Recovery method of aluminum-scandium alloy target material

Abstract

The invention discloses a recovery method of an aluminum-scandium alloy target material. The recovery method is carried out by adopting a recovery system of the aluminum-scandium alloy target material, and the recovery system comprises an impurity removal device, a distillation purification device and a vacuum suspension smelting device which are connected in sequence; the recovery method comprises the following steps: carrying out impurity removal, distillation purification and vacuum suspension smelting on an aluminum-scandium alloy target material without a back plate to prepare an aluminum-scandium alloy ingot; wherein the impurity removal method is heat treatment; the temperature of the heat treatment is 850-1100 DEG C. The recovery method is simple in process, and the recovered aluminum-scandium alloy cast ingot is high in purity and recovery rate.

Description

Technical Field

[0001] The invention relates to the technical field of target material recycling, and in particular to a method for recycling an aluminum-scandium alloy target material. Background Art

[0002] Aluminum-scandium (Al-Sc) alloy target is an ideal piezoelectric thin film material for preparing radio frequency filter chips, and is increasingly widely used in optoelectronic devices, electronic components, and microelectromechanical systems (MEMS).

[0003] At present, the utilization rate of target materials is generally around 20%~50%. At the same time, since scandium (Sc) is a rare metal and a very expensive strategic resource, it is of great significance to recycle Al-Sc targets.

[0004] Patent CN202210914816.X discloses a method for recycling and reusing a sputtering target assembly, which uses a physical separation method to separate the sputtering target assembly to obtain a back plate and a sputtering target, and then the sputtering target is subjected to alkaline solution leaching, acid solution leaching, water washing, drying, smelting, standing and casting to obtain a metal ingot. The Al-Sc target has a high Sc content and active chemical properties. During the acid-base leaching process, it will react with the leaching solution to produce a large amount of loss. It is also easy to introduce impurities, which affects the purity of the alloy ingot. This method is not suitable for the recovery of Al-Sc targets.

[0005] Patent CN202310242989.6 discloses a method for recycling and reusing target materials. The target material after sputtering is subjected to etching curve analysis. According to the etching curve, the target material area to be recycled is determined. According to the size requirements of the finished target material, the target material area to be recycled is cut to obtain a target material block. The sputtering channel of the target material block is processed flat to obtain a finished target material. The target material manufactured by this method needs to avoid the unusable area of ​​the residual target and is smaller than the original specification target material; the material recovery rate is low.

[0006] Therefore, it is necessary to provide a method for recycling Al-Sc alloy target with high recovery rate and simple process. Summary of the invention

[0007] The technical problem to be solved by the present invention is to overcome the defects of the prior art aluminum-scandium target material recovery method, which has a complicated process, low purity of the recovered alloy and low recovery rate, and provide a recovery method for aluminum-scandium alloy target material. The recovery method of the present invention has a simple process, and the recovered aluminum-scandium alloy ingot has a high purity and a high recovery rate.

[0008] The present invention adopts the following technical solutions to solve the above technical problems.

[0009] The present invention provides a method for recovering an aluminum-scandium alloy target material, which is carried out by using a recovery system for the aluminum-scandium alloy target material; the recovery system for the aluminum-scandium alloy target material comprises an impurity removal device, a distillation purification device and a vacuum suspension melting device which are connected in sequence; the distillation purification device comprises a distillation module, a collection module and a heat insulation module; the distillation module comprises a cover plate and a first container with a top opening; the cover plate is arranged above the top opening of the first container; the cover plate is provided with a cover plate opening smaller than the cover plate diameter; the collection module comprises a second container with a bottom opening and a cooling device arranged at the periphery of the second container, the bottom opening of the second container being arranged above the cover plate; the cover plate opening extends toward the interior of the second container to form a cover plate opening extension portion, and the first container and the second container are connected through the cover plate opening and the cover plate opening extension portion; the heat insulation module comprises a first heat insulation element, the first heat insulation element is arranged at the periphery of the opening of the first container, and is used for heat insulation between the first container and the outside of the second container;

[0010] The method for recovering the aluminum-scandium alloy target comprises the following steps:

[0011] The aluminum-scandium alloy target material with the back plate removed is subjected to impurity removal, distillation purification and vacuum suspension melting to obtain an aluminum-scandium alloy ingot;

[0012] Wherein, the impurity removal method is heat treatment; the temperature of the heat treatment is 850-1100°C.

