Laser drilling equipment for processing silicon carbide coating graphite disc

Abstract

The invention relates to the field of laser drilling, in particular to laser drilling equipment for machining a silicon carbide coating graphite disc. The laser drilling device comprises an operation box, a positioning heating assembly, a laser drilling assembly and a supporting ventilation assembly. A material conveying opening is formed in one side of the operation box, and a first belt material conveying assembly penetrating through the material conveying opening and a second belt material conveying assembly located above the first belt material conveying assembly are arranged in the operation box; the positioning heating assemblies are dispersedly arranged on an upper layer and a lower layer in the conveying direction of the first belt conveying assembly; the laser drilling assemblies with the laser heads are arranged on an upper layer and a lower layer in a scattered mode in the conveying direction of the second belt conveying assembly. The supporting ventilation assembly corresponds to the positioning heating assembly. Through cooperation and linkage of the positioning heating assembly, the laser drilling assembly and the supporting ventilation assembly, batch, efficient and accurate laser drilling is achieved, and the problems of silicon carbide coating stripping and graphite slag flying during drilling are effectively relieved.

Description

Technical Field

[0001] The invention relates to the field of laser drilling, and in particular to a laser drilling device for processing a silicon carbide coated graphite disk. Background Art

[0002] Silicon carbide coated graphite disc is a material with a silicon carbide protective layer prepared on the graphite surface by physical or chemical vapor deposition, spraying and other methods. Silicon carbide (SiC) is a material with high temperature resistance, corrosion resistance and extremely high hardness. It is made of raw materials such as quartz sand, petroleum coke (or coal coke), sawdust (salt is needed when producing green silicon carbide) and other raw materials through high temperature smelting in a resistance furnace. It is a compound formed by C and Si elements. The prepared silicon carbide protective layer can be firmly attached to the graphite substrate, making the surface of the graphite substrate dense and free of gaps, and giving the graphite substrate special properties such as anti-oxidation, acid and alkali resistance, and corrosion resistance.

[0003] Graphite material itself has good thermal conductivity, and silicon carbide coating further enhances its high temperature resistance and oxidation resistance. Punching can increase the heat dissipation area on the surface of the graphite disc, which is conducive to the rapid transfer and dissipation of heat, thereby improving the heat dissipation performance of the graphite disc. Through the punching design, the weight of the graphite disc can be effectively reduced without sacrificing the overall structural strength. This is an important optimization direction for equipment that needs to withstand high temperature and high-intensity environments. In some applications, silicon carbide coated graphite discs need to serve as channels or support structures for fluid flow. Punching can optimize the flow path of the fluid, reduce flow resistance, and improve the transmission efficiency of the fluid.

[0004] A Chinese patent document with authorization announcement number CN115781038B discloses a laser drilling device for processing silicon carbide coated graphite disks. By setting a frame, a laser head moving device, a graphite plate moving device, and a laser head moving device, the laser head can be moved in a first direction, a second direction, and a vertical direction.

[0005] The above-mentioned laser drilling equipment for processing silicon carbide coated graphite discs has the following shortcomings: 1. The silicon carbide coated graphite disc is prepared by physical or chemical vapor deposition, spraying and other methods on the graphite surface to form a silicon carbide protective layer. During laser drilling, if the local energy is too high or the drilling scanning method is improper, the silicon carbide coating may fall off or be damaged, thereby affecting the performance of the silicon carbide coating after drilling. 2. A certain amount of graphite slag will be generated during drilling. The graphite slag will adhere to the surface of the silicon carbide coated graphite disc, thereby affecting the processing effect. At the same time, the graphite slag itself also has a certain degree of recyclability. Summary of the invention

[0006] In view of the problems existing in the background technology, a laser drilling equipment for processing silicon carbide coated graphite disks is proposed. By coordinating and linking the positioning heating component, the laser drilling component and the supporting ventilation component, batch, efficient and precise laser drilling can be achieved, and the problems of silicon carbide coating peeling and flying graphite slag during drilling are effectively alleviated.

