Ultrasonic-based rotational symmetry surface modeling and positioning method and system

Abstract

The invention provides a rotational symmetry surface modeling and positioning method and system based on ultrasonic waves. The method comprises the steps that a sample is installed, wherein the sample is installed on a sample installation platform; sample circle center calibration: calibrating the sample and a sample rotating shaft to be concentric; ultrasonic wave is used for non-contact distance measurement, parameters of an oblique line of the surface of the sample are obtained, and the oblique line is an oblique line from the circle center to the boundary; parameters of an oblique line are used for fitting to obtain an oblique line curve, and the oblique line curve is used for 360-degree rotation modeling. According to the rotational symmetry surface modeling method, system and device based on the ultrasonic waves, modeling of the rotational symmetry surface is achieved through the ultrasonic waves, measurement is stable, measurement precision is high, and the problems that optical measurement performance is poor and even fails can be solved; based on a model established by ultrasonic waves, accurate positioning can be realized, the measurement sensor is moved to the optimal working position of each point to be measured, and the optimal working state is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of surface modeling, and in particular to an ultrasonic-based rotationally symmetric surface modeling, positioning method and system. Background Art

[0002] In industry and scientific exploration, there is a wide range of application demands for analyzing and modeling the surface morphology of objects. For example, it is very necessary to obtain the morphology characteristics of some precision machined parts, wafer surfaces, display screens, etc. when testing product quality or performing other scientific applications.

[0003] In response to such needs, a large number of modeling and measurement sensors on the market can be roughly divided into two categories: the first category is contact sensing, which measures by directly contacting the surface of the object and ultimately obtains the surface information of the object. The most representative product is AFM (atomic force microscope); the second category is non-contact sensing. Since the surfaces of some objects being measured are relatively sensitive and cannot be directly measured by contact, most of these sensors use optical or acoustic methods to perform non-contact measurements on the surface of the object to meet this demand, such as microwave sensors, white light interferometers, etc.

[0004] Among the existing non-contact measurement methods, optical sensing has the best comprehensive performance and the widest application range. However, when facing transparent and smooth surfaces, optical sensors will greatly affect their working performance, or even completely fail. Microwave ranging has a great impact on the measurement results due to the instability of electromagnetic waves, and is rarely used in surface modeling. Summary of the invention

[0005] The present invention provides a rotationally symmetric surface modeling and positioning method and system based on ultrasonic waves, so as to solve the problems of poor performance and unstable measurement when facing a smooth surface in the existing non-contact measurement.

[0006] In order to solve the above technical problems, the present invention is achieved through the following technical solutions:

[0007] According to a first aspect of the present invention, there is provided a method for modeling a rotationally symmetric surface based on ultrasound, comprising:

[0008] Sample installation: installing the sample on a sample installation platform;

[0009] Sample center calibration: calibrate the sample and the sample rotation axis to be concentric;

[0010] Ultrasonic modeling: Use ultrasound to perform non-contact distance measurement on the surface of the sample to obtain the parameters of an oblique line on the surface of the sample, where the oblique line is the oblique line from the center of the circle to the boundary; use the parameters of the oblique line to fit an oblique line curve, and use the oblique line curve to perform 360-degree rotation modeling.

[0011] Preferably, the sample center calibration specifically includes:

[0012] Installation error calibration: using a camera to obtain the boundary of the sample to perform installation error calibration;

[0013] Center verification: verify whether the sample and the sample rotation axis are concentric, if not, return to the installation error calibration.

[0014] Preferably, the installation error calibration specifically includes:

[0015] First installation error calibration: using a camera to obtain the left and right boundaries of the sample, obtaining a first installation error, and correcting the sample based on the first installation error;

[0016] Sample rotation: rotating the sample 90 degrees around the sample rotation axis;

[0017] Second installation error calibration: the left and right boundaries of the sample are obtained by using the camera again to obtain a second installation error, so as to correct the sample based on the second installation error.

[0018] Preferably, the circle center verification specifically includes:

[0019] The sample is rotated around the sample rotation axis, and during the sample rotation, an image of the sample boundary is acquired by using a camera; the position of the camera is fixed;

[0020] During the rotation of the sample, it is determined that the image acquired by the camera is always the same. If so, the circle center verification is completed; if not, the installation error calibration is returned.

[0021] Preferably, the method of obtaining the parameters of an oblique line on the surface of the sample by using ultrasound specifically includes:

[0022] Determine the initial position of the ultrasonic sensor: move the ultrasonic sensor to an initial position, wherein the initial position is located at a preset distance vertically above the center of the sample;

[0023] Ultrasonic sensor driving: driving the ultrasonic sensor to translate along a straight line; during the translation process, the ultrasonic sensor continuously detects, and stops the translation when the vertical distance detected by the ultrasonic sensor changes by a preset value; obtaining the angle between the current measurement position of the sample and the line connecting the center of the sample relative to the horizontal direction of the sample, and when the angle is not zero, driving the ultrasonic sensor to rotate by the same angle so that the vertical detection direction of the ultrasonic sensor is perpendicular to the section at the current detection position of the sample, and ensuring that it is the same as the original measurement distance; recording the current detection position and detection distance of the sample;

[0024] Detect whether the ultrasonic sensor reaches the boundary of the sample, if yes, end the process, otherwise return to continue to execute the translation of the ultrasonic sensor.

