Opening and closing device for vacuum cavity of triple quadrupole mass spectrometer

Abstract

The invention relates to an opening and closing device for a vacuum cavity of a triple quadrupole mass spectrometer, and belongs to the technical field of vacuum mass spectrometers, the opening and closing device comprises a shell, an ion guide cavity Q0 and an ion mass analysis cavity Q1 are formed in the shell, a vacuum spacer is arranged between the ion guide cavity Q0 and the ion mass analysis cavity Q1, and the ion guide cavity Q0 is communicated with the ion mass analysis cavity Q1. A through hole for ions to penetrate through is formed in the middle of the vacuum spacer, the vacuum spacer is connected with an opening and closing device, the opening and closing device comprises a locking plate rotationally connected to the vacuum spacer, a round hole is formed in the locking plate, the inner diameter of the round hole is the same as that of the through hole, a round sealing plate is arranged on the locking plate, and the opening and closing device is connected with the opening and closing device. The diameter of the sealing plate is the same as that of the through hole, a driving mechanism is connected to the locking plate, and the driving mechanism is used for driving the locking plate to rotate until the sealing plate is clamped in the through hole or the round hole is communicated with the through hole. The ion mass analysis chamber cleaning device has the advantages that when the mass analysis chamber Q0 is cleaned, the low vacuum state of the ion mass analysis chamber Q1 is kept, so that time is saved, and the test efficiency is improved.

Description

Technical Field

[0001] The present application relates to the technical field of mass spectrometers, and in particular to an opening and closing device for a vacuum cavity of a triple quadrupole mass spectrometer. Background Art

[0002] In recent years, as the requirements for sample analysis accuracy in scientific experiments and industrial testing continue to increase, mass spectrometers, especially triple quadrupole mass spectrometers, have been used more and more widely. The core of this type of equipment lies in its high sensitivity and accuracy, which in turn is highly dependent on the cleanliness of the system. Currently, in terms of mass spectrometer maintenance, ensuring the cleanliness of the vacuum chamber has become one of the key factors in improving instrument performance.

[0003] In the daily use of triple quadrupole mass spectrometers, refer to Figure 1 The triple quadrupole mass spectrometer includes a shell 1, in which an ion guide cavity Q0 and an ion mass analysis cavity Q1 are provided, a vacuum diaphragm 11 is provided between the ion guide cavity Q0 and the ion mass analysis cavity Q1, and a through hole 12 for ions to pass through is provided in the middle of the vacuum diaphragm 11. It is a routine operation to maintain and clean the ion source and the ion guide cavity Q0, but when cleaning the ion guide cavity Q0, the current instruments on the market need to release the vacuum of the ion mass analysis cavity Q1 before cleaning can be performed. After cleaning, the ion mass analysis cavity Q1 needs to be vacuumed again, and generally, it takes at least 12 hours of vacuuming overnight before the mass spectrometer can be used normally.

[0004] In order to reduce the tedious process of cleaning the mass analysis chamber Q0, there is no need to re-evacuate the ion mass analysis chamber Q1, and at the same time avoid possible damage to the instrument caused by turning the machine on and off, a device that can lock the entrance of the vacuum chamber of the ion mass analysis chamber Q1 is designed. By installing the locking device, the low vacuum state of the ion mass analysis chamber Q1 can be maintained when the mass analysis chamber Q0 is cleaned. After the cleaning is completed, the device can be opened to restore to normal. Therefore, designing a locking device that can maintain the low vacuum state of the ion mass analysis chamber Q1 is a problem that needs to be solved urgently. Summary of the invention

[0005] In order to maintain the low vacuum state of the ion mass analysis chamber Q1 when cleaning the mass analysis chamber Q0, thereby saving time and improving test efficiency, the present application provides an opening and closing device for the vacuum chamber of a triple quadrupole mass spectrometer.

