Molecular pump

Abstract

The invention relates to the technical field of vacuum obtaining equipment, and discloses a molecular pump which comprises a pump body, a driving part is installed in an inner cavity of the pump body, and a main shaft is arranged at the driving end of the driving part; the rotor is rotationally installed in the pump body, one end of the rotor is connected with the main shaft in a matched mode, a matched groove is formed in the other end of the rotor, and a matched bolt is installed in the matched groove and penetrates through the rotor in the axial direction to be fixedly connected with the main shaft; and the auxiliary assembly is installed in the matching groove, the auxiliary assembly is fixedly connected with the rotor, and the matching groove is completely filled with the auxiliary assembly. In the rotating process of the rotor, dust particles hit the auxiliary assembly, the motion trail of the particles can be changed, the matching groove is completely filled with the auxiliary assembly, the particles can be prevented from being accumulated in the matching groove, accumulated materials are prevented from influencing the dynamic balance of the rotor, and the operation stability of the rotor is improved. And meanwhile, by changing the particle motion trail, the rebound of the particles into the cavity is reduced, the cavity pollution is avoided, and the chip yield is improved.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum obtaining equipment, and in particular to a molecular pump. Background Art

[0002] As a vacuum obtaining device, the molecular pump's vacuum extraction principle is to use the collision or carrying effect of the high-speed rotating solid surface to transfer energy to the gas molecules, forming a flow in a certain direction on a macro scale to achieve a pumping effect, thereby obtaining a clean ultra-high vacuum and providing the necessary, real-time controllable vacuum environment for key semiconductor process steps.

[0003] During the application of semiconductor etching equipment, it was found that a large amount of dust particles would be generated in the etching process environment. In the molecular pump in the prior art, the connection between the turbine and the main shaft end is a groove-type structure. In the process of the molecular pump removing dust particles, the dust particles are easily returned to the process chamber due to collision at the concave structure, resulting in an increase in the number of particles in the chamber, affecting the final yield of the chip; moreover, the dust will accumulate at the concave structure when passing through the molecular pump. As the thickness of the dust accumulation increases, it is easy to cause the dynamic balance of the molecular pump rotor to fail, and then there is a risk of pump breakage. Summary of the invention

[0004] In view of this, the present invention provides a molecular pump to solve the technical problem that particles may flow backward or accumulate in the molecular pump when passing through the molecular pump.

[0005] In a first aspect, the present invention provides a molecular pump, comprising:

[0006] A pump body has a driving member installed in its inner cavity, and a main shaft is provided at the driving end of the driving member;

[0007] The rotor is rotatably mounted in the pump body, one end of the rotor is matched with the main shaft, and the other end is provided with a matching groove, a matching bolt is installed in the matching groove, and the matching bolt penetrates the rotor along the axial direction and is fixedly connected with the main shaft;

[0008] The auxiliary component is installed in the matching groove, the auxiliary component is fixedly connected to the rotor, and the auxiliary component completely fills the matching groove.

[0009] The molecular pump for preventing particle backflow provided by the present invention completely fills the matching groove for installing the matching bolt by setting an auxiliary component. When the rotor is rotating, dust particles hit the auxiliary component, which can change the movement trajectory of the particles, so that the particles move around the auxiliary component and move toward the drainage direction of the molecular pump. By changing the movement trajectory of the particles and using the auxiliary component to completely fill the matching groove, it is possible to effectively avoid the accumulation of particles in the matching groove at the end of the rotor, avoid the accumulation of materials in the matching groove affecting the dynamic balance of the rotor, and improve the rotor operation stability. When the molecular pump is used in semiconductor etching equipment, while ensuring the stability of the rotor operation, the particle movement trajectory is changed by the auxiliary component, the dust particles rebounding into the cavity are reduced, and the cavity pollution is avoided, which can improve the chip yield.

[0010] In an optional embodiment, the auxiliary component is protruded on a side facing away from the rotor. The protruding structure changes the movement trajectory of the passing particles, so that the particles are offset before reaching the end of the rotor, so that the particles move away from the matching grooves, thereby avoiding the accumulation of dust particles at the end of the rotor, and ensuring the dynamic balance and rotation stability of the rotor during the operation of the molecular pump.

[0011] In an optional embodiment, the side of the auxiliary component facing away from the rotor is a continuous curved surface, so that dust particles can move along the surface of the auxiliary component when passing through the auxiliary component, improving the smoothness of the movement of the particles when passing through the surface of the auxiliary component and preventing the particles from gathering on the surface of the auxiliary component.

[0012] In an optional embodiment, a side of the auxiliary component facing away from the rotor is arranged in an umbrella shape, the center height of the auxiliary component is higher than the edge height of the auxiliary component, and there is a smooth transition from the center of the auxiliary component to the edge of the auxiliary component.

