Wafer box carrying platform

Abstract

The invention discloses a wafer cassette carrying platform, and relates to the field of semiconductor equipment, and the wafer cassette carrying platform comprises a base which is used for carrying a wafer cassette; the shell is arranged on the base, the shell and the base form a containing cavity used for containing the wafer box, the shell is provided with an outlet used for taking wafers from the wafer box and an inlet used for placing the wafer box, and the outlet and the inlet are not located on the same face of the wafer box carrying table. The outlet is connected to an opening of a machine table, the outlet and the opening are always in a communicated state, the shell comprises a fixed part and a movable part, the fixed part is fixedly connected to the base, and the movable part can move relative to the fixed part to open or close the inlet. The outlet of the wafer box carrying table and the opening of the machine table are always in a communicated state, and the inlet can be closed through the movable part, so that a production line with low cleanliness requirement can be met, and the production cost is effectively reduced.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor equipment, and in particular to a wafer box carrier. Background Art

[0002] At present, wafer carriers in the industry are mainly divided into two categories, one is a closed wafer box, and the other is an open wafer box. Closed wafer boxes can reduce the dust pollution and loss of wafers caused by different process steps, thereby promoting yield, increasing production, and avoiding damage to wafers by static electricity and dust. They are often used for loading 8-inch and 12-inch wafers. Whether it is automatic loading or manual loading, the industry has automatic loading devices that meet SEMI standards, Load Port, available for use. This standardized Load Port loading device has been widely integrated and used in semiconductor automation equipment.

[0003] The wafer storage part of an open wafer box is open, and is often used in scenarios where the cleanliness requirements for loading wafers are not high. The loading device technology for open wafer boxes has not yet been standardized, and usually requires an adapter to be used with the Load Port. However, for production lines with low cleanliness requirements, the cost of using Load Port equipment is relatively high. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a wafer box carrier in order to overcome the defect of high cost in the prior art production line which has low cleanliness requirement and uses a dedicated Load Port to place the wafer box.

[0005] The present invention solves the above technical problems through the following technical solutions:

[0006] A wafer box carrier is arranged at the opening of a machine platform, comprising:

[0007] A base, the base being used to carry a wafer box;

[0008] A shell, wherein the shell is arranged on the base, the shell and the base form a accommodating cavity for accommodating the wafer box, the shell is provided with an outlet for taking wafers from the wafer box and an inlet for placing the wafer box, the outlet and the inlet are not located on the same surface of the wafer box carrier, the outlet is connected to the opening of the machine, and the outlet and the opening are always in a connected state, the shell includes a fixed part and a movable part, the fixed part is connected to the base, the movable part can move relative to the fixed part to open or close the inlet, and the shell is provided with an air outlet.

[0009] Preferably, the air outlet is provided on a side end surface of the fixing portion.

[0010] Preferably, the air outlet extends along the direction of airflow from the machine into the accommodating chamber and / or the air outlet is arranged close to the outlet.

[0011] In this solution, when the airflow enters the containing cavity, the airflow can flow out from the air outlet more smoothly, and the airflow inside the wafer box carrier is more stable.

[0012] Preferably, a plurality of the air outlets are provided, the plurality of the air outlets are arranged at intervals in a direction away from the outlet, and the sizes of the plurality of the air outlets decrease in a direction away from the outlet.

[0013] In this solution, the closer to the inlet, the greater the airflow, and the arrangement of the air outlets is consistent with the attenuation law of the airflow, which is conducive to ensuring that the airflow in and out of the wafer box carrier is laminar and free of turbulence, thereby reducing particle contamination in the process.

[0014] Preferably, the bottoms of the plurality of air outlets are flush with each other, and the tops of the plurality of air outlets decrease in height in a direction away from the outlet.

[0015] Preferably, when the movable part closes the inlet, a gap is provided between the movable part and the fixed part to form the air outlet.

[0016] Preferably, the inlet is an oblique opening.

[0017] In this solution, the entrance is set as an oblique opening structure, which is beneficial to increasing the area of ​​the entrance compared to the vertical opening structure, thereby making it more convenient to take and place the wafer box.

[0018] Preferably, the wafer box carrier further comprises a limit block, and the limit block is arranged on the base for fixing the wafer box.

