Detection device

Abstract

The invention relates to detection equipment which comprises a loading device which comprises a material box, a rack and a carrying module, and the material box and the carrying module are installed on the rack; the detection device comprises a mounting base and a detection table, the mounting base and the rack are arranged at intervals in the horizontal direction, and the detection table is movably mounted on the mounting base; the carrying module is used for carrying the product and circulating between the detection table and the material box; the quasi-zero stiffness device comprises a horizontal positive stiffness mechanism and a horizontal negative stiffness mechanism which are connected in parallel, the horizontal positive stiffness mechanism is connected with the rack and the mounting seat, the horizontal negative stiffness mechanism is connected with the mounting seat, and the horizontal positive stiffness mechanism and the horizontal negative stiffness mechanism enable the mounting seat to tend to be in a balanced position. The positive stiffness and the negative stiffness are connected in parallel, so that the connecting dynamic stiffness between the mounting base and the rack is extremely low, medium-high frequency vibration isolation can be achieved, transmission of vibration between the mounting base and the rack is reduced, and compared with the mode that the rack and the mounting base are connected through a connecting plate in the prior art, vibration of the carrying module is not prone to being caused.

Description

Technical Field

[0001] The present invention relates to the technical field of detection equipment, and in particular to a detection equipment. Background Art

[0002] Before a product enters the next process or is produced, its performance usually needs to be tested, and product testing is often completed on testing equipment. For example, wafer testing is usually completed on wafer testing equipment.

[0003] The testing equipment includes a loading device and a testing device. The loading device includes a frame and a handling module mounted on the frame. The testing device includes a mounting seat and a testing table movably mounted on the mounting seat. During testing, the handling module takes the product from the material box and places the product on the testing table. The testing table moves on the mounting seat in a controlled manner to test different parts of the product.

[0004] The time required for the test bench to move from the original position to the target position and the time it stays at the target position are very short each time, the movement acceleration is large, and the movement frequency is low (less than 10Hz). At each start and stop, the inertial force will cause the mounting base to produce a large impact vibration, which is easy to cause the mounting base and the frame to shift, affecting the position accuracy of the handling module when placing the product on the test bench each time. In order to ensure the positioning accuracy between the mounting base and the frame, the frame and the mounting base are connected by a connecting plate. Since the connecting plate is relatively hard, the connection stiffness between the frame and the mounting base is extremely large. The vibration of the test bench will be transmitted to the frame through the connecting plate, causing the handling module on the frame to vibrate. The vibrating handling module will scratch the product when taking and placing materials, causing a vicious cycle of equipment damage and product damage. Summary of the invention

[0005] Based on this, it is necessary to provide a detection device that can ensure the positioning accuracy between the mounting base and the frame and reduce the vibration transmission between the mounting base and the frame to address the problem that the connection method between the frame and the mounting base leads to high rigidity, and the vibration of the detection table causes the handling module to vibrate greatly and scratch the product.

[0006] A detection device, comprising:

[0007] A loading device, comprising a material box, a frame and a transport module, wherein the material box and the transport module are mounted on the frame;

[0008] The detection device comprises a mounting seat and a detection platform, wherein the mounting seat and the frame are arranged horizontally at intervals, and the detection platform is movably mounted on the mounting seat; the transport module is used to transport the product and transfer it between the detection platform and the material box;

[0009] Quasi-zero stiffness device, comprising:

[0010] A horizontal positive stiffness mechanism and a horizontal negative stiffness mechanism are connected in parallel, wherein the horizontal positive stiffness mechanism connects the frame and the mounting seat, and the horizontal negative stiffness mechanism is connected to the mounting seat, and the horizontal positive stiffness mechanism and the horizontal negative stiffness mechanism make the mounting seat tend to a balanced position.

[0011] In the above-mentioned detection equipment, when the detection table starts to work and detects different parts of the product, the mounting seat will vibrate near the equilibrium position under the action of inertial force. When the mounting seat vibrates near the equilibrium position, the horizontal positive stiffness mechanism has positive stiffness in the horizontal direction, and the horizontal negative stiffness mechanism has negative stiffness in the horizontal direction. The positive stiffness and the negative stiffness are connected in parallel, so that the dynamic stiffness of the connection between the mounting seat and the frame is extremely low, which can achieve the isolation of medium and high frequency vibrations and reduce the transmission of vibration between the mounting seat and the frame. Compared with the method of connecting the frame and the mounting seat through a connecting plate in the prior art, it is not easy to cause vibration of the handling module, and the handling module will not scratch the product when taking and placing materials, and will not cause a vicious cycle of equipment damaging the product. In addition, the positive stiffness of the horizontal positive stiffness mechanism is very large, and the horizontal negative stiffness mechanism will only produce negative stiffness when it deviates from the equilibrium position. Therefore, the static connection stiffness between the frame and the mounting seat is very large, which ensures the positioning accuracy between the mounting seat and the frame.

