An open sintering furnace for DCB copper-clad ceramic substrate

By using a three-dimensional air flow control mechanism and a temperature control adjustment mechanism in an open sintering furnace for DCB copper-clad ceramic substrate, the problems of uneven temperature distribution and thermal stress risks are solved, and a more uniform heat distribution and higher bonding quality are achieved.

CN119353923BActive Publication Date: 2025-03-04ANHUI TAOXINKE SEMICON NEW MATERIALS CO LTD
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Patent Information

Application Number
CN202411919286.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-12-25
Publication Date
2025-03-04
Estimated Expiration
2044-12-25

AI Technical Summary

Technical Problem

The existing open sintering furnace for DCB copper-clad ceramic substrates has difficulties in uneven temperature distribution and thermal stress risks, resulting in poor bonding quality.

Method used

The three-dimensional air flow control mechanism and temperature control adjustment mechanism are adopted to control the rotation of bevel gears and worms through a servo motor, adjust the angle of the air flow plate and combine the lifting and lowering of the air flow plate, and optimize the air flow distribution and temperature control in the furnace.

Benefits of technology

A more uniform heat distribution is achieved, reducing thermal stress risks, improving bonding quality and yield, and increasing equipment versatility and flexibility.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention discloses an open sintering furnace for a DCB copper-clad ceramic substrate, belonging to the technical field of sintering furnaces, comprising a main sintering unit, both sides of the main sintering unit are fixedly connected with auxiliary sintering units, the main sintering unit and the auxiliary sintering unit each comprise three adjustable sintering furnace bodies, both sides of the main sintering unit are provided with combined airflow plates, a three-dimensional airflow control mechanism is provided in the adjustable sintering furnace body, and a temperature control regulating mechanism is provided in the main sintering unit. The present invention sets a three-dimensional airflow control mechanism, and the adjustable vertical air regulating plates and horizontal air regulating plates can help optimize the airflow distribution in the furnace, ensure that the heat is more evenly distributed on the product, and can also accelerate the heat transfer process. By setting a temperature control regulating mechanism, the airflow velocity in the device can be effectively adjusted, so that when facing different temperature stages, the device can fully adapt.
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Description

Technical Field

[0001] The invention belongs to the technical field of sintering furnaces, in particular to an open sintering furnace for a DCB copper-clad ceramic substrate. Background Art

[0002] DCB copper-clad ceramic substrate is a high-performance electronic packaging material that directly bonds copper foil to a ceramic substrate, providing excellent thermal conductivity and electrical insulation. In the manufacturing process, the use of an open sintering furnace to treat the DCB substrate is one of the key steps. This sintering process is carried out in a controlled environment, ensuring a strong bond between the copper layer and the ceramic while keeping the physical and electrical properties of the material intact. By precisely controlling the temperature curve and atmosphere conditions, the open sintering furnace can achieve high-quality bonding effects and meet the strict requirements for heat dissipation performance and reliability in different application fields.

[0003] The existing open sintering furnace for DCB copper-clad ceramic substrates still has the following shortcomings:

[0004] Sintering furnaces are mainly divided into open sintering furnaces and closed sintering furnaces. The door of the open sintering furnace is directly open, allowing direct observation or access to the workpiece in the furnace. This design makes material loading and unloading more convenient, and is also convenient for maintenance and cleaning. However, it is difficult to completely avoid edge effects and heat losses due to the design of the open sintering furnace, which leads to uneven temperature distribution in the furnace. This is a problem for the DCB process that requires strict temperature control. Local overheating or underheating of the DCB copper-clad ceramic substrate will greatly affect the bonding quality between copper and ceramics. In summary, the temperature uniformity problem is one of the biggest problems faced by the existing open sintering furnaces for DCB copper-clad ceramic substrates.

