Deformation correcting and adjusting device and method for disc face of polishing machine

Abstract

The invention relates to a deformation correcting and adjusting device and method for a polishing machine disc face, the device comprises a lower disc tray, a lower disc, an adjusting disc, an adjusting tray and an adjusting tray fixing disc, the lower disc tray, the lower disc, the adjusting disc, the adjusting tray and the adjusting tray fixing disc are sequentially installed from bottom to top, and a plurality of adjusting air cylinders are arranged on the adjusting tray fixing disc; the adjusting air cylinder is provided with an air cylinder connecting rod, the air cylinder connecting rod is fixedly installed at the movable end of the adjusting air cylinder, and the air cylinder connecting rod penetrates through the adjusting tray to be fixedly connected with the adjusting disc. A plurality of distance sensors are arranged on the surface, facing the adjusting disc, of the lower disc, and the distance sensors are used for detecting the distance between the lower disc and the adjusting disc. According to the method, the position, corresponding to the position needing to be corrected, of the adjusting disc generates deformation displacement, so that different deformation of the disc face is dynamically corrected, the flatness is higher, and the flatness is improved. And the grinding flatness error of the workpiece is reduced.

Description

Technical Field

[0001] The invention relates to a disc surface adjustment of a polishing machine, and in particular to a deformation correction and adjustment device and method for the disc surface of a polishing machine. Background Art

[0002] At present, most polishing machines on the market use grinding. During the grinding and polishing process, the friction between the upper plate and the workpiece generates heat, which causes the thermal effect, resulting in deformation of the upper plate surface. Due to the high process requirements for workpiece processing, the deformation caused by the thermal effect will make the two sides of the plate surface concave upward or convex downward relative to the middle, thus affecting the flatness of the workpiece, surface accuracy (TTV) and other product accuracy;

[0003] Therefore, there is an urgent need for a correction device that can overcome the deformation of the disk surface caused by the thermal effect of the disk surface during the grinding and / or polishing process to ensure the accuracy of the workpiece during the grinding and / or polishing process. Summary of the invention

[0004] The technical problem to be solved by the present invention is to overcome the defect of the prior art that the disc surface is easily deformed due to thermal effect, which affects the processing accuracy of the workpiece, and provide a deformation correction and adjustment device for the polishing machine disc surface.

[0005] The technical solution adopted by the present invention to solve its technical problem is that the present invention provides a deformation correction and adjustment device for the polishing machine disc surface, the deformation correction and adjustment device includes a lower disc tray, a lower disc, an adjustment disc, an adjustment disc, and an adjustment disc fixing disc, wherein the lower disc tray, the lower disc, the adjustment disc, the adjustment disc, and the adjustment disc fixing disc are installed in sequence from bottom to top in the vertical direction, and an adjustment cylinder is arranged on the adjustment disc fixing disc, and the adjustment cylinder can pass through the adjustment disc and be fixedly connected to the adjustment disc; a distance sensor is arranged on the surface of the lower disc facing the adjustment disc, and the distance sensor is used to detect the distance between the lower disc and the adjustment disc.

[0006] Preferably, a plurality of the adjusting cylinders are provided, and the plurality of adjusting cylinders are uniformly arranged circumferentially on one side of the adjusting tray fixing plate close to the outer edge.

[0007] Preferably, a plurality of the distance sensors are provided, and the plurality of distance sensors are respectively arranged at different radial positions of the lower plate and the interval angles between the plurality of distance sensors are the same.

[0008] Preferably, the deformation correction and adjustment device further includes an electric proportional valve and a PLC control device;

[0009] The plurality of adjusting cylinders are electrically connected to the electrical proportional valve to adjust the output pressure of the adjusting cylinder according to the distance between the lower plate and the adjusting plate detected by the distance sensor. The electrical proportional valve and the distance sensor are electrically connected to the PLC control device.

[0010] Preferably, the deformation correction adjustment device also includes a cylinder connecting rod, which is fixedly mounted on the movable end of the adjustment cylinder. The adjustment cylinder is fixedly connected to the adjustment disk through the adjustment tray via the cylinder connecting rod to adjust the disk surface deformation of the adjustment disk.

[0011] Preferably, the workpiece is placed between the lower plate and the adjustment plate, and the lower plate and the adjustment plate rotate in opposite directions. Any distance sensor is located at a radial position of the lower plate and rotates with the lower plate to circumferentially detect the distance between the adjustment plate and the lower plate.