[0013] In the present invention, the impurity removal device and the vacuum suspension smelting device are both conventional devices in the art.

[0014] In the present invention, the specifications of the aluminum-scandium alloy target are not limited, and are generally (300-350)×(4-8) mm, for example, 304×6 mm.

[0015] In the present invention, the scandium content of the aluminum-scandium alloy target may be 5-40 at.%, preferably 10-30 at.%, for example 20 at.%.

[0016] In the present invention, the aluminum-scandium alloy target is generally obtained by binding an aluminum-scandium alloy sputtering target and a back plate. The material of the back plate can be copper or aluminum alloy. The grade of the aluminum alloy can be 6061 or 6063. The binding method of the aluminum-scandium alloy sputtering target and the back plate can be indium binding or diffusion welding binding.

[0017] In the present invention, the method of removing the backplane is generally determined based on the binding method.

[0018] When the binding method is indium binding, the method of removing the back plate can be heating unbinding. During the heating unbinding, the temperature can be 200-300°C, for example, 230°C. After the heating unbinding, the step of scraping off the indium on the binding surface of the aluminum-scandium alloy target is also included. After the heating unbinding, the mass content of indium in the aluminum-scandium alloy target is less than 0.1%.

[0019] When the bonding method is diffusion welding bonding, the method of removing the back plate may be cutting and releasing the bonding.

[0020] In the present invention, before removing impurities from the aluminum-scandium alloy target without the backing plate, the step of shearing the aluminum-scandium alloy target without the backing plate into blocks is also included. The shearing can be shearing the aluminum-scandium alloy target without the backing plate to a maximum side size of less than 100 mm.

[0021] In the present invention, before the impurity removal, the vacuum degree of the system can be 1×10 -3 Up to 5×10 -2 Pa, preferably 1×10 -2 Up to 4×10 -2 Pa, for example 2×10 -2 or 3×10 -2 Pa.

[0022] In the present invention, the impurity removal equipment may be conventional in the art, such as a vacuum carbon tube furnace.

[0023] In the present invention, during the impurity removal, the aluminum-scandium alloy target material without the back plate can be placed in a tungsten crucible. The purity of the tungsten crucible can be ≥99.9%.

[0024] In the present invention, the temperature of the heat treatment is preferably 900-1100°C, such as 1000°C.

[0025] In the present invention, the heat treatment time may be 1-3 hours, for example 2 hours.

[0026] In the present invention, after the impurity removal and before the distillation purification, the temperature of the system is preferably lowered, and the temperature after the lowering may be below 70°C.

[0027] In the present invention, after the impurity removal and before the distillation purification, the vacuum degree of the system can be 1×10 -3 Up to 5×10 -2 Pa, preferably 1×10 -2 Up to 4×10 -2 Pa, for example 2×10 -2 or 3×10 -2 Pa.

[0028] In the present invention, the material of the condenser used in the distillation purification may be tantalum.

[0029] In the present invention, the temperature of the distillation purification may be 1600-1750°C, for example 1650 or 1700°C.

[0030] In the present invention, the distillation purification time may be 4-10 hours, for example 5 hours.

[0031] In the present invention, after the distillation purification and before the vacuum suspension melting, it is preferred to further include cooling and stripping steps. The end point of the cooling may be below 70° C. The stripping refers to stripping the alloy in the collector from the collector during the distillation purification process.

[0032] In the present invention, after the distillation and purification and before the vacuum suspension smelting, the vacuum degree of the system may be 0.01-0.1 MPa, preferably 0.04-0.08 MPa, for example 0.06 MPa. Preferably, the system is first evacuated to a vacuum degree of 6×10 - 3 Pa, and then fill with argon until the vacuum degree of the system is 0.01-0.1 MPa, preferably 0.04-0.08 MPa, such as 0.06 MPa.

[0033] In the present invention, the vacuum suspension smelting equipment may be a vacuum suspension furnace.

[0034] In the present invention, the temperature of the vacuum levitation melting can be determined according to the composition of the aluminum-scandium alloy target. Preferably, the temperature of the vacuum levitation melting is 50-100° C. higher than the liquidus point of the aluminum-scandium alloy target.

[0035] In the present invention, the vacuum suspension smelting time may be 5-15 minutes, for example 10 minutes.

