Band saw crystal bar cutting device and band saw crystal bar cutting method

Abstract

The invention relates to a band saw crystal bar cutting device and a band saw crystal bar cutting method.The band saw crystal bar cutting device comprises a band saw, a belt wheel driving the band saw to rotate so as to cut a crystal bar, and an adjusting assembly at least comprising two guide blocks arranged on the two opposite sides of the band saw in the first direction; the two guide blocks are used for limiting the position of the band saw, and the first direction is perpendicular to the cutting direction of the band saw; the distance sensors are arranged on at least one side of the band saw in the first direction, the distance sensors are used for obtaining current position information of the band saw in real time, and the current position information comprises the distance between the band saw and the corresponding guide block in the first direction; the processing structure is used for comparing the current position information of the band saw with the initial position information of the band saw, and outputting an execution signal when the current position information does not accord with the initial position information; and the movement control structure is used for adjusting the position of the guide block according to the execution signal, so that the current position information of the band saw conforms to the initial position information.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor product manufacturing, and in particular to a band saw crystal rod cutting device and a band saw crystal rod cutting method. Background Art

[0002] The method of making single crystal silicon is usually to first make polycrystalline silicon or amorphous silicon, and then grow rod-shaped single crystal silicon from the melt by the Czochralski method or the floating zone melting method. When the molten elemental silicon solidifies, the silicon atoms are arranged into many crystal nuclei in a diamond lattice. If these crystal nuclei grow into grains with the same crystal plane orientation, these grains will be combined in parallel to crystallize into single crystal silicon. Single crystal silicon, also known as silicon single crystal, is the most basic material in the electronic information material and photovoltaic industry, and belongs to the semiconductor material category. Single crystal silicon has penetrated into various fields of national economy and national defense science and technology.

[0003] Traditionally, single crystal silicon rods are cut using a band saw. During the process of cutting the crystal rods, the saw blade often deviates, causing the cut surface of the crystal rod to tilt, and the cut silicon wafers cannot be used normally. When dealing with this problem, it is necessary to manually adjust the guide block and then try cutting to determine the adjustment result, which wastes materials and affects the production capacity of the equipment. Summary of the invention

[0004] In order to solve the above technical problems, the present invention provides a band saw crystal rod cutting device and a band saw crystal rod cutting method to solve the problem that the cut silicon wafers cannot be used normally due to the deviation of the band saw during the cutting process.

[0005] In order to achieve the above-mentioned object, the technical solution adopted in the embodiment of the present invention is: a band saw crystal rod cutting device, including a band saw and a pulley for driving the band saw to rotate to cut the crystal rod, and also including:

[0006] An adjustment assembly, comprising at least two guide blocks arranged on opposite sides of the band saw in a first direction, the two guide blocks being used to limit the position of the band saw, the first direction being perpendicular to the cutting direction of the band saw;

[0007] A distance sensor is provided on at least one side of the band saw in the first direction, and the distance sensor is used to obtain current position information of the band saw in real time, wherein the current position information includes the distance between the band saw and the corresponding guide block in the first direction;

[0008] a processing structure, for comparing the current position information of the band saw with the initial position information of the band saw, and outputting an execution signal when the current position information does not match the initial position information;

[0009] The mobile control structure is used to adjust the position of the guide block according to the execution signal so that the current position information of the band saw is consistent with the initial position information.

[0010] Optionally, the movement control structure includes two movement components for respectively controlling the movement of the two guide blocks, and the movement components include:

[0011] A slide rail, wherein the extending direction of the slide rail is perpendicular to the cutting direction of the band saw;

[0012] A sliding connection member, the sliding connection member comprises a first end and a second end arranged opposite to each other, the first end is provided with a first connection member for connecting with the guide block, and the second end is provided with a second connection member for sliding connection with the slide rail;

[0013] The movement control part is used to control the sliding connection member to move along the extension direction of the slide rail.

