Device and method for accurately positioning PECVD (Plasma Enhanced Chemical Vapor Deposition) carrier plate in cavity

Abstract

The invention discloses a device and a method for accurately positioning a PECVD (Plasma Enhanced Chemical Vapor Deposition) carrier plate in a cavity, at least one first laser positioning sensor is arranged outside an inlet position of the cavity, at least one second laser positioning sensor is arranged outside an outlet position of the cavity, the cavity internally comprises a carrier plate for bearing a transported piece, and the carrier plate is provided with a plurality of first laser positioning sensors and a plurality of second laser positioning sensors. The transmission mechanism is arranged at the bottom of the carrier plate and used for driving the carrier plate to move, the driving mechanism is used for driving the transmission mechanism, the first laser positioning sensor and the second laser positioning sensor are electrically connected with a PLC electrical controller, and the PLC electrical controller is electrically connected with a servo motor. The device has the advantages that the servo motor is controlled by the program PLC, so that the carrier plate can be accurately positioned, and errors caused by inertia are avoided; no contact exists in the whole process in the cavity, and starting and stopping of the carrier plate are controlled only through an outdoor sensor. And a better film coating effect is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of solar cells, and in particular to a device and method for accurately positioning a PECVD carrier in a chamber. Background Art

[0002] In the process of preparing solar cells, the existing coating system includes a coating chamber and a conveying device. In order to control the carrier board of the substrate, a detection device is usually set at the entrance or exit position of the coating chamber, that is, a sensor system is used to detect the position of the carrier board, accurately control the closing and opening of the entrance gate valve and the exit gate valve of the coating chamber, and thus avoid the situation where the entrance gate valve or the exit gate valve crushes the substrate. The prior art sets two sensors, which are installed in a manner perpendicular to the center of the conveying direction and a reflector is set at the corresponding position at the bottom of the chamber. When the carrier board passes through the sensor position, it will cause a change in the light flux, thereby realizing the detection of the position of the carrier board. However, this way of setting the sensor is not suitable for the process chamber of PECVD (abbreviation of Plasma Enhanced Chemical Vapor Deposition, i.e. plasma enhanced chemical vapor deposition). This is because the upper cover of the process chamber of PECVD is provided with a spray electrode plate. If the carrier board is positioned at the center position of the lower electrode corresponding to the spray electrode plate, when the upper cover of the chamber is closed, the gas spray plate occupies most of the space on the upper part of the chamber, and the vertical position sensor cannot be installed.

[0003] The current positioning methods for carriers include: 1) using a straight rod to lift and reciprocate at the target position of the carrier to achieve the purpose of stopping and limiting. Its significant disadvantage is that the straight rod reciprocating motion positioning method cannot work properly due to the high temperature thermal expansion and deformation of the material, and the carrier will be subjected to a strong impact due to the collision when it stops in front of the straight rod at a certain speed, which may cause the substrate to separate from the carrier; 2) before the carrier arrives at the target position, the transmission device slows down in advance and rotates the transmission wheel clockwise or counterclockwise to achieve the purpose of stopping at the target position in a fine-tuning manner. Its significant disadvantage is that it cannot ensure the consistency of the target position of the carrier and also reduces the production efficiency; 3) only installs the rough positioning at the import and export positions. Its significant disadvantage is that if the carrier is in high-speed transmission, it will start to stop when it hits the sensor transmission system, but the carrier will also slide forward under the action of inertia, resulting in inaccurate positioning; if the carrier is in low-speed transmission, it will stop immediately when it hits the sensor transmission system, and the distance the carrier slides forward will become smaller, but the carrier always maintains a low speed during the transmission process, which will increase the process time of the carrier in the chamber, affecting the efficiency and beat of the equipment. Summary of the invention

[0004] The present invention proposes a device and method for accurately positioning a PECVD carrier in a chamber, which solves the technical problems existing in the above-mentioned prior art.

[0005] According to one aspect of the present invention, there is provided a device for accurately positioning a PECVD carrier in a chamber, characterized in that at least one first laser positioning sensor is arranged outside the entrance position of the chamber, and at least one second laser positioning sensor is arranged outside the exit position of the chamber, the chamber comprises a carrier for carrying a transported object, a transmission mechanism arranged at the bottom of the carrier for driving the carrier to move, and a driving mechanism for driving the transmission mechanism, the first laser positioning sensor and the second laser positioning sensor are electrically connected to a PLC electrical controller, and the PLC electrical controller is electrically connected to a servo motor.