[0012] In one of the embodiments, the horizontal positive stiffness mechanism includes a horizontal spring, which connects the frame and the mounting seat and is compressed in the horizontal direction between the frame and the mounting seat.

[0013] In one of the embodiments, the horizontal negative stiffness mechanism includes a first negative stiffness element and a second negative stiffness element respectively connected to the top and bottom of the mounting base, and at least one of the first negative stiffness element and the second negative stiffness element is connected to the frame through a connecting mechanism.

[0014] In one embodiment, the first negative stiffness element includes a first vertical spring, a connecting mechanism is connected to the frame and extends horizontally to the top of the mounting seat, the first vertical spring is connected to the connecting mechanism and the top of the mounting seat and is compressed in the vertical direction between the connecting mechanism and the mounting seat.

[0015] In one embodiment, the mounting seat includes a base and a support seat, the support seat is mounted on the base, the detection platform is movably mounted on the support seat, and the horizontal positive stiffness mechanism connects the frame and the support seat;

[0016] The second negative stiffness element comprises an oblique tension spring, which extends obliquely relative to both the vertical direction and the horizontal direction and is compressed and arranged between the support seat and the base; the support seat is suspended on the base under the action of the oblique tension spring; or

[0017] The second negative stiffness element includes a second vertical spring. The connecting mechanism is connected to the frame and extends horizontally to the bottom of the mounting seat. The second vertical spring is connected to the connecting mechanism and the bottom of the mounting seat and is compressed in the vertical direction between the connecting mechanism and the mounting seat.

[0018] In one embodiment, the second negative stiffness element comprises two groups of spring groups, the two groups of spring groups are arranged at two ends of the support seat in the first direction, and each group of the spring groups comprises at least one of the inclined tension springs;

[0019] The horizontal direction, the first direction and the vertical direction are perpendicular to each other, and the extension direction of the inclined spring intersects with the first direction.

[0020] In one of the embodiments, the detection device further comprises a leveling mechanism, and the leveling mechanism adjusts the horizontality of the detection platform mounted on the mounting seat by adjusting the compression amount of the spring included in the horizontal negative stiffness mechanism.

[0021] In one embodiment, the leveling mechanism includes a plurality of adjusting screws, the adjusting screws are passed through the connecting mechanism, and each of the adjusting screws is connected to the corresponding first vertical spring or the second vertical spring to adjust the compression amount of the first vertical spring or the second vertical spring; and / or

[0022] The leveling mechanism includes multiple adjustment groups, the number of the adjustment groups is equal to the number of the cantilever springs and corresponds one to one, each adjustment group includes a guide rail and an adjustment block, one of the guide rail and the adjustment block is arranged on the support seat, and the other is connected to the corresponding cantilever spring, and the position of the adjustment block on the guide rail is adjustable to adjust the compression amount of the cantilever spring.

[0023] In one of the embodiments, a level sensor is provided on the frame and / or the mounting base, and the level sensor is used to detect the distance between at least two positions of the frame and the mounting base in the horizontal direction in the vertical direction.

[0024] In one of the embodiments, the detection device further comprises a damper, and the damper is arranged between the frame and the mounting seat in the horizontal direction;

[0025] The frame and / or the mounting seat is provided with a displacement sensor, and the displacement sensor is used to obtain a vibration signal on the mounting seat or the frame;

[0026] Wherein, the damping value of the damper can change with the change of the vibration signal.

[0027] In one embodiment, the damping value of the damper is adjusted as follows:

[0028]

[0029]

[0030] Among them, c max is the maximum damping value of the damper, c min is the minimum damping value of the damper, c is the damping value of the damper at time t, c out is the damping value of the damper at time t+1, k is the rate of change of the damping value of the damper over time, F(t) is the exciting force on the detection device at time t, x 1 (t) and x 2 (t) is the vibration signal on the mounting base or the frame acquired by the displacement sensor at time t.

[0031] In one embodiment, the frame and the mounting seat are both disposed on a mounting surface;

[0032] The detection device also includes a vibration isolation spring, which is compressed in a vertical direction and arranged between the mounting seat and the mounting surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 A front view of a detection device provided in one embodiment of the present application;

[0034] Figure 2 for Figure 1 An axonometric view of a loading device of the testing apparatus shown in ;

[0035] Figure 3 for Figure 1 Axonometric view of the detection device of the detection device shown in ( Figure 3 The inclined spring is not shown);

[0036] Figure 4 for Figure 1 A side view of a portion of the structure of the detection device shown in;

[0037] Figure 5 for Figure 1 An axonometric view of a portion of the structure of the detection device shown in ;

[0038] Figure 6 for Figure 1 A plan view of a detection device of the detection device shown in ;

[0039] Figure 7 for Figure 3 An axonometric view of another perspective of the detection device shown in ;

[0040] Figure 8 The frequency and power curves of the present application and the prior art are shown.