[0019] In this solution, by adding a limit block, it is convenient to fix the wafer box, and the placement of the wafer box is more stable and less likely to deviate.

[0020] Preferably, the base further comprises a wafer box detection device, and the wafer box detection device is arranged on the base, and the wafer box detection device is configured to be triggered when the wafer box is placed on the base.

[0021] In this solution, the wafer box detection device can timely sense whether the wafer box is placed in place. When the wafer box is not completely placed on the base, the detection device will not be triggered. Only when the wafer box is completely placed in place, the detection device will be triggered. The wafer box carrier can detect the placement status of the internal wafer box, which is beneficial to improve the overall safety and stability.

[0022] Preferably, the wafer box detection device comprises:

[0023] A mounting seat, the mounting seat comprising a sliding channel extending in a vertical direction, wherein the diameter of an opening at an upper end of the sliding channel is larger than the diameter of an opening at a lower end;

[0024] A slide bar, the slide bar is arranged in the slide channel through an elastic element, the slide bar includes a pressing portion and a trigger portion, the diameter of the pressing portion is larger than the trigger portion, the elastic element is sleeved on the trigger portion, and one end of the elastic element abuts against the pressing portion, and the other end abuts against the lower end of the slide channel, the pressing portion protrudes from the base, and when the slide bar is pressed, the trigger portion can slide out from the lower end opening of the slide channel;

[0025] A wafer box detection sensor is disposed below the mounting seat, and the wafer box detection sensor is configured such that when the pressing portion is pressed down, the wafer box detection sensor can detect the trigger portion.

[0026] In this solution, the sliding channel on the mounting seat can limit the movement direction of the slide bar, avoid the deviation of the slide bar, and help improve the accuracy of wafer box placement detection. By setting the elastic element on the trigger part of the slide bar, the slide bar will compress the elastic element when it is pressed. When the wafer box is taken out, the elastic element will drive the slide bar to pop out, so that the information can be transmitted to the wafer box detection sensor in time. In addition, the wafer box detection sensor is set under the mounting seat to ensure that it works closely with the slide bar and the mounting seat to avoid false alarms or missed detections.

[0027] Preferably, the wafer box carrier further comprises a wafer detection sensor, and the wafer detection sensor is arranged at the outlet to detect whether the wafer protrudes out of the outlet.

[0028] In this solution, by adding a wafer detection sensor, it can be determined whether the wafer is properly placed in the wafer box, which is beneficial to improving the safety of using the wafer box carrier.

[0029] Preferably, the wafer box carrier further includes an information reading sensor, and the information reading sensor is disposed in the accommodating cavity and is used for acquiring information of the wafers inside the wafer box.

[0030] In this solution, the information of the wafers inside the wafer box can be obtained through the information reading sensor, which has a high degree of intelligence.

[0031] The positive and progressive effects of the present invention are as follows: in this solution, the wafer box carrier is designed with an independent entrance and exit, and the wafer box carrier is opened and closed by a movable part, so that the wafer box can be placed in the accommodating cavity of the wafer box carrier more conveniently, and the wafer box carrier can be placed manually, so that the adaptability is wider, and the wafer can be automatically taken out by external equipment, and the operation is more convenient; in addition, the exit faces the machine table and is connected to the opening of the machine table, and the automatic wafer taking-out process can be realized by the robot inside the machine table, and the placement of the wafer box and the taking-out of the wafer can be operated from the entrance and the exit respectively, without adjusting the direction of the wafer box carrier, and the operation is more flexible and convenient; Load The port is usually equipped with an isolation door at the connection with the machine opening to effectively ensure the cleanliness of the production line, but the cost is relatively high. The wafer box carrier proposed in this application is mainly for production lines with low cleanliness requirements. Based on this, in this application, the outlet 230 of the wafer box carrier and the opening of the machine are always in a connected state, and the inlet 240 can be closed through the movable part 220, so that the wafer can be protected from pollution and damage to a certain extent, which can meet the production line with low cleanliness requirements, omitting the isolation door design, and effectively reducing the production cost. In addition, the line can be directly connected to the inside of the machine without the need to equip an additional electrical box, which can further reduce the cost. The top of the machine will be provided with an FFU (Fan Filter Unit). By setting the air outlet, the air flow inside the machine can flow out smoothly through the air outlet when entering the accommodating chamber of the wafer box carrier. The air flow inside the accommodating chamber is more stable, and turbulence will not form to blow the internal particles into the inside of the machine, which is conducive to improving the cleanliness. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic diagram of the axial structure of a wafer box carrier in a preferred embodiment of the present invention;

