Impedance matcher and radio frequency power supply system

Abstract

The invention provides an impedance matcher and a radio frequency power supply system. The impedance matcher comprises a first inductor and a first capacitor module. The first inductor and the first capacitor module are both used for being connected with an output path of a radio frequency power supply, and the first inductor and the first capacitor module respectively have a first matching value and a second matching value; the first capacitor module at least comprises a first capacitor and a compensation inductor, the first capacitor is connected with an output path of the radio frequency power supply, the compensation inductor is connected with the first capacitor, the compensation inductor is an inductor with an adjustable length, and the compensation inductor has an adjustable compensation inductance value by adjusting the length of the compensation inductor; the second matching value is at least an overall matching value of the compensation inductance value and the capacitance value of the first capacitor; the second matching value is capacitive and is different at least according to different compensation inductance values; wherein the first matching value of the first inductor and the second matching value of the first capacitor module are used for performing impedance matching on the radio frequency power supply and the load. According to the invention, impedance matching can be rapidly realized.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to an impedance matcher and a radio frequency power supply system having the impedance matcher. Background Art

[0002] At present, with the development of RF power supply technology, the impedance matching requirements between RF power supply and load are getting higher and higher. Among them, the current commonly used method is to match the impedance of RF power supply and load by adjusting the capacitance value of adjustable capacitor. However, when the RF power supply provides power to the plasma load or other loads with variable impedance, the impedance matching is achieved only by adjusting the capacitance value of the adjustable capacitor. The adjustment speed of the capacitance value is too slow, and there is a high matching delay. Therefore, how to quickly adjust the capacitance value to quickly achieve impedance matching has become a problem that needs to be considered. Summary of the invention

[0003] The present application provides an impedance matcher and a radio frequency power supply system, which can quickly achieve impedance matching.

[0004] In the first aspect, an impedance matcher is provided, the impedance matcher comprising a first inductor and a first capacitor module. The first inductor and the first capacitor module are both used to connect to the output path of the RF power supply, and the first inductor and the first capacitor module have a first matching value and a second matching value respectively. Wherein, the first capacitor module at least comprises a first capacitor and a compensation inductor, the first capacitor is connected to the output path of the RF power supply, the compensation inductor is connected to the first capacitor, the compensation inductor is a length-adjustable inductor, the compensation inductor adjusts its own length so that the compensation inductor has an adjustable compensation inductance value, and the second matching value is at least the overall matching value of the compensation inductance value and the capacitance value of the first capacitor; the second matching value is capacitive and at least different according to the difference in the compensation inductance value. Wherein, the first matching value of the first inductor and the second matching value of the first capacitor module are used to perform impedance matching between the RF power supply and the load.

[0005] In a possible implementation, the compensation inductor is a spiral coil-type length-adjustable inductor, the compensation inductor includes multiple turns of coils, the compensation inductor value is related to the length of the compensation inductor, the coil radius and the number of coils, and the length of the compensation inductor is greater than or equal to 0.8 times the coil radius.

[0006] In a possible implementation, when the length of the compensation inductor increases, the compensation inductor value decreases so that the second matching value decreases; when the length of the compensation inductor decreases, the compensation inductor value increases so that the second matching value increases.

[0007] In a possible implementation manner, when the length of the compensation inductor is reduced to 0.8 times the radius of the coil, the compensation inductor value is maximum.

[0008] In a possible implementation manner, the impedance matcher further includes a first adjustment module, the first adjustment module is connected to the compensation inductor, and the first adjustment module is used to adjust the length of the compensation inductor to adjust the compensation inductance value of the compensation inductor.

[0009] In a possible implementation, the first inductor is connected between the RF power supply and the load, one end of the first capacitor is connected to the connection point between the first inductor and the RF power supply, and the other end of the first capacitor is grounded. The first end of the compensation inductor is connected to one end or the other end of the first capacitor through a rigid connection line, the second end of the compensation inductor is grounded through a flexible connection line, the first adjustment module is connected to the second end of the compensation inductor, and the first adjustment module adjusts the distance from the second end of the compensation inductor to the first end by adjusting the position of the second end of the compensation inductor, thereby adjusting the length of the compensation inductor.

[0010] In a possible implementation manner, the first capacitor is a capacitor with an adjustable capacitance value, so that the second matching value also varies according to the capacitance value of the first capacitor.

