Ion beam deposition system and target device thereof

Abstract

The invention discloses an ion beam deposition system and a target material device thereof. The ion beam deposition system comprises a plurality of target material assemblies made of different materials, a target material fixing base, a magnetofluid transmission shaft assembly and a switching driving assembly. Wherein the multiple target material assemblies are arranged on the target material fixing base in the circumferential direction; one end of the magnetofluid transmission shaft assembly is in transmission connection with the target material fixing seat and drives the target material fixing seat to rotate around the axis of the magnetofluid transmission shaft assembly so as to switch a target material assembly in the multiple target material assemblies to rotate to a target position; the switching driving assembly is in transmission connection with the other end of the magnetofluid transmission shaft assembly so as to drive the magnetofluid transmission shaft assembly to operate. When the target material assemblies need to be replaced, the switching driving assembly drives the magnetofluid transmission shaft assembly to operate and drives the target material fixing base to rotate around the axis of the target material fixing base till the target material assembly in the multiple target material assemblies is switched to rotate to the target position. Therefore, by adopting the target material device, the utilization rate of the target material can be effectively improved, and the production cost is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of ion beam deposition, and in particular to an ion beam deposition system and a target device thereof. Background Art

[0002] Ion beam deposition (IBD) technology plays a powerful role in the fields of optical fiber, computer, communication, nanotechnology, new materials, integrated optics, etc. The ideal film should have the characteristics of stable optical properties, no scattering and absorption, strong mechanical properties and stable chemical properties, and ion beam deposition just provides a technical platform that can meet these requirements. At present, the application field of ion beam etching and deposition technology is constantly being broadened, especially with the improvement of chip integration, the reduction of key dimensions, high selectivity and precise pattern transfer and other process requirements, which further highlights the advantages of ion beam deposition.

[0003] See also Figure 1 The ion beam deposition system includes a deposition ion source, a wafer stage, an auxiliary ion source and a target device, wherein the divergent ion beam from the deposition ion source bombards the target surface, so that the target material is deposited on the sample surface of the wafer stage; the auxiliary ion source has the function of cleaning the sample surface and can also be used to assist deposition to achieve a better film-forming effect. Since the current target device is mostly in the shape of a drum, which occupies a large space, the ion beam has strong directionality, and the surface area of ​​the target bombarded is too small, the target utilization rate is low, resulting in a large amount of waste and increased production costs.

[0004] Therefore, how to improve the utilization rate of target materials and reduce production costs has become a technical problem that needs to be urgently solved by those skilled in the art. Summary of the invention

[0005] The present invention provides an ion beam deposition system and a target material device thereof to improve the utilization rate of the target material and reduce the production cost.

[0006] In order to achieve the above object, the present invention provides the following technical solutions:

[0007] In a first aspect, the present invention provides a target device, comprising a plurality of target assemblies of different materials, a target fixing seat, a magnetic fluid transmission shaft assembly and a switching drive assembly; wherein:

[0008] A plurality of target material assemblies are arranged on a target material fixing seat along a circumferential direction;

[0009] One end of the magnetic fluid transmission shaft assembly is in transmission connection with the target material fixing seat, and drives the target material fixing seat to rotate around its own axis, so as to switch a target target material assembly among the multiple target material assemblies to rotate to a target position;

[0010] The switching drive assembly is in driving connection with the other end of the magnetic fluid transmission shaft assembly to drive the magnetic fluid transmission shaft assembly to operate.

[0011] Optionally, in the above-mentioned target device, the target assembly can be rotatably arranged on the target fixing seat around its own axis.

[0012] Optionally, in the above-mentioned target material device, the target material device also includes a self-rotation drive component and a transmission component, the self-rotation drive component is connected through a magnetofluid transmission shaft component, and the magnetofluid transmission shaft component is connected to the transmission component to drive the target material component to rotate around its own axis.

[0013] Optionally, in the above-mentioned target material device, the transmission assembly includes a gear set arranged on the magnetic fluid transmission shaft assembly and the target material assembly.

[0014] Optionally, in the above-mentioned target device, the gear set includes a driving gear arranged on the magnetic fluid transmission shaft assembly and a driven gear arranged on the target assembly, and the driven gear is meshed with the driving gear to drive the target assembly to rotate around its own axis.

[0015] Optionally, in the above-mentioned target device, the target assembly includes a target plate and a target axis, the target axis is arranged on the non-functional surface of the target plate, and the functional surface of the target plate is arranged opposite to the non-functional surface of the target plate.

