Circulating water cooling device of single crystal furnace

Abstract

The invention discloses a single crystal furnace circulating water cooling device, and provides the following scheme that the single crystal furnace circulating water cooling device comprises an operation table and a placement cabinet, a base is arranged at the bottom of the placement cabinet, a main body mechanism is mounted on the placement cabinet, material placing mechanisms are arranged in the placement cabinet and the main body mechanism, and a water cooling mechanism is arranged on the main body mechanism; the water cooling mechanism is arranged, the ventilation hood is conveniently driven to move to a proper position through a corresponding motor lead screw transmission assembly, then water cooling liquid is introduced into the liquid cooling cavity, heat generated by the device is conveniently absorbed and dissipated, then an air inlet head is connected with an air blower, air is conveniently introduced into a through groove and an annular groove in the ventilation hood, and the cooling effect is improved. And then the crystal enters each spray head and is sprayed out, so that the heat generated in the processing process is dissipated in an auxiliary manner, the heat dissipation is more uniform, the temperature gradient and the thermal stress are weakened, the growth rate and the growth direction of the crystal are prevented from being greatly influenced, the crystal grows more uniformly, and the product quality is ensured.

Description

Technical Field

[0001] The invention relates to the technical field of single crystal manufacturing, and in particular to a circulating water cooling device for a single crystal furnace. Background Art

[0002] As a semiconductor material, single crystal silicon is generally used to manufacture integrated circuits and other electronic components. Currently, there are two growth technologies for single crystal silicon, the zone melting method and the Czochralski method. The Czochralski method is currently the most commonly used method, which generally requires the use of a corresponding single crystal furnace. A single crystal furnace is a device that melts polycrystalline materials such as polycrystalline silicon and grows single crystals without dislocation using the Czochralski method. In the actual use of a single crystal furnace, a circulating water cooling device for cooling the material is particularly important. In the existing patent with patent number CN117779189B, a circulating water cooling device for a single crystal furnace is disclosed.

[0003] However, in actual operation, the circulating water cooling device of the single crystal furnace in the above patent has a problem that the airflow is not smooth and uneven heat dissipation is likely to occur because the interior of the furnace is always in a nearly closed state during the growth of the single crystal. The uneven heat dissipation in turn causes thermal stress to be generated under the influence of the temperature gradient, so that the growth rate and direction of the crystal are easily affected, resulting in uneven crystal growth. This unevenness will directly affect the shape, size and performance of the crystal, and reduce product quality. In addition, during long-term use, some impurities and dirt will inevitably adhere to the inner wall of the water cooling chamber of the single crystal furnace, which will cause the crystal to grow unevenly. The continuous accumulation of these impurities and dirt can easily cause the blockage of the water cooling cavity of the single crystal furnace, and also affect the thermal conductivity of the water cooling screen shell assembly, further resulting in a reduction in the heat dissipation effect, and ultimately affecting the molding quality of the crystal; in addition, after long-term use, the circulating coolant will cause the liquid quality to gradually deteriorate and contain a large number of impurity particles. When these impurity particles flow in the water cooling liquid, they will cause erosion and wear to the inner wall of the cavity tube and other water cooling system components, shortening the service life of the equipment, and once these impurities penetrate into the crystal growth area of ​​the single crystal furnace, they will cause serious pollution to the growing crystals, affecting product quality. In response to the above problems, the present invention document proposes a circulating water cooling device for a single crystal furnace. Summary of the invention

[0004] The purpose of the present invention is to solve the shortcomings existing in the prior art, and to propose a single crystal furnace circulating water cooling device which can enhance the dissipation of heat inside the single crystal furnace through corresponding ventilation components, while facilitating the removal of impurities adhered to the inner wall of the liquid cooling chamber. In addition, it is convenient to add a suitable scale inhibitor to the coolant, reduce the erosion of impurities on the inner wall of the liquid cooling chamber, and prevent impurities from affecting crystal growth, thereby further ensuring the operation of the single crystal furnace.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A circulating water cooling device for a single crystal furnace comprises an operating table and a placement cabinet, wherein a base is provided at the bottom of the placement cabinet, a main body mechanism is installed on the placement cabinet, a material placing mechanism is provided inside the placement cabinet and the main body mechanism, a water cooling mechanism is provided on the main body mechanism, a scraping mechanism is provided inside the main body mechanism, and a material adding mechanism is installed on the main body mechanism;

[0007] The main body mechanism comprises a shell, two support columns are fixedly connected to the placement cabinet, the two support columns are commonly fixedly connected to the shell, a furnace cover is provided on the shell, and a feed pipe is fixedly connected to the furnace cover;

