High-resolution visual inspection device for surface quality of inner hole of pipe for semiconductor production

Abstract

The invention belongs to the technical field of detection, particularly relates to a high-resolution visual detection device for the surface quality of an inner hole of a pipe for semiconductor production, and aims to overcome the following defects in the prior art: a probe is inconvenient to place at a middle line of a pipeline to influence a peeping effect; meanwhile, the system depends on the technical level and the operation proficiency of an operator; in addition, the possibility of missing detection also exists. In order to solve the problems, the following scheme is provided: the device comprises a fixed cylinder, a rotating plate is rotationally arranged at one end of the fixed cylinder, a brush plate for cleaning the pipe wall is arranged on the rotating plate in a self-adjusting manner, a fan for cleaning impurities is arranged at one end of the rotating plate, and a double-shaft motor is fixedly arranged in the fixed cylinder; by integrating the functions of pipe wall cleaning, high-resolution visual detection and inner wall roughness detection, comprehensive quality detection of the inner hole surface of the pipe for semiconductor production can be completed at a time, and the detection efficiency and accuracy are greatly improved.

Description

Technical Field

[0001] The invention relates to the field of detection technology, and in particular to a high-resolution visual detection device for the surface quality of inner holes of pipes used in semiconductor production. Background Art

[0002] There are many kinds of pipes used in semiconductor production. Stainless steel pipes are often used in gas delivery pipelines in semiconductor manufacturing due to their good strength and corrosion resistance. Due to the characteristics of these gases (such as hydrogen, nitrogen, oxygen, etc.), high requirements are placed on the sealing and physical properties of the pipes. After processing, the pipes need to undergo a series of tests, such as inner wall roughness detection, inner wall defect detection, etc.

[0003] After searching, the invention with the announcement number CN107817249B discloses a non-destructive testing device for the inner wall of a pipe. The device has the following disadvantages during use: It is not convenient to place the probe at the center line of the pipeline during use, which may lead to inconsistent observation distance, thus affecting the peeping effect. In addition, the detection results are largely dependent on the operator's technical level and proficiency, and there is a risk of missed detection. At the same time, EP pipes used in semiconductor production have strict requirements on the surface roughness of the inner surface of the pipe, and commonly used roughness meters can only measure at the pipe mouth and cannot effectively measure the inner surface of the pipe far away from the port. Summary of the invention

[0004] The purpose of the present invention is to solve the problems in the prior art that it is inconvenient to place the probe at the center line of the pipeline, which affects the peeping effect, is more dependent on the operator's personal technical level and operating proficiency, and has the possibility of missed detection. A high-resolution visual inspection device for the surface quality of the inner hole of a pipe for semiconductor production is proposed.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions: A high-resolution visual inspection device for the surface quality of the inner hole of a tube for semiconductor production comprises a fixed cylinder, a rotating plate is rotatably provided at one end of the fixed cylinder, a brush plate for cleaning the tube wall can be self-adjusted on the rotating plate, a fan for cleaning impurities is provided at one end of the rotating plate, a dual-axis motor is fixedly provided in the fixed cylinder, one output end of the dual-axis motor is fixedly connected to the rotating plate, and is used to drive the brush plate to rotate in the tube; A first connecting tube, which is arranged at the other end of the fixed tube, and a supporting mechanism is provided on the first connecting tube, which is used to support the first connecting tube at the center of the pipe without affecting the forward and backward movement of the first connecting tube in the pipe; A second connecting tube, the second connecting tube is arranged at the other end of the first connecting tube, a probe for peeping at the inner wall of the pipe is fixedly provided at the other end of the second connecting tube, a rectangular opening is opened on the outer wall of the second connecting tube, a roughness meter for detecting the roughness of the inner wall of the pipe is adjustable in the second connecting tube, and the other output end of the dual-axis motor passes through the first connecting tube and is connected to the second connecting tube, so as to drive the roughness meter to rotate and move in the pipe; The adjusting mechanism is arranged in the second connecting tube and is used for driving the roughness meter to contact the pipe wall and driving the probe to approach the pipe wall for close observation.

[0006] In a possible design, the supporting mechanism includes two connecting plates fixedly sleeved on the outer walls at both ends of the first connecting tube, four rotating rods are rotatably provided on the mutually close sides of the two connecting plates, and a supporting wheel is rotatably provided on the other end of the rotating rod for reducing the friction between the rotating rod and the tube wall, two sliding rings are slidably provided on the outer wall of the first connecting tube, and two first connecting rods and a second connecting rod are fixedly provided on the outer wall of the sliding ring, and a first sliding column is fixedly penetrated and provided on the other ends of the first connecting rod and the second connecting rod, a first waist-shaped hole is opened on one side of the rotating rod, and the first sliding column is located in the first waist-shaped hole, and an electric push rod is fixedly provided on one side of one of the first connecting rods, and the output end of the electric push rod is fixedly connected to the corresponding connecting plate for driving the sliding ring to move, and the two sliding rings are connected by a transmission member for driving the two sliding rings to move relative to each other, and the connecting plate close to the fixed tube is fixedly connected to the fixed tube.