[0012] The present invention also provides an adjustment method for a deformation correction adjustment device of a polishing machine disc surface, wherein the adjustment method for the deformation correction adjustment device is implemented based on any one of the above-mentioned deformation correction adjustment devices, and the adjustment method comprises:

[0013] S1, the workpiece is placed between the adjustment plate and the lower plate, the polishing machine plate surface rotates, and the distance sensor arranged on the lower plate detects the distance between the adjustment plate and the lower plate at different radial positions;

[0014] S2, determining the position of the adjustment plate that needs to be corrected according to the distance between the adjustment plate and the lower plate detected by the plurality of distance sensors;

[0015] S3, confirming the cylinder adjustment amount of the corresponding adjustment cylinder according to the deformation amount of the adjustment disk at the corresponding position of each distance sensor;

[0016] S4. Adjust the pressure of the adjustment cylinder according to the cylinder adjustment amount.

[0017] Preferably, the S2 step comprises:

[0018] According to the distance detection result of the distance sensor, determining the corresponding position of any one of the distance sensors as the position of the adjustment plate that needs to be corrected;

[0019] According to the position of the adjusting disk that needs to be corrected, the adjusting cylinder that needs to be adjusted at the corresponding position is confirmed.

[0020] Preferably, the S4 step comprises:

[0021] According to the cylinder adjustment amount of the adjusting cylinder, the pressure output by the adjusting cylinder is controlled by an electrical proportional valve to adjust the deformation amount at the corresponding position of the adjusting disk.

[0022] Preferably, a PID control module is provided in the PLC control device;

[0023] The adjustment method also includes: inputting the distance between the adjustment plate and the lower plate detected by each of the distance sensors into the PID control module, the PID control module generating a cylinder adjustment amount that needs to be adjusted for the adjustment cylinder according to the distances detected by each of the distance sensors, the PID control module outputting the generated cylinder adjustment amount to the PLC control device, and adjusting the output of the adjustment cylinder through the electrical proportional valve electrically connected to the PLC control device.

[0024] In summary, the present invention has the following beneficial technical effects:

[0025] The machine tool provided by the present application detects the distance between the adjustment plate and the lower plate at different radial positions in real time through distance sensors arranged at different positions during the process of grinding and / or polishing the workpiece; determines the position of the adjustment plate that needs to be corrected and the corresponding cylinder adjustment amount according to the change in the spacing at different positions; determines the adjustment cylinder corresponding to the corrected position according to the position of the adjustment plate that needs to be corrected; and then controls the force delivered to the adjustment cylinder through an electrical proportional valve according to the corresponding cylinder adjustment amount, so that the corresponding position of the adjustment plate that needs to be corrected produces a deformation displacement, thereby dynamically correcting the different deformations of the plate surface, making the flatness higher and reducing the flatness error of the workpiece grinding. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a cross-sectional view of an embodiment of a deformation correction and adjustment device for a polishing machine disc surface of the present invention;

[0027] Figure 2 The present invention is a top view of the lower disc of an embodiment of a deformation compensation and adjustment device for a polishing machine disc surface according to the present invention.

[0028] Description of reference numerals:

[0029] 1.1, adjusting plate; 1.2, adjusting pallet; 1.3, cylinder connecting rod; 1.4, adjusting pallet fixing plate; 1.5, cylinder; 1.6, lower plate pallet; 1.7, lower plate; 1.8, workpiece; 1.9, distance sensor; 1.9A, first distance sensor; 1.9B, second distance sensor; 1.9C, third distance sensor. DETAILED DESCRIPTION

[0030] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0031] Reference Figure 1 This embodiment includes a lower plate tray 1.6, a lower plate 1.7, an adjustment plate 1.1, an adjustment plate 1.2, and an adjustment plate fixing plate 1.4. The lower plate tray 1.6 serves as the installation reference of the lower plate 1.7. The workpiece 1.8 to be processed is placed on the lower plate 1.7. The adjustment plate 1.1, the adjustment plate 1.2, and the adjustment plate fixing plate 1.4 are sequentially arranged above the lower plate 1.7. The adjustment plate 1.1 is fixedly connected to the adjustment plate 1.2. The adjustment plate fixing plate 1.4 is provided with a plurality of adjustment cylinders 1.5 facing the direction of the adjustment plate 1.1. The movable end of the adjustment cylinder 1.5 is fixedly provided with a cylinder connecting rod 1.3, and the cylinder connecting rod 1.3 passes through the adjustment plate 1.2 and is fixedly connected to the adjustment plate 1.1. A plurality of distance sensors 1.9 are arranged on the surface of the lower plate 1.7 facing the adjustment plate 1.1. The distance sensors 1.9 are used to detect the distance between the lower plate 1.7 and the adjustment plate 1.1.

