Tail gas treatment device

Abstract

The invention provides a tail gas treatment device, and belongs to the technical field of semiconductor manufacturing. The tail gas treatment device comprises a tail gas treatment pipe, an annular groove is formed in the tail end of the tail gas treatment pipe, and the annular groove comprises a plurality of through holes which are formed in the radial direction of the tail gas treatment pipe and penetrate through a pipe body of the tail gas treatment pipe; the scraper comprises a power source, a push-pull rod and a scraping head, the first end of the push-pull rod is connected with the power source, the second end of the push-pull rod penetrates into the tail gas treatment pipe and is contained in the tail gas treatment pipe, the second end of the push-pull rod is connected with the scraping head, and the power source drives the push-pull rod to reciprocate in the tail gas treatment pipe so as to drive the scraping head to reciprocate in the tail gas treatment pipe; solid particles adhered to the inner wall of the tail gas treatment pipe are removed; the first gas source is used for introducing gas into the through hole, and when the scraping head moves to the tail end of the tail gas treatment pipe, gas flow formed by the gas is used for blowing away solid particles accumulated at the bottom of the scraping head. The silicide particles at the bottom of the scraper can be safely removed.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to an exhaust gas treatment device. Background Art

[0002] Wet scrubbers are widely used in epitaxial (EPI) systems to treat tail gas from epitaxial reactors, such as TCS (trichlorosilane), HCl (hydrogen chloride) and H2. The principle of wet scrubbers is to dissolve HCl (easily soluble) and TCS (slightly soluble) in the tail gas of epitaxial reactors in water by washing with water. The tail gas of the epitaxial reactor flows downward from the pumping line into the wet scrubber, first passes through the X-shaped tube, and is washed with water for the first time at the bottom of the X-shaped tube. The HCl gas in the tail gas is diluted by water, but TCS gas is almost insoluble in water. Instead, it reacts with O2 to produce SiO2 solid particles that adhere to the inner wall of the pipe. If it is not cleaned for a long time, the cross-sectional area of ​​the pipe will gradually decrease, causing gas disorder and pressure fluctuations. It will also produce particles that pollute the environment of the epitaxial reactor chamber. Therefore, a device for cleaning SiO2 solid particles in the pipe is needed - a scraper. The scraper consists of a cylinder, a push-pull rod, and a scraper head. Driven by N2, the push-pull rod can push the scraper head downward. The scraper is located at the bottom of the X-shaped tube, one on each side. Using N2 as the driving gas, a fixed cycle motion can be set, or it can be manually opened to scrape off the SiO2 solids adhering to the inner wall of the pipe.

[0003] The scraper is in the TCS airflow and contaminated pipeline. As the use time increases, a large amount of SiO2 solids will adhere to the bottom of the scraper head, like an inverted stalactite. The volume is related to the use time and TCS flow rate. The SiO2 solids on the scraper head need to be cleaned regularly, otherwise it is very easy to generate particles, which will reduce the quality of the produced silicon wafers. At present, the common method of cleaning the SiO2 solids accumulated on the scraper is to disassemble the X-tube and scraper, and then clean it manually, but this method has the disadvantages of low efficiency, low safety (SiO2 solids are flammable), time-consuming and labor-intensive. Summary of the invention

[0004] The invention provides a tail gas treatment device capable of safely removing silicide particles at the bottom of a scraper.

[0005] In order to achieve the above object, the technical solution adopted in the embodiment of the present invention is:

[0006] An exhaust gas treatment device, comprising:

[0007] An exhaust gas treatment pipe, wherein an annular groove is provided at the end of the exhaust gas treatment pipe, and the annular groove includes a plurality of through holes which are arranged along the radial direction of the exhaust gas treatment pipe and penetrate the pipe body of the exhaust gas treatment pipe;

[0008] The scraper comprises a power source, a push-pull rod and a scraper head, wherein the first end of the push-pull rod is connected to the power source, the second end of the push-pull rod penetrates the exhaust gas treatment pipe and is accommodated in the exhaust gas treatment pipe, the second end of the push-pull rod is connected to the scraper head, the power source drives the push-pull rod to reciprocate in the exhaust gas treatment pipe, and then drives the scraper head to reciprocate in the exhaust gas treatment pipe to remove solid particles adhered to the inner wall of the exhaust gas treatment pipe;

[0009] The first gas source is used to introduce gas into the through hole, and when the scraper head moves to the end of the exhaust gas treatment pipe, the airflow formed by the gas is used to blow away the solid particles accumulated at the bottom of the scraper head.