[0007] In a possible design, the transmission member includes a rotating seat fixedly mounted on the outer wall of the first connecting cylinder, a first gear rotatably disposed in the rotating seat, two first racks meshing with the first gear slidably disposed in the rotating seat, the two first racks are respectively located above and below the first gear, and the ends of the two first racks away from each other are respectively fixedly connected to the corresponding first connecting rods.

[0008] In a possible design, the second connecting rod includes a second sleeve rod fixed on the outer wall of the sliding ring, a second sliding rod is slidably provided in the second sleeve rod, a third spring is provided in the second sleeve rod, two ends of the third spring are respectively fixedly connected to one side inner wall of the second sleeve rod and one end of the second sliding rod, a bolt is threadedly provided on the outer wall of the second sleeve rod, the bottom end of the bolt is in conflict with the second sliding rod, and is used to adjust the length of the second connecting rod. It is suitable for pipes with rectangular end faces.

[0009] In a possible design, a first set of rods is fixedly provided through the top of the rotating plate, a first sliding rod is slidably provided inside the first set of rods, a first spring is provided inside the first set of rods, two ends of the first spring are respectively fixedly connected to the bottom wall of the first set of rods and the bottom of the first sliding rod, and the brush plate is fixedly provided on one side of the first sliding rod for automatically adjusting the position of the brush plate.

[0010] In a possible design, a ball that contacts the tube wall is embedded in the top of the first sliding rod to reduce the friction between the first sliding rod and the tube wall.

[0011] In a possible design, the adjustment mechanism includes a fixing plate fixedly arranged in the second connecting tube, two fixing seats are fixedly arranged on the outer side of the fixing plate, a screw is rotatably provided between the two fixing seats, a second motor is fixedly arranged on the top of the fixing seat located above, an output end of the second motor is fixedly connected to the screw, two guide rails are fixedly arranged on one side of the fixing plate, the outer walls of the two guide rails are slidingly sleeved with the same nut block, the nut block is threadedly sleeved on the screw, a sealing plate is provided on the end of the second connecting tube away from the probe, the other end of the sealing plate is fixedly connected to the corresponding connecting plate, and one side of the nut block is connected to the sealing plate for driving the second connecting tube to move relative to the sealing plate.

[0012] In a possible design, a support plate is fixedly provided in the second connecting tube, and two guide rods are slidably provided on the top of the support plate, and the tops of the two guide rods are fixedly provided with the same mounting seat located above the support plate and corresponding to the rectangular opening, the roughness meter is fixedly provided in the mounting seat, and the bottoms of the two guide rods are fixedly provided with the same connecting strip, the outer wall of the guide rods is sleeved with a second spring, and the two ends of the second spring are respectively fixedly connected to the mutually close sides of the support plate and the connecting strip, a pulley is provided on the inner wall of the second connecting tube, a pull rope is sleeved on the pulley, one end of the pull rope is fixedly connected to the connecting strip, a second waist-shaped hole is opened on one side of the fixed plate, and a rotating shaft is provided in the second waist-shaped hole, one end of the rotating shaft is rotatably connected to the nut block, and the other end of the pull rope is connected to the rotating shaft, and when the fixed plate moves upward, one end of the pull rope can be driven to move by the rotating shaft.

[0013] In one possible design, a second rack is fixedly provided on one side of the fixed plate, a second gear meshing with the second rack is fixedly provided on the outer wall of the rotating shaft, a storage roller is provided on the outer wall of the rotating shaft, and the end of the pull rope away from the connecting strip is fixedly connected to the storage roller, and the outer wall of the rotating shaft is provided with an electromagnet ring located between the storage roller and the second gear, and one end of the electromagnet ring is fixedly connected to the second gear for increasing the extension of the roughness meter.

[0014] In a possible design, an electromagnetic clutch is fixedly provided through one side of the sealing plate, the input end of the electromagnetic clutch is fixedly connected to the output end of the second connecting tube, and the output end of the electromagnetic clutch is fixedly connected to the nut block for controlling the rotation of the roughness meter in the pipe, and the electromagnetic clutch, roughness meter, probe, dual-axis motor and second motor are all connected to an external controller and a computer via cables.