[0008] The water cooling mechanism includes a motor, two motors are arranged on the furnace cover, the interior of the shell is slidably connected to the ventilation hood, a first screw is rotatably connected to the transmission end of the motor, and the first screw is threadedly connected to the interior of the ventilation hood, a through groove and an annular groove are arranged inside the ventilation hood, and the through groove and the annular groove are communicated, a nozzle is installed on the inner wall of the ventilation hood, and the inner cavity of the nozzle is communicated with the through groove, an air inlet head is arranged on the furnace cover, a flexible telescopic tube is fixedly connected to the air inlet head, the flexible telescopic tube passes through the furnace cover and extends to the inside of the through groove, a liquid cooling chamber is arranged inside the shell, and a liquid inlet pipe is arranged on one side of the shell, and a liquid outlet pipe is arranged on the other side, and the liquid inlet pipe and the liquid outlet pipe are both communicated with the liquid cooling chamber.

[0009] Preferably, a flange is fixedly connected to the top of the side wall of the shell, and the furnace cover is mounted on the flange by bolts.

[0010] Preferably, the through grooves and the air inlet heads are both provided with two, the annular grooves are provided with multiple paths, and the through grooves are vertically arranged, and the annular grooves are horizontally arranged.

[0011] Preferably, the nozzles are provided in a plurality of groups, the plurality of groups of nozzles are distributed in a circular array, and each group of nozzles is provided with a plurality of nozzles, and the plurality of nozzles in each group are linearly distributed with equal intervals.

[0012] Preferably, the material placing mechanism comprises an electric push rod, the placing cabinet is provided with an electric push rod, an output end of the electric push rod is connected with a connecting rod, the connecting rod extends into the interior of the shell and is equipped with a crucible.

[0013] Preferably, the scraping mechanism comprises a scraper blade, and the scraper blade is slidably connected in the liquid cooling chamber. The scraper blade is annular as a whole, and the top of the cross-section of the scraper blade is triangular.

[0014] Preferably, a first gear is fixedly connected to the side of the first screw rod close to the motor, a second gear is meshed on one side of the first gear, a second screw rod is fixedly connected to the second gear, the second screw rod is rotatably connected to the inside of the shell, and the second screw rod is threadedly connected to the inside of the scraper blade.

[0015] Preferably, the feeding mechanism comprises a material storage frame, the furnace cover is provided with the material storage frame, and the top of the material storage frame is provided with a sealing cover.

[0016] Preferably, the storage frame and the interior of the furnace cover are slidably connected together with a through rod, the bottom end of the through rod extends to the inside of the side wall of the shell, and a guide groove is provided inside the through rod, a spring is wound on the through rod, one end of the spring is fixedly connected to the through rod, and the other end is fixedly connected to the inside of the furnace cover.

[0017] Preferably, the guide groove is in an "I" shape as a whole, and a handle is fixedly connected to the top of the through rod, and the top of the handle is arc-shaped.

[0018] Compared with the prior art, the present invention provides a circulating water cooling device for a single crystal furnace, which has the following beneficial effects:

[0019] 1. The circulating water cooling device of the single crystal furnace is provided with a motor, a first screw rod, a ventilation hood, a through groove, an annular groove, a nozzle, an air inlet head, a flexible telescopic tube and a liquid cooling chamber. The two first screw rods are driven to rotate by two motors respectively. With the rotation of the two first screw rods, the ventilation hood is conveniently driven to move together until the ventilation hood is moved to a suitable position. Then, water-cooling liquid is introduced into the liquid cooling chamber to facilitate the absorption and dissipation of heat generated by the device. Then, the air inlet head is connected with the blower. Through the air inlet head and the flexible telescopic tube, it is convenient to let the wind enter the ventilation hood, and then pass through the through groove and the annular groove, enter the interior of each nozzle and then spray it out, so as to further assist in dissipating the heat generated in the process of processing the single crystal rod, so as to make the heat dissipation in the processing process more uniform, thereby weakening the temperature gradient and thermal stress, avoiding the crystal growth rate and growth direction being greatly affected, making the crystal growth more uniform, and ensuring the product quality.

[0020] 2. The circulating water cooling device of the single crystal furnace is provided with a first gear, a second gear, a second screw and a scraper. When the motor rotates, the first gear is also driven to rotate together, and then the second gear is driven to rotate. The rotation of the second gear drives the second screw to rotate. As the second screw rotates, the scraper is driven to slide continuously in the liquid cooling chamber. The scraper can be used to frequently scrape off the dust and impurities adhering to the inner wall of the liquid cooling chamber, thereby reducing the possibility of blockage of the liquid cooling chamber of the single crystal furnace. At the same time, the thermal conductivity performance of the water cooling component is guaranteed, the heat dissipation effect is further improved, and finally the molding quality of the crystal is guaranteed.

