Pipeline connecting device and wet processing equipment comprising same

Abstract

The invention discloses a pipeline connecting device and wet processing equipment comprising the same, the pipeline connecting device comprises a main body, a first joint and at least one second joint, the first end of the main body is provided with a first threaded hole, the second end of the main body is provided with an outlet, and a fluid channel is arranged between the first threaded hole and the outlet; the outlet is used for discharging fluid in the fluid channel, at least one second threaded hole is formed in the side wall of the main body, and the at least one second threaded hole is communicated with the fluid channel; the first connector is in threaded connection with the first threaded hole and used for being connected with a first fluid pipeline so that fluid in the first fluid pipeline can flow into the fluid channel. The at least one second connector is in threaded connection with the corresponding second threaded hole and used for being connected with the corresponding second fluid pipeline so that fluid in the corresponding second fluid pipeline can be led into the fluid channel. According to the pipeline connecting device, the structure and installation procedures of the pipeline connecting device are simplified, the occupied space of the pipeline connecting device is saved, and maintenance and cost reduction are facilitated.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to a pipeline connecting device and wet processing equipment comprising the same. Background Art

[0002] In semiconductor wet processing equipment, the liquid supply end supplies cleaning liquid to the process chamber through a liquid supply pipeline, and a bypass liquid outlet pipeline is arranged on the liquid supply pipeline. When the process is executed in the process chamber, the liquid supply end is connected with the liquid supply pipeline and the process chamber, and the liquid supply end supplies cleaning liquid to the process chamber through the liquid supply pipeline, so that the process chamber performs a wet cleaning process on the wafer inside. When the process is completed in the process chamber, the liquid supply pipeline stops supplying cleaning liquid to the process chamber, and the liquid supply pipeline is connected with the bypass liquid outlet pipeline at this time, and the bypass liquid outlet pipeline is connected to the factory drainage system through a pipeline connection device, so that the cleaning liquid in the liquid supply pipeline is discharged to the factory drainage system through the pipeline connection device, including the bubbles generated by the cleaning liquid are also discharged to the factory drainage system through the pipeline connection device, so that the pressure in the liquid inlet pipeline is balanced, the flow is stable, and the temperature fluctuation is reduced.

[0003] When there are many types of cleaning fluids, there are also many corresponding liquid supply pipelines and bypass liquid outlet pipelines. In this case, the pipeline connection device needs to be connected to multiple bypass liquid outlet pipelines. Figure 1 As shown, the pipeline connection device 100' mainly includes a main body 110', three types of joints and a plurality of connecting pipes 160'. The main body 110' is connected to the first joint 121', the first joint 121' is connected to the second joint 122', a connecting pipe 160' is connected between the first joint 121' and the second joint 122', and a plurality of third joints 123' are connected to the connecting pipe 160'. Each of the second joint 122' and the third joint 123' is used to connect a bypass liquid outlet pipeline. The more the bypass liquid outlet pipelines, the more joints and connecting pipes 160' are required, and the design direction of the plurality of connecting pipes 160' also needs to be considered, wherein the connection between the plurality of connecting pipes 160' is mostly welded. Therefore, the pipeline connection device 100' currently used has the disadvantages of complex structure, cumbersome installation process, large space occupation, difficult maintenance and high cost. Summary of the invention

[0004] The purpose of the present invention is to solve the problems in the prior art that the pipeline connection device of the wet processing equipment has a complex structure, cumbersome installation process, large occupied space, difficult maintenance and high cost.

[0005] In order to solve the above problems, the present application proposes a pipeline connection device, comprising:

[0006] A main body having a first end, a second end and a side wall, wherein the first end is provided with a first threaded hole, the second end is provided with an outlet, a fluid channel is provided between the first threaded hole and the outlet for fluid to pass through, the outlet is used to discharge the fluid in the fluid channel, and at least one second threaded hole is provided on the side wall of the main body, and the at least one second threaded hole is connected to the fluid channel;

[0007] A first connector, threadedly connected to the first threaded hole, for connecting the first fluid pipeline, so that the fluid in the first fluid pipeline passes from the first threaded hole into the fluid channel;

[0008] At least one second connector is threadedly connected to the corresponding second threaded hole and is used to connect the corresponding second fluid pipeline so that the fluid in the corresponding second fluid pipeline flows into the fluid channel from the second threaded hole.