[0014] Optionally, the movement control unit includes a motor, and the motor is transmission-connected to the sliding connection member via a screw rod, and an extension direction of the screw rod is parallel to an extension direction of the slide rail.

[0015] Optionally, a receiving groove is provided at the first end of the sliding connector, the guide block is partially received in the receiving groove, and the opening of the receiving groove is arranged toward the band saw.

[0016] Optionally, the distance sensor is provided at the first end of the sliding connection.

[0017] Optionally, the band saw has a center line extending along a second direction, the second direction is perpendicular to the cutting direction of the band saw, and the second direction is perpendicular to the first direction;

[0018] In the cutting direction of the band saw, at least one distance sensor is disposed on opposite sides of the center line.

[0019] Optionally, the band saw has a center line extending along a second direction, and a plurality of the distance sensors are spaced apart in the second direction.

[0020] Optionally, during the crystal rod cutting process, the guide block is in contact with the band saw, and the pressure between the guide block and the band saw is zero.

[0021] Optionally, the guide block is made of graphite.

[0022] The embodiment of the present invention further provides a band saw crystal ingot cutting method, which is applied to the above-mentioned band saw crystal ingot cutting device, comprising:

[0023] In the process of cutting the crystal rod by the band saw, the current position information of the band saw is obtained in real time;

[0024] The current position information is compared with the initial position information of the band saw. When the current position information does not match the initial position information of the band saw, the position of the guide block is adjusted to make the current position information of the band saw match the initial position information of the band saw.

[0025] The beneficial effects of the present invention are as follows: a distance sensor is set to obtain the current position information of the band saw in real time, a processing structure compares the current position information of the band saw with the initial position information of the band saw, and when the current position information does not match the initial position information, a mobile control structure adjusts the position of the guide block so that the current position information of the band saw matches the initial position information, thereby timely detecting whether the band saw is offset, and timely adjusting the offset band saw, reducing the inclination of the cutting surface of the crystal rod caused by the swing of the band saw during the cutting process, thereby improving the cutting quality and reducing material loss caused by the inclination of the cutting surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A schematic diagram showing a band saw cutting device in an embodiment of the present invention;

[0027] Figure 2 A schematic diagram showing the state in which the guide block limits the band saw;

[0028] Figure 3 A schematic diagram showing the positional relationship between the guide block and the band saw;

[0029] Figure 4 A schematic diagram showing a mobile control structure;

[0030] Figure 5 A schematic diagram of the mobile control structure is shown. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0032] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0033] The features such as "parallel", "perpendicular", and "same" used in the embodiments of the present disclosure include the features such as "parallel", "perpendicular", and "same" in a strict sense, as well as the cases where "approximately parallel", "approximately perpendicular", "approximately the same", etc. include certain tolerances, taking into account the tolerances associated with the measurement of specific quantities (e.g., the limitations of the measurement system), and represent the acceptable deviation range for a specific value determined by ordinary technicians in the field. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the value.

[0034] During the cutting process, the band saw cuts the crystal rod driven by the high-speed rotation of the pulley. During the cutting process, the band saw will swing, and the guide block clamping the band saw will wear, which will cause the band saw to shift (including angle shift and position shift). The shift of the band saw will cause abnormal cutting of the crystal rod, resulting in material waste.

[0035] In response to the above problems, the present embodiment provides a band saw crystal rod cutting device, which is provided with a distance sensor, and can obtain the current position information of the band saw in real time. The processing structure compares the current position information of the band saw with the initial position information of the band saw. When the current position information does not match the initial position information, the mobile control structure adjusts the position of the guide block to make the current position information of the band saw consistent with the initial position information, so that it can be discovered in time whether the band saw is offset, and the offset band saw can be adjusted in time, thereby reducing the inclination of the cutting surface of the crystal rod caused by the swing of the band saw during the cutting process, thereby improving the cutting quality and reducing material loss caused by the inclination of the cutting surface.

