Sealing device for wafer conveying and conveying system for wafer conveying

Abstract

The invention discloses a sealing device for wafer transfer, which is used for transferring a wafer between two cavities, the two cavities are communicated, a part of a first cavity deviating from a second cavity comprises a bottom side wall, the bottom side wall is provided with a lower through hole, and the sealing device comprises a fixing part which is fixedly connected to the bottom side wall and seals the lower through hole; the mobile platform is used for loading a wafer, the peripheral side of the mobile platform is provided with a sealing element, the sealing element approaches and seals the first opening at the sealing position, and the sealing element is far away from the first opening at the opening position, so that the first chamber is communicated with the second chamber; and the first vacuum assembly comprises a vacuum pump and a flexible connecting pipe, and the flexible connecting pipe is arranged between the fixed part and the movable platform and communicates with the vacuum pump and the second cavity so as to be used for vacuumizing the second cavity. According to the sealing device disclosed by the invention, the movable platform which can move relative to the fixed part is arranged and is flexibly communicated with the second chamber and the vacuum pump, so that the wafer storage chamber can be vacuumized while the wafer is transferred to realize air pressure balance.

Description

Technical Field

[0001] The present disclosure generally relates to the field of semiconductor processing technology. More specifically, the present disclosure relates to a sealing device for wafer transfer and a transfer system for wafer transfer. Background Art

[0002] In the field of semiconductor processing, processing equipment often needs to transfer wafers from the atmospheric environment into a vacuum chamber, and a transition chamber is generally required in this process. For such situations, the general implementation method is to add a transition chamber connected to the main chamber on the side of the main chamber of the semiconductor equipment. After the wafer is transferred from the front-end equipment to this transition chamber, the transition chamber forms an independent space, and the chamber is evacuated by a vacuum pump. After evacuation, the mechanism in the main chamber transfers the wafer to the main chamber. In this process, a special vacuum manipulator is often required to take the wafer from the transition chamber to the main chamber for processing or testing. This setting requires a large space and introduces more parts, so the sealing and maintainability are poor.

[0003] In view of this, there is an urgent need to provide a sealing device for wafer transmission so as to make the structure of the wafer transfer equipment more compact. Summary of the invention

[0004] In order to at least solve one or more of the technical problems mentioned above, the present disclosure proposes a sealing device for wafer transfer and a transfer system for wafer transfer in multiple aspects.

[0005] In a first aspect, the present disclosure provides a sealing device for wafer transfer, which is used to transfer wafers between a first vacuum chamber and a second vacuum chamber, wherein the first chamber and the second chamber are connected through a first opening, and a portion of the first chamber away from the second chamber includes a bottom side wall, and a lower through hole opened downward is provided on the bottom side wall, and the sealing device includes: a fixed portion, which has a plate-shaped body, the fixed portion is fixedly connected to the bottom side wall of the first chamber from bottom to top, and seals the lower through hole; a moving platform, which has a plate-shaped body, the moving platform is arranged on the vertical upper side of the fixed portion, and is used to move between a sealing position and an open position relative to the first opening, the wafer is loaded on the upper side of the moving platform, and a sealing member is further arranged on the outer peripheral side of the moving platform, when in the sealing position, the sealing member approaches and seals the first opening, and when in the open position, the sealing member is away from the first opening, so that the first chamber and the second chamber are connected; a first vacuum component, which includes a vacuum pump fixedly connected to the fixed portion, and a flexible connecting pipe, the flexible connecting pipe is arranged between the fixed portion and the moving platform, and connects the vacuum pump and the second chamber for evacuating the second chamber.

[0006] In some embodiments, a sealing plate movable relative to the moving platform is further included, wherein a second through hole extending longitudinally is provided on the moving platform, and the first vacuum component is connected to the first chamber through the second through hole. The sealing plate is used to move between a closing position and a suction position relative to the second through hole, and the second through hole is sealed when the sealing plate moves to the closing position, and the second through hole is opened when the sealing plate moves to the suction position.

[0007] In some embodiments, a sealing drive assembly is also included, which includes a sealing drive unit and a sealing transmission unit. The sealing drive unit includes a driving body fixedly connected to the frame, and a driving output member for moving relative to the driving body. One end of the sealing transmission unit is fixedly connected to the sealing plate, and the other end is fixedly connected to the driving output member. The sealing drive unit can drive the sealing transmission unit to drive the sealing plate to move in a vertical direction.

[0008] In some embodiments, the sealing transmission part of the sealing drive assembly also includes at least two elongated intermediate support members, the circumferential side of the sealing plate includes two oppositely arranged mounting protrusions, one end of the intermediate support member passes through the fixed part and the movable platform to be fixedly connected to the mounting protrusion of the sealing plate, and the other end of the intermediate support member is fixedly connected to the movable part of the sealing drive part.

[0009] In some embodiments, the sealing drive part of the sealing drive assembly includes at least two sealing drive mechanisms, and the sealing transmission part of the sealing drive assembly also includes an intermediate platform. The fixed end of each sealing drive mechanism is fixedly set on the frame, and the movable end of each sealing drive mechanism is fixedly connected to the intermediate platform, and the intermediate platform is arranged parallel to the movable platform.

