MEMS micromirror reinforcing structure

Abstract

The invention provides an MEMS (Micro Electro Mechanical System) micromirror reinforcing structure. The MEMS micromirror reinforcing structure comprises a supporting seat and a frame arranged on the upper surface of the supporting seat, and the frame is of an open hollow structure; in the first direction, the mirror surface is connected with the frame through the first elastic structure and the first actuator cantilever in sequence; in the second direction, the mirror surface is connected with the frame through a second elastic structure and a second actuator cantilever in sequence; a stopper is arranged on the upper surface of the supporting base and located under the mirror face. By arranging the stopper, the large displacement of the MEMS micromirror in the third direction can be limited, and mechanical damage caused by wide-range vibration and impact is avoided.

Description

Technical Field

[0001] The invention relates to the field of micro-electromechanical systems, and in particular to a MEMS micro-mirror reinforcement structure. Background Art

[0002] With the rapid development of space technology, space laser communication technology has gradually become an important research and application direction in the field of aerospace communications due to its unique advantages, such as low transmission loss, high communication rate, large information capacity and strong anti-interference performance. In space laser communication systems, precise pointing and stable transmission of light are the key to achieving efficient communication. Therefore, quasi-static micromirrors that can quickly and accurately adjust the direction of light have become the core components in this field.

[0003] Traditionally, the driving methods of quasi-static micromirrors mainly include voice coil motor driving and piezoelectric ceramic driving. However, with the increasing requirements of spacecraft for device miniaturization, integration and lightweight, these two traditional driving methods have gradually revealed their limitations in terms of volume, mass and power consumption. In contrast, microelectromechanical system (MEMS) micromirrors have shown significant advantages in aerospace-grade applications with their extremely small size, extremely light mass and extremely low power consumption, especially in scenarios such as space laser communications, and have broad application prospects.

[0004] However, MEMS quasi-static micromirrors face severe challenges in practical applications. Due to their underdamped structural design and low impact resistance, micromirrors are easily affected by environmental vibration, impact, and high-frequency resonance, resulting in excessive deflection angles and failure. In addition, the resonant frequency of the micromirror is easily affected by ambient temperature and service life, resulting in drift, which further increases the reliability of MEMS micromirror feedforward control.

[0005] In order to improve the performance of a MEMS quasi-static micromirror and the stability of its on-orbit operation, the present application provides a MEMS micromirror reinforcement structure. Summary of the invention

[0006] In view of the defects and shortcomings of the MEMS micromirror in the prior art, the present application provides a MEMS micromirror reinforcement structure. The MEMS micromirror reinforcement structure includes a support seat and a frame arranged on the upper surface of the support seat, and the frame is an open hollow structure; in the first direction, the mirror surface is connected to the frame through the first elastic structure and the first actuator cantilever in sequence; in the second direction, the mirror surface is connected to the frame through the second elastic structure and the second actuator cantilever in sequence; a stopper is arranged on the upper surface of the support seat, and the stopper is located directly below the mirror surface. By setting the stopper, the large displacement of the MEMS micromirror in the third direction can be limited to avoid mechanical damage caused by large-scale vibration and impact.

[0007] One embodiment of the present application provides a MEMS micromirror reinforcement structure, including:

[0008] Support seat;

[0009] A frame, the frame being a hollow structure, surrounding the support base and fixedly disposed on the upper surface of the support base;

[0010] The mirror surface, along the third direction, the center line of the frame coincides with the center line of the mirror surface;

[0011] The first actuator cantilever and the second actuator cantilever are symmetrically arranged on both sides of the mirror surface along the first direction with the mirror surface as the symmetry center; one end of the first actuator cantilever is connected to the mirror surface, and the other end is connected to the frame; along the second direction, with the mirror surface as the symmetry center, the two second actuator cantilever are symmetrically arranged on both sides of the mirror surface; one end of the second actuator cantilever is connected to the mirror surface, and the other end is connected to the frame; along the third direction, the first actuator cantilever, the second actuator cantilever and the mirror surface are spaced apart from the upper surface of the support seat; the first direction, the second direction, and the third direction are perpendicular to each other;

[0012] A first elastic structure and a second elastic structure, wherein the first elastic structure is disposed between the mirror and the first actuator cantilever; and the second elastic structure is disposed between the mirror and the second actuator cantilever;

[0013] Wherein, a stopper is arranged on the upper surface of the support seat and is located inside the frame, and the stopper is located below the mirror surface.

