Cartridge conveying device

Abstract

A cartridge conveying device is suitable for conveying cartridges loaded with wafers and comprises a moving module, a first clamping module and a second clamping module. The moving module comprises a rotating shaft capable of moving on four axes. The first clamping module and the second clamping module are connected with the rotating shaft, located on the two opposite sides of the rotating shaft respectively and linked with the rotating shaft. The first clamping module is used for clamping the clamping box so that the wafer can move approximately in a horizontal placing state. The second clamping module is used for clamping and rotating the cartridge so that the wafer moves from a horizontal placing state to an approximately vertical placing state. A user can selectively use the first clamping module or the second clamping module to convey the cartridge according to the process requirement, and the space, occupied by the conveying device, of a dust-free room can be reduced.

Description

Technical Field

[0001] The invention relates to a cassette conveying device, in particular to a cassette conveying device which can convey wafers in a horizontal or vertical state. Background Art

[0002] Currently, in the semiconductor manufacturing process, it is often necessary to place the wafer (substrate) in a baking device for drying, heat treatment or curing. Some process steps require the wafer to be placed horizontally in the baking device, while some process steps require the wafer to be placed vertically in the baking device. In addition, in order to increase production efficiency, a cassette is usually used to accommodate multiple wafers so that the wafers can be transported in batches.

[0003] Currently, two types of transport machines are required in the production area of ​​the clean room to transport the cassettes from the buffer to the baking equipment. One type of machine is used to place the wafers in the cassette horizontally, which is suitable for placing the wafers horizontally in the baking equipment; the other type of machine is used to place the wafers in the cassette vertically, which is suitable for placing the wafers vertically in the baking equipment. However, using two types of machines to transport the cassettes in the clean room requires more space, affecting the space utilization of the clean room. Summary of the invention

[0004] An object of the present invention is to provide a cassette transport device that can transport wafers in a cassette in a horizontal or vertical position.

[0005] In some embodiments, the cassette transport device of the present invention is suitable for transporting a cassette loaded with wafers. The cassette has a bottom wall, a top wall opposite to the bottom wall, two side walls connecting the bottom wall and the top wall and opposite to each other, a rear wall connecting the bottom wall and the top wall, and a plurality of fixed clamping ears arranged on the top wall, the fixed clamping ears are divided into two groups and arranged on the top wall near the side walls. The cassette transport device includes: a moving module, a first clamping module and a second clamping module. The moving module includes a base and a rotating shaft arranged on the base. The base can be driven to move horizontally in a first direction. The rotating shaft can be driven to move horizontally in a second direction perpendicular to the first direction, to rise and fall in a vertical direction, and to rotate around its own axis. The first clamping module is used to clamp the cassette so that the wafer is moved in a roughly horizontally placed state. The first clamping module includes a first connecting unit fixedly connected to the rotating shaft, and two clamping arms opposite to each other and movably connected to the first connecting unit. The clamping arms can be driven to switch between a clamping position where they are relatively close to each other to clamp the cassette and a release position where they are relatively far away from each other to release the cassette. Each clamping arm has a top arm portion for leaning against the top wall and a side arm portion for leaning against the corresponding side wall, and the top arm portion is provided with a plurality of first positioning portions respectively corresponding to the fixed clamping ears. The second clamping module is used to clamp and rotate the cassette so that the wafer is moved from a horizontal placement state to a substantially vertical placement state. The second clamping module includes a second connecting unit fixedly connected to the rotating shaft and located on the opposite side of the first clamping module, and two clamping members that are relatively close to each other and movably connected to the second connecting unit. The second connecting unit has a fixed frame connected to the rotating shaft, and a rotating mechanism pivotally connected to the fixed frame. The clamping members are connected to the rotating mechanism and can be driven to switch between a clamping position where they are relatively close to each other to clamp the cassette and a release position where they are relatively far away from each other to release the cassette. Each clamping member has a top abutting wall for abutting against the top wall and a side abutting wall for abutting against the corresponding side wall, and the top abutting wall is provided with a plurality of second positioning portions respectively corresponding to the fixed clamping ears.

