Grinding wheel dressing device and grinding wheel dressing method

Abstract

The invention relates to a grinding wheel dressing device and a grinding wheel dressing method, the grinding wheel dressing device is used for dressing teeth of two grinding wheels in double-sided grinding equipment, and the grinding wheel dressing device comprises a first dressing wheel and a second dressing wheel which are respectively used for dressing the teeth of the two grinding wheels; the moving structure is used for controlling the first dressing wheel or the second dressing wheel to move; and the trimming structure is used for sending an instruction to the moving structure so as to control the first trimming wheel or the second trimming wheel to trim the teeth of the corresponding grinding wheel. And the teeth of the grinding wheel in the double-sided grinding equipment are trimmed, so that the silicon wafer is prevented from being damaged by the teeth of the grinding wheel, and the product yield is improved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor product manufacturing, and in particular to a grinding wheel dressing device and a grinding wheel dressing method. Background Art

[0002] In the early stage of replacing the new grinding wheel on the double-sided vertical grinding machine for silicon wafers, the grinding wheel marks on the surface of the silicon wafers produced continuously were heavy, the thickness of the silicon wafer damage layer exceeded 7μm, it was easy to cause scratches on the surface of the silicon wafers and the warpage of the silicon wafers fluctuated greatly, which could not meet the requirements of the subsequent processes well.

[0003] When the double-sided vertical grinder processes silicon wafers, the silicon wafers are placed upright in the grinding chamber, and the grinding wheels connected to the left and right spindles of the equipment are placed upright on both sides of the silicon wafers. The left and right grinding wheels rotate and feed in the direction close to the silicon wafers, thereby grinding and thinning the rotating silicon wafers to the specified thickness. The grinding wheel used in the double-sided vertical grinder is generally composed of two parts: the grinding wheel teeth and the disc-shaped metal carrier. The grinding wheel teeth are adhered to a circle of the disc. There is a glaze layer on the surface of the new grinding wheel teeth, and there may be burrs on the surface of the new grinding wheel teeth.

[0004] The processing principle of the double-sided vertical grinder for silicon wafers and the characteristics of the teeth of the new grinding wheel make it easy for the double-sided vertical grinder to cause poor silicon wafer surface and large fluctuations in silicon wafer warpage in the initial use of the new grinding wheel. Summary of the invention

[0005] In order to solve the above technical problems, the present invention provides a grinding wheel dressing device and a grinding wheel dressing method to solve the problem that the teeth of the grinding wheel cause poor grinding of silicon wafers.

[0006] In order to achieve the above-mentioned purpose, the technical solution adopted in the embodiment of the present invention is: a grinding wheel dressing device for dressing the teeth of two grinding wheels in a double-sided grinding device, comprising:

[0007] A first dressing wheel and a second dressing wheel are used to dress the teeth of the two grinding wheels respectively;

[0008] A moving structure, used for controlling the movement of the first dressing wheel or the second dressing wheel;

[0009] The trimming structure is used to send instructions to the moving structure to control the first trimming wheel or the second trimming wheel to trim the teeth of the corresponding grinding wheel.

[0010] Optionally, the first trimming wheel and the second trimming wheel are stacked into an integral structure, and a first separator is arranged between the first trimming wheel and the second trimming wheel.

[0011] Optionally, a first through hole is disposed at the center of the first trimming wheel and a first through hole is disposed at the center of the second trimming wheel, and a second through hole is disposed at the center of the first partition, and the first through hole and the second through hole cooperate to allow a fixing screw to pass through.

[0012] Optionally, a second separator is arranged on a side of the first trimming wheel away from the second trimming wheel, a third through hole is arranged at the center of the second separator, and the first through hole, the second through hole and the third through hole cooperate to allow a fixing screw to pass through.

[0013] Optionally, the first separator and the second separator have the same structure, the first separator includes a first boss and a second boss stacked together, the cross-sectional area of ​​the second boss is smaller than the cross-sectional area of ​​the second boss, and the second boss of the first separator can be inserted into the first through hole of the second trimming wheel, and the second boss of the second separator can be inserted into the first through hole of the first trimming wheel.

[0014] Optionally, the movable structure includes a side of the second dressing wheel away from the first dressing wheel, the movable structure includes a shell, and a driving part and a transmission part arranged in the shell, and the transmission part is connected to the dressing wheel to drive the dressing wheel to move.