[0021] 3. The circulating water cooling device of the single crystal furnace is provided with a material storage frame, a through rod, a guide groove, a spring and a handle. According to actual conditions, the handle can be held and pressed, and the handle moves downward to drive the through rod to move downward, and the spring is compressed at the same time until the bottom opening of the guide groove on the through rod is exposed to the liquid cooling chamber. At this time, the descaling agent stored in the material storage frame in advance will flow into the guide groove inside the through rod, and then flow into the liquid cooling chamber through the guide groove. Therefore, by adding appropriate descaling agent to the coolant, the content of impurity particles is reduced, thereby reducing the scouring and wear of the inner wall of the cavity tube and other water cooling system components caused by the impurity particles, thereby ensuring the service life of the equipment, reducing the situation where these impurities penetrate into the crystal growth area of ​​the single crystal furnace, avoiding serious pollution to the growing crystals, and ensuring product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A three-dimensional view of a circulating water cooling device for a single crystal furnace proposed by the present invention;

[0023] Figure 2 A view of the connection structure of the placement cabinet, base, main body mechanism, water cooling mechanism and feeding mechanism of the present invention;

[0024] Figure 3 It is a view of the connection structure of the placement cabinet, base, main body mechanism, material placement mechanism and water cooling mechanism of the present invention;

[0025] Figure 4 A view of the connection structure between the main body mechanism and the water cooling mechanism of the present invention;

[0026] Figure 5 A view of the connection structure between the main body mechanism and the feeding mechanism of the present invention;

[0027] Figure 6 It is a view of the structure of the material placing mechanism, water cooling mechanism, scraping mechanism and material adding mechanism of the present invention;

[0028] Figure 7 A view of the connection structure between the water cooling mechanism and the scraping mechanism of the present invention;

[0029] Figure 8 A view of the connection structure between the second screw rod and the scraper blade of the present invention;

[0030] Fig. 9 A view of the connection structure between the main body mechanism and the feeding mechanism of the present invention;

[0031] Fig.10 It is a view of the structure of the feeding mechanism of the present invention.

[0032] In the figure: 1, placement cabinet; 2, base; 3, main body; 301, shell; 302, flange; 303, furnace cover; 304, feed pipe; 305, bolt; 306, support column; 4, material placement mechanism; 401, electric push rod; 402, connecting rod; 403, crucible; 5, water cooling mechanism; 501, motor; 502, first screw rod; 503, ventilation hood; 504, through groove; 505, ring groove ; 506, nozzle; 507, air inlet; 508, flexible telescopic tube; 509, liquid inlet pipe; 510, liquid outlet pipe; 511, liquid cooling chamber; 6, scraping mechanism; 601, first gear; 602, second gear; 603, second screw rod; 604, scraper; 7, feeding mechanism; 701, storage frame; 702, sealing cover; 703, through rod; 704, guide groove; 705, spring; 706, handle. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0034] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0035] Embodiment 1:

[0036] Reference Figure 1-Figure 9 A circulating water cooling device for a single crystal furnace comprises an operating table, a placement cabinet 1, a base 2 is provided at the bottom of the placement cabinet 1, a main body mechanism 3 is installed on the placement cabinet 1, a placing mechanism 4 is provided inside the placement cabinet 1 and the main body mechanism 3, a water cooling mechanism 5 is provided on the main body mechanism 3, a scraping mechanism 6 is provided inside the main body mechanism 3, and a feeding mechanism 7 is installed on the main body mechanism 3.

[0037] The main structure 3 includes a shell 301, two support columns 306 are fixedly connected to the placement cabinet 1, the shell 301 is fixedly connected to the two support columns 306, a furnace cover 303 is provided on the shell 301, a feed pipe 304 is fixedly connected to the furnace cover 303, a flange 302 is fixedly connected to the top of the side wall of the shell 301, the furnace cover 303 is installed on the flange 302 by bolts 305, and the support columns 306 are provided to facilitate the fixed placement of the shell 301. In actual operation, through the feed pipe 304 provided on the furnace cover 303, it is convenient to add an appropriate amount of raw materials into the shell 301 to facilitate subsequent work.