[0013] In an optional embodiment, the auxiliary component is arranged flush with the rotor on all sides so that the particles can move smoothly from the top surface of the auxiliary component to the end surface of the rotor, avoiding turbulence during the movement of the particles due to rapid changes in the cross-section, thereby improving the stability of the molecular pump-driven particle movement.

[0014] In an optional embodiment, the auxiliary component includes a connecting plate and an auxiliary cover plate, the connecting plate is fixedly connected to the rotor, the auxiliary cover plate is fixedly connected to the connecting plate, and the auxiliary cover plate completely covers the notch of the matching groove. The auxiliary cover plate is installed in the matching groove through the connecting plate to reduce the number of bolts leaking from the outside of the auxiliary component, improve the stability of the flow of particles when passing through the auxiliary component, and avoid the accumulation of particles at the bolts to affect the stable operation of the molecular pump.

[0015] In an optional embodiment, a mounting groove is provided on one side of the connecting plate facing the auxiliary cover plate, and the connecting plate is connected to the rotor via a connecting bolt, and the connecting bolt is installed in the mounting groove. By providing the mounting groove, the connecting bolt is built into the mounting groove, ensuring that the side of the auxiliary cover plate facing the connecting plate is flat, and ensuring the stability of the connection between the auxiliary cover plate and the connecting plate.

[0016] In an optional embodiment, the auxiliary cover plate and the connecting plate are fixedly connected by auxiliary bolts, which penetrate the auxiliary cover plate and then engage with the connecting plate threads. The auxiliary bolts tightly fix the auxiliary cover plate and the connecting plate together, thereby improving the stability and durability of the entire structure and preventing loosening or separation due to vibration or external force during use. Bolt connection can also ensure accurate positioning between the auxiliary cover plate and the connecting plate, avoiding performance degradation or safety hazards caused by loose connection or misalignment.

[0017] In an optional embodiment, the auxiliary bolts are installed on the edge of the auxiliary cover plate. Installing the auxiliary bolts on the edge of the auxiliary cover plate can more effectively disperse and bear the stress at the connection, reducing the risk of damage to the auxiliary cover plate caused by stress concentration during the operation of the molecular pump.

[0018] In an optional embodiment, the connecting bolt is coaxially arranged with the rotor; and / or, a plurality of connecting bolts are arranged at intervals along the circumference of the rotor. The coaxial design of the connecting bolt and the rotor helps to maintain the balance and stability of the rotor during operation and reduce vibration and noise. The plurality of connecting bolts arranged at intervals along the circumference of the rotor can more effectively disperse and bear the load generated by the rotor, and improve the reliability and safety of the connection. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 Schematic diagram of the structure of the molecular pump provided in an embodiment of the present invention.

[0021] Figure 2 for Figure 1 A partial enlarged view of point A in the middle.

[0022] Explanation of the accompanying drawings: 1. Pump body; 2. Main shaft; 3. Rotor; 4. Connecting plate; 5. Auxiliary cover plate; 6. Connecting bolt; 7. Auxiliary bolt. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0024] Combine the following Figure 1 and Figure 2 , describing an embodiment of the present invention.

[0025] According to an embodiment of the present invention, on the one hand, a molecular pump is provided, comprising a pump body 1, a rotor 3 and auxiliary components.

[0026] A driving motor as a driving member is installed in the inner cavity of the pump body 1, and a main shaft 2 is provided at the driving end of the driving member. The rotor 3 is rotatably installed in the pump body 1, one end of the rotor 3 is matched and connected with the main shaft 2, and the other end is provided with a matching groove, and a matching bolt is installed in the matching groove, and the matching bolt penetrates the rotor 3 along the axial direction and is fixedly connected with the main shaft 2. The auxiliary component is installed in the matching groove, and the auxiliary component is fixedly connected with the rotor 3, and the auxiliary component completely fills the matching groove.

[0027] The molecular pump for preventing particle backflow provided by the present invention is provided with an auxiliary component on the basis of the existing molecular pump, and the matching groove for installing the matching bolt is completely filled with the auxiliary component. When the rotor 3 rotates, the dust particles encountered will change their motion trajectory after hitting the auxiliary component, prompting the particles to diffuse around the component and guide them to move along the drainage direction of the molecular pump. By using the auxiliary component to fill and cover the matching groove, the accumulation of particles in the matching groove at the end of the rotor 3 can be effectively avoided, and the problem of imbalance of the dynamic balance of the rotor 3 caused by the accumulation of dust particles in the matching groove can be prevented, thereby improving the stability and reliability of the operation of the rotor 3. When the molecular pump is used in semiconductor etching equipment, while ensuring the stability of the rotor operation, the particle motion trajectory is changed by the auxiliary component, the dust particles rebounding into the cavity are reduced, and the cavity pollution is avoided, which can improve the yield rate of the chip.