[0014] As an implementation manner, along the third direction, the projection of the stopper on the upper surface of the support base is smaller than the projection of the mirror on the upper surface of the support base.

[0015] As an implementation manner, along the third direction, a center line of the stopper coincides with a center line of the mirror surface.

[0016] As an implementation manner, along the third direction, the maximum distance between the upper surface of the stopper and the lower surface of the mirror is equal to a relative displacement of 80% of the fracture strength of the MEMS micromirror.

[0017] As an implementation manner, the material of the stopper is selected from metal, ceramic, glass or plastic.

[0018] As an implementation manner, the material of the frame is selected from metal, ceramic, glass or plastic.

[0019] As an embodiment, the MEMS micromirror reinforcement structure also includes a laser and a photodetector arranged on the upper surface of the support base, and the laser and the photodetector are respectively arranged on both sides of the stopper, the laser is used to emit a light beam to the lower surface of the mirror, and the photodetector is used to receive the light beam reflected by the lower surface of the mirror.

[0020] As an implementation manner, the MEMS micromirror reinforcement structure further includes a drive controller, and the drive controller is electrically or wirelessly connected to the photodetector.

[0021] As an implementation mode, the laser includes a gas laser, a solid laser, or a semiconductor laser; the wavelength band of the light beam emitted by the laser includes a visible light band or an invisible light band.

[0022] As an implementation, the photodetector includes a photodiode, a PIN photodiode, a photomultiplier tube, a four-quadrant detector, or an infrared detector.

[0023] As described above, the MEMS micromirror reinforcement structure of the present application has the following beneficial effects:

[0024] The MEMS micromirror reinforcement structure of the present application includes a support seat and a frame arranged on the upper surface of the support seat, and the frame is an open hollow structure; in the first direction, the mirror surface is connected to the frame through the first elastic structure and the first actuator cantilever in sequence; in the second direction, the mirror surface is connected to the frame through the second elastic structure and the second actuator cantilever in sequence; a stopper is arranged on the upper surface of the support seat, and the stopper is located directly below the mirror surface. By arranging the stopper, the large displacement of the MEMS micromirror in the third direction can be limited, the impact resistance of the MEMS micromirror in the third direction can be improved, and the mechanical damage of the MEMS micromirror caused by high-frequency resonance in the third direction can be reduced.

[0025] The MEMS micromirror reinforcement structure of the present application can also obtain the deflection angle of the MEMS micromirror in real time by arranging lasers and photodetectors on both sides of the stopper. On the one hand, it can directly feed back the limit signal of the large-angle alarm to the drive controller; on the other hand, it can obtain the resonant frequency required by the feedforward control algorithm through the step response signal, calibrate the parameters of the feedforward control of the MEMS micromirror caused by factors such as temperature changes, and realize the reliability reinforcement of the MEMS micromirror from the electrical control aspect. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 Shown is a schematic diagram of the three-dimensional structure of the MEMS micromirror reinforcement structure provided in an embodiment of the present application.

[0027] Figure 2 Display as Figure 1Schematic diagram of the cross-sectional structure along the AA direction.

[0028] Figure 3 Shown is a second-order dynamic equivalent model of the MEMS micromirror provided in an embodiment of the present application.

[0029] Figure 4 Shown is a schematic diagram of the MEMS micromirror limit alarm and parameter calibration provided in an embodiment of the present application.

[0030] Figure 5 Shown is a schematic diagram of a double-step driving algorithm and effect of a MEMS micromirror provided in an embodiment of the present application.

[0031] Component number description

[0032] 100, support base; 200, frame; 300, mirror; 410, first actuator cantilever; 420, first elastic structure; 510, second actuator cantilever; 520, second elastic structure; 600, stopper; 700, laser; 800, photodetector. DETAILED DESCRIPTION

[0033] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0034] With the rapid development of space laser communication technology, the reliability requirements for MEMS micromirrors are getting higher and higher. As the core device in space laser communication, the performance of MEMS micromirrors directly affects the overall stability and efficiency of the communication system. However, due to the structural characteristics of MEMS micromirrors, they are prone to performance degradation or even failure when facing complex space environments such as vibration, shock, temperature changes, etc. The reliability of micromirrors is particularly important during the transportation, launch, and in-orbit operation of spacecraft. Therefore, reliability reinforcement design for MEMS micromirrors to improve their survivability in harsh environments has become a hot topic and challenge in this field.