[0038] The water cooling mechanism 5 includes a motor 501, two motors 501 are arranged on the furnace cover 303, the interior of the housing 301 is slidably connected to the ventilation cover 503, a first screw rod 502 is rotatably connected to the transmission end of the motor 501, and the first screw rod 502 is threadedly connected to the interior of the ventilation cover 503, a through groove 504 and an annular groove 505 are arranged inside the ventilation cover 503, and the through groove 504 and the annular groove 505 are connected, a nozzle 506 is installed on the inner wall of the ventilation cover 503, and the inner cavity of the nozzle 506 is connected to the through groove 504, an air inlet head 507 is arranged on the furnace cover 303, and a flexible extension rod 507 is fixedly connected to the air inlet head 507 The flexible expansion tube 508 passes through the furnace cover 303 and extends to the inside of the through groove 504. A liquid cooling chamber 511 is provided inside the shell 301, and a liquid inlet pipe 509 is provided on one side of the shell 301, and a liquid outlet pipe 510 is provided on the other side. The liquid inlet pipe 509 and the liquid outlet pipe 510 are both connected to the liquid cooling chamber 511. The through groove 504 and the air inlet head 507 are each provided with two, and the annular groove 505 is provided with multiple channels, and the through groove 504 is vertically arranged, and the annular groove 505 is horizontally arranged. The nozzle 506 is provided with multiple groups, and the multiple groups of nozzles 506 are distributed in a circular array, and each group of nozzles 506 is provided with multiple, and each group of multiple The nozzles 506 are linearly distributed at equal intervals. By setting the motors 501, according to actual conditions, during operation, the user can connect the two motors 501 to a power source, and the motors 501 rotate to drive the first screw rods 502 to rotate. As the two first screw rods 502 rotate, it is convenient to jointly drive the ventilation hood 503 to move inside the shell 301 until the ventilation hood 503 is moved to a suitable position. Then, through the liquid inlet pipe 509, it is convenient to introduce water-cooling liquid into the liquid cooling chamber 511. After the water-cooling liquid flows into the liquid cooling chamber 511 and circulates once, it flows out through the liquid outlet pipe 510. The above operation is repeated, which is convenient for the device to be operated in a certain position. The heat generated in the actual work is absorbed and dissipated, and then the corresponding air inlet head 507 is connected to the blower. Through the air inlet head 507 and the flexible telescopic tube 508, the wind is conveniently passed into the interior of the ventilation hood 503, and then passes through the through groove 504 and the annular groove 505, enters the interior of each nozzle 506, and then is immediately sprayed out, so as to further assist in the dissipation of the heat generated in the process of processing the single crystal rod, so as to make the heat dissipation in the processing process more uniform, thereby weakening the temperature gradient and thermal stress, avoiding the crystal growth rate and growth direction being greatly affected, making the crystal growth more uniform, and ensuring the product quality.

[0039] By arranging the shell 301, the furnace cover 303, the feed pipe 304, the support column 306, the motor 501, the first screw rod 502, the ventilation hood 503, the through groove 504, the annular groove 505, the nozzle 506, the air inlet head 507, the flexible telescopic tube 508, the liquid inlet pipe 509, the liquid outlet pipe 510 and the liquid cooling chamber 511, the shell 301 can be conveniently fixed through the support column 306. In actual operation, through the feed pipe 304 arranged on the furnace cover 303, it is convenient to add a proper amount of raw materials into the shell 301 to facilitate subsequent work.

[0040] According to the actual situation, during operation, the user can connect the two motors 501 to the power supply, and the motor 501 rotates to drive the first screw rod 502 to rotate. As the two first screw rods 502 rotate, it is convenient to jointly drive the ventilation hood 503 to move inside the shell 301 until the ventilation hood 503 is moved to a suitable position. Then, through the liquid inlet pipe 509, it is convenient to introduce water-cooling liquid into the liquid cooling chamber 511. After the water-cooling liquid flows into the liquid cooling chamber 511 and circulates once, it flows out through the liquid outlet pipe 510. The above operation is repeated, which is convenient for heat generated by the device in actual work. After absorption and dispersion, the corresponding air inlet head 507 is connected to the blower, and the air is conveniently passed into the interior of the ventilation hood 503 through the air inlet head 507 and the flexible telescopic tube 508, and then enters the interior of each nozzle 506 through the through groove 504 and the annular groove 505, and then is sprayed out immediately, so as to further assist in the dispersion of the heat generated in the process of processing the single crystal rod, so as to make the heat dissipation in the processing process more uniform, thereby weakening the temperature gradient and thermal stress, avoiding the crystal growth rate and growth direction being greatly affected, making the crystal growth more uniform, and ensuring the product quality.

[0041] In the present invention, the placing mechanism 4 includes an electric push rod 401, and the placing cabinet 1 is provided with the electric push rod 401. The output end of the electric push rod 401 is connected to a connecting rod 402, and the connecting rod 402 extends to the inside of the shell 301 and is installed with a crucible 403. By setting the electric push rod 401, during operation, according to actual conditions, the electric push rod 401 is connected to the power supply, and the electric push rod 401 drives the connecting rod 402 to move, and the movement of the connecting rod 402 drives the crucible 403 to move, so that the height of the crucible 403 can be adjusted conveniently.

