Carrying device

Abstract

And the generation of dust can be prevented. This transport device transports a holding member having a placement plane on which a plate-shaped object is placed from a first position outside a frame to a second position inside the frame through an opening of the frame, and is provided with: a first rail, a second rail, a third rail, and a fourth rail provided in the horizontal direction; a plurality of rollers provided on each of the first to fourth rails; and one or a plurality of pinions provided on each of the first to fourth rails. The first rail and the third rail are arranged outside the frame body, the second rail and the fourth rail are arranged inside the frame body, and the first rail and the second rail are arranged on a first straight line roughly parallel to the conveying direction of the holding component. The third track and the fourth track are arranged on a second straight line which is parallel to the first straight line and equal in height. The rotation axis is substantially orthogonal to the first straight line and the second straight line, and the holding member is placed on the plurality of rollers. Racks engaged with the pinion gear are provided on both side surfaces of the holding member substantially parallel to the conveyance direction.

Description

Technical Field

[0001] The present invention relates to a handling device. Background Art

[0002] Patent Document 1 discloses a transport tool for photomask substrates and the like as follows: a movable frame is rotatably connected to a retractable fixed frame, substrate support members are provided at the ends of the fixed frame and the movable frame, and a handle is provided near the connection portion between the movable frame and the fixed frame. By using two of the transport tools and connecting the fixed frames to each other, large substrate materials can be transported.

[0003] Prior Art Literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2001-168182 Summary of the invention

[0006] Problems to be solved by the invention

[0007] The transport tool described in Patent Document 1 is used to transport a photomask substrate housed in a housing or the like to a device such as a cleaning rack. The photomask substrate device (e.g., an inspection device) transported by the transport tool is horizontally placed on the placement surface of a fixture and then moved to the inside of the device together with the fixture. The placement of the photomask substrate on the fixture and the movement of the fixture are performed manually by an operator.

[0008] However, when the jig is moved manually, the jig may collide with a component inside the device, causing a portion of the jig to be damaged, and dust may be generated inside the device. The dust inside the device may cause contamination of the photomask substrate to be inspected.

[0009] The present invention has been made in view of such circumstances, and an object of the present invention is to provide a conveying device capable of preventing the generation of dust.

[0010] Means for solving problems

[0011] In order to solve the above-mentioned problems, the conveying device of the present invention is, for example, a conveying device for conveying a holding member having a loading plane for loading a plate-shaped object from a first position outside the frame to a second position inside the frame through an opening of a frame, characterized in that the conveying device includes: a first rail, a second rail, a third rail, and a fourth rail, which are arranged in a horizontal direction; a plurality of rollers, each of which is arranged on the first rail, the second rail, the third rail, and the fourth rail; and a pinion, each of which is arranged on one or more of the first rail, the second rail, the third rail, and the fourth rail, wherein the first rail and the third rail are arranged outside the frame, the second rail and the fourth rail are arranged inside the frame, the first rail and the second rail are arranged on a first straight line substantially parallel to a conveying direction of the holding member, the third rail and the fourth rail are arranged on a second straight line parallel to the first straight line and at the same height, the rollers are arranged on a first rotation axis substantially orthogonal to the first straight line and the second straight line, the holding member is placed on a plurality of the rollers, and the holding member is provided with racks meshing with the pinion on two side surfaces substantially parallel to the conveying direction.

[0012] According to the conveying device of the present invention, the first track, the second track, the third track and the fourth track are respectively arranged on the first straight line and the second straight line which are substantially parallel to the conveying direction of the holding member, and the first track, the second track, the third track and the fourth track are respectively arranged with pinions and rollers. The holding member is placed on a plurality of rollers, and racks meshing with the pinions are arranged on two side surfaces which are substantially parallel to the conveying direction. Therefore, when the holding member is conveyed, the holding member is positioned in a direction orthogonal to the conveying direction. As a result, the holding member will not collide with unexpected components, etc., and as a result, the generation of dust can be prevented.

[0013] The holding member may include: a main body having the placement plane; and a gripping portion provided on the main body, and when the holding member is located at the second position, the periphery of the main body is inserted into the holding portion arranged at the second position, and at least one of the pinions provided on the second track and the fourth track is meshed with a first rack provided on the gripping portion. Thus, force is transmitted from the pinion to the holding member, and the holding member can be reliably moved to the second position.

[0014] It is possible that the main body has two side surfaces adjacent to the loading plane, namely, a first side surface and a second side surface, the first side surface and the second side surface respectively have a first inclined surface inclined relative to the vertical direction in a manner that the width of the holding member becomes narrower as it moves toward the loading plane, and a vertical surface perpendicular to the loading plane, the first inclined surface abuts against the second inclined surface of the holding portion, and the rack has a second rack disposed on the vertical surface. Thus, the holding member (main body) can be positioned in a direction orthogonal to the conveying direction and in the vertical direction, and the holding member can be conveyed along the conveying direction.

[0015] The holding portion may include: a rod-shaped holding rod extending substantially perpendicular to the first straight line and the second straight line; and a plate-shaped first connecting portion and a plate-shaped second connecting portion connecting the two ends of the holding rod to the main body, respectively; the height of the first connecting portion and the second connecting portion is higher than the height of the vertical plane; the first rack is provided on the entire end surface of the first connecting portion and the second connecting portion; and the first rack and the second rack are located on the same plane. Thus, the height of the first rack is higher than the height of the second rack, and it is easy to transmit the force from the pinion when the holding member is pressed into the second position.

[0016] It is possible that the holding member has a front end face that is opposite to the frame when the holding portion is located at the first position, the holding member has an abutting surface for the front end face to abut, an air suction portion is provided on the abutting surface, the air suction portion has a connector and a suction hose engaged with the connector, the holding member has an air hole, one end of the air hole is open at the front end face, and the other end is open at the loading plane, the connector has a coupling portion that can be engaged with the air hole, the coupling portion can move along the conveying direction, and the coupling portion is engaged with the air hole when the front end face is not abutting with the abutting surface. Thereby, the object can be sucked toward the loading plane before the front end face abuts with the abutting surface, so that the object will not be offset due to the impact when the front end face abuts with the abutting surface.

[0017] It is possible that the pinion is provided on the second rotating shaft, a pulley is provided on the second rotating shaft, a first belt is wound around the pulleys provided on the first track and the third track, and a second belt is wound around the pulleys provided on the second track and the fourth track. Thus, all the pinions provided on the first track and the third track can be rotated by the same amount at the same time, and all the pinions provided on the second track and the fourth track can be rotated by the same amount at the same time.

[0018] The first rail may be arranged to be movable in a direction perpendicular to the conveying direction, thereby preventing the pinion gear from colliding with the rack gear and being damaged, and preventing dust from being generated.

[0019] The central portion of the holding member including the mounting plane may be formed of aluminum, the outer portion of the holding member forming the rack may be formed of iron or ceramic, and the central portion may have an oxide film formed on the surface. Thus, the generation of dust caused by the collision between the rack and the pinion can be greatly reduced.

[0020] Effects of the Invention

[0021] According to the present invention, generation of dust can be prevented. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a perspective view showing the outline of the inspection device 1 .

[0023] Figure 2 It is a plan view schematically showing the inspection device 1 .

[0024] Figure 3 1 and 10 are diagrams schematically showing the vibration isolating table 61 , wherein (A) schematically shows the state when it is floating, and (B) schematically shows the state when it is seated.

[0025] Figure 4 This is a partially enlarged view of the inspection device 1 as seen from the front.

[0026] Figure 5 It is a partial perspective view of the inspection device 1 as viewed from the oblique front.

[0027] Figure 6 It is a plan view of the columnar portions 22 a , 22 b , 22 c , and 22 d of the mounting device 2 and the holding member 4 .

[0028] Figure 7 The figures schematically show the columnar portion 22c of the placement device 2 and the placement portion 25c provided at the front end of the columnar portion 22c, (A) is a perspective view, (B) is a plan view, and (C) is a DD cross-sectional view of (B).

[0029] Figure 8 It is a plan view showing the outline of the inspection device 1 and is a diagram showing an enlarged view of a main part.

[0030] Fig. 9 is a diagram showing an overview of the holding member 4, (A) is Figure 6 The A-A section view of (B) is Figure 6 Looking from direction B, (C) is Figure 6 Looking in the C direction.

[0031] Fig.101 and 2 are diagrams schematically showing a state in which the side surface 41 c of the main body portion 41 of the holding member 4 abuts against the rail 52 a of the holding portion 52 of the inspection portion 50 .

[0032] Fig.11 1 is a diagram schematically showing a driving unit 35 that drives the pinion gear 31 of the conveying device 3 .

[0033] Fig.12 1 and 2 are diagrams schematically showing a state in which the front end surface 41 b of the main body portion 41 of the holding member 4 is located near the contact surface 52 c of the holding portion 52 of the inspection portion 50 .

[0034] Fig.13 It is a diagram schematically showing the connector 58 a of the air suction unit 58 .

[0035] Fig.14 It is a block diagram showing the electrical structure of the inspection device 1 .

[0036] Fig.15 It is a cross-sectional view schematically showing a main body 41A of a holding member according to a modified example.

[0037] Fig.16 It is a plan view schematically showing the inspection apparatus 1A.

[0038] Fig.17 1 and 2 are diagrams schematically showing an inspection device 1B, wherein (A) is a plan view and (B) is a front view.

[0039] Fig.18 It is a block diagram showing the electrical configuration of the inspection device 1B.

[0040] Fig.19 It is a plan view showing the outline of the inspection device 1C.

[0041] Fig. 20 The drawings schematically show the pinions 31 and 31A and the gear 34 when the first table 51A moves to the loading position. (A) shows the state immediately before reaching the loading position, and (B) shows the state at the loading position.

[0042] Fig.21 It is a diagram showing the outline of the transport device 3C. DETAILED DESCRIPTION

[0043] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In each of the drawings, the same elements are denoted by the same reference numerals, and description of duplicated parts will be omitted.

[0044] The mounting device in the present invention is a device for horizontally mounting a plate-shaped object on a holding portion having a mounting plane. In the following, a mask is used as an example of the object. The mask is generated by irradiating a photosensitive substrate (for example, a substrate formed by forming a chromium thin film on one side of a glass substrate and coating a resist thereon) with light such as a laser. For the photosensitive substrate, a substrate having a very small thermal expansion coefficient (for example, about 5.5×10 -7 / K degree) of quartz glass.