[0041] Description of reference numerals:

[0042] 100. Testing equipment; 10. Loading device; 11. Rack; 12. Handling module; 13. Material box; 20. Testing device; 21. Mounting seat; 211. Base; 212. Support seat; 22. Testing table; 221. Motion platform; 222. Carrying table; 31. Positive stiffness mechanism; 311. Horizontal spring; 32. Negative stiffness mechanism; 321. First vertical spring; 322. Cantilever spring; 40. Connecting mechanism; 51. Adjusting screw; 52. Adjusting group; 521. Guide rail; 522. Adjusting block; 60. Level sensor; 70. Vibration isolation spring; 80. Damper; 90. Displacement sensor; 110. Controller; 200. Mounting surface. DETAILED DESCRIPTION

[0043] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0044] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0045] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0046] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0048] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0049] As described in the background technology: in order to ensure the positioning accuracy between the mounting base and the frame, thereby avoiding displacement of the mounting base and the frame, the frame and the mounting base are connected by a connecting plate. Since the connecting plate is relatively hard, the connection rigidity between the frame and the mounting base is extremely large, and the vibration of the test bench is transmitted to the frame through the connecting plate. Since the vibration of the test bench is a continuous impact vibration, the frame will also continuously generate a response, and the vibrations of the two are coupled and affect each other, and the vibration is further aggravated. In this way, the handling module on the frame vibrates greatly, causing the handling module to scratch the product when taking and placing materials, resulting in a vicious cycle of equipment damaging the product.

[0050] To solve the above problems, see Figure 1 In one embodiment of the present application, a detection device 100 is provided for detecting a product. Specifically, the detection device 100 is a wafer detection device 100 for detecting a wafer. Of course, in some other embodiments, the detection device 100 can also be used to detect other products, which is not limited here.

[0051] Continue reading Figure 1 The detection device 100 includes a loading device 10 and a detection device 20. Figure 2 The loading device 10 includes a frame 11, a material box 13 and a transport module 12, and the material box 13 and the transport module 12 are installed on the frame 11. Optionally, the transport module 12 is a manipulator arranged on the frame 11. Figure 1 The detection device 20 includes a mounting seat 21 and a detection table 22. The mounting seat 21 and the frame 11 are arranged at intervals in the horizontal direction, and the detection table 22 is movably mounted on the mounting seat 21. The transport module 12 is used to transport the product and transfer it between the detection table 22 and the material box 13. In this way, when the product is tested, the transport module 12 takes the product out of the material box 13 and places it on the detection table 22 for testing. After the product on the detection table 22 is tested, the product on the detection table 22 is taken away, and the transport module 12 takes the product out of the material box 13 again and places it on the detection table 22, and the cycle is repeated in sequence, thereby achieving the purpose of testing multiple products.

[0052] It should be noted that when the testing device 100 is used to test wafers, a probe is provided on the testing platform 22 to test the wafers. In other embodiments, the probe may be omitted from the testing platform 22 depending on the type of product being tested.

[0053] In some embodiments, the detection platform 22 is slidably mounted on the mounting base 21 along a first direction. The first direction, the horizontal direction, and the vertical direction are perpendicular to each other. That is, the first direction is a direction perpendicular to the spacing direction between the mounting base 21 and the frame 11. Figure 1 The X direction is the horizontal direction, and the Z direction is the vertical direction. Figure 4 The Y direction is the first direction.

[0054] Optionally, see Figure 3 The inspection platform 22 includes a moving platform 221 and a wafer carrier 222. The moving platform 221 is movably arranged on the mounting seat 21 along a first direction, and the wafer carrier 222 is movably arranged on the moving platform 221 along a horizontal direction. The transport module 12 can transport the product to the wafer carrier 222 for inspection.

[0055] It should be understood that in some other embodiments, the detection platform 22 can also be movably arranged on the mounting seat 21 along other directions, which is not limited here. In addition, the detection platform 22 can also omit the motion platform 221 and only include the slide stage 222, which is also not limited here.

[0056] Continue reading Figure 1The detection device 100 also includes a quasi-zero stiffness device, which includes a horizontal positive stiffness mechanism 31 and a horizontal negative stiffness mechanism 32. The horizontal positive stiffness mechanism 31 connects the frame 11 and the mounting seat 21. Specifically, the two ends of the horizontal positive stiffness mechanism 31 are respectively connected to the frame 11 and the mounting seat 21. The horizontal negative stiffness mechanism 32 is connected to the mounting seat 21, and the horizontal positive stiffness mechanism 31 and the horizontal negative stiffness mechanism 32 make the mounting seat 21 tend to a balanced position.