[0006] The present application provides a triple quadrupole mass spectrometer vacuum chamber opening and closing device using the following technical solution: A triple quadrupole mass spectrometer vacuum chamber opening and closing device comprises a shell, wherein an ion guide chamber Q0 and an ion mass analysis chamber Q1 are provided in the shell, a vacuum diaphragm is provided between the ion guide chamber Q0 and the ion mass analysis chamber Q1, a through hole for ions to pass through is provided in the middle of the vacuum diaphragm, an opening and closing device is connected to the vacuum diaphragm, the opening and closing device comprises a locking plate rotatably connected to the vacuum diaphragm, a circular hole is provided on the locking plate, the inner diameters of the circular hole and the through hole are the same, a circular sealing plate is provided on the locking plate, the diameter of the sealing plate is the same as the diameter of the through hole, a driving mechanism is connected to the locking plate, and the driving mechanism is used to drive the locking plate to rotate until the sealing plate is engaged in the through hole or the circular hole is connected to the through hole.

[0007] By adopting the above technical solution, when the user uses it, during the test, the driving mechanism drives the locking plate to rotate until the circular hole coincides with the through hole, so that the through hole can be opened without affecting the passage of ions through the through hole. When the ion guide cavity Q0 needs to be cleaned, the driving mechanism drives the locking plate to rotate until the sealing plate abuts against the through hole, so that the through hole can be closed, thereby separating the ion guide cavity Q0 and the ion mass analysis cavity Q1. When cleaning the mass analysis cavity Q0, the low vacuum state of the ion mass analysis cavity Q1 is maintained, thereby saving vacuum pumping time and improving test efficiency.

[0008] Optionally, the driving mechanism includes a connecting rod hinged on the locking plate, a pull rod is hinged on one end of the connecting rod away from the locking plate, a driving component for driving the pull rod to swing is connected to the pull rod, and a limit column is fixedly connected to the vacuum diaphragm, and the limit column is used to limit the pull rod.

[0009] By adopting the above technical solution, when the user uses it, when the driving component pulls the pull rod to move, the pull rod drives the locking plate to rotate, so that the locking plate rotates until the sealing plate is engaged in the through hole and stops rotating. The limit column realizes the rotation of the locking plate angle by limiting the pull rod.

[0010] Optionally, the driving assembly includes a positioning block fixedly connected to the vacuum diaphragm, an air intake cylinder is fixedly connected in the positioning block, a piston plate is slidably connected in the air intake cylinder, one end of the air intake cylinder is fixedly connected to an air intake pipe, one end of the air intake pipe extends out of the shell and is fixedly connected to an air valve, the air valve is used to inhale air into the air intake pipe, and can also discharge the air in the air intake pipe to the outside, the end of the air intake cylinder away from the air intake pipe is open, the end of the piston plate away from the air intake pipe is fixedly connected to a sliding rod, and the end of the sliding rod away from the piston plate is fixedly connected to a pull rod; a notch groove is provided in the positioning block, the sliding rod is located in the notch groove, the end of the pull rod extends into the notch groove, and the notch groove is connected to the ion guide cavity Q0.

[0011] By adopting the above technical solution, when the user uses it, he opens the air valve, and air enters the air intake cylinder through the air intake pipe. The air pushes the piston plate to slide, which can push the sliding rod to slide, and the sliding rod drives the pull rod to slide. The pull rod drives the locking plate to rotate through the connecting rod, so that the sealing plate slides in the direction of the through hole. When the piston plate slides to the end of the air intake pipe, the sealing plate slides to the position of the through hole, but is not completely closed with the through hole, thereby realizing the pilot drive of the sealing plate. After the piston plate slides out of the air intake cylinder, the sealing plate is completely fitted with the through hole, and the air in the air intake cylinder enters the notch groove, so that the pressure in the ion guide cavity Q0 is greater than the pressure in the ion mass analysis cavity Q1, so that the arc surface of the sealing plate is pressed tightly against the inner wall of the through hole.

[0012] Optionally, a reset cylinder is fixedly connected inside the positioning block, a sealing plug is slidably connected inside the reset cylinder, the reset cylinder is open at one end close to the pull rod, a push rod is fixedly connected to the pull rod, the push rod extends into the reset cylinder and is fixedly connected to the sealing plug, the side of the reset cylinder away from the push rod is in a vacuum state, a connecting hole is provided at one end of the reset cylinder away from the push rod, and the connecting hole is connected to the ion mass analysis chamber Q1.