[0005] During the sintering process of the DCB copper-clad ceramic substrate, in order to ensure a stable bond between copper and ceramic and avoid cracks and other defects caused by thermal stress, the DCB copper-clad ceramic substrate needs to go through a preheating stage, a high-temperature holding stage and a cooling stage during the sintering process. During the preheating stage, the workpiece needs to be gradually heated from room temperature to a set temperature. The temperature rise rate of the existing open sintering furnace is not linear, which causes the surface of the DCB copper-clad ceramic substrate to heat up rapidly, while the internal temperature is relatively low. The temperature difference effect will greatly increase the risk of thermal stress. At the same time, in order to ensure the heating efficiency, the gas circulation speed in the existing open sintering furnace is not constrained, which also greatly reduces the inert gas protection effect during the preheating stage. In addition, during the high-temperature holding stage, in order to make the heat more evenly distributed in the furnace body and avoid the problem of faster heat dissipation in the edge area, it is necessary to improve the heat distribution through high-speed airflow, but the existing devices are basically unable to meet the different heat distribution requirements of these two stages. Summary of the invention

[0006] In order to overcome the above defects, the present invention provides an open sintering furnace for a DCB copper-clad ceramic substrate, which solves the problems in the prior art.

[0007] To achieve the above object, the present invention provides the following technical solution: an open sintering furnace for a DCB copper-clad ceramic substrate, comprising:

[0008] A main sintering unit, both sides of which are fixedly connected to auxiliary sintering units, the main sintering unit and the auxiliary sintering unit each include three adjustable sintering furnace bodies, both sides of the main sintering unit are provided with combined airflow plates, a three-dimensional airflow control mechanism is provided in the adjustable sintering furnace body, and a temperature control adjustment mechanism is provided in the main sintering unit;

[0009] The temperature control mechanism includes two pairs of adjustment housings arranged in the main sintering unit, the two adjustment housings are respectively fixedly connected to the two ends of the combined airflow plate, the combined airflow plate is provided with four guide ports, the guide ports are provided with convection fans, and the combined airflow plate is slidably connected to the main sintering unit;

[0010] The three-dimensional airflow control mechanism includes two adjusting worms rotatably connected to the body of the adjustable sintering furnace, one side of the adjusting worm is coaxially fixedly connected with a driven bevel gear, a servo motor is built in the body of the adjustable sintering furnace, two active bevel gears are coaxially fixedly connected to the output end of the servo motor, the active bevel gear is meshed with the driven bevel gear on the corresponding side, four vertical air regulating plates are rotatably connected to the inner walls of both sides of the body of the adjustable sintering furnace, a first worm gear is coaxially fixedly connected to the rotating shaft of the vertical air regulating plate, the first worm gear is meshed with the adjusting worm on the corresponding side, three horizontal air regulating plates are rotatably connected to the top of the inner body of the adjustable sintering furnace, both ends of the rotating shaft of the horizontal air regulating plate are coaxially fixedly connected with the main gear, the corresponding main gear position in the body of the adjustable sintering furnace is rotatably connected with a sub-gear, the sub-gear is meshed with the main gear, the sub-gear is coaxially fixedly connected with the second worm gear, and the second worm gear is meshed with the adjusting worm.

[0011] As a further solution of the present invention: a feeding table and a unloading table are respectively fixedly connected to the sides of the two auxiliary sintering units that are away from each other, a conveyor belt is arranged between the feeding table and the unloading table, a temperature control panel is arranged on one of the two auxiliary sintering units, a mounting plate is fixedly connected to the bottom of the main sintering unit and the two auxiliary sintering units, and a plurality of supporting legs are fixedly connected to the bottom of the mounting plate.

[0012] As a further solution of the present invention: a limiting plate is fixedly connected to the bottom of the adjusting shell, two sliding shafts are fixedly connected to the limiting plate, a composite slide is slidably connected to the two sliding shafts, four limiting angle plates are fixedly connected to the composite slide, a sliding port is slidably connected to the four limiting angle plates, a nickel-titanium alloy strip is fixedly connected to the bottom of the sliding port, and one end of the nickel-titanium alloy strip away from the sliding port is fixedly connected to the composite slide.

