Transmission mechanism for silicon wafer processing system

Abstract

The invention discloses a transmission mechanism for a silicon wafer processing system, which comprises a conveying mechanism, a second conveying belt, a base and a conveying box, the conveying mechanism is composed of two groups of first conveying belts, the two groups of first conveying belts are positioned on the same horizontal plane and are parallel to each other, a gap is formed between the two groups of first conveying belts, and the conveying box can be conveyed on the conveying mechanism; one end of the second conveying belt is located on the side face of the conveying mechanism and higher than the horizontal plane where the conveying mechanism is located. The base is located at the bottom of a gap between the first conveying belts, a telescopic rod is vertically installed on the base, and a lifting butt joint mechanism is installed at the top of the base and can ascend and descend in the gap between the two first conveying belts; when the lifting butt joint mechanism ascends, the conveying box is jacked up to be separated from the first conveying belt and is in butt joint with the second conveying belt, the conveying box is transferred to the second conveying belt, conveying steering can be automatically and efficiently achieved, the conveying box can be divided into multiple sets of conveying lines to be conveyed in a scattered mode, and therefore the conveying efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon wafer processing, and in particular to a transmission mechanism for a silicon wafer processing system. Background Art

[0002] Wafer transportation is a key link in the manufacturing and processing of silicon wafers. After being cut from silicon ingots into silicon wafers, the silicon wafers need to be transported between different processing equipment (such as cleaning equipment, diffusion furnaces, photolithography machines, etc.) to complete a series of complex processes. Efficient and safe transportation can ensure the continuity and stability of silicon wafer production and improve production efficiency. The existing production line's method of transporting silicon wafers is in the process of dispersing one line to various production lines. The efficiency is low when switching lines and it cannot achieve automated operation. Summary of the invention

[0003] In order to solve the technical problems existing in the background technology, the present invention provides a transmission mechanism for a silicon wafer processing system.

[0004] The present invention provides a transmission mechanism for a silicon wafer processing system, comprising a conveying mechanism, a second conveyor belt, a base and a conveying box, wherein the conveying mechanism is composed of two groups of first conveyor belts, the two groups of the first conveyor belts are strip conveyor belts, located at the same level and parallel to each other, and there is a gap between the two groups of the first conveyor belts, and the conveying box can be conveyed on the conveying mechanism;

[0005] One end of the second conveyor belt is located on the side of the conveying mechanism and is higher than the horizontal plane where the conveying mechanism is located;

[0006] The base is located at the bottom of the gap between the first conveyor belts, a telescopic rod is vertically installed on the base, a lifting and docking mechanism is installed on the top of the telescopic rod, and the lifting and docking mechanism can be raised and lowered in the gap between the two groups of the first conveyor belts;

[0007] When the lifting and docking mechanism rises, the conveying box is lifted up and separated from the first conveying belt, and docked with the second conveying belt, and the conveying box is transferred to the second conveying belt.

[0008] Preferably, the lifting and docking mechanisms and the second conveyor belts are provided in multiple groups, and each lifting and docking mechanism corresponds to a second conveyor belt.

[0009] Preferably, the lifting and docking mechanism includes a first plate frame and a belt, side plates are vertically installed at the bottom of both sides of the first plate frame in the X-axis direction, a first roller is installed at the rear end of the first plate frame in the Y-axis direction, and an extension plate is slidably connected to the bottom of the front end in the Y-axis direction, a second roller is installed at the front end of the extension plate, and a driving roller is installed at the bottom of the rear end of the extension plate, a first positioning roller and a second positioning roller are installed between the two groups of side plates, and the driving roller is located on the upper parts of the first positioning roller and the second positioning roller, and the belt passes through the first roller, the second roller, the driving roller, the first positioning roller and the second positioning roller in sequence, and is connected end to end to form a closed loop.

[0010] Preferably, a gear roller and a driving member are installed at the tail end of the extended plate, a gear rail is provided on the bottom side of the first plate frame, the gear roller and the gear rail are meshed with each other, and the extended plate is used to dock with the second conveyor belt.

[0011] Preferably, a second plate frame is fixedly connected between the bottoms of the two groups of side plates, and the second plate frame is fixedly connected to the top end of the telescopic rod. When the lifting and docking mechanism rises, the first plate frame is flush with the second conveyor belt.

[0012] Preferably, both sides of the conveying box are mounted on side plates, and the side plates on both sides of the conveying box are placed above two groups of first conveyor belts to convey them.

[0013] The present invention provides a transmission mechanism for a silicon wafer processing system. When a conveying box is conveyed by two groups of first conveyor belts, the telescopic rod lifts the lifting and docking mechanism upward to separate the conveying box from the upper surface of the first conveyor belt. At this time, the lifting and docking mechanism docks with the second conveyor belt, and the conveying direction of the conveying box can be changed to be conveyed on the second conveyor belt. The lifting and docking mechanism realizes the extension and retraction of the extension plate while keeping the belt length unchanged, and maintains the continuous conveying of the belt. When the extension plate is retracted into the first plate frame, the width of the lifting and docking mechanism is smaller than the gap between the two groups of first conveyor belts, so that the lifting and docking mechanism can be realized. When the lifting and docking mechanism rises to expose the first conveyor belt, the extension plate extends and docks with the second conveyor belt. When the conveying box moves to the second conveyor belt, the extension plate shrinks and descends to the lower part of the first conveyor belt, which does not affect the subsequent conveying of the conveying box. The conveying steering can be realized automatically and efficiently, and the conveying box can be divided into multiple groups of conveyor lines for dispersed transportation, thereby improving the conveying efficiency.