[0010] In some embodiments, an avoidance groove is provided on the sealing plate, and a carrying plate is also fixedly provided on the mobile platform. A fixed bracket is provided between the carrying plate and the upper surface of the mobile platform to define an active space between the carrying plate and the surface of the mobile platform. The sealing plate is used to move in the active space and open or close the second through hole. When the sealing plate moves away from the second through hole, the avoidance groove on the sealing plate at least partially accommodates the carrying plate.

[0011] In some embodiments, a mobile driving assembly is also included, which includes a mobile driving part and a mobile transmission part. The mobile driving part includes a driving body fixedly connected to the frame, and a driving movable part for moving relative to the driving body. One end of the mobile transmission part is fixedly connected to the mobile platform, and the other end is fixedly connected to the driving movable part. The mobile driving part is used to drive the mobile transmission part to drive the mobile platform to move in a vertical direction.

[0012] In some embodiments, the mobile transmission part of the mobile drive assembly also includes a relay platform and a relay support member fixedly connected to each other, the relay platform includes a disc-shaped main body, the relay support member is an elongated strip, and three relay supports are arranged on an axial end face of the relay platform, each relay support member passes through the fixed part and is fixedly connected to the mobile platform.

[0013] In some embodiments, a second vacuum component and a second sealing drive component are also included. The second vacuum component is used to evacuate the second chamber, and the second sealing drive component is used to drive the second sealing plate to move. A third through hole is also provided on the movable platform. The second vacuum component is used to communicate with the third through hole, and the second sealing plate is used to seal or open the third through hole.

[0014] In a second aspect, the present disclosure provides a conveying system for wafer conveying, comprising: a frame, the frame comprising a first chamber and a second chamber; and a sealing device according to the first aspect and multiple embodiments, which is connected to the frame for transferring the wafer between the first vacuum chamber and the second vacuum chamber.

[0015] Through the sealing device for wafer transfer provided as above, the disclosed embodiment sets a movable platform that is movable relative to the fixed part, and flexibly connects the first vacuum component to the second chamber and the vacuum pump by means of a flexible connecting pipe, so that the wafer storage chamber can be evacuated to achieve air pressure balance while the wafer is transferred, and its structure is compact, reliable and has good sealing. Further, in some embodiments, by setting a sealing plate to control the opening and closing of the first vacuum component, the device can be further made more compact, with better controllability and simpler debugging. Furthermore, in some embodiments, by setting a carrier plate that is spaced apart from the surface of the mobile platform for the movement of the sealing plate, the structure of the wafer transfer equipment can be made more compact, reducing the time and power consumption required for vacuuming. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] By reading the detailed description below with reference to the accompanying drawings, the above and other objects, features and advantages of the exemplary embodiments of the present disclosure will become readily understood. In the accompanying drawings, several embodiments of the present disclosure are shown in an exemplary and non-limiting manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein:

[0017] Figure 1 A three-dimensional schematic diagram showing a sealing device for wafer transfer according to some embodiments of the present disclosure;

[0018] Figure 2 A schematic cross-sectional view of a sealing device for wafer transfer according to some embodiments of the present disclosure is shown;

[0019] Figure 3An exploded schematic diagram showing a sealing device for wafer transfer according to some embodiments of the present disclosure is shown;

[0020] Figure 4 A perspective schematic diagram of a conveying system for wafer conveying according to some embodiments of the present disclosure is shown. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present disclosure.

[0022] It should be understood that the terms "include" and "comprising" used in the specification and claims of the present disclosure indicate the presence of described features, integers, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or collections thereof.

[0023] It should also be understood that the terms used in this disclosure are only for the purpose of describing specific embodiments and are not intended to limit the disclosure. As used in this disclosure and claims, the singular forms of "a", "an", and "the" are intended to include the plural forms unless the context clearly indicates otherwise. It should also be further understood that the term "and / or" used in this disclosure and claims refers to any combination of one or more of the associated listed items and all possible combinations, including these combinations.

[0024] As used in this specification and claims, the term "if" may be interpreted as "when" or "upon" or "in response to determining" or "in response to detecting," depending on the context. Similarly, the phrase "if it is determined" or "if [described condition or event] is detected" may be interpreted as meaning "upon determination" or "in response to determining" or "upon detection of [described condition or event]" or "in response to detecting [described condition or event]," depending on the context.

[0025] The specific implementation of the present disclosure is described in detail below with reference to the accompanying drawings.

[0026] The disclosed embodiment provides a sealing device for wafer transfer, which seals a first chamber relative to a second chamber by a moving platform, and can achieve pressure balance between the two chambers while transferring the wafer.