[0013] By adopting the above technical solution, when the user uses it, when the sliding rod drives the pull rod to slide, the sliding rod pushes the push rod and the sealing plug to slide horizontally in the reset cylinder, which can guide and limit the pull rod and make the pull rod more stable during movement.

[0014] Optionally, the sealing plug is provided with a plurality of air-closing rings, which are distributed at equal intervals along the axial direction of the sealing plug and are arranged along the circumference of the sealing plug.

[0015] By adopting the above technical solution, when the user uses it, the air-closing ring leaves space for the sealing plug to deform during the sliding process, so that the sealing plug fits more closely with the inner wall of the reset tube, thereby increasing the sealing effect of the sealing plug.

[0016] Optionally, a rubber pad is fixedly connected to one end of the sealing plug near the connecting hole, a positioning column is fixedly connected to the rubber pad, a positioning hole is opened in the middle of the sealing plug, the positioning column is inserted into the positioning hole and can slide in the positioning hole, the rubber pad is fixed to the sealing plug near the edge, and a sealed cavity is formed between the rubber pad and the sealing plug.

[0017] By adopting the above technical solution, when the user uses it, when the push rod pushes the piston plate to slide in the reset cylinder, the piston plate squeezes the sealing cavity so that the sealing plug squeezes the air-closing ring, thereby making the sealing plug more stably abutting against the inner wall of the air guide cylinder and achieving a better sealing effect.

[0018] Optionally, a reset cavity is provided in the positioning block, a second reset spring is fixedly connected in the reset cavity, one reset cavity end of the second reset spring is fixed to the sliding rod, and the other end is fixedly connected to the bottom of the reset cavity.

[0019] By adopting the above technical solution, when the user uses it, after air enters the notch groove, the piston plate pushes the sliding rod to slide, the sliding rod squeezes the second reset spring, and the sliding rod drives the pull rod to slide, that is, it can push the push rod to push the sealing plug to slide in the reset cylinder, and the reset cylinder guides and limits the sealing plug, so that the push rod can slide more stably following the pull rod. Most importantly, after air enters the notch groove, it pushes the push rod to slide, and the push rod pushes the sealing plug to slide to the connecting hole, so that the pressure in the ion guide chamber Q0 is greater than the pressure in the ion mass analysis chamber Q1. When the air valve is pumped outward until both the ion guide chamber Q0 and the ion mass analysis chamber Q1 are vacuum, the second reset spring relaxes, driving the sliding rod to slide in the direction of the air inlet cylinder, the sliding rod drives the pull rod to slide, and pulls the locking plate to rotate in the opposite direction, so that the sealing plate is separated from the through hole, that is, it can automatically push the locking plate to rotate, and automatically open the through hole after cleaning is completed.

[0020] Optionally, the locking plate is fixedly connected to a positioning ring at the position of the sealing plate, a positioning rod is fixedly connected to the positioning ring, a guide hole is opened in the middle of the positioning rod, and a guide column is fixedly connected to the center of the sealing plate. The guide column passes through the guide hole, and one end of the guide column passing through the guide hole is fixedly connected to a limiting disk. A first return spring is sleeved on the guide column, one end of the first return spring is fixedly connected to the limiting disk, and the other end is fixedly connected to the sealing plate.

[0021] By adopting the above technical solution, when the user uses it, when the pressure of the ion guide chamber Q0 is greater than that of the ion mass analysis chamber Q1, the curved surface of the sealing plate is pressed against the inner wall of the through hole, and the sealing plate pulls the first return spring to stretch. When both the ion guide chamber Q0 and the ion mass analysis chamber Q1 are vacuum, the tension of the first return spring facilitates pulling the sealing plate apart from the vacuum diaphragm, thereby reducing the friction between the sealing plate and the vacuum diaphragm and facilitating pulling the locking plate to rotate until the sealing plate is separated from the through hole.