[0032] In addition, the axes of the lower plate tray 1.6, lower plate 1.7, adjustment plate 1.1, adjustment plate 1.2, and adjustment plate fixing plate 1.4 are connected in a straight line, and the rotation directions of the lower plate tray 1.6, lower plate 1.7 and the adjustment plate 1.1, adjustment plate 1.2, and adjustment plate fixing plate 1.4 are opposite.

[0033] Specifically, 16 adjusting cylinders 1.5 are provided and are evenly distributed in a circle on one side of the adjusting tray fixing plate 1.4 close to the outer edge. At the same time, in this embodiment, the 16 adjusting cylinders 1.5 are controlled by two electrical proportional valves, and one electrical proportional valve uniformly controls 8 adjusting cylinders 1.5, and there is another adjusting cylinder 1.5 controlled by another electrical proportional valve between every two adjusting cylinders 1.5, that is, the electrical proportional valves of two adjacent adjusting cylinders 1.5 are different. This allows the adjusting cylinder 1.5 to adjust the adjusting plate 1.1 more accurately. In another embodiment, the 16 adjusting cylinders 1.5 are uniformly controlled by one electrical proportional valve, which is less expensive than two electrical proportional valves, and can also adjust the adjusting plate 1.1, with a higher cost-performance ratio.

[0034] Reference Figure 2 In one embodiment, at least three distance sensors 1.9 are provided, and are respectively provided at positions of different radii of the lower plate 1.7, and the interval angles between the multiple distance sensors 1.9 are the same. For example, the first distance sensor 1.9A is provided at a distance of 10 cm from the center of the lower plate 1.7, the second distance sensor 1.9B is provided at a distance of 20 cm from the center of the lower plate 1.7, and the third distance sensor 1.9C is provided at a distance of 30 cm from the center of the lower plate 1.7, and the arc angles between the respective distance sensors 1.9 are the same.

[0035] Specifically, before the detection, one of the multiple distance sensors 1.9 needs to be used as the basis for the detection. And no matter which distance sensor 1.9 is set as the basis, the effect is the same. At this time, the entire setting is not started, and there is no deformation caused by thermal effects. If the detection is started, the distance sensor 1.9 will continue to perform real-time detection. At the same time, the detection of the distance sensor 1.9 is not a single point, but three rings composed of countless points on the adjustment disk 1.1 at a distance of 10cm, 20cm, and 30cm from the center of the circle.

[0036] The present invention also provides an adjustment method for a deformation correction adjustment device of a polishing machine disc surface. The adjustment method for the deformation correction adjustment device is implemented based on the above-mentioned deformation correction adjustment device, and the adjustment method includes:

[0037] S1, the workpiece 1.8 is placed between the adjusting plate 1.1 and the lower plate 1.7, the polishing machine plate surface rotates, and the distance sensor 1.9 arranged on the lower plate 1.7 detects the distance between the adjusting plate 1.1 and the lower plate 1.7 at different radial positions;

[0038] S2, determining the position of the adjustment plate 1.1 that needs to be corrected according to the distance between the adjustment plate 1.1 and the lower plate 1.7 detected by the multiple distance sensors 1.9;

[0039] S3, confirming the cylinder adjustment amount of the corresponding adjustment cylinder 1.5 according to the deformation amount of the adjustment disk 1.1 at the corresponding position of each distance sensor 1.9;

[0040] S4. Adjust the pressure output by cylinder 1.5 according to the cylinder adjustment amount.

[0041] In one embodiment, step S2 includes: determining, according to the spacing detection result of the distance sensor 1.9, the corresponding position of any one of the distance sensors 1.9 as the position of the adjustment plate 1.1 that needs to be corrected;

[0042] According to the position of the adjusting disk 1.1 that needs to be corrected, the adjusting cylinder 1.5 that needs to be adjusted at the corresponding position is determined.

[0043] In one embodiment, step S4 includes: according to the cylinder adjustment amount of the adjustment cylinder 1.5, controlling the pressure output by the adjustment cylinder 1.5 through the electric proportional valve to adjust the deformation amount at the corresponding position of the adjustment disk 1.1.

