Lightweight emission spectrum spectrometer device

Abstract

The invention discloses a lightweight emission spectrum spectrometer device which comprises a supporting base, a vacuum cavity, a sample table mechanism, a spherical curved crystal monochromatic mechanism and a detector mechanism. According to the spherical curved crystal monochromatic mechanism, the design scheme of center load is adopted, the two lead screws are driven to operate through the single motor, transmission is achieved through the anti-backlash gear, and therefore the spherical curved crystal monochromatic mechanism is driven to move vertically, and torque load is greatly reduced. By applying the scheme provided by the embodiment of the invention, the lightweight design of the emission spectrum spectrometer device can be effectively realized, and the cost of the emission spectrum spectrometer device is effectively reduced while the space use efficiency is greatly improved.

Description

Technical Field

[0001] The invention relates to the field of synchrotron radiation technology, and in particular to a lightweight emission spectrum spectrometer device. Background Art

[0002] In order to obtain high-throughput and high-resolution XES spectra, current emission spectrometers mainly rely on large scientific facilities at synchrotron radiation sources. In a typical synchrotron radiation experimental beamline, the beamline equipment is numerous and complex, and experimental space planning is very important. Therefore, it is of great significance to propose a lightweight emission spectrometer that is generally applicable to synchrotron radiation sources. In addition, miniaturization of instruments and equipment will also bring significant cost reduction. Summary of the invention

[0003] Based on the technical problems existing in the background technology, the present invention proposes a lightweight emission spectrum spectrometer device.

[0004] The lightweight emission spectrum spectrometer device proposed in the present invention comprises a supporting base, a vacuum cavity, a sample stage mechanism, a spherical curved crystal monochromator mechanism and a detector mechanism, wherein the vacuum cavity is located on the top of the supporting base, and the sample stage mechanism, the spherical curved crystal monochromator mechanism and the detector mechanism are all arranged inside the vacuum cavity; The spherical curved crystal monochrome mechanism comprises a large spherical curved crystal lifting mechanism, and a plurality of spherical curved crystal posture fine-tuning devices are fixed on the top of the moving end of the large spherical curved crystal lifting mechanism.

[0005] Preferably, the support base includes a marble base, the four corners of the top of the marble base are fixed with cavity supports, a pair of adjustable supports are fixed to the left and right ends of the top of the support base, the top of the cavity support supports the vacuum cavity, the top of the adjustable support is fixed with an optical platform, the large spherical curved crystal lifting mechanism is fixed on the top of the optical platform, and the optical platform is placed below the sample stage mechanism, the spherical curved crystal monochromator mechanism and the detector mechanism.

[0006] Preferably, the vacuum chamber comprises a chamber body, a fast sample introduction chamber fixed at the right center of the chamber body, a switch door fixed at the front side of the chamber body, and a plurality of chamber valves fixed in an equidistant array at the lower right side of the chamber body.

[0007] Preferably, the sample stage mechanism includes a sample stage mechanism support, a sample stage second position cylinder is fixed on the top of the sample stage mechanism support, a sample stage first displacement cylinder is fixed on the top of the conveying end of the sample stage second position cylinder, a sample stage lifting cylinder is fixed on the top of the conveying end of the sample stage first displacement cylinder, a sample stage rotating cylinder is fixed on the top of the conveying end of the sample stage lifting cylinder, a sample stage is fixed at the center of the top of the rotating end of the sample stage rotating cylinder, and the sample stage mechanism support is fixed on the top of the optical platform.

[0008] Preferably, the spherical curved crystal posture fine-tuning device includes a spherical curved crystal translation cylinder, a spherical curved crystal lifting cylinder is fixed to the top of the output end of the spherical curved crystal translation cylinder, a spherical curved crystal swing cylinder is fixed to the top of the output end of the spherical curved crystal lifting cylinder, a spherical curved crystal rotating cylinder is fixed to the top center of the spherical curved crystal swing cylinder, a spherical curved crystal support is fixed to the top of the rotating end of the spherical curved crystal rotating cylinder, and a spherical curved crystal is installed inside the spherical curved crystal support.