[0022] In summary, the present application includes at least one of the following beneficial technical effects: 1. An opening and closing device is connected to the vacuum diaphragm, wherein the opening and closing device comprises a locking plate rotatably connected to the vacuum diaphragm, a circular hole is opened on the locking plate, the inner diameter of the circular hole and the through hole are the same, a circular sealing plate is arranged on the locking plate, the diameter of the sealing plate is the same as the diameter of the through hole, and a driving mechanism is connected to the locking plate, the driving mechanism is used to drive the locking plate to rotate until the sealing plate is engaged in the through hole or the circular hole is connected to the through hole. During the test, the driving mechanism drives the locking plate to rotate until the circular hole and the through hole coincide with each other, that is, the through hole can be opened without affecting the passage of ions through the through hole. When the ion guide cavity Q0 needs to be cleaned, the driving mechanism drives the locking plate to rotate until the sealing plate abuts against the through hole, that is, the through hole can be closed, thereby separating the ion guide cavity Q0 from the ion mass analysis cavity Q1. When the mass analysis cavity Q0 is cleaned, the low vacuum state of the ion mass analysis cavity Q1 is maintained, thereby saving vacuum pumping time and improving test efficiency. 2. A notch groove is opened in the positioning block, the sliding rod is located in the notch groove, the end of the pull rod extends into the notch groove, the notch groove is connected to the ion guide chamber Q0, and a reset chamber is opened in the positioning block. A second reset spring is fixedly connected to the reset chamber. One reset chamber end of the second reset spring is fixed to the sliding rod, and the other end is fixedly connected to the bottom of the reset chamber. When air enters the notch groove, the piston plate pushes the sliding rod to slide, the sliding rod squeezes the second reset spring, the sliding rod drives the pull rod to slide, and drives the sealing plate to slide to the position of the through hole to close the through hole. When the air valve draws air outward until the ion guide chamber Q0 and the ion mass analysis chamber Q1 are both vacuum, the second reset spring relaxes, driving the sliding rod to slide toward the direction of the air inlet cylinder, the sliding rod drives the pull rod to slide, and pulls the locking plate to rotate in the opposite direction, so that the sealing plate is separated from the through hole, that is, it can automatically push the locking plate to rotate, and automatically open the through hole after cleaning is completed. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a background technology drawing; Figure 2 is a cross-sectional view of an embodiment of the present application; Figure 3 This is a cross-sectional view made by the present application to highlight the ion guide cavity, the vacuum septum and the ion mass analysis cavity; Figure 4 is a schematic diagram of the structure of the sealing plate; Figure 5 It is an exploded view of the vacuum diaphragm and the opening and closing device; Figure 6 This is a cross-sectional view made to highlight the vacuum diaphragm and the opening and closing device; Figure 7 yes Figure 6 Enlarged view of part A.

[0024] Description of reference numerals: 1, housing; 11, vacuum diaphragm; 12, through hole; 2, opening and closing device; 21, locking plate; 211, rotating shaft; 212, round hole; 213, sealing plate; 2131, arc surface; 214, positioning ring; 215, positioning rod; 2151, guide hole; 216, guide column; 217, limiting plate; 218, first return spring; 22, connecting rod; 23, pull rod; 24, limiting column; 25, driving assembly; 251, positioning block; 25 11. notch groove; 252. air inlet cylinder; 253. air inlet pipe; 254. air valve; 255. piston plate; 256. sliding rod; 26. reset cylinder; 261. sealing plug; 2611. air-closing ring; 2612. rubber pad; 2613. sealing chamber; 2614. positioning column; 2615. positioning hole; 262. push rod; 263. connecting hole; 27. reset chamber; 271. second reset spring; Q0. ion guide chamber; Q1. ion mass analysis chamber. DETAILED DESCRIPTION

[0025] The following is combined with Figure 2-7 This application is described in further detail.

[0026] The present application embodiment discloses an opening and closing device for a vacuum chamber of a triple quadrupole mass spectrometer, referring to Figure 1 , including a shell 1, in which an ion guide chamber Q0 and an ion mass analysis chamber Q1 are provided, a vacuum diaphragm 11 is provided between the ion guide chamber Q0 and the ion mass analysis chamber Q1, a through hole 213 12 for ions to pass through is provided in the middle of the vacuum diaphragm 11, an opening and closing device 2 is connected to the vacuum diaphragm 11, and the opening and closing device 2 is used to automatically seal and close the through hole 12 to separate the ion guide chamber Q0 from the ion mass analysis chamber Q1, so as to clean the ion guide chamber Q0.