[0036] In the present invention, by structurally designing the distillation purification device, the distillation module and the collection module can form two temperature zones, which is convenient for efficiently collecting the target object by distillation, improving the recovery purity and recovery rate of the target object, and avoiding the difficulty of condensing the target object in the collection module due to the similar temperature of the distillation module and the collection module.

[0037] In the present invention, by providing a cover plate opening smaller than the cover plate diameter on the cover plate, the reflux of high boiling point and low melting point metals during the distillation process can be effectively prevented; however, this design does not affect the condensation collection of metals with higher melting points.

[0038] In the present invention, the first container may be a "crucible" for distilling and purifying a substance; and the second container may be a "collector" for condensing and collecting a target substance.

[0039] In the present invention, preferably, the cooling device comprises a cooling coil and a cooling baffle, the cooling coil is wound around the periphery of the side wall surface of the second container, and the cooling baffle is arranged above the top surface of the second container.

[0040] In the present invention, preferably, the top surface of the second container is a planar structure.

[0041] In the present invention, preferably, the distillation and purification device further comprises a furnace body with a hollow interior, and the distillation module, the collection module and the insulation module are all arranged in the furnace body.

[0042] Preferably, the cooling medium pipeline of the cooling device passes through the outer wall surface of the furnace body and is connected to a cooling medium source arranged outside the furnace body.

[0043] In the present invention, preferably, the distillation module also includes a second thermal insulation element, which is a barrel-shaped structure with an open top, and the top opening of the second thermal insulation element is connected to the lower surface of the first thermal insulation element to form a distillation area for placing the first container.

[0044] Preferably, a heating element is also provided in the distillation zone.

[0045] Preferably, the first heat insulation element is a heat insulation board; and the second heat insulation element is a heat insulation screen.

[0046] In the present invention, the length of the cover plate opening extension portion can be set according to the distillation temperature and material properties; preferably, the length of the cover plate opening extension portion does not exceed 2 cm; to avoid condensation of the distilled metal at the opening.

[0047] On the basis of being in accordance with the common sense in the art, the above-mentioned preferred conditions can be arbitrarily combined to obtain the preferred embodiments of the present invention.

[0048] The reagents and raw materials used in the present invention are commercially available.

[0049] The positive and progressive effects of the present invention are:

[0050] The present invention can recover the aluminum-scandium alloy metal in the aluminum-scandium alloy target material by removing impurities in a specific manner and at a specific temperature, and by using a specific distillation and purification device. The recovery method of the present invention has a simple process, and the aluminum-scandium alloy ingot gold recovered has a high purity and a high recovery rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] Figure 1 This is a process flow chart of the recovery method of the aluminum-scandium alloy target in Examples 1-3.

[0052] Figure 2 It is a schematic diagram of the structure of the distillation purification device of Example 1-3.

[0053] Description of reference numerals:

[0054] Furnace 1

[0055] Heat insulation board 2

[0056] Heating element 3

[0057] Heat shield 4

[0058] First container 5

[0059] Cover 6

[0060] Cover opening 61

[0061] Cover opening extension 62

[0062] Second container 7

[0063] Cooling coil 8

[0064] Cooling baffle 9

[0065] Cooling coil water inlet 10

[0066] Cooling coil water outlet 11

[0067] Cooling baffle water inlet 12

[0068] Cooling baffle water outlet 13. DETAILED DESCRIPTION

[0069] The present invention is further described below by way of examples, but the present invention is not limited to the scope of the examples. The experimental methods in the following examples without specifying specific conditions are carried out according to conventional methods and conditions, or selected according to the product specifications.

[0070] Figure 1 This is a process flow chart of the recovery method of the aluminum-scandium alloy target in Examples 1-3.

[0071] The relationship between the liquidus point and the components of the aluminum-scandium target used in the following examples or comparative examples is as follows:

[0072] Sc content in aluminum-scandium target The corresponding liquidus point of aluminum-scandium target <h2 style=";text-align:left;direction:ltr"><25at.%<h2 style=";text-align:left;direction:ltr"> 660℃ 25-33at.% 1283℃ 33at.%-50at.% 1190℃

