Automatic regeneration type purifier control system and control method thereof

Abstract

The invention discloses an automatic regeneration type purifier control system and a control method thereof, and relates to the technical field of gas purification systems.The automatic regeneration type purifier control system comprises a first gas pipeline and a second gas pipeline, and the first gas pipeline and the second gas pipeline are arranged in parallel; a raw material gas inlet trunk, a regenerated gas inlet trunk, a pure gas exhaust trunk and an exhaust trunk are connected between the first gas pipeline and the second gas pipeline, the raw material gas inlet trunk is connected with a raw material gas inlet pipeline, the regenerated gas inlet trunk is connected with a regenerated gas inlet pipeline, the pure gas exhaust trunk is connected with a pure gas exhaust pipeline, and the exhaust trunk is connected with an exhaust pipeline. A cooling device is arranged on the pure gas discharge pipeline, the exhaust trunk is connected with an exhaust pipeline, a first reaction tank and a first preheater are arranged on the first gas pipeline, a second reaction tank and a second preheater are arranged on the second gas pipeline, and gas purification fillers are arranged in the first reaction tank and the second reaction tank. According to the present invention, the raw material gas can be purified, and the ability to regenerate the gas purification filler is provided.

Description

Technical Field

[0001] The present invention relates to the technical field of gas purification systems, and in particular to an automatic regeneration type purifier control system and a control method thereof. Background Art

[0002] In the electronics industry and semiconductor manufacturing process, high-purity gases play a vital role and are the key to affecting the quality of semiconductor products, chips and integrated circuits. Different types of gases play different roles. For example, in the production process of integrated circuits, the role of high-purity nitrogen is to protect transistors. If the purity is not enough, the trace oxygen and water vapor in it may corrode the transistors; high-purity hydrogen is mainly used for the growth of thin films in chemical vapor deposition; helium is used for cooling equipment. The purity of these gases directly affects the technical indicators and performance of chips and integrated circuits. Insufficient gas purity may contaminate the entire production line. Therefore, there are specific technical requirements for gas purity in the electronics and other industries.

[0003] At present, high-purity gas purifiers at home and abroad generally use physical adsorption combined with chemical reactions and other methods. During the purification process, the activity of the purified raw materials is gradually lost under the dual effects of physics and chemistry, and it is impossible to ensure long-term effective working conditions and stable technical indicators. Most purification technologies and products lack long-term regeneration capabilities and require frequent equipment replacement, which increases costs and reduces production efficiency.

[0004] Therefore, there is an urgent need in the art for an automatic regeneration type purifier control system and a control method thereof to solve the above problems. Summary of the invention

[0005] The purpose of the present invention is to provide an automatic regeneration type purifier control system and a control method thereof to solve the problems existing in the above-mentioned prior art, which can not only achieve the function of purifying raw gas, but also have the ability to regenerate gas purification fillers so that they can be reused.

[0006] To achieve the above object, the present invention provides the following solutions:

[0007] The present invention discloses an automatic regeneration type purifier control system, comprising a first gas pipeline and a second gas pipeline, the first gas pipeline and the second gas pipeline are arranged in parallel, a raw gas inlet trunk, a regeneration gas inlet trunk, a pure gas exhaust trunk and an exhaust trunk are connected between the first gas pipeline and the second gas pipeline, the raw gas inlet trunk is connected to the raw gas inlet pipeline, the end of the raw gas inlet pipeline away from the raw gas inlet trunk is connected to the raw gas source, the regeneration gas inlet trunk is connected to the regeneration gas inlet pipeline, the end of the regeneration gas inlet pipeline away from the regeneration gas inlet trunk is connected to the regeneration gas source, the pure gas exhaust trunk is connected to the pure gas exhaust pipeline, a cooling device is provided on the pure gas exhaust pipeline, the exhaust trunk is connected to the exhaust pipeline, a first reaction tank and a first preheater are provided on the first gas pipeline, a second reaction tank and a second preheater are provided on the second gas pipeline, and gas purification fillers are provided in the first reaction tank and the second reaction tank.

[0008] Preferably, heating blankets are provided on the outer sides of the first reaction tank and the second reaction tank.

[0009] Preferably, the heating blanket comprises a glass fiber layer, a ceramic fiber layer is provided inside the glass fiber layer, and a heating resistance wire is provided inside the ceramic fiber layer.

[0010] Preferably, the first preheater and the second preheater are provided with electric heating rods.

[0011] Preferably, the cooling device comprises a radiator and a heat dissipation fan, the radiator is provided with heat dissipation fins, and the heat dissipation fan can blow air to the heat dissipation fins.