[0057] It should be noted that the horizontal positive stiffness mechanism 31 is a mechanism capable of generating positive stiffness in the horizontal direction, and the horizontal negative stiffness mechanism 32 is a mechanism capable of generating negative stiffness in the horizontal direction. The equilibrium position is the position where the mounting seat 21 and other components remain relatively still after the components of the detection device 100 are adjusted and the detection platform 22 is not working.

[0058] In the detection device 100 provided in the embodiment of the present application, when the detection table 22 starts to work to detect different parts of the product, the mounting seat 21 will vibrate near the equilibrium position under the action of inertial force. When the mounting seat 21 vibrates near the equilibrium position, the horizontal positive stiffness mechanism 31 has positive stiffness in the horizontal direction, and the horizontal negative stiffness mechanism 32 has negative stiffness in the horizontal direction. The positive stiffness and the negative stiffness are connected in parallel, so that the dynamic stiffness of the connection between the mounting seat 21 and the frame 11 is extremely low, and the isolation of medium and high frequency vibrations can be achieved, and the transmission of vibration between the mounting seat 21 and the frame 11 is reduced. Compared with the method of connecting the frame 11 and the mounting seat 21 through a connecting plate in the prior art, it is not easy to cause vibration of the handling module 12, and the handling module 12 will not scratch the product when taking and placing materials, and will not cause a vicious cycle of equipment damaging the product. Moreover, the positive stiffness of the horizontal positive stiffness mechanism 31 is very large, and the horizontal negative stiffness mechanism 32 will only produce negative stiffness when it deviates from the equilibrium position. Therefore, the static connection stiffness between the frame 11 and the mounting seat 21 is very large, ensuring the positioning accuracy between the mounting seat 21 and the frame 11.

[0059] In some embodiments, see Figure 1 The horizontal positive stiffness mechanism 31 includes a horizontal spring 311, the two ends of which are connected to the frame 11 and the mounting seat 21 respectively, and are compressed in the horizontal direction and arranged between the frame 11 and the mounting seat 21, and the horizontal spring 311 has positive stiffness in the horizontal direction. Such an arrangement makes the structure of the horizontal positive stiffness mechanism 31 relatively simple.

[0060] It can be understood that in some other embodiments, the horizontal positive stiffness mechanism 31 can also be arranged in other ways, as long as it has positive stiffness in the horizontal direction and ensures sufficient static connection stiffness, and no limitation is made here.

[0061] Specifically, the horizontal positive stiffness mechanism 31 includes a plurality of horizontal springs 311 , and the plurality of horizontal springs 311 are arranged at intervals between the frame 11 and the mounting seat 21 . The specific number of the horizontal springs 311 is not limited herein.

[0062] In some embodiments, the horizontal negative stiffness mechanism 32 includes a first negative stiffness element and a second negative stiffness element respectively connected to the top and the bottom of the mounting seat 21, and at least one of the first negative stiffness element and the second negative stiffness element is connected to the frame 11 through a connecting mechanism 40. In this way, the first negative stiffness element and the second negative stiffness element together form negative stiffness in the horizontal direction to ensure the vibration isolation effect.

[0063] In some specific implementations, please refer to Figure 1 , and see Figure 4 , the first negative stiffness element includes a first vertical spring 321, a connecting mechanism 40 is connected to the frame 11 and extends horizontally to the top of the mounting seat 21, and the two ends of the first vertical spring 321 are respectively connected to the connecting mechanism 40 and the top of the mounting seat 21, and are compressed and arranged between the connecting mechanism 40 and the mounting seat 21 in the vertical direction. The second negative stiffness element includes a second vertical spring (not shown in the figure), a connecting mechanism 40 is connected to the frame 11 and extends horizontally to the bottom of the mounting seat 21, and the two ends of the second vertical spring are respectively connected to the connecting mechanism 40 and the bottom of the mounting seat 21, and are compressed and arranged between the connecting mechanism 40 and the mounting seat 21 in the vertical direction. Optionally, the connecting mechanism 40 includes a connecting plate, the connecting plate is connected to the frame 11, and the vertical spring is arranged between the frame 11 and the mounting seat 21 in the vertical direction.

[0064] In the above arrangement, the horizontal negative stiffness mechanism 32 includes a first vertical spring 321 and a second vertical spring. Thus, when the detection platform 22 starts to work to detect different parts of the product, the mounting base 21 will vibrate near the equilibrium position under the action of the inertial force. The first vertical spring 321 and the second vertical spring jointly generate negative stiffness in the horizontal direction and are connected in parallel with the positive stiffness, thereby reducing the dynamic stiffness of the connection between the mounting base 21 and the frame 11.

[0065] Optionally, the number of the first vertical spring 321 and the number of the second vertical spring are both multiple, and the multiple first vertical springs 321 are spaced apart between the connecting mechanism 40 and the top of the mounting seat 21, and the multiple second vertical springs are spaced apart between the connecting mechanism 40 and the bottom of the mounting seat 21.