[0006] Furthermore, a carrier plate positioning hole is provided at a central position in the chamber.

[0007] Furthermore, a third laser positioning sensor is arranged at a position on the outer side of the bottom of the chamber corresponding to the carrier positioning hole.

[0008] Furthermore, the PLC electrical controller is also connected to a host computer via a bus.

[0009] Furthermore, the number of the second laser positioning sensors is 2, including a second main sensor and a second main sensor, which are installed in sequence according to the movement direction of the carrier.

[0010] Furthermore, the number of the first laser positioning sensors is 2, including a first main sensor and a first backup sensor, which are installed in sequence according to the moving direction of the carrier.

[0011] According to another aspect of the present invention, a method for accurately positioning a PECVD carrier in a chamber is provided, characterized by comprising:

[0012] First, at least one first laser positioning sensor is arranged outside the entrance position of the chamber, and at least one second laser positioning sensor is arranged outside the exit position of the chamber, the chamber includes a carrier plate for carrying the transported object, a transmission mechanism arranged at the bottom of the carrier plate for driving the carrier plate to move, and a driving mechanism for driving the transmission mechanism, the first laser positioning sensor and the second laser positioning sensor are electrically connected to a PLC electrical controller, the PLC electrical controller is electrically connected to a servo motor, and a carrier plate positioning hole is arranged at the center position of the chamber;

[0013] Enable the servo and check whether the actual position is zero;

[0014] Run in speed mode;

[0015] Determine whether the actual position is greater than the sum of the actual distance from the edge of the carrier plate of the previous station to the current station and the actual position of the transmission point;

[0016] If the speed is greater than the sum of the actual distance from the edge of the carrier plate of the previous station to the current station and the actual position of the transfer point, modify the speed setting value;

[0017] When the second laser positioning sensor is reached, it decelerates and switches to position mode operation;

[0018] Two parallel branches are selected according to the conditions: a. Non-process room process, no third laser positioning sensor signal, execute distance parameter 0; b. Process room process, there is a third laser positioning sensor signal, execute distance parameter 1, and the PLC electrical controller modifies the running speed at the same time.

[0019] It can be seen from the technical solution provided by the present invention that the present invention has a compact structure, simple operation, and can realize fast and accurate positioning of the carrier. Through the positioning of distance parameters and position parameters, the program PLC controls the servo motor, which can make the carrier accurately positioned and avoid errors caused by inertia; there is no contact in the cavity throughout the process, and only the outdoor sensor is used to control the start and stop of the carrier. It has a better effect on coating. Intelligently judge the non-process chamber process, without the third laser positioning sensor signal, execute the distance parameter 0, and execute the non-process chamber operation parameters. There is a third laser positioning sensor signal to execute the distance parameter 1 and execute the process chamber operation parameters. It can further improve the running speed of the carrier, further improve the production capacity and shorten the cycle; it avoids the positioning method of the carrier, the reciprocating motion positioning method of the straight rod will not work properly due to the high temperature thermal expansion and deformation of the material, and the carrier will be subjected to a strong impact due to the impact when it stops in front of the straight rod at a certain speed, which may cause the substrate to detach from the carrier.

[0020] The above description is only an overview of the technology of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented according to the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present invention. Moreover, the same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0022] Figure 1 It is a structural schematic diagram of the device for accurately positioning the PECVD carrier in the chamber of the present invention;

[0023] Figure 2 for Figure 1 Schematic diagram of the installation position of the laser positioning sensor of the positioning device shown.

[0024] Reference numerals

[0025] 11- chamber 12-A laser positioning sensor 13-B laser positioning sensor 14-C laser positioning sensor 15-D laser positioning sensor 16-E laser positioning sensor 17- carrier plate positioning hole 18- carrier plate DETAILED DESCRIPTION

[0026] The exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these implementations are provided in order to enable a more thorough understanding of the present invention and to enable the scope of the present invention to be fully communicated to those skilled in the art.

[0027] The following is a detailed description of a device for accurately positioning a PECVD carrier in a chamber provided by the present invention. The contents not described in detail in the embodiments of the present invention belong to the prior art known to professionals in the field. If no specific conditions are specified in the embodiments of the present invention, the conventional conditions in the field or the conditions recommended by the manufacturer shall be followed.