[0027] The opening and closing device 2 includes a locking plate 21 rotatably connected to the vacuum diaphragm 11. The center of the locking plate 21 is fixedly connected to a rotating shaft 211. The rotating shaft 211 is rotatably connected to the vacuum diaphragm 11. A circular hole 212 is provided on the locking plate 21. The inner diameter of the circular hole 212 and the through hole 12 are the same. When the locking plate 21 is rotated to coincide with the circular hole 212 and the through hole 12, the through hole 12 can be opened without affecting the passage of ions through the through hole 12. A piece is provided on the locking plate 21. The sealing plate 213 is circular in shape, and the diameter of the sealing plate 213 is the same as the diameter of the through hole 12. The side of the sealing plate 213 close to the ion mass analysis chamber Q1 is provided with an arc surface 2131. Since the ion mass analysis chamber Q1 is vacuum-set, when the ion guide chamber Q0 is cleaned, the pressure of the ion guide chamber Q0 is greater than that of the ion mass analysis chamber Q1, so that the arc surface 2131 of the sealing plate 213 is more tightly pressed against the inner wall of the through hole 12, and the sealing effect is better. The locking plate 21 is located at the position of the sealing plate 213 and is fixedly connected to a positioning ring 214. The diameter of the positioning ring 214 is larger than the inner diameter of the sealing plate 213. A positioning rod 215 is fixedly connected to the positioning ring 214. A guide hole 2151 is opened in the middle of the positioning rod 215. A guide column 216 is fixedly connected to the center of the sealing plate 213. The guide column 216 penetrates the guide hole 2151. One end of the guide column 216 passing through the guide hole 2151 is fixedly connected to a limiting disk 217. The limiting disk 217 prevents the guide column 216 from being separated from the guide hole 2151. A first return spring 218 is sleeved on the guide column 216. The first return spring 218 is provided on the guide column 216. One end of the positioning spring 218 is fixedly connected to the limit plate 217, and the other end is fixedly connected to the sealing plate 213; when the pressure of the ion guide chamber Q0 is greater than that of the ion mass analysis chamber Q1, the arc surface 2131 of the sealing plate 213 is pressed against the inner wall of the through hole 12, and the sealing plate 213 pulls the first reset spring 218 to stretch. When both the ion guide chamber Q0 and the ion mass analysis chamber Q1 are vacuum, the tension of the first reset spring 218 facilitates pulling the sealing plate 213 to separate from the vacuum diaphragm 11, reduces the friction between the sealing plate 213 and the vacuum diaphragm 11, and facilitates pulling the locking plate 21 to rotate until the sealing plate 213 is separated from the through hole 12.

[0028] A connecting rod 22 is hinged on the locking plate 21, and a pull rod 23 is hinged on one end of the connecting rod 22 away from the locking plate 21. A driving component 25 is connected to the pull rod 23 for driving the pull rod 23 to swing. A limiting column 24 is fixedly connected to the vacuum diaphragm 11, and the limiting column 24 is used to limit the pull rod 23. When the driving component 25 pulls the pull rod 23 to move, the pull rod 23 drives the locking plate 21 to rotate, so that the locking plate 21 rotates until the sealing door is engaged in the through hole 12 and stops rotating. The limiting column 24 realizes the rotation of the locking plate 21 by limiting the pull rod 23.