[0028] In one embodiment, the auxiliary component is protruded on one side away from the rotor 3. The protruding structure is used to interfere with the movement trajectory of particles flowing through the auxiliary component. The dust particles are deflected before reaching the end of the rotor 3, and the dust particles are guided to deviate from the original movement direction, thereby effectively avoiding the accumulation of particles in the matching groove area. It is ensured that the rotor 3 can maintain a good dynamic balance state and rotation stability during the continuous operation of the molecular pump.

[0029] Furthermore, the side of the auxiliary component facing away from the rotor 3 is a continuous curved surface, thereby optimizing the dynamic behavior of dust particles when passing through the auxiliary component, ensuring that the particles can move smoothly along the contour of the curved surface. By guiding the particles to move along the continuous path on the surface of the auxiliary component, the smoothness of the particle movement is improved, and the tendency of particles to stay and accumulate on the surface of the auxiliary component is reduced, thereby ensuring the overall performance and stability of the molecular pump.

[0030] Specifically, the auxiliary component is arranged in an umbrella shape on one side facing away from the rotor 3, the center height of the auxiliary component is higher than the edge height of the auxiliary component, and the center of the auxiliary component smoothly transitions to the edge of the auxiliary component, forming a shape with a central bulge and a gradually lower edge, ensuring that the continuous change in the height of the upper surface of the auxiliary component does not produce any abrupt or abrupt turning points. The geometric characteristics of the surface shape of the auxiliary component are optimized to promote the smoothness of the airflow or particles passing through, and effectively reduce the accumulation or retention on the surface of the auxiliary component.

[0031] In some other embodiments, the auxiliary component may also be a cylindrical, conical or other protruding structure extending outside the matching groove.

[0032] In one embodiment, the auxiliary component is arranged flush with the rotor 3 on all sides, so as to construct a smooth and continuous transition interface between the auxiliary component and the end surface of the rotor 3. It is ensured that the particles can seamlessly migrate from the upper top surface of the auxiliary component to the end surface of the rotor 3 without having to go through the area where the cross section changes sharply, thereby eliminating the fluid dynamic disturbance that may be caused by the rapid change of the cross section, improving the stability and efficiency of the molecular pump when driving the movement of particles, and ensuring the smoothness and controllability of the particle movement process.

[0033] In one embodiment, the auxiliary component includes a connecting plate 4 and an auxiliary cover plate 5, the connecting plate 4 is fixedly connected to the rotor 3, the auxiliary cover plate 5 is fixedly connected to the connecting plate 4, and the auxiliary cover plate 5 completely covers the notch of the matching groove. The auxiliary component is set to be split, the connecting plate 4 is fixed on the rotor 3, the auxiliary cover plate 5 is tightly combined with the connecting plate 4, and the auxiliary cover plate 5 completely covers the opening of the matching groove. The auxiliary cover plate 5 is installed inside the matching groove through the connecting plate 4, the number of bolts exposed on the outside of the auxiliary component is reduced, the compactness and stability of the overall structure of the auxiliary component are improved, the flow disturbance caused by the presence of bolts when the particles flow through the auxiliary component is reduced, and the possibility of accumulation of particles at the bolt connection is avoided, thereby further enhancing the stability and reliability of the molecular pump during continuous operation.

[0034] In one embodiment, a mounting groove is provided on one side of the connecting plate 4 facing the auxiliary cover plate 5, and the connecting plate 4 is connected to the rotor 3 via a connecting bolt 6, and the connecting bolt 6 is installed in the mounting groove. By providing the mounting groove, the connecting bolt 6 is embedded in the mounting groove, ensuring that when the auxiliary cover plate 5 contacts the connecting plate 4, the side facing the connecting plate 4 can remain flat and without protrusions, thereby optimizing the overall assembly flatness and enhancing the stability and reliability of the matching connection between the auxiliary cover plate 5 and the connecting plate 4.

[0035] In one embodiment, the auxiliary cover plate 5 and the connecting plate 4 are fixedly connected by auxiliary bolts 7, which penetrate the auxiliary cover plate 5 and then threadably engage with the connecting plate 4. The auxiliary bolts 7 tightly fix the auxiliary cover plate 5 and the connecting plate 4 together, thereby improving the stability and durability of the entire structure and preventing loosening or separation due to vibration or external force during use. Bolt connection can also ensure accurate positioning between the auxiliary cover plate 5 and the connecting plate 4, thereby avoiding performance degradation or safety hazards caused by loose connection or misalignment.

