Quartz furnace tube flame polishing equipment and polishing method

Abstract

The invention discloses a quartz furnace tube flame polishing device and a polishing method, and relates to the technical field of plate processing. The device comprises a base, and also comprises: a supporting mechanism for supporting the bottom of the quartz furnace tube and driving the quartz furnace tube to rotate; a driving mechanism for driving the supporting mechanism to operate; an active adjusting mechanism for driving the supporting mechanism to rise and fall; a polishing mechanism for sequentially flame polishing the quartz furnace tube along its length direction; and a linkage mechanism for sequentially driving each active adjusting mechanism to operate. The quartz furnace tube flame polishing device and the polishing method drive the roller at the position to descend and break away from the contact with the quartz furnace tube before the first flame polishing gun and the second flame polishing gun reach the polishing position contacting with the roller, thereby avoiding the problem that the quartz furnace tube is easily deformed due to the temperature increase when the flame polishing is performed on the position contacting with the roller, and ensuring the quality of the quartz furnace tube after flame polishing.

Description

Technical Field

[0001] The invention relates to the technical field of plate processing, and in particular to quartz furnace tube flame polishing equipment and a polishing method. Background Art

[0002] Since quartz furnace tubes have a series of excellent properties, they are widely used in modern advanced semiconductor process, especially in semiconductor silicon wafers and other occasions. Among them, the quartz furnace tubes with the largest consumption are the quartz furnace tubes used in high-temperature processes such as annealing, oxidation, and diffusion. In the quartz semiconductor industry, there are extremely high technical requirements for their polishing, and flame polishing is required to make the appearance reach the crystal clear and near-zero defect quality requirements.

[0003] A patent with publication number CN117510056A discloses a flame polishing device for a quartz furnace tube, the polishing device includes a positioning fixture and a polishing robot, the positioning fixture includes: a workbench; a first rotating shaft, which is arranged on the workbench and can rotate along the axis direction, and a first roller is provided on the first rotating shaft, and the first roller is configured to rotate along with the first rotating shaft; a second rotating shaft, which is arranged side by side with the first rotating shaft on the workbench and can rotate along the axis direction, and a second roller is provided on the second rotating shaft, and the second roller is configured to rotate along with the second rotating shaft;

[0004] The above-mentioned related technology has the following defects: when the contact position between the roller and the quartz furnace tube is flame-polished, the contact position is easily deformed due to the increase in temperature at the contact position, and the roller at this position is difficult to effectively drive the quartz furnace tube to rotate, thereby generating a speed difference with other positions, affecting the quality of the quartz furnace tube after flame polishing. Summary of the invention

[0005] The object of the present invention is to provide a quartz furnace tube flame polishing device and a polishing method to solve the above-mentioned deficiencies in the prior art.

[0006] In order to achieve the above object, the present invention provides the following technical solution: a quartz furnace tube flame polishing device, comprising a base, and further comprising:

[0007] A supporting mechanism is arranged inside the base and is provided with a plurality of supporting mechanisms for supporting the bottom of the quartz furnace tube and driving the quartz furnace tube to rotate;

[0008] A driving mechanism, which is connected to the supporting mechanism and is used to drive the supporting mechanism to operate;

[0009] An active adjustment mechanism, which is connected to the support mechanism and is used to drive the support mechanism to rise and fall;

[0010] A polishing mechanism is installed on the base and is used to perform flame polishing on the quartz furnace tube in sequence along its length direction;

[0011] The linkage mechanism is connected with the polishing mechanism and is used to drive each active adjustment mechanism to operate in sequence.

[0012] Further, the support mechanism includes a support frame arranged inside the base and two driven shafts rotatably connected inside the support frame;

[0013] Rollers are fixedly sleeved on the exteriors of the two driven shafts.

[0014] Further, the driving mechanism includes a transmission shaft rotatably connected to an outer wall of one side of the support frame and a driving shaft rotatably connected to an inner wall of the bottom of the base;

[0015] The two driven shafts are connected to the transmission shaft via a first transmission member;

[0016] The outside of the driving shaft is slidably sleeved with a sliding sleeve, and the outsides of the sliding sleeve and the transmission shaft are fixedly sleeved with bevel gears, and the two bevel gears are meshed with each other;

[0017] A connecting block is rotatably sleeved on the outside of the sliding sleeve, and the connecting block is also rotatably sleeved on the outside of the transmission shaft.