[0066] In some other embodiments, see Figure 5-Figure 7 The mounting base 21 includes a base 211 and a support base 212. The base 211 is an integrated structure. The support base 212 is mounted on the base 211. The testing platform 22 is movably mounted on the support base 212. The horizontal positive stiffness mechanism 31 connects the frame 11 and the support base 212. Figure 5 The second negative stiffness mechanism 32 includes an inclined spring 322, which is inclined relative to the vertical direction and the horizontal direction, and is compressed between the support seat 212 and the base 211. The support seat 212 is suspended on the base 211 under the action of the inclined spring 322, and the inclined spring 322 is compressed to a certain length under the action of the gravity of the support seat 212 and the detection platform 22. The first negative stiffness element includes a first vertical spring 321, a connecting mechanism 40 is connected to the frame 11, and extends to the top of the support seat 212 in the horizontal direction, and the two ends of the first vertical spring 321 are respectively connected to the connecting mechanism 40 and the top of the support seat 212, and are compressed between the connecting mechanism 40 and the support seat 212 in the vertical direction.

[0067] In the above arrangement, the horizontal negative stiffness mechanism 32 includes a first vertical spring 321 and a diagonal spring 322. When the detection platform 22 starts to work to detect different parts of the product, the support seat 212 will vibrate near the equilibrium position under the action of inertia force. The first vertical spring 321 and the diagonal spring 322 jointly generate negative stiffness in the horizontal direction and are connected in parallel with the positive stiffness to reduce the dynamic stiffness of the connection between the mounting seat 21 and the frame 11.

[0068] It is understandable that in some other embodiments, the first negative stiffness element and the second negative stiffness element may be arranged in other ways. For example, the first negative stiffness element and the second negative stiffness element may generate negative stiffness through magnetic force. Any method that can generate negative stiffness is acceptable.

[0069] Optionally, the number of the oblique tension springs 322 is also multiple, and the multiple oblique tension springs 322 are arranged at intervals. Further, the second negative stiffness element includes two groups of spring groups, and the two groups of spring groups are arranged at both ends of the support seat 212 in the first direction, and each group of spring groups includes at least one oblique tension spring 322. Among them, the horizontal direction, the first direction and the vertical direction are perpendicular to each other, and the extension direction of the oblique tension spring 322 intersects with the first direction. At this time, the oblique tension spring 322 is located in the plane formed by the first direction and the vertical direction, and the extension direction of the oblique tension spring 322 intersects with the horizontal direction in space. In this way, the direction of the component force generated by the oblique tension spring 322 is the first direction and the vertical direction, and no component force along the horizontal direction is generated, which ensures the effect of generating negative stiffness.

[0070] Generally, the detection device 100 has strict horizontality requirements for the detection platform 22. In the conventional technology, the connection plate between the frame 11 and the mounting seat 21 is used for adjustment. Both ends of the connection plate are connected to the frame 11 and the mounting seat 21 by bolts. When adjusting the horizontality of the detection platform 22, the loading device 10 remains stationary, and the adjustment bolts are screwed to allow the mounting seat 21 and the frame 11 to have a certain tilt angle, and then the two ends of the connection plate are respectively fixed to the frame 11 and the mounting seat 21 by bolts, thereby completing the adjustment of the horizontality. This method of adjusting the horizontality is not accurate, and the tilt angle between the mounting seat 21 and the frame 11 cannot be intuitively fed back. At the same time, due to the change in the contact state of the connection plate, the contact area between the connection plate and the mounting seat 21 is reduced, which will further aggravate the vibration of the equipment.

[0071] In some embodiments, the detection device 100 further includes a leveling mechanism, which adjusts the horizontality of the detection platform 22 mounted on the mounting seat 21 by adjusting the compression amount of the spring included in the horizontal negative stiffness mechanism 32. Specifically, the leveling mechanism adjusts the horizontality of the wafer stage 222 mounted on the mounting seat 21 by adjusting the compression amount of the spring included in the horizontal negative stiffness mechanism 32.

[0072] Compared with the prior art method of adjusting the horizontality of the detection platform 22 by adjusting the inclination angle of the mounting base 21 and the frame 11 by adjusting the connecting plate, the above-mentioned setting can directly adjust the compression amount of the spring without changing the connection state between the frame 11 and the mounting base 21 and causing the vibration to be aggravated.

[0073] In some specific implementations, please refer to Figure 1 The leveling mechanism includes a plurality of adjusting screws 51, and the adjusting screws 51 are disposed on the connecting mechanism 40. Specifically, each first vertical spring 321 and each second vertical spring corresponds to an adjusting screw 51, and the adjusting screw 51 is connected to the corresponding vertical spring to adjust the compression amount of the vertical spring, thereby adjusting the horizontality of the detection platform 22.