[0045] The mask M used in the mounting device has various sizes. As a rectangular mask, 5×5 inches, 6×6 inches, 7×7 inches, 9×9 inches, etc. are used, and as a circular mask, a mask with a diameter of 7.25 inches is used. The present invention can handle masks M of various sizes or multiple shapes by one device.

[0046] <First embodiment>

[0047] Figure 1 It is a perspective view showing the outline of the inspection device 1 . Figure 2 is a top view showing the outline of the inspection device 1 (viewed from the +z direction). Figure 1 In the figure, some structures are omitted. Figure 2 In the figure, the main part is in perspective.

[0048] Hereinafter, the direction along the vertical direction is referred to as the z direction, and the vertical upward direction is referred to as +z. In addition, two directions orthogonal to each other along the horizontal direction are referred to as the x direction and the y direction.

[0049] The inspection device 1 mainly includes a loading device 2, a conveying device 3, a holding member 4, a frame 10, an inspection unit 50, a vibration-isolating table 61, and a platform 62. A mask M, which is a plate-shaped object, is loaded on the holding member 4. The loading device 2 is a device for loading the mask M on the holding member 4. The conveying device 3 is a device for loading the holding member 4 on which the mask M is loaded into or out of the inspection unit 50.

[0050] The frame 10 covers the inspection unit 50, the vibration-isolating table 61, and the platform 62. The inspection device 1 (the inside of the frame 10) is kept at a constant temperature by a temperature adjustment unit (not shown).

[0051] The frame 10 has a front portion 11 provided with an opening and closing door 12. The front portion 11 is provided with an opening 11a, and the opening and closing door 12 covers the opening 11a when the opening and closing door 12 is closed. Figure 1The opening and closing door 12 is shown in a closed state. The opening and closing door 12 can move in the vertical direction (z direction) and can move between a position covering the opening 11a and a position not covering the opening 11a. A track 13 is provided on the front portion 11, and a moving member (not shown) provided on the opening and closing door 12 is moved by an actuator 14 (see Fig.14 ) moves along the track 13, thereby the opening and closing door 12 moves in the z direction.

[0052] The platform 62 is a substantially rectangular parallelepiped (thick plate) member, formed of stone (eg, granite) or a low expansion casting (eg, a nickel-based alloy). The platform 62 is placed on a setting surface (eg, the ground).

[0053] A plurality of (three in this case) vibration-isolating tables 61 are placed on the platform 62 . Figure 3 1 and 10 are diagrams schematically showing the vibration isolation table 61 , wherein (A) schematically shows the state when it is floating, and (B) schematically shows the state when it is seated. The vibration isolation table 61 mainly includes a base 611 , a frame 612 , and a moving member 613 .

[0054] The frame 612 is provided on the base 611 and has a hole 612a. The movable member 613 is provided in the hole 612a so as to be movable in the up-down direction. The movable member 613 mainly includes a rod-shaped member 613a, positioning members 613b, 613e and a plate-shaped portion 613d. The positioning members 613b and 613e are, for example, nuts and are provided on the rod-shaped member 613a. The positioning member 613b has a conical portion 613c on the lower side. The plate-shaped portion 613d is provided on the upper side of the positioning member 613e.

[0055] The inspection unit 50 is provided on the vibration isolation table 61, here, on the upper side of the moving member 613. Thus, the inspection unit 50 is placed on the platform 62 via the vibration isolation table 61. The vibration isolation table 61 can move the inspection unit 50 in the vertical direction by moving the moving member 613 in the vertical direction.

[0056] When the holding member 4 is inserted into and ejected from the inspection unit 50, Figure 3 As shown in (B), the conical portion 613c contacts (is seated on) the frame 612, and the inspection unit 50 is lowered by the vibration isolation table 61. Since the conical portion 613c is seated on the frame 612, the reproducibility of positioning in the height direction (z direction) and the horizontal direction (xy direction) is improved, and the mask M can be carried in and out by the conveying device 3 without any problems.

[0057] On the other hand, during the inspection of the mask M in the inspection section 50, as shown in FIG. Figure 3As shown in (A), the conical portion 613c floats from the frame 612. Thus, the inspection unit 50 floats from the platform 62 and the inspection unit 50 does not vibrate. The plate-shaped portion 613d is provided inside the frame 612, and the plate-shaped portion 613d abuts against the frame 612, so that the moving member 613 does not fall off from the hole 612a.

[0058] It should be noted that the form of the vibration isolation table 61 is not limited to this. For example, the vibration isolation table 61 may also be an active vibration isolation table.

[0059] The inspection unit 50 mainly includes a first table 51 , a holding unit 52 , a second table 53 , belts 54 and 56 , and rails 55 and 57 .

[0060] The second workbench 53 is provided by an actuator 59a (refer to Fig.14 ) driving belt 56 and can move in the x direction along rail 57. The first workbench 51 is provided on the second workbench 53 and is provided by an actuator 59b (refer to Fig.14 ) The driving belt 54 can be moved in the y direction along the track 55. Therefore, the first workbench 51 can move in the x direction and the y direction.

[0061] The holding part 52 is provided on the upper side (+z side) of the first stage 51. The holding part 52 is fixed to the first stage 51, and holds the holding member 4 inside the inspection part 50. The holding part 52 will be described in detail later.

[0062] Next, the mounting device 2 will be described. Figure 4 This is a partial enlarged view of the inspection device 1 as seen from the front. The placement device 2 is provided at a position closer to the front (−y side) than the front portion 11. The holding member 4 is placed on the rollers 32 of the conveying device 3.

[0063] The mounting device 2 can be moved in the z direction by a driving unit (not shown). The mounting device 2 mainly includes a base 21, a plurality of columnar portions 22, a first moving portion 23, and a second moving portion 24. Figure 4 In FIG. 1 , a state where the placing device 2 is located at the lower end is indicated by a solid line, and a state where the placing device 2 is located at the upper end is indicated by a two-dot chain line.

[0064] The base 21 is plate-shaped and is disposed on the lower side of the holding member 4 in the vertical direction. The base 21 is configured to be movable in the vertical direction by the first moving part 23. The first moving part 23 includes a rail 23a, a moving member 23b, and an actuator 23c (see Fig.14 ). The moving member 23b is provided on the base 21 and is movable along the rail 23a. Therefore, the actuator 23c moves the moving member 23b in the z direction along the rail 23a, and thus the first moving unit 23 moves the base 21 in the z direction.

[0065] The columnar portion 22 is a columnar member and is provided on the base 21 via the second moving portion 24. The second moving portion 24 is provided on the base 21. The columnar portion 22 protrudes upward in the vertical direction from the base 21. A placement portion 25 (described later) on which the mask M is placed is provided at the front end of the columnar portion 22.

[0066] The base 21 moves in the z direction, so that the columnar portion 22 and the second moving portion 24 also move in the z direction. When the base 21, the columnar portion 22 and the second moving portion 24 are located at the lower end, the placement portion 25 is located at a position lower than the holding member 4 (see Figure 4 In addition, when the base 21, the columnar portion 22, and the second moving portion 24 are located at the upper end, the placement portion 25 is located above the holding member 4 (see Figure 4 double-dotted line).

[0067] Figure 5 This is a partial stereoscopic view of the inspection device 1 when viewed from the oblique front. Figure 5 In the figure, the solid line indicates the state where the placing device 2 is located at the lower end, and the double-dashed line indicates the state where the placing device 2 is located at the upper end. The columnar portion 22 has four columnar portions 22a, 22b, 22c, and 22d. When the base 21, the columnar portion 22, and the second moving portion 24 move upward from the lower end, the columnar portions 22a, 22b, 22c, and 22d are inserted into the holes 43 of the main body 41.

[0068] The second moving part 24 has four second moving parts 24a, 24b, 24c, and 24d. The columnar parts 22a, 22b, 22c, and 22d are respectively provided on the second moving parts 24a, 24b, 24c, and 24d. That is, the columnar parts 22a, 22b, 22c, and 22d are provided on the base 21 via the second moving parts 24a, 24b, 24c, and 24d.

[0069] The second moving parts 24a, 24b, 24c, and 24d respectively have rails 241a, 241b, 241c, and 241d, moving members 242a, 242b, 242c, and 242d, belts 243a, 243b, 243c, and 243d, and pulleys 244a, 244b, 244c, and 244d.

[0070] The rails 241a, 241b, 241c, and 241d are provided on the base 21. The base 21 has a rectangular shape, and the rails 241a, 241b, 241c, and 241d are provided along the diagonal lines of the base 21, respectively.

[0071] The moving members 242a, 242b, 242c, and 242d are respectively provided on the rails 241a, 241b, 241c, and 241d, and can move along the rails 241a, 241b, 241c, and 241d.

[0072] The columnar parts 22a, 22b, 22c, and 22d are provided on the moving members 242a, 242b, 242c, and 242d, respectively. Therefore, the columnar parts 22a, 22b, 22c, and 22d can move along the rails 241a, 241b, 241c, and 241d.

[0073] Belts 243a, 243b, 243c, 243d are provided on the moving members 242a, 242b, 242c, 242d, respectively. The belts 243a, 243b, 243c, 243d are respectively wound around pulleys 244a, 244b, 244c, 244d, and extend downwardly from the base 21 through the hole 21a provided in the base 21. That is, the belts 243a, 243b, 243c, 243d pull the moving members 242a, 242b, 242c, 242d along the rails 241a, 241b, 241c, 241d toward the diagonal inner side of the base 21.

[0074] A driving unit is provided on the lower side of the base 21. The driving unit includes a belt winding unit (not shown) and an actuator 24e (see Fig.14 ). The belts 243a, 243b, 243c, and 243d are connected to the actuator 24e via the belt winding portion. The actuator 24e drives the belts 243a, 243b, 243c, and 243d at the same time and by the same amount.

[0075] The movable members 242a, 242b, 242c, and 242d are provided with elastic members (not shown) respectively, and the elastic members pull the movable members 242a, 242b, 242c, and 242d toward the diagonal outer sides of the base 21 along the rails 241a, 241b, 241c, and 241d.