[0018] Furthermore, a first motor is installed inside the base, and the first motor is connected to one of the drive shafts via a second transmission member;

[0019] Two adjacent driving shafts are connected in transmission via a third transmission member.

[0020] Furthermore, the active adjustment mechanism includes two linkage shafts rotatably connected to the inner wall of the bottom of the base and two linkage blocks respectively fixed to the outer walls on both sides of the support frame;

[0021] The outsides of the two linkage shafts are fixedly sleeved with reciprocating screws, and the linkage block is screwed on the outsides of the reciprocating screws;

[0022] The linkage block is also slidably connected to the inner wall of the base;

[0023] The two linkage shafts are transmission connected via a fourth transmission member.

[0024] Further, the polishing mechanism includes a screw rod rotatably connected to the inner wall of the base, a slider screwed to the outside of the screw rod, and a first flame assembly and a second flame assembly mounted on the slider;

[0025] A second motor is installed on the outer wall of one side of the base, and an output end of the second motor is fixedly connected to one end of the screw rod;

[0026] A guide rod is arranged below the screw rod, the guide rod is fixedly connected to the inner wall of the base, and the sliding block is also slidably sleeved on the outside of the guide rod.

[0027] Further, the first flame assembly includes a first flame polishing gun installed inside the slider and a first connecting pipe installed at one end of the first flame polishing gun;

[0028] The first flame polishing gun is arranged along the width direction of the base and is used for flame polishing the outer wall of the quartz furnace tube.

[0029] Further, the second flame assembly includes a slide fixedly connected to an outer wall of one side of the slide and a second flame polishing gun installed inside the slide;

[0030] The slide is slidably connected to the interior of the base;

[0031] The second flame polishing gun is arranged along the height direction of the base and is used to flame polish the inner wall of the quartz furnace tube;

[0032] One end of the second flame polishing gun is connected to a second connecting pipe.

[0033] Furthermore, the linkage mechanism includes a rack fixedly connected to the bottom end of the slider and a gear fixedly sleeved on the outside of one of the linkage shafts in the active adjustment mechanism;

[0034] The rack meshes with the gears in each active adjustment mechanism in sequence when moving.

[0035] Furthermore, the base is also provided with an air cooling mechanism, which includes an air duct installed inside the base and a plurality of shunt pipes installed on the outer wall of the air duct;

[0036] The support frame is a hollow structure, and the plurality of diversion pipes are respectively connected to the interior of the plurality of support frames;

[0037] A plurality of air holes are arranged on the top of the support frame.

[0038] A quartz furnace tube flame polishing method, which uses a quartz furnace tube flame polishing device, includes the following steps: first, a staff member places the quartz furnace tube on top of two rollers in each supporting mechanism, controls the first motor to drive the rollers on each supporting frame to rotate at the same speed, thereby driving the quartz furnace tube to rotate stably, controls the second motor to drive the lead screw to rotate, drives the slider to move in sections, and drives the first flame polishing gun and the second flame polishing gun to polish the outer wall and the inner wall of the quartz furnace tube respectively when the slider moves. When the slider moves to the left, it drives the reciprocating screw to rotate, drives the linkage block to move down from the top end of the reciprocating screw to the bottom end thereof, thereby driving the supporting frame and the roller to move downward synchronously, so that the roller is separated from the quartz furnace tube, thereby driving the first flame polishing gun and the second flame polishing gun to reach the polishing position in contact with the roller. The roller at this position is first driven to descend and disengage from the quartz furnace tube. When the slider continues to move to the left, the reciprocating screw is driven to continue to rotate, and the linkage block is driven to move from the bottom end of the reciprocating screw to its top end, thereby driving the support frame and the roller to move up and reset, so that the support frame and the roller at this position continue to support and drive the quartz furnace tube, and in this way, the rollers in each supporting mechanism are driven to descend in turn from left to right according to the polishing positions of the first flame polishing gun and the second flame polishing gun, so as to achieve the effect of not causing deformation of the contact position between the roller and the quartz furnace tube due to temperature conduction. In the process of the support frame and the roller moving up and resetting, cold air is input into the support frame through the air duct and the shunt pipe, and discharged through the air holes on the top of the support frame, and the rotation of the quartz furnace tube is coordinated to achieve cooling of the area that has just been flame polished.