[0015] Beneficial effects: In the present invention, the high-resolution visual inspection device for the inner hole surface quality of the semiconductor production tube can effectively clean the inner wall of the tube before inspection to remove impurities and attachments by designing a self-adjustable brush plate and a fan, thereby providing a strong guarantee for subsequent accurate inspection. At the same time, the brush plate can automatically adapt to tubes of different diameters, thereby improving the versatility and practicality of the device, and the setting of the ball can make the brush plate move more smoothly. In the present invention, the high-resolution visual inspection device for the surface quality of the inner hole of the semiconductor production tube can stably support the device at the center of the tube through the design of the support mechanism, without affecting its forward and backward movement in the tube, thereby enhancing the stability and flexibility of the device. In addition, through the cooperation of the electric push rod and the transmission member, the position of the support mechanism can be automatically adjusted, further improving the automation of the device, and the setting of the second connecting rod can make it applicable to tubes of different sizes and tubes with rectangular end faces; In the present invention, the high-resolution visual inspection device for the surface quality of the inner hole of the semiconductor production tube can realize the dual inspection of the roughness and surface quality of the inner wall of the tube through the adjustable roughness meter and the probe, thereby improving the comprehensiveness and accuracy of the inspection. The adjustment mechanism can accurately control the position of the roughness meter and the probe to ensure that they can fit closely to the inner wall of the tube, thereby obtaining more accurate inspection data. In the present invention, the high-resolution visual inspection device for the inner hole surface quality of the semiconductor production tube can quickly drive the roughness meter to extend close to the tube wall through the coordinated use of the pull rope and the storage roller, and can also increase the movement formation during the movement through the coordinated use of the second gear and the second rack, so that it can be suitable for larger tube inspection; In the present invention, by integrating the functions of tube wall cleaning, high-resolution visual inspection and inner wall roughness inspection, comprehensive quality inspection of the inner hole surface of the tube for semiconductor production can be completed at one time, which greatly improves the inspection efficiency and accuracy and makes it easier and more convenient to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of the three-dimensional structure of a high-resolution visual inspection device for the surface quality of the inner hole of a semiconductor production tube proposed by the present invention; Figure 2A schematic diagram of the three-dimensional structure of the high-resolution visual inspection device for the surface quality of the inner hole of a semiconductor production tube provided by the present invention from another perspective; Figure 3 This is a schematic diagram of the brush plate installation structure of the high-resolution visual inspection device for the inner hole surface quality of the semiconductor production tube proposed by the present invention; Figure 4 A schematic diagram of the support wheel installation structure of the high-resolution visual inspection device for the inner hole surface quality of semiconductor production pipes proposed by the present invention; Figure 5 A schematic diagram of the structure of a circular pipe in which the support wheel of the high-resolution visual inspection device for the surface quality of the inner hole of a semiconductor production tube provided by the present invention is located; Figure 6 A schematic diagram of the structure of a square pipe in which the support wheel of the high-resolution visual inspection device for the surface quality of the inner hole of a semiconductor production pipe provided by the present invention is located; Figure 7 A schematic diagram of the cross-sectional structure of the second connecting rod of the high-resolution visual inspection device for the surface quality of the inner hole of a tube for semiconductor production proposed by the present invention; Figure 8 It is a schematic cross-sectional structure diagram of the second connecting tube of the high-resolution visual inspection device for the surface quality of the inner hole of a tube for semiconductor production proposed by the present invention; Fig. 9 This is a schematic diagram of the pulley and pull rope connection structure of the high-resolution visual inspection device for the surface quality of the inner hole of a tube for semiconductor production proposed by the present invention; Fig.10 for Fig. 9 Schematic diagram of the enlarged structure of part A in the middle.