[0036] refer to Figure 1-Figure 5Specifically, the band saw crystal rod cutting device provided in this embodiment includes a band saw 2 and a pulley 1 driving the band saw 2 to rotate to cut the crystal rod 3, and also includes:

[0037] The adjustment component includes at least one Figure 1 The two guide blocks 4 are arranged on opposite sides of the band saw 2 in the X direction, and the two guide blocks 4 are used to limit the position of the band saw 2. The first direction is consistent with the cutting direction of the band saw 2 (reference Figure 1 The Z direction is perpendicular to the

[0038] A distance sensor 5 is provided on at least one side of the band saw 2 in the first direction, and the distance sensor 5 is used to obtain the current position information of the band saw 2 in real time, and the current position information includes the distance between the band saw 2 and the corresponding guide block 4 in the first direction;

[0039] A processing structure, used for comparing the current position information of the band saw 2 with the initial position information of the band saw 2, and outputting an execution signal when the current position information does not match the initial position information;

[0040] The mobile control structure is used to adjust the position of the guide block 4 according to the execution signal so that the current position information of the band saw 2 is consistent with the initial position information.

[0041] It should be noted that in the initial cutting state (i.e. the pulley 1 is not started, the band saw 2 and the crystal rod 3 are both at the preset cutting position), the guide block 4 is used to limit the band saw 2, and the guide block 4 is in contact with the band saw 2, but the pressure between the guide block 4 and the band saw 2 is zero, so as to avoid increasing the friction between the band saw 2 and affecting the movement of the band saw 2. During the cutting process, the guide block 4 is still needed to limit the band saw 2, that is, in an ideal state, during the cutting process, the relative position relationship between the guide block 4 and the band saw 2 remains unchanged, and in the first direction perpendicular to the cutting direction, the position of the band saw 2 remains unchanged, and the position of the guide block 4 remains unchanged. However, as the crystal rod 3 is cut, the band saw 2 is always driven by the pulley 1 to rotate at a high speed, and swinging and the like will occur, which will also cause certain wear to the guide block 4, so that the band saw 2 will be offset, the angle will be offset or the cutting position will be offset, that is, the current position information of the band saw 2 will change.

[0042] In order to avoid cutting anomalies caused by changes in the current position information of the band saw 2, in this embodiment, a distance sensor 5 is set to obtain the current position information of the band saw 2 in real time. When the current position information of the band saw 2 changes (that is, it is inconsistent with the initial position information), the mobile control structure adjusts the position of the guide block 4 according to the execution signal so that the current position information of the band saw 2 is consistent with the initial position information. For example, the initial position information of the band saw 2 at least includes that the distance between at least one of the guide blocks 4 and the band saw 2 is zero. If during the cutting process, the distance sensor 5 detects that the distance between one of the two guide blocks 4 and the band saw 2 is greater than zero, it means that the band saw 2 is offset, and the mobile control structure adjusts the position of the corresponding guide block 4 so that the distance between the guide block 4 and the band saw 2 is restored to zero.

[0043] It should be noted that the current position information of the band saw 2 may include the distance between the band saw 2 and the corresponding distance sensor 5 (here refers to the distance in the first direction).

[0044] In order to improve the detection accuracy, the distance sensor 5 and the guide block 4 can be set in a one-to-one correspondence, that is, one distance sensor 5 is set for each guide block 4. In the initial cutting state, the initial position information is set, for example, the distance between the guide block 4 and the band saw 2 in the first direction is set (for example, the guide block 4 is in contact with the band saw 2), and the distance between the distance sensor 5 and the band saw 2 in the first direction. Then, as long as the distance between the distance sensor 5 and the band saw 2 changes during the cutting process, it means that the distance between the corresponding guide block 4 and the band saw 2 changes. At this time, the band saw 2 can be adjusted by adjusting the position of the guide block 4 accordingly.