[0076] As a result, the moving members 242a, 242b, 242c, 242d move along the rails 241a, 241b, 241c, 241d via the belts 243a, 243b, 243c, 243d and the elastic member. Specifically, the belts 243a, 243b, 243c, 243d overcome the force of the elastic member and pull the moving members 242a, 242b, 242c, 242d, so that the moving members 242a, 242b, 242c, 242d and the columnar parts 22a, 22b, 22c, 22d move inward. When the belts 243a, 243b, 243c, and 243d are loosened by the driving unit, the movable members 242a, 242b, 242c, and 242d and the columnar portions 22a, 22b, 22c, and 22d are moved outward by the urging force of the elastic member.

[0077] At this time, since the driving unit drives the belts 243a, 243b, 243c, and 243d by the same amount at the same time, the moving members 242a, 242b, 242c, and 242d and the columnar portions 22a, 22b, 22c, and 22d move by the same amount at the same time.

[0078] Figure 6 2 is a top view of the columnar parts 22a, 22b, 22c, 22d and the holding member 4 of the mounting device 2. The holding member 4 is formed of aluminum and has an oxide film formed on the surface. The holding member 4 has a main body 41 and a gripping part 42 provided on the main body. The surface on the +z side of the main body 41 is a mounting plane 41a. The main body 41 has a hole 43 that penetrates in the z direction. The hole 43 has a rectangular hole 43e and holes 43a, 43b, 43c, 43d respectively provided at the four corners of the hole 43e. The holes 43a, 43b, 43c, 43d and the hole 43e are integrated to form the hole 43.

[0079] When the mounting device 2 is moved up and down, the base 21 and the main body 41 are arranged so that the diagonal line of the base 21 and the diagonal line of the main body 41 are substantially consistent when viewed from the +z direction. The columnar parts 22a, 22b, 22c, and 22d are respectively inserted into the holes 43a, 43b, 43c, and 43d. In addition, the columnar parts 22a, 22b, 22c, and 22d move along the diagonal lines of the base 21 and the main body 41 in the holes 43a, 43b, 43c, and 43d, respectively (see Figure 6 ).

[0080] A mark 41j consisting of one or more recesses 41i is provided on the back of the main body 41. In the present embodiment, the mark 41j includes two recesses 41i. A proximity sensor 26 (see Fig.14 ), the proximity sensor 26 detects the holding member 4 and reads the mark 41j provided on the main body 41. In this embodiment, three proximity sensors 26 are provided, and the proximity sensors 26 respectively detect the presence or absence of the recessed portion 42i. Figure 6 In the illustrated embodiment, two proximity sensors 26 on both sides of the three proximity sensors 26 detect the recess 42 i , and the central proximity sensor 26 detects the absence of the recess 42 i .

[0081] The mark 41j varies depending on the type (shape and size) of the mask M. For example, Figure 6 As shown, in the case where recesses 42i are provided on both sides and no recess 42i is provided between them, it indicates a 6×6 inch mask. In addition, for example, in the case where three recesses 42i are provided, it indicates a 9×9 inch mask. It should be noted that the method of marking 41j is not limited to this, and the number of proximity sensors 26 is not limited to this. At least one proximity sensor 26 may be provided.

[0082] The columnar portions 22a, 22b, 22c, and 22d are provided at their respective ends with placement portions 25a, 25b, 25c, and 25d for placing the mask M. By moving the columnar portions 22a, 22b, 22c, and 22d, masks M of various sizes can be placed on the placement portion 25.

[0083] Figure 7 It is a diagram showing the outline of the columnar portion 22c of the placing device 2 and the placing portion 25c provided at the front end of the columnar portion 22c, (A) is a perspective view, (B) is a plan view, and (C) is a DD cross-sectional view of (B). It should be noted that the columnar portions 22a, 22b, 22c, 22d and the placing portions 25a, 25b, 25c, 25d have the same structure, so the description of the columnar portions 22a, 22b, 22d and the placing portions 25a, 25b, 25d is omitted.

[0084] The columnar portion 22c is columnar (rod-shaped) and is symmetrical about the diagonal line d when viewed from the upper side in the vertical direction (+z direction) (in plan view), and the angle between two adjacent surfaces 221 and 222 is a right angle. However, the shape of the columnar portion 22c is not limited to this.

[0085] The columnar portion 22c is formed of a material that is difficult to deform, such as iron. The placement portion 25c places the mask M and slides the mask M during positioning, so it is formed of a material that is difficult to damage the mask M, that is, a resin material such as a peak material.

[0086] The mounting portion 25c has two surfaces 251 and 252 of different heights. The surface 251 is the front end surface of the columnar portion 22c and is a flat surface in this embodiment. The surface 252 is a surface that decreases in height downward (in the −z direction) from the surface 251. The mask M is mounted on the surface 252.

[0087] The surfaces 251 and 252 are symmetrical about the diagonal line d, and the angle formed by the two adjacent sides 251a and 251b and the angle formed by the two adjacent sides 252a and 252b are right angles. The surface 251 is arranged on the outside of the surface 252. Here, the outside refers to the side close to the periphery of the base 21. That is, the surface 251 is arranged on the periphery side of the base 21, and the surface 252 is arranged on the center side of the base 21. Thus, the rectangular mask M can be placed on the surface 252. However, the shapes of the surfaces 251 and 252 when viewed from the +z direction are not limited to this.

[0088] The surface 252 is inclined at an angle θ1 relative to the horizontal direction in such a manner that the height decreases as it moves inward (as it moves away from the surface 251). In addition, the surface 252 is inclined at an angle θ1 relative to the horizontal direction in such a manner that the height increases as it moves toward both ends (as it moves away from the diagonal line d). In other words, the surface 252 is a composite surface in which two surfaces are combined in the center (on the diagonal line d). The angle θ1 is preferably 1° to 5°, and is 3° in the present embodiment. Therefore, the contact area between the mask M placed on the surface 252 and the surface 252 is minimized, and the film surface as the functional surface of the mask M is not easily contaminated.

[0089] In addition, the surfaces 253 and 254 connecting the surface 251 and the surface 252 are inclined at an angle θ2 relative to the vertical direction in a manner that they are inclined outward as they become higher. The angle θ2 is preferably 1° to 5°, and is 3° in the present embodiment. Therefore, when the mask M placed on the surface 252 abuts against the surfaces 253 and 254, the contact area between the mask M and the surfaces 253 and 254 is minimized, and the mask M is not easily contaminated.

[0090] A circular arc-shaped recess 255 is provided at the inner corner of the surface 251. In addition, circular arc-shaped notches 256 and 257 are provided at both ends of the inner side of the surface 251. When viewed from the +z direction, the notches 256 and 257 are aligned with the center point O (see FIG. 2 ) of the circle connecting the outer corner 258 of the plurality of columnar portions 22 (mounting portion 25c). Figure 6 ) is overlapped with a curve of an arbitrary radius Ra centered at . For example, the radius Ra is more than half of 7.25 inches (18.415 cm), for example, 9.25 cm. Thus, a circular mask M with a diameter of 7.25 inches can be placed on the surface 252.

[0091] Next, use Figure 8 The conveying device 3 will be described. Figure 8 It is a plan view showing the outline of the inspection device 1, and is a diagram showing an enlarged main part. The transport device 3 mainly includes a holding member 4, a pinion 31, a roller 32, and rails 33a, 33b, 33c, and 33d.

[0092] The transport device 3 transports the holding member 4 carrying the mask M through the opening 11a of the frame 10 from the first position I (see the dotted line) outside the frame 10 to the second position II (see the solid line) inside the frame 10, and transports it from the second position II to the first position I. The first position I is an arbitrary position near the end (the end in the -y direction) on the near-front side of the transport device 3. In addition, the second position II is a position where the holding portion 52 is provided. When the holding member 4 is located at the second position II, the front end surface 41b (see Figure 6 ) abuts against the abutment surface 52c of the retaining portion 52.

[0093] The rails 33a, 33b, 33c, and 33d are arranged in the horizontal direction. The rails 33a and 33c are arranged on the straight line L1, and the rails 33b and 33d are arranged on the straight line L2. The straight lines L1 and L2 are arranged along the conveying direction (y direction) of the holding member 4, and the straight lines L1 and L2 are parallel and have the same height (position in the z direction). The rails 33a and 33b are arranged outside the frame 10, and the rails 33c and 33d are arranged inside the frame 10.

[0094] The pinions 31 are respectively provided on the rails 33a, 33b, 33c, and 33d. It should be noted that the number of the pinions 31 provided on the rails 33a, 33b, 33c, and 33d is not limited to the manner shown in the figure. In the present embodiment, a plurality of pinions 31 are respectively provided on the rails 33a, 33b, 33c, and 33d, but it is sufficient that at least one pinion 31 is provided on the rails 33c and 33d. It is sufficient that a plurality of pinions 31 are provided on the rails 33a and 33b.

[0095] The pinion gear 31 mainly includes a rotation shaft 31a provided along the z direction and a pinion gear body 31b rotatable about the rotation shaft 31a. The pinion gear body 31b is, for example, a pinion gear with a module of 1.

[0096] A plurality of rollers 32 are provided on the rails 33a, 33b, 33c, and 33d, respectively. The roller 32 mainly includes a rotation axis 32a substantially orthogonal to the straight lines L1 and L2 and a cylindrical roller body 32b that can rotate around the rotation axis 32a. A bearing is provided between the rotation axis 32a and the roller body 32b. The holding member 4 is mounted on the plurality of rollers 32. It should be noted that the number of rollers 32 provided on the rails 33a, 33b, 33c, and 33d is not limited to the manner shown in the figure.

[0097] return Figure 6 The main body 41 of the holding member 4 has two side surfaces 41c and 41d adjacent to the mounting plane 41a. The side surfaces 41c and 41d are substantially parallel to the conveying direction.

[0098] The gripping portion 42 is provided on the side opposite to the frame 10 (-y side) across the main body 41, that is, at the end of the main body 41 opposite to the front end surface 41b when the holding member 4 is located at the first position I. The gripping portion 42 includes a rod-shaped gripping rod 42c provided along the x direction and plate-shaped connecting portions 42a and 42b that connect the two ends of the gripping rod 42c to the main body 41, respectively. The gripping rod 42c is, for example, a square rod. The connecting portions 42a and 42b have two side surfaces 42d and 42e that are substantially parallel to the conveying direction (y direction) of the holding member 4.