[0012] Preferably, a first raw gas inlet valve and a second raw gas inlet valve are provided on the raw gas inlet main line, and one end of the raw gas inlet pipeline is located between the first raw gas inlet valve and the second raw gas inlet valve;

[0013] The regeneration gas intake main line is provided with a first regeneration gas intake valve and a second regeneration gas intake valve, and one end of the regeneration gas intake pipeline is located between the first regeneration gas intake valve and the second regeneration gas intake valve;

[0014] The pure gas discharge main line is provided with a first pure gas discharge valve and a second pure gas discharge valve, and one end of the pure gas discharge pipeline is located between the first pure gas discharge valve and the second pure gas discharge valve;

[0015] The exhaust main line is provided with an exhaust first valve and an exhaust second valve, and one end of the exhaust pipeline is located between the exhaust first valve and the exhaust second valve;

[0016] The first raw gas intake valve, the second raw gas intake valve, the first regenerated gas intake valve, the second regenerated gas intake valve, the first pure gas exhaust valve, the second pure gas exhaust valve, the first exhaust valve and the second exhaust valve are all electrically connected to the control unit.

[0017] Preferably, the control unit includes a PLC controller.

[0018] Preferably, a flow meter is provided on the raw gas inlet pipeline;

[0019] The raw gas inlet pipeline and the pure gas outlet pipeline are provided with pressure sensors;

[0020] Temperature sensors are provided on the inner and outer sides of the first reaction tank and the second reaction tank;

[0021] The flow meter, the pressure sensor and the temperature sensor are all electrically connected to the control unit.

[0022] The present invention discloses a control method for an automatic regeneration type purifier control system, comprising the following steps:

[0023] The raw gas to be purified enters from the raw gas inlet pipeline, enters the first reaction tank, enters the first preheater after being purified in the first reaction tank, and then the purified gas enters the cooling device, and is discharged from the pure gas exhaust pipeline after being cooled; while the raw gas enters, the regeneration gas inlet pipeline is opened, and the regeneration gas enters along the regeneration gas inlet pipeline, and the regeneration gas first enters the second preheater, and then enters the second reaction tank, so as to realize the regeneration of the gas purification filler in the second reaction tank, and the gas containing impurities in the second reaction tank is discharged from the exhaust pipeline;

[0024] In the next cycle, the gas flow direction in the pipeline is opposite to that of the previous cycle. The raw gas that needs to be purified enters from the raw gas inlet pipeline, and the raw gas enters the second reaction tank. The raw gas is purified in the second reaction tank and then enters the second preheater. The purified gas enters the cooling device and is discharged from the pure gas exhaust pipeline after cooling. At the same time as the raw gas enters, the regeneration gas inlet pipeline is opened, and the regeneration gas enters along the regeneration gas inlet pipeline. The regeneration gas will first enter the first preheater and then enter the first reaction tank to achieve regeneration of the gas purification filler in the first reaction tank, and the gas containing impurities in the first reaction tank is discharged from the exhaust pipeline.

[0025] Compared with the prior art, the present invention has achieved the following technical effects:

[0026] The present invention is provided with a first gas pipeline and a second gas pipeline, and the first gas pipeline and the second gas pipeline can work alternately. For example, when the first gas pipeline performs raw gas purification work, the second gas pipeline can regenerate the gas purification filler in the second reaction tank to remove impurities therein, thereby extending its service life. In the next cycle, the second gas pipeline performs the purification work of the raw gas, and the first gas pipeline performs the regeneration work of the gas purification filler. The alternating work can not only enhance the purification efficiency and purification effect of the raw gas, but also extend the service life of the equipment and filler, and reduce the use cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 This is a schematic diagram of the structure of the automatic regeneration type purifier control system of Example 1;

[0029] In the figure: 1-first gas pipeline; 2-second gas pipeline; 3-raw gas inlet trunk; 4-raw gas inlet pipeline; 5-regeneration gas inlet trunk; 6-regeneration gas inlet pipeline; 7-pure gas exhaust trunk; 8-pure gas exhaust pipeline; 9-exhaust trunk; 10-exhaust pipeline; 11-first reaction tank; 12-second reaction tank; 13-first preheater; 14-second preheater; 15-raw gas inlet first valve; 16-raw gas inlet second valve; 17-regeneration gas inlet first valve; 18-regeneration gas inlet second valve; 19-pure gas exhaust first valve; 20-pure gas exhaust second valve; 21-exhaust first valve; 22-exhaust second valve; 23-cooling device. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] The purpose of the present invention is to provide an automatic regeneration type purifier control system and a control method thereof to solve the problems existing in the above-mentioned prior art, which can not only achieve the function of purifying raw gas, but also have the ability to regenerate gas purification fillers so that they can be reused.