[0007] The present invention provides a laser drilling device for processing a silicon carbide coated graphite disk, comprising an operating box, a positioning and heating component, a laser drilling component and a supporting and ventilation component. A feeding port is arranged on one side of the operation box, and a belt feeding component 1 passing through the feeding port and a belt feeding component 2 located above the belt feeding component 1 are arranged inside; the positioning and heating components are dispersedly arranged in upper and lower layers along the feeding direction of the belt feeding component 1, and each group of positioning and heating components positions the silicon carbide coated graphite disks on both sides by vacuum adsorption, and heats the silicon carbide coated graphite disks on both sides by conductive means; the laser drilling components are dispersedly arranged in upper and lower layers along the feeding direction of the belt feeding component 2, and multiple groups of laser drilling components are respectively provided with laser heads of different specifications that can make circular or spiral moving trajectories; the supporting and ventilation components are arranged in multiple groups corresponding to the upper and lower layers of the positioning and heating components, and the belt feeding component 1 is guided and supported by a groove structure; the upper supporting and ventilation components send in hot air, which on the one hand keeps the silicon carbide coated graphite disk in the drilling process warm, and on the other hand cleans the silicon carbide coated graphite disk in the drilling process, and the lower supporting and ventilation components exhaust air, which on the one hand collects graphite slag, and on the other hand cools the silicon carbide coated graphite disk after drilling.

[0008] Preferably, the belt conveying assembly includes two groups of belts and a driving member that drives the two groups of belts to rotate synchronously; the positioning heating assembly is arranged between the two groups of belts.

[0009] Preferably, the positioning heating assembly includes an insulating positioning sleeve with two open ends; an adsorption piece is arranged inside the insulating positioning sleeve, and a conductive plate with adsorption holes is arranged at both ends; a positioning groove is formed between the conductive plate and the sleeve opening of the insulating positioning sleeve; and a driving piece 2 is arranged on the outer periphery of the insulating positioning sleeve for driving the insulating positioning sleeve to rotate horizontally and flip vertically.

[0010] Preferably, a circle of positioning members is arranged on the positioning groove; a mounting groove is arranged on the groove wall of the positioning groove; the positioning member comprises a positioning wheel driven by a driving member 3 and translated into and out of the mounting groove; the positioning wheel is rotatable and the material is insulated.

[0011] Preferably, the adsorption component includes an adsorption box for adsorption at both ends; the adsorption box divides the interior of the insulating positioning sleeve into two independent adsorption chambers; the two adsorption chambers correspond one-to-one to two conductive plates with adsorption holes; an annular filter is arranged at the inner center of the adsorption box, an air pump is arranged at the inner periphery, and adsorption valves corresponding one-to-one to the two adsorption chambers are arranged on the box covers at the upper and lower ends respectively; the air outlet end of the adsorption valve is connected to the inner periphery of the filter.

[0012] Preferably, the belt conveyor assembly 2 includes a belt 2 and a driving member 4 that drives the belt 2 to rotate synchronously; the driving member 4 can also drive the belt 2 to move up and down and forward and backward; multiple groups of laser punching assemblies are arranged along the belt 2, and the position is adjusted by moving up and down, left and right, and forward and backward.

[0013] Preferably, the laser drilling assembly includes a base connected to belt two through mounting seat two; a rotating seat is rotatably arranged on the base; the mounting sleeve is driven by driving member five, moves horizontally on the rotating seat, and the moving trajectory intersects vertically with the rotating axis of the rotating seat; the laser head is detachably mounted on the mounting sleeve.

[0014] Preferably, the supporting ventilation assembly includes a ventilation box arranged through the operating box; the ventilator is located in the ventilation box; the filter element is located on the side of the ventilation box extending from the operating box; the supporting ventilation frame is located on the side of the ventilation box extending into the operating box, and a ventilation head is provided; the supporting ventilation assembly arranged corresponding to the upper layer of the belt, the ventilator is a heating blower; the supporting ventilation assembly arranged corresponding to the lower layer of the belt, the ventilator is an exhaust fan.

[0015] Preferably, four groups of supporting ventilation components are provided, corresponding to the two sides of the upper belt 1 and the two sides of the lower belt 1, respectively, and arranged in mirror image in pairs.