[0017] In the figure: 1, fixed cylinder; 2, rotating plate; 3, fan; 4, brush plate; 5, connecting plate; 6, first connecting cylinder; 7, electric push rod; 8, rotating rod; 9, supporting wheel; 10, sealing plate; 11, second connecting cylinder; 12, rectangular opening; 13, roughness meter; 14, probe; 15, cable; 16, double-axis motor; 17, first set of rods; 18, first spring; 19, first sliding rod; 20, ball bearing; 21, sliding ring; 22, first connecting rod; 23, second connecting rod; 24, first sliding column; 25, first waist-shaped hole; 26, rotating seat; 27 , the first gear; 28, the first rack; 30, the electromagnetic clutch; 31, the fixed seat; 32, the guide rail; 33, the screw; 34, the nut block; 35, the second motor; 36, the fixed plate; 37, the support plate; 38, the mounting seat; 39, the guide rod; 40, the connecting strip; 41, the second spring; 42, the second waist-shaped hole; 43, the second rack; 44, the pulley; 45, the pull rope; 46, the rotating shaft; 47, the second gear; 48, the electromagnet ring; 49, the storage roller; 50, the second set of rods; 51, the second sliding rod; 52, the bolt; 53, the third spring. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0019] Example 1: Reference Figure 1-Figure 10 , a high-resolution visual inspection device, comprising: a fixed cylinder 1, at one end of which a rotatable rotating plate 2 is installed. On this rotating plate 2, a self-adjustable brush plate 4 is designed to clean the inner wall of the pipe. In order to ensure that the brush plate 4 can fit closely to the inner wall of the pipe, a first set of rods 17 is fixed through the top of the rotating plate 2, and a first sliding rod 19 is slidably arranged in the first set of rods 17, and a first spring 18 is arranged between the two. The two ends of the first spring 18 are fixedly connected to the bottom wall of the first set of rods 17 and the bottom of the first sliding rod 19 respectively. The brush plate 4 is fixedly arranged on one side of the first sliding rod 19. The elastic force of the first spring 18 can automatically adjust the position of the brush plate 4 to make it close to the inner wall of the pipe. At the same time, a ball 20 is embedded in the top of the first sliding rod 19, which can effectively reduce the friction between the first sliding rod 19 and the pipe wall, making the movement of the brush plate 4 smoother.

[0020] A fan 3 is also provided at one end of the rotating plate 2 to clean the impurities generated during the scrubbing process. The wind force of the fan 3 can blow the impurities out of the pipe to ensure the cleanliness of the detection environment.

[0021] A dual-shaft motor 16 is fixedly installed inside the fixed cylinder 1. One output end of the dual-shaft motor 16 is fixedly connected to the rotating plate 2, and is used to drive the rotating plate 2 and the brush plate 4 to rotate inside the pipe, thereby achieving comprehensive cleaning of the inner wall of the pipe.

[0022] Next, the first connecting cylinder 6 is designed, which is arranged at the other end of the fixed cylinder 1. In order to support the first connecting cylinder 6 and ensure that it can move back and forth inside the pipe without affecting the detection, a supporting mechanism is designed on the first connecting cylinder 6. This supporting mechanism includes two connecting plates 5, which are fixedly sleeved on the outer walls of both ends of the first connecting cylinder 6. Four rotating rods 8 are rotatably provided on each connecting plate 5, and the other end of the rotating rod 8 is rotatably installed with a supporting wheel 9. These supporting wheels 9 can reduce the friction between the rotating rod 8 and the inner wall of the pipe, so that the first connecting cylinder 6 moves more smoothly inside the pipe.

[0023] In addition, two sliding rings 21 are slidably provided on the outer wall of the first connecting tube 6. The two sliding rings 21 are connected to the connecting plate 5 through the first connecting rod 22 and the second connecting rod 23 through the first sliding column 24 and the first waist-shaped hole 25. An electric push rod 7 is fixedly provided on one side of one of the first connecting rods 22, and the output end of the electric push rod 7 is fixedly connected to the corresponding connecting plate 5, which is used to drive the sliding ring 21 to move. In order to drive the two sliding rings 21 to move relative to each other, a transmission member is designed. This transmission member includes a rotating seat 26, which is fixedly provided on the outer wall of the first connecting tube 6. A first gear 27 is rotatably installed in the rotating seat 26, and two first racks 28 meshing with the first gear 27 are slidably provided. The two first racks 28 are respectively located above and below the first gear 27, and their ends away from each other are respectively fixedly connected to the corresponding first connecting rod 22. When the electric push rod 7 is working, it will drive one of the sliding rings 21 to move through the connecting plate 5 and the first connecting rod 22, and then drive the other sliding ring 21 to move through the transmission member, thereby achieving tight support for the inner wall of the pipe.

[0024] To adapt to rectangular pipes, the second connecting rod 23 includes a second sleeve rod 50 fixedly arranged on the outer wall of the sliding ring 21, a second sliding rod 51 slidingly arranged inside the second sleeve rod 50, a third spring 53 arranged inside the second sleeve rod 50, and two ends of the third spring 53 are respectively fixedly connected to an inner wall of one side of the second sleeve rod 50 and one end of the second sliding rod 51, a bolt 52 is threadedly provided through the outer wall of the second sleeve rod 50, and the bottom end of the bolt 52 is in conflict with the second sliding rod 51, which is used to adjust the length of the second connecting rod 23 and is suitable for pipes with rectangular end faces.

[0025] At the other end of the first connecting tube 6, a second connecting tube 11 is provided. A probe 14 is fixedly installed at the other end of the second connecting tube 11 for peeping at the inner wall of the pipe. At the same time, a rectangular opening 12 is opened on the outer wall of the second connecting tube 11, and a roughness meter 13 is adjustably installed inside the opening for detecting the roughness of the inner wall of the pipe. The other output end of the dual-axis motor 16 passes through the first connecting tube 6 and is connected to the second connecting tube 11, thereby driving the roughness meter 13 and the probe 14 to rotate and move inside the pipe.