[0009] In one embodiment of the present application, the size of the first threaded hole is the same as or different from the size of each second threaded hole.

[0010] In an embodiment of the present application, the size of the first threaded hole and the size of the at least one second threaded hole are both smaller than the size of the outlet.

[0011] In one embodiment of the present application, the first threaded hole, the at least one second threaded hole and the outlet are all NPT threaded holes.

[0012] In one embodiment of the present application, a mounting plate is provided on the outer periphery of the main body, and a plurality of slots penetrating the mounting plate are provided on the mounting plate. The slots extend along the circumference of the main body, and the main body is installed at a predetermined position through the slots.

[0013] In one embodiment of the present application, there are four slots, which are all located on the same horizontal plane, and the angular interval between any two adjacent slots in the circumferential direction of the main body is 90°.

[0014] In one embodiment of the present application, the material of the main body is PTFE or PFA.

[0015] The present application provides a wet processing device, comprising at least one of the above-mentioned pipeline connecting devices.

[0016] In one embodiment of the present application, the first fluid pipeline and the second fluid pipeline are both bypass liquid outlet pipelines.

[0017] The pipeline connection device of the present application includes a main body, a first joint and at least one second joint. The first end of the main body is provided with a first threaded hole, and the first joint is threadedly connected to the first threaded hole. The second end of the main body is provided with an outlet. The side wall of the main body is provided with at least one second threaded hole, and at least one second joint is threadedly connected to the corresponding second threaded hole. By providing the first threaded hole at the first end of the main body, the first fluid pipeline can be connected to the fluid channel through the first joint and the first threaded hole. By providing at least one second threaded hole on the side wall of the main body, at least one second fluid pipeline can be connected to the fluid channel through the corresponding second joint and the second threaded hole, thereby realizing the transmission and discharge of multi-channel fluids. Therefore, the present application simplifies the structure and installation process of the pipeline connection device, saves the space occupied by the pipeline connection device, and is conducive to maintenance and cost reduction.

[0018] Other features and corresponding beneficial effects of the present invention are described in the latter part of the specification, and it should be understood that at least part of the beneficial effects become obvious from the description in the specification of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a stereoscopic diagram of a pipe connection device;

[0020] Figure 2 A three-dimensional diagram of a pipe connection device according to an embodiment of the present application;

[0021] Figure 3 A three-dimensional diagram of the main body of a pipe connection device according to an embodiment of the present application;

[0022] Figure 4 A side view of the main body of a pipe connection device according to an embodiment of the present application;

[0023] Figure 5 For along Figure 4 Sectional view along the mid-UU line;

[0024] Figure 6 A three-dimensional diagram showing that three second threaded holes are arranged on the side wall of the main body of an embodiment of the present application;

[0025] Figure 7 A side view of a pipeline connection device according to an embodiment of the present application including three second connectors; and

[0026] Figure 8 A top view of a side wall of a main body according to an embodiment of the present application having three second threaded holes. DETAILED DESCRIPTION