[0027] See also Figure 1 and Figure 2 , Figure 1 A three-dimensional schematic diagram of a sealing device for wafer transfer according to some embodiments of the present disclosure is shown. Figure 2 A schematic cross-sectional view of a sealing device for wafer transfer in some embodiments of the present disclosure is shown. In some embodiments, a sealing device 100 for wafer transfer can be installed on a frame such as a wafer processing device or a wafer transfer device. The frame can include, for example, a first chamber 10 and a second chamber 20, and the first chamber 10 and the second chamber 20 are connected through a first opening 11. In this embodiment, the sealing device can include, for example, a fixing portion 30 and a moving platform 40. The fixing portion 30 can be roughly plate-shaped, fixedly connected to the bottom side wall 19 of the first chamber 10 in the direction away from the second chamber 20, and the bottom side wall 19 is provided with a lower through hole 191 that opens downward in a vertical direction. The moving platform 40 can also be plate-shaped, and a sealing member is provided on its outer peripheral side. The moving platform 30 can move between a sealing position and an open position relative to the first opening 11 to transfer the wafer 90 between the first chamber 10 and the second chamber 20. In the sealing position, the seal of the mobile platform approaches and seals the first opening, and in the open position, the seal moves away from the first opening, so that the first chamber is connected to the second chamber. At the same time, the mobile platform 40 can also be used to seal the first chamber 10 relative to the second chamber 20. In this embodiment, the sealing device also includes a first vacuum component, which includes a vacuum pump 50 and a flexible connecting pipe 60. The flexible connecting pipe 60 can be arranged between the mobile platform 40 and the fixed part 30, and connects the vacuum pump 50 and the second chamber 20 to evacuate the second chamber 20.

[0028] Specifically, in some embodiments, the interior of the frame can be formed to include a first chamber 10 and a second chamber 20 stacked in the vertical direction, the second chamber 20 is arranged on the upper side of the first chamber 10, and the outer periphery of the first opening 11 where the first chamber 10 and the second chamber 20 communicate with each other forms a step surface 13 downward in the vertical direction. The vertical lower side of the first chamber 10 can be closed by a fixing portion 30, which can be, for example, roughly plate-shaped, and fixedly connected to the bottom side wall 19 of the first chamber 10 from bottom to top by bolt connection or the like, so that the outer periphery of the upper surface of the fixing portion 30 is in contact with the lower bottom surface of the center position of the bottom side wall 19. At the same time, the outer periphery of the upper surface of the fixing portion 30 can also be provided with a first sealing member 35, for example, so that the first sealing member 45 surrounds the outer periphery of the lower through hole 191 when contacting the lower bottom surface of the bottom side wall 19 to enhance the sealing effect. A movable platform 40 may also be provided at intervals on the vertical upper side of the fixed portion 30. The movable platform 40 may be, for example, roughly plate-shaped and provided in the first chamber 10 and the second chamber 20 in parallel with the fixed portion 30. The projection area of ​​the movable platform 40 in the vertical direction is larger than the area of ​​the first opening 11. When the movable platform 40 moves to abut against the step surface 13 at the first opening 11, the outer periphery of the movable platform 40 may completely cover the first opening 11 at the contact portion for sealing. At the same time, a second sealing member 45 may be provided at the contact portion of the outer periphery of the upper surface of the movable platform 40 to enhance the sealing effect when it contacts the step surface 13. In addition, a first through hole 31 penetrating the fixed portion 30 in the vertical direction is provided at the central portion of the fixed portion 30. Similarly, a second through hole 411 penetrating the movable platform 40 in the vertical direction is provided at the central portion of the movable platform 40. In this embodiment, the first vacuum assembly may include a vacuum pump 50 and a flexible connecting pipe 60. The vacuum pump 50 may be fixedly arranged on the vertical lower side of the fixed part 30, and the air suction port of the vacuum pump 50 may be connected to the first through hole 31 of the fixed part 30. The flexible connecting pipe 60 may be roughly in the shape of a circular tube, and its axis may be arranged in the vertical direction, so that the first end of the flexible connecting pipe 60 is fixedly connected to the fixed part 30, and the second end of the flexible connecting pipe 60 is fixedly connected to the mobile platform 40. The two ends of the flexible connecting pipe 60 may be airtightly connected to the mobile platform 40 and the fixed part 30, and the air suction port of the vacuum pump 50 may also be airtightly connected to the lower surface of the fixed part 30. The airtight connection may be, for example, by welding or bonding the two ends to be connected to be fixedly connected together without gaps, or by providing a sealing ring or other sealing member to make the two ends to be connected fit tightly. Through the above arrangement, with the help of the flexible connecting tube 60 and the vacuum pump 50, when the vacuum pump 50 of the first vacuum component is started, it can connect to the second chamber 20 through the channel composed of the first through hole 31, the inner cavity of the flexible connecting tube 60, and the second through hole 411, and evacuate the second chamber 20.