[0026] In order to achieve close contact between the roughness meter 13 and the inner wall of the pipe and close observation of the probe 14 , an adjustment mechanism is designed in the second connecting tube 11 .

[0027] The adjustment mechanism includes a fixed plate 36 fixedly installed inside the second connecting tube 11. Two fixed seats 31 are fixedly set on the outside of the fixed plate 36. A screw rod 33 is rotatably installed between the two fixed seats 31, and a second motor 35 is fixedly installed on the top of the upper fixed seat 31, and the output end of the second motor 35 is fixedly connected to the screw rod 33. At the same time, two guide rails 32 are also fixedly installed on one side of the fixed plate 36. A nut block 34 is slidably sleeved on the outer wall of the two guide rails 32. The nut block 34 is threadedly sleeved on the screw rod 33, so when the screw rod 33 rotates, the nut block 34 will move linearly along the guide rail 32.

[0028] A sealing plate 10 is provided at one end of the second connecting tube 11 away from the probe 14. The other end of the sealing plate 10 is fixedly connected to the corresponding connecting plate 5. One side of the nut block 34 is connected to the sealing plate 10. In this way, when the nut block 34 moves under the drive of the screw rod 33, it drives the second connecting tube 11 to move relative to the sealing plate 10, thereby adjusting the position of the probe 14 and the roughness meter 13.

[0029] In order to more accurately control the position of the roughness meter 13, a support plate 37 is fixedly installed inside the second connecting cylinder 11. Two guide rods 39 are slidably installed on the top of the support plate 37. The tops of the two guide rods 39 are fixedly connected to a mounting seat 38 located above the support plate 37. The position of the mounting seat 38 corresponds to the rectangular opening 12, and the roughness meter 13 is fixedly installed inside the mounting seat 38.

[0030] A connecting strip 40 is fixedly connected to the bottom of the two guide rods 39. A second spring 41 is sleeved on the outer wall of the guide rod 39. The two ends of the second spring 41 are fixedly connected to the support plate 37 and the side of the connecting strip 40 close to each other. In this way, when the mounting seat 38 and the roughness meter 13 are not subjected to external force, they can be reset by the guide rod 39 and the second spring 41.

[0031] A pulley 44 is also provided on the inner wall of the second connecting cylinder 11. A pull rope 45 is wound around the pulley 44. One end of the pull rope 45 is fixedly connected to the connecting strip 40. On one side of the fixing plate 36, a second waist-shaped hole 42 is provided. A rotating shaft 46 is provided in the second waist-shaped hole 42. One end of the rotating shaft 46 is rotationally connected to the nut block 34, and the other end of the pull rope 45 is connected to the rotating shaft 46.

[0032] When the fixing plate 36 moves upward under the drive of the nut block 34, it drives one end of the pull rope 45 to move through the rotating shaft 46. In this way, the pull rope 45 pulls the connecting strip 40 and the guide rod 39 to move through the guiding effect of the pulley 44, thereby driving the mounting seat 38 and the roughness meter 13 to extend or retract.

[0033] The present application can be used in the field of pipe inspection, and can also be used in other fields applicable to the present application.

[0034] Example 2: Reference Figure 1-Figure 10 , improved on the basis of Example 1: a high-resolution visual inspection device for the surface quality of the inner hole of a semiconductor production tube, which is applied to the field of tube inspection, in order to increase the extension length of the roughness meter 13, a second rack 43 is fixedly arranged on one side of the fixed plate 36. A second gear 47 meshing with the second rack 43 is fixedly sleeved on the outer wall of the rotating shaft 46. In this way, when the rotating shaft 46 rotates, it will move accurately in a straight line through the meshing action of the second gear 47 and the second rack 43.

[0035] A receiving roller 49 is also rotatably sleeved on the outer wall of the rotating shaft 46. One end of the pull rope 45 away from the connecting strip 40 can be fixedly connected to the receiving roller 49. In this way, when the length of the pull rope 45 needs to be adjusted, it can be achieved by rotating the receiving roller 49.

[0036] On the outer wall of the rotating shaft 46, an electromagnet ring 48 is sleeved between the receiving roller 49 and the second gear 47. One end of the electromagnet ring 48 is fixedly connected to the second gear 47. When the electromagnet ring 48 is energized, it generates magnetism, thereby attracting the rotating shaft 46 to rotate. In this way, the extension length of the roughness meter 13 can be increased by controlling the energized state of the electromagnet ring 48.