[0042] In the present invention, the scraping mechanism 6 includes a scraper 604, which is slidably connected to the liquid cooling chamber 511. The scraper 604 is annular as a whole, and the top of the cross section of the scraper 604 is triangular. The first screw rod 502 is fixedly connected to the side close to the motor 501 with a first gear 601, and the first gear 602 is meshed with the second gear 602 on one side. The second gear 602 is fixedly connected to the second screw rod 603, and the second screw rod 603 is rotatably connected to the inside of the housing 301. The second screw rod 603 is threadedly connected to the inside of the scraper 604. By setting the first gear 601, when the motor 501 rotates, the first gear 601 is rotated to rotate. At the same time, the first gear 601 will also be driven to rotate, and the rotation of the first gear 601 will drive the second gear 602 to rotate, and the rotation of the second gear 602 will drive the second screw rod 603 to rotate. As the second screw rod 603 rotates, the scraper 604 will be driven to continuously slide inside the liquid cooling chamber 511. The scraper 604 can be used to conveniently scrape off the dust and impurities adhering to the inner wall of the liquid cooling chamber 511, thereby reducing the possibility of blockage of the single crystal furnace liquid cooling chamber 511, while also ensuring the thermal conductivity of the water cooling component, further improving the heat dissipation effect, and ultimately ensuring the molding quality of the crystal.

[0043] Embodiment 2:

[0044] Reference Figure 1-Figure 10 A circulating water cooling device for a single crystal furnace comprises an operating table, a placement cabinet 1, a base 2 is provided at the bottom of the placement cabinet 1, a main body mechanism 3 is installed on the placement cabinet 1, a placing mechanism 4 is provided inside the placement cabinet 1 and the main body mechanism 3, a water cooling mechanism 5 is provided on the main body mechanism 3, a scraping mechanism 6 is provided inside the main body mechanism 3, and a feeding mechanism 7 is installed on the main body mechanism 3.

[0045] The main structure 3 includes a shell 301, two support columns 306 are fixedly connected to the placement cabinet 1, the shell 301 is fixedly connected to the two support columns 306, a furnace cover 303 is provided on the shell 301, a feed pipe 304 is fixedly connected to the furnace cover 303, a flange 302 is fixedly connected to the top of the side wall of the shell 301, the furnace cover 303 is installed on the flange 302 by bolts 305, and the support columns 306 are provided to facilitate the fixed placement of the shell 301. In actual operation, through the feed pipe 304 provided on the furnace cover 303, it is convenient to add an appropriate amount of raw materials into the shell 301 to facilitate subsequent work.

[0046] The water cooling mechanism 5 includes a motor 501, two motors 501 are arranged on the furnace cover 303, the interior of the housing 301 is slidably connected to the ventilation cover 503, a first screw rod 502 is rotatably connected to the transmission end of the motor 501, and the first screw rod 502 is threadedly connected to the interior of the ventilation cover 503, a through groove 504 and an annular groove 505 are arranged inside the ventilation cover 503, and the through groove 504 and the annular groove 505 are connected, a nozzle 506 is installed on the inner wall of the ventilation cover 503, and the inner cavity of the nozzle 506 is connected to the through groove 504, an air inlet head 507 is arranged on the furnace cover 303, and a flexible extension rod 507 is fixedly connected to the air inlet head 507 The flexible expansion tube 508 passes through the furnace cover 303 and extends to the inside of the through groove 504. A liquid cooling chamber 511 is provided inside the shell 301, and a liquid inlet pipe 509 is provided on one side of the shell 301, and a liquid outlet pipe 510 is provided on the other side. The liquid inlet pipe 509 and the liquid outlet pipe 510 are both connected to the liquid cooling chamber 511. The through groove 504 and the air inlet head 507 are each provided with two, and the annular groove 505 is provided with multiple channels, and the through groove 504 is vertically arranged, and the annular groove 505 is horizontally arranged. The nozzle 506 is provided with multiple groups, and the multiple groups of nozzles 506 are distributed in a circular array, and each group of nozzles 506 is provided with multiple, and each group of multiple The nozzles 506 are linearly distributed at equal intervals. By setting the motors 501, according to actual conditions, during operation, the user can connect the two motors 501 to a power source, and the motors 501 rotate to drive the first screw rods 502 to rotate. As the two first screw rods 502 rotate, it is convenient to jointly drive the ventilation hood 503 to move inside the shell 301 until the ventilation hood 503 is moved to a suitable position. Then, through the liquid inlet pipe 509, it is convenient to introduce water-cooling liquid into the liquid cooling chamber 511. After the water-cooling liquid flows into the liquid cooling chamber 511 and circulates once, it flows out through the liquid outlet pipe 510. The above operation is repeated, which is convenient for the device to be operated in a certain position. The heat generated in the actual work is absorbed and dissipated, and then the corresponding air inlet head 507 is connected to the blower. Through the air inlet head 507 and the flexible telescopic tube 508, the wind is conveniently passed into the interior of the ventilation hood 503, and then passes through the through groove 504 and the annular groove 505, enters the interior of each nozzle 506, and then is immediately sprayed out, so as to further assist in the dissipation of the heat generated in the process of processing the single crystal rod, so as to make the heat dissipation in the processing process more uniform, thereby weakening the temperature gradient and thermal stress, avoiding the crystal growth rate and growth direction being greatly affected, making the crystal growth more uniform, and ensuring the product quality.