[0029] It can be understood by those skilled in the art that, although the above embodiments describe some solutions in which the fixing portion 30 is set as a plate-shaped part and fixed to the cavity wall of the first chamber 10 by bolts or the like, the present disclosure is not limited in this respect. For example, the fixing portion 30 can be set as a part of the bottom side wall 19 of the first chamber 10, that is, the bottom side of the first chamber 10 has a bottom wall formed integrally with the side cavity wall, and a through first through hole 31 and other mounting structures for fixing and connecting the first vacuum assembly and other mechanisms are formed on the bottom wall. In the case where the fixing portion 30 is directly set as a part of the cavity wall of the first chamber 10, the airtightness of the first chamber 10 can be further guaranteed, and the structural strength is higher. In addition, in some embodiments, the first chamber 10 and the second chamber 20 can be formed separately, that is, the first component includes the first chamber 10, and the second component includes the second chamber 20, and the first component and the second component are stacked and combined to make the first chamber 10 communicate with the second chamber 20. This arrangement can make the processing of the first chamber 10 and the second chamber 20 more convenient and the maintenance cost lower. Furthermore, although in some embodiments of the present disclosure, the first chamber 10 and the second chamber 20 are described as being stacked vertically, the present disclosure does not impose any limitation in this regard. For example, under the premise of ensuring stable transfer of the wafer, the first chamber 10 and the second chamber 20 can be arranged at a certain inclination angle, or stacked in a horizontal direction. The specific arrangement method can be determined according to the specific application scenario.

[0030] In some embodiments, in order to ensure air tightness and vacuuming efficiency, the vacuum pump 50, the first through hole 31, the flexible connecting tube 60 and the second through hole 411 should be overlapped as much as possible, and similar shapes and sizes should be selected. For example, when the suction port of the vacuum pump 50 is circular, the first through hole 31 and the second through hole 411 can also be set as circular holes with a diameter greater than or equal to the diameter of the suction port of the vacuum pump 50, and the cross-section of the flexible connecting tube 60 can also be a circle with an inner diameter equal to the first through hole 31 or the second through hole 411. At the same time, the axes of the suction port, the first through hole 31, the flexible connecting tube 60 and the second through hole 411 of the vacuum pump 50 coincide. When the shapes of the gas path connection parts are the same or similar, and the overlapping area is high, the suction efficiency of the vacuum pump 50 can act on the second chamber 20 to the maximum extent without causing pressure loss or air tightness reduction due to the obstruction of the channel shape.

[0031] In some embodiments, the vacuum pump 50 may be a molecular pump, which is particularly suitable for use in equipment that requires a high vacuum environment, such as wafer processing and transportation. At the same time, the flexible connecting tube 60 may be, for example, a bellows, which can be flexible and retractable in the axial direction by means of the foldable pleated side walls arranged in the axial direction, and its two ends may be fixedly connected to the fixed part 30 and the movable platform 40 by welding, bonding or flange connection. In some embodiments, the vacuum pump 50 may be directly fixedly connected to the lower surface of the fixed part 30, while in some other embodiments, an adapter may be provided between the vacuum pump 50 and the fixed part 30. For example, a shock absorber 51 may be provided between the vacuum pump 50 and the fixed part 30, and the shock absorber 51 is roughly annular with an axial opening in the middle, one axial end of which is connected to the air intake port of the vacuum pump 50, and the other end is connected to the lower surface of the fixed part 30, or another sealing connector 53. Since the motor of the vacuum pump 50 will vibrate strongly when it is started, and the vibration shielding performance is required to be high during wafer processing or transportation, the use of the shock absorber 51 can isolate the vibration transmission between the vacuum pump 50 and the fixing part 30, thereby significantly improving the stability of the equipment.

[0032] Also refer to Figure 3 , Figure 3The exploded schematic diagram of the sealing device for wafer transfer of some embodiments of the present disclosure is shown. In some embodiments, the sealing device also includes a sealing plate 51 and a sealing drive assembly, and the sealing plate 51 is used to approach or move away from the mobile platform. When the sealing plate 51 approaches the mobile platform, it is located in a sealing position, and the sealing plate 51 seals the second through hole 411 at the sealing position. When the sealing plate 51 moves away from the mobile platform, it is located in a suction position, and the sealing plate 51 releases the seal of the second through hole 411 at the suction position. Thus, by moving the sealing plate 51, the second through hole 411 can be opened or closed relative to the second chamber 20, and the sealing drive assembly is used to drive the sealing plate 51 to move relative to the mobile platform 40. The sealing plate 51 can be roughly circular plate-shaped, and it includes mounting protrusions 511 relatively arranged on both sides of its horizontal surface, and the mounting protrusions 511 are used to be fixedly connected with the intermediate support 56 of the sealing drive assembly. The upper side of the mobile platform 40 may be provided with a receiving groove 401 corresponding to the shape of the sealing plate 51, and the receiving groove 401 is used to accommodate the sealing plate 51 to move in the vertical direction therein to cover the second through hole 411 that is sealed or away from the center of the receiving groove 401, thereby realizing the opening or closing of the vacuum suction port of the first vacuum component. At the same time, the upper side of the sealing plate 51 may also be provided with a carrier plate 41 for carrying wafers, and the carrier plate 41 is fixed to the vertical upper side of the bottom surface of the receiving groove 401 of the mobile platform 40 by means of four fixing brackets. And the carrier plate 41 and the bottom surface of the receiving groove 401 are arranged at intervals from each other, so that a movable space 410 is defined between the bottom surface of the carrier plate 41 and the bottom surface of the receiving groove 401 of the mobile platform 40, and the sealing plate 51 can move up and down in the vertical direction in the movable space 410. Furthermore, a shunting groove 513 corresponding to the outer shape of the carrier plate 41 may be provided on the upper side of the sealing plate 51, so that the carrier plate 41 can be at least partially accommodated in the shunting groove 513 when the sealing plate 51 is away from the second through hole 411. At the same time, the central part of the mobile platform 40 protrudes toward the second chamber 20 in the vertical direction, so that when the peripheral part of the second chamber 20 contacts the outer edge of the first opening 11, the central part of the mobile platform 40 and the sealing plate 51 and the carrier plate 41 disposed in the accommodating groove 401 can at least partially extend into the second chamber 20. The above arrangement not only makes the structure of the mobile platform 40, the sealing plate 51 and the carrier plate 41 more compact, but also reduces the air volume in the second chamber 20 when the mobile platform 40 seals the first opening 11, thereby saving the time and power consumption required for evacuating the second chamber 20.