[0011] In a possible implementation, the first capacitor includes two plates, and the capacitance value of the first capacitor changes according to the change of the distance between the two plates of the first capacitor; the impedance matcher also includes a second adjustment module, the second adjustment module is connected to the first capacitor, and the second adjustment module is used to adjust the distance between the two plates of the first capacitor to adjust the capacitance value of the first capacitor; and / or the first capacitor module includes a first switch, the first switch is connected in parallel with the first capacitor, and the first switch is alternately turned on or off with a first on-duty cycle, so that the capacitance value of the first capacitor also changes according to the change of the first on-duty cycle.

[0012] In a possible implementation, the first capacitor module further includes a second switch, which is connected between a connection point between the first inductor and the RF power supply and one end of the first capacitor; wherein the second switch is alternately turned on or off at a second on-duty cycle, so that the second matching value also varies according to the second on-duty cycle, and the second matching value is an overall matching value of the compensation inductance value and the capacitance value of the first capacitor under the effect of the second on-duty cycle.

[0013] In the second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system includes a radio frequency power supply and an impedance matcher. The impedance matcher includes a first inductor and a first capacitor module. The first inductor and the first capacitor module are both used to connect to the output path of the radio frequency power supply, and the first inductor and the first capacitor module have a first matching value and a second matching value respectively. Among them, the first capacitor module includes at least a first capacitor and a compensation inductor, the first capacitor is connected to the output path of the radio frequency power supply, the compensation inductor is connected to the first capacitor, the compensation inductor is a length-adjustable inductor, the compensation inductor adjusts its own length so that the compensation inductor has an adjustable compensation inductance value, and the second matching value is at least the overall matching value of the compensation inductance value and the capacitance value of the first capacitor; the second matching value is capacitive and at least different according to the difference in the compensation inductance value. Among them, the first matching value of the first inductor and the second matching value of the first capacitor module are used to impedance match the radio frequency power supply and the load.

[0014] The impedance matcher and RF power supply system of the present application, by setting a compensation inductor connected to the first capacitor, and configuring the compensation inductor as a length-adjustable inductor, has an adjustable compensation inductance value by adjusting its own length, and can quickly change the second matching value of the first capacitor module including the first capacitor, thereby quickly achieving impedance matching. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 FIG. 4 is a circuit diagram of an impedance matcher in an embodiment of the present application.

[0017] Figure 2 FIG. 4 is a circuit diagram of an impedance matcher in another embodiment of the present application.

[0018] Figure 3 for Figure 1 The impedance matcher shown also includes a circuit diagram of a first adjustment module.

[0019] Figure 4 for Figure 3 The impedance matcher shown also includes a circuit diagram of a second adjustment module.

[0020] Figure 5 FIG. 4 is a circuit diagram of an impedance matcher in another embodiment of the present application.

[0021] Figure 6 It is a block diagram of a radio frequency power supply system in one embodiment of the present application.

[0022] Explanation of the accompanying drawings: 1000, RF power supply system, RS, RF power supply, 10, impedance matcher, L1, first inductor, 100, first capacitor module, C1, first capacitor, Lr, compensation inductor, A, first end, B, second end, S1, first switch, S2, second switch, 200, first adjustment module, 300, control module, 400, second adjustment module, GND, ground, RL, load. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0024] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0025] In the following, the terms "first", "second", and "third" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", and "third" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more.

[0026] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0027] Please also read Figure 1 , Figure 2 , Figure 1 is a circuit diagram of an impedance matcher in an embodiment of the present application, Figure 2 FIG. 1 is a circuit diagram of an impedance matcher in another embodiment of the present application. Figure 1 , Figure 2As shown, the present application provides an impedance matcher 10, which includes a first inductor L1 and a first capacitor module 100. The first inductor L1 and the first capacitor module 100 are both used to connect to the output path of the radio frequency power supply RS, and the first inductor L1 and the first capacitor module 100 have a first matching value and a second matching value, respectively. Among them, the first capacitor module 100 includes at least a first capacitor C1 and a compensation inductor Lr, the first capacitor C1 is connected to the output path of the radio frequency power supply RS, the compensation inductor Lr is connected to the first capacitor C1, the compensation inductor Lr is a length-adjustable inductor, and the compensation inductor Lr adjusts its own length so that the compensation inductor Lr has an adjustable compensation inductor Lr value, and the second matching value is at least the overall matching value of the compensation inductor Lr value and the capacitance value of the first capacitor C1; the second matching value is capacitive and at least different according to the difference in the compensation inductor Lr value. Among them, the first matching value of the first inductor L1 and the second matching value of the first capacitor module 100 are used to impedance match the radio frequency power supply RS and the load RL.