[0035] In view of the above defects, the present application provides a MEMS micromirror reinforcement structure, which is now described in detail through the following embodiments.

[0036] This embodiment provides a MEMS micromirror reinforcement structure, such as Figure 1 and Figure 2As shown, the MEMS micromirror reinforcement structure includes a support base 100, a frame 200, a mirror surface 300, a first actuator cantilever 410, a first elastic structure 420, a second actuator cantilever 510, a second elastic structure 520, and a stopper 600. The frame 200 is a hollow structure, and both the upper surface and the lower surface are open structures. The lower surface of the frame 200 surrounds the upper surface of the support base 100 and is fixed on the upper surface of the support base 100. Along the third direction, the center line of the frame 200 coincides with the center line of the mirror surface 300. Along the first direction, with the mirror surface 300 as the symmetry center, two first actuator cantilevers 410 are symmetrically arranged on both sides of the mirror surface 300. One end of the first actuator cantilever 410 is fixedly connected to the frame 200, and the other end is connected to the mirror surface 300 through the first elastic structure 420. The first actuator cantilever 410 is connected to the frame 200 through the first elastic structure 420. An elastic structure 420 drives the mirror 300 to deflect along the first direction; along the second direction, with the mirror 300 as the symmetry center, two second actuator cantilevers 510 are symmetrically arranged on both sides of the mirror 300, one end of the second actuator cantilever 510 is fixedly connected to the frame 200, and the other end is connected to the mirror 300 through the second elastic structure 520, and the second actuator cantilever 510 drives the mirror 300 to deflect along the second direction through the second elastic structure 520; along the third direction, the first actuator cantilever 410, the second actuator cantilever 510 and the mirror 300 are all spaced from the upper surface of the support seat 100. The first direction, the second direction, and the third direction are perpendicular to each other. As an embodiment, the first direction can be parallel to the X-axis direction, the second direction can be parallel to the Y-axis direction, and the third direction can be parallel to the Z-axis direction.

[0037] like Figure 1 and Figure 2 As shown, the stopper 600 is disposed on the upper surface of the support base 100, located in the hollow structure of the frame 200, and located below the mirror 300. Without affecting the rotation angle of the MEMS micromirror, the stopper 600 can effectively limit the large displacement of the mirror 300, avoid mechanical damage such as free structure fracture caused by random vibration of the MEMS micromirror in the third direction (Z-axis direction), and improve the reliability and reinforcement of the MEMS micromirror.

[0038] In an optional embodiment, if Figure 1 and Figure 2 As shown, along the third direction, the projection of the stopper 600 on the upper surface of the support base 100 is smaller than the projection of the mirror 300 on the upper surface of the support base 100. In order to avoid the deformation movement of the first elastic structure 420 and the second elastic structure 520 causing an accidental collision between the first elastic structure 420 or the second elastic structure 520 and the stopper 600, the supporting area of ​​the stopper 600 should be as small as possible.

[0039] In an optional embodiment, if Figure 1 and Figure 2 As shown, along the third direction, the center line of the stopper 600 coincides with the center line of the mirror surface 300, so it is easy to determine the position of the stopper 600. The shape of the stopper 600 can be, for example, a cylinder, a cuboid, or a hexagonal column. The actual shape of the stopper 600 can be mainly based on the convenience of processing.

[0040] In an optional embodiment, along the third direction, the maximum distance between the upper surface of the stopper 600 and the lower surface of the mirror 300 is equal to 80% relative displacement of the fracture strength of the MEMS micromirror. The relative distance between the upper surface of the stopper 600 and the lower surface of the mirror 300 can be set on the premise that the mirror 300 of the MEMS micromirror has sufficient motion margin in the third direction (Z-axis direction). For example, the lengths of the first actuator cantilever 410 and the second actuator cantilever 510 in the MEMS micromirror are both 14.12 mm, and the out-of-plane displacement distance required to achieve a 3.5 mrad rotation angle is 50 μm. Considering factors such as processing errors, installation accuracy and margin, the relative distance between the upper surface of the stopper 600 and the lower surface of the mirror 300 is finally set to 100 μm.

[0041] In an optional embodiment, the material of the stopper 600 is selected from metal, ceramic, glass, or plastic.