[0029] The driving assembly 25 includes a positioning block 251 fixedly connected to the vacuum diaphragm 11, an air inlet cylinder 252 fixedly connected in the positioning block 251, a piston plate 255 slidably connected in the air inlet cylinder 252, an air inlet pipe 253 fixedly connected at one end of the air inlet cylinder 252, an air inlet pipe 253 extending out of the housing 1 and fixedly connected to an air valve 254 at one end, the air valve 254 is used to inhale air into the air inlet pipe 253, and can also discharge the air in the air inlet pipe 253 to the outside; one end of the air inlet cylinder 252 away from the air inlet pipe 253 The end is open, and the end of the piston plate 255 away from the air inlet pipe 253 is fixedly connected to the sliding rod 256, and the end of the sliding rod 256 away from the piston plate 255 is fixedly connected to the pull rod 23; open the air valve 254, and the air enters the air inlet cylinder 252 through the air inlet pipe 253. The air pushes the piston plate 255 to slide, which can push the sliding rod 256 to slide. The sliding rod 256 drives the pull rod 23 to slide. The pull rod 23 drives the locking plate 21 to rotate through the connecting rod 22, so that the sealing plate 213 slides in the direction of the through hole 12. A notch groove 2511 is provided in the positioning block 251, the sliding rod 256 is located in the notch groove 2511, the end of the pull rod 23 extends into the notch groove 2511, and the notch groove 2511 is connected to the ion guide cavity Q0. When the piston plate 255 slides to the end of the air inlet pipe 253, the sealing plate 213 slides to the position of the through hole 12, but is not completely closed with the through hole 12. When the piston plate 255 slides out of the air inlet cylinder 252, the sealing plate 213 is completely fitted with the through hole 12, and the air in the air inlet cylinder 252 enters the notch groove 2511, so that the pressure in the ion guide cavity Q0 is greater than the pressure in the ion mass analysis cavity Q1, so that the arc surface 2131 of the sealing plate 213 is pressed against the inner wall of the through hole 12.

[0030] A reset cylinder 26 is fixedly connected in the positioning block 251, and a sealing plug 261 is slidably connected in the reset cylinder 26. The sealing plug 261 is made of rubber material. The reset cylinder 26 is open at one end close to the pull rod 23, and a push rod 262 is fixedly connected to the pull rod 23. The push rod 262 extends into the reset cylinder 26 and is fixedly connected to the sealing plug 261. The side of the reset cylinder 26 away from the push rod 262 is in a vacuum state. A connecting hole 263 is provided at one end of the reset cylinder 26 away from the push rod 262, and the connecting hole 263 is connected to the ion mass analysis chamber Q1; a plurality of air-closing rings 2611 are provided on the sealing plug 261, and the air-closing rings 2611 are evenly spaced along the axial direction of the sealing plug 261, and the air-closing rings 2611 are circumferentially arranged along the sealing plug 261. The ring 2611 makes the sealing plug 261 fit more closely with the inner wall of the reset tube 26, thereby increasing the sealing effect of the sealing plug 261; a rubber pad 2612 is fixedly connected to one end of the sealing plug 261 close to the connecting hole 263, and a positioning column 2614 is fixedly connected to the rubber pad 2612. A positioning hole 2615 is provided in the middle of the sealing plug 261, and the positioning column 2614 is inserted into the positioning hole 2615 and can slide in the positioning hole 2615. The rubber pad 2612 is fixed to the sealing plug 261 near the edge, and a sealing cavity 2613 is formed between the rubber pad 2612 and the sealing plug 261. By squeezing the sealing cavity 2613, the sealing plug 261 squeezes the air-closing ring 2611, thereby making the sealing plug 261 more stably abutting against the inner wall of the gas guide tube and achieving a better sealing effect.

[0031] Among them, a reset chamber 27 is provided in the positioning block 251, and the reset chamber 27 and the air inlet cylinder 252 are arranged in parallel. A second reset spring 271 is fixedly connected in the reset chamber 27, and one end of the second reset spring 271 in the reset chamber 27 is fixed to the sliding rod 256, and the other end is fixedly connected to the bottom of the reset chamber 27. After the air enters the notch groove 2511, the piston plate 255 pushes the sliding rod 256 to slide, and the sliding rod 256 squeezes the second reset spring 271, and the sliding rod 256 drives the pull rod 23 to slide, that is, it can push the push rod 262 to push the sealing plug 261 to slide in the reset cylinder 26, and the reset cylinder 26 plays a guiding and limiting role on the sealing plug 261, so that the push rod 262 can slide more stably following the pull rod 23. Most importantly, after the air enters the notch groove 2511, it pushes the push rod 262 to slide, and the push rod 262 pushes the sealing plug 261 Slide to the connecting hole 263, so that the pressure in the ion guide chamber Q0 is greater than the pressure in the ion mass analysis chamber Q1. When the gas valve 254 draws air outward until both the ion guide chamber Q0 and the ion mass analysis chamber Q1 are vacuum, the second reset spring 271 relaxes, driving the sliding rod 256 to slide in the direction of the air inlet tube 252. The sliding rod 256 drives the pull rod 23 to slide, pulling the locking plate 21 to rotate in the opposite direction, so that the sealing plate 213 is separated from the through hole 12, which can automatically push the locking plate 21 to rotate, and automatically open the through hole 12 after cleaning.