[0025] According to a second aspect of the present invention, there is provided a positioning method, comprising:

[0026] Modeling using the ultrasonic-based rotationally symmetric surface modeling method as described in any one of claims 1 to 5 to obtain a sample model;

[0027] Acquire parameters of the point to be measured based on the sample model, and move the measuring sensor to the top of the point to be measured based on the parameters of the point to be measured;

[0028] The distance between the measuring sensor and the point to be measured is made within the working distance range of the measuring sensor; so as to measure the surface characteristics of the point to be measured by using the measuring sensor.

[0029] According to a third aspect of the present invention, there is provided an ultrasonic-based rotationally symmetric surface modeling system, comprising:

[0030] The sample installation module comprises: a sample installation platform and a sample rotation axis; the sample installation platform is used to install the sample;

[0031] A sample center calibration module, used to calibrate the sample and the sample rotation axis to be concentric;

[0032] The ultrasonic modeling module is used to use ultrasonic waves to perform non-contact distance measurement on the surface of the sample, obtain the parameters of an oblique line on the surface of the sample, and the oblique line is the oblique line from the center of the circle to the boundary; use the parameters of the oblique line to fit the oblique line curve, and use the oblique line curve to perform 360-degree rotation modeling.

[0033] Preferably, the sample center calibration module specifically includes:

[0034] An installation error calibration unit, used for obtaining the boundary of the sample by using a camera to perform installation error calibration;

[0035] The center verification unit is used to verify that the sample and the sample rotation axis are cocentric.

[0036] Preferably, the installation error calibration unit specifically comprises:

[0037] A first installation error calibration unit, used for acquiring the left and right boundaries of the sample by using a camera to obtain a first installation error, so as to correct the sample based on the first installation error;

[0038] A sample rotating part, used to rotate the sample 90 degrees around the sample rotation axis;

[0039] The second installation error calibration unit is used to use the camera to obtain the left and right boundaries of the sample again to obtain a second installation error, so as to correct the sample based on the second installation error.

[0040] Preferably, the ultrasonic modeling module specifically includes:

[0041] An ultrasonic sensor initial position determination module, used to move the ultrasonic sensor to an initial position, wherein the initial position is located at a preset distance vertically above the center of the sample;

[0042] The ultrasonic sensor driving module is used to drive the ultrasonic sensor to translate along a straight line; during the translation process, the ultrasonic sensor continues to detect, and stops translating when the vertical distance detected by the ultrasonic sensor changes by a preset value; obtains the angle between the current measurement position of the sample and the line connecting the circle of the sample relative to the horizontal direction of the sample, and when the angle is greater than zero, drives the ultrasonic sensor to rotate by the same angle so that the vertical detection direction of the ultrasonic sensor is perpendicular to the section at the current detection position of the sample, and ensures that it is the same as the original measurement distance; records the current detection position and detection distance of the sample;

[0043] The module for detecting whether the ultrasonic sensor reaches the boundary of the sample is used to detect whether the ultrasonic sensor reaches the boundary of the sample. If yes, the process ends; otherwise, the process returns to continue the translation of the ultrasonic sensor, that is, returns to the ultrasonic sensor driving module.

[0044] According to a fourth aspect of the present invention, there is provided an ultrasonic-based rotationally symmetric surface modeling device, comprising:

[0045] Specimen mounting platform, used for mounting specimens;

[0046] A sample rotating shaft, used to drive the sample to rotate;

[0047] A micro-actuator, used for micro-adjusting the installation position of the sample;

[0048] A camera, used to capture an image of the sample;

[0049] A camera driver, used for driving the movement of the camera;

[0050] An ultrasonic sensor, used for non-contact distance measurement of the surface of the sample;

[0051] The ultrasonic sensor driver is used to drive the movement of the ultrasonic sensor.

[0052] According to a fifth aspect of the present invention, there is provided a positioning system, comprising:

[0053] Specimen mounting platform, used for mounting specimens;

[0054] A sample rotating shaft, used to drive the sample to rotate;

[0055] A micro-actuator, used for micro-adjusting the installation position of the sample;

[0056] A camera, used to capture an image of the sample;

[0057] A camera driver, used for driving the movement of the camera;

[0058] An ultrasonic sensor, used for non-contact distance measurement of the surface of the sample;

[0059] A measuring sensor, used for measuring the surface characteristics of the sample;

[0060] A sensor driver is used to drive the movement of the ultrasonic sensor and the measuring sensor.