[0033] Figure 2 This is a schematic structural diagram of a wafer box carrier in a preferred embodiment of the present invention, in which the entrance is in an open state;

[0034] Figure 3 It is a structural schematic diagram of the outlet side of the wafer box carrier in a preferred embodiment of the present invention;

[0035] Figure 4 It is a schematic diagram of the side structure of a wafer box carrier according to a preferred embodiment of the present invention;

[0036] Figure 5 It is a schematic structural diagram of a wafer box carrier after placing a wafer box according to a preferred embodiment of the present invention;

[0037] Figure 6 It is a schematic cross-sectional structure diagram of a wafer box detection device according to a preferred embodiment of the present invention;

[0038] Figure 7 Schematic diagram of the airflow from the machine to the wafer box carrier.

[0039] Description of Reference Numerals

[0040] Base 100

[0041] Housing 200

[0042] Fixing portion 210

[0043] First side plate 211

[0044] First top plate 212

[0045] Activities Department 220

[0046] Second side plate 221

[0047] Front panel 222

[0048] Second top plate 223

[0049] Exit 230

[0050] Entrance 240

[0051] Hinge 250

[0052] Air outlet 260

[0053] First air outlet 261

[0054] Second air outlet 262

[0055] Gas spring 300

[0056] Limit block 400

[0057] Wafer Inspection Sensor 500

[0058] RFID reading sensor 610

[0059] Barcode reading sensor 620

[0060] Wafer Box 700

[0061] Wafer box inspection device 800

[0062] Slide bar 810

[0063] Pressing portion 811

[0064] Trigger unit 812

[0065] Mounting Block 820

[0066] Sliding channel 821

[0067] Wafer box detection sensor 830

[0068] Elastic element 840

[0069] Machine 900

[0070] FFU 910 DETAILED DESCRIPTION

[0071] The present invention is further described below by way of examples, but the present invention is not limited to the scope of the examples.

[0072] In existing semiconductor production lines, a load port is usually used to place a wafer box. For some production lines that do not require high cleanliness, such as 6-inch and 8-inch wafer production lines, the use of a load port is not conducive to reducing costs. Therefore, the present invention provides a wafer box carrier suitable for semiconductor production lines that do not require high cleanliness, to replace the load port, thereby reducing the manufacturing cost of the equipment.

[0073] The specific structure of the wafer box carrier is as follows Figure 1 and Figure 2 As shown, the wafer box carrier includes a base 100 and a shell 200, the base 100 is used to carry the wafer box 700, the shell 200 is arranged on the base 100, and the shell 200 and the base 100 form a receiving cavity for accommodating the wafer box 700. The shell 200 is provided with an outlet 230 for taking wafers from the wafer box 700 and an inlet 240 for placing the wafer box 700, and the outlet 230 and the inlet 240 are not located on the same surface of the wafer box 700. The outlet 230 is connected to the opening of the machine, and the outlet 230 and the opening of the machine are always in a connected state. The shell 200 includes a fixed part 210 and a movable part 220, the fixed part 210 is connected to the base 100, and the movable part 220 can move relative to the fixed part 210 to open or close the inlet 240.