[0099] Fig. 9 is a diagram showing an overview of the holding member 4, (A) is Figure 6 The A-A section view of (B) is Figure 6 Looking from direction B, (C) is Figure 6 The side surfaces 41c and 41d have vertical surfaces 41e and 41g and inclined surfaces 41f and 41h, respectively. The vertical surfaces 41e and 41g are surfaces perpendicular to the mounting plane 41a. The inclined surfaces 41f and 41h are inclined relative to the vertical direction in such a manner that the width of the retaining member 4 becomes narrower as it moves toward the mounting plane 41a. The side surface 42d is located on the same plane as the vertical surface 41e, and the side surface 42e is located on the same plane as the vertical surface 41g. The height of the side surfaces 42d and 42e is about 2 to 3 times the height of the vertical surfaces 41e and 41g.

[0100] The rack 44 is provided on two side surfaces (side surfaces 41c, 41d and side surfaces 42d, 42e) that are substantially parallel to the conveying direction (y direction) of the holding member 4. The rack 44 has racks 44c, 44d provided on the side surfaces 41c, 41d (here, vertical surfaces 41e, 41g) and racks 44a, 44b provided on the side surfaces 42d, 42e. The racks 44a, 44c are located on the same surface, and the racks 44b, 44d are located on the same surface. The module of the racks 44a, 44b, 44c, 44d is 1, and they can mesh with the pinion 31. The racks 44a, 44b are formed on the entire side surfaces 42d, 42e, and the racks 44c, 44d are provided on the entire vertical surfaces 41e, 41g. The heights of the side surfaces 42 d and 42 e (connecting portions 42 a and 42 b ) are higher than the heights of the vertical surfaces 41 e and 41 g , and the heights of the racks 44 a and 44 b are higher than the heights of the racks 44 c and 44 d .

[0101] return Figure 8 . When the holding member 4 is located at the first position I, the pinion gears 31 provided on the rails 33a and 33b mesh with the racks 44c and 44d, respectively. When the holding member 4 moves in the +y direction from the first position I toward the second position II so that the front end surface 41b approaches the opening 11a, the pinion gear 31 meshes with the racks 44a, 44b, 44c, and 44d. When the holding member 4 further moves in the +y direction, the pinion gears 31 provided on the rails 33c and 33d and the pinion gears 31 provided on the rails 33a and 33b mesh with the racks 44c and 44d, and the pinion gears 31 provided on the rails 33a and 33b mesh with the racks 44a and 44b. In this way, the pinion gears 31 mesh with the racks 44a, 44b, 44c, and 44d, so that the holding member 4 is transported in the y direction while the holding member 4 is positioned in the x direction.

[0102] Then, if the retaining member 4 is further moved in the +y direction, the front end (near the front end surface 41b) of the retaining member 4 is inserted into the retaining portion 52, and the side surface 41c of the main body 41 of the retaining member 4 is inserted into the track 52a of the retaining portion 52 of the inspection portion 50, and the side surface 41d of the main body 41 of the retaining member 4 is inserted into the track 52b of the retaining portion 52.

[0103] Fig.10 41 is a diagram schematically showing a state where the side surface 41c is inserted into the rail 52a. The rail 52a has an inclined surface 52d, and the inclined surface 41f, that is, the main body 41 is positioned in the x-direction and the z-direction by the inclined surface 52d abutting against the inclined surface 41f.

[0104] return Figure 8 . In the state where the holding portion 52 is inserted near the front end surface 41b of the holding member 4, the pinion 31 provided on the rails 33a and 33b meshes with the racks 44a and 44b, and the pinion 31 provided on the rails 33c and 33d meshes with the racks 44c and 44d. Before this state, the pinion 31 meshes with the racks 44a, 44b, 44c and 44d, so it is easy to transmit force from the pinion 31 to the racks 44a, 44b, 44c and 44d. In addition, the holding member 4 is positioned in the x direction by the engagement of the pinion 31 with the racks 44a, 44b, 44c and 44d and the insertion of the peripheral edge (side surface 41c and 41d) of the main body into the holding portion 52 (rails 52a and 52b), so that the holding member 4 does not move in the x direction or rotate along the xy plane during transportation.

[0105] Then, when the holding member 4 moves in the +y direction until the front end surface 41b of the holding member 4 is located near the abutment surface 52c (near the second position II), most of the side surfaces 41c and 41d are inserted into the rails 52a and 52b, and one of the pinions 31 provided on the rails 33c and 33d meshes with the racks 44a and 44b, and the holding member 4 is positioned in the x direction in the same manner as during transportation. The tooth widths of the racks 44c and 44d are smaller than the tooth widths of the pinion 31, but the tooth widths of the racks 44a and 44b are larger than the tooth widths of the pinion 31, so that the force is easily transmitted from the pinion 31 to the racks 44a and 44b, and the holding member 4 can be moved in the y direction.

[0106] Next, the driving of the pinion gear 31 of the conveying device 3 will be described. Fig.11 1 is a diagram schematically showing a driving unit 35 that drives the pinion gear 31 . Fig.11 Although the driving unit 35 provided on the rails 33 a and 33 c is shown in the figure, the driving unit 35 is also provided on the rails 33 b and 33 d in the same manner as the rails 33 a and 33 c (the description is omitted).

[0107] The driving unit 35 includes a pulley 35a, a belt 35b, and an actuator 35c. The pulley 35a is provided on the rotating shaft 31a and the rotating shaft of the actuator 35c. The belt 35b is wound around the pulley 35a. When the actuator 35c is driven, the pulley 35a, that is, the rotating shaft 31a and the pinion gear body 31b rotate via the belt 35b.

[0108] By providing one driving unit 35 on the pinion gears 31 provided on the rails 33a and 33c, all the pinion gear bodies 31b provided on the rails 33a and 33c can be rotated by the same amount at the same time. In addition, by providing one driving unit 35 on the pinion gears 31 provided on the rails 33b and 33d, all the pinion gear bodies 31b provided on the rails 33b and 33d can be rotated by the same amount at the same time.

[0109] Furthermore, since the actuator 35 c can rotate forward and reversely, the pinion gear body 31 b can be rotated forward and reversely, thereby moving the holding member 4 in the +y direction and the −y direction.

[0110] Fig.12 Schematically shows a state in which the front end surface 41b of the main body 41 of the holding member 4 is located near the contact surface 52c of the holding portion 52 of the inspection portion 50. The inspection portion 50 has an air suction portion 58. The air suction portion 58 has a connector 58a provided on the contact surface 52c and a suction hose 58b connected to the connector 58a. The suction hose 58b is connected to a suction pump not shown.

[0111] The main body 41 is provided with an air hole 45. One end of the air hole 45 opens at the front end surface 41b, and the other end opens at the mounting plane 41a. The opening 45a of the air hole 45 opened at the mounting plane 41a overlaps the mask M when viewed from the upper side in the vertical direction (+z direction).

[0112] Fig.13 : is a diagram showing an overview of the connector 58a. The connector 58a mainly includes a joint portion 58c, cylindrical portions 58d, 58e, and an elastic member 58f. A threaded portion 58g is formed on the outer peripheral surface of the cylindrical portion 58e, and the threaded portion 58g is screwed into a threaded hole (not shown) provided in the holding portion 52, so that the connector 58a is provided on the abutment surface 52c. In addition, a threaded hole 58h is provided in the cylindrical portion 58e, and a suction hose 58b is provided in the cylindrical portion 58e via the threaded hole 58h.

[0113] The joint portion 58c is provided on the cylindrical portion 58d and can be connected to the opening portion 45b (see Fig.12 ) is joined. An elastic member 58f is provided between the cylindrical portion 58d and the cylindrical portion 58e. Therefore, the cylindrical portion 58d and the joining portion 58c are movable along the central axis ax.

[0114] return Fig.12 The connector 58a is provided on the contact surface 52c in such a manner that the central axis ax is along the y direction. Therefore, when the front end surface 41b is located a few mm in front of the contact surface 52c (on the -y side), that is, when the front end surface 41b is not in contact with the contact surface 52c, the joint portion 58c (see Fig.13 As a result, the mask M is sucked toward the mounting plane 41a via the air suction portion 58 and the air holes 45.

[0115] Then, the holding member 4 is conveyed via the pinion 31 until the front end face 41b contacts the contact surface 52c. Since the engaging portion 58c can move along the y direction (conveying direction), the holding member 4 is conveyed in the +y direction in a state where the engaging portion 58c is engaged with the opening portion opened in the front end face 41b of the air hole 45. When the front end face 41b contacts the contact surface 52c, the mask M is attracted toward the mounting plane 41a, so that the mask M is held on the mounting plane 41a in a manner that the mask M does not deviate due to the impact when the front end face 41b contacts the contact surface 52c.

[0116] Fig.14 This is a block diagram showing the electrical structure of the inspection device 1. The inspection device 1 has a CPU (Central Processing Unit) 151, a RAM (Random Access Memory) 152, a ROM (Read Only Memory) 153, an input / output interface (I / F) 154, a communication interface (I / F) 155, and a medium interface (I / F) 156, which are interconnected with the actuators 14, 23c, 24e, 35c, 59a, 59b, the proximity sensor 26, and the like.

[0117] The CPU 151 operates based on the programs stored in the RAM 152 and the ROM 153, and controls each part. A signal is input to the CPU 151 from the proximity sensor 26, etc. The signal output from the CPU 151 is output to the actuators 14, 23c, 24e, 35c, 59a, 59b, etc.

[0118] RAM152 is a volatile memory. ROM153 is a nonvolatile memory storing various control programs and the like. CPU151 operates based on the programs stored in RAM152 and ROM153, and controls various parts. In addition, ROM153 stores a boot program executed by CPU151 when the inspection device 1 is started, a program depending on the hardware of the inspection device 1, and the like. In addition, RAM152 stores programs executed by CPU151, data used by CPU151, and the like.

[0119] CPU 151 controls input / output devices 141 such as a touch panel, keyboard, and mouse via input / output interface 154. Communication interface 155 receives data from other devices via network 142 and transmits the data to CPU 151, and transmits data generated by CPU 151 to other devices via network 142.