[0032] The implementation principle of the opening and closing device of the vacuum chamber of a triple quadrupole mass spectrometer in the embodiment of the present application is as follows: when it is necessary to clean the ion guide chamber Q0, the air valve 254 ventilates the air inlet pipe 253, and the air enters the air inlet cylinder 252 through the air inlet pipe 253. The air pushes the piston plate 255 to slide, which can push the sliding rod 256 to slide, and the sliding rod 256 drives the pull rod 23 to slide, and the pull rod 23 drives the locking plate 21 to rotate through the connecting rod 22, so that the sealing plate 213 slides in the direction of the through hole 12. The sliding rod 256 squeezes the second return spring 271 during the sliding process of the sliding rod 256 to the outside of the air inlet cylinder 252. When the piston plate 255 slides to When the air inlet pipe 253 reaches the end, the sealing plate 213 slides to the position of the through hole 12, but is not completely closed with the through hole 12. After the piston plate 255 slides out of the air inlet cylinder 252, the sealing plate 213 is completely fitted with the through hole 12. The air in the air inlet cylinder 252 enters the notch groove 2511, making the pressure in the ion guide cavity Q0 greater than the pressure in the ion mass analysis cavity Q1. The air pressure makes the arc surface 2131 of the sealing plate 213 press against the inner wall of the through hole 12. The sealing plate 213 pulls the first reset spring 218 to stretch, completely separating the ion guide cavity Q0 and the ion mass analysis cavity Q1, so as to clean the guide cavity Q0.

[0033] After the cleaning of the ion guide chamber Q0 is completed, the air valve 254 draws air outward. When the ion guide chamber Q0 is in a negative pressure state, the first return spring 218 contracts to facilitate the separation of the sealing plate 213 from the through hole 12. At the same time, the relaxation of the second return spring 271 pushes the sliding rod 256 to slide in the direction of the air inlet cylinder 252, which can drive the sliding rod 256 to slide in the direction of the air inlet cylinder 252, pull the locking plate 21 to rotate in the opposite direction, and separate the sealing plate 213 from the through hole 12, which can automatically push the locking plate 21 to rotate. After cleaning, the through hole 12 is automatically opened to connect the ion guide chamber Q0 and the ion mass analysis chamber Q1, thereby realizing the automatic opening and closing of the through hole 12, separating the ion guide chamber Q0 from the ion mass analysis chamber Q1, so as to clean the inner wall of the ion guide chamber Q0 without affecting the vacuum state in the ion mass analysis chamber Q1.

[0034] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. An opening and closing device for a vacuum chamber of a triple quadrupole mass spectrometer, comprising a housing (1), an ion guide chamber Q0 and an ion mass analysis chamber Q1 being provided in the housing (1), a vacuum diaphragm (11) being provided between the ion guide chamber Q0 and the ion mass analysis chamber Q1, a through hole (12) for ions to pass through being provided in the middle of the vacuum diaphragm (11), characterized in that: The vacuum diaphragm (11) is connected to an opening and closing device (2); The opening and closing device (2) comprises a locking plate (21) rotatably connected to the vacuum diaphragm (11); a circular hole (212) is provided on the locking plate (21); the inner diameter of the circular hole (212) and the through hole (12) are the same; a circular sealing plate (213) is provided on the locking plate (21); the diameter of the sealing plate (213) is the same as the diameter of the through hole (12); and a driving mechanism is connected to the locking plate (21); the driving mechanism is used to drive the locking plate (21) to rotate until the sealing plate (213) is engaged in the through hole (12) or the circular hole (212) is connected to the through hole (12).

2. The opening and closing device of the vacuum chamber of a triple quadrupole mass spectrometer according to claim 1, characterized in that: The driving mechanism comprises a connecting rod (22) hinged on the locking plate (21), one end of the connecting rod (22) away from the locking plate (21) is hinged with a pull rod (23), the pull rod (23) is connected to a driving component (25) for driving the pull rod (23) to swing, and a limiting column (24) is fixedly connected to the vacuum diaphragm (11), and the limiting column (24) is used to limit the pull rod (23).