[0061] According to a sixth aspect of the present invention, there is provided an electronic device, comprising:

[0062] processor;

[0063] and, a memory for storing processor-executable instructions;

[0064] The processor implements the steps in any of the above methods by running the executable instructions.

[0065] According to a seventh aspect of the present invention, there is provided a computer-readable storage medium having a computer program stored thereon, wherein the computer program implements the steps in any one of the above methods when executed by a processor.

[0066] The ultrasonic-based rotationally symmetrical surface modeling and positioning method and system provided by the present invention, for a rotationally symmetrical surface, after calibration of the center of a circle, uses ultrasonic ranging to measure a hypotenuse parameter, and then achieves modeling of the surface morphology through rotational restoration. The measurement is stable and accurate, and the problem of poor optical measurement performance or even failure can be avoided.

[0067] In an optional solution of the present invention, during the sample center calibration process, after the sample installation error calibration, the center verification is also included to make the calibration result more accurate.

[0068] In an optional solution of the present invention, after the sample error in one direction is calibrated, the sample error in that direction is also calibrated by rotating the sample 90 degrees; that is, the lateral error calibration and the longitudinal error calibration are performed, and the calibration result is more accurate.

[0069] In an optional solution of the present invention, during the distance measurement process using ultrasound, when the vertical measurement distance changes by a preset distance, not only is the measurement position recorded, but the ultrasonic sensor is also adjusted (rotated) so that the vertical measurement direction of the ultrasonic sensor is perpendicular to the section at the measurement position, making subsequent measurement results more accurate.

[0070] The ultrasonic-based rotationally symmetrical surface modeling and positioning method and system provided by the present invention can accurately move the measurement sensor to the optimal working position of each point to be measured according to the sample model obtained by ultrasonic modeling, thereby ensuring the optimal working state and making the measurement result more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0071] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0072] Figure 1 It is a flow chart of a rotationally symmetric surface modeling method based on ultrasound according to an embodiment of the present invention;

[0073] Figure 2 A flow chart of a sample circular calibration according to a preferred embodiment of the present invention;

[0074] Figure 3 A flowchart of installation error calibration according to a preferred embodiment of the present invention;

[0075] Figure 4 A flowchart of ultrasound modeling for a preferred embodiment of the present invention;

[0076] Figure 5 is a flow chart of a positioning method according to an embodiment of the present invention;

[0077] Figure 6 is a schematic diagram of a rotationally symmetric surface modeling system based on ultrasound according to an embodiment of the present invention;

[0078] Figure 7 A schematic diagram of a rotationally symmetric surface modeling device based on ultrasound according to an embodiment of the present invention;

[0079] Figure 8 is a schematic diagram of a positioning system according to an embodiment of the present invention;

[0080] Fig. 9 is a schematic diagram of an electronic device according to an embodiment of the present invention;

[0081] Description of reference numerals:

[0082] 11- Sample installation module,

[0083] 12- Sample center calibration module,

[0084] 13-Ultrasonic modeling module;

[0085] 21- Sample installation platform,

[0086] 22-Specimen rotation axis,

[0087] 23- Micro-actuator,

[0088] 24-Camera,

[0089] 25- Camera Driver,

[0090] 26-Ultrasonic sensor,

[0091] 27-ultrasonic sensor driver;

[0092] 28- measuring sensor;

[0093] 291- lateral motion axis,

[0094] 292-longitudinal motion axis,

[0095] 293-rotational motion axis;

[0096] 31- Processor,

[0097] 32-internal bus,

[0098] 33- Network interface,

[0099] 34-Memory,

[0100] 35-Memory. DETAILED DESCRIPTION

[0101] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0102] In the description of the specification of the present invention, it is necessary to understand that the orientation or position relationship indicated by the terms "upper part", "lower part", "upper end", "lower end", "lower surface", "upper surface", etc. is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0103] In the description of the present specification, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features.

[0104] In the description of the present invention, "plurality" means a plurality, such as two, three, four, etc., unless otherwise clearly and specifically defined.

[0105] In the description of the present invention, unless otherwise clearly specified and limited, the term "connection" and other terms should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0106] The technical solution of the present invention is described in detail with specific embodiments below. The following specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described in detail in some embodiments.

[0107] In one embodiment, a rotationally symmetric surface modeling method based on ultrasound is provided. Figure 1 , which includes:

[0108] S11: Sample installation: install the sample on the sample installation platform;

[0109] S12: Sample center calibration: calibrate the sample and the sample rotation axis to be concentric;

[0110] S13: Ultrasonic modeling: Use ultrasonic waves to perform non-contact distance measurement on the surface of the sample, obtain the parameters of a slant line on the surface of the sample, which can reflect the surface information. The slant line is the slant line from the center of the circle to the boundary; use the parameters of the slant line to fit the slant line curve, and then use the slant line curve to perform 360-degree rotation modeling. Because the surface is rotationally symmetric, the overall surface information can be obtained by rotating a slant line 360 ​​degrees.