[0033] In some embodiments, the sealing drive assembly includes a sealing drive unit and a sealing transmission unit. The sealing drive unit may include a driving body fixedly connected to the frame, and a driving output member driven to move by the driving body. For example, the sealing drive unit of the sealing drive assembly may include at least two sealing drive mechanisms 53, wherein each sealing drive mechanism 53 may be, for example, an electric cylinder, and the housing of the electric cylinder is the driving body, and the output shaft of the electric cylinder that can be telescopically moved relative to the housing is the driving output member. The sealing transmission unit of the sealing drive assembly may include an intermediate platform 57 driven to move by the sealing drive mechanism 53 and the above-mentioned intermediate support member 56. Specifically, a first support member through hole 403 may be provided on each of the horizontal sides of the mobile platform 40, and two second support member through holes 301 are also provided on the fixed part 30. The two intermediate support members 56 connected to the sealing plate 51 are roughly in the shape of a long strip, which can pass through the first support member through hole 403, and further pass through the corresponding second support member through hole 301 on the fixed part 30 to connect to an intermediate platform 57 located on the vertical lower side of the fixed part 30. The intermediate platform 57 can be roughly in the shape of a circular plate, which is arranged parallel to the moving platform 40, and a through hole is provided in the middle thereof for the first vacuum assembly to pass through in the axial direction, and two support member mounting holes 573 and two drive member mounting holes 571 extending in the axial direction are provided in the outer part thereof. The support member mounting hole 573 is arranged toward the vertical upper side for fixedly connecting the intermediate support member 56; the drive member mounting hole 571 is arranged toward the vertical lower side for fixedly connecting the driving output members of the two sealing driving mechanisms 53 used to drive the movement of the intermediate platform 57. The driving bodies of the two sealing driving mechanisms 53 are fixedly connected to the cavity wall of the first chamber 10. By setting the intermediate platform 57 to be connected to the two sealing driving mechanisms 53 respectively, the intermediate platform 57 can balance the moving output distance and output force of the two driving mechanisms, so that the moving distance and output force transmitted to the sealing plate 51 through the intermediate support member 56 are evenly distributed, and the sealing plate 51 will not be tilted or even stuck due to the large or small output on one side, thereby improving the stability of the sealing driving assembly.

[0034] In some embodiments, the sealing device further comprises a mobile driving assembly, which is used to drive the mobile platform 40 to move relative to the fixed portion 30. The mobile driving assembly comprises a mobile driving portion and a driving transmission portion driven to move by the mobile driving portion, and the mobile driving portion may include a driving main body fixedly connected to the frame, and a driving moving member driven to move by the main body. For example, the mobile driving portion of the sealing driving assembly may include at least one mobile driving mechanism 47, wherein each mobile driving mechanism 47 may be, for example, an electric cylinder, and the housing of the electric cylinder is the driving main body, and the output shaft of the electric cylinder that can be telescopically moved relative to the housing is the driving moving member. The mobile transmission portion of the mobile driving assembly may include a relay platform 49 and a relay support 48 fixedly connected to the driving moving member of the mobile driving mechanism 47. Specifically, the mobile driving mechanism 47 may include a driving body and a driving moving member, wherein the driving body is arranged vertically below the first vacuum assembly and is fixedly connected to the cavity wall of the first chamber 10 by means of a driving connecting bracket 46, and the driving moving member can move relative to the driving body in the vertical direction, and is connected to a relay platform 49 located below the first vacuum assembly through the connecting bracket 46. The relay platform 49 may be roughly in the shape of a circular plate, the bottom side of which in the vertical direction is fixedly connected to the driving moving member of the mobile driving mechanism 47, and the upper side of which in the vertical direction is fixedly connected to three relay supports 48. The relay supports 48 may be roughly in the shape of a long strip extending in the vertical direction, one end of which is connected to the relay platform 49, and the other end of which passes through the fixing portion 30 and is fixedly connected to the lower side of the mobile platform 40. By arranging the three relay supports 48 at equal intervals on the surface of the relay platform 49 and connecting the mobile platform 40 in the same manner at equal intervals, the moving distance and output force output by the mobile driving mechanism 47 can be evenly transmitted to the mobile platform 40. At the same time, the three relay supports 48 and the through holes on the fixed part 30 also constitute a guiding mechanism, which structurally limits the mobile platform 40 from tilting, thereby further improving the stability of the mobile platform 40.