[0039] Compared with the prior art, the quartz furnace tube flame polishing equipment and polishing method provided by the present invention have the following beneficial effects: before the first flame polishing gun and the second flame polishing gun reach the polishing position in contact with the roller, the roller at the position is driven to descend and break contact with the quartz furnace tube, thereby avoiding the problem of deformation of the quartz furnace tube due to temperature increase when the position in contact with the roller is flame polished, thereby ensuring the quality of the quartz furnace tube after flame polishing. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0041] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0042] Figure 2 It is a schematic diagram of the internal structure of the base of the present invention from a first viewing angle;

[0043] Figure 3 A schematic diagram of the internal structure of the base of the present invention from a second viewing angle;

[0044] Figure 4 It is a schematic diagram of the structure of the air cooling mechanism of the present invention;

[0045] Figure 5 It is a schematic diagram of the structures of the support mechanism, local drive mechanism, active adjustment mechanism and local air cooling mechanism of the present invention.

[0046] Description of reference numerals:

[0047] 1. Base; 2. Support frame; 3. Driven shaft; 4. Roller; 5. Transmission shaft; 6. Drive shaft; 7. First transmission member; 8. Sleeve; 9. Bevel gear; 10. Connecting block; 11. First motor; 12. Second transmission member; 13. Third transmission member; 14. Linkage shaft; 15. Linkage block; 16. Reciprocating screw; 17. Fourth transmission member; 18. Lead screw; 19. Slider; 20. Second motor; 21. Guide rod; 22. First flame polishing gun; 23. First connecting pipe; 24. Slide; 25. Second flame polishing gun; 26. Second connecting pipe; 27. Rack; 28. Gear; 29. ​​Air duct; 30. Diverter pipe; 31. Air hole. DETAILED DESCRIPTION

[0048] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0049] Example 1: Please refer to Figure 1 - Figure 5 , a quartz furnace tube flame polishing device, comprising a base 1, and further comprising:

[0050] The supporting mechanism is arranged inside the base 1 and is provided with a plurality of parts, and is used to support the bottom of the quartz furnace tube and drive the quartz furnace tube to rotate. The supporting mechanism includes a supporting frame 2 arranged inside the base 1 and two driven shafts 3 rotatably connected inside the supporting frame 2; rollers 4 are fixedly sleeved on the outside of the two driven shafts 3;

[0051] First, the staff places the quartz furnace tube on the top of the two rollers 4 in each supporting mechanism, so that the quartz furnace tube is between the two rollers 4 in the same supporting mechanism. The rollers 4 support the quartz furnace tube and drive the two driven shafts 3 in the same supporting mechanism to rotate, thereby driving the corresponding two rollers 4 to rotate synchronously, thereby driving the quartz furnace tube to rotate.

[0052] A driving mechanism is connected to the supporting mechanism and is used to drive the supporting mechanism to operate. The driving mechanism includes a transmission shaft 5 rotatably connected to the outer wall of one side of the supporting frame 2 and a driving shaft 6 rotatably connected to the inner wall of the bottom of the base 1; the two driven shafts 3 and the transmission shaft 5 are both connected through a first transmission member 7, and the first transmission member 7 includes two synchronous wheels fixedly sleeved on the outside of the driven shaft 3 and the transmission shaft 5, and a synchronous belt connected to the outside of the two synchronous wheels; the outside of the driving shaft 6 is slidably sleeved with a sliding sleeve 8, and the outside of the sliding sleeve 8 and the transmission shaft 5 are fixedly sleeved with a bevel gear 9, and the two bevel gears 9 are meshed with each other; the outside of the sliding sleeve 8 is rotatably sleeved with a connecting block 10, and the connecting block 10 is also rotatably sleeved on the outside of the transmission shaft 5. A first motor 11 is installed inside the base 1, and the first motor 11 is connected to one of the drive shafts 6 through a second transmission member 12, and the second transmission member 12 includes two synchronous wheels fixedly sleeved on the outside of the output shaft of the first motor 11 and the outside of the drive shaft 6, and a synchronous belt connected to the outside of the two synchronous wheels; two adjacent drive shafts 6 are connected to each other through a third transmission member 13, and the third transmission member 13 includes two synchronous wheels fixedly sleeved on the outside of the two drive shafts 6, and a synchronous belt connected to the outside of the two synchronous wheels;