[0073] Example 1

[0074] This embodiment provides a method for recycling an aluminum-scandium alloy target material, which is carried out using an aluminum-scandium alloy target material recycling system; the aluminum-scandium alloy target material recycling system includes an impurity removal device, a distillation purification device and a vacuum suspension melting device connected in sequence; Figure 2Schematic diagram of the structure of the distillation purification device; the distillation purification device includes a furnace body 1 with a hollow interior, and a distillation module, a collection module and a heat insulation module are all arranged in the furnace body 1; the distillation module includes a cover plate 6 and a first container 5 with a top opening; the cover plate 6 is arranged above the top opening of the first container 5; a cover plate opening 61 smaller than the diameter of the cover plate 6 is provided on the cover plate 6; the collection module includes a second container 7 with a bottom opening, and a cooling device arranged outside the second container 7, the cooling device includes a cooling coil 8 and a cooling baffle 9, the cooling coil 8 is wound around the periphery of the side wall surface of the second container 7, the cooling baffle 9 is arranged above the top surface of the second container 7, and the cooling coil 8 is respectively provided with cooling lines The furnace body 1 has a water inlet 10 and a water outlet 11 for the cooling coil, and the cooling baffle 9 is provided with a cooling baffle water inlet 12 and a cooling baffle water outlet 13 respectively; the cooling medium pipeline of the cooling device passes through the outer wall of the furnace body 1 and is connected to a cooling medium source arranged outside the furnace body 1; the top surface of the second container 7 is a horizontal structure; the bottom opening of the second container 7 is arranged above the cover plate 6; the cover plate opening 61 extends to the inside of the second container 7 to form a cover plate opening extension 62, and the first container 5 and the second container 7 are connected through the cover plate opening 61; the heat insulation module includes a first heat insulation element, which is arranged on the periphery of the opening of the first container 5 and is used for heat insulation of the first container 5 and the outside of the second container 7;

[0075] The distillation module also includes a second thermal insulation element, which is a barrel-shaped structure with an open top. The top opening of the second thermal insulation element is connected to the lower surface of the first thermal insulation element to form a distillation area for placing the first container 5. A heating body 3 is also provided in the distillation area. The first thermal insulation element is an insulation board 2. The second thermal insulation element is an insulation screen 4. The length of the cover opening extension 62 is 1 cm.

[0076] The method for recovering the aluminum-scandium alloy target comprises the following steps:

[0077] (1) Removing the back plate: The size of the Al-Sc alloy target is 304×6mm, the scandium content of the target is 10at.%, the back plate is made of copper, and the Al-Sc alloy sputtering target and the back plate are bound by indium. Place the Al-Sc alloy target on a heating platform, set the heating temperature to 230°C, and scrape off the indium on the binding surface of the target after unbinding, so that the mass content of indium in the Al-Sc alloy target is less than 0.1%.

[0078] (2) Impurity removal: Cut the Al-Sc alloy sputtering target into alloy blocks with the longest side less than 100 mm, put them into a tungsten crucible, put the tungsten crucible into a vacuum carbon tube furnace, and evacuate to a vacuum degree of 1×10 -2 After 1000°C, heating was started and the temperature was raised to 1000°C. After keeping the temperature for 1 hour, heating was stopped.

[0079] (3) Distillation and purification: After cooling to below 70°C, install a tantalum collector and evacuate to 1×10 -2 After 3 hours, heating was started, the temperature was raised to 1650°C, and the heating was stopped after keeping the temperature for 4 hours.

[0080] (4) Vacuum suspension smelting: When the furnace temperature cools down to below 70°C, remove the collector, peel off the collected metal from the collector and place it in a vacuum suspension furnace, and evacuate to 6×10 -3 Pa, fill with argon to 0.06Mpa for smelting; the smelting temperature is 50-100°C higher than the liquidus point of the alloy components, and keep warm for 10 minutes to obtain an aluminum-scandium alloy ingot.

[0081] After sampling and GDMS testing, the purity of the aluminum-scandium alloy ingot obtained was higher than 4N (99.99%), and the metal recovery rate was 87.3%.

[0082] Example 2

[0083] The only difference from Example 1 is that the scandium content of the Al—Sc alloy target is 20 at.%.

[0084] After sampling and GDMS testing, the purity of the aluminum-scandium alloy ingot obtained was higher than 4N (99.99%), and the metal recovery rate was 86.4%.

[0085] Example 3

[0086] The only difference from Example 1 is that the scandium content of the Al-Sc alloy target is 30 at.%, the distillation purification temperature is 1700° C., and the time is 5 h.

[0087] After sampling and GDMS testing, the alloy purity was higher than 4N (99.99%) and the metal recovery rate was 90.1%.