[0010] In some embodiments, the annular groove includes 12-15 through holes.

[0011] In some embodiments, the size of the through hole becomes smaller and smaller along the direction from the outer wall to the inner wall of the exhaust gas treatment pipe.

[0012] In some embodiments, the power source includes:

[0013] a first pipeline in communication with the first end of the push-pull rod;

[0014] A second gas source is used to introduce gas into the first pipeline, and the gas in the first pipeline forms an airflow to push the push-pull rod to reciprocate in the exhaust gas treatment pipe.

[0015] In some embodiments, the exhaust gas treatment device further comprises:

[0016] The sealing ring is used to seal the annular groove, a gas channel is formed between the sealing ring and the annular groove, and an air inlet is arranged on the sealing ring.

[0017] In some embodiments, the exhaust gas treatment device further comprises:

[0018] A second pipeline is connected between the first gas source and the gas inlet.

[0019] In some embodiments, the first gas source is reused as the second gas source, and the first pipeline is connected to the second pipeline.

[0020] In some embodiments, the exhaust gas treatment device further comprises:

[0021] A main pipeline connected to the first gas source, one end of which is provided with a three-way joint, and the first pipeline and the second pipeline are respectively connected to the three-way joint.

[0022] In some embodiments, the scraper head is made of polytetrafluoroethylene.

[0023] In some embodiments, the gas used by the first gas source is nitrogen.

[0024] The beneficial effects of the present invention are:

[0025] In this embodiment, the power source drives the push-pull rod to reciprocate in the exhaust gas treatment pipe, and then drives the scraper head to reciprocate in the exhaust gas treatment pipe to remove the solid particles adhered to the inner wall of the exhaust gas treatment pipe; the first gas source introduces gas into the through hole, so that when the scraper head moves to the end of the exhaust gas treatment pipe, the airflow formed by the gas can be used to blow away the solid particles accumulated at the bottom of the scraper head, thereby cleaning the scraper head. In this embodiment, the solid particles accumulated at the bottom of the scraper can be removed without disassembling the X-tube and the scraper, which can save equipment maintenance time, extend the equipment maintenance cycle, and improve production efficiency; in addition, SiO2 solid particles are flammable when exposed to the air, especially when a strong collision occurs, which is more likely to burn. Once improper operation by personnel may cause safety accidents, this embodiment uses airflow to automatically remove solid particles at the bottom of the scraper, without the operator contacting the SiO2 solid particles, eliminating safety hazards and improving operational safety; this embodiment can automatically remove SiO2 solid particles at the bottom of the scraper regularly, which can reduce the waste of human resources in the equipment maintenance link and relieve the pressure of tight human resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A schematic diagram showing a scraper in an embodiment of the present disclosure when not in operation;

[0027] Figure 2 A schematic diagram showing the scraper of the embodiment of the present disclosure when working;

[0028] Figure 3 A schematic cross-sectional view showing the end of an X-shaped tube according to an embodiment of the present disclosure;

[0029] Figure 4 A schematic diagram showing the position of a newly added tee in an embodiment of the present disclosure;

[0030] Figure 5 A schematic diagram showing the airflow at the end of the X-shaped tube according to an embodiment of the present disclosure.

[0031] Reference numerals

[0032] 10 Exhaust gas treatment pipe

[0033] 1 scraper

[0034] 11. Shaving

[0035] 12 Push-pull rod

[0036] 2SiO2 solid particles

[0037] 3 Quick-connect fittings

[0038] 41 First pipeline

[0039] 42 Second pipeline

[0040] 43 Main pipeline

[0041] 44 Tee Connector

[0042] 5 Annular groove

[0043] 51 Through Holes DETAILED DESCRIPTION

[0044] In order to make the purpose, technical solution and advantages of the embodiment of the present invention clearer, the technical solution of the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings of the embodiment of the present invention. Obviously, the described embodiment is a part of the embodiment of the present invention, not all of the embodiments. Based on the described embodiment of the present invention, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the present invention.