[0028] See also Figure 1 and Figure 2 The present invention provides a device for accurately positioning a PECVD carrier in a chamber, comprising: at least one first laser positioning sensor is arranged outside the entrance position of the chamber 11, and at least one second laser positioning sensor is arranged outside the exit position of the chamber 11. The chamber 11 includes a carrier 18 for carrying a transported object, a transmission mechanism arranged at the bottom of the carrier 18 for driving the carrier to move, and a driving mechanism for driving the transmission mechanism. The first laser positioning sensor and the second laser positioning sensor are electrically connected to a PLC electrical controller, and the PLC electrical controller is electrically connected to a servo motor.

[0029] Specifically, a carrier plate positioning hole 17 is provided at the center of the chamber 11 .

[0030] Specifically, a third laser positioning sensor is arranged at a position on the outer side of the bottom of the chamber 11 corresponding to the carrier positioning hole.

[0031] Specifically, the PLC electrical controller is also connected to a host computer via a bus.

[0032] Specifically, the number of the second laser positioning sensors is 2, including a second main sensor and a second main sensor, which are installed in sequence according to the movement direction of the carrier.

[0033] Specifically, the number of the first laser positioning sensors is 2, including a first main sensor and a first backup sensor, which are installed in sequence according to the moving direction of the carrier.

[0034] like Figure 2 As shown, A, B, C, D, and E are the installation positions of the laser positioning sensors. A and B are the first laser positioning sensors, A is the first main sensor, B is the first standby sensor, D and E are the third laser positioning sensors, D is the second main sensor, E is the second main sensor, and C is the third laser positioning sensor. Three laser positioning sensors A, D, and E are installed in the non-process chamber, and four laser positioning sensors A, C, D, and E are installed in the process chamber. Among them, a' is the actual distance from the edge (forward direction) of the carrier of the previous station (cavity) to the current station (cavity). a is the position of the laser positioning sensor A from the current station, which is used to detect whether the carrier has completely entered this station. c is the position of the laser positioning sensor C from the current station, which is used to align the center of the carrier and the center of the cavity (for process room use). d is the position of the laser positioning sensor D from the current station, which is used to detect whether the laser positioning sensor D is abnormal, program protection, etc. e is the position of the laser positioning sensor E from the current station, which is used to detect whether the laser positioning sensor E is abnormal, program protection, etc. f is the actual transmission point position.

[0035] The laser positioning sensor of the present invention is a sensor composed of a laser transmitter, a laser detector and a measuring circuit. It detects the position of an obstacle through a laser beam, and the laser has the characteristic of penetrating the outer cover. Therefore, in this embodiment, a laser positioning sensor is used to emit a laser light beam, and then the position of the carrier can be detected by receiving the reflected laser.

[0036] The specific workflow is as follows:

[0037] Step 1: Enable the servo and check whether the actual position is zero.

[0038] Step 2: Run in speed mode (running speed 950mm / s)

[0039] Step 3: Determine whether the actual position is greater than (a'+f). If the above figure shows the position of point F

[0040] Step 4: If it is greater than (a′+f), modify the speed setting value and run at a speed of 100

[0041] Step 5: Run to the deceleration sensor D and switch to position mode (the running distance is set by the parameter, and the distance parameter is 0); at the same time, save the current actual position (for use in subsequent processes);

[0042] Step 6: This step runs two branches in parallel, and the selection is based on the conditions: a. Non-process room process, no sensor C signal, execute distance parameter 0; b. Process room process, sensor C signal executes distance parameter 1, and the PLC modifies the running speed, so that the speed is reduced to accurately position the carrier. Through the positioning of distance parameters and position parameters, the program PLC controls the servo motor, non-contact accurate positioning of the carrier, which can make the carrier position accurate and avoid errors caused by inertia.

[0043] The present invention intelligently determines the non-process chamber process. If there is no laser positioning sensor C signal, the distance parameter 0 is executed, and the non-process chamber operation parameters are executed. If there is a laser positioning sensor C signal, the distance parameter 1 is executed, and the process chamber operation parameters are executed. It can further improve the operation rate of the carrier, further improve production capacity and shorten the cycle time;

[0044] The present invention has no contact in the cavity throughout the whole process, and only relies on the sensor outside the cavity to control the start and stop of the carrier. It has a better effect on the coating. It avoids the positioning method of the carrier, in which the straight rod reciprocating motion positioning method cannot work normally due to the thermal expansion and deformation of the material at high temperature, and when the carrier stops in front of the straight rod at a certain speed, it will be subjected to a strong impact due to the collision, which may cause the substrate to separate from the carrier.

