discharged, making it impossible for the gas to pass through the inside of the ring 508. During the process of the pump 600 pumping air, the air supply pipe 505 will form suction, causing the baffle panel 509 to break away from the contact with the ring 508, and the pipe mouth 513 will contact the back of the ring 508. At this time, the airflow will The gas enters the interior of the air supply pipe 505 through the air outlet 512, and the above-mentioned exhausted gas is blocked by the baffle panel 509 and can only be discharged upward through the tube 507. It should be noted that the interior of the internal threaded tube 50211 and the outer wall of the tube 507 are threadedly connected. As the gas enters the interior of the internal threaded tube 50211, the piston D50210 and the connecting tube B5028 will be lifted up. When lifted up, the air inlet circular port 5029 can extend out from the interior of the internal threaded tube 50211. At this time, the gas can be discharged from the air inlet circular port 5029 into the interior of the cavity B5025 for storage. As the density continues to increase, the piston C5024 and the lifting rod 5021 will be slowly Lifting up, lifting up can make the storage panel 504 and the connection panel 503 connected to the top of the lifting rod 5021 increase in height, so that different storage panels 504 can fit together with the other side of the airbag carrier plate 401. When the storage panel 504 and the airbag carrier plate 401 fit together, the new chip 308 will enter the inside of the airbag carrier plate 401, and the processed chip 308 will be pushed from the inside of the airbag carrier plate 401 into the storage panel 504 for storage. When the storage panels 504 plugged in the top of the connection panel 503 are all filled, the connection panel 503 is pulled upwards, so that the rubber ring 503 engaged in the outer ring groove 5022 is clamped. 2 will be out of contact, so that it can be removed, and the gas stored in cavity B5025 will be discharged from the inside of the gas outlet cavity 5023, so as to facilitate the next storage. It should also be noted that a spacing rod 5041 is fixedly installed on the top of the storage panel 504, and the spacing rod 5041 can adjust its own length according to the density of gas storage, so that multiple storage panels 504 can be fitted with the airbag carrier plate 401, and the storage panel 504 is snap-connected. When it is necessary to take out the chip stored inside, just pull the guide block 5042 and the plug-in cylinder 5043 out of the groove 5044 to break away from the limit.

[0049] The above are only preferred specific implementation modes of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and inventive concepts of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A chip processing equipment, characterized in that: include A processing table (100), wherein a fixing opening (200) is provided in the middle of the top of the processing table (100), a loading assembly (300) is provided on one side of the fixing opening (200), the loading assembly (300) and the top of the processing table (100) are embedded and installed, the bottom of one side of the loading assembly (300) is fixedly connected to the fixing assembly (400), the bottom of the fixing assembly (400) and the lower surface of the processing table (100) are fixedly connected, and one side of the fixing assembly (400) is fixedly connected to the pump (600), and the bottom of the pump (600) and the lower surface of the processing table (100) are fixedly connected.

2. A chip processing equipment according to claim 1, characterized in that: The feeding assembly (300) comprises a longitudinal tube (301), a side tube (302), a storage tube (303), a transverse tube (304), a feeding cavity (305), a pushing plate (306), a rod A (307), a chip (308), a force reducing roller (309), an outer tube (3010), an inner port (3011), a rubber stopper (3012), a piston A (3013), and a cavity A (3014). The top of the longitudinal tube (301) and the top of the processing table (100) are inlaid with The longitudinal tube (301) is installed, the inside of both sides are fixedly connected to the side tube (302), the bottom of the side tube (302) is fixedly connected to the two ends of the bottom of one side of the storage tube (303), the bottom of the longitudinal tube (301) is fixedly connected to the transverse tube (304), the inside of the transverse tube (304) is provided with a feeding cavity (305), the top of the other side of the feeding cavity (305) and the inside of the longitudinal tube (301) are connected to each other, and the other side of the feeding cavity (305) is movably sleeved with a pushing plate (306), the outer wall of the pushing plate (306) is fixedly connected to a rod A (307), the outer wall of the other side of the rod A (307) is movably connected to the other side of the transverse tube (304), the interior of the longitudinal tube (301) is longitudinally filled with a plurality of chips (308), both ends of the chips (308) are frictionally connected to the force reducing rollers (309), the force reducing rollers (309) are located on both sides of the interior of the longitudinal tube (301), and the outer wall of the other side of the rod A (307) is fixedly installed with a rubber A rubber plug (3012), the outer wall of the rubber plug (3012) and the inner opening (3011) are embedded and installed, the inner opening (3011) is located inside the outer tube (3010), the outer tube (3010) and the inside of the storage tube (303) are movably connected, the other side of the outer tube (3010) is fixedly connected to the piston A (3013), the piston A (3013) is located inside the cavity A (3014), and the cavity A (3014) is located inside the storage tube (303).