[0016] Preferably, two layers of supporting ventilation frames are arranged on each group of supporting ventilation components; the two layers of supporting ventilation frames form a groove structure, which supports and guides belt one by respectively fitting the upper and lower ends of belt one.

[0017] Compared with the prior art, the present invention has the following beneficial technical effects: by setting up the upper positioning heating component and the belt conveyor component one, and the lower laser drilling component and the belt conveyor component two, the laser head can be flexibly replaced while realizing cyclic drilling. The positioning heating component is coordinated with the adsorbent and the positioning component, and the silicon carbide coated graphite disk is positioned by adsorption and clamping, and multi-directional rotation is set, so that the silicon carbide coated graphite disk is stable and the position is adjustable to meet the needs of different drilling scenarios. Based on the characteristics of graphite, a conductive plate is set to preheat the silicon carbide coated graphite disk. On the one hand, preheating can avoid the peeling of the silicon carbide coating caused by local temperature rise during laser drilling. On the other hand, preheating can cause impurities such as grease and organic matter on the surface of the graphite disk to undergo pyrolysis reaction, thereby removing them from the surface. The support ventilation assembly can not only guide and support the belt conveyor assembly 1 through the groove structure, but also the upper support ventilation assembly can deliver hot air to keep the silicon carbide coated graphite disk in the drilling process warm and clean the silicon carbide coated graphite disk in the drilling process. The lower support ventilation assembly can exhaust air to collect graphite slag and cool the silicon carbide coated graphite disk after drilling. When drilling, the laser head moves in a circular or spiral trajectory to ensure the uniform distribution of laser energy. At the same time, the position of the drilling hole is adjusted by moving the laser head and rotating the silicon carbide coated graphite disk. Finally, through the coordination and linkage of the above structures, batch, efficient and precise laser drilling is achieved, and the problems of silicon carbide coating peeling and flying graphite slag during drilling are effectively alleviated. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is an appearance diagram of a laser drilling device used for processing silicon carbide coated graphite disks in the present invention;

[0019] Figure 2 It is a cross-sectional view of a laser drilling device used for processing a silicon carbide coated graphite disk in the present invention;

[0020] Figure 3 It is a structural schematic diagram of the belt conveying component 1 and the positioning heating component in the present invention;

[0021] Figure 4 It is a structural schematic diagram of the positioning heating component in the present invention;

[0022] Figure 5 A cross-sectional view of a positioning heating assembly in the present invention;

[0023] Figure 6 for Figure 5 Enlarged view of point A in the middle;

[0024] Figure 7 for Figure 5 Enlarged view of point B in the middle;

[0025] Figure 8This is a disassembled diagram of the adsorption component in the present invention;

[0026] Fig. 9 It is a schematic diagram of the structure of the belt conveyor component 2 and the laser drilling component in the present invention;

[0027] Fig.10 Schematic diagram of the structure of the driving member 4 in the present invention;

[0028] Fig.11 This is a disassembled diagram of the laser drilling component of the present invention;

[0029] Fig.12 It is a schematic diagram of the structure of the supporting ventilation assembly in the present invention.

[0030] Figure numerals: 1, operating box; 101, feeding port; 2, belt feeding assembly 1; 201, belt 1; 202, driving roller; 203, motor 1; 3, positioning heating assembly; 301, insulating positioning sleeve; 302, conductive plate; 303, adsorption piece; 30301, adsorption box; 30302, box cover; 30303, adsorption valve; 30304, filter screen; 30305, vacuum pump; 304, mounting frame; 305, motor 2; 306, mounting seat 1; 307, positioning piece; 30701, positioning wheel; 30702, translation axis; 30703, lead screw 1; 30704, motor 4; 308, mounting ring; 309, gear; 310, gear ring; 30101, Mounting slot; 4. Belt feeding assembly 2; 401. Belt 2; 402. Driving member 4; 40201. Lifting block; 40202. Screw 2; 40203. Motor 5; 40204. Driving seat; 40205. Rotating seat; 40206. Threaded shaft; 40207. Belt sleeve; 40208. Guide rod; 5. Laser drilling assembly; 501. Base; 502. Mounting seat 2; 503. Rotating seat; 504. Screw 3; 505. Translation block; 506. Mounting sleeve; 507. Laser head; 6. Support ventilation assembly; 601. Ventilation box; 602. Support ventilation frame; 603. Ventilation head; 604. Fan; 605. Filter element; 7. Silicon carbide coated graphite disk. DETAILED DESCRIPTION