[0035] In some embodiments, the drive connection bracket 46 includes a drive fixing plate 461 and a plurality of support columns 462 fixedly disposed on the drive fixing plate 461. The drive fixing plate 461 may be, for example, roughly in the shape of a square plate, which is disposed between the relay platform 49 and the mobile drive mechanism 47 in the vertical direction, and the middle portion of the drive fixing plate 461 is provided with a drive moving member opening for the drive moving member of the mobile drive mechanism 47 to pass through, and the outer peripheral portion of the vertical upper side thereof is fixedly provided with four support columns 462 spaced apart from each other. The support columns 462 may be roughly in the shape of a long strip, which extends in the vertical direction and is fixedly connected to the cavity wall of the first chamber 10 from bottom to top. It is understood by those skilled in the art that, although in some embodiments of the present disclosure, a sealing drive mechanism 53 is connected by using an intermediate platform 57 and two intermediate supports 56 arranged at the periphery of the first vacuum assembly, and a mobile drive mechanism 47 is connected by a relay platform 49 and three relay supports 48 arranged below the first vacuum assembly, the present disclosure does not limit the specific arrangement of the sealing drive mechanism 53 and the mobile drive mechanism 47. For example, two or more mobile drive mechanisms can be arranged on both sides of the first vacuum assembly in the horizontal direction, and the driving moving member of the mobile drive mechanism is connected to the intermediate platform, and two or more intermediate supports fixedly arranged on the intermediate platform are passed through the fixed part and fixedly connected to the bottom side of the mobile platform, thereby driving the lifting of the mobile platform. Similarly, a sealing drive mechanism can also be arranged vertically below the first vacuum assembly, and two or more relay supports on the relay platform are connected to the sealing plate through the fixed part and the mobile platform, thereby driving the lifting of the sealing plate.

[0036] In some embodiments, the sealing drive mechanism 53 and the moving drive mechanism 47 can be electric mechanisms such as electric cylinders and linear motors that can drive the moving end to move in a straight line, or can be other forms of linear motion mechanisms such as cylinders. The sealing drive mechanism 53 can be, for example, two, and are respectively arranged on both sides of the horizontal axis relative to the central axis of the sealing device, and its moving part is arranged upward in the vertical direction, and the moving part is its output shaft. The main body of the sealing drive mechanism 53 is an electric cylinder body, and a flange mounting part is provided at one end of the electric cylinder body connected to the output shaft. With the help of the flange mounting part, the electric cylinder body can be fixedly installed from bottom to top in the vertical direction to the outer surface of the cavity wall of the first chamber 10. At the same time, the two sealing drive mechanisms 53 are located on both sides of the vacuum pump 50 in the horizontal direction. The output shafts of the two electric cylinders are respectively fixedly connected to the outer part of the middle platform 57, and the connection position of the middle platform 57 and the two middle supports 56 and the connection position of the middle platform 57 and the movable ends of the two sealing drive mechanisms 53 are located on a horizontal straight line, avoiding the occurrence of deflection torque due to deviation between the force application point and the force receiving point.

[0037] In some embodiments, the sealing device further includes a second vacuum assembly, which may include a second vacuum pump 60 and a second vacuum tube. The second vacuum pump 60 may, for example, be a type with a weaker working vacuum than the first vacuum pump 50, so that the second vacuum pump 60 is used as a pre-process of the first vacuum pump 50, that is, after first starting the second vacuum pump 60 to reduce the air pressure of the second chamber 20 to a weak vacuum environment, the first vacuum pump 50 is started for further vacuuming, so that the models of the first vacuum pump 50 and the second vacuum pump 60 can be configured in a targeted manner, thereby improving the vacuuming efficiency and reducing the loss and cost. The second vacuum assembly may, for example, further include a valve, which is connected to the second vacuum pump 60 to control its opening and closing. The second vacuum pump 60 and the valve may be fixedly arranged on the cavity wall of the first chamber 10 or on the fixed portion 30 of the sealing device, and the second vacuum tube may, for example, be a flexible connecting tube, one end of which is connected to the vacuum pump 50, and the other end is connected to the second chamber 20 through the fixed portion 30 and the mobile platform 40. Alternatively, a second vacuum connection hole may be further provided on the fixing portion 30, and the second vacuum tube may be fixedly connected to the second vacuum connection hole, and a third vacuum tube is connected to one end of the second vacuum connection hole toward the first chamber 10. The third vacuum tube may be, for example, a flexible connecting tube, which is further connected to a third through hole on the moving platform 40. The third through hole passes through the moving platform 40 and is connected to the second chamber 20, so that the second vacuum mechanism can evacuate the second chamber 20.