[0015] Optionally, the transmission part includes a transmission gear, and the fixing screw is reused as a transmission shaft that is transmission-connected to the transmission gear.

[0016] Optionally, a third separator is provided between the housing and the second finishing wheel.

[0017] Optionally, in the axial direction of the trimming wheel, the thickness of the first trimming wheel is greater than a first dimension and smaller than a second dimension, the first dimension is the width of the tooth, and the second dimension is the sum of the width of the tooth and twice the gap value between adjacent teeth.

[0018] Optionally, the first dressing wheel and the second dressing wheel are both made of ceramic.

[0019] The embodiment of the present invention further provides a grinding wheel dressing method, which uses the above-mentioned grinding wheel dressing device to perform dressing.

[0020] The first dressing wheel and the second dressing wheel are stacked to form an integral structure;

[0021] The grinding wheel dressing method comprises:

[0022] The first dressing wheel and the second dressing wheel are stacked to form an integral structure;

[0023] The grinding wheel dressing method comprises:

[0024] bringing the first dressing wheel into contact with the teeth to be ground of the first grinding wheel;

[0025] Dressing of the teeth of the grinding wheel;

[0026] Returning the first dressing wheel to an initial position;

[0027] Making the second dressing wheel contact with the teeth to be ground of the corresponding grinding wheel;

[0028] Reshape the teeth of the grinding wheel.

[0029] The beneficial effects of the present invention are as follows: the grinding wheel dressing device of the present invention can dress the teeth of the grinding wheel in the double-sided grinding equipment, thereby avoiding damage to the silicon wafer caused by the teeth of the grinding wheel and improving the product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 An exploded schematic diagram showing a grinding wheel dressing device in an embodiment of the present invention;

[0031] Figure 2 A schematic diagram showing a first partition member in an embodiment of the present invention;

[0032] Figure 3 A schematic diagram showing the first trimming wheel in contact with the corresponding tooth in an embodiment of the present invention;

[0033] Figure 4 A schematic diagram showing the contact between the second dressing wheel and the corresponding tooth in the embodiment of the present invention;

[0034] Figure 5 A schematic diagram showing a state in which the grinding wheel dressing device according to an embodiment of the present invention is in an initial position;

[0035] Figure 6 A schematic diagram showing a state in which the first trimming wheel rises to be flush with the corresponding tooth;

[0036] Figure 7 A schematic diagram showing the first dressing wheel in contact with the corresponding tooth;

[0037] Figure 8 A schematic diagram showing the second dressing wheel in contact with the corresponding tooth. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0039] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0040] The features such as "parallel", "perpendicular", and "same" used in the embodiments of the present disclosure include the features such as "parallel", "perpendicular", and "same" in a strict sense, as well as the cases where "approximately parallel", "approximately perpendicular", "approximately the same", etc. include certain tolerances, taking into account the tolerances associated with the measurement of specific quantities (e.g., the limitations of the measurement system), and represent the acceptable deviation range for a specific value determined by ordinary technicians in the field. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the value.

[0041] As the diameter of silicon wafers increases and the feature size of integrated circuits decreases, higher requirements are placed on the flatness and cleanliness of the silicon wafer surface, and higher requirements are also placed on the degree of damage to the silicon wafer surface. Double-sided grinding refers to grinding both sides of a silicon wafer at the same time and producing a silicon wafer with a highly flat surface. During grinding, a silicon wafer clamping device is used to hold the semiconductor silicon wafer. The clamping device usually includes a pair of hydrostatic pads. The pair of hydrostatic pads are configured to simultaneously apply fluid pressure to both sides of the silicon wafer placed therebetween, thereby supporting the silicon wafer in a non-contact manner, thereby reducing damage to the silicon wafer that may be caused by physical clamping, and allowing the silicon wafer to move (rotate) in a tangential direction relative to the surface of the hydrostatic pad with less friction. The grinding device used to grind the silicon wafer in the vertical grinding device includes a pair of grinding wheels arranged opposite to each other, and the pair of grinding wheels grind the two sides of the silicon wafer simultaneously according to a predetermined grinding track when the silicon wafer is supported by the pair of hydrostatic pads.