[0016] Optionally, in the above-mentioned target material device, the target material plate body includes a water-cooled plate and a target material plate, wherein the target material plate is located at the first end face of the water-cooled plate, and a target material water-cooling channel is formed between the two; the second end face of the water-cooled plate is connected to the target material axis, and the first end face of the water-cooled plate is arranged opposite to the second end face of the water-cooled plate.

[0017] Optionally, in the above-mentioned target material device, the target material assembly also includes a target material rotating joint, which is rotatably mounted on the target material shaft and connected to the target material water cooling channel on the water cooling plate through the target material shaft, the inlet of the target material rotating joint is connected to the inlet of the target material water cooling channel, and the outlet of the target material rotating joint is connected to the outlet of the target material water cooling channel.

[0018] Optionally, in the above-mentioned target material device, the target material rotary joints of multiple target material assemblies are connected in series, and the target material rotary joint located at the head end serves as the target material water inlet joint, and the target material rotary joint located at the end serves as the target material water outlet joint.

[0019] Optionally, the target material device further includes a circulating water component for providing circulating water to the target material component, and the circulating water component includes a water inlet pipe and a water outlet pipe.

[0020] Optionally, in the above-mentioned target device, all or part of the water inlet pipe and / or the water outlet pipe are arranged on the side wall of the magnetic fluid transmission shaft assembly.

[0021] Optionally, in the above-mentioned target material device, the circulating water assembly also includes a vacuum side water inlet joint and a vacuum side water outlet joint, the vacuum side water inlet joint connects the vacuum end of the water inlet pipe with the target water inlet joints of multiple target material assemblies, and the vacuum side water outlet joint connects the vacuum end of the water outlet pipe with the target water outlet joints in the multiple target material assemblies.

[0022] Optionally, in the above-mentioned target material device, the circulating water assembly also includes an atmospheric side water inlet joint and an atmospheric side water outlet joint, the atmospheric side water inlet joint is connected to the air end of the water inlet pipe, and the atmospheric side water outlet joint is connected to the air end of the water outlet pipe.

[0023] Optionally, in the above-mentioned target material device, the magnetofluid transmission shaft assembly includes a magnetofluid fixed shaft and a first magnetofluid rotating shaft arranged in sequence from the outside to the inside, wherein the magnetofluid fixed shaft and the first magnetofluid rotating shaft are rotatably matched, and the first magnetofluid rotating shaft is respectively connected to the switching drive assembly and the target material fixing seat to drive the target material fixing seat to rotate around its own axis.

[0024] Optionally, in the above-mentioned target material device, when the target material device also includes a self-rotation drive component and a transmission component, the magnetofluid transmission shaft assembly includes a magnetofluid fixed shaft, a first magnetofluid rotating shaft and a second magnetofluid rotating shaft arranged in sequence from the outside to the inside, wherein the magnetofluid fixed shaft and the first magnetofluid rotating shaft are rotatably matched; the first magnetofluid rotating shaft is respectively connected to the switching drive component and the target material fixing seat; the second magnetofluid rotating shaft is respectively connected to the self-rotation drive component and the transmission component to drive the target material assembly to rotate around its own axis.

[0025] Optionally, in the above-mentioned target device, a sealed magnetic fluid rotating shaft is further arranged between the first magnetic fluid rotating shaft and the second magnetic fluid rotating shaft, the sealed magnetic fluid rotating shaft and the second magnetic fluid rotating shaft are rotatably arranged, and the sealed magnetic fluid rotating shaft is fixedly connected to the first magnetic fluid rotating shaft.

[0026] Optionally, in the above-mentioned target device, a water inlet side wall channel and a water outlet side wall channel are further provided on the side wall of the first magnetic fluid rotating shaft.

[0027] Optionally, in the above-mentioned target device, the atmospheric end of the water inlet side wall channel and the atmospheric end of the water outlet side wall channel are axially staggered.

[0028] Optionally, in the above-mentioned target material device, the magnetofluid transmission shaft assembly also includes a water rotary joint sleeved on the outer periphery of the first magnetofluid rotating shaft, wherein the water inlet of the water rotary joint is connected to the atmospheric end of the water inlet side wall channel, and the water outlet of the water rotary joint is connected to the atmospheric end of the water outlet side wall channel.

[0029] Optionally, in the above-mentioned target material device, the target material device also includes a position detection component, and the position detection component is used to detect that a target target material component among the multiple target material components rotates to a target position.

[0030] Optionally, in the above-mentioned target material device, the position detection component includes a plurality of photoelectric sensing switches, a shading member and a stroke position detection member, wherein the plurality of photoelectric sensing switches correspond one-to-one to the plurality of target material assemblies; the shading member is arranged on the magnetofluid transmission shaft assembly, and when a target photoelectric sensing switch among the plurality of photoelectric sensing switches generates an in-position signal, the stroke position detection member determines that a target target material assembly among the plurality of target material assemblies rotates to a target position.