[0045] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0046] In the related art, the common method for cleaning the SiO2 solid particles 2 accumulated on the scraper 1 is to disassemble the X-shaped tube and the scraper 1, and then manually clean it for equipment maintenance. The steps of dismantling, cleaning, and installation take a lot of time, affecting the production progress, resulting in a long equipment maintenance time and a long equipment maintenance cycle. In addition, the SiO2 solid particles 2 are flammable when exposed to the air, especially when a strong collision occurs, which may cause safety accidents if the personnel operate improperly.

[0047] The invention provides a tail gas treatment device capable of safely removing silicide particles at the bottom of a scraper.

[0048] The embodiment of the present invention provides a tail gas treatment device, such as Figure 1-Figure 5 As shown, including:

[0049] An exhaust gas treatment pipe 10, wherein an annular groove 5 is provided at the end of the exhaust gas treatment pipe 10, and the annular groove 5 includes a plurality of through holes 51 which are arranged along the radial direction of the exhaust gas treatment pipe 10 and penetrate the pipe body of the exhaust gas treatment pipe 10;

[0050] The scraper 1 comprises a power source, a push-pull rod 12 and a scraper head 11, wherein the first end of the push-pull rod 12 is connected to the power source, the second end of the push-pull rod 12 penetrates into the exhaust gas treatment pipe 10 and is received in the exhaust gas treatment pipe 10, the second end of the push-pull rod 12 is connected to the scraper head 11, the power source drives the push-pull rod 12 to reciprocate in the exhaust gas treatment pipe 10, and then drives the scraper head 11 to reciprocate in the exhaust gas treatment pipe 10, so as to remove the solid particles 2 adhered to the inner wall of the exhaust gas treatment pipe 10;

[0051] The first gas source is used to introduce gas into the through hole 51, and when the scraper head 11 moves to the end of the exhaust gas treatment pipe 10, the airflow formed by the gas is used to blow away the solid particles accumulated at the bottom of the scraper head 11, such as SiO2 solid particles 2.

[0052] In this embodiment, the power source drives the push-pull rod 12 to reciprocate in the exhaust gas treatment pipe 10, and then drives the scraper head 11 to reciprocate in the exhaust gas treatment pipe 10 to remove the solid particles 2 adhered to the inner wall of the exhaust gas treatment pipe 10; the first gas source introduces gas into the through hole 51, so that when the scraper head 11 moves to the end of the exhaust gas treatment pipe 10, the airflow formed by the gas can be used to blow away the SiO2 solid particles 2 accumulated at the bottom of the scraper head 11, thereby cleaning the scraper head 11. In this embodiment, the solid particles 2 accumulated at the bottom of the scraper 1 can be removed without disassembling the X-tube and the scraper 1, which can save equipment maintenance time, extend the equipment maintenance cycle, and improve production efficiency; in addition, the SiO2 solid particles 2 are flammable when exposed to the air, especially when a strong collision occurs, which may cause safety accidents if the personnel operate improperly. In this embodiment, the airflow is used to automatically remove the solid particles 2 at the bottom of the scraper 1, and there is no need for the operator to contact the SiO2 solid particles 2, thereby eliminating safety hazards and improving operational safety; in this embodiment, the SiO2 solid particles 2 at the bottom of the scraper 1 can be automatically removed regularly, which can reduce the waste of human resources in the equipment maintenance link and alleviate the pressure of tight human resources.

[0053] In some embodiments, the material of the scraper head 11 includes but is not limited to polytetrafluoroethylene, and the push-pull rod 12 can be a metal rod.

[0054] In this embodiment, the tail gas treatment pipe 10 can be as follows Figure 1 and Figure 2 The tail gas of the epitaxial reactor flows downward from the pumping pipe into the wet scrubber, first passes through the X-shaped pipe, and is washed with water for the first time at the bottom of the X-shaped pipe. The HCl gas in the tail gas is diluted by water, but the TCS gas is almost insoluble in water, and instead reacts with O2 to generate SiO2 solid particles 2 that adhere to the inner wall of the pipe. A scraper 1 is arranged in the X-shaped pipe, and the scraper 1 can reciprocate in the tail gas treatment pipe 10 to clean the SiO2 solid particles 2 on the inner wall of the pipe.

[0055] In this embodiment, gas such as nitrogen (N2) can be used as a power source for cleaning the SiO2 solid particles 2 accumulated at the bottom of the cleaning blade 1.

[0056] In some embodiments, Figure 2 As shown, the power source includes:

[0057] A first pipeline 41 connected to the first end of the push-pull rod 12;

[0058] A second gas source is introduced into the first pipeline 41 , and the gas in the first pipeline 41 forms an airflow to push the push-pull rod 12 to reciprocate in the exhaust gas treatment pipe 10 .