[0027] The following specific embodiments illustrate the implementation of the present invention, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this implementation. On the contrary, the purpose of introducing the invention in conjunction with the implementation is to cover other options or modifications that may extend based on the claims of the present invention. In order to provide a deep understanding of the present invention, the following description will include many specific details. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0028] It should be noted that in this specification, similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0029] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0031] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] In order to make the objectives, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0033] The pipeline connection device of the wet processing equipment of the present application is used to be arranged between multiple bypass liquid outlet pipelines (Bypass Drain) in the wet processing equipment and the factory drainage system. When the liquid supply pipeline at the liquid supply end of the wet processing equipment stops supplying cleaning liquid to the process chamber, the liquid supply pipeline is connected to the corresponding bypass liquid outlet pipeline, so that the cleaning liquid in the liquid supply pipeline can be discharged to the factory drainage system through the bypass liquid outlet pipeline via the pipeline connection device, including the bubbles generated by the cleaning liquid are also discharged to the factory drainage system through the pipeline connection device. When there are many types of cleaning liquids, there are also many corresponding liquid supply pipelines and bypass liquid outlet pipelines on the liquid supply pipelines. The cleaning liquid in the multiple bypass liquid outlet pipelines and the bubbles generated by the cleaning liquid can be discharged to the factory drainage system from the pipeline connection device of the present application at the same time. The wet processing equipment involved in the present application is used to complete processes such as wet etching and wafer cleaning of wafers.

[0034] Figure 2 It is a three-dimensional diagram of a pipeline connection device according to an embodiment of the present application. Figure 3 It is a three-dimensional diagram of the main body of a pipe connection device according to an embodiment of the present application. Figure 4 It is a side view of the main body of the pipe connection device according to one embodiment of the present application. Figure 5 is along Figure 4 Sectional view of the UU line. Figure 2 and Figure 3 As shown, the main body of the pipeline connection device is generally cylindrical in shape. This specification takes the cylindrical main body as an example for description.

[0035] Combined with reference Figures 2 to 5 The pipeline connection device 100 of this embodiment includes a main body 110, a first joint 120 and at least one second joint 130. The main body 110 has a first end, a second end and a side wall 1102. The first end is provided with a first threaded hole 111, and the second end is provided with an outlet 112. A fluid channel 113 is provided between the first threaded hole 111 and the outlet 112 to allow fluid to pass through. The outlet 112 is used to discharge the fluid in the fluid channel 113. At least one second threaded hole 114 is provided on the side wall 1102 of the main body 110, and at least one second threaded hole 114 is connected to the fluid channel 113. The first joint 120 is threadedly connected to the first threaded hole 111, and is used to connect the first fluid pipeline, so that the fluid in the first fluid pipeline passes from the first threaded hole 111 to the fluid channel 113. At least one second joint 130 is threadedly connected to the corresponding second threaded hole 114, and is used to connect the corresponding second fluid pipeline, so that the fluid in the corresponding second fluid pipeline passes from the corresponding second threaded hole 114 to the fluid channel 113.

[0036] The pipe connecting device 100 of the present application is provided with a first threaded hole 111 at the first end of the main body 110, and at least one second threaded hole 114 is provided on the side wall 1102 of the main body 110, so that the first fluid pipeline is connected to the first threaded hole 111 through the first joint 120, and at least one second fluid pipeline is connected to the corresponding second threaded hole 114 through the corresponding second joint 130, thereby realizing the transmission and discharge of multiple fluids, simplifying the structure and installation process of the pipe connecting device 100, saving occupied space, and facilitating maintenance and reducing costs.

[0037] It should be noted that the first fluid pipeline and the second fluid pipeline described in this embodiment both refer to the bypass liquid outlet pipeline mentioned above, and the fluid refers to cleaning fluid or gas.

[0038] In some embodiments, Figure 3 As shown, the side wall 1102 of the main body 110 is provided with a second threaded hole 114. The size of the first threaded hole 111 is one-half inch or three-eighths inch, and the size of the second threaded hole 114 is one-half inch or three-eighths inch. The sizes of the first threaded hole 111 and the second threaded hole 114 can be the same or different. As an example, the sizes of the first threaded hole 111 and the second threaded hole 114 are different. Specifically, the size of the first threaded hole 111 is one-half inch, and the size of the second threaded hole 114 is three-eighths inch. Correspondingly, the first joint 120 (combined with reference Figure 2 ) is adapted to the size of the second threaded hole 114, and the size of the second joint 130 is adapted to the size of the second threaded hole 114.