[0047] By arranging the shell 301, the furnace cover 303, the feed pipe 304, the support column 306, the motor 501, the first screw rod 502, the ventilation hood 503, the through groove 504, the annular groove 505, the nozzle 506, the air inlet head 507, the flexible telescopic tube 508, the liquid inlet pipe 509, the liquid outlet pipe 510 and the liquid cooling chamber 511, the shell 301 can be conveniently fixed through the support column 306. In actual operation, through the feed pipe 304 arranged on the furnace cover 303, it is convenient to add a proper amount of raw materials into the shell 301 to facilitate subsequent work.

[0048] According to the actual situation, during operation, the user can connect the two motors 501 to the power supply, and the motor 501 rotates to drive the first screw rod 502 to rotate. As the two first screw rods 502 rotate, it is convenient to jointly drive the ventilation hood 503 to move inside the shell 301 until the ventilation hood 503 is moved to a suitable position. Then, through the liquid inlet pipe 509, it is convenient to introduce water-cooling liquid into the liquid cooling chamber 511. After the water-cooling liquid flows into the liquid cooling chamber 511 and circulates once, it flows out through the liquid outlet pipe 510. The above operation is repeated, which is convenient for heat generated by the device in actual work. After absorption and dispersion, the corresponding air inlet head 507 is connected to the blower, and the air is conveniently passed into the interior of the ventilation hood 503 through the air inlet head 507 and the flexible telescopic tube 508, and then enters the interior of each nozzle 506 through the through groove 504 and the annular groove 505, and then is sprayed out immediately, so as to further assist in the dispersion of the heat generated in the process of processing the single crystal rod, so as to make the heat dissipation in the processing process more uniform, thereby weakening the temperature gradient and thermal stress, avoiding the crystal growth rate and growth direction being greatly affected, making the crystal growth more uniform, and ensuring the product quality.

[0049] In the present invention, the placing mechanism 4 includes an electric push rod 401, and the placing cabinet 1 is provided with the electric push rod 401. The output end of the electric push rod 401 is connected to a connecting rod 402, and the connecting rod 402 extends to the inside of the shell 301 and is installed with a crucible 403. By arranging the electric push rod 401, the connecting rod 402 and the crucible 403, during operation, according to actual conditions, the electric push rod 401 is connected to the power supply, and the electric push rod 401 drives the connecting rod 402 to move, and the movement of the connecting rod 402 drives the crucible 403 to move, so that the height of the crucible 403 can be adjusted conveniently.

[0050] In the present invention, the scraping mechanism 6 includes a scraper 604, which is slidably connected in the liquid cooling chamber 511, and the scraper 604 is annular as a whole, and the top of the cross section of the scraper 604 is triangular, and the first screw rod 502 is fixedly connected to the side close to the motor 501 with the first gear 601, and the second gear 602 is meshed with the side of the first gear 601, and the second gear 602 is fixedly connected to the second screw rod 603, and the second screw rod 603 is rotatably connected to the inside of the housing 301, and the second screw rod 603 is threadedly connected to the inside of the scraper 604, by setting the first gear 601, the second gear 602, the second screw rod 603 and the scraper 6 04. When the motor 501 rotates, it will also drive the first gear 601 to rotate. The rotation of the first gear 601 drives the second gear 602 to rotate. The rotation of the second gear 602 drives the second screw 603 to rotate. As the second screw 603 rotates, the scraper 604 will be driven to slide continuously inside the liquid cooling chamber 511. The scraper 604 can be used to frequently scrape off the dust and impurities adhering to the inner wall of the liquid cooling chamber 511, thereby reducing the possibility of blockage of the single crystal furnace liquid cooling chamber 511. At the same time, it also ensures the thermal conductivity performance of the water cooling component, further improves the heat dissipation effect, and ultimately ensures the molding quality of the crystal.