[0031] Embodiment 1

[0032] like Figure 1-Figure 2As shown, the laser drilling equipment for processing silicon carbide coated graphite discs proposed by the present invention includes an operation box 1, a positioning heating component 3, a laser drilling component 5 and a supporting ventilation component 6. A feeding port 101 is arranged on one side of the operation box 1, and a belt feeding component 2 that passes through the feeding port 101 and a belt feeding component 2 4 located above the belt feeding component 2 are arranged inside; the positioning heating component 3 is dispersedly arranged in two layers up and down along the feeding direction of the belt feeding component 2, and each group of positioning heating components 3 positions the silicon carbide coated graphite discs 7 on both sides by vacuum adsorption, and heats the silicon carbide coated graphite discs 7 on both sides by conductive means; the laser drilling components 5 are dispersedly arranged in two layers up and down along the feeding direction of the belt feeding component 2 4, and multiple groups of laser drilling components are arranged in two layers up and down along the feeding direction of the belt feeding component 2 4. The components 5 are respectively provided with laser heads 507 of different specifications and capable of making circular or spiral moving trajectories; the supporting ventilation components 6 are arranged in multiple groups corresponding to the upper and lower layers of the positioning heating components 3, and the belt conveying component 2 is guided and supported by the groove structure; the upper supporting ventilation component 6 delivers hot air, which can keep the silicon carbide coated graphite disk 7 during drilling warm on the one hand, and clean the silicon carbide coated graphite disk 7 during drilling on the other hand; the lower supporting ventilation component 6 exhausts air, which can collect graphite slag on the one hand, and cool the silicon carbide coated graphite disk 7 after drilling on the other hand.

[0033] like Figure 3 As shown, the belt conveyor assembly 2 includes two groups of belts 201 and a driving member 1 for driving the two groups of belts 201 to rotate synchronously; the positioning heating assembly 3 is arranged between the two groups of belts 201.

[0034] It should be further explained that the driving member 1 includes a motor 1 203 and a transmission roller 202 driven by the motor 1 203; the two ends of the belt 1 201 are respectively mounted on the transmission rollers 202 on the corresponding sides.

[0035] By setting up a double-layer belt structure, sufficient space is reserved for the positioning heating component 3, so as to realize the flipping of the positioning heating component 3, and holes are respectively punched on the silicon carbide coated graphite disks 7 on both sides.

[0036] like Figure 4-Figure 5 As shown, the positioning heating component 3 includes an insulating positioning sleeve 301 with open ends; an adsorption member 303 is arranged inside the insulating positioning sleeve 301, and a conductive plate 302 with adsorption holes is arranged at both ends; a positioning groove is formed between the conductive plate 302 and the sleeve opening of the insulating positioning sleeve 301; and a driving member 2 is arranged on the outer periphery of the insulating positioning sleeve 301 for driving the insulating positioning sleeve 301 to rotate horizontally and flip vertically.

[0037] It needs to be further explained that if Figure 6As shown, the driving member 2 includes a mounting frame 304 rotatably sleeved on the outer periphery of the insulating positioning sleeve 301; motor 2 305 is arranged on both sides of the mounting frame 304, and is connected to the mounting seat 1 306 through the motor 2 305; the mounting seat 1 306 is connected to the belt 1 201; a gear ring 310 coaxial with the insulating positioning sleeve 301 is arranged on the inner wall of the mounting frame 304; a mounting ring 308 coaxial with the gear ring 310 is arranged on the outer wall of the insulating positioning sleeve 301; a gear 309 driven to rotate by the motor 3 is arranged on the mounting ring 308; the gear 309 extends into the mounting frame 304 and meshes with the gear ring 310.