[0031] Optionally, in the above-mentioned target device, the stroke position detection component also includes: when it is determined that a target target assembly among the multiple target assemblies rotates to a target position, controlling the switching drive assembly to stop running.

[0032] Optionally, in the above-mentioned target device, the number of photoelectric sensing switches is four, and the four photoelectric sensing switches are evenly distributed on the fixed plate of the position sensing device through a fixed block; the number of target material assemblies is four, and the four target material assemblies are evenly arranged on the target material fixing seat.

[0033] In a second aspect, the present invention provides an ion beam deposition system, comprising a vacuum chamber and a deposition ion source, a wafer carrier, an auxiliary ion source and a target device located in the vacuum chamber, wherein the target device is any one of the target devices described above.

[0034] It can be seen from the above technical solution that the target material device in the present invention includes multiple target material assemblies of different materials, and when the target material assembly needs to be replaced, the switching drive assembly drives the magnetic fluid transmission shaft assembly to operate, and drives the target material fixing seat to rotate around its own axis until the target target material assembly among the multiple target material assemblies is switched to rotate to the target position. It can be seen that the target material device of the present invention can effectively improve the utilization rate of the target material and reduce the production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some examples or embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without creative work, and the present invention can also be applied to other similar scenarios based on the provided drawings. Unless it is obvious from the language environment or otherwise explained, the same reference numerals in the figures represent the same structure or operation.

[0036] Figure 1 A schematic diagram of an ion beam deposition system provided by the present invention;

[0037] Figure 2 A three-dimensional schematic diagram of a target device provided by the present invention;

[0038] Figure 3A cross-sectional view of a target assembly provided by the present invention;

[0039] Figure 4 A schematic diagram of a target water cooling channel provided by the present invention;

[0040] Figure 5 A cross-sectional schematic diagram of a magnetic fluid transmission shaft assembly provided by the present invention;

[0041] In the figure, 10 is a deposition ion source, 20 is a wafer stage, 30 is an auxiliary ion source, 40 is a target device, and 50 is a vacuum chamber;

[0042] 100 is a target assembly, 200 is a target fixing seat, 300 is a magnetic fluid transmission shaft assembly, 400 is a switching drive assembly, 500 is a rotation drive assembly, 600 is a transmission assembly, 700 is a position detection assembly, and 800 is a circulating water assembly;

[0043] 101 is a target plate body, 101a is a target plate, 101b is a water-cooled plate, 101c is a target water-cooled channel, 102 is a target shaft, 103 is a target rotary joint, 110 is a first target assembly, 120 is a second target assembly, 130 is a third target assembly, and 140 is a fourth target assembly;

[0044] 310 is a magnetic fluid fixed axis, 320 is a first magnetic fluid rotating axis, 330 is a second magnetic fluid rotating axis, 340 is a sealed magnetic fluid rotating axis, 350 is a water rotary joint, 321 is a water inlet side wall channel, 322 is a water outlet side wall channel, 351 is a water inlet of the water rotary joint, and 352 is a water outlet of the water rotary joint;

[0045] 610 is a driving gear, 620 is a driven gear, 710 is a photoelectric sensor switch, 720 is a fixed block, 730 is a fixed plate, 810 is a water inlet pipe, 820 is a water outlet pipe, 830 is a vacuum side water inlet joint, 840 is a vacuum side water outlet joint, 850 is an atmosphere side water inlet joint, and 860 is an atmosphere side water outlet joint. DETAILED DESCRIPTION

[0046] In order to facilitate readers to understand the technical solution of the present invention, some concepts are explained below.

[0047] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It will be understood that the specific embodiments described herein are only used to explain the relevant inventions, rather than to limit the invention. The described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present invention.

[0048] Ion beam sputtering (IBS) or ion beam deposition (IBD) is a thin film deposition technology that uses an ion source to deposit a sputtering target onto a substrate, producing the highest quality thin films with excellent precision. Compared to other physical vapor deposition (PVD) techniques, ion beam sputtering is more precise and can accurately control the thickness of the substrate.

[0049] See also Figure 1 An embodiment of the present invention discloses an ion beam deposition system, including a vacuum chamber 50 and a deposition ion source 10, a wafer carrier 20, an auxiliary ion source 30 and a target device 40 located in the vacuum chamber 50. The present invention mainly improves the target utilization rate and reduces the production cost by improving the structure of the target device 40.