[0028] Therefore, the above-mentioned impedance matcher 10 in the present application, by setting a compensation inductor Lr connected to the first capacitor C1, and configuring the compensation inductor Lr as a length-adjustable inductor, has an adjustable compensation inductor Lr value by adjusting its own length, and can quickly change the second matching value of the first capacitor module 100 including the first capacitor C1, thereby quickly achieving impedance matching.

[0029] It should be noted that, generally speaking, it is difficult to perform impedance matching between the RF power supply RS and the load RL by adjusting the first matching value of the first inductor L1. Therefore, when the impedance value of the load RL changes, it is necessary to quickly adjust the second matching value of the first capacitor module 100 to perform impedance matching between the RF power supply RS and the load RL.

[0030] In one or more embodiments, the compensation inductor Lr is a spiral coil-type adjustable length inductor, the compensation inductor Lr includes multiple turns of coils, the value of the compensation inductor Lr is related to the length of the compensation inductor Lr, the coil radius and the number of coils, and the length of the compensation inductor Lr is greater than or equal to 0.8 times the coil radius.

[0031] Therefore, the impedance matcher 10 in the present application can adjust the length of the compensation inductor Lr by adopting a spiral coil-type adjustable length inductor, so that the length of the compensation inductor Lr is greater than or equal to 0.8 times the coil radius, which can further ensure the accuracy of the compensation inductor Lr value.

[0032] Among them, the compensation inductance Lr value of the compensation inductance Lr is 10πr 2 μN 2 / (9r+10l), where π is the pi, μ is the air permeability, r is the coil radius of the compensating inductor Lr, N is the number of coils of the compensating inductor Lr, that is, the number of coil turns of the compensating inductor Lr, and l is the length of the compensating inductor Lr. Wherein, pi π and the air permeability μ are both constants. Therefore, the value of the compensating inductor Lr is related to the coil radius r, the number of coils N and the length l of the compensating inductor Lr, and when l≥0.8r, the value of the compensating inductor Lr calculated according to the coil radius r, the number of coils N and the length l of the compensating inductor Lr is closer to the real inductance value of the compensating inductor Lr.

[0033] In one or more embodiments, when the length of the compensation inductor Lr increases, the value of the compensation inductor Lr decreases so that the second matching value decreases; when the length of the compensation inductor Lr decreases, the value of the compensation inductor Lr increases so that the second matching value increases.

[0034] It should be noted that the second matching value decreases or increases, that is, the capacitive value presented by the second matching value decreases or increases accordingly.

[0035] Therefore, the impedance matcher 10 in the present application can increase or decrease the length of the compensation inductor Lr within a certain range as required, thereby making the second matching value correspond or increase.

[0036] Furthermore, when the length of the compensation inductor Lr is reduced to 0.8 times of the coil radius, the value of the compensation inductor Lr is maximum.

[0037] Specifically, the overall matching value of the maximum value of the compensation inductance Lr and the capacitance value of the first capacitor C1 is capacitive, so that the second matching value is capacitive, wherein, as the value of the compensation inductance Lr decreases, the capacitive value presented by the overall matching value of the compensation inductance Lr and the capacitance value of the first capacitor C1 increases, so that the second matching value is always capacitive.

[0038] Therefore, the impedance matcher 10 in the present application can set the length of the compensation inductance Lr and the coil radius as required, and provide a compensation inductance Lr value within a certain range.

[0039] See also Figure 3 , Figure 3 for Figure 1 The impedance matcher shown also includes a circuit diagram of a first adjustment module. Figure 3 As shown, the impedance matcher 10 further includes a first adjustment module 200, which is connected to the compensation inductor Lr. The first adjustment module 200 is used to adjust the length of the compensation inductor Lr to adjust the compensation inductor Lr value of the compensation inductor Lr.

[0040] Therefore, the impedance matcher 10 in the present application is connected to the compensation inductor Lr by setting the first adjustment module 200 to adjust the length of the compensation inductor Lr, thereby adjusting the compensation inductance Lr value of the compensation inductor Lr.