[0038] Before laser drilling, the silicon carbide coated graphite disk 7 is adsorbed in the upper and lower positioning grooves respectively. The silicon carbide coated graphite disk 7 is electrically conductive through the conductive plate 302. When the current flows inside the graphite disk, it will encounter a certain resistance, thereby generating heat, causing the graphite disk to heat up, thereby achieving the effect of preheating. On the one hand, preheating can prevent the silicon carbide coating from peeling off due to local temperature rise during laser drilling. On the other hand, preheating can cause impurities such as grease and organic matter on the surface of the graphite disk to undergo pyrolysis reactions, thereby removing them from the surface.

[0039] In order to avoid oxidation of the silicon carbide coated graphite disk 7 when it is powered on, it is selected to be powered on in a low-oxygen or inert gas environment to reduce contact and reaction with oxygen. Inert gases such as argon and nitrogen can be used.

[0040] When drilling, the gear 309 meshes with the gear ring 310, and the motor 3 drives the insulating positioning sleeve 301 to rotate at the origin, and the positioning heating component 3 moves to adjust the position of the drilling hole. The motor 2 305 drives the insulating positioning sleeve 301 to flip up and down, and the silicon carbide coated graphite disk 7 for drilling can be switched.

[0041] like Figure 7 As shown, a circle of positioning members 307 is arranged on the positioning groove; a mounting groove 30101 is arranged on the groove wall of the positioning groove; the positioning member 307 comprises a positioning wheel 30701 which is driven by a driving member 3 and moves in and out of the mounting groove 30101; the positioning wheel 30701 is rotatable and the material is insulated.

[0042] It should be further explained that a guide groove is arranged on the groove wall of the mounting groove 30101; the driving member three includes a motor four 30704 and a screw one 30703 driven to rotate by the motor four 30704; the screw one 30703 is located in the guide groove; the translation shaft 30702 passes through the positioning wheel 30701, and the middle part is rotationally connected with the positioning wheel 30701, and the two ends are respectively extended into the guide groove and are threadedly connected with the screw one 30703.

[0043] During feeding, a circle of positioning wheels 30701 moves horizontally to match the circumference size of the silicon carbide coated graphite disk 7 (slightly larger than the circumference size of the silicon carbide coated graphite disk 7). The silicon carbide coated graphite disk 7 is placed in the positioning groove, and the positioning wheels 30701 roll to assist it to fit with the conductive plate 302. Then the lead screw 30703 rotates, and the translation shaft 30702 drives the positioning wheels 30701 to move close to the outer wall of the silicon carbide coated graphite disk 7, and the silicon carbide coated graphite disk 7 is clamped and positioned at multiple points from the outer periphery.

[0044] like Figure 8 As shown, the adsorption component 303 includes an adsorption box 30301 for adsorption at both ends; the adsorption box 30301 divides the interior of the insulating positioning sleeve 301 into two independent adsorption chambers; the two adsorption chambers correspond one to one with two conductive plates 302 with adsorption holes; an annular filter screen 30304 is arranged at the inner center of the adsorption box 30301, and an air pump 30305 is arranged at the inner periphery; adsorption valves 30303 corresponding to the two adsorption chambers are arranged on the box covers 30302 at the upper and lower ends respectively; the air outlet end of the adsorption valve 30303 is connected to the inner periphery of the filter screen 30304.

[0045] After positioning, negative pressure is formed on the two conductive plates 302 through the cooperation of the adsorption valve 30303 and the vacuum pump 30305. The silicon carbide coated graphite disc can be adsorbed and fixed. When drilling, if a through hole is formed, the dust from the drilling will enter the filter screen 30304 of the adsorption box 30301 through the adsorption hole on the conductive plate 302, thereby achieving the effect of cleaning the silicon carbide coated graphite disc 7.

[0046] like Fig. 9 As shown, the belt conveyor assembly 2 4 includes a belt 2 401 and a driving member 402 that drives the belt 2 401 to rotate synchronously; the driving member 402 can also drive the belt 2 401 to move up and down and forward and backward; multiple groups of laser punching assemblies 5 are arranged along the belt 2 401, and the position is adjusted by moving up and down, left and right, and forward and backward.