[0013] As a further solution of the present invention: the inner bottom of the adjustment shell is fixedly connected with a rotating support, the rotating support is rotatably connected with a lever, the sliding port and the lever are connected by a ceramic fiber rope, and a limiting axis is set at one end of the lever away from the sliding port.

[0014] As a further solution of the present invention: the inner bottom of the adjusting shell is fixedly connected to a limiting slot plate, the limiting slot plate is slidably connected with a sliding seat, the sliding seat is provided with a through slot, the limiting shaft is slidably connected in the through slot, the limiting slot plate is fixedly connected with a sliding rheostat, the sliding seat is fixedly connected to the sliding plate of the sliding rheostat, one side of the sliding seat is fixedly connected with a No. 1 tooth plate, a No. 1 gear is rotatably connected to the inner wall of the adjusting shell, the No. 1 gear is coaxially fixedly connected with a No. 2 gear, the No. 1 tooth plate and the No. 1 gear are meshed with each other, a limiting frame is fixedly connected to the side wall of the adjusting shell, a No. 2 tooth plate is slidably connected in the limiting frame, the No. 2 tooth plate and the No. 2 gear are meshed with each other, a notch is provided on the side wall of the adjusting shell corresponding to the limiting frame, the No. 2 tooth plate passes through the notch and is fixedly connected to the combined airflow plate.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] The present invention sets a three-dimensional airflow control mechanism, and controls the rotation of the active bevel gear through a servo motor, thereby causing the driven bevel gear and the adjusting worm to rotate, so that the first worm gear and the second worm gear meshing with the adjusting worm can both rotate, so that the vertical air regulating plate and the horizontal air regulating plate can both be adjusted synchronously. The adjustable vertical air regulating plate and the horizontal air regulating plate can help optimize the airflow distribution in the furnace, ensure that the heat is more evenly distributed on the product, and can also accelerate the heat transfer process so that the heating and cooling rates are more in line with the process requirements. Good airflow management can help avoid local overheating or uneven cooling problems, reduce the possibility of defects such as cracks and stratification, and improve the yield rate. In addition, according to DCB substrates of different sizes or types, the angle and position of the windshield can be flexibly adjusted to meet the sintering conditions of specific products, thereby increasing the versatility and flexibility of the equipment.

[0017] The present invention sets a temperature control mechanism. Since the temperature in the furnace of the DCB copper-clad ceramic substrate is about 500°C during the preheating stage, and the temperature needs to be kept at about 1000°C during the high-temperature holding stage, the present invention controls the lever by setting a nickel-titanium alloy bar. Since nickel-titanium alloy is a shape memory alloy, when the temperature is lower than the critical temperature, the nickel-titanium alloy remains deformed and maintains the martensite phase. When the temperature is higher than the critical temperature, the nickel-titanium alloy restores its original shape and is converted into an austenite phase. The critical temperature of the nickel-titanium alloy is about 1000°C, and the nickel-titanium alloy can be reused many times. Through the cooperation of the nickel-titanium alloy bar, the combined airflow plate is driven to rise and fall, so that the effective working area of ​​the combined airflow plate in the main sintering unit can be adjusted, and then the airflow speed in the device can be effectively adjusted. In this way, when facing different temperature stages, the present device can fully adapt, which can avoid the thermal stress risk and the inert gas leakage risk brought by the high-speed airflow in the preheating stage, and can also ensure that the heat distribution is improved by the high-speed airflow in the high-temperature holding stage. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0019] Figure 2 It is a schematic diagram of the three-dimensional structure of the adjustable sintering furnace body of the present invention;

[0020] Figure 3 It is a schematic diagram of the three-dimensional internal structure of the adjustment housing of the present invention;

[0021] Figure 4 It is a schematic diagram of the three-dimensional internal structure of the limiting slot plate of the present invention;

[0022] Figure 5 It is a schematic diagram of the three-dimensional internal structure of another angle of the adjustable housing of the present invention;

[0023] Figure 6 is a schematic diagram of the three-dimensional structure of the three-dimensional airflow control mechanism of the present invention;

[0024] Figure 7 for Figure 6 Enlarged view of part A.