[0041] like Figure 1 , Figure 2 , Figure 3 As shown, the first inductor L1 is connected between the RF power supply RS and the load RL, one end of the first capacitor C1 is connected to the connection point between the first inductor L1 and the RF power supply RS, and the other end of the first capacitor C1 is grounded GND. The first end A of the compensation inductor Lr is connected to one end or the other end of the first capacitor C1 through a rigid connection line, the second end B of the compensation inductor Lr is grounded GND through a flexible connection line, and the first adjustment module 200 is connected to the second end B of the compensation inductor Lr. The first adjustment module 200 adjusts the distance from the second end B of the compensation inductor Lr to the first end A by adjusting the position of the second end B of the compensation inductor Lr, thereby adjusting the length of the compensation inductor Lr.

[0042] Specifically, Figure 1 As shown, the first end A of the compensation inductor Lr is connected to one end of the first capacitor C1 through a rigid connection line, and the second end B of the compensation inductor Lr is grounded GND through a flexible connection line, thereby being connected in series with the first capacitor C1; Figure 2 As shown, the first end A of the compensation inductor Lr is connected to the other end of the first capacitor C1 through a rigid connection line, and the second end B of the compensation inductor Lr is grounded GND through a flexible connection line, thereby being connected in parallel with the first capacitor C1.

[0043] Therefore, in the above-mentioned impedance matcher 10 in the present application, in order to achieve the adjustable length of the compensation inductor Lr, the second end B of the compensation inductor Lr is connected to the ground GND through a flexible connecting line, so as to adjust the distance from the second end B to the first end A of the compensation inductor Lr in the specific impedance matcher 10, thereby adjusting the length of the compensation inductor Lr.

[0044] Please also read Figure 4 , Figure 5 , Figure 4 for Figure 3 The impedance matcher shown also includes a circuit diagram of a second adjustment module, Figure 5 FIG. 1 is a circuit diagram of an impedance matcher in another embodiment of the present application. Figure 4 As shown, the first capacitor C1 is a capacitor with an adjustable capacitance value, so that the second matching value is also different according to the capacitance value of the first capacitor C1.

[0045] Therefore, the impedance matcher 10 in the present application can further reduce the delay of impedance matching by adjusting the capacitance value of the first capacitor C1 at the same time in order to change the second matching value of the first capacitor module 100 including the first capacitor C1 more quickly, thereby realizing impedance matching more quickly.

[0046] like Figure 4 As shown, the first capacitor C1 includes two plates, and the capacitance value of the first capacitor C1 changes according to the change of the distance between the two plates of the first capacitor C1. The impedance matcher 10 also includes a second adjustment module 400, and the second adjustment module 400 is connected to the first capacitor C1. The second adjustment module 400 is used to adjust the distance between the two plates of the first capacitor C1 to adjust the capacitance value of the first capacitor C1; or, Figure 5 As shown, the first capacitor C1 includes two plates, and the capacitance value of the first capacitor C1 changes according to the change of the distance between the two plates of the first capacitor C1. The impedance matcher 10 also includes a second adjustment module 400, and the second adjustment module 400 is connected to the first capacitor C1. The second adjustment module 400 is used to adjust the distance between the two plates of the first capacitor C1 to adjust the capacitance value of the first capacitor C1. In addition, the first capacitor module 100 also includes a first switch S1, which is connected in parallel with the first capacitor C1. The first switch S1 is alternately turned on or off with a first on-duty cycle, so that the capacitance value of the first capacitor C1 also changes according to the change of the first on-duty cycle.

[0047] In some embodiments, only the first switch S1 may be connected in parallel at both ends of the first capacitor module 100 , and the first switch S1 is alternately turned on or off with a first on-duty cycle, so that the capacitance value of the first capacitor C1 also changes according to the change of the first on-duty cycle.

[0048] Therefore, the impedance matching device 10 in the present application adopts Figure 4 The capacitance value of the first capacitor C1 can be adjusted by the method shown in Figure 5 The method shown can adjust the capacitance value of the first capacitor C1 in two ways at the same time, achieving a more refined adjustment. Alternatively, only Figure 5 The first switch S1 shown is used to adjust the capacitance value of the first capacitor C1, so that the capacitance value of the first capacitor C1 can be adjusted, thereby improving the diversity of design.