[0036] Specifically, the auxiliary bolts 7 are installed at the edge of the auxiliary cover plate 5. Installing the auxiliary bolts 7 at the edge of the auxiliary cover plate 5 can more effectively disperse and bear the stress at the connection, and reduce the risk of damage to the auxiliary cover plate 5 caused by stress concentration during the operation of the molecular pump.

[0037] In one embodiment, one of the connecting bolts 6 is coaxially arranged with the rotor 3, and the other connecting bolts 6 are arranged at intervals along the circumference of the rotor 3. The coaxial design of the connecting bolts 6 and the rotor 3 helps to maintain the balance and stability of the rotor 3 during operation and reduce vibration and noise. The multiple connecting bolts 6 are arranged at intervals along the circumference of the rotor 3 to more effectively disperse and bear the load generated by the rotor 3, thereby improving the reliability and safety of the connection.

[0038] In the molecular pump provided in this embodiment, an auxiliary cover plate 5, a connecting plate 4 and a rotor 3 are provided, wherein the connecting plate 4 is connected to the rotor 3 by a connecting bolt 6, and the auxiliary cover plate 5 is connected to the connecting plate 4 by an auxiliary bolt 7. The auxiliary cover plate 5 has a streamlined protruding structure to shield the concave structure of the rotor 3. During the rotation of the rotor 3, dust particles hit the protruding structure, changing the movement trajectory of the particles and reducing the flow of particles into the cavity; at the same time, the auxiliary cover plate 5 is shielded to prevent the particles from accumulating in large quantities at the concave structure of the rotor 3, avoiding affecting the dynamic balance of the rotor 3 and improving the operating stability of the rotor 3. By providing a protruding auxiliary cover plate 5, the anti-particle backflow effect can be achieved, the backflow of particles into the cavity can be reduced, the chip yield when the molecular pump is used in the semiconductor etching process can be improved, the accumulation of dust on the turbine can be reduced, and the operating stability of the rotor 3 can be improved.

[0039] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A molecular pump, characterized in that: include: A pump body (1) has a driving member installed in its inner cavity, and a main shaft (2) is provided at the driving end of the driving member; A rotor (3) is rotatably mounted in the pump body (1); one end of the rotor (3) is matched and connected to the main shaft (2); the other end is provided with a matching groove; a matching bolt is installed in the matching groove; the matching bolt penetrates the rotor (3) along the axial direction and is fixedly connected to the main shaft (2); An auxiliary component is installed in the matching groove, the auxiliary component is fixedly connected to the rotor (3), and the auxiliary component completely fills the matching groove.

2. The molecular pump according to claim 1, characterized in that: The auxiliary component is arranged to protrude from a side facing away from the rotor (3).

3. The molecular pump according to claim 2, characterized in that: The side of the auxiliary component facing away from the rotor (3) is a continuous curved surface.

4. The molecular pump according to any one of claims 1 to 3, characterized in that: The side of the auxiliary component facing away from the rotor (3) is arranged in an umbrella shape, the center height of the auxiliary component is higher than the edge height of the auxiliary component, and there is a smooth transition from the center of the auxiliary component to the edge of the auxiliary component.

5. The molecular pump according to any one of claims 1 to 3, characterized in that: The auxiliary component is arranged flush with the rotor (3) on all sides.

6. The molecular pump according to any one of claims 1 to 3, characterized in that: The auxiliary component comprises a connecting plate (4) and an auxiliary cover plate (5), wherein the connecting plate (4) is fixedly connected to the rotor (3), and the auxiliary cover plate (5) is fixedly connected to the connecting plate (4), and the auxiliary cover plate (5) completely covers the notch of the matching groove.

7. The molecular pump according to claim 6, characterized in that: A mounting groove is provided on one side of the connecting plate (4) facing the auxiliary cover plate (5); the connecting plate (4) is connected to the rotor (3) via a connecting bolt (6); and the connecting bolt (6) is installed in the mounting groove.

8. The molecular pump according to claim 7, characterized in that: The auxiliary cover plate (5) and the connecting plate (4) are fixedly connected via auxiliary bolts (7); the auxiliary bolts (7) penetrate the auxiliary cover plate (5) and are threadedly engaged with the connecting plate (4).

9. The molecular pump according to claim 8, characterized in that: The auxiliary bolts (7) are installed on the edge of the auxiliary cover plate (5).

10. The molecular pump according to any one of claims 7 to 9, characterized in that: The connecting bolt (6) is coaxially arranged with the rotor (3); and / or a plurality of connecting bolts (6) are arranged at intervals along the circumference of the rotor (3).

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