[0042] The grinding wheel in a double-sided vertical grinder is generally composed of two parts: grinding wheel teeth and a disc-shaped metal carrier. The grinding wheel teeth are distributed in a ring shape on the carrier. The cleanliness and flatness of the grinding wheel tooth surface have a great influence on the grinding quality of the silicon wafer. For example, there is still a glaze layer on the surface of the grinding wheel after initial replacement, and there may be burrs on the surface of the grinding wheel teeth.

[0043] refer to Figure 1-Figure 8 In view of the above problems, the present embodiment provides a grinding wheel dressing device, a grinding wheel dressing device for dressing the teeth 04 of two grinding wheels 03 in a double-sided grinding device, comprising:

[0044] The first dressing wheel 08 and the second dressing wheel 10 are used to dress the teeth 04 of the two grinding wheels 03 respectively;

[0045] A moving structure 12, used for controlling the movement of the first dressing wheel 08 or the second dressing wheel 10;

[0046] The dressing structure is used to send instructions to the moving structure 12 to control the first dressing wheel 08 or the second dressing wheel 10 to dress the teeth 04 of the corresponding grinding wheel 03 .

[0047] The grinding wheel dressing device provided in this embodiment is used to dress the teeth 04 of the grinding wheel 03 in the double-sided grinding equipment, thereby avoiding poor grinding of silicon wafers due to problems such as cleanliness on the surface of the teeth 04 and improving product yield.

[0048] If the same dressing wheel is used to dress the two grinding wheels 03, and the two grinding wheels 03 are dressed at the same time, the difficulty of adjusting the distance between the dressing wheel and the teeth 04 of the two grinding wheels 03 increases. If the two grinding wheels 03 are dressed successively, after one grinding wheel 03 is dressed, some impurities such as particles will inevitably remain on the dressing wheel, that is, after the dressing wheel is dressed once, its dressing surface may be contaminated. If the other grinding wheel 03 is continued to be dressed at this time, the dressing quality of the teeth 04 of the other grinding wheel 03 will be affected. A cleaning step can also be added between the two dressing processes, which can improve the dressing quality of the two grinding wheels 03, but it increases the dressing time and the dressing cost.

[0049] In this embodiment, the first dressing wheel 08 is used to dress one of the two grinding wheels 03, and the second dressing wheel 10 is used to dress the other of the two grinding wheels 03, that is, the two grinding wheels 03 are not dressed with the same dressing wheel, which can effectively ensure the dressing quality of the surfaces of the teeth 04 of the two grinding wheels 03.

[0050] In some embodiments, the moving structure 12 includes a horizontal moving unit, a lifting unit, and a rotating unit.

[0051] In some embodiments, the lifting unit and the horizontal moving unit are both implemented by a screw, a gear, and a motor combination, and the rotating unit is implemented by a motor. The specific structural setting can refer to the setting of the moving structure 12 in the related art, which will not be repeated here.

[0052] In some embodiments, the moving unit, the lifting unit, and the rotating unit can be controlled independently without interfering with each other.

[0053] In some embodiments, when trimming the teeth 04 of the two grinding wheels 03, the moving structure 12 can execute the command sent by the trimming structure to control the first trimming wheel 08 to move to a preset position, so that the first trimming wheel 08 is at the same height as the tooth 04 to be trimmed (the same distance from the initial position of the first trimming wheel 08), and then the moving structure 12 executes the command sent by the trimming structure to control the first trimming wheel 08 to feed in a direction close to the tooth 04 to be trimmed, so as to achieve the trimming of the teeth 04 of the grinding wheel 03.

[0054] In some embodiments, when trimming the teeth 04 of two grinding wheels 03, the trimming structure sends a command to the moving structure 12, and the moving structure 12 executes the command sent by the trimming structure, controls the first trimming wheel 08 to move to a preset position to contact the tooth 04 to be trimmed of one grinding wheel 03, and then controls the first trimming wheel 08 to feed in a direction close to the tooth 04 to be modified, and controls the first trimming wheel 08 to rotate, so as to trim the tooth 04 to be modified. After the modification of the tooth 04 of the grinding wheel 03 is completed, the first trimming wheel 08 is controlled to return to the initial position. The moving structure 12 executes the command sent by the trimming structure, controls the second trimming wheel 10 to move to a preset position to contact the tooth 04 to be trimmed of the other grinding wheel 03, and then controls the second trimming wheel 10 to feed in a direction close to the tooth 04 to be modified, and controls the second trimming wheel 10 to rotate, so as to trim the tooth 04 to be modified. After the teeth 04 of the grinding wheel 03 are corrected, the second dressing wheel 10 is controlled to return to the initial position, and the dressing is completed.