[0111] In one embodiment, in order to make the center calibration more accurate, verification is performed after calibration. For details, please refer to Figure 2 , the specimen center calibration includes:

[0112] S121: Installation error calibration: using a camera to obtain the boundary of the sample to perform installation error calibration;

[0113] S122: Center verification: Verify whether the specimen and the specimen rotation axis are concentric. If the verification is passed, the specimen center calibration is completed. If the verification fails, return to the process and perform installation error calibration again.

[0114] In order to make the installation error calibration result more accurate, calibration can be performed from multiple directions, that is, multiple calibrations can be performed. In one embodiment, two calibrations are taken as an example. For details, please refer to Figure 3 , installation error calibration includes:

[0115] S1211: First installation error calibration: Use the camera to obtain the left and right boundaries of the sample. If the movement distances of the camera when obtaining the left and right boundaries of the sample are equal, it means that the installation in this direction is accurate, there is no error, and no calibration is required; if the movement distances are not equal, the first installation error is obtained according to the difference between the two movement distances, and the sample is corrected based on the first installation error; it can be understood as lateral installation error calibration;

[0116] S1212: Sample rotation: rotate the sample 90 degrees around the sample rotation axis;

[0117] S1213: Second installation error calibration: Use the camera again to obtain the left and right boundaries of the sample. If the movement distances are equal when the camera obtains the left and right boundaries of the sample again, it means that there is no error in this direction and no calibration is required. If the movement distances are not equal, the second installation error is obtained according to the difference between the movement distances, and the sample is corrected based on the second installation error. This can be understood as longitudinal installation error calibration.

[0118] In the above embodiment, it can be: after obtaining the first installation error, the sample is corrected based on the first installation error; then it is rotated to perform a second installation error calibration; it can also be: after obtaining two installation errors, the sample is corrected uniformly, and the sample is corrected based on the first installation error and the second installation error.

[0119] In one embodiment, the circle center verification specifically includes:

[0120] The sample is rotated around the sample rotation axis, and during the sample rotation, an image of the sample boundary is acquired by using a camera;

[0121] The position of the camera is fixed; during the rotation of the sample, if the image obtained by the camera is always the same, it means that the center of the sample and the center of the sample rotation axis are consistent, and the center verification is completed; if the image obtained by the camera is different, return to re-calibrate the installation error.

[0122] In one embodiment, please refer to Figure 4 , using ultrasound to obtain the parameters of an oblique line on the surface of the sample, specifically including:

[0123] S131: Determine the initial position of the ultrasonic sensor: Move the ultrasonic sensor to the initial position, which is located at a preset distance vertically above the center of the sample, such as 5 cm. The preset distance can ensure that the ultrasonic sensor does not touch the surface of the sample during translation;

[0124] S132: driving the ultrasonic sensor to translate along a straight line;

[0125] S133: During the translation process, the ultrasonic sensor continues to detect, and when the vertical distance detected by the ultrasonic sensor changes by a preset value (eg, 200 um), the translation stops;

[0126] S134: Obtain the angle between the current measurement position of the sample and the line connecting the circle of the sample and the horizontal direction of the sample. When the angle is not zero, drive the ultrasonic sensor to rotate by the same angle so that the vertical measurement direction of the ultrasonic sensor is perpendicular to the section at the current measurement position of the sample, and ensure that it is the same as the original measurement distance; record the current measurement position (diagonal line node) and measurement distance of the sample;

[0127] S135: Check whether the ultrasonic sensor reaches the boundary of the sample. If yes, the process ends. Otherwise, the process returns to continue moving the ultrasonic sensor, that is, returns to S132.

[0128] As an implementation mode, when the surface of the sample is concave, the vertical distance detected during the translation of the ultrasonic sensor in S133 (i.e., from the center to the edge of the sample) is continuously reduced. At this time, S133 is specifically as follows: during the translation process, when the vertical distance detected by the ultrasonic sensor is reduced by a preset value, the translation is stopped.

[0129] Of course, in different embodiments, the surface of the sample is not necessarily concave, and may be convex. In this case, during the translation process, the vertical distance detected by the ultrasonic sensor increases continuously. At this time, the translation stops when the preset value is increased.

[0130] Through the above process, multiple oblique line nodes of the surface are obtained, and a curve related to the oblique line of the sample can be obtained through polynomial fitting.

[0131] In one embodiment, based on the ultrasound modeling method of any of the above embodiments, a positioning method is provided. Figure 5 , which includes:

[0132] S21: Modeling is performed using the modeling method of any of the above embodiments to obtain a sample model;

[0133] S22: For the selected point to be measured, the parameters of the point to be measured are obtained based on the sample model, and the measuring sensor is moved above the point to be measured based on the parameters of the point to be measured.