[0050] See also Figures 2 to 5 The embodiment of the present invention discloses a target material device 40, comprising a plurality of target material assemblies 100 of different materials, a target material fixing seat 200, a magnetofluid transmission shaft assembly 300 and a switching drive assembly 400; wherein: a plurality of target material assemblies 100 are arranged on the target material fixing seat 200 along the circumferential direction; one end of the magnetofluid transmission shaft assembly 300 is transmission-connected with the target material fixing seat 200, and drives the target material fixing seat 200 to rotate around its own axis, so as to switch the target target material assembly 100 among the plurality of target material assemblies 100 to rotate to the target position; the switching drive assembly 400 is transmission-connected with the other end of the magnetofluid transmission shaft assembly 300, so as to drive the magnetofluid transmission shaft assembly to operate.

[0051] The target material device 40 in the present invention includes a plurality of target material assemblies 100 of different materials, and when the target material assembly 100 needs to be replaced, the switching drive assembly 400 drives the magnetic fluid transmission shaft assembly 300 to operate, and drives the target material fixing seat 200 to rotate around its own axis until the target target material assembly 100 among the plurality of target material assemblies 100 is switched to the target position. It can be seen that the target material device 40 of the present invention can effectively improve the utilization rate of the target material and reduce the production cost.

[0052] It should be noted that the above-mentioned target position is the position of the target assembly 100 facing the deposition ion source 10; the target target assembly 100 can be understood as the target assembly 100 that is currently required to be used. The above-mentioned magnetic fluid transmission shaft assembly 300 can be divided into a vacuum side and an atmosphere side according to the position when it is set in the vacuum chamber 50, wherein the vacuum side is located in the vacuum chamber 50, and the atmosphere side is located in the atmosphere. The magnetic fluid transmission shaft assembly 300 needs to ensure the sealing performance with the vacuum chamber 50 while realizing the transmission. Multiple target assemblies 100 and target fixing seats 200 are all arranged in the vacuum chamber 50, and the switching drive assembly 400 is arranged in the atmosphere.

[0053] In order to further improve the utilization rate of the target assembly 100, the target assembly 100 can be rotatably arranged around its own axis on the target fixing seat 200. During the rotation of the target assembly 100, the part of the target assembly 100 close to the deposition ion source 10 can be changed so that the entire target assembly 100 can be bombarded by the ion beam of the deposition ion source 10, thereby further improving the utilization rate of the target assembly 100.

[0054] In some embodiments of the present invention, the target device 40 further includes a self-rotation drive assembly 500 and a transmission assembly 600, wherein the self-rotation drive assembly 500 is connected to the magnetic fluid transmission shaft assembly 300, and the magnetic fluid transmission shaft assembly 300 is connected to the transmission assembly 600 to drive the target assembly 100 to rotate around its own axis. The self-rotation drive assembly 500 can drive the target assembly 100 to rotate around its own axis through the magnetic fluid transmission shaft assembly 300 and the transmission assembly 600, thereby adjusting the position of the target assembly 100 close to the deposition ion source 10.

[0055] In the embodiment of the present invention, the transmission assembly 600 transmits the output power of the magnetic fluid transmission shaft assembly 300 to the target assembly 100 to drive the target assembly 100 to rotate around its own axis. In some embodiments of the present invention, the transmission assembly 600 includes a gear set arranged on the magnetic fluid transmission shaft assembly 300 and the target assembly 100. The gear set can be any combination of bevel gears, bevel gears and spur gears. Further, the gear set includes a driving gear 610 arranged on the magnetic fluid transmission shaft assembly 300 and a driven gear 620 arranged on the target assembly 100, and the driven gear 620 is meshed with the driving gear 610 to drive the target assembly 100 to rotate around its own axis. When the self-rotation drive assembly 500 is running, the driving gear 610 is driven to rotate by the magnetic fluid transmission shaft assembly 300, and the driving gear 610 drives the driven gear 620 to rotate, and the driven gear 620 further drives the target assembly 100 to rotate around its own axis, so as to achieve the purpose of adjusting the angle of the target assembly 100.

[0056] The driving gear 610 is generally fixed to the magnetic fluid transmission shaft assembly 300 through a spline, a flat key or directly to achieve the transmission connection between the driving gear 610 and the magnetic fluid transmission shaft assembly 300; the driven gear 620 is generally fixed to the target assembly 100 through a spline, a flat key or directly to achieve the transmission connection between the driven gear 620 and the target assembly 100. Since there are multiple target assemblies 100, each target assembly 100 is provided with a driven gear 620. When the driving gear 610 rotates, the driving gear 610 drives all the driven gears 620 to rotate, thereby achieving the self-rotation of all the target assemblies 100.