[0044] In a preferred embodiment, the adjustment method further comprises a PID control module provided in the PLC control device;

[0045] The distance between the adjustment plate 1.1 and the lower plate 1.7 detected by each distance sensor 1.9 is input into the PID control module. The PID control module generates the cylinder adjustment amount required to adjust the adjustment cylinder 1.5 according to the distance detected by each distance sensor 1.9. The PID control module outputs the generated cylinder adjustment amount to the electric proportional valve to accurately control the output of the adjustment cylinder 1.5.

[0046] After the workpiece 1.8 is ground, as the grinding progresses and the heat effect is generated, the distance between the adjustment plate 1.1 and the lower plate 1.7 at different radial positions can be detected, and the deformation at different positions can be determined based on the distance between the adjustment plate 1.1 and the lower plate 1.7, and correction can be made based on the deformation at different positions.

[0047] The specific correction process is: when the value of one of the multiple distance sensors 1.9 changes, the data is transmitted to the PLC control device, and at this time, the deformation correction adjustment device of the polishing machine disc surface adjusts the pressure output by the adjustment cylinder 1.5 according to the changed data. Among them, the method of controlling the adjustment cylinder 1.5 is to process the value input by the distance sensor 1.9 according to the PID control module, and the value of the input distance sensor 1.9 is used to obtain the pressure that the adjustment cylinder 1.5 needs to output, and then the PLC control device controls the air pressure input to the adjustment cylinder 1.5 by the electrical proportional valve, so that the adjustment cylinder 1.5 outputs the corresponding pressure. Furthermore, through the adjustment of the adjustment cylinder 1.5, the adjustment disk 1.1 usually needs to be adjusted multiple times to make the adjustment disk 1.1 reach a horizontal state. Furthermore, during the correction process, the distance sensor 1.9 needs to detect the distance between the lower plate 1.7 and the adjustment plate 1.1 in real time so that the PID control module can control the air pressure input to the adjustment cylinder 1.5 by the electrical proportional valve through the PLC control device multiple times, thereby achieving the flatness correction of the surface of the adjustment plate 1.1 by adjusting the pressure output by the adjustment cylinder 1.5 multiple times.

[0048] In this embodiment, the adjustment tray fixing plate 1.4 is integrally cast and has sufficient rigidity and strength. In addition, when the adjustment plate 1.1 is deformed, the deformation is at the micron level which cannot be observed by the naked eye. Therefore, even if the adjustment plate 1.1 is a rigid part, the adjustment caused by the pressure of the adjustment cylinder 1.5 is also at the corresponding micron level. The lower plate 1.7 and the lower tray are used as the reference for detection. The lower tray is integrally cast and has sufficient strength and rigidity during the pressurization process of the adjustment plate 1.1. At the same time, the lower plate 1.7 adopts a material with a low thermal deformation coefficient and a constant temperature cooling device to prevent thermal deformation and measurement errors.

[0049] The above are all preferred embodiments of the present invention, and the protection scope of the present invention is not limited thereby. Among them, the same parts are represented by the same figure numerals. It should be noted that the words "front", "rear", "left", "right", "up" and "down" used in the following description refer to the directions in the drawings, and the words "inside" and "outside" refer to the directions toward or away from the geometric center of a specific component, respectively. Therefore: All equivalent changes made according to the structure, shape, and principle of the present invention should be covered within the protection scope of the present invention.

Claims

1. A deformation correction and adjustment device for a polishing machine disc surface, the deformation correction and adjustment device comprising a lower disc tray (1.6), a lower disc (1.7), an adjustment disc (1.1), an adjustment disc (1.2), and an adjustment disc fixing disc (1.4), characterized in that: The lower plate tray (1.6), the lower plate (1.7), the adjustment plate (1.1), the adjustment plate (1.2), and the adjustment plate fixing plate (1.4) are installed in sequence from bottom to top in the vertical direction; the adjustment plate fixing plate (1.4) is provided with an adjustment cylinder (1.5); the adjustment cylinder (1.5) can pass through the adjustment plate (1.2) and be fixedly connected to the adjustment plate (1.1); a distance sensor (1.9) is provided on the surface of the lower plate (1.7) facing the adjustment plate (1.1); the distance sensor (1.9) is used to detect the distance between the lower plate (1.7) and the adjustment plate (1.1).