[0053] By controlling the first motor 11 to cooperate with the second transmission member 12 to drive one of the driving shafts 6 to rotate, the driving shafts 6 are kept rotating synchronously through the transmission connection of the third transmission members 13. When the driving shaft 6 rotates, the transmission shaft 5 is driven to rotate through the meshing effect between the two bevel gears 9. The two driven shafts 3 are kept rotating through the transmission connection of the two first transmission members 7, thereby driving the two rollers 4 to rotate synchronously, further realizing that the rollers 4 on each support frame 2 rotate at the same speed, thereby driving the quartz furnace tube to rotate stably;

[0054] When the support frame 2 and the roller 4 are raised or lowered, the connecting block 10 is driven to rise or fall synchronously through the transmission shaft 5, thereby driving the sliding sleeve 8 to slide synchronously along the outside of the driving shaft 6, so that the two bevel gears 9 are always kept in meshing state.

[0055] An active adjustment mechanism is connected to the support mechanism and is used to drive the support mechanism to rise and fall. The active adjustment mechanism includes two linkage shafts 14 rotatably connected to the inner wall of the bottom of the base 1 and two linkage blocks 15 respectively fixed to the outer walls of both sides of the support frame 2; the outer parts of the two linkage shafts 14 are fixedly sleeved with reciprocating screws 16, and the linkage blocks 15 are screwed to the outer parts of the reciprocating screws 16; the linkage blocks 15 are also slidably connected to the inner wall of the base 1; the two linkage shafts 14 are connected by a fourth transmission member 17, and the fourth transmission member 17 includes two synchronous wheels respectively fixedly sleeved on the outer parts of the two linkage shafts 14 and a synchronous belt connected to the outer parts of the two synchronous wheels;

[0056] When one of the linkage shafts 14 rotates, the fourth transmission member 17 is used to connect the two linkage shafts 14 so that the two linkage shafts 14 keep rotating synchronously. When the linkage shaft 14 rotates, it drives the reciprocating screw 16 to rotate synchronously, thereby driving the linkage block 15 to rise or fall, thereby driving the roller 4 to rise or fall through the support frame 2, so as to achieve the purpose of controlling the contact and discontinuity between the roller 4 and the quartz furnace tube.

[0057] A polishing mechanism is installed on a base 1 and is used to flame polish the quartz furnace tube in sequence along its length direction. The polishing mechanism includes a screw rod 18 rotatably connected to the inner wall of the base 1, a slider 19 screwed to the outside of the screw rod 18, and a first flame assembly and a second flame assembly installed on the slider 19; a second motor 20 is installed on the outer wall of one side of the base 1, and the output end of the second motor 20 is fixedly connected to one end of the screw rod 18; a guide rod 21 is provided below the screw rod 18, and the guide rod 21 is fixedly connected to the inner wall of the base 1, and the slider 19 is also slidably sleeved on the outside of the guide rod 21. The first flame assembly includes a first flame polishing gun 22 installed inside the slider 19 and a first connecting pipe 23 installed at one end of the first flame polishing gun 22, and the first connecting pipe 23 is connected to the flame host; the first flame polishing gun 22 is arranged along the width direction of the base 1, and is used to flame polish the outer wall of the quartz furnace tube. The second flame assembly includes a slide 24 fixed to the outer wall of one side of the slider 19 and a second flame polishing gun 25 installed inside the slide 24; the slide 24 is slidably connected to the inside of the base 1; the second flame polishing gun 25 is arranged along the height direction of the base 1, and is used to flame polish the inner wall of the quartz furnace tube; one end of the second flame polishing gun 25 is connected to a second connecting pipe 26, and the second connecting pipe 26 is connected to the flame host;