[0014] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the structure of the present invention;

[0016] Figure 2It is a side view of the lifting and docking mechanism of the present invention when it is descending;

[0017] Figure 3 It is a side view of the lifting docking mechanism of the present invention when it is rising;

[0018] Figure 4 It is a schematic diagram of the structure of the lifting and docking mechanism in the present invention when the extended plate is retracted;

[0019] Figure 5 It is a structural schematic diagram of the lifting and docking mechanism in the present invention when the extension plate is extended;

[0020] Figure 6 It is a schematic diagram of the internal structure of the lifting and docking mechanism in the present invention;

[0021] Figure 7 It is a schematic diagram of the structure of the conveying box in the present invention;

[0022] In the figure, the numbers are as follows: 1. first conveyor belt; 2. telescopic rod; 3. base; 4. lifting and docking mechanism; 401. first plate frame; 402. second plate frame; 403. side plate; 404. extending plate; 405. first rotating roller; 406. second rotating roller; 407. driving roller; 408. first positioning roller; 409. second positioning roller; 410. gear roller; 411. gear rail; 412. belt; 5. second conveyor belt; 6. conveyor box; 601. side plate. DETAILED DESCRIPTION

[0023] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar symbols throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0024] like Figure 1-Figure 7 A transmission mechanism for a silicon wafer processing system shown in the figure comprises a conveying mechanism, a second conveying belt 5, a base 3 and a conveying box 6, wherein the conveying mechanism is composed of two groups of first conveying belts 1, and the two groups of the first conveying belts 1 are strip conveying belts, located at the same level and parallel to each other, and there is a gap between the two groups of the first conveying belts 1, and the conveying box 6 can be conveyed on the conveying mechanism;

[0025] The conveyor box 6 can be placed above the two groups of first conveyor belts 1 of the conveying mechanism, supporting the conveyor box 6 and performing the transportation function. The conveyor box 6 is used to load silicon wafers or raw materials of silicon wafers.

[0026] One end of the second conveyor belt 5 is located on the side of the conveying mechanism and is higher than the horizontal plane where the conveying mechanism is located;

[0027] The base 3 is located at the bottom of the gap between the first conveyor belts 1, a telescopic rod 2 is vertically installed on the base 3, and a lifting and docking mechanism 4 is installed on the top of the telescopic rod 2. The lifting and docking mechanism 4 can be raised and lowered in the gap between the two groups of the first conveyor belts 1;

[0028] When the lifting and docking mechanism 4 rises, the conveying box 6 is lifted up and separated from the first conveying belt 1 , and docked with the second conveying belt 5 , so that the conveying box 6 is transferred to the second conveying belt 5 .

[0029] When the conveying box 6 is being conveyed by the two sets of first conveyor belts 1, the telescopic rod 2 lifts the lifting and docking mechanism 4 upwards, so that the conveying box 6 is separated from the upper surface of the first conveyor belt 1. At this time, the lifting and docking mechanism 4 is docked with the second conveyor belt 5, and the conveying direction of the conveying box 6 can be changed so that it is conveyed on the second conveyor belt 5.

[0030] Preferably, the lifting and docking mechanisms 4 and the second conveyor belts 5 are provided in multiple groups, and each lifting and docking mechanism 4 corresponds to a second conveyor belt 5 .

[0031] By controlling the lifting and lowering of each lifting and docking mechanism 4 through a program, a plurality of conveying boxes 6 are conveyed to different conveyor belts respectively, and one conveying line is dispersed into a plurality of conveying lines, thereby improving the conveying efficiency.

[0032] Preferably, the lifting and docking mechanism 4 includes a first plate frame 401 and a belt 412, side plates 403 are vertically installed at the bottom of both sides of the first plate frame 401 in the X-axis direction, a first roller 405 is installed at the rear end of the first plate frame 401 in the Y-axis direction, and an extension plate 404 is slidably connected to the bottom of the front end in the Y-axis direction, a second roller 406 is installed at the front end of the extension plate 404, a driving roller 407 is installed at the bottom of the rear end of the extension plate 404, a first positioning roller 408 and a second positioning roller 409 are installed between the two groups of side plates 403, and the driving roller 407 is located on the upper part of the first positioning roller 408 and the second positioning roller 409, and the belt 412 passes through the first roller 405, the second roller 406, the driving roller 407, the first positioning roller 408 and the second positioning roller 409 in sequence, and are connected end to end to form a closed loop.

[0033] The lifting and docking mechanism 4 is driven by the driving roller 407 to move the belt 412, and the extending plate 404 is extended to dock with the corresponding second conveyor belt 5, so as to smoothly transfer the conveying box 6 to the corresponding second conveyor belt 5.