2. The deformation correction and adjustment device for the polishing machine disc surface according to claim 1 is characterized in that: A plurality of the adjustment cylinders (1.5) are provided, and the plurality of adjustment cylinders (1.5) are evenly arranged circumferentially on one side of the adjustment tray fixing plate (1.4) close to the outer edge.

3. The deformation correction and adjustment device for the polishing machine disc surface according to claim 1 is characterized in that: A plurality of the distance sensors (1.9) are provided, and the plurality of distance sensors (1.9) are respectively arranged at different radial positions of the lower plate (1.7), and the interval angles between the plurality of distance sensors (1.9) are the same.

4. The deformation correction and adjustment device for the polishing machine disc surface according to claim 1, characterized in that: The deformation correction and adjustment device also includes an electric proportional valve and a PLC control device; The plurality of adjusting cylinders (1.5) are electrically connected to the electrical proportional valve to adjust the output pressure of the adjusting cylinder (1.5) according to the distance between the lower plate (1.7) and the adjusting plate (1.1) detected by the distance sensor, and the electrical proportional valve and the distance sensor are electrically connected to the PLC control device.

5. The deformation correction and adjustment device for the polishing machine disc surface according to claim 1, characterized in that: The deformation correction adjustment device also includes a cylinder connecting rod (1.3), the cylinder connecting rod (1.3) being fixedly mounted on the movable end of the adjustment cylinder (1.5), the adjustment cylinder (1.5) passing through the adjustment tray (1.2) via the cylinder connecting rod (1.3) and being fixedly connected to the adjustment disk (1.1) to adjust the disk surface deformation of the adjustment disk (1.1).

6. The deformation correction and adjustment device for the polishing machine disc surface according to claim 1, characterized in that: The workpiece (1.8) is placed between the lower plate (1.7) and the adjustment plate (1.1), and the lower plate (1.7) and the adjustment plate (1.1) rotate in opposite directions. Any distance sensor (1.9) is located at a radial position of the lower plate (1.7) and rotates with the lower plate (1.7) to circumferentially detect the distance between the adjustment plate (1.1) and the lower plate (1.7).

7. A method for adjusting a deformation correction adjustment device for a polishing machine disk, characterized in that: The adjustment method of the deformation correction adjustment device is implemented according to any one of claims 1 to 6, and the adjustment method comprises: S1, a workpiece (1.8) is placed between an adjustment disk (1.1) and a lower disk (1.7), the polishing machine disk surface rotates, and a distance sensor (1.9) disposed on the lower disk (1.7) detects the distance between the adjustment disk (1.1) and the lower disk (1.7) at different radial positions; S2, determining the position of the adjustment disk (1.1) that needs to be corrected based on the distance between the adjustment disk (1.1) and the lower disk (1.7) detected by a plurality of distance sensors (1.9); S3, confirming the cylinder adjustment amount of the corresponding adjustment cylinder (1.5) according to the deformation amount of the adjustment disk (1.1) at the corresponding position of each distance sensor (1.9); S4. Adjust the output of the regulating cylinder (1.5) according to the cylinder adjustment amount.

8. The adjustment method according to claim 7, characterized in that: The S2 step includes: According to the spacing detection results of the distance sensors (1.9), determining that the corresponding position of any one of the distance sensors (1.9) is the position of the adjustment disk (1.1) that needs to be corrected; According to the position of the adjustment disk (1.1) that needs to be corrected, the adjustment cylinder (1.5) that needs to be adjusted at the corresponding position is determined.

9. The adjustment method according to claim 8, characterized in that: The step S4 comprises: according to the cylinder adjustment amount of the adjustment cylinder (1.5), controlling the pressure output by the adjustment cylinder (1.5) through an electrical proportional valve to adjust the deformation amount at the corresponding position of the adjustment disk (1.1).

10. The adjustment method according to claim 7, characterized in that: A PID control module is provided in the PLC control device; The adjustment method further comprises: inputting the distance between the adjustment plate (1.1) and the lower plate (1.7) detected by each of the distance sensors (1.9) into the PID control module, the PID control module generating a cylinder adjustment amount required to adjust the adjustment cylinder (1.5) according to the distance detected by each of the distance sensors (1.9), the PID control module outputting the generated cylinder adjustment amount to the PLC control device, and adjusting the output of the adjustment cylinder (1.5) through the electrical proportional valve electrically connected to the PLC control device.

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