[0059] In this embodiment, an annular groove 5 is processed on the outer side of the end of the X-shaped tube, and multiple through holes 51 are processed in the annular groove 5 along the radial direction of the bottom of the X-shaped tube. The number of through holes 51 can be set according to the cleaning requirements. The more through holes 51 there are, the better the cleaning effect of the scraper head 11 is, but at the same time, the requirements for the processing capacity of the X-shaped tube are higher. In this embodiment, the annular groove 5 can include 12-15 through holes 51, such as 12, 13, 14 or 15 through holes 51. In a specific example, Figure 3 As shown, the annular groove 5 includes 15 through holes 51 .

[0060] In some embodiments, Figure 3 As shown, along the direction from the outer wall to the inner wall of the exhaust gas treatment pipe 10, the size of the through hole 51 becomes smaller and smaller, that is, the cross-sectional area of ​​the through hole 51 becomes smaller and smaller, and the axial section presents a trapezoidal shape. When the same fluid passes through different pipelines, it has a higher speed and greater kinetic energy when passing through a smaller cross-sectional area. Therefore, in this embodiment, along the flow direction of the gas, the size of the through hole 51 is set to be smaller and smaller, so that a larger blowing force can be formed by a smaller gas flow rate.

[0061] In some embodiments, the exhaust gas treatment device further comprises:

[0062] The sealing ring is used to seal the annular groove 5, and a gas channel is formed between the sealing ring and the annular groove 5. The sealing ring is provided with an air inlet. In this embodiment, the sealing ring can be made of the same material as the exhaust gas treatment pipe 10, such as Figure 1 As shown, a quick-connect connector 3 can be installed at the gas inlet for connecting a gas pipeline.

[0063] In some embodiments, Figure 2 As shown, the exhaust gas treatment device also includes:

[0064] The second pipeline 42 connecting the first gas source and the gas inlet can pass the gas provided by the first gas source into the above-mentioned gas channel through the second pipeline 42, and form an airflow through the through hole 51 to blow away the SiO2 solid particles 2 accumulated at the bottom of the scraper head 11.

[0065] In order to simplify the structure of the exhaust gas treatment device, in some embodiments, the first gas source can be reused as the second gas source, and the first pipeline 41 is connected to the second pipeline 42. The gas provided by the first gas source, on the one hand, serves as power to drive the scraper head 11 to reciprocate in the exhaust gas treatment pipe 10, and on the other hand, can also introduce airflow into the through hole 51 to blow away the SiO2 solid particles 2 accumulated at the bottom of the scraper head 11.

[0066] like Figure 2As shown, a main pipeline 43 may be provided at the gas outlet of the first gas source, a three-way connector 44 is provided at one end of the main pipeline 43, and the first pipeline 41 and the second pipeline 42 are respectively connected to the three-way connector 44.

[0067] In some embodiments, the gas used in the first gas source is nitrogen. The first gas source can be Figure 4 The automatic control box shown in the figure is provided with an original tee at the gas outlet of the automatic control box, which divides the gas of the automatic control box into two routes to supply two scrapers 1 as power sources respectively; in addition, a new tee and a new nitrogen branch are added to provide airflow to clean the scraper head 11.

[0068] When the exhaust gas treatment device of this embodiment is working, a stream of N2 from the automatic control box enters the main pipeline 43, and the gas in the main pipeline 43 is divided into the first pipeline 41 and the second pipeline 42 through the three-way. A part of the gas enters the cylinder of the scraper 1 through the first pipeline 41 to drive the push-pull rod 12 and the scraper head 11 to move downward to clean the SiO2 solid particles 2 on the inner wall of the pipeline; the other part of the gas enters the annular groove 5 through the second pipeline 42 and the quick-connect connector 3, and moves along the annular groove 5 and each through hole 51 to form a radial N2 gas flow (such as Figure 5 As shown), the SiO2 solid particles 2 accumulated at the scraper head 11 are cleaned.