[0009] Preferably, the large-scale lifting mechanism for spherical curved crystals includes a lifting mechanism base, a driving motor is fixed in the middle of the top of the lifting mechanism base, a bevel gear transmission structure housing is fixed at both the left and right ends of the top of the lifting mechanism base, a gear transmission structure movably connected to the two bevel gear transmission structure housings is inserted through the two bevel gear transmission structure housings, a bevel gear transmission structure transmission-connected to the gear transmission structure is inserted through the top of the bevel gear transmission structure housing, the driving motor and the gear transmission structure are connected via gear transmission, a lifting platform support frame is fixed at both the left and right ends of the top of the lifting mechanism base, a screw transmission structure is movably connected to the inner side of the lifting platform support frame, and the bottom of the screw transmission structure is fixed to the top of the bevel gear transmission structure, and a lifting platform threadedly connected to the screw transmission structure is movably connected between the two lifting platform support frames.

[0010] Preferably, the detector mechanism includes a detector mechanism base, a detector lifting cylinder is fixed to the left side of the detector mechanism base, a detector translation cylinder is fixed to the top of the output end of the detector lifting cylinder, a detector bracket is fixed to the output end of the detector translation cylinder, and a detector is fixed to the top of the detector bracket.

[0011] Preferably, a vacuum system, a control circuit and a signal acquisition unit are arranged outside the vacuum chamber, the sample stage mechanism, the spherical curved crystal monochromator mechanism and the detector mechanism.

[0012] Preferably, the positions of the sample stage mechanism, the spherical curved crystal monochromator mechanism and the detector mechanism are on the Rowland circle.

[0013] Compared with the prior art, the beneficial technical effect of the present invention is as follows: the spherical curved crystal monochromator provided by the present invention adopts a central load design scheme, drives two lead screws to operate through a single motor, and drives the spherical curved crystal monochromator to move vertically through anti-backlash gear transmission, thereby greatly reducing the torque load. The scheme provided by the embodiment of the present invention can effectively realize the lightweight design of the emission spectrum spectrometer device, greatly improve the space utilization efficiency, and effectively reduce the cost of the emission spectrum spectrometer device. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the Rowland circle position configuration of the lightweight emission spectrum spectrometer device of the present invention.

[0015] Figure 2 It is a schematic diagram of the overall structure of the lightweight emission spectrum spectrometer device of the present invention.

[0016] Figure 3 This is a schematic diagram of the structure of the lightweight emission spectrum spectrometer device of the present invention after the vacuum cavity is hidden.

[0017] Figure 4 It is a structural schematic diagram of the sample stage mechanism of the lightweight emission spectrum spectrometer device of the present invention.

[0018] Figure 5 It is a structural schematic diagram of a spherical curved crystal posture fine-tuning device of a lightweight emission spectrum spectrometer device of the present invention.

[0019] Figure 6 It is a schematic diagram of the structural disassembly of the large lifting mechanism of the spherical curved crystal of the lightweight emission spectrum spectrometer device of the present invention.

[0020] Figure 7 It is a schematic structural diagram of the detector mechanism of the lightweight emission spectrum spectrometer device of the present invention.

[0021] In the figure: 1. Support base; 11. Cavity support; 12. Adjustable support; 13. Optical platform; 2. Vacuum chamber; 21. Rapid injection chamber; 22. Opening and closing door; 23. Chamber valve; 3. Sample stage mechanism; 31. Sample stage; 32. Sample stage rotating cylinder; 33. Sample stage lifting cylinder; 34. Sample stage first displacement cylinder; 35. Sample stage second position cylinder; 36. Sample stage mechanism support; 4. Spherical curved crystal monochrome mechanism; 41. Spherical curved crystal posture fine-tuning device; 411. Spherical curved crystal; 412. Spherical curved crystal support; 413. Spherical curved crystal rotating cylinder; 414. Spherical curved crystal swinging cylinder; 415. Spherical curved crystal lifting cylinder; 416. Spherical curved crystal translation cylinder; 42. Spherical curved crystal large lifting mechanism; 421. Lifting mechanism base; 422. Driving motor; 423. Gear transmission structure; 424. Bevel gear transmission structure; 425. Bevel gear transmission structure housing; 426. Screw transmission structure; 427. Lifting platform; 428. Lifting platform support frame; 5. Detector mechanism; 51. Detector mechanism base; 52. Detector; 53. Detector lifting cylinder; 54. Detector translation cylinder; 55. Detector bracket; DETAILED DESCRIPTION