[0042] In an optional embodiment, the material of the frame 200 is selected from metal, ceramic, glass, or plastic.

[0043] In an optional embodiment, if Figure 1 and Figure 2 As shown, the MEMS micromirror reinforcement structure also includes a laser 700 and a photodetector 800, which are respectively arranged on both sides of the stopper 600, and the laser 700 and the photodetector 800 are both arranged on the upper surface of the support frame 100, the laser 700 is used to emit a light beam to the lower surface of the mirror 300, and the photodetector 800 is used to receive the light beam reflected from the lower surface of the mirror. The laser 700 emits a light beam to the lower surface of the mirror 300, and when the mirror 300 deflects, the photodetector 800 receives the reflected light of the lower surface of the mirror 300 of different intensities in real time. Therefore, the position of the laser 700 on the upper surface of the support frame 100 should be based on the ability to emit a light beam to the lower surface of the mirror 300, and the position of the photodetector 800 on the upper surface of the support frame 100 should be based on the ability to receive the reflected light from the lower surface of the mirror 300.

[0044] like Figure 3As shown, the deflection of the mirror surface 300 of the MEMS micromirror is achieved by the torsional torque generated by two pairs of elastic structures (the first elastic structure 420 and the second elastic structure 520). This motion can be modeled as a dual-mass spring damping system, in which m1 and m2 represent the masses of the two blocks, k1 and k2 represent the spring stiffness at each end, and b1 and b2 represent the damping coefficients at both ends. The two pairs of elastic structures (the first elastic structure 420 and the second elastic structure 520) are fixed to the frame 200 through two pairs of actuator cantilevers (the first actuator cantilever 410 and the second actuator cantilever 510) to control the deflection of the mirror surface 300. The two mass blocks are connected to each other, k and b represent the spring stiffness and damping coefficient of the part connecting the two mass blocks, respectively, and x1 and x2 are the displacements of the two mass blocks. Assuming u1 and u2 are the driving forces of the two mass blocks, according to Newton's second law, the dynamic equations of the two mass blocks can be expressed as:

[0045]

[0046]

[0047] and They are the first and second derivatives of displacement with respect to time, namely velocity and acceleration.

[0048] The natural oscillation frequency of a MEMS mirror system is defined as where k is the spring stiffness and m is the mass of the mass; the damping ratio is defined as Where ξ is the damping coefficient. The input of the system is voltage V, the output is the deflection angle θ of the MEMS micromirror, and K is the input-output system of the system, that is, the voltage-angle gain. Therefore, the differential equation of the single-axis system can be the following equation:

[0049]

[0050] The above equation (3) describes the dynamic behavior of the system output (mirror deflection angle θ) at a given input voltage V, where: It represents the first-order derivative of the deflection angle with respect to time, that is, the angular velocity of the mirror; It represents the second derivative of the deflection angle with respect to time, that is, the angular acceleration of the mirror.

[0051] The mirror surface 300, frame 200, first actuator cantilever 410, first elastic structure 420, second actuator cantilever 510 and second elastic structure 520 in the MEMS micromirror are generally designed with an underdamped structure, which has a higher resonant frequency and a lower damping coefficient. The MEMS micromirror itself is equivalent to a second-order system with spring mass damping, and its transfer function model is as follows:

[0052]

[0053] Where K is the gain of the system; ω n is the resonant frequency of the system; s is the complex frequency variable in the Laplace change; ξ is the damping ratio.

[0054] When the resonant frequency of the MEMS micromirror is high and the damping coefficient is low, the system will have a large quality factor. The size of the quality factor represents the speed of the system energy loss rate, which determines that the mirror surface 300, the frame 200, the first actuator cantilever 410, the first elastic structure 420, the second actuator cantilever 510 and the second elastic structure 520 in the MEMS micromirror will produce a large-amplitude high-frequency resonance when stimulated by a similar step signal. When the resonance amplitude exceeds the maximum safe range of the device, the device actuator cantilever (the first actuator cantilever 410 and the second actuator cantilever 510) and the elastic structure (the first elastic structure 420 and the second elastic structure 520) are very likely to break, thereby causing damage to the device.