[0045] In an exemplary embodiment, in order to improve detection accuracy, the distance sensors 5 are disposed on two opposite sides of the band saw 2 in the first direction.

[0046] In an exemplary embodiment, the adjustment assembly includes two guide blocks 4 arranged in pairs. In the first direction, the two guide blocks 4 include a first guide block and a second guide block, and are respectively located on opposite sides of the band saw 2. Two distance sensors 5 are arranged in a one-to-one correspondence with the two guide blocks 4. In the first direction, the two distance sensors 5 include a first distance sensor and a second distance sensor, and are respectively located on opposite sides of the band saw 2. The orthographic projection of the first guide block on the band saw 2 can completely overlap with the orthographic projection of the second guide block on the band saw 2, and the orthographic projection of the first distance sensor on the band saw 2 completely overlaps with the orthographic projection of the second distance sensor on the band saw 2. In the initial cutting state, the first guide block and the second guide block are in contact with the band saw 2, respectively. At this time, the distance between the first distance sensor and the band saw 2 is a first distance, and the distance between the second distance sensor and the band saw 2 is a second distance. The first distance and the second distance can be the same or different. During the cutting process of the crystal rod 3, if the band saw 2 is shifted in the first direction, the first distance sensor detects that the distance between the band saw 2 and it is reduced, and the second distance sensor detects that the distance between the band saw 2 and it is increased. At this time, the band saw 2 can be restored to its original position by adjusting the position of the first guide block.

[0047] It should be noted that the offset of the band saw 2 may be an offset in position in the first direction, and the surface of the band saw 2 remains parallel to the preset cutting direction (i.e., the surface of the band saw 2 is parallel to the radial direction of the crystal rod 3). In this case, it is only necessary to control the movement of the guide block 4 to control the movement of the band saw 2 in the first direction. In some embodiments, the offset of the band saw 2 may also be an angular offset, i.e., the band saw 2 is tilted, and its cutting direction is offset from the preset cutting direction. In this case, it is also necessary to adjust the rotation of the band saw 2 so that the band saw 2 returns to its original position (i.e., the initial cutting state).

[0048] In an exemplary embodiment, in the cutting direction of the band saw 2, the length of the guide block 4 is greater than or equal to the length of the band saw 2. At this time, the movement control structure includes a first moving unit that can control the movement of the guide block 4 in the first direction, and a second moving unit that can control the rotation of the guide block 4 in the first plane. The first plane is perpendicular to the surface of the band saw 2. By controlling the guide block 4 to rotate in the first plane, the angle of the band saw 2 can be adjusted so that the surface of the band saw 2 is parallel to the initial cutting direction, that is, parallel to the radial direction of the crystal rod 3.

[0049] In an exemplary embodiment, in the cutting direction of the band saw 2, the length of the guide block 4 is less than half the length of the band saw 2. In this case, two pairs of guide blocks 4 may be arranged at intervals in the cutting direction of the band saw 2, and each pair of guide blocks 4 includes two guide blocks 4 arranged on opposite sides of the band saw 2 in the first direction;

[0050] The band saw 2 has a second direction (reference Figure 1 The second direction is perpendicular to the cutting direction of the band saw 2, and the second direction is perpendicular to the first direction;

[0051] In the cutting direction of the band saw 2 , the two pairs of guide blocks 4 are respectively arranged on both sides of the center line.

[0052] By adopting the above scheme, if the position of the band saw 2 is offset in the first direction, the guide block 4 located on the same side of the band saw 2 in the first direction can be controlled at the same time to correct the position of the band saw 2. If the band saw 2 is angularly offset, the movement of part of the guide block 4 can be controlled to correct the position of the band saw 2.

[0053] It should be noted that, in the cutting direction of the band saw 2, when the two pairs of guide blocks 4 are respectively arranged on both sides of the center line, in the cutting direction of the band saw 2, at least one distance sensor 5 is arranged on the opposite sides of the center line. Preferably, the number of the distance sensors 5 is the same as the number of the guide blocks 4, and at least one distance sensor 5 is arranged in a one-to-one correspondence with at least one guide block 4.