[0039] In addition, the size of the first threaded hole 111 and the size of the second threaded hole 114 are both smaller than the size of the outlet 112 , and the size of the outlet 112 is one inch.

[0040] The first connector 120 and the second connector 130 can be connected to first fluid pipelines and second fluid pipelines of different sizes, respectively, to achieve transmission and discharge of multiple fluids. As an example, the fluid in the first fluid pipeline or the second fluid pipeline is, for example, DIO3, FOM, or a mixture of ozone and hydrogen peroxide, etc., which can be selected according to actual needs. Among them, DIO3 refers to ozonated deionized water, and FOM refers to ozonated deionized water + hydrofluoric acid (HF).

[0041] Figure 6 It is a stereoscopic diagram showing that three second threaded holes are provided on the side wall of the main body of an embodiment of the present application. Figure 7 It is a side view of a pipeline connection device according to an embodiment of the present application including three second joints.

[0042] In some embodiments, Figure 6 and Figure 7 As shown, the side wall 1102 of the main body 110 is provided with three second threaded holes 114. In this embodiment, the three second threaded holes 114 have the same size, for example, all are three eighths of an inch. The size of the second joint 130 is adapted to the size of the second threaded hole 114. In other embodiments, at least two second threaded holes 114 may have different sizes, and the number of second threaded holes 114 and the size of the second threaded holes 114 may be designed according to actual needs.

[0043] The first connector 120 is used to connect to the first fluid pipeline, and the three second connectors 130 are respectively used to connect to the corresponding second fluid pipelines to achieve the transmission and discharge of more fluids. As an example, the fluid in the first fluid pipeline or each second fluid pipeline is, for example, CO2 WATER (carbonated water), DIW (deionized water), HOT DIW (hot deionized water) or electrolyzed ionized water, etc., which can be selected according to actual needs.

[0044] In some embodiments, the first threaded hole 111 and each second threaded hole 114 are respectively NPT (National (American) Pipe Thread, American standard 60-degree taper pipe thread) threaded holes. The internal thread of the first threaded hole 111 is located in the top wall 1101 of the main body 110, and the first connector 120 has an external thread and is threadedly connected to the first threaded hole 111. The internal thread of the second threaded hole 114 is located in the side wall 1102 of the main body 110, and the second connector 130 has an external thread and is threadedly connected to the second threaded hole 114. In addition, the outlet 112 is also an NPT threaded hole.

[0045] Figure 8 It is a top view of a side wall of a main body of an embodiment of the present application provided with three second threaded holes.

[0046] In some embodiments, in combination Figures 6 to 8, a mounting plate 115 is arranged on the outer periphery of the main body 110, and a plurality of slots 1151 penetrating the mounting plate 115 are arranged on the mounting plate 115, and the plurality of slots 1151 extend along the circumference of the main body 110, and the main body 110 is installed at a predetermined position through the slots 1151. Specifically, there are four slots 1151, and they are all located on the same horizontal plane, and the angular interval between any two adjacent slots 1151 in the circumference of the main body 110 is 90°. In the process of installing the pipeline connection device 100, if the pipeline connection device 100 interferes with the components next to it, the main body 110 can be rotated by a predetermined angle α along the extending direction of the slots 1151, and the predetermined angle α ranges from 15° to 30°, for example, so that the pipeline connection device 100 can avoid the components interfering with it, greatly improving the applicability of the pipeline connection device 100. After the installation position of the pipeline connection device 100 is determined, a fastener, such as a bolt, is used to fix the pipeline connection device 100 through the slots 1151.

[0047] In some embodiments, the material of the main body 110 is PTFE (Polytetrafluoroethylene) or PFA (Polyfluoroalkoxy). Preferably, the material of the main body 110 is PTFE, which has many chemical properties such as acid resistance, alkali resistance, high temperature resistance, humidity resistance, and organic resistance, and is widely used in wet processing equipment to meet the needs of multiple application occasions.