[0025] In the figure: 1 main sintering unit, 2 auxiliary sintering unit, 3 adjustable sintering furnace body, 4 combined air flow plate, 5 adjusting worm, 6 driven bevel gear, 7 servo motor, 8 driving bevel gear, 9 vertical air regulating plate, 10 first worm gear, 11 horizontal air regulating plate, 12 second worm gear, 13 feeding table, 14 unloading table, 15 conveyor mesh belt, 16 temperature control panel, 17 mounting plate, 18 adjusting shell, 19 guide port, 20 convection fan, 21 limit plate, 22 sliding shaft, 23 composite slide plate, 24 limit angle plate, 25 sliding port, 26 nickel-titanium alloy strip, 27 rotating support, 28 lever, 29 limit shaft, 30 limit slot plate, 31 sliding seat, 32 No. 2 tooth plate, 33 No. 1 tooth plate, 34 No. 1 gear, 35 No. 2 gear, 36 limit frame, 37 sliding rheostat, 38 main gear, 39 auxiliary gear. DETAILED DESCRIPTION

[0026] The technical solution of the present invention is further described in detail below in conjunction with specific implementation methods.

[0027] like Figure 1-Figure 7 As shown, the present invention provides a technical solution:

[0028] A main sintering unit 1, both sides of the main sintering unit 1 are fixedly connected with auxiliary sintering units 2, the main sintering unit 1 and the auxiliary sintering unit 2 each include three adjustable sintering furnace bodies 3, both sides of the main sintering unit 1 are provided with combined airflow plates 4, a three-dimensional airflow control mechanism is provided in the adjustable sintering furnace body 3, a temperature control adjustment mechanism is provided in the main sintering unit 1, the main sintering unit 1 and the auxiliary sintering unit 2 have the same overall structure, except that the main sintering unit 1 is provided with a combined airflow plate 4, and the main sintering unit 1 and the auxiliary sintering unit 2 cooperate to form a main furnace body;

[0029] A feeding platform 13 and a discharging platform 14 are fixedly connected to the sides of the two auxiliary sintering units 2 that are away from each other, respectively. A conveying mesh belt 15 is arranged between the feeding platform 13 and the discharging platform 14. A temperature control panel 16 is arranged on one of the two auxiliary sintering units 2. A mounting plate 17 is fixedly connected to the bottom of the main sintering unit 1 and the two auxiliary sintering units 2. A plurality of legs are fixedly connected to the bottom of the mounting plate 17. The feeding platform 13 and the discharging platform 14 realize the feeding and discharging functions correspondingly. The conveying mesh belt 15 can transport materials. The temperature control panel 16 can control the temperature in the furnace in real time. The setting of the mounting plate 17 and the legs can ensure the stability of the device.