[0074] The wafer box carrier is designed with an independent entrance 240 and exit 230, and the opening and closing of the wafer box carrier is realized through the movable part 220, so that the wafer box 700 can be placed in the accommodating cavity more conveniently. In addition, the exit 230 is connected to the opening of the machine with the exit facing the machine, and the automatic removal process of the wafer can be realized through the manipulator inside the machine. The placement of the wafer box 700 and the removal of the wafer can be operated from the entrance 240 and the exit 230 respectively, without adjusting the direction of the wafer box carrier, which is more flexible and convenient in operation. The wafer box carrier can manually place the wafer box 700, which makes it more adaptable, and the wafer can be automatically removed by external equipment, which makes the operation more convenient. The load port is usually equipped with an isolation door at the connection with the machine opening to effectively ensure the cleanliness of the production line, but the cost is relatively high. The wafer box carrier proposed in this application is mainly for production lines with low cleanliness requirements. Based on this, in this application, the outlet 230 of the wafer box carrier and the opening of the machine are always in a connected state, and the inlet 240 can be closed through the movable part 220, which can protect the wafer from contamination and damage to a certain extent, and can meet the production line with low cleanliness requirements. The isolation door design is omitted, effectively reducing production costs. In addition, the line can be directly connected to the inside of the machine without the need for an additional electrical box, which can further reduce costs.

[0075] like Figure 2 As shown, in this embodiment, the outlet 230 and the inlet 240 are respectively arranged on two opposite sides of the wafer box carrier. In a semiconductor production workshop with limited space, the outlet 230 and the inlet 240 are arranged on two opposite sides, which can effectively improve the flexibility of use and space utilization of the wafer box carrier. Of course, in other embodiments, the inlet 240 and the outlet 230 can also be arranged on two adjacent sides as needed.

[0076] In this embodiment, if Figure 1 and Figure 2 As shown, the side end surface of the housing 200 is provided with an air outlet 260. In this example, the air outlet provided on the side end surface of the housing 200 includes a first air outlet 261 and a second air outlet 262. The specific configuration of the first air outlet 261 and the second air outlet 262 will be described in the next paragraph and will not be repeated here. Figure 7The figure is a schematic diagram of the airflow from the machine to the wafer box carrier, in which the airflow path is only for illustration, used to indicate the stable airflow inside the wafer box carrier, and does not indicate the actual airflow inside the machine. The top of the machine 900 is provided with an FFU 910. By providing a first air outlet 261 and a second air outlet 262 on the housing 200, the airflow inside the machine 900 can flow out smoothly through the first air outlet 261 and the second air outlet 262 when entering the accommodating cavity of the wafer box carrier. The airflow inside the accommodating cavity is more stable, and turbulence will not be formed to blow up particles inside the wafer box carrier and bring them into the machine 900, which is conducive to improving the cleanliness.

[0077] Furthermore, if Figure 1 , Figure 2 As shown, the fixed part 210 includes two first side panels 211 located on both sides of the outlet 230 and the inlet 240 and a first top panel 212 located on the top, and the first side panel 211 is provided with a first air outlet 261. The first air outlet 261 is in the shape of an elongated strip, and there are a plurality of first air outlets 261, which are spaced apart and distributed on the first side panel 211. The movable part 220 includes a front panel 222 for closing the inlet 240, two second side panels 221 connected to the front panel 222, and a second top panel 223. When the movable part 220 closes the inlet 240, there is a gap between the end of the first side panel 211 and the end of the second side panel 221 to form the second air outlet 262, and the end of the first top panel 212 and the end of the second top panel 223 fit together.

[0078] More specifically, the first air outlet 261 extends along the direction of the airflow from the machine 900 into the receiving chamber. Figure 7 In this embodiment, the FFU 910 is disposed on the top of the machine 900, and the airflow entering the accommodating chamber flows downward, so the first air outlet 261 extends in the vertical direction. Figure 2 As shown, the first air outlet 261 is arranged near the outlet 230. When the airflow enters the receiving chamber, the airflow can flow out from the first air outlet 261 more smoothly, and the airflow inside the wafer box carrier is more stable. In addition, the base 100 and the second air outlet 262 can be closed to make the airflow flow out only from the first air outlet 261, further improving the stability of the airflow inside the receiving chamber.

[0079] like Figure 2As shown, a plurality of first air outlets 261 are provided, and the plurality of first air outlets 261 are arranged at intervals along the direction A away from the outlet 230, and the sizes of the plurality of first air outlets 261 decrease along the direction A away from the outlet 230. In addition, in this embodiment, since the airflow flows from top to bottom, the bottom heights of the plurality of first air outlets 261 are flush, and the upper heights of the plurality of first air outlets 261 decrease along the direction away from the outlet 230. The closer to the outlet 230, the greater the airflow, and the arrangement of the first air outlets 261 is consistent with the attenuation law of the airflow, which is conducive to ensuring that the airflow in and out of the wafer box carrier is laminar and does not cause turbulence, thereby reducing particle contamination in the process.