[0054] In an exemplary embodiment, the band saw 2 has a center line extending along the second direction, a plurality of distance sensors 5 are arranged at intervals in the second direction, and a plurality of pairs of guide blocks 4 are arranged at intervals in the second direction.

[0055] By adopting the above solution, the calibration accuracy of the band saw 2 can be improved, and poor cutting caused by deviation of a local area of ​​the band saw 2 can be avoided.

[0056] In an exemplary embodiment, the movement control structure includes two movement components for respectively controlling the movement of the two guide blocks 4, and the movement components include:

[0057] A slide rail 7, wherein the extending direction of the slide rail 7 is perpendicular to the cutting direction of the band saw 2;

[0058] A sliding connection member 6, the sliding connection member 6 comprises a first end and a second end arranged opposite to each other, the first end is provided as a first connection member for connecting to the guide block 4, and the second end is provided as a second connection member for sliding connection to the slide rail 7;

[0059] The movement control unit is used to control the sliding connection member 6 to move along the extension direction of the slide rail 7.

[0060] In an exemplary embodiment, the movement control unit includes a motor 8 , and the motor 8 is transmission-connected to the sliding connection member 6 via a screw rod 9 . The extending direction of the screw rod 9 is parallel to the extending direction of the slide rail 7 .

[0061] In an exemplary embodiment, a receiving groove is provided at the first end of the sliding connection member 6 , the guide block 4 is partially received in the receiving groove, and the opening of the receiving groove is arranged toward the band saw 2 .

[0062] Exemplarily, the guide block 4 is fixed in the receiving groove by bolts. A mounting groove is provided on the guide block 4, and a screw connection groove for the screw rod 9 of the bolt to pass through is provided at the bottom of the mounting groove, so that when the guide block 4 is fixed by bolts, the nut of the bolt can be accommodated in the mounting groove to avoid contact with the band saw 2.

[0063] In an exemplary embodiment, the moving assembly further includes a rotation movement control unit connected to the slide rail 7 to control the rotation of the guide block 4 .

[0064] In an exemplary embodiment, the accommodating groove is a through groove with openings at both ends, and a rotational movement control unit is connected to a side of the guide block 4 away from the band saw 2 for controlling the guide block 4 to perform rotational movement.

[0065] In an exemplary embodiment, the distance sensor 5 is disposed at the first end of the sliding connection 6 .

[0066] When the distance sensor 5 detects that the current position information of the band saw 2 is inconsistent with the initial position information, the band saw 2 is corrected by controlling the movement of the guide block 4. The distance sensor 5 is provided at the first end of the sliding connection member 6, so that the band saw 2 can be corrected by moving the guide block 4. For example, when the distance sensor 5 detects that the distance between the band saw 2 and it increases, after the band saw 2 is corrected, the distance between the band saw 2 and the distance sensor 5 is also restored to the initial value, so that there is no need to obtain the position information between the distance sensor 5 and the band saw 2 again, and it is only necessary to use the initial value set in the initial cutting state as a reference value, thereby simplifying the correction process.

[0067] In an exemplary embodiment, the guide block 4 is made of graphite.

[0068] The guide block 4 is made of graphite, which can increase the lubrication performance of the guide block 4, eliminate static electricity, and avoid increasing the friction between the band saw 2 and the guide block 4.

[0069] The embodiment of the present invention further provides a band saw 2 crystal rod 3 cutting method, which is applied to the above-mentioned band saw crystal rod cutting device, comprising:

[0070] The guide block 4 is controlled to move so as to make the guide block 4 contact with the band saw 2 (zero pressure contact), and the initial distance between the guide block 4 and the band saw 2 in the first direction is acquired through the distance sensor 5 .