[0006] In some embodiments, the first connecting unit has a carrier connected to the rotating shaft, a mounting frame pivotally connected to the carrier, and a tilting drive mechanism provided on the carrier and used to drive the mounting frame to swing at an inclination angle. The clamping arm is connected to the mounting frame and is linked to the mounting frame so as to be able to switch between a horizontal picking and placing state in which the clamping arm is in a horizontal state and a tilted carrying state in which the clamping arm is in a tilted state. When the clamping arm clamps the cassette and is in the carrying state, the wafer in the cassette can be slightly tilted against the rear wall.

[0007] In some embodiments, the mounting frame has a main frame connected to the clamping arm, a pivotal seat connected to the main frame, and a linkage plate connected to the main frame. The pivotal seat has a pivot pivoted to the supporting frame, and the linkage plate is located below the pivot and connected to the tilting drive mechanism. The linkage plate is driven by the tilting drive mechanism, so that the mounting frame can swing up and down at the inclination angle with the pivot as the axis.

[0008] In some embodiments, the rotating mechanism can be controlled to drive the clamping member to switch between a horizontal state and a nearly vertical state. The clamping member clamps the cassette and when in the horizontal state, the wafers in the cassette are placed horizontally. The clamping member clamps the cassette and when in the nearly vertical state, the rear wall of the cassette is located at the bottom and is lower than the side close to the bottom wall and lower than the side close to the top wall, so that the wafers in the cassette are placed in a roughly vertical state and lean against the side close to the bottom wall to avoid collision between the wafers.

[0009] In some embodiments, the rotating mechanism has a supporting frame connected to the clamping member, a connecting frame connected to the supporting frame and pivotally connected to the fixed frame, a connecting rod pivotally connected to the connecting frame, and an electric cylinder connected to the connecting rod, and the connecting rod is driven by the electric cylinder to drive the supporting frame to rotate and control the supporting frame to be slightly tilted when it is in the nearly vertical state.

[0010] In some implementations, the connecting frame has a first axis pivotally connected to the fixing frame, and a second axis pivotally connected to the connecting rod, and the second axis is located above the first axis.

[0011] In some embodiments, the first clamping module also includes two first sensors respectively disposed on the side arm portions of the clamping arm, and the first sensors are used to detect whether the clamping arm actually clamps the cartridge. The second clamping modules also include two second sensors respectively disposed on the side abutment walls of the clamping member, and the second sensors are used to detect whether the clamping member actually clamps the cartridge.

[0012] In some implementations, the first sensor and the second sensor are air lock pressure sensors.

[0013] In some implementations, the top arm portion of each clamping arm has an inner edge facing the other clamping arm and an outer edge connected to the side arm portion, and each first positioning portion is a notch recessed from the inner edge to the outer edge.

[0014] In some implementations, each second positioning portion is a gourd-shaped hole penetrating the top abutment wall and has a small diameter section and a large diameter section with a hole diameter larger than the small diameter section, and the small diameter section is closer to the side abutment wall than the large diameter section.

[0015] The present invention has the following effects: the user can choose to use the first clamping module or the second clamping module to transport the cassette according to the process requirements, so that the wafers in the cassette can be placed in the baking equipment in a horizontal or vertical state. Compared with the prior art that requires two machines to transport the cassette, the space occupied by the transport device in the clean room can be reduced, thereby increasing the available space in the clean room. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Other features and effects of the present invention will be clearly presented in the embodiments with reference to the accompanying drawings, in which:

[0017] Figure 1 is a side view schematic diagram of a first clamping module clamping a cassette in an embodiment of a cassette transporting device of the present invention;

[0018] Figure 2 is a three-dimensional diagram of the cassette;

[0019] Figure 3 is a three-dimensional diagram of a partial structure of the first clamping module;

[0020] Figure 4 is a partial three-dimensional view illustrating the relationship between the two clamping arms of the first clamping module and the cassette in the release position;