[0055] In an optional embodiment, the MEMS micromirror reinforcement structure further includes a drive controller, which is electrically or wirelessly connected to the photodetector 800. The laser 700 emits a light beam to the lower surface of the mirror 300. When the mirror 300 deflects, the photodetector 800 receives the reflected light of the lower surface of the mirror 300 with different intensities in real time. When the mirror 300 deflects too much due to impact or high-frequency resonance, the photodetector 800 feeds back a limit signal of a large angle alarm to the drive controller, and the drive controller controls the excitation signal of the MEMS micromirror.

[0056] like Figure 4 As shown, the laser 700 emits a light beam to the lower surface of the mirror 300, and the photodetector 800 receives the reflected light of the mirror 300 in real time when the mirror 300 deflects, thereby realizing the detection of the deflection angle of the mirror 300. When the deflection angle of the mirror 300 exceeds the maximum limit due to vibration or impact and produces continuous large-amplitude oscillation, the photodetector 800 can send a feedback signal to the drive controller when high-frequency resonance occurs, and the drive controller drives the MEMS micromirror (the mirror 300, frame 200, first actuator cantilever 410, first elastic structure 420, second actuator cantilever 510 and second elastic structure 520 of the MEMS micromirror) to reduce the deflection angle and suppress the high-frequency resonance of the device, thereby reducing the resonance time of the device near the maximum limit, reducing the risk of fracture of the actuator cantilever (first actuator cantilever 410 and second actuator cantilever 510) and elastic structure (first elastic structure 420 and second elastic structure 520) of the device, and realizing the reliability reinforcement of the device.

[0057] In an optional embodiment, the laser 700 emits a light beam to the lower surface of the mirror 300. When the mirror 300 is deflected, the photodetector 800 receives reflected light of different intensities from the lower surface of the mirror 300 in real time, obtains the resonant frequency required for the feedforward control algorithm through the step response signal, calibrates the parameters of the MEMS micromirror feedforward control caused by factors such as temperature changes, and improves the reliability of the feedforward control.

[0058] For MEMS micromirrors with lower damping and higher resonant frequency, the drive algorithm that can be selected is the feedforward two-step drive. The effect of using the feedforward two-step drive algorithm is as follows: Figure 5 As shown ( Figure 5 (a) is the open loop schematic diagram, Figure 5 (b) is a schematic diagram of the feedforward dual-step drive). It can be seen that the algorithm can quickly suppress high-frequency resonance and make the device quickly stabilize within the target angle. The key parameter of the driving algorithm is the resonant frequency ω of the MEMS micromirror. n , damping ratio ξ and other parameters, as shown in the following formula:

[0059]

[0060] When the temperature of the working environment changes significantly and / or the device works for a long time, the resonant frequency of the device itself will drift significantly; when the resonant frequency drifts, the control effect of the device control algorithm will be greatly reduced.

[0061] When the inherent resonant frequency of the MEMS micromirror changes, the device is no longer effectively controlled by the control algorithm and will generate vibrations. The MEMS micromirror reinforcement structure provided in this embodiment is provided with a laser 700 and a photodetector 800. The laser 700 emits a light beam to the lower surface of the mirror 300. The photodetector 800 detects the oscillation of the device by receiving the reflected light from the lower surface of the mirror 300, and according to the frequency of the oscillation, feeds back the current resonant frequency of the device to the drive controller, thereby enabling the drive controller to correct the control algorithm parameters and realize self-calibration of the MEMS micromirror control.

[0062] In an optional embodiment, the laser 700 is selected from a gas laser, a solid laser, or a semiconductor laser. The wavelength band of the light beam emitted by the laser 700 can be a visible light band or an invisible light band.

[0063] In an optional embodiment, the photodetector 800 is selected from a photodiode, a PIN photodiode, a photomultiplier tube, a four-quadrant detector, or an infrared detector.

[0064] In an optional embodiment, the actuation mode of the actuation structure in the MEMS micromirror reinforcement structure can be electrostatic drive, thermoelectric drive, electromagnetic drive, or piezoelectric drive. The piezoelectric material of the piezoelectric drive is selected from scandium-doped aluminum nitride, lithium niobate, lead zirconate titanate, or lithium tantalate.

[0065] The MEMS micromirror reinforcement structure of this embodiment can obtain the deflection angle of the MEMS micromirror in real time by setting the laser 700 and the photodetector 800, and further extract the feedforward control parameters of the micromirror.