[0030] The three-dimensional airflow control mechanism includes two adjusting worms 5 rotatably connected to the body 3 of the adjustable sintering furnace, one side of the adjusting worm 5 is coaxially fixedly connected to a driven bevel gear 6, a servo motor 7 is built in the body 3 of the adjustable sintering furnace, and two active bevel gears 8 are coaxially fixedly connected to the output end of the servo motor 7, and the active bevel gear 8 is meshed with the driven bevel gear 6 on the corresponding side, and four vertical air regulating plates 9 are rotatably connected to the inner walls of both sides of the body 3 of the adjustable sintering furnace, and a first worm gear 10 is coaxially fixedly connected to the rotating shaft of the vertical air regulating plate 9, and the first worm gear 10 is 0 is meshed with the adjusting worm 5 on the corresponding side. The inner top of the adjustable sintering furnace body 3 is rotatably connected with three horizontal air regulating plates 11. Both ends of the rotating shaft of the horizontal air regulating plates 11 are coaxially fixedly connected with the main gear 38. The corresponding positions of the main gear 38 in the adjustable sintering furnace body 3 are rotatably connected with the sub-gear 39. The sub-gear 39 meshes with the main gear 38. The sub-gear 39 is coaxially fixedly connected with the second worm gear 12. The second worm gear 12 and the adjusting worm 5 are meshed with each other. The three-dimensional airflow control mechanism can adjust the angles of the horizontal air regulating plates 11 and the vertical air regulating plates 9. The two active bevel gears 8 are controlled to rotate by the servo motor 7, and the driven bevel gear 6 meshing with the active bevel gear 8 can rotate, then the adjusting worm 5 coaxially fixedly connected with the driven bevel gear 6 can rotate, and the first worm gear 10 and the second worm gear 12 meshing with the adjusting worm 5 can rotate. When the second worm gear 12 rotates, the sub-gear 39 coaxially fixedly connected with it can rotate, and the main gear 38 meshing with the sub-gear 39 will drive the horizontal air regulating plate 11 to rotate, and the angles of the corresponding horizontal air regulating plate 11 and the vertical air regulating plate 9 are synchronously adjusted. The adjustable vertical air regulating plate 9 and the horizontal air regulating plate 11 can help optimize the airflow distribution in the furnace, ensure that the heat is more evenly distributed on the product, and accelerate the heat transfer process, so that the heating and cooling rates are more in line with the process requirements. Good airflow management can help avoid local overheating or uneven cooling problems, reduce the possibility of defects such as cracks and stratification, and improve the yield rate. In addition, according to DCB substrates of different sizes or types, the angle and position of the windshield can be flexibly adjusted to meet the sintering conditions of specific products and increase the versatility and flexibility of the equipment;

[0031] The temperature control mechanism includes two pairs of adjustment shells 18 arranged in the main sintering unit 1, and the two adjustment shells 18 are respectively fixedly connected to the two ends of the combined airflow plate 4, and the combined airflow plate 4 is provided with four guide ports 19, and a convection fan 20 is arranged in the guide port 19. The combined airflow plate 4 is slidably connected to the main sintering unit 1, and the bottom of the adjustment shell 18 is fixedly connected to a limit plate 21, and two sliding shafts 22 are fixedly connected to the limit plate 21, and the two sliding shafts 22 are slidably connected to a composite slide plate 23, and four limit angle plates 24 are fixedly connected to the composite slide plate 23, and the four limit angle plates 24 are slidably connected to a sliding port 25, and a nickel-titanium alloy strip 26 is fixedly connected to the bottom of the sliding port 25, and one end of the nickel-titanium alloy strip 26 away from the sliding port 25 is fixedly connected to the bottom of the sliding port 25. The composite slide plate 23 is fixedly connected to the inner bottom of the adjusting shell 18, and a rotating support 27 is fixedly connected to the rotating support 27, and a lever 28 is rotatably connected to the rotating support 27. The sliding port 25 and the lever 28 are connected by a ceramic fiber rope. A limit shaft 29 is arranged at one end of the lever 28 away from the sliding port 25. The inner bottom of the adjusting shell 18 is fixedly connected to a limit slot plate 30, and a sliding seat 31 is slidably connected in the limit slot plate 30. A through slot is provided on the sliding seat 31, and the limit shaft 29 is slidably connected in the through slot. A sliding rheostat 37 is fixedly connected in the limit slot plate 30, and the sliding seat 31 is fixedly connected to the sliding piece of the sliding rheostat 37. One side of the sliding seat 31 is fixedly connected to a No. 1 tooth plate 33, and a No. 1 gear 34 is rotatably connected to the inner wall of the adjusting shell 18. The gear 34 is coaxially fixedly connected with the second gear 35, the first gear plate 33 and the first gear 34 are meshed with each other, the side wall of the adjusting housing 18 is fixedly connected with a limit frame 36, the limit frame 36 is slidably connected with the second gear plate 32, the second gear plate 32 and the second gear 35 are meshed with each other, a notch is provided on the side wall of the adjusting housing 18 corresponding to the limit frame 36, the second gear plate 32 passes through the notch and is fixedly connected with the combined airflow plate 4, since nickel-titanium alloy is a shape memory alloy, when the temperature is lower than the critical temperature, the nickel-titanium alloy keeps deforming and maintains the martensitic phase, when the temperature is higher than the critical temperature, the nickel-titanium alloy restores the original shape and is converted into the austenitic phase, and the critical temperature of the nickel-titanium alloy is about 1000°C, and the device is converted from the preheating stage to the high temperature During the holding stage, the temperature needs to be increased from 500°C to 1000°C. Then, when the device is converted from the preheating stage to the high-temperature holding stage, the length of the nickel-titanium alloy strip 26 will be converted from the extended state to the original shape, and the length of the nickel-titanium alloy strip 26 will shrink, and the lever 28 will rotate a certain angle on the rotating support 27, and the corresponding composite slide plate 23 will also slide a certain distance on the sliding shaft 22. The rotation of the lever 28 will cause the limit shaft 29 at the other end to slide in the through groove, and the sliding seat 31 will slide in the limit groove plate 30 and be lifted, then the No. 1 gear plate 33 connected to the sliding seat 31 will move up and rotate the No. 1 gear 34 meshing therewith, and the No. 2 gear 35 coaxially fixedly connected to the No. 1 gear 34 will rotate synchronously.As a result, the second tooth plate 32 moves downward, and the combined airflow plate 4 will move downward, so that the convection fans 20 in the four guide ports 19 are fully exposed. When the sliding seat 31 moves, the sliding piece of the sliding rheostat 37 will move a corresponding distance. At this time, the resistance of the sliding rheostat 37 will decrease, and the sliding rheostat 37 will be connected in series with the circuit where the convection fan 20 is located. In this way, the power of the convection fan 20 will increase, and the airflow will be smoother. In this way, when facing different temperature stages, the device can fully adapt to it, which can avoid the thermal stress risk and inert gas leakage risk caused by the high-speed airflow in the preheating stage, and can also ensure that the heat distribution is improved by the high-speed airflow in the high-temperature maintenance stage. The feeding table 13 and the unloading table 14 realize the feeding and unloading functions accordingly, the conveyor mesh belt 15 can convey the material, and the temperature control panel 16 can control the temperature in the furnace in real time. The setting of the mounting plate 17 and the support feet can ensure the stability of the device.