[0069] The N2 flow rate of the automatic control box is adjustable. In order not to weaken the power driving the push-pull rod 12 and the scraper head 11 to move downward, the N2 flow rate of the automatic control box can be appropriately increased after the second pipeline 42 is added. Because the travel of the push-pull rod 12 and the scraper head 11 is short, the time difference between the scraper head 11 reaching the end of the X-shaped tube and the formation of the radial N2 flow at the end of the X-shaped tube can be ignored, and can be regarded as two actions performed simultaneously. When the scraper head 11 reaches the end of the X-shaped tube, as shown in FIG. Figure 5 As shown, the N2 in the second pipeline 42 enters the through hole 51, forming an airflow that can just blow away the SiO2 solid particles 2 accumulated at the bottom of the scraper head 11, and the blown-away SiO2 solid particles 2 fall into the water tank and are discharged with the wastewater. When the push-pull rod 12 and the scraper head 11 return to their original positions, the N2 airflow at the bottom of the X-shaped tube also disappears.

[0070] In this embodiment, the solid particles at the bottom of the scraper can be automatically removed by airflow without disassembling the X-tube and the scraper, and the operator does not need to come into contact with the SiO2 solid particles, thereby eliminating safety hazards and improving operational safety. In addition, in this embodiment, the SiO2 solid particles at the bottom of the scraper can be automatically removed periodically to avoid excessive SiO2 solid particles adhering to the inner wall of the pipe.

[0071] There are a few points to note:

[0072] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure, and other structures may refer to the general design.

[0073] (2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced, that is, these drawings are not drawn according to the actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or there may be intermediate elements.

[0074] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0075] It should be noted that each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the embodiments, since they are basically similar to the product embodiments, the description is relatively simple, and the relevant parts can be referred to the partial description of the product embodiments.

[0076] The above is a preferred embodiment of the present disclosure. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles described in the present disclosure. These improvements and modifications should also be regarded as the scope of protection of the present disclosure.

Claims

1. A tail gas treatment device, characterized in that: include: An exhaust gas treatment pipe, wherein an annular groove is provided at the end of the exhaust gas treatment pipe, and the annular groove includes a plurality of through holes which are arranged along the radial direction of the exhaust gas treatment pipe and penetrate the pipe body of the exhaust gas treatment pipe; The scraper comprises a power source, a push-pull rod and a scraper head, wherein the first end of the push-pull rod is connected to the power source, the second end of the push-pull rod penetrates the exhaust gas treatment pipe and is accommodated in the exhaust gas treatment pipe, the second end of the push-pull rod is connected to the scraper head, the power source drives the push-pull rod to reciprocate in the exhaust gas treatment pipe, and then drives the scraper head to reciprocate in the exhaust gas treatment pipe to remove solid particles adhered to the inner wall of the exhaust gas treatment pipe; The first gas source is used to introduce gas into the through hole, and when the scraper head moves to the end of the exhaust gas treatment pipe, the airflow formed by the gas is used to blow away the solid particles accumulated at the bottom of the scraper head.

2. The exhaust gas treatment device according to claim 1, characterized in that: The annular groove includes 12-15 through holes.

3. The exhaust gas treatment device according to claim 1, characterized in that: Along the direction from the outer wall to the inner wall of the exhaust gas treatment pipe, the size of the through hole becomes smaller and smaller.

4. The exhaust gas treatment device according to claim 1, characterized in that: The power source comprises: a first pipeline in communication with the first end of the push-pull rod; A second gas source is used to introduce gas into the first pipeline, and the gas in the first pipeline forms an airflow to push the push-pull rod to reciprocate in the exhaust gas treatment pipe.

5. The exhaust gas treatment device according to claim 4, characterized in that: The tail gas treatment device further comprises: The sealing ring is used to seal the annular groove, a gas channel is formed between the sealing ring and the annular groove, and an air inlet is arranged on the sealing ring.

6. The exhaust gas treatment device according to claim 5, characterized in that: The tail gas treatment device further comprises: A second pipeline is connected between the first gas source and the gas inlet.

7. The exhaust gas treatment device according to claim 6, characterized in that: The first gas source is reused as the second gas source, and the first pipeline is connected to the second pipeline.

8. The exhaust gas treatment device according to claim 7, characterized in that: The tail gas treatment device further comprises: A main pipeline connected to the first gas source, one end of which is provided with a three-way joint, and the first pipeline and the second pipeline are respectively connected to the three-way joint.

9. The exhaust gas treatment device according to claim 1, characterized in that: The material of the scraper head includes polytetrafluoroethylene.

10. The exhaust gas treatment device according to claim 1, characterized in that: The gas used by the first gas source is nitrogen.

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