[0021] Figure 5 is a partial stereoscopic view illustrating the relationship between the two clamping arms of the first clamping module and the cassette at the clamping position;

[0022] Figure 6 It corresponds to Figure 4 A partial side view of

[0023] Figure 7 It corresponds to Figure 5 A partial side view of

[0024] Figure 8 is a partial side view schematic diagram of the second clamping module of the embodiment clamping the cassette in a horizontal state;

[0025] Fig. 9 is a partial side view schematic diagram of the second clamping module clamping the cassette in a nearly vertical state;

[0026] Fig.10 is a three-dimensional diagram of a partial structure of the second clamping module;

[0027] Fig.11 is a partial three-dimensional diagram illustrating the relationship between the two clamping members of the second clamping module and the cassette in the release position;

[0028] Fig.12 is a partial three-dimensional diagram illustrating the relationship between the two clamping members of the second clamping module and the cassette at the clamping position;

[0029] Fig.13 It corresponds to Fig.11 A partial side view of

[0030] Fig.14 It corresponds to Fig.12 Partial side view of . DETAILED DESCRIPTION

[0031] See also Figure 1 and Figure 2 The embodiment of the cassette transport device of the present invention is suitable for transporting a cassette 1 loaded with wafers W, for example, in a workplace, a plurality of cassettes 1 loaded with wafers W placed in a buffer zone are transported one by one to one of a plurality of baking devices (not shown) in the workplace. The cassette 1 has a bottom wall 11, a top wall 12 opposite to the bottom wall 11, two side walls 13 connecting the bottom wall 11 and the top wall 12 and opposite to each other, a rear wall 14 connecting the bottom wall 11 and the top wall 12, and a plurality of fixed clamping ears 15 provided on the top wall 12. The fixed clamping ears 15 are divided into two groups and are respectively arranged at the top wall 12 near the side wall 13. In this embodiment, the fixed clamping ears 15 are in a group of two, that is, two fixed clamping ears 15 are respectively provided on both sides of the top wall 12 near the side wall 13. Each fixed clamping ear 15 has a column 151 connected to the top wall 12, and a head 152 connected to the top of the column 151 and having an outer diameter larger than that of the column 151. The cassette transport device includes a moving module 2 , a first clamping module 3 and a second clamping module 4 .

[0032] The mobile module 2 includes a base 21 and a rotating shaft 22 disposed on the base 21. The base 21 can be driven to move horizontally in a first direction D1. The rotating shaft 22 can be driven to move horizontally in a second direction D2 perpendicular to the first direction D1, to rise and fall in a vertical direction D3, and to rotate around its own axis. In other words, the rotating shaft 22 can move in four axes. In this embodiment, the base 21 is disposed along the first direction D1 (such as Figure 1 The rotating shaft 22 is arranged on the base 21 and can move on a track 23 (shown schematically in the figure) extending in the second direction D2 (shown in the left and right direction). Figure 1 The base 21 and the rotating shaft 22 can be moved in the front-to-back direction (shown), and can be lifted (moved in the vertical direction D3) and rotated. The driving mechanism of the base 21 and the rotating shaft 22 can be implemented using existing technology, so it is not described in detail.

[0033] See also Figure 1 , Figure 3 and Figure 8The first clamping module 3 is used to clamp the cassette 1 so that the wafer W is moved in a substantially horizontal position. The first clamping module 3 includes a first connection unit 31 fixedly connected to the rotating shaft 22, two clamping arms 32 opposite to each other and movably connected to the first connection unit 31, and two first sensors 33 respectively disposed on the clamping arms 32.