[0058] After the quartz furnace tube is placed, the quartz furnace tube is driven to rotate, and the second motor 20 is controlled to drive the screw rod 18 to rotate, and the slider 19 is driven to move to the left along the outside of the guide rod 21, and the movement is segmented, that is, the slider 19 is driven to pause every time it moves a certain distance. The moving distance is the distance for flame polishing the quartz furnace tube each time. When the slider 19 moves, it drives the first flame polishing gun 22 to move synchronously, and drives the second flame polishing gun 25 to move synchronously through the slide 24. The outer wall and the inner wall of the quartz furnace tube are polished by the first flame polishing gun 22 and the second flame polishing gun 25 respectively;

[0059] The distance between two adjacent support frames 2 is twice the distance the slider 19 moves each time, that is, the slider 19 needs to move to the left twice to move from the position of one support frame 2 to the position of another support frame 2 on its left side.

[0060] The linkage mechanism is connected to the polishing mechanism and is used to sequentially drive each active adjustment mechanism to operate. The linkage mechanism includes a rack 27 fixed to the bottom end of the slider 19 and a gear 28 fixedly sleeved on the outside of one of the linkage shafts 14 in the active adjustment mechanism; the rack 27 is sequentially meshed with the gears 28 in each active adjustment mechanism when moving;

[0061] When the slider 19 moves to the left, it drives the rack 27 to move synchronously, and through the meshing effect between the rack 27 and the gear 28 on one side thereof, it drives the linkage shaft 14 to rotate, and the reciprocating screw 16 rotates synchronously therewith, driving the linkage block 15 to move down from the top end of the reciprocating screw 16 to the bottom end thereof, thereby driving the support frame 2 and the roller 4 to move downward synchronously, so that the roller 4 is separated from the quartz furnace tube, thereby driving the first flame polishing gun 22 and the second flame polishing gun 25 to reach the polishing position in contact with the roller 4, and first driving the roller 4 at this position to descend and separate from the quartz furnace tube, thereby avoiding the problem of deformation of the quartz furnace tube due to the temperature increase when the flame polishing treatment is performed on the contact position with the roller 4;

[0062] When the slider 19 continues to move to the left, the gear 28 and the linkage shaft 14 continue to rotate through the rack 27, and the reciprocating screw 16 continues to rotate, driving the linkage block 15 to move from the bottom end of the reciprocating screw 16 to its top end, thereby driving the support frame 2 and the roller 4 to move up and reset, and the rack 27 and the gear 28 lose engagement, so that the support frame 2 and the roller 4 at this position continue to support and drive the quartz furnace tube. In this cycle, from left to right, according to the polishing positions to be polished by the first flame polishing gun 22 and the second flame polishing gun 25, the rollers 4 in each supporting mechanism are driven down in turn to achieve the effect of not causing deformation of the contact position between the roller 4 and the quartz furnace tube due to temperature conduction.

[0063] The base 1 is also provided with an air cooling mechanism, which includes an air duct 29 installed inside the base 1 and a plurality of shunt pipes 30 installed on the outer wall of the air duct 29, and a solenoid valve is installed on the shunt pipe 30; the support frame 2 is a hollow structure, and the plurality of shunt pipes 30 are respectively connected to the interior of the plurality of support frames 2; a plurality of air holes 31 are opened on the top of the support frame 2, and a telescopic baffle can be set on the left side of the support frame 2 to control the wind direction so that the cold wind does not blow to the flame polishing area on the left side;

[0064] In the process of the support frame 2 and the roller 4 moving up and resetting, the solenoid valve on the shunt pipe 30 connected to the support frame 2 is opened, and cold air is input into the inside of the support frame 2 through the air duct 29 and the shunt pipe 30, and discharged through the air hole 31 at the top of the support frame 2. In conjunction with the rotation of the quartz furnace tube, the area that has just undergone flame polishing is cooled. After the support frame 2 is reset, the solenoid valve is closed.