[0032] The working principle of the present invention is:

[0033] The main sintering unit 1 and the auxiliary sintering unit 2 in the device have the same overall structure, except that a combined airflow plate 4 is provided in the main sintering unit 1. The main sintering unit 1 and the auxiliary sintering unit 2 cooperate to form a main furnace body. The feeding table 13 and the unloading table 14 realize the feeding and unloading functions correspondingly. The conveying mesh belt 15 can convey the materials. The temperature control panel 16 can control the temperature in the furnace in real time. The installation plate 17 and the support feet can ensure the stability of the device.

[0034] The three-dimensional airflow control mechanism can adjust the angles of the horizontal air regulating plate 11 and the vertical air regulating plate 9. The two active bevel gears 8 are controlled to rotate by the servo motor 7, and the driven bevel gear 6 meshing with the active bevel gear 8 can rotate, so that the adjusting worm 5 coaxially fixedly connected with the driven bevel gear 6 can rotate, and the first worm gear 10 and the second worm gear 12 meshing with the adjusting worm 5 can rotate. When the second worm gear 12 rotates, the sub-gear 39 coaxially fixedly connected thereto can rotate, and the main gear 38 meshing with the sub-gear 39 will drive the horizontal air regulating plate 11 to rotate, and the corresponding horizontal air regulating plate 11 and the vertical air regulating plate 9 will rotate. The angles of the air plates 9 are adjusted synchronously. The adjustable vertical air regulating plates 9 and horizontal air regulating plates 11 can help optimize the airflow distribution in the furnace, ensure that the heat is more evenly distributed on the product, and accelerate the heat transfer process, so that the heating and cooling rates are more in line with the process requirements. Good airflow management can help avoid local overheating or uneven cooling problems, reduce the possibility of defects such as cracks and delamination, and improve the yield rate. In addition, according to different sizes or types of DCB substrates, the angle and position of the air shield can be flexibly adjusted to meet the sintering conditions of specific products, thereby increasing the versatility and flexibility of the equipment.