[0022] See also Figure 1-Figure 7 In an embodiment of the present invention, a lightweight emission spectrum spectrometer device comprises a support base 1, a vacuum chamber 2, a sample stage mechanism 3, a spherical curved crystal monochromator mechanism 4 and a detector mechanism 5, wherein the vacuum chamber 2 is located on the top of the support base 1, the sample stage mechanism 3, the spherical curved crystal monochromator mechanism 4 and the detector mechanism 5 are all arranged inside the vacuum chamber 2, and the positions of the sample stage mechanism 3, the spherical curved crystal monochromator mechanism 4 and the detector mechanism 5 are on the Rowland circle; the support base 1 is used to support the emission spectrum spectrometer device and provide a stable spectrum collection environment for the emission spectrum spectrometer device, and the vacuum chamber 2 is used to provide a vacuum environment for the emission spectrum spectrometer device when collecting spectrum, thereby reducing the sample and the spherical curved crystal monochromator mechanism. The attenuation intensity of the fluorescence signal emitted by the color mechanism 4, the sample stage mechanism 3 is used to adjust the position of the sample, thereby changing the angle at which the synchrotron radiation light source irradiates the sample, the spherical curved crystal monochromator mechanism 4 is used to monochromatize and focus the fluorescence signal emitted by the sample after the synchrotron radiation light source irradiates the sample, the detector mechanism 5 collects the fluorescence signal monochromatized by the spherical curved crystal monochromator mechanism 4, and when collecting the spectrum, the positions of the detector mechanism 5 and the spherical curved crystal monochromator mechanism 4 are adjusted to keep the positions of the three always forming a Rowland circle; the sample is placed on the sample stage mechanism 3, the vacuum chamber 2 can maintain the working conditions of the system, and the sample to be tested can be various types of material samples, such as single crystal titanium oxide, etc.

[0023] See also Figure 2 and Figure 3The support base 1 includes a marble base, which is used to bear the weight of the emission spectrum spectrometer device and maintain its stability. Cavity supports 11 are fixed to the four corners of the top of the marble base. The top of the cavity support 11 supports a vacuum cavity 2. The cavity support 11 is used to support the vacuum cavity 2 and reduce the vibration generated when the vacuum cavity 2 obtains and maintains a vacuum. A pair of adjustable supports 12 are fixed to the left and right ends of the top of the support base 1. An optical platform 13 is fixed to the top of the adjustable support 12. The adjustable support 12 is used to support the optical platform 13, and the position of the optical platform 13 can also be fine-tuned to ensure the parallelism and stability of the optical platform 13. The optical platform 13 is placed below the sample stage mechanism 3, the spherical curved crystal monochromator mechanism 4 and the detector mechanism 5. The optical platform 13 is used to place the sample stage mechanism 3, the spherical curved crystal monochromator mechanism 4 and the detector mechanism 5; See also Figure 2 The vacuum chamber 2 includes a chamber body, and the chamber body is used to maintain the vacuum environment required for the emission spectrum spectrometer to collect signals. A fast sample introduction chamber 21 is fixed at the center of the right side of the chamber body. The fast sample introduction chamber 21 is used to efficiently switch samples when the emission spectrum spectrometer device is used without changing the vacuum of the chamber body. A switch door 22 is fixed on the front side of the chamber body. The switch door 22 is used to replace the spherical curved crystal monochromator mechanism 4 when the emission spectrum spectrometer device is used. The spherical curved crystal is replaced through the switch door 22. Several chamber valves 23 are fixed in an equidistant array at the lower right side of the chamber body. The chamber valve 23 is used to install the power supply and communication connection lines necessary for the emission spectrum spectrometer device; See also Figure 2-Figure 4 The sample stage mechanism 3 includes a sample stage mechanism support 36, which is fixed on the top of the optical platform 13. The sample stage mechanism support 36 is placed on the optical platform 13 to support the sample stage mechanism 3. A sample stage second position cylinder 35 is fixed on the top of the sample stage mechanism support 36. The sample stage second position cylinder 35 is used to adjust the posture of the sample stage 31 in the second translation direction to ensure that the sample stage 31 is located at the synchrotron radiation light source. A sample stage first displacement cylinder 34 is fixed on the top of the conveying end of the sample stage second position cylinder 35. The sample stage first displacement cylinder 34 is used to adjust the posture of the sample stage 31 in the first translation direction to ensure that the sample The stage 31 is located at the position of the synchrotron radiation light source. A sample stage lifting cylinder 33 is fixed to the top of the conveying end of the sample stage first displacement cylinder 34. The sample stage lifting cylinder 33 is used to adjust the posture of the sample stage 31 in the lifting direction to ensure that the sample stage 31 is located at the position of the synchrotron radiation light source. A sample stage rotating cylinder 32 is fixed to the top of the conveying end of the sample stage lifting cylinder 33. The sample stage rotating cylinder 32 is used to adjust the posture of the sample stage 31 in the rotation direction to ensure that the sample stage 31 is located at the position of the synchrotron radiation light source. The sample stage 31 is fixed to the center of the top of the rotating end of the sample stage rotating cylinder 32. The sample stage 31 is used to fix the sample so that the synchrotron radiation light source shines on the sample.