[0034] The first connecting unit 31 has a carrier frame 311 connected to the rotating shaft 22, a mounting frame 312 pivotally connected to the carrier frame 311, and a tilt driving mechanism 313 provided on the carrier frame 311 and used to drive the mounting frame 312 to swing at an inclination angle α. The mounting frame 312 has a main frame body 314 connected to the clamping arm 32, a pivot seat body 315 connected to the main frame body 314, and a linkage plate body 316 connected to the main frame body 314. The main frame body 314 is provided with two first slide rails 314a and two pneumatic cylinders 314b located on the left and right sides of the pivot seat body 315. The first slide rails 314a are respectively provided for the clamping arms 32 to slide along the first slide rails 314a. The pneumatic cylinders 314b are used to drive the clamping arms 32 respectively. The pivot seat body 315 has a pivot 315a pivotally connected to the carrier frame 311. The interlocking plate 316 is located below the pivot 315a and connected to the tilting drive mechanism 313. In this embodiment, the tilting drive mechanism 313 has a pneumatic cylinder 313a, an adjustment bolt group 313b connecting the pneumatic cylinder 313a and the interlocking plate 316, and two tension springs 313c connecting the support frame 311 and the interlocking plate 316 (only the one located at the front side of the support frame 311 is shown in the figure, and there is also one located at the rear side of the support frame 311). The pneumatic cylinder 313a is used to drive the adjustment bolt group 313b to push the interlocking plate 316. The tension spring 313c is used to tightly pull the interlocking plate 316 so that the interlocking plate 316 can be closely pressed against the bottom side of the support frame 311. The interlocking plate 316 is driven by the tilting drive mechanism 313, so that the mounting frame 312 can swing up and down the inclination angle α with the pivot 315a as the axis. In this embodiment, the inclination angle α is about 5-7 degrees.

[0035] The clamping arm 32 is connected to the mounting frame 312 and is linked to the mounting frame 312 so that the clamping arm 32 can be placed in a horizontal position (such as Figure 4 , 5 As shown) and the clamping arm 32 is in a tilted carrying state (as shown Figure 1When the clamping arms 32 clamp the cassette 1 and are in the carrying state, the wafer W in the cassette 1 can be slightly tilted against the rear wall 14. This ensures that the wafer W will not fall out of the cassette 1 during the movement of the cassette 1. The clamping arms 32 can be driven to a clamping position (such as Figure 5 ) and a release position (as shown) relatively far away from each other to release the cartridge 1. Figure 4 Each clamping arm 32 has a top arm portion 321 for leaning against the top wall 12, and a side arm portion 322 for leaning against the corresponding side wall 13, and the top arm portion 321 is provided with a plurality of first positioning portions 323 corresponding to and acting on the fixed clamping ears 15. In this embodiment, the top arm portion 321 of each clamping arm 32 has an inner edge 321a facing the other clamping arm 32, and an outer edge 321b connected to the side arm portion 322, and each first positioning portion 323 is a notch recessed from the inner edge 321a to the outer edge 321b. Figure 4 and Figure 5 Each first positioning portion 323 is used to accommodate the column 151 of the corresponding fixed clamping ear 15, and to make the head 152 of the corresponding fixed clamping ear 15 be located above the top arm portion 321. Figure 5 When the cartridge 1 is in the state of being clamped, the side arm portions 322 of the clamping arm 32 are respectively pressed against the corresponding side walls 13 of the cartridge 1, and the first positioning portions 323 of the clamping arm 32 are respectively received in the columns 151 of the fixed clamping ears 15, so that the clamping arm 32 positions the cartridge 1 in the front-back and left-right directions. At the same time, the top arm portion 321 of the clamping arm 32 is pressed against the top wall 12 of the cartridge 1 and is located between the top wall 12 and the head portion 152 of the fixed clamping ears 15, so that the clamping arm 32 positions the cartridge 1 in the up-down direction. In this way, the clamping arm 32 can stably clamp the cartridge 1, so that the cartridge 1 cannot move relative to the clamping arm 32.

[0036] See also Figure 3 , Figure 6 and Figure 7 The first sensors 33 are respectively disposed on the side arm portions 322 of the clamping arms 32 to detect whether the clamping arms 32 are actually clamping the cartridge 1. In this embodiment, the first sensors 33 are air plug pressure sensors, and each has a first air plug nozzle 331. The first air plug nozzles 331 of the first sensors 33 are respectively located on the inner side of the side arm portions 322. Figure 6 and Figure 7As shown, when the clamping arm 32 is actually located at the clamping position to clamp the cartridge 1, the first air plug nozzle 331 of the first sensor 33 respectively abuts against the two side walls 13 of the cartridge 1 to generate a pressure difference, thereby confirming that the clamping arm 32 is actually against the cartridge 1.