[0134] In practice, the parameters of the point to be measured may include its horizontal and vertical coordinate values. Preferably, it may also include the rotation angle of the measuring sensor, which is the rotation angle that makes the vertical measuring direction of the measuring sensor perpendicular to the tangent plane at the point to be measured, that is, the measuring sensor can be accurately moved to the top of the point to be measured according to the preset angle, so that the measuring angle of the measuring sensor is optimal, and the measurement is more accurate. Correspondingly, the movement of the measuring sensor based on the parameters of the point to be measured may include horizontal and vertical movements, and may also include rotational movements.

[0135] S23: The distance between the measuring sensor and the point to be measured is set within the working distance range of the measuring sensor; and the surface features of the point to be measured are measured by using the measuring sensor.

[0136] The ultrasonic sensor can also move with the measuring sensor. When it moves above the point to be measured, the vertical distance to the point to be measured can be measured by the ultrasonic sensor. When the vertical distance is not within the working distance range of the measuring sensor, the measuring sensor can be driven to move vertically up and down so that the distance between the measuring sensor and the point to be measured is within the working distance range.

[0137] Most of the non-contact positioning methods in the prior art are industrial cameras. When facing a transparent and smooth surface, such optical sensors cannot provide users with distance, surface information (such as: morphology) and other information through accurate images. The positioning method of the embodiment of the present invention can obtain accurate distance information through the ultrasonic distance measurement value after ultrasonic modeling is completed, and the precise coordinates of each measurement point in the model, which can assist the measurement sensor to perform higher quality, higher efficiency and safer work.

[0138] As an implementation mode, when the vertical distance is not within the working distance range of the measuring sensor, the distance for driving the measuring sensor to move vertically up and down can be calculated based on the difference between the vertical distance measured by the ultrasonic sensor and the working distance. Preferably, after moving into position, the ultrasonic sensor can be used to measure again to confirm whether it is within the working distance range.

[0139] As another implementation, when the vertical distance is not within the working distance range of the measuring sensor, the measuring sensor is driven to move vertically up and down, and during the movement, the ultrasonic sensor can be used to continuously measure until the distance is within the working distance range.

[0140] In one embodiment, the ultrasonic sensor and the measuring sensor can be installed on the same mounting platform, and the mounting platform can realize the switching between the two; when the ultrasonic sensor is needed for measurement, the ultrasonic sensor is switched to the working position, and when the measuring sensor is needed for measurement, the measuring sensor is switched to the working position. Starting from ultrasonic modeling, the ultrasonic sensor is used until it is confirmed that the distance between the sensor and the point to be measured is within the working distance range of the measuring sensor; then the ultrasonic sensor is switched to the measuring sensor, so that the positioning is completed, and then the measuring sensor can be used to measure the surface characteristics of the point to be measured.

[0141] Practically, the ultrasonic sensor and the measuring sensor can be installed on different surfaces of the installation platform, and the switching of different sensors can be achieved by rotating the installation platform.

[0142] In one embodiment, a rotationally symmetric surface modeling system based on ultrasound is provided. Figure 6 , which includes:

[0143] The sample installation module 11 includes: a sample installation platform and a sample rotation axis; the sample installation platform is used to install the sample;

[0144] The sample center calibration module 12 is used to calibrate the sample and the sample rotation axis to be concentric;

[0145] The ultrasonic modeling module 13 is used to perform non-contact distance measurement on the surface of the sample using ultrasonic waves to obtain parameters of an oblique line on the surface of the sample, where the oblique line is the oblique line from the center of the circle to the boundary; an oblique line curve is obtained by fitting the parameters of the oblique line, and 360-degree rotation modeling is performed using the oblique line curve.

[0146] In one embodiment, in order to make the calibration of the center of the circle more accurate, verification is performed after the calibration. Specifically, the sample center of the circle calibration module includes:

[0147] An installation error calibration unit, used for obtaining the boundary of the sample by using a camera to perform installation error calibration;

[0148] The center verification unit is used to verify that the specimen and the specimen rotation axis are concentric.

[0149] In order to further improve the installation error calibration effect, installation error calibration can be performed in multiple directions. In one embodiment, taking installation error calibration in two directions as an example, specifically, the installation error calibration unit includes:

[0150] A first installation error calibration unit is used to obtain the left and right boundaries of the sample using a camera to obtain a first installation error, so as to correct the sample based on the first installation error;

[0151] The sample rotating part is used to rotate the sample 90 degrees around the sample rotation axis;

[0152] The second installation error calibration unit is used to use the camera again to obtain the left and right boundaries of the sample to obtain a second installation error, so as to correct the sample based on the second installation error.

[0153] In one embodiment, the ultrasonic modeling module specifically includes:

[0154] An ultrasonic sensor initial position determination module, used to move the ultrasonic sensor to an initial position, the initial position being located at a preset distance vertically above the center of the sample;

[0155] An ultrasonic sensor driving module, used for driving the ultrasonic sensor to translate along a straight line;

[0156] A vertical distance judgment module is used to judge whether the vertical distance detected by the ultrasonic sensor changes by a preset value during the translation process. If the vertical distance changes by a preset value, the translation is stopped to measure. If not, the translation is continued.