[0047] It needs to be further explained that if Fig.10 As shown, driving member four 402 includes lead screw two 40202 driven to rotate by motor five 40203; lifting block 40201 is connected to lead screw two 40202 by threading to realize lifting and lowering, and is connected to driving seat 40204 with motor six at the same time; rotating seat 40205 with motor seven is driven by motor six to rotate and sleeve driving seat 40204; threaded shaft 40206 is located between two groups of rotating seats 40205, and is driven to rotate by motor seven; belt drum 40207 is connected to threaded shaft 40206 by threading to realize overall horizontal movement; the two ends of belt two 401 are respectively sleeved on the belt drum 40207 on the corresponding sides.

[0048] It should be further explained that a guide rod 40208 movably penetrating the belt cylinder 40207 is provided between the two sets of rotating seats 40205 ; the guide rod 40208 is provided in parallel with the threaded shaft 40206 to guide the horizontal movement of the belt cylinder 40207 .

[0049] The screw shaft 40206 rotates to drive the belt 2 401 to move horizontally forward and backward. The rotating seat 40205 rotates to drive the belt 2 401 to rotate left and right. The lifting block 40201 is lifted and lowered to drive the belt 2 401 to move up and down, and finally the position adjustment of the laser drilling component 5 is realized.

[0050] like Fig.11 As shown, the laser drilling component 5 includes a base 501 connected to the belt 2 401 through a mounting base 2 502; the rotating base 503 is driven by a motor 8 and is rotatably set on the base 501; the mounting sleeve 506 is driven by a driving member 5 and moves horizontally on the rotating base 503, and the moving trajectory intersects the rotating axis of the rotating base 503 at right angles; the laser head 507 is detachably mounted on the mounting sleeve 506.

[0051] It should be further explained that a sliding groove is set on the rotating seat 503; the driving member five includes a screw three 504 driven by a motor nine and rotating in the sliding groove; the translation block 505 is connected to the screw three 504 through a thread and moves horizontally in the sliding groove; the mounting sleeve 506 is connected to the translation block 505.

[0052] It should be further explained that the laser head 507 is on the snap-fit ​​mounting sleeve 506 .

[0053] During laser drilling, the laser head 507 can drill holes along a circular or spiral trajectory by rotating the rotating base 503 and horizontally moving the mounting sleeve 506. This drilling method can evenly distribute laser energy, reduce local overheating, and thus reduce the risk of coating shedding.

[0054] like Fig.12 As shown, the supporting ventilation component 6 includes a ventilation box 601 arranged throughout the operating box 1; the ventilator 604 is located in the ventilation box 601; the filter element 605 is located on the side of the ventilation box 601 extending out of the operating box 1; the supporting ventilation frame 602 is located on the side of the ventilation box 601 extending into the operating box 1, and a ventilation head 603 is provided; the supporting ventilation component 6 arranged on the upper layer corresponding to the belt 201, the ventilator 604 is a heating blower; the supporting ventilation component 6 arranged on the lower layer corresponding to the belt 201, the ventilator 604 is an exhaust fan.

[0055] By setting different fans 604, the supporting ventilation assembly 6 corresponding to the upper layer of the belt 1 201 sends hot air to the silicon carbide coated graphite disc 7 in the upper layer drilled holes, so as to achieve the purpose of preheating and cleaning. The supporting ventilation assembly 6 corresponding to the lower layer of the belt 1 201 draws air to the silicon carbide coated graphite disc 7 after the lower layer drilled holes, so as to achieve the purpose of collecting graphite slag and cooling and shaping.

[0056] It should be further explained that four groups of support ventilation components 6 are provided, corresponding to the two sides of the upper belt 201 and the two sides of the lower belt 201, and are arranged in a mirror image. Since two groups of belt 201 are provided, four groups of corresponding support ventilation components 6 are provided, so that the silicon carbide coated graphite discs 7 on the two groups of belt 201 can be ventilated in a targeted manner.

[0057] It should be further explained that two layers of supporting ventilation frames 602 are arranged on each group of supporting ventilation components 6; the two layers of supporting ventilation frames 602 constitute a groove structure, which respectively fits the upper and lower ends of belt 1 201 to support and guide belt 1 201, thereby maintaining the stability of the moving trajectory of the silicon carbide coated graphite disk 7.