[0045] Specifically, it also includes a mounting mechanism, which is connected to the laser positioning sensor and is used for mounting the laser positioning sensor, and can realize the position adjustment of the laser positioning sensor in the horizontal direction and the vertical direction.

[0046] Specifically, the mounting mechanism includes a mounting portion, a fixing portion, and an adjusting portion, and the adjusting portion is provided with a vertical through hole and a horizontal through hole. The vertical through hole is connected to the vertical through notch, and the middle of the vertical through notch is connected to the first locking screw hole opened horizontally. The horizontal through hole is connected to the horizontal through notch, and the middle of the horizontal through notch is connected to the second locking screw hole opened vertically.

[0047] Specifically, a flat plate with screw holes is welded to the mounting portion, and the laser positioning sensor is mounted on the flat plate by bolt connection.

[0048] Specifically, the laser positioning sensor can also be installed through an adapter, that is, the height position of the mounting portion is adjusted accordingly according to the actual light output position requirements of the laser positioning sensor, that is, the laser positioning sensor can be adjusted in the vertical direction. In addition, the angle of the laser positioning sensor can be adjusted by adjusting the angle position of the mounting portion.

[0049] Specifically, the PLC electrical controller is connected to the power supply, the laser positioning sensor and the servo motor are electrically connected to the PLC electrical controller, and the PLC electrical controller performs electrical control. In addition, a control panel can also be provided, and the control panel is provided with an electric control switch, and the control panel is electrically connected to the PLC electrical controller, so that the staff can perform manual control conveniently.

[0050] Specifically, the PLC electrical controller is used for the logic control of the servo motor on the one hand, and for calculating the position and speed value of the carrier on the other hand. The PLC electrical controller uses the detection signal of the laser positioning sensor as a calibration signal, combined with the speed data of the carrier, to calculate the real-time position value of the carrier.

[0051] Specifically, the carrier plate is made of carbon fiber and graphite materials.

[0052] Specifically, a plurality of battery cell placement slots are distributed in an array on the carrier board.

[0053] Specifically, the opening size of the battery cell placement groove is slightly larger than the size of the battery cell carried, so as to place more battery cells on the carrier, thereby improving production efficiency.

[0054] Specifically, the chamber is further provided with a deviation correction mechanism, and by abutting the deviation correction mechanism against the side wall of the carrier plate, it is further ensured that the carrier plate is always in a fixed motion form during the movement process, thereby avoiding position deviation of the carrier plate.

[0055] The present invention also provides a method for accurately positioning a PECVD carrier in a chamber, comprising:

[0056] First, at least one first laser positioning sensor is arranged outside the entrance position of the chamber, and at least one second laser positioning sensor is arranged outside the exit position of the chamber, the chamber includes a carrier plate for carrying the transported object, a transmission mechanism arranged at the bottom of the carrier plate for driving the carrier plate to move, and a driving mechanism for driving the transmission mechanism, the first laser positioning sensor and the second laser positioning sensor are electrically connected to a PLC electrical controller, the PLC electrical controller is electrically connected to a servo motor, and a carrier plate positioning hole is arranged at the center position of the chamber;

[0057] Enable the servo and check whether the actual position is zero;

[0058] Run in speed mode;

[0059] Determine whether the actual position is greater than the sum of the actual distance from the edge of the carrier plate of the previous station to the current station and the actual position of the transmission point;

[0060] If the speed is greater than the sum of the actual distance from the edge of the carrier plate of the previous station to the current station and the actual position of the transfer point, modify the speed setting value;

[0061] When the second laser positioning sensor is reached, it decelerates and switches to position mode operation;

[0062] Two parallel branches are selected according to the conditions: a. Non-process room process, no third laser positioning sensor signal, execute distance parameter 0; b. Process room process, there is a third laser positioning sensor signal, execute distance parameter 1, and the PLC electrical controller modifies the running speed at the same time.