[0037] See also Figures 8 to 10 The second clamping module 4 is used to clamp and rotate the cassette 1 so that the wafer W is moved from a horizontal position to a substantially vertical position. The second clamping module 4 includes a second connection unit 41 fixedly connected to the rotating shaft 22 and located on the opposite side of the first clamping module 3, two clamping members 42 opposite to each other and movably connected to the second connection unit 41, and two second sensors 43 respectively provided on the clamping members 42.

[0038] The second connecting unit 41 has a fixing frame 411 connected to the rotating shaft 22, and a rotating mechanism 412 pivotally connected to the fixing frame 411. The rotating mechanism 412 can be controlled to drive the clamping member 42 in a horizontal state (such as Figure 8 as shown) and a nearly vertical state (as shown Fig. 9 The rotating mechanism 412 has a supporting frame 413 connected to the clamping member 42, a connecting frame 414 connected to the supporting frame 413 and pivoted to the fixing frame 411, a connecting rod 415 pivoted to the connecting frame 414, and an electric cylinder 416 connected to the connecting rod 415. The connecting frame 414 has a first axis 414a pivoted to the fixing frame 411, and a second axis 414b pivoted to the connecting rod 415, and the second axis 414b is located above the first axis 414a. The connecting rod 415 is driven by the electric cylinder 416 to drive the supporting frame 413 to rotate and control the supporting frame 413 to tilt slightly when it is in the nearly vertical state. See Figure 8 The clamping member 42 clamps the cassette 1 and when in the horizontal state, the wafers W in the cassette 1 are placed horizontally. Fig. 9 The clamping member 42 clamps the cassette 1 and in the nearly vertical state, the rear wall 14 of the cassette 1 is located at the bottom and the side close to the bottom wall 11 is lower than the side close to the top wall 12, so that the wafers W in the cassette 1 are placed in a roughly vertical state and lean against the side close to the bottom wall 11 to avoid collision between the wafers W. Fig.10 In this embodiment, the support frame 413 has two second slide rails 413a and two pneumatic cylinders 413b located on the left and right sides of the connecting frame 414. The second slide rails 413a are respectively provided for the clamping members 42 to slide along the second slide rails 413a. The pneumatic cylinders 413b are used to drive the clamping members 42.

[0039] See also Figures 10 to 12The clamping member 42 is connected to the rotating mechanism 412 and can be driven to a clamping position (such as Fig.12 ) and a release position (as shown) relatively far away from each other to release the cartridge 1. Fig.11 (as shown). Each clamping member 42 has a top abutting wall 421 for abutting against the top wall 12, and a side abutting wall 422 for abutting against the corresponding side wall 13, and the top abutting wall 421 is provided with a plurality of second positioning portions 423 corresponding to and acting on the fixed clip ears 15 respectively. In this embodiment, each second positioning portion 423 is a gourd hole penetrating the top abutting wall 421 and has a small diameter section 423a and a large diameter section 423b with a hole diameter larger than the small diameter section 423a, and the small diameter section 423a is closer to the side abutting wall 422 than the large diameter section 423b. The large diameter section 423b is used for the head 152 of the corresponding fixed clip ear 15 to pass through, and the small diameter section 423a is used to accommodate the column 151 of the corresponding fixed clip ear 15. See Fig.11 When the clamping member 42 is in the release position, the positions of the large diameter sections 423b of the second positioning portion 423 correspond to the fixed clamping ears 15, so that the heads 152 of the fixed clamping ears 15 can pass through. When the top wall 421 of the clamping member 42 abuts against the top wall 12 of the cartridge 1, the heads 152 of the fixed clamping ears 15 can completely pass through the large diameter sections 423b of the second positioning portion 423 and extend out of the top wall 421 of the clamping member 42. Fig.12 , and then the clamping member 42 is moved toward each other to the clamping position. When the clamping member 42 is in the clamping position, the side abutment walls 422 of the clamping member 42 respectively abut against the corresponding side walls 13 of the cartridge 1, and the small diameter sections 423a of the second positioning portions 423 of the clamping member 42 respectively accommodate the columns 151 of the fixed clamping ears 15, so that the clamping member 42 positions the cartridge 1 in the front-back and left-right directions. At the same time, the top abutment walls 421 of the clamping member 42 abut against the top wall 12 of the cartridge 1 and are located between the top wall 12 and the head 152 of the fixed clamping ears 15, so that the clamping member 42 positions the cartridge 1 in the up-down direction. In this way, the clamping member 42 can stably clamp the cartridge 1, so that the cartridge 1 cannot move relative to the clamping member 42.