[0080] Except for the first air outlet 261 and the second air outlet 262, the main body of the shell 200 remains in a closed state, which can not only isolate the external environment, but also maintain a stable flow of airflow, and it is not easy to bring particles into the interior of the machine. In addition, since the movable part 220 includes not only a front plate 222, but also two second side plates 221 and a second top plate 223, the area of ​​the inlet 240 that can be opened by the movable part 220 is larger, which makes it convenient to place the wafer box 700 into the accommodating cavity. Among them, the first top plate 212 and the second top plate 223 are hinged. The hinged manner can make the first top plate 212 and the second top plate 223 have the ability to rotate, which is convenient for the movable part 220 to open and close the inlet 240. In addition, the hinged manner saves more space. Specifically, such as Figure 1 As shown, the first top plate 212 and the second top plate 223 are connected by a plurality of hinges 250 .

[0081] In other embodiments, only the first air outlet 261 or the second air outlet 262 may be provided on the housing 200 to improve the ability to isolate from the outside while ensuring the stability of the airflow inside the wafer box carrier.

[0082] like Figure 3 As shown, the wafer box carrier is a hollow rectangular parallelepiped structure, wherein the outlet 230 of the wafer box carrier is formed by the side end surface of the base 100 and the side end surface of the fixing part 210. The end surface of the outlet 230 is a vertical structure, that is, the outlet 230 is a vertical opening, which is convenient for connection with the wafer processing equipment. Figure 2 As shown, the entrance 240 of the wafer box carrier is an oblique opening structure, the first side plate 211 is a quadrilateral structure that is narrow at the top and wide at the bottom, and the oblique side of the first side plate 211 is located on one side of the entrance 240, and the second side plate 221 is a quadrilateral structure that is wide at the top and narrow at the bottom, and the oblique side of the second side plate 221 corresponds to the oblique side of the first side plate 211. Without occupying additional space, changing the entrance 240 to an oblique opening structure is conducive to increasing the area of ​​the entrance 240 compared to a vertical opening structure, thereby making it more convenient to take and place the wafer box 700.

[0083] In other embodiments, the movable portion 220 may also be provided with only the front plate 222 as required, and the opening and closing of the entrance 240 can be achieved by hingedly connecting the front plate 222 and the first top plate 212 .

[0084] In other embodiments, the inlet 240 may also be configured as the same structure as the outlet 230, that is, a vertical structure, as required. The vertical structure is simpler and more convenient to process, which helps to reduce the processing cost of the wafer box carrier.

[0085] In this embodiment, the connection between the second top plate 223 and the front plate 222 is an arc-shaped transition. The arc-shaped transition is adopted, and it is not easy to hurt the operator during use, which is safer.

[0086] In this embodiment, the wafer box carrier further includes a gas spring 300, one end of which is disposed on the first side plate 211, and the other end of the gas spring 300 is disposed on the second side plate 221. By providing the gas spring 300, the movable part 220 is more labor-saving when opening relative to the fixed part 210 to open the entrance 240, and the use is more convenient.

[0087] like Figure 3 and Figure 5 As shown, in order to facilitate the fixing of the wafer box 700, in this embodiment, the wafer box carrier further includes a limit block 400, which is disposed on the base 100 and is used to fix the wafer box 700. By adding the limit block 400, it is convenient to fix the wafer box 700, so that the placement of the wafer box 700 is more stable and less likely to deviate. Specifically, as Figure 3 There are four limit blocks 400, two of which are arranged at intervals near the outlet 230, and two of which are arranged at intervals near the entrance 240. The distribution positions of the four limit blocks match the bottom structure of the wafer box 700, and the position of the wafer box 700 can be fixed. Among them, the two limit blocks 400 near the outlet 230 are respectively provided with corners, which can limit the movement of the wafer box 700 toward the outlet 230, and the two limit blocks 400 near the entrance 240 are also respectively provided with corners, which can limit the movement of the wafer box 700 toward the entrance 240. In addition, the corners on the four limit blocks 400 can also limit the movement of the wafer box 700 in the left and right directions L (see Figure 5 ) on the left.