[0065] Example 2: Please refer to Figure 1 - Figure 5The flame polishing method of quartz furnace tube adopts the flame polishing equipment of quartz furnace tube, and comprises the following steps: firstly, the staff places the quartz furnace tube on the top of two rollers 4 in each supporting mechanism, so that the quartz furnace tube is between the two rollers 4 in the same supporting mechanism, and the rollers 4 play the role of supporting the quartz furnace tube, and the first motor 11 is controlled to cooperate with the second transmission member 12 to drive one of the driving shafts 6 to rotate, and the driving shafts 6 are kept rotating synchronously through the transmission connection of each third transmission member 13. When the driving shaft 6 rotates, the transmission shaft 5 is driven to rotate through the meshing effect between the two bevel gears 9, and the two driven shafts 3 are kept rotating through the transmission connection of the two first transmission members 7, thereby driving the two rollers 4 to rotate synchronously, and further realizing The rollers 4 on each support frame 2 rotate at the same speed, thereby driving the quartz furnace tube to rotate stably. The second motor 20 is controlled to drive the screw rod 18 to rotate, and the slider 19 is driven to move to the left along the outside of the guide rod 21, and the movement is segmented, that is, the slider 19 is driven to pause every time it moves a certain distance. The moving distance is the distance that the quartz furnace tube is flame-polished each time. When the slider 19 moves, it drives the first flame polishing gun 22 to move synchronously, and drives the second flame polishing gun 25 to move synchronously through the slide 24. The outer wall and the inner wall of the quartz furnace tube are polished by the first flame polishing gun 22 and the second flame polishing gun 25 respectively. Among them, when the slider 19 moves to the left, it drives the rack 27 to move synchronously, and the rack 27 is meshed with the gear 28 on one side thereof. The action of the linkage shaft 14 is driven to rotate, and the reciprocating screw 16 rotates synchronously, driving the linkage block 15 to move down from the top end of the reciprocating screw 16 to the bottom end thereof, thereby driving the support frame 2 and the roller 4 to move downward synchronously, so that the roller 4 is separated from the quartz furnace tube, thereby driving the first flame polishing gun 22 and the second flame polishing gun 25 to reach the polishing position in contact with the roller 4, and first driving the roller 4 at this position to descend and separate from the quartz furnace tube, thereby avoiding the problem of deformation of the quartz furnace tube due to temperature increase when the contact position with the roller 4 is flame polished. When the slider 19 continues to move to the left, the gear 28 and the linkage shaft 14 continue to rotate through the rack 27, and the reciprocating screw 16 continues to rotate, driving the linkage block 15 from the reciprocating screw 16 The bottom end of the support frame 2 moves up to its top end, thereby driving the support frame 2 and the roller 4 to move up and reset, and the rack 27 and the gear 28 lose engagement, so that the support frame 2 and the roller 4 at this position continue to support and drive the quartz furnace tube, and in this cycle, from left to right, according to the polishing positions to be polished by the first flame polishing gun 22 and the second flame polishing gun 25, the rollers 4 in each supporting mechanism are driven down in turn, so as to achieve the effect of not causing the contact position between the roller 4 and the quartz furnace tube to be deformed due to heat conduction. In the process of the support frame 2 and the roller 4 moving up and resetting, the solenoid valve on the shunt pipe 30 connected to the support frame 2 is opened, and cold air is input into the support frame 2 through the air duct 29 and the shunt pipe 30, and discharged through the air hole 31 on the top of the support frame 2, in conjunction with the rotation of the quartz furnace tube,To achieve cooling of the area that has just been flame polished.

