Spin coating chamber device with synchronous cover lifting function in spin coating process

Abstract

The invention discloses a spin-coating chamber device with a synchronous cover lifting function in a spin-coating process. The spin-coating chamber device comprises a turntable and a synchronous cover, a metal ring is embedded in the bottom face of the synchronous cover, and electromagnets are evenly fixed to the bottom face of the synchronous cover along the circumference. The electromagnet can reduce suction force in the rotating process, at the moment, through upward movement of the linear module, the synchronous cover and the rotating disc can be separated in the rotating process, the cavity is opened, then the solution volatilization speed is increased, and it is not needed to wait for rotation to stop. The centrifugal force effect exists in the rotating process, at the moment, the solution volatilization and curing speed is increased, substrate edge fluid backflow is avoided, the edge effect influence area is reduced, and the substrate utilization rate is increased. After the cavity is opened, the permanent magnet can generate induction current in the metal ring, the induction current can generate torque between the synchronous cover and the rotating disc, rotating speed fluctuation of the rotating disc can be avoided, high rotating stability is achieved, and film forming uniformity can be kept.

Description

Technical Field

[0001] The present invention relates to the field of wet film forming equipment, and in particular to a spin coating chamber device with a synchronous cover lifting function during the spin coating process. Background Art

[0002] Spin coating is a common technique in wet film formation. During the spin coating process, the solution on the substrate is gradually thinned to the target film thickness by centrifugal force. After rotation stops, the accumulated fluid retracts at the edge of the substrate, forming a thicker film area. This phenomenon is known as the edge effect. Areas of the substrate affected by the edge effect are unusable due to the excessive film thickness, reducing substrate utilization and increasing manufacturing costs.

[0003] During spin coating, a closed spin coating chamber can be formed using a synchronous cover and a turntable, minimizing airflow disturbances and improving film uniformity. For volatile solutions like photoresist, after the target film thickness has been reached, the synchronous cover is raised during rotation to open the spin coating chamber. This accelerates solution evaporation and increases viscosity before the centrifugal force completely dissipates, helping to minimize solution backflow and reduce the area on the substrate affected by edge effects.

[0004] During the spin coating process, the chamber's shroud and turntable rotate synchronously as a whole. If the chamber is opened, the shroud separates from the turntable, causing a sudden change in the turntable's moment of inertia. This causes speed fluctuations, which is detrimental to maintaining film uniformity. To mitigate the negative impact of speed fluctuations on the liquid film during chamber opening, a spin coating chamber is needed that maintains a constant change in the turntable's moment of inertia when the shroud is raised.

[0005] Among the currently disclosed patents related to spin coating chambers, the spin coating chamber designs disclosed in Chinese patents CN214021741U and CN219073451U both include a synchronous cover that can be lifted. Among them, the synchronous cover of the former achieves synchronous rotation with the coating chamber through friction or the action of a positioning lock, while the latter only mentions that the synchronous cover can rotate synchronously with the carrier, without mentioning the connection method between the two. If the synchronous cover and the turntable are connected by a positioning lock, the positioning lock must be opened after the rotation stops to open the chamber, and it cannot be opened during the rotation process; if the two rotate synchronously only through friction, on the one hand, in order to generate sufficient friction, it is necessary to apply pressure on the synchronous cover or increase the weight of the synchronous cover. On the other hand, when the synchronous cover is opened during rotation, due to the instantaneous separation of the synchronous cover and the sudden change in the moment of inertia of the shaft load, the speed of the turntable will fluctuate, which may lead to a decrease in the uniformity of the spin coating film thickness. In the coating device disclosed in Chinese patent CN118444531A, the cover plate and chamber form a closed space, and the cover plate includes a circular scale that can move up and down. However, the circular scale can only adjust the height and cannot open the chamber. Therefore, a spin coating chamber that can be opened during the spin coating process is needed, and when the chamber is opened, the synchronous cover is raised without causing a sudden change in the rotational inertia of the turntable. Summary of the Invention

[0006] In order to solve the above problems existing in the prior art, the present invention designs a spin coating chamber device with a synchronous cover lifting function during spin coating, which can realize synchronous cover lifting during spin coating without sudden changes in the rotational inertia of the turntable.

[0007] To achieve the above objectives, the technical solution of the present invention is as follows: a spin coating chamber device with a synchronous cover lifting function during spin coating, comprising a turntable and a synchronous cover. A sealing groove is provided on the upper surface of the turntable, and a sealing ring is installed in the sealing groove;

[0008] A metal ring is embedded on the bottom surface of the synchronization cover, and the inner diameter of the metal ring is larger than the outer diameter of the sealing ring; permanent magnets are embedded along the circumference of the upper surface of the turntable, and the polarities of adjacent permanent magnets are opposite. The average value of the inner diameter and outer diameter of the ring formed by the permanent magnets is the same as the average value of the inner diameter and outer diameter of the metal ring;

[0009] Electromagnets are evenly fixed along the circumference of the bottom surface of the synchronization cover, and the inner diameter of the ring formed by the electromagnets is larger than the outer diameter of the sealing ring;