[0074] In some other specific implementations, please refer to Figure 4 The leveling mechanism includes a plurality of adjustment groups 52, the number of which is equal to and corresponds to the number of the inclined springs 322. Each adjustment group 52 includes a guide rail 521 and an adjustment block 522, one of which is disposed on the support seat 212, and the other is connected to the corresponding inclined spring 322. The position of the adjustment block 522 on the guide rail 521 is adjustable to adjust the compression amount of the inclined spring 322. It should be noted that when the adjustment block 522 is adjusted to a preset position on the guide rail 521, the adjustment block 522 can be locked with the guide rail 521 by a locking mechanism.

[0075] Of course, in some other specific implementations, there is no limitation on the configuration of the leveling mechanism, and any configuration may be used as long as the compression amount of the spring included in the horizontal negative stiffness mechanism 32 can be adjusted.

[0076] In some embodiments, see Figure 1 , a level sensor 60 is provided on the frame 11 and / or the support seat 212, and the level sensor 60 is used to detect the horizontal distance between at least two positions of the frame 11 and the support seat 212 in the vertical direction. In this way, the degree of inclination between the support seat 212 and the frame 11 can be understood by observing the reading of the level sensor 60, and the measured distances at different positions are compared. When the distances are out of range, the compression amount of the spring is adjusted by the leveling mechanism, thereby realizing the adjustment of the horizontality of the detection table 22.

[0077] Preferably, there are two level sensors 60, which are arranged at intervals in the vertical direction on one of the frame 11 and the support seat 212, and are used to detect the horizontal distance between two positions in the vertical direction. When the horizontal distance difference between the two positions is large, it proves that the inclination between the support seat 212 and the frame 11 is large, and it is necessary to adjust the compression amount of the spring included in the horizontal negative stiffness mechanism 32 so that the detection platform 22 tends to be horizontal.

[0078] Of course, in some other embodiments, the number of the level sensors 60 is not limited. For example, the detection device 100 may include only one or more than two level sensors 60 .

[0079] The applicant has found that when the detection device 100 is working normally, the frequency of the excitation generated on the detection table 22 is low. According to the linear vibration isolation theory, if a vibration isolator is added between the frame 11 and the mounting base 21 for vibration isolation, only the natural frequency of the vibration is higher than the excitation frequency. Only a vibration isolator with a natural frequency lower than 210 can play the role of vibration isolation. Such a low natural frequency means that the stiffness of the vibration isolator is also extremely low, resulting in a soft connection between the frame 11 and the support seat 212, which does not meet the reliability requirements of positioning accuracy. Therefore, in the traditional technology, there is a lack of solutions for low-frequency resonance, and the only way is to reduce the speed to avoid the resonance frequency band as much as possible, which will reduce the working efficiency of the detection table 22.

[0080] In some embodiments, see Figure 1, the detection device 100 also includes a damper 80, which is arranged between the frame 11 and the support seat 212 in the horizontal direction. A displacement sensor 90 is provided on the frame 11 or the support seat 212, and the displacement sensor 90 is used to obtain a vibration signal on the support seat 212 or the frame 11, and the damping value of the damper 80 can change in real time with the change of the vibration signal. Specifically, the detection device 100 also includes a controller 110, and the damper 80 and the displacement sensor 90 are both electrically connected to the controller 110. The vibration signal detected by the displacement sensor 90 is transmitted to the controller 110, and the controller 110 performs simple filtering and calculation on the vibration signal of the displacement sensor 90, and adjusts the damping value of the damper 80 in real time to achieve rapid attenuation of the vibration between the frame 11 and the support seat 212.

[0081] Optionally, the levelness sensor 60 and the displacement sensor 90 are integrated into one, and the integrated sensor has both levelness detection function and displacement detection function, so that the structural setting of the detection device 100 can be simplified.

[0082] In some specific implementations, the damping value of the damper 80 is adjusted in the following manner (time domain control strategy):

[0083]

[0084] Among them, c max is the maximum damping value of the damper 80, c min is the minimum damping value of the damper 80. c is the damping value of the damper 80 at time t, c out is the damping value of the damper 80 at time t+1. k is the rate of change of the damping value of the damper 80 over time, which is a constant and varies according to the type of the damper 80. F(t) is the exciting force on the support base 212 of the detection device 20 at time t. 1 (t) and x 2 (t) is the vibration signal on the mounting base 21 or the frame 11 acquired by the displacement sensor 90 at time t. is obtained by taking the derivative of x(t).

[0085] When the vibration signal x on the mounting base 21 or the frame 11 is detected 1 (t) and x 2 (t), the relative vibration between the frame 11 and the support base 212 can be converted into: The controller 110 can differentiate the monitored vibration signal into a velocity signal and an acceleration signal through a built-in control algorithm, or transform the vibration signal in the time domain into a signal in the frequency domain through Fourier transformation. max and the minimum value c minThe controller 110 adjusts the damping value of the damper 80 according to the signal monitored by the displacement sensor 90.