[0048] In some embodiments, a plurality of pipe connection devices 100 can be used together to transmit and discharge different types of fluids. Figure 2 The pipe connection device 100 and Figure 7 The pipe connection devices 100 shown can be arranged adjacent to each other, such as Figure 2 The side wall 1102 of the main body 110 of the pipe connection device 100 is provided with a second threaded hole 114, such as Figure 7 , the side wall 1102 of the main body 110 of the pipe connecting device 100 is provided with three second threaded holes 114, and the three second threaded holes 114 are concentrated on one side of the side wall 1102. The two pipe connecting devices 100 are arranged adjacent to each other on the side wall 1102 of the main body 110 where the second threaded holes 114 are not distributed, and the second threaded holes 114 of the two pipe connecting devices 100 do not interfere with each other. Among them, one pipe connecting device 100 can transmit and discharge a type of fluid such as DIO3, FOM or a mixture of ozone and hydrogen peroxide, and the other pipe connecting device 100 can transmit and discharge a type of fluid such as CO2 WATER (carbonated water), DIW (deionized water), HOT DIW (hot deionized water) or electrolyzed ionized water. In other embodiments, Figure 2 The pipe connection device 100 and Figure 7 The installation position of the pipe connection device 100 shown can also be staggered, and the installation position is flexible. In this embodiment, when the side wall 1102 of the main body 110 of the pipe connection device 100 is provided with three second threaded holes 114, the three second threaded holes 114 can be concentrated on one side of the side wall 1102, or can be dispersed on the side wall 1102 along the circumference of the main body 110.

[0049] In the present application, the number, arrangement, and types of fluids transmitted and discharged of the pipeline connection devices 100 can be designed and selected according to actual needs.

[0050] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A pipeline connection device, characterized in that: include: A main body having a first end, a second end and a side wall, wherein the first end is provided with a first threaded hole, the second end is provided with an outlet, a fluid channel is provided between the first threaded hole and the outlet for fluid to pass through, the outlet is used to discharge the fluid in the fluid channel, and at least one second threaded hole is provided on the side wall, the at least one second threaded hole is communicated with the fluid channel; a first joint, threadedly connected to the first threaded hole, for connecting a first fluid pipeline, so that the fluid in the first fluid pipeline flows into the fluid channel from the first threaded hole; At least one second connector is threadedly connected to the corresponding second threaded hole and is used to connect the corresponding second fluid pipeline so that the fluid in the corresponding second fluid pipeline flows into the fluid channel from the second threaded hole.

2. The pipe connection device according to claim 1, characterized in that: The size of the first threaded hole is the same as or different from the size of each second threaded hole.

3. The pipe connection device according to claim 1, characterized in that: The size of the first threaded hole and the size of the at least one second threaded hole are both smaller than the size of the outlet.

4. The pipeline connection device according to claim 1, characterized in that: The first threaded hole, the at least one second threaded hole and the outlet are all NPT threaded holes.

5. The pipeline connection device according to claim 1, characterized in that: A mounting plate is disposed on the outer periphery of the main body, and a plurality of slots penetrating the mounting plate are disposed on the mounting plate. The slots extend along the circumference of the main body, and the main body is mounted at a predetermined position through the slots.

6. The pipeline connection device according to claim 5, characterized in that: There are four slots, which are all located on the same horizontal plane, and the angular interval between any two adjacent slots in the circumferential direction of the main body is 90°.

7. The pipeline connection device according to claim 1, characterized in that: The material of the main body is PTFE or PFA.

8. A wet processing equipment, characterized in that: The invention comprises at least one pipeline connecting device according to any one of claims 1 to 7.

9. The wet processing equipment according to claim 8, characterized in that: The first fluid pipeline and the second fluid pipeline are both bypass liquid outlet pipelines.

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