[0157] The ultrasonic sensor driving module is also used to obtain the angle between the line connecting the current measurement position of the sample and the center of the sample and the horizontal direction of the sample, and drive the ultrasonic sensor to rotate by the same angle so that the vertical measurement direction of the ultrasonic sensor is perpendicular to the section at the current measurement position of the sample, and ensure that the distance is the same as the original measurement distance; when the angle is zero, no rotation is required; and the current measurement position and measurement distance of the sample are recorded;

[0158] The module for detecting whether the boundary is reached is used to detect whether the ultrasonic sensor reaches the boundary of the sample. If yes, the process ends; otherwise, the process returns to continue the translation of the ultrasonic sensor, that is, returns to the ultrasonic sensor driving module.

[0159] In one embodiment, a rotationally symmetric surface modeling device based on ultrasound is provided. Figure 7 , which includes:

[0160] A sample mounting platform 21, used for mounting the sample;

[0161] The sample rotating shaft 22 is used to drive the sample to rotate;

[0162] The micro-actuator 23 is used to fine-tune the installation position of the sample to correct the installation error of the sample;

[0163] A camera 24, used to capture an image of the sample;

[0164] The camera driver 25 is used to drive the movement of the camera; the camera can obtain the position of the sample boundary, and then obtain the installation error of the sample, so as to correct the sample based on the installation error; the camera can also be moved to the sample boundary, and the image of the sample boundary during the sample rotation process can be collected to verify whether the sample is concentric with the sample rotation axis;

[0165] An ultrasonic sensor 26, used for non-contact distance measurement of the surface of the sample;

[0166] The ultrasonic sensor driver 27 is used to drive the movement of the ultrasonic sensor so that the ultrasonic sensor can be translated along a straight line from vertically above the center of the sample to the sample boundary; multiple different measurement points (such as the oblique line nodes mentioned above) can be recorded during the translation process, and an oblique line curve of the sample can be obtained by fitting multiple measurement points, which can reflect the surface information at the oblique line position.

[0167] In one embodiment, the ultrasonic sensor driver 27 is also used to drive the rotation of the ultrasonic sensor so that the vertical measurement direction of the ultrasonic sensor is perpendicular to the tangent plane of the surface where the current measurement position of the sample is located. In one embodiment, for samples of different sizes, corresponding marks are provided on the sample mounting platform at the installation position, which can facilitate the installation of the sample and make the installation error very small.

[0168] In one embodiment, the driving axis of the camera can be set to be perpendicular to the sample mounting platform. When the center of the sample rotation axis is located on the extension line of the driving axis of the camera, the image obtained by the camera is the center of the sample, which facilitates the determination of the center of the sample and is more accurate.

[0169] In one embodiment, in order to reduce the measurement error caused by the noise from the ground, the bottom support of the sample mounting platform may adopt a stable and horizontal marble table.

[0170] In one embodiment, a positioning system is provided, please refer to Figure 8 , which includes:

[0171] A sample mounting platform 21, used for mounting the sample;

[0172] The sample rotation shaft (not shown in the figure) is used to drive the sample to rotate;

[0173] The micro-motion shaft (not shown in the figure) is used to micro-adjust the installation position of the sample to correct the installation error of the sample;

[0174] A camera (not shown in the figure), used to capture images of the sample;

[0175] The camera drive shaft (not shown in the figure) is used to drive the movement of the camera; it can realize the acquisition of the position of the sample boundary by the camera, and then the installation error of the sample can be obtained, so as to correct the sample based on the installation error; it can also realize moving the camera to the sample boundary, and by collecting the image of the sample boundary during the rotation of the sample, verify whether the sample and the sample rotation axis are concentric;

[0176] An ultrasonic sensor (not shown in the figure) is used to perform non-contact distance measurement on the surface of the sample;

[0177] A measuring sensor 28, used to measure the surface characteristics of the sample;

[0178] The sensor driver is used to drive the movement of the ultrasonic sensor and the measuring sensor. Specifically, the movement of the ultrasonic sensor can be driven to achieve the translation of the ultrasonic sensor from vertically above the center of the sample along a straight line until the sample boundary; multiple different measurement points can be recorded during the translation process (such as: the oblique line nodes mentioned above), and an oblique line curve of the sample can be obtained by fitting multiple measurement points, which can reflect the surface information at the oblique line position. The movement of the measuring sensor can be driven to achieve the movement of the measuring sensor vertically above the point to be measured and within the working distance range.

[0179] Furthermore, the sensor driver is also used to drive the rotation of the ultrasonic sensor and the measuring sensor, so that the vertical measuring direction is perpendicular to the section at the point to be measured, and the measurement is more accurate.