[0120] The medium interface 156 reads the program or data stored in the storage medium 143 and stores it in the RAM 152. It should be noted that the storage medium 143 is, for example, an IC card, an SD card, or the like.

[0121] It should be noted that the program for realizing each function is read out from the storage medium 143 , for example, installed in the inspection device 1 via the RAM 152 , and executed by the CPU 151 .

[0122] The CPU 151 has a function of a control unit 151a that controls each unit of the inspection device 1 based on an input signal. The control unit 151a is constructed by executing a predetermined program read by the CPU 151. The processing performed by the control unit 151a will be described in detail later.

[0123] Fig.14 The structure of the inspection device 1 shown in the figure illustrates the main structure when describing the features of this embodiment, and does not exclude the structure of a general information processing device. The components of the inspection device 1 can be classified into more components according to the processing content, and one component can also perform the processing of multiple components.

[0124] The function of the inspection device 1 thus constructed is described. The following processing is mainly performed by the control unit 151a. First, the operator grasps the holding rod 42c of the holding portion 42 of the holding member 4 to lift the holding member 4 and place the holding member 4 on the roller 32 of the conveying device 3. The three proximity sensors 26 read the mark 41j, and based on the result, the control unit 151a controls the actuator 35c of the conveying device 3 and the actuator 24e of the loading device 2. Specifically, the control unit 151a controls the actuator 35c of the conveying device 3 to move the holding member 4 in the y direction so that the center of the base 21 coincides with the center of the main body 41. In addition, the control unit 151a controls the actuator 24e of the loading device 2 to move the columnar portion 22 of the loading device 2 and arrange the columnar portion 22 at a position corresponding to the size of the mask M placed on the holding member 4.

[0125] Next, the control unit 151a controls the actuator 23c of the mounting device 2 to move the base 21 of the mounting device 2 in the +z direction, so that the mounting portion 25 provided at the front end of the columnar portion 22 of the mounting device 2 protrudes in the +z direction from the mounting plane 41a of the main body 41 of the holding member 4. Thus, the mask M can be mounted on the mounting portion 25.

[0126] The operator uses a mask holding device (not shown) to place the mask M on the placement portion 25. When an instruction is inputted via the input / output device 141, the control unit 151a controls the actuator 24e of the placement device 2 to move the columnar portion 22 of the placement device 2 inward by about 1 mm, and the placement portion 25 of the placement device 2 holds the mask M. The surface 252 of the placement portion 25 is inclined at an angle θ1 relative to the horizontal direction, so that when the columnar portion 22 is moved inward, only the corner of the mask M rubs against the placement portion 25, and contamination of the mask M is minimized. However, this process is not essential.

[0127] Next, the control unit 151a controls the actuator 23c of the mounting device 2 to move the base 21 of the mounting device 2 in the -z direction, and places the mask M placed on the placement portion 25 of the mounting device 2 on the placement plane 41a. Since the mask M is clamped by the placement portion 25, the mask M does not move due to the movement of the base 21. When the position of the base 21 reaches a predetermined position, that is, the position where the mask M is placed on the placement plane 41a, the control unit 151a controls the actuator 24e of the mounting device 2 to move the columnar portion 22 of the mounting device 2 outward, and releases the clamping of the mask M by the placement portion 25. Thus, the mask M is placed on the holding member 4 by the mounting device 2.

[0128] When the base 21 moves to the -z end, the control unit 151a controls the actuator 35c of the conveying device 3 to drive the pinion 31 of the conveying device 3 to convey the holding member 4 in the +y direction. At this time, the actuator 35c is controlled so that the mask M placed on the placement plane 41a of the holding member 4 does not deviate on the placement plane 41a, and the acceleration becomes 0.1g or less.

[0129] When the operating current value of the actuator 35c reaches the maximum current value (overload), that is, the front end surface 41b of the main body 41 of the holding member 4 contacts the contact surface 52c of the holding portion 52, the control unit 151a stops the actuator 35c. Thus, the holding member 4 is transported to the inside of the inspection device 1 by the transport device 3.

[0130] According to the present embodiment, a columnar portion 22 is provided on a base 21 provided so as to be movable in the up-down direction so as to protrude upward in the vertical direction, and a placement portion 25 is provided at the front end of the columnar portion 22. When the base 21 is moved upward from the lower end, the columnar portion 22 is inserted into the hole 43 of the holding member 4. When the base 21 is located at the upper end, the placement portion 25 is located above the placement plane 41a of the holding member 4. Therefore, the operator only needs to place the mask M on the placement portion 25, and does not need to place the mask M directly on the placement plane 41a. Therefore, when placing the plate-shaped mask M, the mask M and the placement plane 41a are not easily damaged.

[0131] For example, when the mask M is placed on the placement plane 41a by manual work, it is difficult to maintain the posture of the mask M in a horizontal state, and a part of the mask M may be damaged or a part of the placement plane 41a may be deformed due to collision between the mask M and the placement plane 41a, which may generate dust. In contrast, according to the present embodiment, the mask M is not placed directly on the placement plane 41a, and the placement device 2 places the mask M placed on the placement portion 25 in a horizontal direction on the placement plane 41a while maintaining the posture. Therefore, when placing the plate-shaped mask M, it is possible to avoid damaging the mask M and the placement plane 41a or generating dust.

[0132] According to the present embodiment, the columnar portions 22a to 22d are disposed on the base 21 via the second moving portions 24a to 24d and can be moved along the rails 241a to 241d disposed on the base 21. Therefore, the single mounting device 2 can handle masks M of various sizes.

[0133] According to the present embodiment, the belts 243a, 243b, 243c, 243d provided on the moving members 242a, 242b, 242c, 242d are driven at the same amount at the same time, so that the columnar portions 22a, 22b, 22c, 22d can be moved at the same amount at the same time.

[0134] In addition, according to the present embodiment, the surface 252 on which the mask M is placed is inclined at an angle θ1 (1° to 5°) relative to the horizontal direction in a manner that the height decreases toward the inside, so that the contact area between the mask M placed on the surface 252 and the surface 252 is minimized, and the film surface of the mask M is not easily contaminated. In addition, the surfaces 253 and 254 connecting the surface 251 and the surface 252 are inclined at an angle θ2 (1° to 5°) relative to the vertical direction in a manner that the height increases and the surfaces 253 and 254 are inclined. Therefore, when the mask M placed on the surface 252 abuts against the surfaces 253 and 254, the contact area between the mask M and the surfaces 253 and 254 is minimized, and the mask M is not easily contaminated.

[0135] In addition, according to the present embodiment, the notches 256 and 257 provided on the surface 251 overlap with a curve of an arbitrary radius Ra centered on the center point O of a circle connecting the outer corners 258 of the plurality of columnar portions 22 (carrying portion 25c) when viewed from the +z direction, so that not only a rectangular mask M can be placed on the carrying portion 25 but also a circular mask M with a diameter of Ra×2 can be placed on the carrying portion 25.

[0136] In addition, according to the present embodiment, a proximity sensor 26 is pre-installed on the base 21. The proximity sensor 26 detects the retaining member 4 and reads the mark 41j provided on the back of the retaining member 4. Therefore, the actuator 35c can be controlled to move the retaining member 4 along the y direction so that the center of the base 21 is consistent with the center of the main body 41. In addition, the actuator 24e can be controlled to move the columnar portion 22 and configure the columnar portion 22 at a position corresponding to the size of the mask M placed on the retaining member 4.

[0137] In addition, according to the present embodiment, the rails 33a, 33c and the rails 33b, 33d provided on the straight lines L1, L2 along the conveying direction (y direction) are provided with pinions 31 and rollers 32, respectively, the holding member 4 is placed on the rollers 32, and the pinions 31 are meshed with the racks 44a, 44b, 44c, 44d, so that the holding member 4 can be conveyed along the straight lines L1, L2 in a state where the holding member 4 is positioned in the x direction. In addition, when conveying the holding member 4, the holding member 4 does not move in the x direction, or the holding member 4 does not rotate along the xy plane, so the holding member 4 does not collide with the holding portion 52 and the like in the inspection device 1, and as a result, the generation of dust can be prevented.

[0138] Furthermore, according to the present embodiment, when the holding member 4 is located at or near the second position II inside the frame 10, at least one of the pinions 31 provided on the rails 33c and 33d meshes with the racks 44a and 44b, so that force can be transmitted from the pinion 31 to the holding member 4. Therefore, the holding member 4 can be reliably moved to the second position II.

[0139] In addition, according to this embodiment, the side surfaces 41c and 41d respectively have vertical surfaces 41e and 41g and inclined surfaces 41f and 41h, and the inclined surfaces 41f and 41h abut against the inclined surface 52d of the retaining portion 52. Racks 44c and 44d are provided on the vertical surfaces 41e and 41g, so that the main body 41 can be positioned in the x direction and the z direction, and the retaining member 4 can be transported in the y direction.

[0140] In addition, according to this embodiment, the holding portion 42 has side surfaces 42d and 42e located on the same plane as the vertical surfaces 41e and 41g, and racks 44a and 44b are formed on the entire side surfaces 42d and 42e. Therefore, when the retaining member 4 is pressed into the second position II toward the +y direction, the force is easily transmitted from the pinion 31 to the racks 44a and 44b.

[0141] In addition, according to the present embodiment, the connector 58a of the air suction portion 58 is provided on the contact surface 52c with which the front end surface 41b of the holding member 4 contacts, and the connector 58a has a joint portion 58c that can move in the y direction, so that when the front end surface 41b is not in contact with the contact surface 52c, the joint portion 58c is engaged with the opening 45b, and the mask M is attracted toward the mounting plane 41a. Thus, the mask M can be prevented from being displaced due to the impact when the front end surface 41b contacts the contact surface 52c.

[0142] In addition, according to the present embodiment, a pulley 35a is provided on the rotating shaft 31a of the pinion gear 31, a belt 35b is wound around the pulley 35a provided on the tracks 33a and 33c, and a belt 35b is wound around the pulley 35a provided on the tracks 33b and 33d, thereby enabling all the pinion gear bodies 31b provided on the tracks 33a and 33c to rotate simultaneously by the same amount, and enabling all the pinion gear bodies 31b provided on the tracks 33b and 33d to rotate simultaneously by the same amount.