[0040] See also Fig.10 , Fig.13 and Fig.14 The second sensors 43 are respectively disposed on the side walls 422 of the clamping member 42 to detect whether the clamping member 42 is actually clamping the cartridge 1. In this embodiment, the second sensors 43 are air plug pressure sensors, and each has a second air plug nozzle 431. The second air plug nozzles 431 of the second sensors 43 are respectively located on the inner side of the side walls 422. Fig.13 and Fig.14As shown, when the clamping member 42 is actually located at the clamping position to clamp the cartridge 1, the second air plug nozzle 431 of the second sensor 43 respectively abuts against the two side walls 13 of the cartridge 1 to generate a pressure difference, thereby confirming that the clamping member 42 is actually against the cartridge 1.

[0041] The first clamping module 3 and the second clamping module 4 are linked by the rotating shaft 22 and can be displaced in four axes. According to the process requirements, the user can choose to use the first clamping module 3 or the second clamping module 4 to transport the cassette 1 so that the wafer W in the cassette 1 can be placed in the baking equipment in a horizontal or vertical state.

[0042] In summary, the cassette transport device of the present invention can use the first clamping module 3 or the second clamping module 4 to transport the cassette 1 according to the process requirements, so that the wafers W in the cassette 1 can be placed in the baking device in a horizontal or vertical state. Compared with the prior art that requires two machines to transport the cassette 1, the space occupied by the transport device in the clean room can be reduced, thereby increasing the available space in the clean room.

[0043] The above are merely embodiments of the present invention and should not be used to limit the scope of the present invention. That is, any simple equivalent changes and modifications made according to the claims and description of the present invention still fall within the scope of the present invention.

Claims

1. A cassette transport device, suitable for transporting a cassette loaded with wafers, the cassette comprising a bottom wall, a top wall opposite to the bottom wall, two side walls connecting the bottom wall and the top wall and opposite to each other, a rear wall connecting the bottom wall and the top wall, and a plurality of fixing ears arranged on the top wall, the fixing ears being divided into two groups and respectively arranged on the top wall near the side walls, characterized in that: The cassette transport device comprises: The mobile module comprises a base and a rotating shaft arranged on the base, wherein the base can be driven to move horizontally in a first direction, and the rotating shaft can be driven to move horizontally in a second direction perpendicular to the first direction, to rise and fall in a vertical direction, and to rotate around its own axis; A first clamping module is used to clamp the cassette so that the wafer can be moved in a substantially horizontal position. The first clamping module includes a first connection unit fixedly connected to the rotating shaft, and two clamping arms that are opposite to each other and movably connected to the first connection unit. The clamping arms can be driven to switch between a clamping position that is relatively close to each other to clamp the cassette and a release position that is relatively far away from each other to release the cassette. Each clamping arm has a top arm portion that is used to abut against the top wall, and a side arm portion that is used to abut against the corresponding side wall, and the top arm portion is provided with a plurality of first positioning portions that respectively correspond to the fixed clamping ears. and The second clamping module is used to clamp and rotate the cassette so that the wafer can be moved from a horizontal placement state to a roughly vertical placement state. The second clamping module includes a second connection unit fixedly connected to the rotating shaft and located on the opposite side of the first clamping module, and two clamping members that are opposite to each other and movably connected to the second connection unit. The second connection unit has a fixed frame connected to the rotating shaft, and a rotating mechanism pivotally connected to the fixed frame. The clamping members are connected to the rotating mechanism and can be driven to switch between a clamping position that is relatively close to each other to clamp the cassette and a release position that is relatively far away from each other to release the cassette. Each clamping member has a top abutting wall for abutting the top wall, and a side abutting wall for abutting the corresponding side wall, and the top abutting wall is provided with a plurality of second positioning portions that respectively correspond to the fixed clamping ears.