[0057] In some embodiments of the present invention, the structure of a target assembly 100 is specifically disclosed, and the target assembly 100 includes a target plate 101101 and a target shaft 102, wherein the target shaft 102 is disposed on a non-functional surface of the target plate 101101, and a functional surface of the target plate 101101 is arranged opposite to the non-functional surface of the target plate 101101. The functional surface of the target plate 101101 is used to face the deposition ion source 10, and specifically, the functional surface of the target plate 101101 contains a high-purity target.

[0058] In order to improve the working efficiency of the target assembly 100, the target assembly 100 can also be cooled in the embodiment of the present invention. In some embodiments of the present invention, a target water cooling channel 101c is provided on the target plate body 101101, and circulating water is provided to the target water cooling channel 101c to maintain the target assembly 100 within the optimal working temperature range. The embodiment of the present invention also provides an implementation method of the target water cooling channel 101c. The target plate body 101101 includes a water cooling plate 101b and a target plate 101a, wherein the target plate 101a is located at the first end face of the water cooling plate 101b, and the target water cooling channel 101c is formed between the two; the second end face of the water cooling plate 101b is connected to the target shaft 102, and the first end face of the water cooling plate 101b is arranged opposite to the second end face of the water cooling plate 101b. Furthermore, the first end surface of the water-cooling plate 101b is provided with a groove, and the portion where the target plate 101a and the water-cooling plate 101b are connected is a planar structure. After the target plate 101a and the water-cooling plate 101b are spliced ​​together, the groove forms the main structure of the target water-cooling channel 101c; or in some other embodiments of the present invention, the target plate 101a is provided with a groove, the first end surface of the water-cooling plate 101b is a planar structure, the target plate 101a and the water-cooling plate 101b are spliced ​​together, and the groove forms the main structure of the target water-cooling channel 101c. Of course, the above is only an example, and the present invention can also protect other ways of forming the target water-cooling channel 101c.

[0059] The target water cooling channel 101c can be a double helix structure, a serpentine structure, etc. The present invention preferably selects a double helix structure. For easy installation, the inlet and outlet of the target water cooling channel 101c are located in the middle area of ​​the water cooling channel, and spirally coiled around the central area to the edge area of ​​the water cooling plate 101b.

[0060] In order to improve the compactness and reliability of the target assembly 100, the target assembly 100 further includes a target rotary joint 103, which is rotatably sleeved on the target shaft 102 and communicates with the target water cooling channel 101c on the water cooling plate 101b through the target shaft 102, the inlet of the target rotary joint 103 is communicated with the inlet of the target water cooling channel 101c, and the outlet of the target rotary joint 103 is communicated with the outlet of the target water cooling channel 101c.

[0061] Further, the target rotary joints 103 of multiple target material assemblies 100 are connected in series, and the target rotary joint 103 at the head end serves as the target water inlet joint, and the target rotary joint 103 at the end serves as the target water outlet joint. The target rotary joints 103 of multiple target material assemblies 100 are connected in series, which can be understood as that the inlet of the current target rotary joint 103 is connected to the outlet of the previous target rotary joint 103, and the inlet of the target rotary joint 103 at the head end serves as the target water inlet joint, and the outlet of the target rotary joint 103 at the end serves as the target water outlet joint. In addition to the above-mentioned series connection form, it can also be connected in parallel.

[0062] In order to provide stable circulating water, the target device 40 of the embodiment of the present invention further includes a circulating water assembly 800 for providing circulating water for the target assembly 100, and the circulating water assembly 800 includes an inlet pipe 810 and an outlet pipe 820. The inlet pipe 810 provides inlet water for the target assembly 100, and the outlet pipe 820 provides outlet water for the target assembly 100.

[0063] In some embodiments of the present invention, all or part of the water inlet pipe 810 and / or the water outlet pipe 820 are disposed on the side wall of the magnetic fluid transmission shaft assembly 300. Alternatively, in some other embodiments of the present invention, the water inlet pipe 810 and / or the water outlet pipe 820 are separate pipelines that are sealed and penetrate the wall of the vacuum chamber 50.

[0064] When all or part of the water inlet pipe 810 and / or the water outlet pipe 820 are arranged on the side wall of the magnetic fluid transmission shaft assembly 300, the circulating water assembly 800 further includes a vacuum side water inlet joint 830 and a vacuum side water outlet joint 840, the vacuum side water inlet joint 830 connects the vacuum end of the water inlet pipe 810 with the target water inlet joints of the plurality of target material assemblies 100, and the vacuum side water outlet joint 840 connects the vacuum end of the water outlet pipe 820 with the target water outlet joints in the plurality of target material assemblies 100. By providing the vacuum side water inlet joint 830 and the vacuum side water outlet joint 840, the target water inlet joint and the target water outlet joint can be quickly connected, which simplifies the installation steps and reduces the installation difficulty.