[0049] The larger the first on-duty cycle is, the smaller the capacitance value of the first capacitor C1 is; and the smaller the first on-duty cycle is, the larger the capacitance value of the first capacitor C1 is.

[0050] In one or more embodiments, the first adjustment module 200 and the second adjustment module 400 may both be rotary motors.

[0051] like Figure 3 , Figure 4 , Figure 5 As shown, the impedance matcher 10 also includes a control module 300, which is connected to at least the first adjustment module 200, the second adjustment module 400 and the first switch S1. The control module 300 is used to control the first adjustment module 200 to adjust the length of the compensation inductor Lr, and control the second adjustment module 400 to adjust the distance between the two plates of the first capacitor C1, and control the conduction or disconnection of the first switch S1.

[0052] like Figure 5 As shown, the first capacitor module 100 also includes a second switch S2, which is connected between a connection point between the first inductor L1 and the RF power supply RS and one end of the first capacitor C1; wherein the second switch S2 is alternately turned on or off at a second on-duty cycle, so that the second matching value is also different according to the second on-duty cycle, and the second matching value is an overall matching value of the compensation inductor Lr value and the capacitance value of the first capacitor C1 under the action of the second on-duty cycle.

[0053] Therefore, the impedance matcher 10 in the present application adjusts the second matching value of the first capacitor module 100 as a whole by setting the second switch S2 to be alternately turned on or off with a second conduction duty cycle.

[0054] The larger the second conduction duty cycle is, the larger the second matching value is; the smaller the second conduction duty cycle is, the smaller the second matching value is.

[0055] like Figure 5 As shown, the control module 300 is also connected to the second switch S2, and the control module 300 is also used to control the conduction or disconnection of the second switch S2.

[0056] In one or more embodiments, the switching frequency of the first switch S1 is the same as the switching frequency of the second switch S2, and the switching frequency of the first switch S1 and the switching frequency of the second switch S2 are both less than the frequency of the RF signal output by the RF power supply RS. The switching frequency of the first switch S1 and the switching frequency of the second switch S2 can both be 40%-90% of the frequency of the RF signal output by the RF power supply RS. Further, the switching frequency of the first switch S1 and the switching frequency of the second switch S2 can both be 80% of the frequency of the RF signal output by the RF power supply RS. This can make the variation range of the second matching value smaller.

[0057] In one or more embodiments, the control module 300 is further used to control the first switch S1 to be alternately turned on or off with a first on-duty ratio when the second switch S2 is in the on-state, or to control the first switch S1 to be continuously in the on-state or the off-state; and to control the first switch S1 to be continuously in the off-state when the second switch S2 is in the off-state, thereby reducing switching losses.

[0058] In one or more embodiments, the control module 300 may be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0059] The impedance matcher 10 of the present application, through the above structure, can adopt multiple adjustment methods to quickly change the second matching value of the first capacitor module 100 including the first capacitor C1, thereby quickly achieving impedance matching and effectively reducing the delay of impedance matching.

[0060] See also Figure 6 , Figure 6 FIG. 1 is a block diagram of a radio frequency power supply system in an embodiment of the present application. Figure 6 As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes a radio frequency power supply RS and the impedance matcher 10 in any of the aforementioned embodiments.

[0061] Please refer again Figure 1 .like Figure 1As shown, the impedance matcher 10 includes a first inductor L1 and a first capacitor module 100. Both the first inductor L1 and the first capacitor module 100 are used to connect to the output path of the RF power supply RS, and the first inductor L1 and the first capacitor module 100 have a first matching value and a second matching value, respectively. Among them, the first capacitor module 100 includes at least a first capacitor C1 and a compensation inductor Lr, the first capacitor C1 is connected to the output path of the RF power supply RS, the compensation inductor Lr is connected to the first capacitor C1, the compensation inductor Lr is a length-adjustable inductor, and the compensation inductor Lr adjusts its own length so that the compensation inductor Lr has an adjustable compensation inductor Lr value, and the second matching value is at least the overall matching value of the compensation inductor Lr value and the capacitance value of the first capacitor C1; the second matching value is capacitive and at least different according to the different compensation inductor Lr values. Among them, the first matching value of the first inductor L1 and the second matching value of the first capacitor module 100 are used to perform impedance matching between the RF power supply RS and the load RL.