[0035] Since nickel-titanium alloy is a shape memory alloy, when the temperature is lower than the critical temperature, the nickel-titanium alloy maintains deformation and maintains the martensitic phase. When the temperature is higher than the critical temperature, the nickel-titanium alloy restores its original shape and transforms into the austenitic phase. The critical temperature of nickel-titanium alloy is around 1000°C. When the device is transformed from the preheating stage to the high-temperature holding stage, the temperature needs to be increased from 500°C to 1000°C. Then, when the device is transformed from the preheating stage to the high-temperature holding stage, the length of the nickel-titanium alloy strip 26 will be transformed from the extended state to the original shape. Then, the length of the nickel-titanium alloy strip 26 will shrink, and the lever 28 will rotate a certain angle on the rotating support 27, and the corresponding composite slide 23 will also slide a certain distance on the sliding shaft 22. The rotation of the lever 28 will cause the limit shaft 29 at the other end to slide in the through groove, and cause the sliding seat 31 to slide in the limit groove plate 30 and be lifted, then the No. 1 tooth plate 33 connected to the sliding seat 31 will move up and cause the No. 1 gear 34 meshing therewith to rotate, and the No. 1 gear ... The second gear 35 coaxially fixedly connected to the first gear 34 will rotate synchronously, so that the second gear plate 32 will move down, and then the combined airflow plate 4 will move down, so that the convection fans 20 in the four guide ports 19 will be fully exposed. When the sliding seat 31 moves, the sliding piece of the sliding rheostat 37 will move a corresponding distance. At this time, the resistance of the sliding rheostat 37 will decrease, and the sliding rheostat 37 will be connected in series with the circuit where the convection fan 20 is located. In this way, the power of the convection fan 20 will increase and the airflow will be smoother. In this way, when facing different temperature stages, the device can fully adapt, which can avoid the thermal stress risks and inert gas leakage risks brought by the high-speed airflow in the preheating stage, and can also ensure that the heat distribution is improved by the high-speed airflow in the high temperature maintenance stage. The feeding table 13 and the unloading table 14 realize the feeding and unloading functions accordingly, the conveyor belt 15 can convey the materials, the temperature control panel 16 can control the temperature in the furnace in real time, and the setting of the mounting plate 17 and the support feet can ensure the stability of the device.

[0036] The preferred embodiments of the present invention are described in detail above, but the present invention is not limited to the above embodiments. Various changes can be made within the knowledge scope of ordinary technicians in this field without departing from the purpose of the present invention.

Claims

1. An open sintering furnace for a DCB copper-clad ceramic substrate, characterized in that: include: A main sintering unit (1), wherein both sides of the main sintering unit (1) are fixedly connected to auxiliary sintering units (2), the main sintering unit (1) and the auxiliary sintering unit (2) each comprise three adjustable sintering furnace bodies (3), both sides of the main sintering unit (1) are provided with combined airflow plates (4), a three-dimensional airflow control mechanism is provided in the adjustable sintering furnace body (3), and a temperature control adjustment mechanism is provided in the main sintering unit (1); The temperature control mechanism comprises two pairs of adjustment housings (18) arranged in the main sintering unit (1), the two adjustment housings (18) being fixedly connected to two ends of a combined airflow plate (4) respectively, the combined airflow plate (4) being provided with four guide ports (19), the guide ports (19) being provided with convection fans (20), and the combined airflow plate (4) being slidably connected to the main sintering unit (1); The three-dimensional airflow control mechanism comprises two adjusting worms (5) rotatably connected to the body (3) of the adjustable sintering furnace, one side of the adjusting worms (5) is coaxially fixedly connected to a driven bevel gear (6), a servo motor (7) is built in the body (3) of the adjustable sintering furnace, two driving bevel gears (8) are coaxially fixedly connected to the output end of the servo motor (7), the driving bevel gear (8) and the driven bevel gear (6) on the corresponding side are meshed with each other, four vertical air regulating plates (9) are rotatably connected to the inner walls of both sides of the body (3) of the adjustable sintering furnace, and the rotating shafts of the vertical air regulating plates (9) are coaxially fixedly connected to A first worm gear (10), the first worm gear (10) meshing with an adjusting worm (5) on a corresponding side, three transverse air regulating plates (11) rotatably connected to the inner top of the adjustable sintering furnace body (3), both ends of the rotating shaft of the transverse air regulating plates (11) are coaxially fixedly connected to a main gear (38), a sub-gear (39) rotatably connected to a position corresponding to the main gear (38) in the adjustable sintering furnace body (3), the sub-gear (39) meshing with the main gear (38), the sub-gear (39) coaxially fixedly connected to a second worm gear (12), the second worm gear (12) and the adjusting worm (5) meshing with each other.