[0086] At time t And c ≥ c max When , the damping value c at time t+1 is out c max At time t And c <c max When , the damping value c at time t+1 is out is c+k*t; at time t And c ≥ c min When , the damping value c at time t+1 is out is ck*t; at time t And c≤c min When , the damping value c at time t+1 is out c min In this way, the damping value of the damper 80 is in a real-time adjustment state, achieving the purpose of isolating the vibration between the frame 11 and the support base 212 to the greatest extent.

[0087] The applicant has also found that when the weight distribution of the detection device 100 is uneven, it is easy to affect the levelness of the detection platform 22. In particular, when the base 211 is an integrated structure, that is, when the detection device 20 is supported by an integrated foot, the weight distribution of the detection device 100 is uneven, which is easy to cause the integrated base 211 to warp, affecting the levelness of the detection platform 22.

[0088] In some embodiments, the frame 11 and the base 211 are both mounted on the mounting surface 200. Specifically, the mounting surface 200 is the ground. Figure 1 The detection device 100 further includes a vibration isolation spring 70, which is disposed vertically between the detection device 100 and the mounting surface 200. In some specific implementations, the vibration isolation spring 70 is disposed between the base 211 of the detection device 100 and the mounting surface 200.

[0089] By providing the vibration isolation spring 70, not only can the excitation of the mounting surface 200 be isolated to a certain extent, but also the horizontality of the detection platform 22 can be adjusted by adjusting the compression amount of the vibration isolation spring 70. Specifically, the vibration isolation spring 70 is an air spring for easy adjustment.

[0090] The detection device 100 provided in the embodiment of the present application has the following beneficial effects:

[0091] 1. When the mounting base 21 vibrates near the equilibrium position, the horizontal positive stiffness mechanism 31 has positive stiffness in the horizontal direction, and the horizontal negative stiffness mechanism 32 has negative stiffness in the horizontal direction. The positive stiffness and the negative stiffness are connected in parallel, so that the dynamic stiffness of the connection between the mounting base 21 and the frame 11 is close to zero, which can achieve the isolation of medium and high frequency vibrations and reduce the transmission of vibrations between the mounting base 21 and the frame 11. At the same time, the positive stiffness of the horizontal positive stiffness mechanism 31 is very large, and the static connection stiffness between the frame 11 and the mounting base 21 is very large, which ensures the positioning accuracy between the mounting base 21 and the frame 11. Figure 8 It can be seen that the vibration isolation scheme of this application ( Figure 8 The middle brown dotted line) can isolate vibrations above 4 Hz. The connection plate solution of the existing technology ( Figure 8 The orange line in the middle can only isolate vibrations above 20 Hz. The detection device 100 of the present application has a strong vibration isolation effect.

[0092] 2. The inclination degree between the frame 11 and the support seat 212 can be obtained through the level sensor 60, and the levelness of the detection platform 22 can be conveniently adjusted by adjusting the compression amount of the vertical spring, the inclined spring 322 and the vibration isolation spring 70.

[0093] 3. Introducing a damper 80 with a variable damping value to achieve controllable adjustment of the vibration parameters of the detection device 100 can avoid the risk of resonance caused by low vibration frequency. Figure 8 It can be seen from the figure that when the control strategy of the damping value of the damper 80 of the present application is further adopted on the basis of the hardware of the vibration isolation solution of the present application, the vibration curve ( Figure 8 The low-frequency resonance peak of the blue dotted line in the middle is eliminated, the response is further improved, the vibration isolation effect is strong, and the vibration can be quickly attenuated when the impact is too large.

[0094] 4. The horizontal spring 311, the longitudinal spring, the canted spring 322 and the vibration isolation spring 70 all have a certain vibration isolation effect, which can isolate the detection device 100 from vibration in multiple directions.

[0095] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0096] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A detection device, characterized in that: include: A loading device (10) comprises a material box (13), a frame (11) and a transport module (12), wherein the material box (13) and the transport module (12) are mounted on the frame (11); The detection device (20) comprises a mounting seat (21) and a detection platform (22), wherein the mounting seat (21) and the frame (11) are arranged at intervals in the horizontal direction, and the detection platform (22) is movably mounted on the mounting seat (21); the transport module (12) is used to transport the product and transfer it between the detection platform (22) and the material box (13); Quasi-zero stiffness device, comprising: A horizontal positive stiffness mechanism (31) and a horizontal negative stiffness mechanism (32) are connected in parallel, wherein the horizontal positive stiffness mechanism (31) connects the frame (11) and the mounting seat (21), and the horizontal negative stiffness mechanism (32) is connected to the mounting seat (21), and the horizontal positive stiffness mechanism (31) and the horizontal negative stiffness mechanism (32) enable the mounting seat (21) to tend to a balanced position.