[0024] See also Figure 3 The spherical curved crystal monochromatic mechanism 4 includes a large spherical curved crystal lifting mechanism 42. A plurality of spherical curved crystal attitude fine-tuning devices 41 are fixed on the top of the moving end of the large spherical curved crystal lifting mechanism 42. The spherical curved crystal attitude fine-tuning devices 41 are used to adjust the position of the spherical curved crystal monochromatic mechanism 4 in multiple dimensional directions. The large spherical curved crystal lifting mechanism 42 is fixed on the top of the optical platform 13. The large spherical curved crystal lifting mechanism 42 is used to adjust the position of the spherical curved crystal attitude fine-tuning device 41 in the lifting direction to ensure that the spherical curved crystal monochromatic mechanism 4 is located at the Rowland circle position. See also Figure 3 and Figure 5 The spherical curved crystal posture fine-tuning device 41 includes a spherical curved crystal translation cylinder 416, which is used to adjust the posture of the spherical curved crystal 411 in the translation direction to ensure that it is located at the Rowland circle position. A spherical curved crystal lifting cylinder 415 is fixed to the top of the output end of the spherical curved crystal translation cylinder 416. The spherical curved crystal lifting cylinder 415 is used to adjust the posture of the spherical curved crystal 411 in the lifting direction to ensure that it is located at the Rowland circle position. A spherical curved crystal swing cylinder 414 is fixed to the top of the output end of the spherical curved crystal lifting cylinder 415. The spherical curved crystal swing cylinder 414 is used to adjust the spherical curved crystal 411 in the swing direction. The spherical crystal rotating cylinder 413 is fixed to the top center of the spherical crystal swinging cylinder 414, and the spherical crystal rotating cylinder 413 is used to adjust the posture of the spherical crystal 411 in the rotation direction to ensure that it is located at the Rowland circle position. A spherical crystal support 412 is fixed to the top of the rotating end of the spherical crystal rotating cylinder 413, and the spherical crystal support 412 is used to place and fix the spherical crystal 411 to ensure stability. The spherical crystal support 412 is installed inside the spherical crystal support 412, and the spherical crystal 411 is used to monochromatize and focus the fluorescent signal emitted by the sample.