[0066] The MEMS micromirror reinforcement structure provided in this embodiment can be reinforced for reliability in three directions. The first direction is to set a stopper 600. By setting the stopper 600 on the upper surface of the support base 100 below the mirror 300, the impact resistance of the MEMS micromirror in the third direction (which can be the Z-axis direction) is improved, and the mechanical damage of the MEMS micromirror caused by high-frequency resonance in the third direction is reduced. The second direction is to set a laser 700 and a photodetector 800. When the mirror 300 deflects too much and produces high-frequency resonance due to lateral impact or other reasons, the photodetector 800 can quickly give a feedback signal, reduce the deflection angle, suppress device oscillation, reduce the time of over-range deflection of the MEMS micromirror, and reduce the probability of device damage. The third direction is to use the laser 700 and the photodetector 800. When the MEMS micromirror is affected by the change in the external environment temperature, causing the device resonant frequency to change and affecting the MEMS micromirror feedforward control effect, the photodetector calibrates the MEMS resonant frequency in real time to improve the reliability of the MEMS micromirror feedforward control. The MEMS micromirror reinforcement structure provided in this embodiment realizes reliability reinforcement of the MEMS micromirror from two aspects of mechanical stop and electrical control.

[0067] The MEMS micromirror reinforcement structure of this embodiment effectively improves the reliability of the MEMS micromirror in extreme environments such as space laser communications, and has high industrial value.

[0068] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A MEMS micromirror reinforcement structure, characterized in that: include: Support seat; A frame, the frame being a hollow structure, surrounding the support base and fixedly disposed on the upper surface of the support base; The mirror surface, along the third direction, the center line of the frame coincides with the center line of the mirror surface; The first actuator cantilever and the second actuator cantilever are symmetrically arranged on both sides of the mirror surface along the first direction with the mirror surface as the symmetry center; one end of the first actuator cantilever is connected to the mirror surface, and the other end is connected to the frame; along the second direction with the mirror surface as the symmetry center, the two second actuator cantilever Symmetrically arranged on both sides of the mirror surface; one end of the second actuator cantilever is connected to the mirror surface, and the other end is connected to the frame; Along the third direction, the first actuator cantilever, the second actuator cantilever and the mirror surface are spaced apart from the upper surface of the support seat; the first direction, the second direction and the third direction are perpendicular to each other; a first elastic structure and a second elastic structure, wherein the first elastic structure is disposed between the mirror and the first actuator The second elastic structure is arranged between the mirror and the second actuator cantilever; Wherein, a stopper is provided on the upper surface of the support seat and is located inside the frame, and the stopper is located on the mirror Below the surface.

2. The MEMS micromirror reinforcement structure according to claim 1, characterized in that: Along the third direction, the projection of the stopper on the upper surface of the support base is smaller than the projection of the mirror on the upper surface of the support base.

3. The MEMS micromirror reinforcement structure according to claim 1, characterized in that: Along the third direction, a center line of the stopper coincides with a center line of the mirror surface.

4. The MEMS micromirror reinforcement structure according to claim 1, characterized in that: Along the third direction, a maximum distance between the upper surface of the stopper and the lower surface of the mirror surface is equal to a relative displacement of 80% of the breaking strength of the MEMS micromirror.

5. The MEMS micromirror reinforcement structure according to claim 1, characterized in that: The material of the stopper is selected from metal, ceramic, glass or plastic.

6. The MEMS micromirror reinforcement structure according to claim 1, characterized in that: The material of the frame is selected from metal, ceramic, glass or plastic.

7. The MEMS micromirror reinforcement structure according to any one of claims 1 to 6, characterized in that: It also includes a laser and a photodetector arranged on the upper surface of the support seat, and the laser and the photodetector are respectively arranged on both sides of the stopper. The laser is used to emit a light beam to the lower surface of the mirror, and the photodetector is used to receive the light beam reflected by the lower surface of the mirror.

8. The MEMS micromirror reinforcement structure according to claim 7, characterized in that: It also includes a driving controller, which is electrically or wirelessly connected to the photodetector.

9. The MEMS micromirror reinforcement structure according to claim 7, characterized in that: The laser includes a gas laser, a solid laser, or a semiconductor laser; the wavelength band of the light beam emitted by the laser includes a visible light band or an invisible light band.

10. The MEMS micromirror reinforcement structure according to claim 7, characterized in that: The photodetector includes a photodiode diode, PIN photodiode, photomultiplier tube, four-quadrant detector, or infrared detector.

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