[0066] It should be noted that the device structure and drawings of the present invention mainly describe the principle of the present invention. In terms of the technology of the design principle, the settings of the power mechanism, power supply system and control system of the device are not fully described. On the premise that the technical personnel in the field understand the principle of the above invention, the specific details of the power mechanism, power supply system and control system can be clearly known. The control method of the application document is to automatically control by a controller, and the control circuit of the controller can be realized by simple programming by the technical personnel in the field; the above only describes some exemplary embodiments of the present invention by way of explanation. Undoubtedly, for ordinary technicians in the field, the described embodiments can be modified in various different ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A quartz furnace tube flame polishing device, comprising a base (1), characterized in that: Also includes: A supporting mechanism, which is arranged inside the base (1) and is provided with a plurality of supporting mechanisms, and is used to support the bottom of the quartz furnace tube and drive the quartz furnace tube to rotate; A driving mechanism, which is connected to the supporting mechanism and is used to drive the supporting mechanism to operate; An active adjustment mechanism, which is connected to the support mechanism and is used to drive the support mechanism to rise and fall; A polishing mechanism, which is mounted on the base (1) and is used to perform flame polishing on the quartz furnace tube in sequence along its length direction; A linkage mechanism, which is connected to the polishing mechanism and is used to sequentially drive each active adjustment mechanism to operate; The active adjustment mechanism comprises two linkage shafts (14) rotatably connected to the inner wall of the bottom of the base (1) and two linkage blocks (15) respectively fixed to the outer walls on both sides of the support frame (2); The exteriors of the two linkage shafts (14) are both fixedly sleeved with reciprocating screws (16), and the linkage block (15) is screwed onto the exteriors of the reciprocating screws (16); The linkage block (15) is also slidably connected to the inner wall of the base (1); The two linkage shafts (14) are transmission-connected via a fourth transmission member (17); The polishing mechanism comprises a screw rod (18) rotatably connected to the inner wall of the base (1), a slider (19) screwed to the outside of the screw rod (18), and a first flame assembly and a second flame assembly mounted on the slider (19); A second motor (20) is mounted on an outer wall of one side of the base (1), and an output end of the second motor (20) is fixedly connected to one end of the screw rod (18); A guide rod (21) is provided below the screw rod (18), the guide rod (21) is fixedly connected to the inner wall of the base (1), and the slider (19) is also slidably sleeved on the outside of the guide rod (21); The linkage mechanism comprises a rack (27) fixedly connected to the bottom end of the slider (19) and a gear (28) fixedly sleeved on the outside of one of the linkage shafts (14) in the active adjustment mechanism; The rack (27) meshes with the gears (28) in each active adjustment mechanism in sequence when moving.

2. The quartz furnace tube flame polishing equipment according to claim 1, characterized in that: The support mechanism comprises a support frame (2) arranged inside the base (1) and two driven shafts (3) rotatably connected inside the support frame (2); Rollers (4) are fixedly sleeved on the exteriors of the two driven shafts (3).

3. The quartz furnace tube flame polishing equipment according to claim 2, characterized in that: The driving mechanism comprises a transmission shaft (5) rotatably connected to an outer wall of one side of the support frame (2) and a driving shaft (6) rotatably connected to an inner wall of the bottom of the base (1); The two driven shafts (3) and the transmission shaft (5) are both connected in transmission via a first transmission member (7); The outside of the driving shaft (6) is slidably sleeved with a sliding sleeve (8), and the outsides of the sliding sleeve (8) and the transmission shaft (5) are fixedly sleeved with a bevel gear (9), and the two bevel gears (9) are meshed with each other; A connecting block (10) is rotatably sleeved on the outside of the sliding sleeve (8), and the connecting block (10) is also rotatably sleeved on the outside of the transmission shaft (5).

4. The quartz furnace tube flame polishing equipment according to claim 3, characterized in that: A first motor (11) is installed inside the base (1), and the first motor (11) is connected to one of the drive shafts (6) in a transmission manner via a second transmission member (12); Two adjacent drive shafts (6) are connected in transmission via a third transmission member (13).

5. The quartz furnace tube flame polishing equipment according to claim 4, characterized in that: The first flame assembly comprises a first flame polishing gun (22) installed inside the slide block (19) and a first connecting pipe (23) installed at one end of the first flame polishing gun (22); The first flame polishing gun (22) is arranged along the width direction of the base (1) and is used to flame polish the outer wall of the quartz furnace tube.

6. The quartz furnace tube flame polishing equipment according to claim 5, characterized in that: The second flame assembly comprises a slide (24) fixedly connected to an outer wall of one side of the slide block (19) and a second flame polishing gun (25) installed inside the slide (24); The slide frame (24) is slidably connected to the interior of the base (1); The second flame polishing gun (25) is arranged along the height direction of the base (1) and is used to flame polish the inner wall of the quartz furnace tube; One end of the second flame polishing gun (25) is connected to a second connecting pipe (26).

7. The quartz furnace tube flame polishing equipment according to claim 6, characterized in that: The base (1) is also provided with an air cooling mechanism, the air cooling mechanism comprising an air duct (29) installed inside the base (1) and a plurality of flow dividers (30) installed on the outer wall of the air duct (29); The support frame (2) is a hollow structure, and the plurality of flow diversion pipes (30) are respectively connected to the interior of the plurality of support frames (2); A plurality of air holes (31) are provided on the top of the support frame (2).

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