[0010] The surface of the turntable is uniformly inlaid with magnetic conductive material blocks along the circumference, the number of the magnetic conductive material blocks is the same as the number of the electromagnets, and the positions of the magnetic conductive material blocks correspond to the positions of the electromagnets;

[0011] The turntable is connected to a turntable shaft bearing seat via a turntable shaft system, and the turntable shaft bearing seat is fixed on a spin coater base;

[0012] The synchronous cover is connected to the synchronous cover shaft bearing seat through the synchronous cover shaft system, the synchronous cover shaft bearing seat is fixed to a lifting device that moves in a vertical direction, the lifting device is fixed to a bracket, and the bracket is fixed to the spin coater base;

[0013] The steps of closing the spin coating chamber device are as follows:

[0014] A1. The lifting device moves downward until the bottom surface of the synchronous cover contacts the surface of the turntable;

[0015] A2, the electromagnet is energized;

[0016] The steps of opening the spin coating chamber device are as follows:

[0017] B1. Gradually reduce the electromagnet current;

[0018] B2. The lifting device moves upward.

[0019] Furthermore, the number of the electromagnets is 6-10.

[0020] Furthermore, the installation positions of the electromagnet and the magnetic conductive material block are interchanged, that is, the electromagnet is fixed to the surface of the turntable and the magnetic conductive material block is embedded in the bottom surface of the synchronization cover.

[0021] Furthermore, the installation positions of the permanent magnet and the metal ring are interchanged, that is, the permanent magnet is embedded in the bottom surface of the synchronization cover, and the metal ring is embedded in the surface of the turntable.

[0022] Furthermore, the metal ring is made of copper or aluminum.

[0023] Compared with the prior art, the present invention has at least the following beneficial effects:

[0024] 1. When the electromagnet of the present invention is energized, the attractive force between the electromagnet and the block of magnetically conductive material causes the synchronous cover and the turntable to rotate synchronously as a single unit, acting as a sealed chamber to improve the uniformity of spin-coating. The electromagnet reduces the attractive force during rotation, and the upward movement of the linear module allows the synchronous cover and turntable to separate during rotation, opening the chamber and thereby increasing the evaporation rate of the solution without waiting for the rotation to stop. Centrifugal force acts during rotation, increasing the evaporation and solidification rate of the solution, helping to prevent fluid backflow at the edge of the substrate, reduce the area affected by edge effects, and improve substrate utilization.

[0025] 2. When the chamber of the present invention is opened, the permanent magnet generates an induced current within the metal ring, which in turn generates a torque between the synchronous cover and the turntable. This torque drives the synchronous cover to rotate and simultaneously acts as a load for the turntable, preventing sudden changes in the turntable's moment of inertia caused by the synchronous cover's detachment. This prevents fluctuations in the turntable's rotational speed, ensures high rotational stability, and helps maintain uniform film formation. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the overall structure of the present invention when the chamber is opened.

[0027] Figure 2 Schematic diagram of the chamber structure when the chamber is closed in the present invention.

[0028] Figure 3 It is a cross-sectional view of the chamber portion when the chamber is closed.

[0029] Figure 4 It is a front view of the top surface of the turntable.

[0030] Figure 5 It is a front view of the bottom surface of the synchronization cover.

[0031] In the figure: 1. Spin coater base, 2. Turntable, 3. Synchronous cover, 4. Synchronous cover shaft system, 5. Synchronous cover shaft system bearing seat, 6. Lifting device, 7. Bracket, 8. Turntable shaft system, 9. Turntable shaft system bearing seat, 21. Sealing ring, 22. Magnetic conductive material block, 23. Permanent magnet, 31. Electromagnet, 32. Metal ring. DETAILED DESCRIPTION

[0032] The present invention will be further described below in conjunction with the accompanying drawings. Figure 1-5 As shown, a spin coating chamber device with a synchronous cover lifting function during the spin coating process includes a turntable 2 and a synchronous cover 3; a sealing groove is provided on the upper surface of the turntable 2, and a sealing ring 21 is installed in the sealing groove;

[0033] A metal ring 32 is embedded on the bottom surface of the synchronization cover 3, and the inner diameter of the metal ring 32 is larger than the outer diameter of the sealing ring 21. The upper surface of the turntable 2 is embedded with permanent magnets 23 along the circumference, which are not in contact with each other, and the polarities of adjacent permanent magnets 23 are opposite. The average inner diameter and outer diameter of the ring formed by the permanent magnets 23 are the same as the average inner diameter and outer diameter of the metal ring 32.

[0034] Electromagnets 31 are evenly fixed along the circumference of the bottom surface of the synchronization cover 3, and the inner diameter of the ring formed by the electromagnets 31 is larger than the outer diameter of the sealing ring 21;

[0035] The surface of the turntable 2 is evenly inlaid with magnetic conductive material blocks 22 along the circumference. The number of the magnetic conductive material blocks 22 is the same as the number of the electromagnets 31 and the positions thereof correspond to the positions of the electromagnets 31.