3. The opening and closing device of the vacuum chamber of a triple quadrupole mass spectrometer according to claim 2, characterized in that: The driving assembly (25) includes a positioning block (251) fixedly connected to the vacuum diaphragm (11), an air intake cylinder (252) fixedly connected inside the positioning block (251), a piston plate (255) slidably connected inside the air intake cylinder (252), one end of the air intake cylinder (252) fixedly connected to an air intake pipe (253), one end of the air intake pipe (253) extends out of the shell (1) and is fixedly connected to an air valve (254), the air valve (254) is used to inhale air into the air intake pipe (253), and can also discharge the air in the air intake pipe (253) to the outside, one end of the air intake cylinder (252) away from the air intake pipe (253) is open, one end of the piston plate (255) away from the air intake pipe (253) is fixedly connected to a sliding rod (256), and one end of the sliding rod (256) away from the piston plate (255) is fixedly connected to the pull rod (23); The positioning block (251) is provided with a notch groove (2511), the sliding rod (256) is located in the notch groove (2511), the end of the pull rod (23) extends into the notch groove (2511), and the notch groove (2511) is connected to the ion guide cavity Q0.

4. The opening and closing device of the vacuum chamber of a triple quadrupole mass spectrometer according to claim 3, characterized in that: A reset cylinder (26) is fixedly connected inside the positioning block (251), and a sealing plug (261) is slidably connected inside the reset cylinder (26). The reset cylinder (26) is open at one end close to the pull rod (23), and a push rod (262) is fixedly connected to the pull rod (23). The push rod (262) extends into the reset cylinder (26) and is fixedly connected to the sealing plug (261). The side of the reset cylinder (26) away from the push rod (262) is in a vacuum state. A connecting hole (263) (12) is provided at one end of the reset cylinder (26) away from the push rod (262), and the connecting hole (263) (12) is connected to the ion mass analysis chamber Q1.

5. The opening and closing device of the vacuum chamber of a triple quadrupole mass spectrometer according to claim 4, characterized in that: The sealing plug (261) is provided with a plurality of air-closing rings (2611), which are distributed at equal intervals along the axial direction of the sealing plug (261), and the air-closing rings (2611) are arranged along the circumference of the sealing plug (261).

6. The opening and closing device of the vacuum chamber of a triple quadrupole mass spectrometer according to claim 4 or 5, characterized in that: The sealing plug (261) is fixedly connected to one end of the sealing plug (261) close to the connecting hole (263) (12), and a positioning column (2614) is fixedly connected to the rubber pad (2612). A positioning hole (2615) is opened in the middle of the sealing plug (261), and the positioning column (2614) is inserted into the positioning hole (2615) and can slide in the positioning hole (2615). The rubber pad (2612) is fixed to the sealing plug (261) at a position close to the edge, and a sealing cavity (2613) is formed between the rubber pad (2612) and the sealing plug (261).

7. The opening and closing device of the vacuum chamber of a triple quadrupole mass spectrometer according to claim 3, characterized in that: A reset cavity (27) is provided in the positioning block (251), and a second reset spring (271) is fixedly connected in the reset cavity (27). One end of the second reset spring (271) in the reset cavity (27) is fixed to the sliding rod (256), and the other end is fixedly connected to the bottom of the reset cavity (27).

8. The opening and closing device of the vacuum chamber of a triple quadrupole mass spectrometer according to claim 1, characterized in that: The locking plate (21) is fixedly connected to a positioning ring (214) at the position of the sealing plate (213), and a positioning rod (215) is fixedly connected to the positioning ring (214). A guide hole (2151) is provided in the middle of the positioning rod (215). A guide column (216) is fixedly connected to the center of the sealing plate (213), and the guide column (216) passes through the guide hole (2151). One end of the guide column (216) passing through the guide hole (2151) is fixedly connected to a limiting plate (217). A first return spring (218) is sleeved on the guide column (216), and one end of the first return spring (218) is fixedly connected to the limiting plate (217), and the other end is fixedly connected to the sealing plate (213).

Images