[0038] In some embodiments, the valve for controlling the opening and closing of the second vacuum component can be replaced by a second sealing drive component and a second sealing plate driven by the second sealing drive component. For example, a second through hole and a third through hole can be respectively set on the mobile platform 40, wherein the sealing plate 51 driven by the aforementioned sealing drive component is used to seal or open the second through hole, and the second sealing plate driven by the second sealing drive component is used to seal or open the third through hole. Accordingly, two independent intermediate platforms 57 can be set, or no intermediate platform 57 is set, so that the corresponding sealing drive mechanism 53 or the second sealing drive mechanism 53 of the second sealing drive component directly drives the lifting of the sealing plate 51 or the second sealing plate.

[0039] In some embodiments, when there are relatively moving parts between the mobile platform 40 and the fixed part 30, and between the mobile platform 40 and the sealing plate 51 in the first chamber 10 and the second chamber 20, the connection parts between the parts and the mobile platform 40 or the fixed part 30 are sealed using flexible seals. For example, a first connecting tube is provided on the outer periphery of the intermediate support 56. The first connecting tube is generally in the shape of a hollow tube and can be flexibly deformed in the axial direction. One end of the first connecting tube is fixedly connected to the bottom side of the sealing plate 51, and the other end is fixedly connected to the upper side of the mobile platform 40. In some embodiments, a connecting tube groove 405 is also provided on the upper side of the sealing platform to accommodate and position the first connecting tube. Similarly, after the intermediate support member 56 passes through the mobile platform 40, a second connecting pipe is provided on the outer periphery of the portion between the fixed portion 30 and the mobile platform 40, the vertical upper end of the second connecting pipe is fixedly connected to the bottom side of the mobile platform 40, and the lower end is fixedly connected to the upper side of the fixed portion 30, so as to seal the through hole on the mobile platform 40 and the fixed portion 30 through which the intermediate support member 56 passes relative to the first chamber 10. Similarly, a third connecting pipe is provided on the outer periphery of the portion of the relay support member in the first chamber 10, the upper end of the third connecting pipe is connected to the bottom side of the mobile platform 40, and the lower end is fixedly connected to the upper side of the fixed portion 30, so as to seal the through hole on the mobile platform 40 and the fixed portion 30 through which the relay support member passes relative to the first chamber 10. The connecting pipe used for sealing can be a bellows with foldable folds arranged in the axial direction, or can be other sealing members that can flexibly expand and contract.

[0040] According to some embodiments of the sealing device for wafer transfer disclosed herein, a movable platform 40 is provided which is movable relative to a fixed part 30, and a first vacuum component is flexibly connected to a second chamber 20 and a vacuum pump 50 by means of a flexible connecting tube 60. Thus, the wafer storage chamber can be evacuated to achieve air pressure balance while the wafer is being transferred. The structure is compact, reliable and has good sealing performance.

[0041] Figure 4A three-dimensional schematic diagram of a conveying system for wafer conveying according to some embodiments of the present disclosure is shown. In some embodiments, the conveying system for wafer conveying may include a frame 200, and the frame 200 may have a hollow structure, for example, and a first chamber 10 and a second chamber 20 are arranged inside the frame 200. The frame 200 may be arranged between a wafer storage device, a wafer processing device, and a wafer detection device, for example. According to some sealing devices 100 for wafer conveying disclosed in the present disclosure, the sealing device 100 is connected to the frame 200, and the fixed portion 30 of the sealing device 100 is fixedly connected to the cavity wall of the first chamber 10, and the movable platform 40 of the sealing device 100 can move relative to the fixed portion 30 to close the first chamber 10 relative to the second chamber 20. The flexible connecting pipe 60 of the first vacuum component of the sealing device 100 is connected between the fixed portion 30 and the movable platform 40, and connects the second chamber 20 with the vacuum pump 50 to evacuate the second chamber 20.

[0042] Although multiple embodiments of the present disclosure have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Those skilled in the art may think of many changes, modifications, and alternatives without departing from the thought and spirit of the present disclosure. It should be understood that in the process of practicing the present disclosure, various alternatives to the embodiments of the present disclosure described herein may be adopted. The attached claims are intended to define the scope of protection of the present disclosure, and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A sealing device for wafer transfer, characterized in that: The invention is used for transferring a wafer (90) between a first vacuum chamber (10) and a second vacuum chamber (20); the first chamber (10) and the second chamber (20) are connected via a first opening (11); a portion of the first chamber (10) away from the second chamber (20) comprises a bottom side wall (19); a bottom through hole (191) open downward is provided on the bottom side wall (19); the sealing device comprises: A fixing portion (30) having a plate-shaped body, the fixing portion (30) being fixedly connected to the bottom side wall (19) of the first chamber (10) from bottom to top and sealing the lower through hole (191); A movable platform (40) having a plate-shaped body, the movable platform (40) being arranged on the vertical upper side of the fixed portion (30) and being used for moving between a sealing position and an opening position relative to the first opening (11), the upper side of the movable platform being loaded with a wafer (90), and a sealing member being further arranged on the outer peripheral side of the movable platform (40), wherein when in the sealing position, the sealing member approaches and seals the first opening (11), and when in the opening position, the sealing member moves away from the first opening (11), so that the first chamber (10) is connected to the second chamber (20); A first vacuum component comprises a vacuum pump (50) fixedly connected to the fixed portion (30), and a flexible connecting pipe (60), wherein the flexible connecting pipe (60) is arranged between the fixed portion (30) and the movable platform (40), and connects the vacuum pump (50) with the second chamber (20) for evacuating the second chamber (20).