[0025] See also Figure 3 and Figure 5The large-scale lifting mechanism 42 for spherical curved crystals includes a lifting mechanism base 421, which is used to support the large-scale lifting mechanism 42 for spherical curved crystals to ensure its stability. A driving motor 422 is fixed in the middle of the top of the lifting mechanism base 421, and the driving motor 422 is used as a driving device for the large-scale lifting mechanism 42 for spherical curved crystals. Bevel gear transmission structure housings 425 are fixed at both the left and right ends of the top of the lifting mechanism base 421. A gear transmission structure 423 movably connected to the two bevel gear transmission structure housings 425 is inserted through, and a bevel gear transmission structure 424 connected to the gear transmission structure 423 is inserted through the top of the bevel gear transmission structure housing 425. The bevel gear transmission structure housing 425 is used to protect the bevel gear transmission structure 424. The gear transmission structure 423 is used to transmit the rotational driving force of the driving motor 422 to the bevel gear transmission structure 424. The driving motor 422 and the gear The transmission structures 423 are connected by gear transmission. Lifting platform support frames 428 are fixed to the left and right ends of the top of the lifting mechanism base 421. The lifting platform support frame 428 is used to support and maintain the lifting platform 427 to maintain its stability. The lifting platform support frame 428 is movably connected to the inner side with a screw transmission structure 426, and the bottom of the screw transmission structure 426 is fixed to the top of the bevel gear transmission structure 424. The bevel gear transmission structure 424 is used to transmit the rotational driving force of the gear transmission structure 423 to the screw transmission structure 426. The screw transmission structure 426 is used to transmit the rotational driving force of the bevel gear transmission structure 424 to the lifting platform 427. A lifting platform 427 threadedly connected to the screw transmission structure 426 is movably connected between the two lifting platform support frames 428. The lifting platform 427 is used to adjust the posture of the spherical curved crystal posture fine-tuning device 41 in the lifting direction to ensure that the spherical curved crystal 411 is located at the Rowland circle position.

[0026] See also Figure 3 and Figure 7 The detector mechanism 5 includes a detector mechanism base 51, which is used to support the detector mechanism 5 to ensure its stability. A detector lifting cylinder 53 is fixed on the left side of the detector mechanism base 51. The detector lifting cylinder 53 is used to adjust the posture of the detector 52 in the lifting direction to ensure that it is located at the Rowland circle position. A detector translation cylinder 54 is fixed on the top of the output end of the detector lifting cylinder 53. The detector translation cylinder 54 is used to adjust the posture of the detector 52 in the translation direction to ensure that it is located at the Rowland circle position. A detector bracket 55 is fixed on the output end of the detector translation cylinder 54. The detector bracket 55 is used to support the detector 52 to ensure its stability. The detector 52 is fixed on the top of the detector bracket 55. The detector 52 is used to collect the fluorescence signal after the spherical curved crystal monochromator 4 is monochromatized.

[0027] At the same time, the rotating cylinder, lifting cylinder, swing cylinder, and translation cylinder in this application all adopt existing mature products and do not involve structural improvements, so they will not be repeated here.

[0028] The vacuum chamber 2, the sample stage mechanism 3, the spherical curved crystal monochromator mechanism 4 and the detector mechanism 5 are provided with a vacuum system, a control circuit and a signal acquisition unit. The vacuum system includes a vacuum pump and a vacuum gauge. The vacuum pump is used to obtain vacuum. The vacuum gauge is used to measure the vacuum degree of the obtained vacuum. The control circuit is used to provide voltage to the emission spectrum spectrometer device. The signal acquisition unit is used to collect the signal of the detector to form an XES spectrum. See also Figure 1 When in use, after being irradiated with synchrotron radiation, the fluorescence signal emitted by the sample is irradiated on the spherical curved crystal 411, and the fluorescence signal of a specific energy is emitted to the detector 52 after Bragg diffraction and collected, and finally forms a synchrotron radiation X-ray emission spectrum.

Claims

1. A lightweight emission spectrum spectrometer device, characterized in that: The invention comprises a support base (1), a vacuum chamber (2), a sample stage mechanism (3), a spherical curved crystal monochromator mechanism (4) and a detector mechanism (5), wherein the vacuum chamber (2) is located on the top of the support base (1), and the sample stage mechanism (3), the spherical curved crystal monochromator mechanism (4) and the detector mechanism (5) are all arranged inside the vacuum chamber (2); The spherical curved crystal monochromatic mechanism (4) comprises a large spherical curved crystal lifting mechanism (42), and a plurality of spherical curved crystal posture fine-tuning devices (41) are fixed on the top of the moving end of the large spherical curved crystal lifting mechanism (42).

2. The lightweight emission spectrum spectrometer device according to claim 1, characterized in that: The support base (1) comprises a marble base, the four corners of the top of the marble base are fixed with cavity supports (11), the left and right ends of the top of the support base (1) are fixed with a pair of adjustable supports (12), the top of the cavity support (11) supports the vacuum cavity (2), the top of the adjustable support (12) is fixed with an optical platform (13), the large spherical curved crystal lifting mechanism (42) is fixed on the top of the optical platform (13), and the optical platform (13) is placed below the sample stage mechanism (3), the spherical curved crystal monochromator mechanism (4) and the detector mechanism (5).