[0051] In the present invention, the feeding mechanism 7 includes a material storage frame 701, a material storage frame 701 is provided on the furnace cover 303, a cover 702 is provided on the top of the material storage frame 701, a through rod 703 is slidably connected to the inside of the material storage frame 701 and the furnace cover 303, the bottom end of the through rod 703 extends to the inside of the side wall of the shell 301, and a guide groove 704 is provided inside the through rod 703, a spring 705 is wound around the through rod 703, one end of the spring 705 is fixedly connected to the through rod 703, and the other end is fixedly connected to the inside of the furnace cover 303, the guide groove 704 is in the shape of an "I" as a whole, and a handle 706 is fixedly connected to the top of the through rod 703, and the top of the handle 706 is in an arc shape. By arranging the material storage frame 701, the cover 702, the through rod 703, the guide groove 704, the spring 705 and the handle 706, in operation, according to In actual situation, it is convenient to hold the handle 706 and press it, so that the handle 706 moves downward to drive the through rod 703 to move downward, and the spring 705 is compressed at the same time until the bottom opening of the guide groove 704 on the through rod 703 is exposed to the liquid cooling chamber 511. At this time, the descaling agent previously stored in the storage frame 701 will flow into the guide groove 704 inside the through rod 703, and then flow into the liquid cooling chamber 511 through the guide groove 704. Through the cover 702, it is convenient to add the corresponding descaling agent to the inside of the storage frame 701, reduce the content of impurity particles, thereby reducing the scouring and wear of the inner wall of the cavity tube and other water cooling system components caused by impurity particles, thereby ensuring the service life of the equipment, and reducing the situation where these impurities penetrate into the crystal growth area of ​​the single crystal furnace, avoiding serious pollution to the growing crystals, and ensuring product quality.

[0052] Working principle: In actual operation, according to the actual situation, the electric push rod 401 is connected to the power supply, and the electric push rod 401 drives the connecting rod 402 to move, and the movement of the connecting rod 402 drives the crucible 403 to move, so as to facilitate the height adjustment of the crucible 403 and the subsequent feeding of raw materials.

[0053] Then, the shell 301 is conveniently fixed and placed through the support column 306. In actual operation, the feeding pipe 304 set on the furnace cover 303 is convenient to add a proper amount of raw materials into the crucible 403 inside the shell 301 to prepare the single crystal rod.

[0054] Next, according to actual conditions, the user can connect the two motors 501 to a power source, and the motor 501 rotates to drive the first screw rod 502 to rotate. As the two first screw rods 502 rotate, the ventilation hood 503 is conveniently driven to move inside the shell 301 until the ventilation hood 503 is moved to a suitable position. Then, water-cooling liquid is conveniently introduced into the liquid cooling chamber 511 through the liquid inlet pipe 509. After the water-cooling liquid flows into the liquid cooling chamber 511 and circulates once, it flows out through the liquid outlet pipe 510. The above operation is repeated to facilitate the absorption of heat generated by the device in actual work. Then, the corresponding air inlet head 507 is connected to the blower, and the air is conveniently passed into the interior of the ventilation hood 503 through the air inlet head 507 and the flexible telescopic tube 508, and then enters the interior of each nozzle 506 through the through groove 504 and the annular groove 505, and then is immediately sprayed out, so as to further assist in the dissipation of the heat generated in the process of processing the single crystal rod, so as to make the heat dissipation in the processing process more uniform, thereby weakening the temperature gradient and thermal stress, avoiding the crystal growth rate and growth direction being greatly affected, making the crystal growth more uniform, and ensuring the product quality.

[0055] Furthermore, while the motor 501 is rotating, it will also drive the first gear 601 to rotate, and the rotation of the first gear 601 will drive the second gear 602 to rotate, and the rotation of the second gear 602 will drive the second screw 603 to rotate. As the second screw 603 rotates, the scraper 604 will be driven to continuously slide inside the liquid cooling chamber 511. Through the scraper 604, the dust and impurities adhering to the inner wall of the liquid cooling chamber 511 can be frequently scraped off, thereby reducing the possibility of blockage of the single crystal furnace liquid cooling chamber 511, while also ensuring the thermal conductivity of the water cooling component, further improving the heat dissipation effect, and ultimately ensuring the molding quality of the crystal.

[0056] In addition, according to actual conditions, the handle 706 can be grasped and pressed, and the handle 706 moves downward to drive the through rod 703 to move downward, and the spring 705 is compressed at the same time until the bottom opening of the guide groove 704 on the through rod 703 is exposed to the liquid cooling chamber 511. At this time, the descaling agent previously stored in the storage frame 701 will flow into the guide groove 704 inside the through rod 703, and then flow into the liquid cooling chamber 511 through the guide groove 704. Through the cover 702, it is convenient to add the corresponding descaling agent to the inside of the storage frame 701, so as to reduce the content of impurity particles by adding appropriate descaling agents to the coolant, thereby reducing the scouring and wear of the inner wall of the cavity tube and other water cooling system components caused by impurity particles, thereby ensuring the service life of the equipment, and reducing the situation where these impurities penetrate into the crystal growth area of ​​the single crystal furnace, avoiding serious pollution to the growing crystals, and ensuring product quality.