[0058] Embodiment 2

[0059] This embodiment proposes a method for laser drilling a silicon carbide coated graphite disk, which uses the laser drilling equipment used for processing the silicon carbide coated graphite disk in the first embodiment, and the specific steps are as follows:

[0060] S1. As the belt 1 201 rotates, the unloaded positioning and heating component 3 moves to the outside of the feeding port 101;

[0061] S2. Place two silicon carbide coated graphite disks 7 to be punched one above the other in the positioning groove, and roll the positioning wheel 30701 to assist it to fit with the conductive plate 302; then the lead screw 30703 rotates, and the translation shaft 30702 drives the positioning wheel 30701 to move close to the outer wall of the silicon carbide coated graphite disk 7, and clamps and positions the silicon carbide coated graphite disk 7 at multiple points from the periphery;

[0062] S3, through the cooperation of the adsorption valve 30303 and the vacuum pump 30305, negative pressure is formed on the two conductive plates 302; the silicon carbide coated graphite disk 7 is adsorbed and fixed;

[0063] S4, the positioning and heating assembly 3 carrying the silicon carbide coated graphite disk 7 to be drilled is moved into the operating box 1;

[0064] S5, by rotating the belt 2 401, the laser head 507 is adjusted to move to the top of the silicon carbide coated graphite disk 7 to be drilled;

[0065] S6, after the conductive plate 302 is energized, the current flows inside the graphite disk, causing the graphite disk to heat up, thereby achieving a preheating effect;

[0066] S7, start drilling, by rotating the rotating seat 503 and horizontally moving the mounting sleeve 506, the laser head 507 drills along a circular or spiral trajectory; by moving forward and backward, left and right, and up and down, the position of the upper laser head 507 is further adjusted; by rotating in multiple directions, the position of the lower silicon carbide coated graphite disk 7 is further adjusted to match the drilling requirements;

[0067] At this time, the supporting ventilation assembly 6 arranged on the upper layer of the corresponding belt 1 201 sends hot air to the silicon carbide coated graphite disk 7 in the upper drilling hole to achieve the purpose of preheating and cleaning;

[0068] If a through hole is formed, the dust from the drilling will enter the filter screen 30304 of the adsorption box 30301 through the adsorption holes on the conductive plate 302;

[0069] S8, after the drilling is completed, the positioning and heating assembly 3 carrying the silicon carbide coated graphite disk 7 is moved to the lower layer; the supporting ventilation assembly 6 arranged at the lower layer of the corresponding belt 1 201 draws air toward the silicon carbide coated graphite disk 7 after the drilling of the lower layer, collects the graphite slag and cools and shapes it at the same time;

[0070] S9, the positioning heating assembly 3 is moved to the outside of the feeding port 101, and the adsorption and clamping positioning of the silicon carbide coated graphite disk 7 are released;

[0071] S10, replace the silicon carbide coated graphite disk 7 to be drilled, and cycle the work.

[0072] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited thereto, and various changes can be made within the knowledge scope of technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A laser drilling device for processing silicon carbide coated graphite disks, characterized in that: include: An operating box (1), a material delivery port (101) is arranged on one side of the operating box (1), a belt material delivery component 1 (2) penetrating the material delivery port (101) and a belt material delivery component 2 (4) located above the belt material delivery component 1 (2) are arranged inside the operating box (1); Positioning heating components (3), the positioning heating components (3) are dispersedly arranged in two layers, upper and lower, along the feeding direction of the belt feeding component (2), each group of positioning heating components (3) positions the silicon carbide coated graphite disks (7) on both sides by vacuum adsorption, and heats the silicon carbide coated graphite disks (7) on both sides by electrical conduction; Laser drilling components (5), the laser drilling components (5) are dispersedly arranged in two layers along the feeding direction of the belt feeding component 2 (4), and the multiple groups of laser drilling components (5) are respectively provided with laser heads (507) of different specifications and capable of moving in a circular or spiral trajectory; And a supporting ventilation component (6), wherein the supporting ventilation component (6) is arranged in multiple groups corresponding to the upper and lower layers of the positioning heating components (3), and the belt conveying component (2) is guided and supported by a groove structure; wherein the upper supporting ventilation component (6) sends in hot air, which, on the one hand, keeps the silicon carbide coated graphite disk (7) in the process of drilling heat-insulating, and on the other hand, cleans the silicon carbide coated graphite disk (7) in the process of drilling, and the lower supporting ventilation component (6) exhausts air, which, on the one hand, collects graphite slag, and, on the other hand, cools the silicon carbide coated graphite disk (7) after drilling.

2. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 1, characterized in that: The belt conveying assembly (2) comprises two sets of belts (201) and a driving member (201) for driving the two sets of belts (201) to rotate synchronously; the positioning heating assembly (3) is arranged between the two sets of belts (201).

3. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 1, characterized in that: The positioning heating component (3) comprises an insulating positioning sleeve (301) with two open ends; an adsorption member (303) is arranged inside the insulating positioning sleeve (301), and conductive plates (302) with adsorption holes are arranged at both ends; a positioning groove is formed between the conductive plate (302) and the sleeve opening of the insulating positioning sleeve (301); and a driving member 2 is arranged on the outer periphery of the insulating positioning sleeve (301) for driving the insulating positioning sleeve (301) to rotate in a horizontal plane and flip in a vertical plane.

4. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 3, characterized in that: A circle of positioning members (307) is arranged on the positioning groove; A mounting groove (30101) is arranged on the groove wall of the positioning groove; the positioning member (307) comprises a positioning wheel (30701) driven by a driving member 3 and translated into and out of the mounting groove (30101); the positioning wheel (30701) is rotatable and the material is insulated.

5. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 3, characterized in that: The adsorption component (303) includes an adsorption box (30301) for adsorption at both ends; the adsorption box (30301) divides the interior of the insulating positioning sleeve (301) into two independent adsorption chambers; the two adsorption chambers correspond one to one with two conductive plates (302) with adsorption holes; an annular filter screen (30304) is arranged at the inner center of the adsorption box (30301), an air pump (30305) is arranged on the inner periphery, and adsorption valves (30303) corresponding one to one with the two adsorption chambers are arranged on the upper and lower ends of the box cover (30302); the air outlet end of the adsorption valve (30303) is connected to the inner periphery of the filter screen (30304).

6. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 1, characterized in that: The belt conveying assembly 2 (4) includes a belt 2 (401) and a driving member 4 (402) that drives the belt 2 (401) to rotate synchronously; the driving member 4 (402) can also drive the belt 2 (401) to move up and down and forward and backward; multiple groups of laser drilling assemblies (5) are arranged along the belt 2 (401) and their positions are adjusted by moving up and down, left and right, and forward and backward.

7. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 6, characterized in that: The laser drilling assembly (5) comprises a base (501) connected to a belt (401) via a second mounting seat (502); a rotating seat (503) rotatably arranged on the base (501); a mounting sleeve (506) driven by a driving member (5) to move horizontally on the rotating seat (503), and a moving trajectory intersecting perpendicularly with a rotating axis of the rotating seat (503); and a laser head (507) detachably mounted on the mounting sleeve (506).

8. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 2, characterized in that: The supporting ventilation assembly (6) comprises a ventilation box (601) arranged to penetrate the operating box (1); a ventilator (604) is located in the ventilation box (601); a filter element (605) is located on a side of the ventilation box (601) extending out of the operating box (1); a supporting ventilation frame (602) is located on a side of the ventilation box (601) extending into the operating box (1), and is provided with a ventilation head (603); The supporting ventilation assembly (6) is arranged on the upper layer of the corresponding belt 1 (201), and the ventilator (604) is a heating blower; Corresponding to the supporting ventilation assembly (6) arranged at the lower layer of the belt 1 (201), the ventilator (604) is an exhaust fan.

9. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 8, characterized in that: Four groups of supporting ventilation components (6) are provided, corresponding to the two sides of the upper belt 1 (201) and the two sides of the lower belt 1 (201), and are arranged in a mirror image in pairs.

10. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 9, characterized in that: Two layers of supporting ventilation frames (602) are arranged on each group of supporting ventilation components (6); the two layers of supporting ventilation frames (602) form a groove structure, and support and guide belt one (201) by respectively fitting the upper and lower ends of belt one (201).

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