[0055] It should be noted that the moving structure 12 executes the command sent by the trimming structure to control the first trimming wheel 08 to move to a preset position so as to contact the tooth 04 to be trimmed of a grinding wheel 03. Here, there is zero pressure contact between the first trimming wheel 08 and the tooth 04 to be trimmed, which can also be called a fit. In order to achieve this operation, the first trimming wheel 08 can be controlled to contact the tooth 04 to be trimmed, and then move a preset distance, such as 20um, in the direction away from the tooth 04 to be trimmed. It is also possible to establish a coordinate system with the initial position of the first trimming wheel 08 as the zero point, and establish the positions of the first trimming wheel 08 and the corresponding trimming surface of the tooth 04 of the grinding wheel 03 in the same coordinate system, so as to obtain the moving path of the first trimming wheel 08 to the preset position.

[0056] It should be noted that the moving structure 12 executes the command sent by the trimming structure to control the first trimming wheel 08 to move to a preset position so as to contact the tooth 04 to be trimmed of a grinding wheel 03. Afterwards, the moving structure 12 controls the first trimming wheel 08 to rotate while feeding in a direction close to the tooth 04 to be trimmed, that is, the tooth 04 is trimmed. During this trimming process, the feeding speed can be set to 10 μm / min, the rotation speed can be set to 100 r / min, the rotation speed can be set to 250 r, or the trimming time can be set to 30 min, but it is not limited thereto.

[0057] It should be noted that the dressing process of the second dressing wheel 10 on the corresponding teeth 04 of the grinding wheel 03 is the same as the dressing process of the first dressing wheel 08 on the corresponding teeth 04 of the grinding wheel 03, which will not be repeated here.

[0058] In an exemplary embodiment, the first dressing wheel 08 and the second dressing wheel 10 are stacked into an integral structure, and a first separator 071 is disposed between the first dressing wheel 08 and the second dressing wheel 10 .

[0059] The moving structure 12 controls the first dressing wheel 08 and the second dressing wheel 10 to move synchronously. Since the first dressing wheel 08 and the stacked dressing wheel are used to dress the teeth 04 of the corresponding grinding wheel 03 respectively, a first separator 071 is provided between the first dressing wheel 08 and the second dressing wheel 10 to separate them so as to avoid mutual interference. When the first dressing wheel 08 is used for dressing, the position of the first dressing wheel 08 is controlled to correspond to the position of the teeth 04 of the corresponding grinding wheel 03. When the second dressing wheel 10 is used for dressing, the position of the second dressing wheel 10 is controlled to correspond to the position of the teeth 04 of the corresponding grinding wheel 03.

[0060] In an exemplary embodiment, a first through hole is disposed at the center of the first trimming wheel 08 and the center of the second trimming wheel 10 , a second through hole is disposed at the center of the first partition 071 , and the first through hole and the second through hole cooperate to allow the fixing screw 06 to pass through.

[0061] In an exemplary embodiment, a second separator 072 is provided on a side of the first dressing wheel 08 away from the second dressing wheel 10, a third through hole 103 is provided at the center of the second separator 072, and the first through hole, the second through hole, and the third through hole 103 cooperate to allow the fixing screw 06 to pass through.

[0062] In an exemplary embodiment, the first separator 071 and the second separator 072 have the same structure, the first separator 071 includes a first boss 101 and a second boss 102 stacked together, the cross-sectional area of ​​the second boss 102 is smaller than the cross-sectional area of ​​the second boss 102, and the second boss 102 of the first separator 071 can be inserted into the first through hole of the second dressing wheel 10, and the second boss 102 of the second separator 072 can be inserted into the first through hole of the first dressing wheel 08.

[0063] In an exemplary embodiment, taking the first partition 071 as an example, the radius B or E of the second through hole is 5 mm, the radius A of the first boss 101 is 45 mm, the thickness C of the first boss 101 in the axial direction is 15 mm, the radius D of the second boss 102 is 25 mm, and the thickness C of the second boss 102 in the axial direction is 10 mm.