[0057] The above are only preferred specific implementation modes of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and inventive concepts of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A circulating water cooling device for a single crystal furnace, comprising a placement cabinet (1), characterized in that: The bottom of the placement cabinet (1) is provided with a base (2), a main body mechanism (3) is installed on the placement cabinet (1), a material placement mechanism (4) is provided inside the placement cabinet (1) and the main body mechanism (3), a water cooling mechanism (5) is provided on the main body mechanism (3), a scraping mechanism (6) is provided inside the main body mechanism (3), and a material adding mechanism (7) is installed on the main body mechanism (3); The main body mechanism (3) comprises a shell (301), two support columns (306) are fixedly connected to the placement cabinet (1), the two support columns (306) are commonly fixedly connected to the shell (301), a furnace cover (303) is provided on the shell (301), and a feed pipe (304) is fixedly connected to the furnace cover (303); The water cooling mechanism (5) comprises a motor (501), two motors (501) are arranged on the furnace cover (303), the interior of the housing (301) is slidably connected to the ventilation hood (503), a first screw rod (502) is rotatably connected to the transmission end of the motor (501), and the first screw rod (502) is threadedly connected to the interior of the ventilation hood (503), a through groove (504) and an annular groove (505) are arranged inside the ventilation hood (503), and the through groove (504) and the annular groove (505) are connected, and a nozzle (506) is installed on the inner wall of the ventilation hood (503). ), and the inner cavity of the nozzle (506) is connected to the through groove (504), the furnace cover (303) is provided with an air inlet head (507), and the air inlet head (507) is fixedly connected with a flexible telescopic tube (508), and the flexible telescopic tube (508) passes through the furnace cover (303) and extends to the inside of the through groove (504), the shell (301) is provided with a liquid cooling cavity (511), and one side of the shell (301) is provided with a liquid inlet pipe (509), and the other side is provided with a liquid outlet pipe (510), and the liquid inlet pipe (509) and the liquid outlet pipe (510) are both connected to the liquid cooling cavity (511).

2. A single crystal furnace circulating water cooling device according to claim 1, characterized in that: A flange (302) is fixedly connected to the top of the side wall of the shell (301), and the furnace cover (303) is installed on the flange (302) by bolts (305).

3. The single crystal furnace circulating water cooling device according to claim 1, characterized in that: The through grooves (504) and the air inlet head (507) are both provided with two, the annular grooves (505) are provided with multiple, and the through grooves (504) are arranged vertically, and the annular grooves (505) are arranged horizontally.

4. A single crystal furnace circulating water cooling device according to claim 3, characterized in that: The nozzles (506) are provided in a plurality of groups, and the plurality of groups of nozzles (506) are distributed in a circular array, and each group of nozzles (506) is provided with a plurality of nozzles, and the plurality of nozzles (506) in each group are linearly distributed at equal intervals.

5. The single crystal furnace circulating water cooling device according to claim 1, characterized in that: The material placement mechanism (4) comprises an electric push rod (401), the placement cabinet (1) is provided with the electric push rod (401), the output end of the electric push rod (401) is connected to a connecting rod (402), the connecting rod (402) extends into the interior of the shell (301) and is equipped with a crucible (403).

6. The single crystal furnace circulating water cooling device according to claim 1, characterized in that: The scraping mechanism (6) comprises a scraper (604), the scraper (604) is slidably connected in the liquid cooling chamber (511), the scraper (604) is in annular shape as a whole, and the top of the cross section of the scraper (604) is triangular.

7. A single crystal furnace circulating water cooling device according to claim 6, characterized in that: A first gear (601) is fixedly connected to the side of the first screw rod (502) close to the motor (501), a second gear (602) is meshed with one side of the first gear (601), a second screw rod (603) is fixedly connected to the second gear (602), the second screw rod (603) is rotatably connected to the inside of the housing (301), and the second screw rod (603) is threadedly connected to the inside of the scraper (604).

8. The single crystal furnace circulating water cooling device according to claim 1, characterized in that: The material adding mechanism (7) comprises a material storage frame (701), the furnace cover (303) is provided with the material storage frame (701), and the top of the material storage frame (701) is provided with a sealing cover (702).

9. A single crystal furnace circulating water cooling device according to claim 8, characterized in that: The material storage frame (701) and the furnace cover (303) are slidably connected with a through rod (703), the bottom end of the through rod (703) extends to the inside of the side wall of the shell (301), and a guide groove (704) is provided inside the through rod (703), and a spring (705) is wound around the through rod (703), one end of the spring (705) is fixedly connected to the through rod (703), and the other end is fixedly connected to the inside of the furnace cover (303).

10. A single crystal furnace circulating water cooling device according to claim 9, characterized in that: The guide groove (704) is in the shape of an “I” as a whole, and a handle (706) is fixedly connected to the top of the through rod (703), and the top of the handle (706) is in an arc shape.

Images