2. The cassette transport device according to claim 1, characterized in that: The first connecting unit comprises a carrier connected to the rotating shaft, a mounting frame pivotally connected to the carrier, and a tilting driving mechanism arranged on the carrier and used for driving the mounting frame to swing at an inclination angle. The clamping arm is connected to the mounting frame and is linked by the mounting frame to be able to switch between a horizontal picking and placing state and a tilted carrying state. When the clamping arm clamps the cassette and is in the carrying state, the wafer in the cassette can be slightly tilted against the rear wall.

3. The cassette transport device according to claim 2, characterized in that: The mounting frame comprises a main frame body connected to the clamping arm, a pivot seat body connected to the main frame body, and a linkage plate body connected to the main frame body. The pivot seat body has a pivot axis pivotally connected to the supporting frame. The linkage plate body is located below the pivot axis and is connected to the tilting driving mechanism. The linkage plate body is driven by the tilting driving mechanism, so that the mounting frame can swing up and down at the inclination angle with the pivot axis as the axis.

4. The cassette transport device according to claim 1, characterized in that: The rotating mechanism can be controlled to drive the clamping member to switch between a horizontal state and a nearly vertical state. When the clamping member clamps the cassette and is in the horizontal state, the wafers in the cassette are placed horizontally. When the clamping member clamps the cassette and is in the nearly vertical state, the rear wall of the cassette is located at the bottom and is lower than the side close to the bottom wall than the side close to the top wall, so that the wafers in the cassette are placed in a roughly vertical state and lean against the side close to the bottom wall to avoid collision between the wafers.

5. The cassette transport device according to claim 4, characterized in that: The rotating mechanism comprises a supporting frame connected to the clamping member, a connecting frame connected to the supporting frame and pivotally connected to the fixing frame, a connecting rod pivotally connected to the connecting frame, and an electric cylinder connected to the connecting rod. The connecting rod is driven by the electric cylinder to drive the supporting frame to rotate and control the supporting frame to be slightly tilted when in the nearly vertical state.

6. The cassette transport device according to claim 5, characterized in that: The connecting frame body has a first axis pivotally connected to the fixing frame, and a second axis pivotally connected to the connecting rod, wherein the second axis is located above the first axis.

7. The cassette transport device according to claim 1, characterized in that: The first clamping module also includes two first sensors respectively arranged on the side arm parts of the clamping arm, and the first sensors are used to detect whether the clamping arm actually clamps the cartridge. The second clamping module also includes two second sensors respectively arranged on the side abutment walls of the clamping member, and the second sensors are used to detect whether the clamping member actually clamps the cartridge.

8. The cassette transport device according to claim 7, characterized in that: The first sensor and the second sensor are air lock pressure sensors.

9. The cassette transport device according to claim 1, characterized in that: The top arm portion of each clamping arm has an inner edge facing the other clamping arm and an outer edge connected to the side arm portion, and each first positioning portion is a notch recessed from the inner edge to the outer edge.

10. The cassette transport device according to claim 1, characterized in that: Each second positioning portion is a gourd-shaped hole penetrating the top abutting wall and has a small diameter section and a large diameter section with a hole diameter larger than the small diameter section, and the small diameter section is closer to the side abutting wall than the large diameter section.

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