[0064] In an exemplary embodiment, the movable structure 12 includes a side of the second dressing wheel 10 away from the first dressing wheel 08, and the movable structure 12 includes a shell, and a driving part and a transmission part arranged in the shell, and the transmission part is connected to the dressing wheel to drive the dressing wheel to move.

[0065] In an exemplary embodiment, the transmission part includes a transmission gear, and the fixing screw 06 is reused as a transmission shaft that is transmission-connected to the transmission gear.

[0066] Exemplarily, a third partition 073 is disposed between the housing and the second dressing wheel 10 . A fourth through hole is disposed at the center of the third partition 073 to facilitate connection with a transmission part in the moving structure 12 .

[0067] It should be noted that the first separator 071, the first dressing wheel 08, the second separator 072, the second dressing wheel 10, the third separator 073 and the movable structure 12 are all detachably connected together. Each part of the structure can be disassembled and replaced when it is damaged, cracked, or expires. There is no need to replace the entire dressing device, thereby reducing costs.

[0068] In an exemplary embodiment, in the axial direction of the trimming wheel, the thickness of the first trimming wheel 08 is greater than a first dimension and less than a second dimension, the first dimension being the width of a single tooth 04, and the second dimension being the sum of the width of a single tooth 04 and twice the gap value between adjacent teeth 04. In this way, during trimming, the surface of the tooth 04 can be completely covered without affecting the trimming of the teeth 04 adjacent to the currently trimmed tooth 04, thereby improving the trimming quality.

[0069] In an exemplary embodiment, the material of the first dressing wheel 08 is resin-bonded silicon carbide ceramic, specifically, the first dressing wheel 08 is a hollow cylindrical 1500 mesh ceramic wheel made of resin-bonded silicon carbide, and the material of the second dressing wheel 10 is resin-bonded silicon carbide ceramic, specifically, the first dressing wheel 08 is a hollow cylindrical 1500 mesh ceramic wheel made of resin-bonded silicon carbide.

[0070] In an exemplary embodiment, the outer diameter of the first dressing wheel 08 is 130 mm, the inner diameter of the first dressing wheel 08 is 50 mm, the outer diameter of the second dressing wheel 10 is 130 mm, and the inner diameter of the first dressing wheel 08 is 50 mm, but the present invention is not limited thereto. The first dressing wheel 08 and the second dressing wheel 10 have the same structure, so that the first dressing wheel 08 and the second dressing wheel 10 can dress the teeth 04 of the corresponding grinding wheel 03 respectively without interference.

[0071] It should be noted that the grinding wheel dressing device can be arranged at the bottom of the double-sided grinding equipment to avoid interference with the grinding wheel 03.

[0072] The embodiment of the present invention further provides a grinding wheel dressing method, which uses the above-mentioned grinding wheel dressing device to perform dressing, setting the left grinding wheel as the first grinding wheel and the right grinding wheel as the second grinding wheel;

[0073] The first dressing wheel 08 and the second dressing wheel 10 are stacked and arranged as an integral structure;

[0074] The grinding wheel dressing method comprises:

[0075] Controlling the grinding wheel dressing device to move so that the first dressing wheel 08 is in contact with the tooth 04 to be ground of the first grinding wheel;

[0076] trimming the teeth 04 of the first grinding wheel 03;

[0077] Controlling the grinding wheel dressing device to move so that the grinding wheel dressing device returns to an initial position;

[0078] Controlling the grinding wheel dressing device to move so that the second dressing wheel 10 is in contact with the tooth 04 to be ground of the second grinding wheel;

[0079] The teeth 04 of the second grinding wheel are trimmed.

[0080] Specifically, after the new grinding wheel is replaced in the double-sided vertical grinding machine for silicon wafers, the teeth 04 of the grinding wheel 03 need to be trimmed. Figure 5 ), the grinding wheel dressing device is located below the grinding wheel 03. First, the first dressing wheel 08 is controlled to rise until the center line of the first dressing wheel 08 is flush with the center line of the tooth 04 of the left grinding wheel 03 (it should be noted that the first dressing wheel 08 and the second correction wheel move synchronously) (such as Figure 6 Then, the first dressing wheel 08 slowly moves to the left and almost contacts the tooth 04 of the left grinding wheel 03 (as shown in FIG. Figure 7 As shown in FIG. 1 , the first dressing wheel 08 is also referred to as the first dressing wheel 08, which is engaged with the teeth 04 of the left grinding wheel 03. At this time, the left grinding wheel 03 rotates, and the first dressing wheel 08 slowly feeds to the left while rotating, and the first dressing wheel 08 stops after rotating to a preset number of revolutions or a preset time.