[0180] In one embodiment, the sensor driver includes: a transverse motion axis 291, a longitudinal motion axis 292, and a rotational motion axis 293, please refer to Figure 8 The transverse motion axis 291 is used to make the ultrasonic sensor and the measuring sensor move transversely along it, the longitudinal motion axis 292 is used to make the ultrasonic sensor and the measuring sensor move longitudinally along it, and the rotational motion axis 293 is used to make the ultrasonic sensor and the measuring sensor rotate around it.

[0181] In one embodiment, the ultrasonic sensor and the measuring sensor may be mounted on the same mounting platform, and both may be driven together by a sensor driver.

[0182] In one embodiment, an electronic device is also provided, please refer to Fig. 9 . At the hardware level, the device includes a processor 31, an internal bus 32, a network interface 33, a memory 34 and a storage 35, and of course may also include hardware required for other services. One or more embodiments of the present invention can be implemented based on software, such as the processor 31 reading the corresponding computer program from the storage 35 into the memory 34 and then running it. Of course, in addition to the software implementation, one or more embodiments of the present invention do not exclude other implementation methods, such as logic devices or a combination of software and hardware, etc., that is, the execution subject of the following processing flow is not limited to each logic unit, but can also be hardware or logic devices.

[0183] The systems, devices, modules or units described in the above embodiments may be implemented by computer chips or entities, or by products with certain functions. A typical implementation device is a computer, which may be in the form of a personal computer, a laptop computer, a cellular phone, a camera phone, a smart phone, a personal digital assistant, a media player, a navigation device, an email transceiver, a game console, a tablet computer, a wearable device or a combination of any of these devices.

[0184] In a typical configuration, a computer includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0185] The memory may include non-permanent storage in a computer-readable medium, random access memory (RAM) and / or non-volatile memory in the form of read-only memory (ROM) or flash RAM. The memory is an example of a computer-readable medium.

[0186] Computer-readable media include permanent and non-permanent, removable and non-removable media that can be used to store information by any method or technology. Information can be computer-readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disc read-only memory (CD-ROM), digital versatile disc (DVD) or other optical storage, magnetic cassettes, disk storage, quantum memory, graphene-based storage media or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device. As defined herein, computer-readable media does not include temporary computer-readable media (transitory media), such as modulated data signals and carrier waves.

[0187] The above describes specific embodiments of the present invention. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the embodiments and still achieve the desired results. In addition, the processes depicted in the accompanying drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0188] In the description of this specification, the description with reference to the terms "an implementation", "an example", "a specific implementation process", "an example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0189] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A rotationally symmetric surface modeling method based on ultrasound, characterized in that: include: Sample installation: installing the sample on a sample installation platform; Sample center calibration: calibrate the sample and the sample rotation axis to be concentric; Ultrasonic modeling: Use ultrasound to perform non-contact distance measurement on the surface of the sample to obtain the parameters of an oblique line on the surface of the sample, where the oblique line is the oblique line from the center of the circle to the boundary; use the parameters of the oblique line to fit an oblique line curve, and use the oblique line curve to perform 360-degree rotation modeling.

2. The method for rotationally symmetric surface modeling based on ultrasound according to claim 1, characterized in that: The sample center calibration specifically includes: Installation error calibration: using a camera to obtain the boundary of the sample to perform installation error calibration; Center verification: verify whether the sample and the sample rotation axis are concentric, if not, return to the installation error calibration.

3. The method for rotationally symmetric surface modeling based on ultrasound according to claim 2, characterized in that: The installation error calibration specifically includes: First installation error calibration: using a camera to obtain the left and right boundaries of the sample, obtaining a first installation error, and correcting the sample based on the first installation error; Sample rotation: rotating the sample 90 degrees around the sample rotation axis; Second installation error calibration: the left and right boundaries of the sample are again acquired by using the camera to obtain a second installation error, so as to correct the sample based on the second installation error.

4. The method for rotationally symmetric surface modeling based on ultrasound according to claim 2, characterized in that: The circle center verification specifically includes: The sample is rotated around the sample rotation axis, and during the sample rotation, an image of the sample boundary is acquired by using a camera; the position of the camera is fixed; During the rotation of the sample, it is determined that the image acquired by the camera is always the same. If so, the circle center verification is completed; if not, the installation error calibration is returned.

5. The method for rotationally symmetric surface modeling based on ultrasound according to claim 1, characterized in that: The method of obtaining the parameters of an oblique line on the surface of the sample by using ultrasound specifically includes: Determine the initial position of the ultrasonic sensor: move the ultrasonic sensor to an initial position, wherein the initial position is located at a preset distance vertically above the center of the sample; Ultrasonic sensor driving: driving the ultrasonic sensor to translate along a straight line; during the translation process, the ultrasonic sensor continuously detects, and stops the translation when the vertical distance detected by the ultrasonic sensor changes by a preset value; obtaining the angle between the current measurement position of the sample and the line connecting the center of the sample relative to the horizontal direction of the sample, and when the angle is not zero, driving the ultrasonic sensor to rotate by the same angle so that the vertical detection direction of the ultrasonic sensor is perpendicular to the section at the current detection position of the sample, and ensuring that it is the same as the original measurement distance; recording the current detection position and detection distance of the sample; Detect whether the ultrasonic sensor reaches the boundary of the sample, if yes, end the process, otherwise return to continue to execute the translation of the ultrasonic sensor.