[0034] Preferably, a gear roller 410 and a driving member are installed at the tail end of the extending plate 404, and a gear rail 411 is provided on the bottom side of the first plate frame 401, and the gear roller 410 and the gear rail 411 are meshed with each other. The extending plate 404 is used to dock with the second conveyor belt 5, and the extension and retraction of the extending plate 404 is realized when the length of the belt 412 remains unchanged, and the continuous transportation of the belt 412 is maintained. When the extending plate 404 is retracted into the first plate frame 401, the width of the lifting and docking mechanism 4 is smaller than the gap between the two groups of first conveyor belts 1, so that it can be lifted and lowered. When the lifting and docking mechanism 4 rises to expose the first conveyor belt 1, the extending plate 404 extends out and docks with the second conveyor belt 5. When the conveyor box 6 moves onto the second conveyor belt 5, the extending plate 404 shrinks and descends to the lower part of the first conveyor belt 1 without affecting the subsequent transportation of the conveyor box 6.

[0035] Preferably, a second plate frame 402 is fixedly connected between the bottoms of the two groups of side panels 403 , and the second plate frame 402 is fixedly connected to the top of the telescopic rod 2 . When the lifting and docking mechanism 4 rises, the first plate frame 401 is flush with the second conveyor belt 5 .

[0036] Preferably, both sides of the conveying box 6 are installed on side plates 601, and the side plates 601 on both sides of the conveying box 6 are placed above two groups of first conveying belts 1 to convey them. The side plates 601 on both sides of the conveying box 6 are respectively located on the two groups of first conveying belts 1, which can play a role in positioning and smooth transportation, and can also facilitate the lifting of the docking mechanism 4 to support and lift it up.

[0037] It should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0038] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0039] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0041] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A transmission mechanism for a silicon wafer processing system, characterized in that: The invention comprises a conveying mechanism, a second conveying belt (5), a base (3) and a conveying box (6), wherein the conveying mechanism is composed of two groups of first conveying belts (1), the two groups of the first conveying belts (1) are both strip conveying belts, located at the same level and parallel to each other, and there is a gap between the two groups of the first conveying belts (1), and the conveying box (6) can be conveyed on the conveying mechanism; One end of the second conveyor belt (5) is located on the side of the conveying mechanism and is higher than the horizontal plane where the conveying mechanism is located; The base (3) is located at the bottom of the gap between the first conveyor belts (1), a telescopic rod (2) is vertically mounted on the base (3), a lifting and docking mechanism (4) is mounted on the top of the telescopic rod (2), and the lifting and docking mechanism (4) can be raised and lowered in the gap between the two groups of the first conveyor belts (1); When the lifting and docking mechanism (4) rises, the conveying box (6) is lifted up and separated from the first conveying belt (1), and docked with the second conveying belt (5), so that the conveying box (6) is transferred to the second conveying belt (5).

2. A transmission mechanism for a silicon wafer processing system according to claim 1, characterized in that: The lifting and docking mechanism (4) and the second conveyor belt (5) are provided in multiple groups, and each lifting and docking mechanism (4) corresponds to a second conveyor belt (5).

3. The transmission mechanism for a silicon wafer processing system according to claim 1, characterized in that: The lifting and docking mechanism (4) comprises a first plate frame (401) and a belt (412); side plates (403) are vertically installed at the bottom of both sides of the first plate frame (401) in the X-axis direction; a first roller (405) is installed at the rear end of the first plate frame (401) in the Y-axis direction; a protruding plate (404) is slidably connected to the bottom of the front end in the Y-axis direction; a second roller (406) is installed at the front end of the protruding plate (404); and a rear end bottom of the protruding plate (404) is provided. A driving roller (407) is installed at the top, a first positioning roller (408) and a second positioning roller (409) are installed between the two groups of side plates (403), the driving roller (407) is located above the first positioning roller (408) and the second positioning roller (409), and the belt (412) passes through the first rotating roller (405), the second rotating roller (406), the driving roller (407), the first positioning roller (408) and the second positioning roller (409) in sequence, and the ends are connected to form a closed loop.

4. The transmission mechanism for a silicon wafer processing system according to claim 3, characterized in that: A gear roller (410) and a driving member are installed at the tail end of the extending plate (404); a gear rail (411) is provided on the bottom side of the first plate frame (401); the gear roller (410) and the gear rail (411) are meshed with each other; and the extending plate (404) is used to dock with the second conveyor belt (5).

5. The transmission mechanism for a silicon wafer processing system according to claim 3, characterized in that: A second plate frame (402) is fixedly connected between the bottoms of the two groups of side plates (403), and the second plate frame (402) is fixedly connected to the top of the telescopic rod (2). When the lifting and docking mechanism (4) rises, the first plate frame (401) is flush with the second conveyor belt (5).

6. The transmission mechanism for a silicon wafer processing system according to claim 1, characterized in that: Both sides of the conveying box (6) are mounted on side plates (601), and the side plates (601) on both sides of the conveying box (6) are placed above two groups of first conveyor belts (1) to convey them.

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