[0081] The feeding speed of the grinding wheel dressing device in this embodiment is 10 μm / min, the rotation speed is 100 r / min, the rotation speed is 250 r, or the dressing time is 30 min.

[0082] After the left grinding wheel 03 is finished being trimmed, the trimming device must return to its initial position. Then the second correction wheel is controlled to rise until the center line of the second trimming wheel 10 is aligned with the center line of the teeth 04 of the right grinding wheel 03, and then the trimming device is driven to move slowly to the right to match the right grinding wheel 03 (such as Figure 8 As shown), the right grinding wheel 03 is then dressed, and after the dressing is completed, the grinding wheel dressing device returns to the initial position.

[0083] There are a few points to note:

[0084] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure, and other structures may refer to the general design.

[0085] (2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced, that is, these drawings are not drawn according to the actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or there may be intermediate elements.

[0086] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0087] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A grinding wheel dressing device for dressing the teeth of two grinding wheels in a double-sided grinding device, characterized in that: include: A first dressing wheel and a second dressing wheel are used to dress the teeth of the two grinding wheels respectively; A moving structure, used for controlling the movement of the first dressing wheel or the second dressing wheel; The trimming structure is used to send instructions to the moving structure to control the first trimming wheel or the second trimming wheel to trim the teeth of the corresponding grinding wheel.

2. The grinding wheel dressing device according to claim 1, characterized in that: The first trimming wheel and the second trimming wheel are stacked to form an integral structure, and a first separator is arranged between the first trimming wheel and the second trimming wheel.

3. The grinding wheel dressing device according to claim 2, characterized in that: A first through hole is disposed at the center of the first trimming wheel and the center of the second trimming wheel, a second through hole is disposed at the center of the first partition, and the first through hole and the second through hole cooperate to allow a fixing screw to pass through.

4. The grinding wheel dressing device according to claim 3, characterized in that: A second separator is arranged on a side of the first trimming wheel away from the second trimming wheel, a third through hole is arranged at the center of the second separator, and the first through hole, the second through hole and the third through hole cooperate to allow a fixing screw to pass through.

5. The grinding wheel dressing device according to claim 4, characterized in that: The first separator and the second separator have the same structure. The first separator includes a first boss and a second boss stacked together. The cross-sectional area of ​​the second boss is smaller than the cross-sectional area of ​​the second boss. The second boss of the first separator can be inserted into the first through hole of the second trimming wheel, and the second boss of the second separator can be inserted into the first through hole of the first trimming wheel.

6. The grinding wheel dressing device according to claim 3, characterized in that: The movable structure includes a side of the second trimming wheel away from the first trimming wheel, and the movable structure includes a shell, and a driving part and a transmission part arranged in the shell, and the transmission part is connected to the trimming wheel to drive the trimming wheel to move.

7. The grinding wheel dressing device according to claim 6, characterized in that: The transmission part includes a transmission gear, and the fixing screw is reused as a transmission shaft that is transmission-connected to the transmission gear.

8. The grinding wheel dressing device according to claim 6, characterized in that: A third separator is disposed between the housing and the second dressing wheel.

9. The grinding wheel dressing device according to claim 1, characterized in that: In the axial direction of the dressing wheel, the thickness of the first dressing wheel is greater than a first dimension and smaller than a second dimension, the first dimension is the width of the tooth, and the second dimension is the sum of the width of the tooth and twice the gap value between adjacent teeth.

10. The grinding wheel dressing device according to claim 1, characterized in that: The first dressing wheel and the second dressing wheel are both made of ceramic.

11. A grinding wheel dressing method, characterized in that: The grinding wheel dressing device according to any one of claims 1 to 10 is used for dressing. The first dressing wheel and the second dressing wheel are stacked to form an integral structure; The grinding wheel dressing method comprises: Making the first dressing wheel contact with the teeth to be ground of the grinding wheel; Dressing of the teeth of the grinding wheel; Returning the first dressing wheel to an initial position; Making the second dressing wheel contact with the teeth to be ground of the corresponding grinding wheel; Reshape the teeth of the grinding wheel.

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