6. A positioning method, characterized in that: include: Modeling using the ultrasonic-based rotationally symmetric surface modeling method as described in any one of claims 1 to 5 to obtain a sample model; Acquire parameters of the point to be measured based on the sample model, and move the measuring sensor to the top of the point to be measured based on the parameters of the point to be measured; The distance between the measuring sensor and the point to be measured is made within the working distance range of the measuring sensor; so as to measure the surface characteristics of the point to be measured by using the measuring sensor.

7. A rotationally symmetric surface modeling system based on ultrasound, characterized in that: include: The sample installation module comprises: a sample installation platform and a sample rotation axis; the sample installation platform is used to install the sample; A sample center calibration module, used to calibrate the sample and the sample rotation axis to be concentric; The ultrasonic modeling module is used to use ultrasonic waves to perform non-contact distance measurement on the surface of the sample, obtain the parameters of an oblique line on the surface of the sample, and the oblique line is the oblique line from the center of the circle to the boundary; use the parameters of the oblique line to fit the oblique line curve, and use the oblique line curve to perform 360-degree rotation modeling.

8. The ultrasonic-based rotationally symmetric surface modeling system according to claim 7, characterized in that: The sample center calibration module specifically includes: An installation error calibration unit, used for obtaining the boundary of the sample by using a camera to perform installation error calibration; The center verification unit is used to verify whether the sample and the sample rotation axis are concentric.

9. The ultrasonic-based rotationally symmetric surface modeling system according to claim 8, characterized in that: The installation error calibration unit specifically comprises: A first installation error calibration unit, used for obtaining the left and right boundaries of the sample by using a camera to obtain a first installation error, so as to correct the sample based on the first installation error; A sample rotating part, used to rotate the sample 90 degrees around the sample rotation axis; The second installation error calibration unit is used to use the camera to obtain the left and right boundaries of the sample again to obtain a second installation error, so as to correct the sample based on the second installation error.

10. The ultrasonic-based rotationally symmetric surface modeling system according to claim 7, characterized in that: The ultrasonic modeling module specifically includes: An ultrasonic sensor initial position determination module, used to move the ultrasonic sensor to an initial position, wherein the initial position is located at a preset distance vertically above the center of the sample; The ultrasonic sensor driving module is used to drive the ultrasonic sensor to translate along a straight line; during the translation process, the ultrasonic sensor continues to detect, and stops translating when the vertical distance detected by the ultrasonic sensor changes by a preset value; obtains the angle between the current measurement position of the sample and the line connecting the circle of the sample relative to the horizontal direction of the sample, drives the ultrasonic sensor to rotate by the same angle so that the vertical detection direction of the ultrasonic sensor is perpendicular to the section at the current detection position of the sample, and ensures that it is the same as the original measurement distance; records the current detection position and detection distance of the sample; The module for detecting whether the ultrasonic sensor reaches the boundary is used to detect whether the ultrasonic sensor reaches the boundary of the sample. If yes, the process ends; otherwise, the process returns to continue the translation of the ultrasonic sensor.

11. A rotationally symmetric surface modeling device based on ultrasound, characterized in that: include: Specimen mounting platform, used for mounting specimens; A sample rotating shaft, used to drive the sample to rotate; A micro-actuator, used for micro-adjusting the installation position of the sample; A camera, used to capture an image of the sample; A camera driver, used for driving the movement of the camera; An ultrasonic sensor, used for non-contact distance measurement of the surface of the sample; The ultrasonic sensor driver is used to drive the movement of the ultrasonic sensor.

12. A positioning system, characterized in that: include: Specimen mounting platform, used for mounting specimens; A sample rotating shaft, used to drive the sample to rotate; A micro-actuator, used for micro-adjusting the installation position of the sample; A camera, used to capture an image of the sample; A camera driver, used for driving the movement of the camera; An ultrasonic sensor, used for non-contact distance measurement of the surface of the sample; A measuring sensor, used for measuring the surface characteristics of the sample; A sensor driver is used to drive the movement of the ultrasonic sensor and the measuring sensor.

13. An electronic device, characterized in that: include: processor; and, a memory for storing processor-executable instructions; The processor implements the steps in the method of any one of claims 1 to 6 by running the executable instructions.

14. A computer-readable storage medium, characterized in that: A computer program is stored thereon, and when the computer program is executed by a processor, the steps in the method according to any one of claims 1 to 6 are implemented.

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