[0037] In addition, an electromagnetic clutch 30 is fixedly installed on one side of the sealing plate 10. The input end of the electromagnetic clutch 30 is fixedly connected to the output end of the second connecting cylinder 11, and its output end is fixedly connected to the nut block 34. In this way, the rotation of the roughness meter 13 in the pipe can be controlled by controlling the power-on state of the electromagnetic clutch 30.

[0038] Finally, the electromagnetic clutch 30, the roughness meter 13, the probe 14, the dual-axis motor 16 and the second motor 35 are all connected to the external controller and the computer through the cable 15. In this way, we can remotely control and collect data on the entire detection device through the computer.

[0039] In the present application, when in use, the brush plate 4 is pressed downward so that the brush plate 4 can smoothly enter the pipe. In the process of pressing the brush plate 4, the first sliding rod 19 can be driven to move downward in the first set rod 17 and compress the first spring 18. After insertion, the brush plate 4 is released. At this time, the first sliding rod 19 can move upward under the action of the first spring 18 and drive the brush plate 4 to move upward until the ball 20 hits the inner wall of the pipe. After full insertion, the electric push rod 7 is started to retract. The retraction of the electric push rod 7 can drive the corresponding first connecting rod 22 to approach the connecting plate 5. The movement of the first connecting rod 22 can drive the remaining first connecting rods 22 to move closer to the connecting plate 5 through the sliding ring 21. A connecting rod 22 and a second connecting rod 23 move, and during the movement of the first connecting rod 22 and the second connecting rod 23, the first sliding column 24 can be driven to slide in the first waist-shaped hole 25, thereby driving the rotating rod 8 to rotate and expand outward on the connecting plate 5, and during the movement of the first connecting rod 22 on one side, the first rack 28 below can be driven to move, and the movement of the first rack 28 below can drive the first rack 28 above to move in the opposite direction through the first gear 27, thereby driving the sliding ring 21 on the other side to approach the other connecting plate 5, and opening the other set of rotating rods 8, until both sets of supporting wheels 9 are in contact with the inner wall of the pipe; Then, the dual-axis motor 16 is started. The rotation of the dual-axis motor 16 can drive the rotating plate 2 to rotate. The rotation of the rotating plate 2 can drive the first sliding rod 19 to rotate through the first set of rods 17, thereby driving the brush plate 4 to rotate in the pipe to clean the inner wall of the pipe. At the same time, the fan 3 is started to blow the cleaned impurities to one end of the pipe, and at the same time, the cable 15 is pushed to drive the device to move in the pipe, and the inner wall of the pipe is observed through the probe 14; When it is necessary to detect the roughness of the pipe wall, the second motor 35 is started, and the second motor 35 can drive the screw rod 33 to rotate. The rotation of the screw rod 33 can drive the nut block 34 to move. Since the second connecting tube 11 is in a suspended state, the screw rod 33 can move upward on the nut block 34 when it rotates, thereby driving the second connecting tube 11 to move upward. During the upward movement of the second connecting tube 11, the fixing plate 36 can be driven to move upward. During the upward movement of the fixing plate 36, one end of the pull rope 45 can be pulled downward through the storage roller 49, and the other end of the pull rope 45 can be driven upward through the pulley 44, thereby pulling the connecting strip 40 to move upward. The upward movement of the connecting strip 40 can drive the support plate 37 to move upward through the two guide rods 39. The upward movement of the support plate 37 can drive the mounting seat 38 to move upward, thereby driving the roughness meter 13 to contact the pipe wall for detection, and during the upward movement of the second connecting tube 11, the probe 14 can be driven to move upward, so that the pipe wall can be observed at a close distance; When the distance between the pipe wall and the second connecting tube 11 is large, the electromagnet ring 48 is started during the upward movement of the fixing plate 36 to fix the receiving roller 49 and the second gear 47. At this time, the fixing plate 36 can drive the second gear 47 to rotate through the second rack 43 during the upward movement, and the rotation of the second gear 47 can drive the receiving roller 49 to rotate, so that the fixing plate 36 moves upward while receiving one end of the pull rope 45 through the receiving roller 49, which can increase the moving distance of the other end of the pull rope 45, thereby driving the roughness meter 13 to contact the pipe wall with a larger distance. When it is necessary to adjust the position of the roughness meter 13 on the pipe wall, the push-pull cable 15 can be used to drive the device to move inside the pipe wall, and the electromagnetic clutch 30 can be started. At this time, during the startup of the dual-axis motor 16, the input end of the electromagnetic clutch 30 can be driven to rotate through the other output end. The rotation of the input end can drive the output end to rotate, thereby driving the nut block 34 to rotate. During the rotation of the nut block 34, the fixing plate 36 can be driven to rotate through the two guide rails 32 and the screw 33. The rotation of the fixing plate 36 can drive the second connecting cylinder 11 to rotate, thereby driving the roughness meter 13 to rotate inside the pipe.