[0088] Comparative Example 1

[0089] The only difference from Example 2 is that no water cooling sleeve is used outside the collector during the distillation purification process, and the temperature of the collector is 900-1100°C.

[0090] In this comparative example, the lower part of the collector was damaged due to metal reflux, and the metal yield remaining in the collector was 34.2%. The alloy purity was higher than 4N (99.99%) after GDMS detection.

[0091] Comparative Example 2

[0092] The only difference from Example 3 is that no impurity removal process is adopted.

[0093] After sampling and GDMS testing, the alloy purity was lower than 4N (99.99%), the main impurities were In (233ppm), Mn (95ppm), Mg (32ppm), and the metal recovery rate was 89.7%.

[0094] Comparative Example 3

[0095] The only difference from Example 3 is that the impurity removal process temperature is set to 800°C.

[0096] After sampling and GDMS testing, the alloy purity was lower than 4N (99.99%), the main impurities were In (148ppm) and Mn (87ppm), and the metal recovery rate was 88.2%.

[0097] Comparative Example 4

[0098] The only difference from Example 3 is that the impurity removal process temperature is set to 1200°C.

[0099] After sampling and GDMS testing, the alloy purity was higher than 4N (99.99%) and the metal recovery rate was 81.6%.

[0100] Effect Example 1

[0101] The obtained aluminum-scandium alloy ingot is tested for purity. Purity = 100% - the total metal impurity mass content in the obtained aluminum-scandium alloy ingot; wherein the total metal impurity mass content refers to the mass content of other metal elements except aluminum and scandium detected in the glow discharge mass spectrometry (GDMS) test.

[0102] The metal recovery rate of the obtained aluminum-scandium alloy ingot is calculated. Metal recovery rate = weight of the obtained aluminum-scandium alloy ingot / (weight of the aluminum-scandium target material-weight of the backing plate)×100%.

[0103] The results are shown in Table 1.

[0104] Table 1

[0105] The purity of the aluminum-scandium alloy ingot obtained Metal recovery rate Example 1 Higher than 4N (99.99%) 87.3% Example 2 Higher than 4N (99.99%) 86.4% Example 3 Higher than 4N (99.99%) 90.1% Comparative Example 1 Higher than 4N (99.99%) 34.2% Comparative Example 2 Less than 4N (99.99%) 89.7% Comparative Example 3 Less than 4N (99.99%) 88.2% Comparative Example 4 Higher than 4N (99.99%) 81.6%

[0106] It can be seen from Table 1 that, compared with Comparative Examples 1-4, Examples 1-3 perform heat treatment to remove impurities at a specific temperature and use specific distillation and purification equipment, and the recovered aluminum-scandium alloy ingots have higher purity and recovery rate.

Claims

1. A method for recovering an aluminum-scandium alloy target, characterized in that: It adopts a recovery system of aluminum-scandium alloy target material; the recovery system of aluminum-scandium alloy target material comprises an impurity removal device, a distillation purification device and a vacuum suspension melting device connected in sequence; the distillation purification device comprises a distillation module, a collection module and a heat insulation module; the distillation module comprises a cover plate and a first container with a top opening; the cover plate is arranged above the top opening of the first container; a cover plate opening smaller than the cover plate diameter is arranged on the cover plate; the collection module comprises a second container with a bottom opening and a cooling device arranged at the periphery of the second container, and the bottom opening of the second container is arranged above the cover plate; the cover plate opening extends toward the inside of the second container to form a cover plate opening extension portion, and the first container and the second container are connected through the cover plate opening and the cover plate opening extension portion; the heat insulation module comprises a first heat insulation element, which is arranged at the periphery of the opening of the first container and is used for heat insulation of the first container and the outside of the second container; The method for recovering the aluminum-scandium alloy target comprises the following steps: The aluminum-scandium alloy target material with the back plate removed is subjected to impurity removal, distillation purification and vacuum suspension melting to obtain an aluminum-scandium alloy ingot; Wherein, the impurity removal method is heat treatment; the temperature of the heat treatment is 850-1100°C.

2. The method for recovering an aluminum-scandium alloy target according to claim 1, characterized in that: The method for recovering the aluminum-scandium alloy target material satisfies one or more of the following conditions ①-⑥: ① The temperature of the heat treatment is 900-1100°C; ② The heat treatment time is 1-3h; ③ Before the impurity removal, the vacuum degree of the system is 1×10 -3 Up to 5×10 -2 Pa; ④ After the impurity removal and before the distillation purification, the vacuum degree of the system is 1×10 -3 Up to 5×10 -2 Pa; ⑤ The temperature of the distillation purification is 1600-1750°C; ⑥ The time for the distillation purification is 4-10h.