[0143] It should be noted that, in the present embodiment, the actuator 24f is used to move the base 21, and the actuator 24e is used to move the columnar portion 22, but the actuators 24e and 24f are not essential, and the operator may manually move the base 21 or the columnar portion 22. However, it is preferable to have a mechanism that allows the four columnar portions 22 to move simultaneously even when the columnar portion 22 is moved manually.

[0144] In addition, in the present embodiment, the movable members 242a, 242b, 242c, 242d are stretched by the belts 243a, 243b, 243c, 243d to overcome the action of the elastic member, so that the movable members 242a, 242b, 242c, 242d are moved, but the mechanism for moving the movable members 242a, 242b, 242c, 242d is not limited thereto. For example, pulleys may be provided near the two ends of the tracks 241a, 241b, 241c, 241d, and the belts 243a, 243b, 243c, 243d may be wound around the two pulleys. As a result, by moving the belts 243a, 243b, 243c, 243d in two directions, the movable members 242a, 242b, 242c, 242d may be moved in two directions, namely, inward and outward.

[0145] In addition, in the present embodiment, the actuator 35c is used to carry the holding member 4, but the actuator 35c is not essential, and the operator can also manually move the holding member 4. In this case, it is pre-set that the pinion 31 can rotate freely, and by rotating the pinion 31 according to the movement of the holding member 4, the holding member 4 can be positioned in the x direction, and the holding member 4 does not rotate during the movement.

[0146] In the present embodiment, the holding member 4 is made of aluminum and has an oxide film formed on the surface, but the structure of the holding member 4 is not limited to this. Fig.15 1 is a cross-sectional view showing an outline of a main body 41A of a holding member of a modified example. The main body 41A has a central portion 41m formed of aluminum and an outer portion 41n formed of stainless steel or ceramic. The central portion 41m includes a mounting plane 41a, and an oxide film is formed on the surface. The outer portion 41n includes side surfaces 41c and 41d.

[0147] The mounting plane 41a on which the mounting mask M is mounted needs to be formed of aluminum with an oxide film formed thereon, but there is a problem that the oxide film is easily peeled off due to impact. Therefore, by using stainless steel or ceramics that are not easily damaged by impact to form the outer portion 41n where the rack 44 is formed, dust generated by the collision between the rack 44 and the pinion 31 can be greatly reduced.

[0148] <Second embodiment>

[0149] The second embodiment of the present invention is a mode in which the rail 33a can move in the x direction. The difference between the inspection device 1 of the first embodiment and the inspection device 1A of the second embodiment is only the conveying device, so only the conveying device in the inspection device of the second embodiment is described below. It should be noted that the same reference numerals are marked on the same parts as the first embodiment, and the description is omitted.

[0150] Fig.16 FIG. 1 is a top view showing the outline of the inspection device 1A. Fig.16 The conveying device 3A mainly includes a holding member 4, a pinion 31, rollers 32, 32A, rails 33a, 33b, 33c, 33d, and a rail 36. Fig.16 In the figure, the rails 33c, 33d, and the pinion 31 and the roller 32 provided on the rails 33c, 33d are omitted.

[0151] The rail 33a can move in the x direction along the rail 36. The rail 33a is provided with a roller 32A. The difference between the roller 32 and the roller 32A is the width in the x direction, and the width of the roller 32A is wider than the width of the roller 32.

[0152] Before placing holding member 4 on conveying device 3A, the operator moves rail 33a in the -x direction along rail 36. Since roller 32A is wider than roller 32, holding member 4 can be placed on rollers 32, 32A even if rail 33a moves in the -x direction.

[0153] When the operator places the holding member 4 on the rollers 32 and 32A, the operator moves the rail 33a in the +x direction to mesh the pinion 31 with the rack 44. The subsequent processing is the same as that of the inspection device 1.

[0154] According to the present embodiment, when the holding member 4 is placed on the transport device 3A, the pinion 31 and the rack 44 do not need to be meshed, so it is possible to prevent the pinion 31 and the rack 44 from colliding and being damaged. In particular, since the module of the pinion 31 and the rack 44 is as small as 1, when the holding member 4 is placed without moving the rail 33a, the teeth of the pinion 31 and the rack 44 do not mesh and part of the teeth are missing, which may bring dust into the inspection device. However, by moving the rail 33a, such a problem can be prevented.

[0155] It should be noted that in this embodiment, the operator moves the rail 33a along the rail 36 in the x direction, but the transport device 3A may also move the rail 33a along the rail 36. At this time, based on instructions from the input / output device 141, the control unit 151a moves the rail 33a via an actuator (not shown).

[0156] <Third embodiment>

[0157] The third embodiment of the present invention is a method of automatically placing the mask M on the placement unit 25. The difference between the inspection device 1 of the first embodiment and the inspection device 1B of the third embodiment is only the placement device, so only the placement device will be described below. It should be noted that the same reference numerals are used for the same parts as those in the first embodiment, and the description thereof is omitted.

[0158] Fig.17 1B is a diagram showing an overview of the inspection device 1B, (A) is a top view, and (B) is a front view. Fig.17 Only the main parts are shown in the figure.

[0159] The mounting device 2A provided in the inspection device 1B mainly includes a base 21, a plurality of columnar portions 22, and a first moving portion 23 (in Fig.17 The second moving part 24 (omitted from the figure) Fig.17 The intermediate mask box 63 and the storage rack 70 are arranged adjacent to the base 21 on the near front side (-y side) of the front part 11 when viewed from the upper side in the vertical direction. In the present embodiment, the intermediate mask box 63 is arranged on the -x side of the holding member 4 placed in the first position I, and the storage rack 70 is arranged on the +x side of the holding member 4 placed in the first position I so as to sandwich the base 21.

[0160] The intermediate mask box 63 mainly includes a base 63a, a mounting portion 63b, and a cover 63c. The mounting portion 63b is provided on the base 63a, and the mask M is mounted at the front end. The shape of the mounting portion 63b is the same as that of the mounting portion 25. The cover 63c is provided on the base 63a so as to be openable and closable so as to cover the mounting portion 63b and the mask M. By placing the mask M on the mounting portion 63b and closing the cover 63c, contamination of the mask M can be prevented. In addition, the inside of the cover 63c can be filled with nitrogen using a nitrogen filling portion (not shown).

[0161] The storage rack 70 mainly includes a frame 71 and a plurality of mask storage units 72. The mask storage units 72 can be operated by actuators 73 (see Fig.18 ) moves in the z direction. It should be noted that, in the present embodiment, the storage rack 70 has five mask storage units 72, but the number of mask storage units 72 of the storage rack 70 is not limited thereto.

[0162] The mask storage unit 72 includes a base 72a and a placement unit 72b provided on the base 72a. The base 72a is provided so as to be movable by an actuator 72c (see Fig.18 ) moves in the x direction. The mask M is placed on the placement portion 72b, and the mask M moves in the x direction together with the base 72a. The placement portion 72b has the same shape as the placement portion 25.

[0163] The mask transport unit 80 is provided at a position closer to the front side (-y side) than the intermediate mask box 63, the base 21, and the storage rack 70. The mask transport unit 80 mainly includes arms 81, 82, and a rail 83. The arms 81, 82 are of the same shape and hold the mask M from below. The arms 81, 82 have a substantially U-shaped portion that extends in the horizontal direction. Therefore, the substantially U-shaped portion is brought into contact with the back side of the mask M, and the arms 81, 82 lift the mask M, so that the posture of the mask M is maintained in the horizontal direction.

[0164] Arms 81 and 82 are arranged on rails 83. By actuator 84 (refer to Fig.18 ), arms 81, 82 are able to move in the x direction along the track 83.

[0165] In addition, by including the actuator 85 (refer to Fig.18 ) of the moving mechanism (not shown), the arms 81 and 82 can move in the y direction by including an actuator 86 (see Fig.18 ) of the mobile mechanism (not shown), the arms 81 and 82 can move in the z direction. It should be noted that the mobile mechanism may also include a track not shown.

[0166] Fig.18This is a block diagram showing the electrical structure of the inspection device 1B. The inspection device 1B has a CPU (Central Processing Unit) 151, a RAM (Random Access Memory) 152, a ROM (Read Only Memory) 153, an input / output interface (I / F) 154, a communication interface (I / F) 155, and a medium interface (I / F) 156, which are interconnected with the actuators 14, 24e, 24f, 35c, 59a, 59b, 72c, 73, 84, 85, 86, the proximity sensor 26, and the like.

[0167] The operation of the inspection device 1B thus configured will be described. The following processing is mainly performed by the main control unit 151a. In this embodiment, the mask M placed in the mask storage unit 72 of the storage rack 70 is placed on the holding member 4 for inspection, and the inspected mask M is placed in the intermediate mask box 63. It should be noted that the cover 63c of the intermediate mask box 63 is opened, and the placement unit 63b is exposed.

[0168] First, the operator grasps the grasping rod 42c of the grasping portion 42 of the holding member 4 to lift the holding member 4 and place the holding member 4 on the roller 32 of the conveying device 3. The three proximity sensors 26 read the marks, and the control unit 151a controls the actuator 35c of the conveying device 3 to move the holding member 4 in the y direction so that the center of the base 21 coincides with the center of the main body 41. In addition, the control unit 151a controls the actuator 24e of the mounting device 2A to move the columnar portion 22 of the mounting device 2A and arranges the columnar portion 22 at a position corresponding to the size of the mask M placed on the holding member 4.

[0169] Next, the control unit 151a controls the actuator 73 of the storage rack 70 so that the height (position in the z direction) of the mask storage unit 72 on which the inspection target mask M is placed is substantially equal to the height of the placement unit 25 provided at the front end of the columnar unit 22 of the placement device 2A. Fig.16 In (B), the height of the mask storage portion 72 located second from the top is substantially equal to the height of the mounting portion 25 .

[0170] Next, the control unit 151 a controls the actuator 73 of the storage rack 70 to move the mask storage unit 72 on which the inspection target mask M is placed in the −x direction, thereby exposing the mask M to the outside of the frame 71 of the storage rack 70 .

[0171] Next, the control unit 151a controls the actuator 84 of the mask conveying unit 80 to move the arms 81 and 82 of the mask conveying unit 80 in the x direction along the track 83 of the mask conveying unit 80, so that the arm 81 is aligned with the position of the mask M arranged on the outside of the frame 71 in the x direction, and the arm 82 is aligned with the position of the retaining member 4 (loading device 2) in the x direction.