3. A chip processing equipment according to claim 2, characterized in that: The force reduction roller (309) comprises a frame (3091), an air distribution pipe (3092), a connecting pipe A (3093), a connecting shaft (3094), and an air bag (3095). The outer walls on both sides of the force reduction roller (309) are movably connected to the frame (3091). The back side of the frame (3091) is fixedly connected to the air distribution pipe (3092). The back side of the air distribution pipe (3092) is fixedly connected to the connecting pipe A (3093). Transverse grooves are provided inside the two sides of the frame (3091). The interior of the transverse grooves is movably connected to the connecting shaft (3094). The connecting shaft (3094) is connected to the connecting shaft (3094). 94) is fixedly connected to the outer wall of the force reducing roller (309), the back side of the force reducing roller (309) is frictionally connected to the airbag (3095), the back side of the airbag (3095) is fixedly connected to one side of the frame (3091), and the airbag (3095) and the air distribution pipe (3092) are connected to each other, a partition cavity is opened inside the longitudinal tube (301), and openings are connected on both sides of the partition cavity, the frame (3091) is clamped inside the opening, and the air distribution pipe (3092) is placed inside the partition cavity, and the side tube (302) extends into the interior of the partition cavity and is fixedly connected to the connecting tube A (3093).

4. A chip processing equipment according to claim 2, characterized in that: The interior of the fixing assembly (400) includes an airbag bearing plate (401), an extrusion plate (402), a rod B (403), a cylinder (404), a piston B (405), an air inlet (406), and a storage chamber (407); the side of the transverse tube (304) is fitted and connected to the airbag bearing plate (401); the bottom of the airbag bearing plate (401) is fixedly installed with the extrusion plate (402); the bottom of the extrusion plate (402) is fixedly connected to the rod B (403); the bottom of the rod B (403) is fixedly connected to the piston B (405); the piston B (405) is located inside the storage chamber (407); the storage chamber (407) is arranged inside the cylinder (404); an air inlet (406) is opened on one side of the storage chamber (407); the inside of the air inlet (406) is connected to the pump (600) through a pipeline.

5. A chip processing equipment according to claim 4, characterized in that: The interior of the airbag supporting plate (401) includes an air storage cavity (4011) and a raised side edge (4012); the raised side edges (4012) are fixedly connected to the top sides of the airbag supporting plate (401); the interiors of the airbag supporting plate (401) and the raised side edges (4012) are both provided with an air storage cavity (4011); and the interior of the air storage cavity (4011) is filled with nitrogen.

6. The chip processing equipment according to claim 1, characterized in that: The interior of the unloading assembly (500) includes an exhaust box A (501), a column (502), a connection panel (503), a storage panel (504), an air supply pipe (505), a placement cavity (506), a tube (507), a ring (508), a flow blocking panel (509), a tube C (510), a limiting ring (511), an air outlet (512), a pipe mouth (513), and an exhaust cavity (514); one side of the pump (600) is fixedly connected to the exhaust box A (501); the bottom of the exhaust box A (501) is fixedly connected to one side of the lower surface of the processing table (100); the interior of the exhaust box A (501) is clamped to the column (502); the top of the column (502) is clamped to the connection panel (503); the top of the connection panel (503) is clamped to the storage panel (504); the interior of the exhaust box A (501) is fixedly connected to the bottom of the processing table (100); A placement cavity (506) is provided in the part, the interior of the placement cavity (506) is clamped with the air supply pipe (505), the outer wall of the air supply pipe (505) is fixedly connected to the pipe (507), a circular ring (508) is provided on the side of the pipe (507), the circular ring (508) is located inside the air supply pipe (505), the surface of the circular ring (508) is fitted and connected to the baffle panel (509), the outer wall of the baffle panel (509) is fixedly connected to the pipe C (510), a limiting ring (511) is fixedly installed on the outer wall of the pipe C (510), an air outlet (512) is provided on the circumferential outer wall of the pipe C (510), the outer wall of the air outlet (512) is frictionally connected to the interior of the circular ring (508), the interior of the pipe C (510) and the limiting ring (511) are both provided with pipe openings (513), and the interior of the pipe (507) is provided with an exhaust cavity (514).