[0063] Compared with the prior art, the advantages of the present invention are: compact structure, simple operation, and the ability to achieve fast and accurate positioning of the carrier. Through the positioning of distance parameters and position parameters, the program PLC controls the servo motor, which can make the carrier accurately positioned and avoid errors caused by inertia; there is no contact in the cavity throughout the process, and only the outdoor sensor is used to control the start and stop of the carrier. It has a better effect on coating. Intelligently judge the non-process chamber process, without sensor C signal, execute distance parameter 0, and execute non-process chamber operation parameters. With sensor C signal, execute distance parameter 1 and execute process chamber operation parameters. It can further improve the operation rate of the carrier, further improve production capacity and shorten the cycle; avoid the positioning method of the carrier, the reciprocating motion positioning method of the straight rod will not work properly due to the high temperature thermal expansion and deformation of the material, and the carrier will be subjected to a strong impact due to the impact when it stops in front of the straight rod at a certain speed, which may cause the substrate to detach from the carrier.

[0064] It should be clear that the present invention is not limited to the specific configuration and processing described above and shown in the figures. For the sake of simplicity, a detailed description of the known method is omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method process of the present invention is not limited to the specific steps described and shown, and those skilled in the art can make various changes, modifications and additions, or change the order between the steps after understanding the spirit of the present invention.

Claims

1. A device for accurately positioning a PECVD carrier in a chamber, characterized in that: At least one first laser positioning sensor is arranged outside the entrance position of the chamber, and at least one second laser positioning sensor is arranged outside the exit position of the chamber. The chamber includes a carrier plate for carrying the transported parts, a transmission mechanism arranged at the bottom of the carrier plate for driving the carrier plate to move, and a driving mechanism for driving the transmission mechanism. The first laser positioning sensor and the second laser positioning sensor are electrically connected to a PLC electrical controller, and the PLC electrical controller is electrically connected to a servo motor. A carrier plate positioning hole is arranged at the center position of the chamber.

2. The device for accurately positioning a PECVD carrier in a chamber according to claim 1, characterized in that: The PLC electrical controller is also connected to the host computer via a bus.

3. The device for accurately positioning a PECVD carrier in a chamber according to claim 2, characterized in that: A third laser positioning sensor is arranged at a position outside the bottom of the chamber corresponding to the carrier positioning hole.

4. The device for accurately positioning a PECVD carrier in a chamber according to claim 1, characterized in that: Also included is a mounting mechanism to which the laser positioning sensor is connected.

5. The device for accurately positioning a PECVD carrier in a chamber according to claim 1, characterized in that: The number of the second laser positioning sensors is 2, including a second main sensor and a second main sensor, which are installed in sequence according to the movement direction of the carrier.

6. The device for accurately positioning a PECVD carrier in a chamber according to claim 1, characterized in that: The number of the first laser positioning sensors is 2, including a first main sensor and a first backup sensor, which are installed in sequence according to the moving direction of the carrier.

7. The device for accurately positioning a PECVD carrier in a chamber according to claim 1, characterized in that: A plurality of battery cell placement slots are distributed in an array on the carrier.

8. The device for accurately positioning a PECVD carrier in a chamber according to claim 1, characterized in that: The chamber is also provided with a deviation correction mechanism.

9. A method for accurately positioning a PECVD carrier in a chamber, characterized in that: include: First, at least one first laser positioning sensor is arranged outside the entrance position of the chamber, and at least one second laser positioning sensor is arranged outside the exit position of the chamber, the chamber includes a carrier plate for carrying the transported object, a transmission mechanism arranged at the bottom of the carrier plate for driving the carrier plate to move, and a driving mechanism for driving the transmission mechanism, the first laser positioning sensor and the second laser positioning sensor are electrically connected to a PLC electrical controller, the PLC electrical controller is electrically connected to a servo motor, and a carrier plate positioning hole is arranged at the center position of the chamber; Enable the servo and check whether the actual position is zero; Run in speed mode; Determine whether the actual position is greater than the sum of the actual distance from the edge of the carrier plate of the previous station to the current station and the actual position of the transmission point; If the speed is greater than the sum of the actual distance from the edge of the carrier plate of the previous station to the current station and the actual position of the transfer point, modify the speed setting value; When the second laser positioning sensor is reached, it decelerates and switches to position mode operation; Two parallel branches are selected according to the conditions: a. Non-process room process, no third laser positioning sensor signal, execute distance parameter 0; b. Process room process, there is a third laser positioning sensor signal, execute distance parameter 1, and the PLC electrical controller modifies the running speed at the same time.

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