3. The method for recovering an aluminum-scandium alloy target according to claim 2, characterized in that: The method for recovering the aluminum-scandium alloy target material satisfies one or more of the following conditions ①-⑥: ① The temperature of the heat treatment is 1000°C; ② The heat treatment time is 2h; ③ Before the impurity removal, the vacuum degree of the system is 1×10 -2 Up to 4×10 -2 Pa; ④ After the impurity removal and before the distillation purification, the vacuum degree of the system is 1×10 -2 Up to 4×10 -2 Pa; ⑤ The temperature of the distillation purification is 1650 or 1700°C; ⑥ The time for the distillation purification is 5h.

4. The method for recovering an aluminum-scandium alloy target according to claim 3, characterized in that: The method for recovering the aluminum-scandium alloy target material satisfies the following conditions ① and / or ②: ① Before the impurity removal, the vacuum degree of the system is 2×10 -2 or 3×10 -2 Pa; ② After the impurity removal and before the distillation purification, the vacuum degree of the system is 2×10 -2 or 3×10 -2 Pa.

5. The method for recycling an aluminum-scandium alloy target according to claim 1, characterized in that: The method for recovering the aluminum-scandium alloy target material satisfies the following conditions ① and / or ②: ① The scandium content of the aluminum-scandium alloy target is 5-40 at.%; ② The aluminum-scandium alloy target is obtained by binding an aluminum-scandium alloy sputtering target and a back plate, and the method of removing the back plate is determined based on the binding method, which is indium binding or diffusion welding binding.

6. The method for recovering an aluminum-scandium alloy target according to claim 5, characterized in that: The method for recovering the aluminum-scandium alloy target material satisfies the following conditions ① and / or ②: ① The scandium content of the aluminum-scandium alloy target is 10-30 at.%; ② When the binding method is indium binding, the method of removing the backplane is heating unbinding, and the temperature of the heating unbinding is 200-300°C; Alternatively, when the binding method is diffusion welding, the method of removing the back plate is cutting and unbinding.

7. The method for recovering an aluminum-scandium alloy target according to claim 1, characterized in that: The recycling method of the aluminum-scandium alloy target material meets one or more of the following conditions ①-③: ① After the distillation and purification and before the vacuum suspension smelting, the vacuum degree of the system is 0.01-0.1MPa; ② The temperature of the vacuum suspension melting is 50-100° C. higher than the liquidus point of the aluminum-scandium alloy target; ③ The vacuum suspension smelting time is 5-15 minutes.

8. The method for recovering an aluminum-scandium alloy target according to claim 7, characterized in that: The method for recovering the aluminum-scandium alloy target material satisfies the following conditions ① and / or ②: ① After the distillation and purification and before the vacuum suspension smelting, the vacuum degree of the system is 0.04-0.08MPa; ② The vacuum suspension smelting time is 10 minutes.

9. The method for recovering an aluminum-scandium alloy target according to claim 1, characterized in that: The recycling method of the aluminum-scandium alloy target material meets one or more of the following conditions ①-⑤: ① The cooling device comprises a cooling coil and a cooling baffle, wherein the cooling coil is wound around the periphery of the side wall surface of the second container, and the cooling baffle is arranged above the top surface of the second container; ② The top surface of the second container is a flat structure; ③ The distillation and purification device comprises a furnace body with a hollow interior, wherein the distillation module, the collection module and the heat insulation module are all arranged in the furnace body; the cooling medium pipeline of the cooling device passes through the outer wall surface of the furnace body and is connected to a cooling medium source arranged outside the furnace body; ④ The distillation module further includes a second thermal insulation element, which is a barrel-shaped structure with an open top, and the top opening of the second thermal insulation element is connected to the lower surface of the first thermal insulation element to form a distillation area for placing the first container; ⑤ The length of the extension portion of the cover opening does not exceed 2 cm.

10. The method for recycling an aluminum-scandium alloy target according to claim 9, characterized in that: The recycling method of the aluminum-scandium alloy target material meets the following conditions ① and / or ②: ① A heating element is also provided in the distillation zone; ②The first thermal insulation element is a thermal insulation board; the second thermal insulation element is a thermal insulation screen.

Images