[0065] Similarly, the circulating water assembly 800 further includes an atmospheric side water inlet joint 850 and an atmospheric side water outlet joint 860, wherein the atmospheric side water inlet joint 850 is connected to the air end of the water inlet pipe 810, and the atmospheric side water outlet joint 860 is connected to the air end of the water outlet pipe 820. By providing the atmospheric side water inlet joint 850 and the atmospheric side water outlet joint 860, the target material water inlet joint and the target material water outlet joint can be quickly connected, which simplifies the installation steps and reduces the installation difficulty.

[0066] The function of the magnetic fluid transmission assembly 600 in the present invention is to transmit the power of the switching drive assembly 400 and / or the self-rotation drive assembly 500 to the target material fixing seat 200 and / or the target material assembly 100. In order to ensure the sealing performance during the transmission process, in some embodiments of the present invention, the magnetic fluid transmission shaft assembly 300 includes a magnetic fluid fixed shaft 310 and a first magnetic fluid rotating shaft 320 arranged sequentially from the outside to the inside, wherein the magnetic fluid fixed shaft 310 and the first magnetic fluid rotating shaft 320 are rotatably matched, and the first magnetic fluid rotating shaft 320 is respectively connected to the switching drive assembly 400 and the target material fixing seat 200 to drive the target material fixing seat 200 to rotate around its own axis.

[0067] In order to ensure the sealing performance during the transmission process, in some embodiments of the present invention, when the target device 40 also includes a self-rotation drive component 500 and a transmission component 600, the magnetofluid transmission shaft assembly 300 includes a magnetofluid fixed shaft 310, a first magnetofluid rotating shaft 320 and a second magnetofluid rotating shaft 330 arranged in sequence from the outside to the inside, wherein the magnetofluid fixed shaft 310 and the first magnetofluid rotating shaft 320 are rotatably matched; the first magnetofluid rotating shaft 320 is respectively connected to the switching drive component 400 and the target fixing seat 200; the second magnetofluid rotating shaft 330 is respectively connected to the self-rotation drive component 500 and the transmission component 600 to drive the target assembly 100 to rotate around its own axis.

[0068] In the above, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features.

[0069] In order to improve the sealing performance of the first magnetic fluid rotating shaft 320 and the second magnetic fluid rotating shaft 330 during the transmission process, in some embodiments of the present invention, a sealed magnetic fluid rotating shaft 340 is further arranged between the first magnetic fluid rotating shaft 320 and the second magnetic fluid rotating shaft 330, and the sealed magnetic fluid rotating shaft 340 and the second magnetic fluid rotating shaft 330 are rotatably arranged, and the sealed magnetic fluid rotating shaft 340 is fixedly connected to the first magnetic fluid rotating shaft 320. Among them, a seal or a vacuum bearing is arranged between the sealed magnetic fluid rotating shaft 340 and the first magnetic fluid rotating shaft 320 and / or the second magnetic fluid rotating shaft 330 to ensure the sealing between them.

[0070] In order to cool the magnetic fluid transmission shaft assembly 300, in some embodiments of the present invention, a water inlet side wall channel 321 and a water outlet side wall channel 322 are further provided on the side wall of the first magnetic fluid rotating shaft 320. The water inlet side wall channel 321 is used for circulating water to enter, and the water outlet side wall channel 322 is used for circulating water to flow out.

[0071] The atmospheric end of the water inlet side wall channel 321 and the atmospheric end of the water outlet side wall channel 322 are staggered in the axial direction, or the atmospheric end of the water inlet side wall channel 321 and the atmospheric end of the water outlet side wall channel 322 are flush in the axial direction.

[0072] In order to reduce the difficulty of installation, in some embodiments of the present invention, the magnetic fluid transmission shaft assembly 300 further includes a water rotary joint 350 sleeved on the outer periphery of the first magnetic fluid rotating shaft 320, wherein the water inlet 351 of the water rotary joint is communicated with the atmospheric end of the water inlet side wall channel 321, and the water outlet 352 of the water rotary joint is communicated with the atmospheric end of the water outlet side wall channel 322. By providing the water rotary joint 350, the difficulty of connecting the water inlet side wall channel 321 and the water outlet side wall channel 322 can be reduced.

[0073] In order to improve the automation degree of the target material device 40, in some embodiments of the present invention, the target material device 40 further includes a position detection assembly 700, which is used to detect that the target material assembly 100 among the multiple target material assemblies 100 rotates to the target position. When the target material assembly 100 rotates to the target position, the switching drive assembly 400 stops running, and the target material assembly 100 stays at the position.