[0071] Starting the belt wheel 1 to drive the band saw 2 to rotate at high speed;

[0072] Controlling the pulley 1 and / or the crystal rod 3 to move toward each other to cut the crystal rod 3;

[0073] In the process of cutting the crystal rod 3 by the band saw 2, the current position information of the band saw 2 is obtained in real time;

[0074] The current position information is compared with the initial position information of the band saw 2 . When the current position information does not match the initial position information of the band saw 2 , the position of the guide block 4 is adjusted to make the current position information of the band saw 2 match the initial position information of the band saw 2 .

[0075] There are a few points to note:

[0076] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure, and other structures may refer to the general design.

[0077] (2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced, that is, these drawings are not drawn according to the actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or there may be intermediate elements.

[0078] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0079] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A band saw crystal ingot cutting device, comprising a band saw and a pulley for driving the band saw to rotate to cut the crystal ingot, characterized in that: Also includes: An adjustment assembly, comprising at least two guide blocks arranged on opposite sides of the band saw in a first direction, the two guide blocks being used to limit the position of the band saw, the first direction being perpendicular to the cutting direction of the band saw; A distance sensor is provided on at least one side of the band saw in the first direction, and the distance sensor is used to obtain current position information of the band saw in real time, wherein the current position information includes the distance between the band saw and the corresponding guide block in the first direction; a processing structure, for comparing the current position information of the band saw with the initial position information of the band saw, and outputting an execution signal when the current position information does not match the initial position information; The mobile control structure is used to adjust the position of the guide block according to the execution signal so that the current position information of the band saw is consistent with the initial position information.

2. The band saw crystal rod cutting device according to claim 1, characterized in that: The movement control structure comprises two movement components for respectively controlling the movement of the two guide blocks, and the movement components comprise: A slide rail, wherein the extending direction of the slide rail is perpendicular to the cutting direction of the band saw; A sliding connection member, the sliding connection member comprises a first end and a second end arranged opposite to each other, the first end is provided with a first connection member for connecting with the guide block, and the second end is provided with a second connection member for sliding connection with the slide rail; The movement control part is used to control the sliding connection member to move along the extension direction of the slide rail.

3. The band saw crystal rod cutting device according to claim 2, characterized in that: The movement control part comprises a motor, and the motor is transmission-connected to the sliding connection member via a screw rod, and an extending direction of the screw rod is parallel to an extending direction of the slide rail.

4. The band saw crystal rod cutting device according to claim 2, characterized in that: The first end of the sliding connection member is provided with a receiving groove, the guide block portion is received in the receiving groove, and the opening of the receiving groove is arranged toward the band saw.

5. The band saw crystal rod cutting device according to claim 2, characterized in that: The distance sensor is disposed at the first end of the sliding connection.

6. The band saw crystal rod cutting device according to claim 1, characterized in that: The band saw has a center line extending along a second direction, the second direction is perpendicular to the cutting direction of the band saw, and the second direction is perpendicular to the first direction; In the cutting direction of the band saw, at least one distance sensor is disposed on opposite sides of the center line.

7. The band saw crystal rod cutting device according to claim 1, characterized in that: The band saw has a center line extending along a second direction, and a plurality of the distance sensors are arranged at intervals in the second direction.

8. The band saw crystal rod cutting device according to claim 1, characterized in that: During the crystal rod cutting process, the guide block is in contact with the band saw, and the pressure between the guide block and the band saw is zero.

9. The band saw crystal rod cutting device according to claim 1, characterized in that: The guide block is made of graphite.

10. A band saw crystal ingot cutting method, applied to the band saw crystal ingot cutting device according to any one of claims 1 to 9, characterized in that: include: In the process of cutting the crystal rod by the band saw, the current position information of the band saw is obtained in real time; The current position information is compared with the initial position information of the band saw. When the current position information does not match the initial position information of the band saw, the position of the guide block is adjusted to make the current position information of the band saw match the initial position information of the band saw.

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