[0088] In this embodiment, if Figure 3 and Figure 4As shown, the base 100 also includes a wafer box detection device 800, which is arranged on the base 100 and protrudes from the upper surface of the base 100. The wafer box detection device 800 is configured so that when the wafer box 700 is placed on the base 100, the wafer box detection device 800 can be pressed and triggered. The wafer box detection device 800 can timely sense whether the wafer box 700 is placed in place. When the wafer box 700 is not completely placed on the base 100, the detection device 800 will not be triggered. Only when the wafer box 700 is completely placed in place, the detection device 800 will be triggered. The wafer box carrier is equipped with a wafer box detection device 800, which can detect the placement status of the internal wafer box 700, which is conducive to improving the overall safety and stability.

[0089] Specifically, Figure 6 In order to better fit the wafer box 700, the wafer box detection device 800 includes a mounting seat 820, a slide bar 810 and a wafer box detection sensor 830. The mounting seat 820 includes a sliding channel 821 extending in the vertical direction, and the aperture of the upper end opening of the sliding channel 821 is larger than the aperture of the lower end opening. The slide bar 810 is arranged in the sliding channel 821 through an elastic element 840. The slide bar 810 includes a pressing portion 811 and a triggering portion 812, the diameter of the pressing portion 811 is larger than the triggering portion 812, and the elastic element 840 is sleeved on the triggering portion 812. In addition, one end of the elastic element 840 abuts against the pressing portion 811, and the other end abuts against the lower end of the sliding channel 821. The top end of the pressing portion 811 protrudes from the base 100, and when the pressing portion 811 is pressed, the triggering portion 812 can overcome the elastic force of the elastic element 840 and slide out from the lower end opening of the sliding channel 821. The wafer box detection sensor 830 is arranged below the mounting seat 820, and the wafer box detection sensor 830 is arranged so that when the pressing portion 811 is pressed down, the wafer box detection sensor 830 can detect the trigger portion 812. Among them, the wafer box detection sensor 830 is specifically a photoelectric beam sensor, and the elastic element 840 is a spring. When the pressing portion 811 is pressed, the trigger portion 812 slides out from the opening at the lower end of the sliding channel 821 and enters between the transmitter and the receiver of the wafer box detection sensor 830. The sliding channel 821 on the mounting seat 820 can limit the movement direction of the slide bar 810 to avoid the deviation of the slide bar 810, which is conducive to improving the accuracy of the placement detection of the wafer box 700. By sleeve-mounting the elastic element 840 on the triggering portion 812 of the slide bar 810, the slide bar 810 will compress the elastic element 840 when pressed; when the wafer box 700 is taken out, the elastic element 840 will drive the slide bar 810 to pop out, so that the information can be transmitted to the wafer box detection sensor 830 in time. In addition, the wafer box detection sensor 830 is arranged below the mounting seat 820 to ensure that it closely cooperates with the slide bar 810 and the mounting seat 820 to avoid the occurrence of false alarms or missed detections.

[0090] Of course, in other embodiments, the wafer box detection device 800 may also use a pressure sensor, a push switch, a photoelectric sensor or an ultrasonic sensor for detection. Furthermore, when the wafer box detection device 800 uses a non-pressing triggering method, it may not protrude from the base 100.

[0091] In this embodiment, see Figure 5 The wafer box carrier also includes a wafer detection sensor 500, which is arranged at the outlet 230 and is used to detect whether the wafer protrudes from the outlet 230. By adding the wafer detection sensor 500, it is possible to determine whether the position of the wafer in the wafer box 700 is properly placed, thereby facilitating the safety of the use of the wafer box carrier. Specifically, the wafer detection sensor 500 adopts a photoelectric beam sensor, which is respectively installed on the base 100 and the first top plate 212. When the wafer protrudes, the photoelectric beam sensor will be triggered.