[0074] Furthermore, the position detection component 700 includes a plurality of photoelectric sensing switches 710, a shading member and a stroke position detection member, wherein the plurality of photoelectric sensing switches 710 correspond one-to-one to the plurality of target material assemblies 100; the shading member is arranged on the magnetofluid transmission shaft assembly 300, and when a target photoelectric sensing switch 710 among the plurality of photoelectric sensing switches 710 generates an in-position signal, the stroke position detection member determines that the target target material assembly 100 among the plurality of target material assemblies 100 rotates to the target position.

[0075] It should be noted that the photoelectric sensor switch 710 corresponds to the position of the target assembly 100 one by one. When the light shielding member rotates to a certain photoelectric sensor switch 710 and triggers the photoelectric sensor switch 710, the target assembly 100 corresponding to the photoelectric sensor switch 710 rotates to the target position as the target assembly 100. The stroke position detection member also includes: when it is determined that the target assembly 100 among the multiple target assemblies 100 rotates to the target position, the switching drive assembly 400 is controlled to stop running.

[0076] In the figure, there are four photoelectric sensing switches 710, which are evenly distributed on the position sensing device fixing plate 730 through the fixing block 720; there are four target assemblies 100, which are evenly arranged on the target fixing seat 200. The four target assemblies 100 are respectively a first target assembly 110, a second target assembly 120, a third target assembly 130 and a fourth target assembly 140, wherein the four target assemblies are arranged on the target fixing seat 200 in an umbrella-shaped structure.

[0077] It should be noted that, for the convenience of description, only the parts related to the invention are shown in the drawings. In the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0078] The above description is only a preferred embodiment of the present invention and an explanation of the technical principles used, and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. The scope of the invention involved in the present invention is not limited to the technical solution formed by a specific combination of the above-mentioned technical features, but should also cover other technical solutions formed by any combination of the above-mentioned technical features or their equivalent features without departing from the above-mentioned inventive concept. For example, the above-mentioned features are replaced with the technical features with similar functions disclosed in the present invention (but not limited to) to form a technical solution.

Claims

1. A target device, characterized in that: It includes a plurality of target assemblies of different materials, a target fixing seat, a magnetic fluid transmission shaft assembly and a switching drive assembly; wherein: A plurality of the target material assemblies are arranged on the target material fixing seat along the circumferential direction; One end of the magnetic fluid transmission shaft assembly is in transmission connection with the target material fixing seat, and drives the target material fixing seat to rotate around its own axis, so as to switch a target target material assembly among the multiple target material assemblies to rotate to a target position; The switching drive assembly is in driving connection with the other end of the magnetic fluid transmission shaft assembly to drive the magnetic fluid transmission shaft assembly to operate.

2. The target device according to claim 1, characterized in that: The target assembly can be rotatably arranged on the target fixing seat around its own axis.

3. The target device according to claim 2, characterized in that: The target device also includes a self-rotation drive component and a transmission component. The self-rotation drive component is connected to the magnetic fluid transmission shaft component through transmission connection, and the magnetic fluid transmission shaft component is connected to the transmission component to drive the target component to rotate around its own axis.

4. The target device according to claim 3, characterized in that: The transmission assembly includes a gear set arranged on the magnetic fluid transmission shaft assembly and the target assembly.

5. The target device according to claim 4, characterized in that: The gear set includes a driving gear arranged on the magnetic fluid transmission shaft assembly and a driven gear arranged on the target assembly. The driven gear is meshed with the driving gear to drive the target assembly to rotate around its own axis.

6. The target device according to claim 1, characterized in that: The target assembly includes a target plate and a target axis, wherein the target axis is arranged on a non-functional surface of the target plate, and the functional surface of the target plate is arranged opposite to the non-functional surface of the target plate.

7. The target device according to claim 6, characterized in that: The target plate body includes a water-cooling plate and a target plate, wherein the target plate is located at the first end face of the water-cooling plate, and a target water-cooling channel is formed between the two; the second end face of the water-cooling plate is connected to the target shaft, and the first end face of the water-cooling plate is arranged opposite to the second end face of the water-cooling plate.

8. The target device according to claim 7, characterized in that: The target material assembly also includes a target material rotating joint, which is rotatably mounted on the target material shaft and is connected to the target material water cooling channel on the water cooling plate through the target material shaft. The inlet of the target material rotating joint is connected to the inlet of the target material water cooling channel, and the outlet of the target material rotating joint is connected to the outlet of the target material water cooling channel.

9. The target device according to claim 8, characterized in that: The target material rotating joints of the plurality of target material assemblies are connected in series, and the target material rotating joint at the head end serves as a target material water inlet joint, and the target material rotating joint at the end end serves as a target material water outlet joint.