7. A chip processing equipment according to claim 6, characterized in that: The interior of the column (502) includes a lifting rod (5021), an outer ring groove (5022), an air outlet cavity (5023), a piston C (5024), a cavity B (5025), an exhaust box B (5026), a sealing plate (5027), a connecting pipe B (5028), an air inlet round port (5029), a piston D (50210), an internal threaded pipe (50211), and a limiting ring groove (50212). The column (502) The lifting rod (5021) is movably sleeved inside, the top circumference of the lifting rod (5021) is provided with an outer ring groove (5022), the inside of the lifting rod (5021) is provided with an air outlet cavity (5023), the bottom of the lifting rod (5021) is fixedly installed with a piston C (5024), the inside of the column (502) is provided with a cavity B (5025), the outer wall of the cavity B (5025) is frictionally connected with the piston C (5024), and the The bottom of the column (502) is fixedly installed with an exhaust box B (5026), the bottom of the exhaust box B (5026) is fitted with a sealing plate (5027), the bottom of the sealing plate (5027) is fixedly connected to a connecting pipe B (5028), the circumferential outer wall of the connecting pipe B (5028) is provided with an air inlet (5029), the bottom of the air inlet (5029) is fixedly installed with a piston D (50210), and the piston D (50210) is fixedly installed with a piston D (50211). 0210) is located inside the internal threaded tube (50211), the top of the internal threaded tube (50211) and the interior of the exhaust box B (5026) are connected to each other, a limiting ring groove (50212) is provided on the top of the internal threaded tube (50211), the diameter of the piston D (50210) is twice the diameter of the limiting ring groove (50212), and the air inlet circular port (5029) and the inner circumference of the internal threaded tube (50211) are frictionally connected.

8. The chip processing equipment according to claim 6, characterized in that: A bottom opening (5031) is provided at the bottom of the connection panel (503), a rubber ring (5032) is fixedly installed inside the bottom opening (5031), and the outer wall of the rubber ring (5032) and the outer ring groove (5022) are adapted to each other.

9. The chip processing equipment according to claim 6, characterized in that: A spacing rod (5041) is fixedly installed on the top of the storage panel (504), and guide blocks (5042) are fixedly installed at both ends of the bottom of the storage panel (504). A plug-in cylinder (5043) is fixedly connected to the surface of the guide block (5042). A matching groove (5044) is provided at the bottom of the guide block (5042). The groove (5044) is located at both ends of one side of the bottom plate (5045), and a plug-in circular opening (5046) is opened on the other side of the groove (5044). The plug-in circular opening (5046) and the plug-in cylinder (5043) are compatible with each other.

10. A chip processing method according to claims 1-9, characterized in that: The following steps are involved: S1: loading step: the chip (308) is dropped from the top of the longitudinal tube (301). When dropped, the potential reducing roller (309) is driven to rotate, and the rotation can reduce the potential energy generated when descending, so that the chip (308) slowly falls into the feeding cavity (305). When the fixing assembly (400) works, the rod A (307) moves forward, and the chip (308) dropped into the feeding cavity (305) is pushed out during the movement, so that the chip (308) can be embedded in the airbag carrier plate (401). S2 fixing step: when the airbag carrier plate (401) and the bottom of the fixing opening (200) are attached to each other, the raised side edges (4012) fixedly connected at both ends of the top of the airbag carrier plate (401) will be squeezed, and the gas stored in the raised side edges (4012) will move downward and accumulate inside the gas storage cavity (4011). When accumulating, the gas density inside the gas storage cavity (4011) increases, so that the plane of the carrier chip (308) will expand. When expanding, the chip (308) will be lifted upward, so that it is tightly attached to the bottom of the fixing opening (200), thereby forming a fixing effect; S3 unloading step: when the work is completed, the gas inside the fixed component (400) is extracted through the pump (600), and the fixed component (400) is slowly lowered. When the extrusion plate (402) is attached to the surface of the cylinder (404), the gas can be injected into the interior of the fixed component (400) through the pump (600), and the fixed component (400) is slowly raised. When it rises to the same level as the transverse tube (304), the new chip (308) will enter the interior of the airbag carrier plate (401), and the processed chip (308) will be pushed from the interior of the airbag carrier plate (401) into the storage panel (504) for storage. It should be noted that during the exhaust process of the pump (600), the gas will be stored inside the column (502). As the density increases, the height of the storage panel (504) will also rise, thereby facilitating the different storage panels (504) to fit each other with the other side of the airbag carrier plate (401), and then the unloading function can be achieved.

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