[0172] Next, the control unit 151a controls the actuator 86 of the mask transport unit 80 to move the arms 81 and 82 in the z direction so that the height of the arms 81 and 82 is lower than the height of the mask M. In addition, the control unit 151a controls the actuator 85 of the mask transport unit 80 to move the arms 81 and 82 in the +y direction so that the positions of the mask storage unit 72 and the holding member 4 (loading device 2) of the storage rack 70 and the arms 81 and 82 in the y direction coincide with each other (see Fig.16 dotted line in (A).

[0173] If the positions of the mask storage unit 72 and the arm 81 in the y direction and the positions of the holding member 4 (loading device 2) and the arm 82 in the y direction coincide with each other, the control unit 151a controls the actuator 86 to move the arms 81 and 82 in the +z direction, and lifts the mask M from the loading portion 72b of the mask storage unit 72 and the loading portion 25 (see Fig.16 (B) double dotted line).

[0174] Next, the control unit 151 a controls the actuator 84 of the mask transport unit 80 to move the arms 81 and 82 in the −x direction along the rails 83 , so that the arm 81 coincides with the position of the holding member 4 (loading device 2 ) in the x direction, and the arm 82 coincides with the position of the reticle box 63 in the x direction.

[0175] If the positions of the arm 81 and the holding member 4 (loading device 2A) in the x direction and the positions of the arm 82 and the intermediate mask box 63 in the x direction are consistent, the control unit 151a controls the actuator 86 of the mask conveying unit 80 to move the arms 81 and 82 in the -z direction, and loads the mask M on the loading portion 25 and the loading portion 63b of the intermediate mask box 63.

[0176] Thus, the mask M before inspection is mounted on the mounting portion 25 of the mounting device 2A. Since the subsequent processing of the inspection device 1B is the same as that of the inspection device 1, the description thereof will be omitted.

[0177] The mask M placed on the placement portion 25 is the mask M inspected by the inspection device 1. Therefore, the placement portion 63b places the inspected mask M. Then, the operator closes the cover 63c of the reticle box 63, stores the inspected mask M inside the reticle box 63, and replaces the reticle box 63 containing the mask M with an empty reticle box 63.

[0178] According to this embodiment, by arranging the loading portion 63b and the loading portion 72b adjacent to the base 21, and using the arms 81 and 82 to hold the mask M from below and move the arms 81 and 82 along the rails 83, the mask M can be loaded on the loading portion 25 or removed from the loading portion 25 without the intervention of an operator.

[0179] It should be noted that, in the present embodiment, the placement device 2A includes the intermediate mask box 63, the storage rack 70, and the mask transport unit 80, but it is sufficient to include either the intermediate mask box 63 or the storage rack 70. For example, the mask transport unit 80 may transport the mask M before inspection from the loading unit 72b of the mask storage unit 72 to the loading unit 25, and transport the mask M after inspection from the loading unit 25 to the mask storage unit 72 (loading unit 72b). In addition, for example, the mask M after inspection may be transported from the loading unit 25 to the intermediate mask box 63 (loading unit 63b). In these cases, the mask transport unit 80 may include one arm 81.

[0180] <Fourth embodiment>

[0181] The fourth embodiment of the present invention is a method in which a part of the pinion 31 of the transport device is disposed on the inspection unit 50. The difference between the inspection device 1 of the first embodiment and the inspection device 1C of the fourth embodiment is only the transport device, so only the transport device of the inspection device of the fourth embodiment will be described below. It should be noted that the same reference numerals are given to the same parts as those of the first embodiment, and the description thereof will be omitted.

[0182] Fig.19 FIG. 1 is a top view showing an overview of the inspection device 1C. Fig.19 Only the main parts are shown in the figure. The transport device 3B of the inspection device 1C mainly includes a holding member 4, pinions 31, 31A, rollers 32, 32B, rails 33a, 33b, 33c, 33d, a gear 34, and a switching mechanism 37. Fig.19 In the figure, the rails 33a and 33b and the pinion 31 and the roller 32 provided on the rails 33a and 33b are omitted.

[0183] The pinion 31A and the roller 32B are installed on the first table 51A. The pinion 31A is configured such that the pinion main body is rotatably installed on the rotating shaft installed on the first table 51A. The roller 32B is configured such that the roller main body is rotatably installed on the rotating shaft installed on the first table 51A.

[0184] The first worktable 51A is different from the first worktable 51 in shape only on the -y side, and the other parts are the same. The pinion 31A and the roller 32B move in the x-direction and the y-direction together with the first worktable 51A. Fig.19 , a state in which the first stage 51A is located at the loading position (a position where the mask M is carried in by the transport device 3B) is shown.

[0185] The pinion gear 31 provided near the end portion on the +y side of the rails 33 c and 33 d is provided with a switching mechanism 37 . The switching mechanism 37 mainly includes a plate-shaped member 371 , an elastic member 372 , and a stopper pin 373 .

[0186] The plate-shaped member 371 is rotatably provided on the rotation axis of the pinion gear 31. The plate-shaped member 371 is provided with a gear 34. When the plate-shaped member 371 rotates around the rotation axis of the pinion gear 31, the position of the gear 34 changes with the rotation of the plate-shaped member 371. The gear 34 is configured such that a gear body 34b is rotatably provided on a rotation axis 34a provided on the plate-shaped member 371.

[0187] The elastic member 372 is, for example, a tension spring, and applies force to the plate-shaped member 371 in a direction in which the gear 34 approaches the rails 33c and 33d (see Fig.19 ) force.

[0188] When the first workbench 51A is not in the loading position, the plate-shaped member 371 is rotated by the force of the elastic member 372 (see Fig.19 ), the plate-shaped member 371 contacts the stopper pin 373. When the first workbench 51A moves toward the loading position (moves in the −y direction), as shown in FIG. Fig.19 As shown by the hollow arrow, the pinion 31A also moves in the -y direction together with the first table 51A, and the pinion 31A overcomes the force of the elastic member 372 and presses the gear 34, that is, the plate-shaped member 371. As a result, the gear 34 meshes with the pinion 31A.

[0189] Fig. 20 The drawings schematically show the pinions 31 , 31A and the gear 34 when the first table 51A moves to the loading position. (A) shows the state immediately before reaching the loading position, and (B) shows the state at the loading position.

[0190] Before reaching the loading position, Fig. 20 As shown in (A), the gear 34 and the pinion 31A are located at a position farther than the meshing position. Then, the pinion 31A moves toward the loading position along Fig. 20 The result is that Fig. 20 As shown in (B), the pinion gear 31A moves to the loading position, and the gear 34 is properly meshed with the pinion gear 31A.

[0191] At this time, the elastic member 372 applies force to the first table 51A via the pinion gear 31A, but since the plate-shaped member 371 can rotate against the force of the elastic member 372 , an excessive force is not applied to the first table 51A.

[0192] It should be noted that, just before reaching the loading position, the phase of the gear 34 may be inconsistent with the phase of the pinion 31A (see Fig. 20 ), since the pinion 31A is freely rotatable, the pinion 31A rotates in phase with the gear 34 due to the urging force of the elastic member 372 .

[0193] The operation of the inspection device 1C configured as above will be described. The following processing is mainly performed by the control unit 151a. It should be noted that the electrical configuration of the inspection device 1C is the same as that of the inspection device 1, and therefore the description thereof will be omitted.

[0194] First, the control unit 151a controls the actuators 59a and 59b, such as Fig.19 As shown, the first worktable 51A is moved to the loading position, and the gear 34 is meshed with the pinion 31A.

[0195] Then, similarly to the case of the inspection device 1, when the holding member 4 is placed on the roller 32 of the transport device 3B and the mask M is placed on the holding member 4, the control unit 151a controls the actuator 35c of the transport device 3B to drive the pinion 31 of the transport device 3B, and the holding member 4 is transported in the +y direction. Since the phases of the pinions 31 and 31A are consistent (see Fig. 20 ), so that the rack 44 and the pinion gears 31, 31A are correctly meshed, and the holding member 4 is smoothly conveyed to the holding portion 52.

[0196] It should be noted that when the first workbench 51A, that is, the pinion 31A moves to the loading position, the teeth of the gear 34 abut against the teeth of the pinion 31A, and the pinion 31A may not rotate in phase with the gear 34. In this case, the teeth of the pinion 31A press the teeth of the gear 34 until the pinion 31 and the gear 34 start to drive, and the state in which the teeth of the pinion 31A abut against the teeth of the gear 34 is maintained by the force of the elastic member 372. When the pinion 31 and the gear 34 start to drive (rotate), the teeth of the pinion 31A are disengaged from the abutment with the teeth of the gear 34, and the teeth of the pinion 31A enter between the teeth of the gear 34. In conjunction with this, the gear 34 moves in a direction close to the pinion 31A by the force of the elastic member 372, the gear 34 meshes with the pinion 31A, and the phases of the pinion 31 and the pinion 31A are consistent.

[0197] Then, similarly to the case of the inspection device 1, when the front end surface 41b of the main body 41 of the holding member 4 abuts against the abutment surface 52c of the holding portion 52, the control unit 151a stops the actuator 35c of the transport device 3B. Thus, the holding member 4 is transported into the inspection device 1C by the transport device 3B.

[0198] According to the present embodiment, by placing the pinion 31A on the first stage 51A, the pinion 31A can be brought close to the holding portion 52. Thus, regardless of the size of the gripping portion 42, the holding member 4 can be pushed in completely by the pinion 31A.

[0199] It should be noted that in the present embodiment, there is one gear 34, but the number of gears 34 is not limited to one. For example, when the distance between the rails 33c and 33d and the holding portion 52 is far, the pinion 31 and the pinion 31A may be connected by a plurality of gears.

[0200] Fig.21 3C is a diagram showing an overview of a transport device according to a modified example. Fig.21 In the figure, the first workbench 51A (in Fig.21 The conveying device 3C mainly includes a holding member 4, pinions 31, 31A, rollers 32, 32B, rails 33a, 33b, 33c, 33d, a gear 34A, and a switching mechanism 37A. Fig.21 In the figure, the rails 33a, 33b, the pinion 31 and the roller 32 provided on the rails 33a, 33b, and the roller 32B are omitted.