2. The open sintering furnace for a DCB copper-clad ceramic substrate according to claim 1, characterized in that: A feeding platform (13) and a discharging platform (14) are fixedly connected to the sides of the two auxiliary sintering units (2) that are away from each other, respectively; a conveyor mesh belt (15) is provided between the feeding platform (13) and the discharging platform (14); a temperature control panel (16) is provided on one of the two auxiliary sintering units (2); a mounting plate (17) is fixedly connected to the bottom of the main sintering unit (1) and the two auxiliary sintering units (2); and a plurality of legs are fixedly connected to the bottom of the mounting plate (17).

3. The open sintering furnace for a DCB copper-clad ceramic substrate according to claim 2, characterized in that: A limit plate (21) is fixedly connected to the bottom of the regulating housing (18); two sliding shafts (22) are fixedly connected to the limit plate (21); a composite slide plate (23) is slidably connected to the two sliding shafts (22); four limit angle plates (24) are fixedly connected to the composite slide plate (23); a sliding port (25) is slidably connected to the four limit angle plates (24); a nickel-titanium alloy strip (26) is fixedly connected to the bottom of the sliding port (25); and one end of the nickel-titanium alloy strip (26) away from the sliding port (25) is fixedly connected to the composite slide plate (23).

4. The open sintering furnace for a DCB copper-clad ceramic substrate according to claim 3, characterized in that: The inner bottom of the adjustment housing (18) is fixedly connected to a rotating support (27), a lever (28) is rotatably connected to the rotating support (27), the sliding port (25) and the lever (28) are connected via a ceramic fiber rope, and a limit axis (29) is provided at one end of the lever (28) away from the sliding port (25).

5. The open sintering furnace for a DCB copper-clad ceramic substrate according to claim 4, characterized in that: The inner bottom of the adjustment housing (18) is fixedly connected to a limit slot plate (30), a sliding seat (31) is slidably connected inside the limit slot plate (30), a through slot is provided on the sliding seat (31), the limit shaft (29) is slidably connected in the through slot, a sliding rheostat (37) is fixedly connected inside the limit slot plate (30), the sliding seat (31) is fixedly connected to a sliding plate of the sliding rheostat (37), a first gear plate (33) is fixedly connected to one side of the sliding seat (31), and a first gear is rotatably connected to the inner wall of the adjustment housing (18). (34), the first gear (34) is coaxially fixedly connected with the second gear (35), the first tooth plate (33) and the first gear (34) are meshed with each other, a limit frame (36) is fixedly connected to the side wall of the adjustment housing (18), a second tooth plate (32) is slidably connected in the limit frame (36), the second tooth plate (32) and the second gear (35) are meshed with each other, a notch is opened on the side wall of the adjustment housing (18) corresponding to the limit frame (36), the second tooth plate (32) passes through the notch and is fixedly connected to the combined airflow plate (4).

Citation Information

Patent Citations

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