10. The target device according to claim 1, characterized in that: It also includes a circulating water component for providing circulating water for the target material component, and the circulating water component includes a water inlet pipe and a water outlet pipe.

11. The target device according to claim 10, characterized in that: All or part of the water inlet pipe and / or the water outlet pipe are arranged on the side wall of the magnetic fluid transmission shaft assembly.

12. The target device according to claim 10, characterized in that: The circulating water assembly also includes a vacuum side water inlet joint and a vacuum side water outlet joint. The vacuum side water inlet joint connects the vacuum end of the water inlet pipe with the target water inlet joints of the multiple target material assemblies, and the vacuum side water outlet joint connects the vacuum end of the water outlet pipe with the target water outlet joints in the multiple target material assemblies.

13. The target device according to claim 10, characterized in that: The circulating water component also includes an atmospheric side water inlet joint and an atmospheric side water outlet joint, the atmospheric side water inlet joint is connected to the air end of the water inlet pipe, and the atmospheric side water outlet joint is connected to the air end of the water outlet pipe.

14. The target device according to claim 1, characterized in that: The magnetic fluid transmission shaft assembly includes a magnetic fluid fixed shaft and a first magnetic fluid rotating shaft arranged in sequence from the outside to the inside, wherein the magnetic fluid fixed shaft and the first magnetic fluid rotating shaft are rotatably matched, and the first magnetic fluid rotating shaft is respectively connected to the switching drive assembly and the target material fixing seat to drive the target material fixing seat to rotate around its own axis.

15. The target device according to claim 1, characterized in that: When the target device also includes a self-rotation drive component and a transmission component, the magnetic fluid transmission shaft component includes a magnetic fluid fixed shaft, a first magnetic fluid rotating shaft and a second magnetic fluid rotating shaft which are arranged in sequence from the outside to the inside, wherein the magnetic fluid fixed shaft and the first magnetic fluid rotating shaft are rotatably matched; the first magnetic fluid rotating shaft is respectively connected to the switching drive component and the target fixing seat; the second magnetic fluid rotating shaft is respectively connected to the self-rotation drive component and the transmission component to drive the target assembly to rotate around its own axis.

16. The target device according to claim 15, characterized in that: A sealed magnetic fluid rotating shaft is further arranged between the first magnetic fluid rotating shaft and the second magnetic fluid rotating shaft. The sealed magnetic fluid rotating shaft and the second magnetic fluid rotating shaft are rotatably arranged, and the sealed magnetic fluid rotating shaft is fixedly connected to the first magnetic fluid rotating shaft.

17. The target device according to claim 16, characterized in that: A water inlet side wall channel and a water outlet side wall channel are also provided on the side wall of the first magnetic fluid rotating shaft.

18. The target device according to claim 17, characterized in that: The atmospheric end of the water inlet side wall channel and the atmospheric end of the water outlet side wall channel are staggered in the axial direction.

19. The target device according to claim 17, characterized in that: The magnetic fluid transmission shaft assembly also includes a water rotary joint sleeved on the outer circumference of the first magnetic fluid rotating shaft, wherein the water inlet of the water rotary joint is connected to the atmospheric end of the water inlet side wall channel, and the water outlet of the water rotary joint is connected to the atmospheric end of the water outlet side wall channel.

20. The target device according to claim 1, characterized in that: The target material device further comprises a position detection component, and the position detection component is used to detect that a target target material component among the plurality of target material components rotates to a target position.

21. The target device according to claim 20, characterized in that: The position detection component includes a plurality of photoelectric sensing switches, a shading member and a stroke position detection member, wherein the plurality of photoelectric sensing switches correspond one-to-one to the plurality of target material assemblies; the shading member is arranged on the magnetic fluid transmission shaft assembly, and when a target photoelectric sensing switch among the plurality of photoelectric sensing switches generates an in-position signal, the stroke position detection member determines that a target target material assembly among the plurality of target material assemblies rotates to a target position.

22. The target device according to claim 21, characterized in that The stroke position detection component also includes: when it is determined that a target target assembly among the plurality of target assemblies rotates to a target position, controlling the switching drive assembly to stop running.

23. The target device according to claim 21, characterized in that The number of the photoelectric sensing switches is four, and the four photoelectric sensing switches are evenly distributed on the position sensing device fixing plate through a fixing block; the number of the target material assemblies is four, and the four target material assemblies are evenly arranged on the target material fixing seat.

24. An ion beam deposition system, characterized in that: It comprises a vacuum chamber and a deposition ion source, a wafer carrier, an auxiliary ion source and a target device located in the vacuum chamber, wherein the target device is the target device as claimed in any one of claims 1 to 23.

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