3. The lightweight emission spectrum spectrometer device according to claim 1, characterized in that: The vacuum chamber (2) comprises a chamber body, a fast sample introduction chamber (21) fixed at the center of the right side of the chamber body, a switch door (22) fixed at the front side of the chamber body, and a plurality of chamber valves (23) fixed in an array at equal distances below the right side of the chamber body.

4. The lightweight emission spectrum spectrometer device according to claim 1, characterized in that: The sample stage mechanism (3) comprises a sample stage mechanism support (36), a sample stage second position cylinder (35) is fixed on the top of the sample stage mechanism support (36), a sample stage first displacement cylinder (34) is fixed on the top of the conveying end of the sample stage second position cylinder (35), a sample stage lifting cylinder (33) is fixed on the top of the conveying end of the sample stage first displacement cylinder (34), a sample stage rotating cylinder (32) is fixed on the top of the conveying end of the sample stage lifting cylinder (33), a sample stage (31) is fixed at the center of the top of the rotating end of the sample stage rotating cylinder (32), and the sample stage mechanism support (36) is fixed on the top of the optical platform (13).

5. The lightweight emission spectrum spectrometer device according to claim 1, characterized in that: The spherical curved crystal posture fine-tuning device (41) comprises a spherical curved crystal translation cylinder (416), a spherical curved crystal lifting cylinder (415) is fixed to the top of the output end of the spherical curved crystal translation cylinder (416), a spherical curved crystal swing cylinder (414) is fixed to the top of the output end of the spherical curved crystal lifting cylinder (415), a spherical curved crystal rotating cylinder (413) is fixed to the top center of the spherical curved crystal swing cylinder (414), a spherical curved crystal support (412) is fixed to the top of the rotating end of the spherical curved crystal rotating cylinder (413), and a spherical curved crystal (411) is installed inside the spherical curved crystal support (412).

6. The lightweight emission spectrum spectrometer device according to claim 1, characterized in that: The spherical curved crystal large lifting mechanism (42) comprises a lifting mechanism base (421), a driving motor (422) is fixed in the middle of the top of the lifting mechanism base (421), bevel gear transmission structure housings (425) are fixed at both left and right ends of the top of the lifting mechanism base (421), a gear transmission structure (423) movably connected to the two bevel gear transmission structure housings (425) is inserted through the bevel gear transmission structure housings (425), and a bevel gear transmission structure (423) drivingly connected to the gear transmission structure (423) is inserted through the top of the bevel gear transmission structure housings (425). 4), the driving motor (422) and the gear transmission structure (423) are connected via gear transmission, and a lifting platform support frame (428) is fixed to both left and right ends of the top of the lifting mechanism base (421), and the lifting platform support frame (428) is movably connected to a screw transmission structure (426) on the inner side, and the bottom of the screw transmission structure (426) is fixed to the top of the bevel gear transmission structure (424), and a lifting platform (427) threadedly connected to the screw transmission structure (426) is movably connected between the two lifting platform support frames (428).

7. The lightweight emission spectrum spectrometer device according to claim 1, characterized in that: The detector mechanism (5) comprises a detector mechanism base (51), a detector lifting cylinder (53) being fixed on the left side of the detector mechanism base (51), a detector translation cylinder (54) being fixed on the top of the output end of the detector lifting cylinder (53), a detector bracket (55) being fixed on the output end of the detector translation cylinder (54), and a detector (52) being fixed on the top of the detector bracket (55).

8. The lightweight emission spectrum spectrometer device according to claim 1, characterized in that: A vacuum system, a control circuit and a signal acquisition unit are arranged outside the vacuum cavity (2), the sample stage mechanism (3), the spherical curved crystal monochromator mechanism (4) and the detector mechanism (5).

9. The lightweight emission spectrum spectrometer device according to claim 1, characterized in that: The positions of the sample stage mechanism (3), the spherical curved crystal monochromator mechanism (4) and the detector mechanism (5) are on the Rowland circle.

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