2. The detection device according to claim 1, characterized in that: The horizontal positive stiffness mechanism (31) comprises a horizontal spring (311), wherein the horizontal spring (311) connects the frame (11) and the mounting seat (21) and is compressed in the horizontal direction and arranged between the frame (11) and the mounting seat (21).

3. The detection device according to claim 1, characterized in that: The horizontal negative stiffness mechanism (32) comprises a first negative stiffness element and a second negative stiffness element respectively connected to the top and bottom of the mounting seat (21); at least one of the first negative stiffness element and the second negative stiffness element is connected to the frame (11) via a connecting mechanism (40).

4. The detection device according to claim 3, characterized in that: The first negative stiffness element comprises a first vertical spring (321), a connecting mechanism (40) connected to the frame (11) and extending horizontally to above the mounting seat (21), the first vertical spring (321) connected to the connecting mechanism (40) and the top of the mounting seat (21) and compressed in the vertical direction between the connecting mechanism (40) and the mounting seat (21).

5. The detection device according to claim 3, characterized in that: The mounting seat (21) comprises a base (211) and a support seat (212), the support seat (212) is mounted on the base (211), the detection platform (22) is movably mounted on the support seat (212), and the horizontal positive stiffness mechanism (31) connects the frame (11) and the support seat (212); The second negative stiffness element comprises an oblique tension spring (322), the oblique tension spring (322) extends obliquely relative to both the vertical direction and the horizontal direction, and is compressed and arranged between the support seat (212) and the base (211); the support seat (212) is suspended on the base (211) under the action of the oblique tension spring (322); or The second negative stiffness element comprises a second vertical spring, a connecting mechanism (40) connected to the frame (11) and extending horizontally to the bottom of the mounting seat (21), the second vertical spring connected to the connecting mechanism (40) and the bottom of the mounting seat (21) and compressed in the vertical direction between the connecting mechanism (40) and the mounting seat (21).

6. The detection device according to claim 5, characterized in that: The second negative stiffness element comprises two groups of spring groups, the two groups of spring groups are arranged at two ends of the support seat (212) in the first direction, and each group of the spring groups comprises at least one inclined tension spring (322); The horizontal direction, the first direction and the vertical direction are perpendicular to each other, and the extension direction of the inclined spring (322) intersects with the first direction.

7. The detection device according to claim 4 or 5, characterized in that: The detection device also includes a leveling mechanism, which adjusts the horizontality of the detection platform (22) mounted on the mounting seat (21) by adjusting the compression amount of the spring included in the horizontal negative stiffness mechanism (32).

8. The detection device according to claim 7, characterized in that: The leveling mechanism comprises a plurality of adjusting screws (51), wherein the adjusting screws (51) are passed through the connecting mechanism (40), and each of the adjusting screws (51) is connected to a corresponding first vertical spring (321) or second vertical spring to adjust the compression amount of the first vertical spring (321) or the second vertical spring; and / or The leveling mechanism comprises a plurality of adjustment groups (52), the number of the adjustment groups (52) being equal to and corresponding to the number of the inclined tension springs (322), each adjustment group (52) comprising a guide rail (521) and an adjustment block (522), one of the guide rail (521) and the adjustment block (522) being arranged on the support seat (212), and the other being connected to the corresponding inclined tension spring (322), and the position of the adjustment block (522) on the guide rail (521) being adjustable so as to adjust the compression amount of the inclined tension spring (322).

9. The detection device according to claim 1, characterized in that: The frame (11) and / or the mounting seat (21) is provided with a levelness sensor (60), and the levelness sensor (60) is used to detect the distance between at least two positions of the frame (11) and the mounting seat (21) in the horizontal direction in the vertical direction.

10. The detection device according to claim 1, characterized in that: The detection device further comprises a damper (80), wherein the damper (80) is arranged between the frame (11) and the mounting seat (21) in a horizontal direction; A displacement sensor (90) is provided on the frame (11) and / or the mounting seat (21), and the displacement sensor (90) is used to obtain a vibration signal on the mounting seat (21) or the frame (11); Wherein, the damping value of the damper (80) can change with the change of the vibration signal.

11. The detection device according to claim 10, characterized in that: The damping value of the damper (80) is adjusted in the following manner: Among them, c max is the maximum damping value of the damper (80), c min is the minimum damping value of the damper (80), c is the damping value of the damper (80) at time t, and c out is the damping value of the damper (80) at time t+1, k is the rate of change of the damping value of the damper (80) over time, F(t) is the exciting force on the detection device (20) at time t, and x1(t) and x2(t) are vibration signals on the mounting base (21) or the frame (11) obtained by the displacement sensor (90) at time t.

12. The detection device according to claim 1, characterized in that: The frame (11) and the mounting seat (21) are both arranged on a mounting surface (200); The detection device further comprises a vibration isolation spring (70), wherein the vibration isolation spring (70) is compressed in a vertical direction and arranged between the mounting seat (21) and the mounting surface (200).

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