[0092] In this embodiment, the wafer box carrier also includes an information reading sensor, which is arranged in the accommodating cavity and is used to obtain information of the wafer box 700. Through the information reading sensor, the information of the wafer inside the wafer box 700 can be obtained, and the degree of intelligence is high. Specifically, Figure 5 As shown, the information reading sensor includes a barcode reading sensor 620 and an RFID reading sensor 610. The barcode reading sensor 620 is disposed on the lower end surface of the first top plate 212, facing the top position of the wafer box 700, and is used to read the barcode information on the wafer box 700. The RFID reading sensor 610 is disposed on the side end surface of the wafer box 700, close to the RFID tag on the wafer box 700, and is used to read the information of the tag. In other embodiments, the barcode reading sensor 620 can also be flexibly adjusted to a two-dimensional code reading sensor as needed, and the positions of the barcode reading sensor 620 and the RFID reading sensor 610 can be flexibly set inside the accommodating cavity according to the position of the information tag on the wafer box 700.

[0093] Although the specific embodiments of the present invention are described above, it should be understood by those skilled in the art that this is only for illustration and the protection scope of the present invention is defined by the appended claims. Those skilled in the art may make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but these changes and modifications all fall within the protection scope of the present invention.

Claims

1. A wafer box carrier, arranged at the opening of a machine platform, characterized in that: include: A base, the base being used to carry a wafer box; A shell, wherein the shell is arranged on the base, the shell and the base form a accommodating cavity for accommodating the wafer box, the shell is provided with an outlet for taking wafers from the wafer box and an inlet for placing the wafer box, the outlet and the inlet are not located on the same surface of the wafer box carrier, the outlet is connected to the opening of the machine, and the outlet and the opening are always in a connected state, the shell includes a fixed part and a movable part, the fixed part is connected to the base, the movable part can move relative to the fixed part to open or close the inlet, and the shell is provided with an air outlet.

2. The wafer box carrier according to claim 1, characterized in that: The air outlet is arranged on the side end surface of the fixing portion.

3. The wafer box carrier according to claim 2, characterized in that: The air outlet extends along the direction of airflow from the machine into the accommodating chamber and / or the air outlet is arranged close to the outlet.

4. The wafer box carrier according to claim 2, characterized in that: A plurality of air outlets are provided, and the plurality of air outlets are arranged at intervals in a direction away from the outlet, and sizes of the plurality of air outlets decrease in a direction away from the outlet.

5. The wafer box carrier according to claim 4, characterized in that: The bottoms of the plurality of air outlets are flush with each other, and the tops of the plurality of air outlets decrease in height in a direction away from the outlet.

6. The wafer box carrier according to claim 1, characterized in that: When the movable part closes the inlet, a gap is provided between the movable part and the fixed part to form the air outlet.

7. The wafer box carrier according to claim 1, characterized in that: The inlet is an oblique opening.

8. The wafer box carrier according to any one of claims 1 to 7, characterized in that: The base further comprises a wafer box detection device, which is disposed on the base and is configured to be triggered when the wafer box is placed on the base.

9. The wafer box carrier according to claim 7, characterized in that: The wafer box detection device comprises: A mounting seat, the mounting seat comprising a sliding channel extending in a vertical direction, wherein the diameter of an opening at an upper end of the sliding channel is larger than the diameter of an opening at a lower end; A slide bar, the slide bar is arranged in the slide channel through an elastic element, the slide bar includes a pressing portion and a trigger portion, the diameter of the pressing portion is larger than the trigger portion, the elastic element is sleeved on the trigger portion, and one end of the elastic element abuts against the pressing portion, and the other end abuts against the lower end of the slide channel, the pressing portion protrudes from the base, and when the slide bar is pressed, the trigger portion can slide out from the lower end opening of the slide channel; A wafer box detection sensor is disposed below the mounting seat, and the wafer box detection sensor is configured such that when the pressing portion is pressed down, the wafer box detection sensor can detect the trigger portion.

10. The wafer box carrier according to any one of claims 1 to 7, characterized in that: The wafer box carrier also includes a wafer detection sensor, which is arranged at the outlet and is used to detect whether the wafer protrudes from the outlet, or, The wafer box carrier also includes a limit block, which is arranged on the base and is used to fix the wafer box, or, The wafer box carrier also includes an information reading sensor, which is arranged in the accommodating cavity and is used to obtain information of the wafer inside the wafer box.

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