[0201] A switching mechanism 37A is provided on the pinion 31 provided near the end of the +y side of the rails 33c and 33d. The switching mechanism 37A mainly includes a plate-shaped member 371A, an elastic member 372 (in Fig.21 The plate-like member 371A is different in size from the plate-like member 371 (not shown).

[0202] The plate-shaped member 371A is rotatably provided on the rotating shaft of the pinion gear 31. The plate-shaped member 371A is provided with a gear 34A. The gear 34A has three gears 341, 342, and 343. The gears 341, 342, and 343 are respectively configured such that a gear body 34b is rotatably provided on a rotating shaft 34a provided on the plate-shaped member 371A. When the plate-shaped member 371A rotates around the rotating shaft of the pinion gear 31, the position of the gear 34A changes with the rotation of the plate-shaped member 371A.

[0203] When the first table 51A is not at the loading position, the plate member 371A contacts the stopper pin 373 due to the force of the elastic member 372. When the first table 51A moves to the loading position, the pinion 31A overcomes the force of the elastic member 372 and presses the gear 343, and the gear 343 meshes with the pinion 31A.

[0204] By using a plurality of gears 341 , 342 , and 343 as in the present modification, the distance between the rails 33 c and 33 d and the holding portion 52 can be increased, or the pinion 31A can be brought closer to the holding portion 52 .

[0205] The embodiments of the present invention are described in detail with reference to the accompanying drawings, but the specific structure is not limited to the embodiments, and design changes within the scope of the gist of the invention are also included. Those skilled in the art can appropriately change, add, convert, etc., each element of the embodiments.

[0206] In addition, in the present invention, "approximately" refers to a concept that includes not only strictly identical situations, but also errors or deformations of a degree that does not lose the identity. For example, roughly horizontal is not limited to strictly horizontal situations, for example, it is a concept that includes errors of several degrees. In addition, for example, in the case of only being parallel, orthogonal, etc., it includes not only strictly parallel, orthogonal, etc., but also roughly parallel, roughly orthogonal, etc. In addition, in the present invention, "near" refers to an area that includes a certain range (which can be determined arbitrarily) near a position that serves as a reference. For example, in the case of the vicinity of A, it is a concept that represents an area of ​​a certain range near A, which may or may not include A.

[0207] Description of reference numerals:

[0208] 1.1A, 1B, 1C: Inspection device

[0209] 2.2A: Loading device

[0210] 3.3A, 3B, 3C: Handling device

[0211] 4: Keep the component

[0212] 10: Frame

[0213] 11: Front face

[0214] 11a: Opening

[0215] 12: Open and close doors

[0216] 13: Track

[0217] 14: Actuator

[0218] 21: Abutment

[0219] 21a: Hole

[0220] 22, 22a, 22b, 22c, 22d: columnar portion

[0221] 23: First moving part

[0222] 23a: Track

[0223] 23b: Mobile components

[0224] 23c: Actuator

[0225] 24, 24a, 24b, 24c, 24d: Second moving part

[0226] 24e, 24f: Actuator

[0227] 25, 25a, 25b, 25c, 25d: mounting portion

[0228] 26: Proximity sensor

[0229] 31, 31A: small gear

[0230] 31a: Rotation axis

[0231] 31b: Pinion body

[0232] 32, 32A, 32B: Roller

[0233] 32a: Rotation axis

[0234] 32b: Roller body

[0235] 33a, 33b, 33c, 33d: Tracks

[0236] 34, 34A: Gear

[0237] 34a: Rotation axis

[0238] 34b: Gear body

[0239] 35: Driving unit

[0240] 35a: Pulley

[0241] 35b: belt

[0242] 35c: Actuator

[0243] 36: Track

[0244] 37, 37A: Switching mechanism

[0245] 41, 41A: Main body

[0246] 41a: Loading surface

[0247] 41b: Front face

[0248] 41c, 41d: Side

[0249] 41e, 41g: vertical surface

[0250] 41f, 41h: Inclined surface

[0251] 41i: Concave

[0252] 41j: Mark

[0253] 41m: Central

[0254] 41n: Outer part

[0255] 42: Grip

[0256] 42a, 42b: Connecting part

[0257] 42c: Holding rod

[0258] 42d, 42e: Side

[0259] 42i: Concave

[0260] 43, 43a, 43b, 43c, 43d, 43e: hole

[0261] 44, 44a, 44b, 44c, 44d: rack

[0262] 45: Air hole

[0263] 45a, 45b: opening

[0264] 50: Inspection Department

[0265] 51, 51A: First workbench

[0266] 52: Maintaining Department

[0267] 52a, 52b: Track

[0268] 52c: abutment surface

[0269] 52d: Inclined surface

[0270] 53: Second workbench

[0271] 54, 56: belt

[0272] 55, 57: Track

[0273] 58: Air suction unit

[0274] 58a: Connector

[0275] 58b: Suction hose

[0276] 58c: Joint

[0277] 58d, 58e: cylindrical part

[0278] 58f: Elastic member

[0279] 58g: Threaded part

[0280] 58h: threaded hole

[0281] 59, 59a, 59b: Actuator

[0282] 61: Vibration elimination table

[0283] 62: Platform

[0284] 62b: Loading section

[0285] 63: Middle mask box

[0286] 63a: Base

[0287] 63b: Loading section

[0288] 63c: Cover

[0289] 70: Storage rack

[0290] 71: Frame

[0291] 72: Mask storage department

[0292] 72a: Base

[0293] 72b: Loading section

[0294] 72c, 73: Actuator

[0295] 80: Mask transport department

[0296] 81, 82: Arm

[0297] 83: Track

[0298] 84, 85, 86: Actuator

[0299] 141: Input and output devices

[0300] 142: Network

[0301] 143: Storage Media

[0302] 151: CPU

[0303] 151a: Control Department

[0304] 152: RAM

[0305] 153: ROM

[0306] 154: Input and output interface

[0307] 155: Communication interface

[0308] 156: Media interface

[0309] 241, 241a, 241b, 241c, 241d: Track

[0310] 242a, 242b, 242c, 242d: moving components

[0311] 243a, 243b, 243c, 243d: with

[0312] 244a, 244b, 244c, 244d: Pulley

[0313] 251, 252: Noodles

[0314] 253, 254: Noodles

[0315] 255: Concave

[0316] 256, 257: gap

[0317] 258: Angle

[0318] 341, 342, 343: Gear

[0319] 371, 371A: Plate-like member

[0320] 372: Elastic member

[0321] 373: Stop pin

[0322] 611: Base

[0323] 612: Frame

[0324] 612a: Hole

[0325] 613: Mobile components

[0326] 613a: Rod-shaped member

[0327] 613b, 613e: Positioning components

[0328] 613c: cone

[0329] 613d: plate-shaped part.

Claims

1. A conveying device for conveying a holding member having a loading plane for loading a plate-shaped object from a first position outside the frame to a second position inside the frame through an opening of the frame, characterized in that: The transport device comprises: A first track, a second track, a third track and a fourth track, which are arranged along a horizontal direction; Rollers, a plurality of which are respectively provided on the first track, the second track, the third track, and the fourth track; and One or more pinions are respectively provided on the first track, the second track, the third track and the fourth track, The first track and the third track are arranged outside the frame, and the second track and the fourth track are arranged inside the frame. The first rail and the second rail are arranged on a first straight line substantially parallel to a conveying direction of the holding member. The third track and the fourth track are arranged on a second straight line which is parallel to the first straight line and has the same height as the first straight line. The roller is disposed on a first rotation axis that is substantially orthogonal to the first straight line and the second straight line. The holding member is placed on the plurality of rollers. The holding member is provided with racks meshing with the pinion gear on two side surfaces substantially parallel to the conveying direction.

2. The transport device according to claim 1, characterized in that: The holding member comprises: a main body having the placement plane; and a gripping portion provided on the main body. When the holding member is located at the second position, the peripheral edge of the main body is inserted into the holding portion arranged at the second position. At least one of the pinions provided on the second rail and the fourth rail meshes with a first rack of the racks provided on the grip portion.

3. The transport device according to claim 2, characterized in that: The main body has two side surfaces adjacent to the mounting plane, namely a first side surface and a second side surface. The first side surface and the second side surface each have a first inclined surface inclined with respect to the vertical direction so that the width of the holding member becomes narrower toward the mounting plane and a vertical surface perpendicular to the mounting plane, The first inclined surface abuts against the second inclined surface of the holding portion, The rack has a second rack disposed on the vertical surface.

4. The transport device according to claim 3, characterized in that: The holding portion comprises: a rod-shaped holding rod extending substantially perpendicular to the first straight line and the second straight line; and a plate-shaped first connecting portion and a plate-shaped second connecting portion, which respectively connect both ends of the holding rod to the main body. The heights of the first connecting portion and the second connecting portion are higher than the height of the vertical plane. The first rack is provided on the entire end surface of the first connecting portion and the second connecting portion. The first rack and the second rack are located on the same plane.

5. The transport device according to any one of claims 2 to 4, characterized in that: The holding member has a front end surface facing the frame when the holding portion is located at the first position, The holding member has a contact surface with which the front end surface contacts. The abutting surface is provided with an air suction portion, the air suction portion having a connector and a suction hose connected to the connector, The holding member has an air hole, one end of which is open to the front end surface and the other end of which is open to the mounting plane. The connector has an engaging portion capable of engaging with the air hole, The engaging portion is movable along the conveying direction, The engaging portion engages with the air hole in a state where the front end surface is not in contact with the contact surface.

6. The transport device according to claim 1, characterized in that: The pinion gear is arranged on the second rotating shaft, A pulley is provided on the second rotating shaft. A first belt is wound around the pulleys provided on the first rail and the third rail. A second belt is wound around the pulleys provided on the second rail and the fourth rail.

7. The transport device according to claim 1, characterized in that: The first rail is provided so as to be movable in a direction perpendicular to the conveying direction.

8. The transport device according to claim 1, characterized in that: The central portion of the holding member including the mounting plane is formed of aluminum, and the outer portion of the holding member forming the rack is formed of iron or ceramic. An oxide film is formed on the surface of the central portion.

Images