2. The sealing device according to claim 1, characterized in that: The invention also comprises a sealing plate (51) movable relative to the movable platform (40); a second through hole (411) penetrating in the longitudinal direction is provided on the movable platform (40); the first vacuum component is connected to the first chamber (10) via the second through hole (411); the sealing plate (51) is used to move between a closing position and a suction position relative to the second through hole (411); when the sealing plate (51) moves to the closing position, the second through hole (411) is sealed; when the sealing plate (51) moves to the suction position, the second through hole (411) is opened.

3. The sealing device according to claim 2, characterized in that: It also includes a sealing drive assembly, which includes a sealing drive unit and a sealing transmission unit, the sealing drive unit includes a driving body fixedly connected to the frame, and a driving output member used to move relative to the driving body, one end of the sealing transmission unit is fixedly connected to the sealing plate (51), and the other end is fixedly connected to the driving output member, and the sealing drive unit can drive the sealing transmission unit to drive the sealing plate (51) to move in a vertical direction.

4. The sealing device according to claim 3, characterized in that: The sealing transmission part of the sealing drive assembly also includes at least two elongated intermediate support members (56), and the circumferential side of the sealing plate (51) includes two oppositely arranged mounting protrusions (511), one end of the intermediate support member (56) passes through the fixed part (30) and the movable platform (40) to be fixedly connected to the mounting protrusion (511) of the sealing plate (51), and the other end of the intermediate support member (56) is fixedly connected to the movable part of the sealing drive part.

5. The sealing device according to claim 4, characterized in that: The sealing drive part of the sealing drive assembly includes at least two sealing drive mechanisms (53), and the sealing transmission part of the sealing drive assembly also includes an intermediate platform (57). The fixed end of each of the sealing drive mechanisms (53) is fixedly arranged on the frame, and the movable end of each of the sealing drive mechanisms (53) is fixedly connected to the intermediate platform (57). The intermediate platform (57) is arranged parallel to the movable platform (40).

6. The sealing device according to claim 2, characterized in that: The sealing plate (51) is provided with an avoidance groove, and the mobile platform (40) is also fixedly provided with a bearing plate (41), and a fixed bracket is provided between the bearing plate (41) and the upper surface of the mobile platform (40) so that an activity space (410) is defined between the bearing plate and the surface of the mobile platform (40), and the sealing plate (51) is used to move in the activity space (410) and open or close the second through hole (411), and when the sealing plate (51) moves away from the second through hole (411), the avoidance groove (513) on the sealing plate (51) at least partially accommodates the bearing plate (41).

7. The sealing device according to claim 1, characterized in that: It also includes a mobile driving component, which includes a mobile driving part and a mobile transmission part. The mobile driving part includes a driving body fixedly connected to the frame, and a driving moving part used to move relative to the driving body. One end of the mobile transmission part is fixedly connected to the mobile platform (40), and the other end is fixedly connected to the driving moving part. The mobile driving part is used to drive the mobile transmission part to drive the mobile platform (40) to move in a vertical direction.

8. The sealing device according to claim 7, characterized in that: The mobile transmission part of the mobile driving assembly also includes a relay platform (49) and a relay support (48) which are fixedly connected to each other, the relay platform (49) includes a disc-shaped main body, the relay support (48) is an elongated strip, and three relay supports (48) are arranged on an axial end face of the relay platform (49), each of the relay supports (48) passes through the fixed part (30) and is fixedly connected to the mobile platform (40).

9. The sealing device according to any one of claims 1 to 8, characterized in that: The mobile platform (40) further comprises a second vacuum component and a second sealing drive component, wherein the second vacuum component is used for evacuating the second chamber (20), and the second sealing drive component is used for driving the second sealing plate to move. A third through hole is also provided on the mobile platform (40), and the second vacuum component is used for communicating with the third through hole, and the second sealing plate (51) is used for sealing or opening the third through hole.

10. A conveying system for wafer conveying, characterized in that: include: A frame, the frame comprising a first chamber (10) and a second chamber (20); as well as The sealing device according to any one of claims 1 to 9 is connected to the frame for transferring the wafer (90) between the first vacuum chamber (10) and the second vacuum chamber (20).

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