[0040] However, as is well known to those skilled in the art, the working principles and wiring methods of the electromagnetic clutch 30, the roughness meter 13, the probe 14, the dual-axis motor 16 and the second motor 35 are commonplace, and are all conventional means or common knowledge, and will not be elaborated here. Those skilled in the art can make any optional selections according to their needs or convenience.

[0041] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A high-resolution visual inspection device for the surface quality of the inner hole of a tube used in semiconductor production, characterized in that: It comprises a fixed cylinder (1), one end of which is rotatably provided with a rotating plate (2), the rotating plate (2) being provided with a brush plate (4) for cleaning the pipe wall in a self-adjustable manner, one end of which is provided with a fan (3) for cleaning impurities, a double-axis motor (16) being fixedly provided in the fixed cylinder (1), one output end of which is fixedly connected to the rotating plate (2) and being used to drive the brush plate (4) to rotate in the pipe; a first connecting tube (6), the first connecting tube (6) being arranged at the other end of the fixed tube (1), the first connecting tube (6) being provided with a supporting mechanism for supporting the first connecting tube (6) at the center of the pipe without affecting the forward and backward movement of the first connecting tube (6) in the pipe; a second connecting tube (11), the second connecting tube (11) being arranged at the other end of the first connecting tube (6), a probe (14) for observing the inner wall of the pipe being fixedly provided at the other end of the second connecting tube (11), a rectangular opening (12) being provided on the outer wall of the second connecting tube (11), a roughness meter (13) for detecting the roughness of the inner wall of the pipe being adjustable inside the second connecting tube (11), the other output end of the dual-axis motor (16) passing through the first connecting tube (6) and being connected to the second connecting tube (11), being used to drive the roughness meter (13) to rotate and move inside the pipe; The adjustment mechanism is arranged in the second connecting tube (11) and is used to drive the roughness meter (13) to contact the pipe wall and drive the probe (14) to approach the pipe wall for close observation.

2. The high-resolution visual inspection device for the inner hole surface quality of semiconductor production pipes according to claim 1, characterized in that: The support mechanism comprises two connecting plates (5) fixedly sleeved on the outer walls of both ends of the first connecting tube (6); four rotating rods (8) are rotatably provided on the mutually adjacent sides of the two connecting plates (5); the other ends of the rotating rods (8) are rotatably provided with support wheels (9) for reducing friction between the rotating rods (8) and the tube wall; two sliding rings (21) are slidably provided on the outer wall of the first connecting tube (6); two first connecting rods (22) and a second connecting rod (23) are fixedly provided on the outer wall of the sliding ring (21); the other ends of the first connecting rods (22) and the second connecting rods (23) are both penetrated by the fixed device A first sliding column (24) is provided, a first waist-shaped hole (25) is provided on one side of the rotating rod (8), the first sliding column (24) is located in the first waist-shaped hole (25), an electric push rod (7) is fixedly provided on one side of one of the first connecting rods (22), the output end of the electric push rod (7) is fixedly connected to the corresponding connecting plate (5) for driving the sliding ring (21) to move, the two sliding rings (21) are connected via a transmission member for driving the two sliding rings (21) to move relative to each other, and the connecting plate (5) close to the fixed cylinder (1) is fixedly connected to the fixed cylinder (1).

3. The high-resolution visual inspection device for the inner hole surface quality of semiconductor production pipes according to claim 2, characterized in that: The transmission member comprises a rotating seat (26) fixedly mounted on the outer wall of the first connecting cylinder (6), a first gear (27) being rotatably mounted in the rotating seat (26), two first racks (28) meshing with the first gear (27) being slidably mounted in the rotating seat (26), the two first racks (28) being respectively located above and below the first gear (27), and ends of the two first racks (28) being away from each other being respectively fixedly connected to corresponding first connecting rods (22).

4. The high-resolution visual inspection device for the inner hole surface quality of semiconductor production pipes according to claim 2, characterized in that: The second connecting rod (23) comprises a second sleeve rod (50) fixedly arranged on the outer wall of the sliding ring (21), a second sliding rod (51) being slidably arranged inside the second sleeve rod (50), a third spring (53) being arranged inside the second sleeve rod (50), two ends of the third spring (53) being respectively fixedly connected to an inner wall of one side of the second sleeve rod (50) and one end of the second sliding rod (51), a bolt (52) being threadedly passed through the outer wall of the second sleeve rod (50), the bottom end of the bolt (52) being in contact with the second sliding rod (51) and being used to adjust the length of the second connecting rod (23), and being suitable for pipes with rectangular end faces.