[0062] The more specific structure of the impedance matcher 10 can refer to the relevant content of the impedance matcher 10 in any of the aforementioned embodiments, which will not be repeated here.

[0063] In one or more embodiments, the RF power source RS is used to output a RF signal to the load RL through the impedance matcher 10 , and the impedance matcher 10 is used to perform impedance matching between the RF power source RS and the load RL.

[0064] The impedance matcher 10 and the electronic device of the present application, through the above structure, can adopt multiple adjustment methods to quickly change the second matching value of the first capacitor module 100 including the first capacitor C1, thereby quickly achieving impedance matching and effectively reducing the delay of impedance matching.

[0065] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. An impedance matching device, characterized in that: include: A first inductor and a first capacitor module; the first inductor and the first capacitor module are both used to connect to the output path of the radio frequency power supply, and the first inductor and the first capacitor module have a first matching value and a second matching value respectively; The first capacitor module at least includes a first capacitor and a compensation inductor, the first capacitor is connected to the output path of the RF power supply, the compensation inductor is connected to the first capacitor, the compensation inductor is a length-adjustable inductor, and the compensation inductor adjusts its own length so that the compensation inductor has an adjustable compensation inductance value, and the second matching value is at least an overall matching value of the compensation inductance value and the capacitance value of the first capacitor; the second matching value is capacitive and is different at least according to the difference of the compensation inductance value; The first matching value of the first inductor and the second matching value of the first capacitor module are used to perform impedance matching between the RF power supply and the load.

2. The impedance matching box according to claim 1, characterized in that: The compensation inductor is a spiral coil-type length-adjustable inductor, which includes a multi-turn coil. The compensation inductor value is related to the length, coil radius and number of coils of the compensation inductor, and the length of the compensation inductor is greater than or equal to 0.8 times the coil radius.

3. The impedance matching box according to claim 2, characterized in that: When the length of the compensation inductor increases, the compensation inductor value decreases, so that the second matching value decreases; when the length of the compensation inductor decreases, the compensation inductor value increases, so that the second matching value increases.

4. The impedance matching box according to claim 3, characterized in that: When the length of the compensation inductor is reduced to 0.8 times the radius of the coil, the compensation inductor value is maximum.

5. The impedance matching box according to claim 1, characterized in that: The impedance matcher further includes a first adjustment module, which is connected to the compensation inductor and is used to adjust the length of the compensation inductor to adjust the compensation inductance value of the compensation inductor.

6. The impedance matching box according to claim 5, characterized in that: The first inductor is connected between the RF power source and the load, one end of the first capacitor is connected to a connection point between the first inductor and the RF power source, and the other end of the first capacitor is grounded; The first end of the compensation inductor is connected to one end or the other end of the first capacitor through a rigid connecting line, the second end of the compensation inductor is grounded through a flexible connecting line, the first adjustment module is connected to the second end of the compensation inductor, and the first adjustment module adjusts the distance from the second end to the first end of the compensation inductor by adjusting the position of the second end of the compensation inductor, thereby adjusting the length of the compensation inductor.

7. The impedance matching box according to claim 5, characterized in that: The first capacitor is a capacitor with adjustable capacitance value, so that the second matching value is different according to the capacitance value of the first capacitor.

8. The impedance matching box according to claim 7, characterized in that: The first capacitor includes two plates, and the capacitance value of the first capacitor changes according to the change of the distance between the two plates of the first capacitor. The impedance matcher also includes a second adjustment module, which is connected to the first capacitor and is used to adjust the distance between the two plates of the first capacitor to adjust the capacitance value of the first capacitor. and / or The first capacitor module includes a first switch connected in parallel with the first capacitor, and the first switch is alternately turned on or off with a first on-duty cycle, so that the capacitance value of the first capacitor also changes according to the change of the first on-duty cycle.

9. The impedance matching box according to claim 8, characterized in that: The first capacitor module also includes a second switch, which is connected between a connection point between the first inductor and the RF power supply and one end of the first capacitor; wherein the second switch is alternately turned on or off at a second on-duty cycle, so that the second matching value is also different according to the second on-duty cycle, and the second matching value is an overall matching value of the compensation inductance value and the capacitance value of the first capacitor under the effect of the second on-duty cycle.

10. A radio frequency power supply system, characterized in that: It comprises a radio frequency power supply and an impedance matcher as claimed in any one of claims 1 to 9.

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