[0036] The turntable 2 is connected to the turntable shaft system bearing seat 9 through the turntable shaft system 8, and the turntable shaft system bearing seat 9 is fixed on the spin coater base 1;

[0037] The synchronous cover 3 is connected to the synchronous cover shaft system bearing seat 5 through the synchronous cover shaft system 4. The synchronous cover shaft system bearing seat 5 is fixed to a lifting device 6 that moves in the vertical direction. The lifting device 6 is fixed to a bracket 7. The bracket 7 is fixed to the spin coater base 1.

[0038] The steps of closing the spin coating chamber device are as follows:

[0039] A1. The lifting device 6 moves downward until the bottom surface of the synchronous cover 3 contacts the surface of the turntable 2;

[0040] A2, electromagnet 31 is energized;

[0041] The steps of opening the spin coating chamber device are as follows:

[0042] B1, gradually reduce the current of the electromagnet 31;

[0043] B2. The lifting device 6 moves upward.

[0044] Furthermore, the number of the electromagnets 31 is 6-10.

[0045] Furthermore, the installation positions of the electromagnet 31 and the magnetic conductive material block 22 are interchanged, that is, the electromagnet 31 is fixed to the surface of the turntable 2 and the magnetic conductive material block 22 is embedded in the bottom surface of the synchronous cover 3 .

[0046] Furthermore, the installation positions of the permanent magnet 23 and the metal ring 32 are interchanged, that is, the permanent magnet 23 is embedded in the bottom surface of the synchronization cover 3 and the metal ring 32 is embedded in the surface of the turntable 2 .

[0047] Furthermore, the metal ring 32 is made of copper or aluminum.

[0048] The present invention is not limited to this embodiment, and any equivalent concepts or modifications within the technical scope disclosed by the present invention are included in the protection scope of the present invention.

Claims

1. A spin coating chamber device with a synchronous cover lifting function during the spin coating process, characterized in that: It comprises a rotating disk (2) and a synchronous cover (3); a sealing groove is provided on the upper surface of the rotating disk (2), and a sealing ring (21) is installed in the sealing groove; A metal ring (32) is embedded on the bottom surface of the synchronous cover (3), and the inner diameter of the metal ring (32) is larger than the outer diameter of the sealing ring (21); permanent magnets (23) that do not contact each other are embedded along the circumference of the upper surface of the rotating disk (2), and the polarities of adjacent permanent magnets (23) are opposite, and the average value of the inner diameter and outer diameter of the circular ring formed by the permanent magnets (23) is the same as the average value of the inner diameter and outer diameter of the metal ring (32); Electromagnets (31) are evenly fixed along the circumference on the bottom surface of the synchronization cover (3), and the inner diameter of the circular ring formed by the electromagnets (31) is larger than the outer diameter of the sealing ring (21); The surface of the turntable (2) is uniformly inlaid with magnetic conductive material blocks (22) along the circumference, the number of the magnetic conductive material blocks (22) is the same as the number of the electromagnets (31), and the positions of the magnetic conductive material blocks (22) correspond to the positions of the electromagnets (31); The turntable (2) is connected to a turntable shaft system bearing seat (9) via a turntable shaft system (8), and the turntable shaft system bearing seat (9) is fixed on a spin coater base (1); The synchronous cover (3) is connected to a synchronous cover shaft system bearing seat (5) through a synchronous cover shaft system (4); the synchronous cover shaft system bearing seat (5) is fixed to a lifting device (6) that moves in a vertical direction; the lifting device (6) is fixed to a bracket (7); and the bracket (7) is fixed to a spin coater base (1); The steps of closing the spin coating chamber device are as follows: A1, the lifting device (6) moves downward until the bottom surface of the synchronous cover (3) contacts the surface of the turntable (2); A2, the electromagnet (31) is energized; The steps of opening the spin coating chamber device are as follows: B1, gradually reducing the current of the electromagnet (31); B2. The lifting device (6) moves upward.

2. A spin coating chamber device with a synchronous cover lifting function during spin coating according to claim 1, characterized in that: The number of the electromagnets (31) is 6-10.

3. A spin coating chamber device with a synchronous cover lifting function during spin coating according to claim 1, characterized in that: The installation positions of the electromagnet (31) and the magnetic conductive material block (22) are interchanged, that is, the electromagnet (31) is fixed on the surface of the turntable (2), and the magnetic conductive material block (22) is embedded in the bottom surface of the synchronous cover (3).

4. The spin coating chamber device with synchronous cover lifting function during spin coating according to claim 1, characterized in that: The installation positions of the permanent magnet (23) and the metal ring (32) are interchanged, that is, the permanent magnet (23) is embedded in the bottom surface of the synchronous cover (3), and the metal ring (32) is embedded in the surface of the turntable (2).

5. The spin coating chamber device with synchronous cover lifting function during spin coating according to claim 1, characterized in that: The material of the metal ring (32) is copper or aluminum.

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