5. The high-resolution visual inspection device for the surface quality of the inner hole of a semiconductor production tube according to claim 1, characterized in that: A first sleeve rod (17) is fixedly provided through the top of the rotating plate (2), a first sliding rod (19) is slidably provided inside the first sleeve rod (17), a first spring (18) is provided inside the first sleeve rod (17), two ends of the first spring (18) are respectively fixedly connected to the bottom wall of the first sleeve rod (17) and the bottom of the first sliding rod (19), and the brush plate (4) is fixedly provided on one side of the first sliding rod (19) for automatically adjusting the position of the brush plate (4).

6. The high-resolution visual inspection device for the inner hole surface quality of semiconductor production pipes according to claim 5, characterized in that: A rolling ball (20) that contacts the tube wall is embedded on the top of the first sliding rod (19) and is used to reduce the friction between the first sliding rod (19) and the tube wall.

7. The high-resolution visual inspection device for the inner hole surface quality of semiconductor production pipes according to claim 1, characterized in that: The adjustment mechanism comprises a fixing plate (36) fixedly arranged in the second connecting tube (11), two fixing seats (31) being fixedly arranged on the outer side of the fixing plate (36), a screw rod (33) being rotatably provided between the two fixing seats (31), a second motor (35) being fixedly arranged on the top of the fixing seat (31) located at the upper side, an output end of the second motor (35) being fixedly connected to the screw rod (33), two guide rails (32) being fixedly arranged on one side of the fixing plate (36), the outer walls of the two guide rails (32) being slidably sleeved with the same nut block (34), the nut block (34) being threadedly sleeved on the screw rod (33), a sealing plate (10) being provided at one end of the second connecting tube (11) away from the probe (14), the other end of the sealing plate (10) being fixedly connected to the corresponding connecting plate (5), one side of the nut block (34) being connected to the sealing plate (10) for driving the second connecting tube (11) to move relative to the sealing plate (10).

8. The high-resolution visual inspection device for the inner hole surface quality of semiconductor production pipes according to claim 7, characterized in that: A support plate (37) is fixedly provided in the second connecting tube (11), two guide rods (39) are slidably provided through the top of the support plate (37), a mounting seat (38) located above the support plate (37) and corresponding to the rectangular opening (12) is fixedly provided on the top of the two guide rods (39), the roughness meter (13) is fixedly provided in the mounting seat (38), a connecting strip (40) is fixedly provided on the bottom of the two guide rods (39), a second spring (41) is sleeved on the outer wall of the guide rod (39), and two ends of the second spring (41) are respectively connected to the support plate (37) and the connecting strip (40). The second connecting tube (11) and the second connecting tube (11) are fixedly connected at one side close to each other, a pulley (44) is provided on the inner wall of the second connecting tube (11), a pulley (44) is sleeved with a pull rope (45), one end of the pull rope (45) is fixedly connected to the connecting strip (40), a second waist-shaped hole (42) is opened on one side of the fixing plate (36), a rotating shaft (46) is provided in the second waist-shaped hole (42), one end of the rotating shaft (46) is rotatably connected to the nut block (34), and the other end of the pull rope (45) is connected to the rotating shaft (46), and when the fixing plate (36) moves upward, one end of the pull rope (45) can be driven to move through the rotating shaft (46).

9. The high-resolution visual inspection device for the inner hole surface quality of semiconductor production pipes according to claim 8, characterized in that: A second rack (43) is fixedly provided on one side of the fixed plate (36); a second gear (47) meshing with the second rack (43) is fixedly provided on the outer wall of the rotating shaft (46); a storage roller (49) is rotatably provided on the outer wall of the rotating shaft (46); an end of the pull rope (45) away from the connecting strip (40) is fixedly connected to the storage roller (49); an electromagnet ring (48) located between the storage roller (49) and the second gear (47) is provided on the outer wall of the rotating shaft (46); one end of the electromagnet ring (48) is fixedly connected to the second gear (47) for increasing the extension stroke of the roughness meter (13).

10. The high-resolution visual inspection device for the inner hole surface quality of semiconductor production pipes according to claim 7, characterized in that: An electromagnetic clutch (30) is fixedly provided through one side of the sealing plate (10); an input end of the electromagnetic clutch (30) is fixedly connected to an output end of the second connecting tube (11); an output end of the electromagnetic clutch (30) is fixedly connected to a nut block (34) for controlling the roughness meter (13) to rotate in the pipe; the electromagnetic clutch (30), the roughness meter (13), the probe (14), the dual-axis motor (16) and the second motor (35) are all connected to an external controller and a computer via a cable (15).

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