[0032] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0033] Embodiment 1

[0034] like Figure 1 As shown, this embodiment provides an automatic regeneration type purifier control system, including a first gas pipeline 1 and a second gas pipeline 2, the first gas pipeline 1 and the second gas pipeline 2 are arranged in parallel and have the same structure, and the first gas pipeline 1 and the second gas pipeline 2 are connected with a raw gas inlet trunk 3, a regeneration gas inlet trunk 5, a pure gas exhaust trunk 7 and an exhaust trunk 9. Among them, the raw gas inlet trunk 3 is connected to the raw gas inlet pipeline 4, and the end of the raw gas inlet pipeline 4 away from the raw gas inlet trunk 3 is connected to the raw gas source. For different raw gas gases, the raw gas source is also different. The raw gas in this embodiment is nitrogen, but it is not limited to nitrogen. The regeneration gas inlet trunk 5 is connected to the regeneration gas inlet pipeline 6, and the end of the regeneration gas inlet pipeline 6 away from the regeneration gas inlet trunk 5 is connected to the regeneration gas source. Different types of regeneration gas gases have different regeneration gas sources. The regeneration gas in this embodiment is a mixed gas of nitrogen and hydrogen. The pure gas exhaust trunk 7 is connected to a pure gas exhaust pipeline 8, and a cooling device 23 is provided on the pure gas exhaust pipeline 8. The end of the pure gas exhaust pipeline 8 away from the pure gas exhaust trunk 7 can also be connected to a pure gas collection container for collecting purified pure gas. The exhaust trunk 9 is connected to an exhaust pipeline 10, and the end of the exhaust pipeline 10 away from the exhaust trunk 9 can be directly connected to the atmosphere. The first gas pipeline 1 is provided with a first reaction tank 11 and a first preheater 13, and the second gas pipeline 2 is provided with a second reaction tank 12 and a second preheater 14. The first reaction tank 11 and the second reaction tank 12 are provided with gas purification fillers. The gas purification fillers in this embodiment are nickel and molecular sieves. Of course, for other raw gas gases, they can also be adaptively adjusted.

[0035] In actual use, the raw gas to be purified enters from the raw gas inlet pipeline, and the raw gas enters the first reaction tank 11. The raw gas enters the first preheater 13 after being purified in the first reaction tank 11, and then the purified gas enters the cooling device 23, and is discharged from the pure gas exhaust pipeline 8 after being cooled. At the same time as the raw gas enters, the regeneration gas inlet pipeline 6 is opened, and the regeneration gas enters along the regeneration gas inlet pipeline 6. The regeneration gas will first enter the second preheater 14, and then enter the second reaction tank 12. The regeneration gas will chemically react with the gas purification filler in the second reaction tank 12 to achieve regeneration of the gas purification filler in the second reaction tank 12, and the impurity-containing gas generated after the reaction in the second reaction tank 12 is discharged from the exhaust pipeline 10, and this is a complete cycle. Then the next cycle is carried out, and the next cycle is completely opposite to the previous cycle, that is, the raw gas enters the second reaction tank 12 for purification, and the regeneration gas enters the first reaction tank 11 and regenerates the gas purification filler in the first reaction tank 11, so that two complete cycles are completed. Next, the two cycles are continuously alternated, which can not only improve the purification efficiency and purification effect of the raw gas, but also increase the service life of the entire system and reduce the cost of use.

[0036] In this embodiment, heating blankets are provided on the outer sides of the first reaction tank 11 and the second reaction tank 12. The heating blankets are used to stably control the temperature inside the first reaction tank 11 and the second reaction tank 12 and to maintain the uniformity of the temperature inside the first reaction tank 11 and the second reaction tank 12.

[0037] In this embodiment, the specific structure of the heating blanket includes a glass fiber layer, a ceramic fiber layer is provided inside the glass fiber layer, and a common heating resistor wire is provided inside the ceramic fiber layer. In other words, the heating blanket includes a glass fiber layer, a ceramic fiber layer and a plurality of heating resistor wires from the outer layer to the inner layer.

[0038] In this embodiment, electric heating rods are provided in the first preheater 13 and the second preheater 14. Specifically, the first preheater 13 and the second preheater 14 have the same structure, which is a cylindrical structure, and a gas flow channel is provided in the center, that is, a part of the first gas pipeline 1 and the second gas pipeline 2, and a plurality of installation grooves for electric heating rods are provided around the gas flow channel, and the electric heating rods are installed in the installation grooves, and the gas flow channel in the center and the gas inside thereof can be heated by the electric heating rods.

[0039] In this embodiment, the cooling device 23 includes a radiator and a heat dissipation fan. A heat dissipation channel is provided in the radiator, and the heat dissipation channel can be understood as a part of the pure gas exhaust pipeline 8. The radiator is provided with heat dissipation fins. The function of the heat dissipation fins is to extract the heat of the pure gas in the pure gas exhaust pipeline 8. The heat dissipation fan can blow cold air to the heat dissipation fins, thereby dissipating the heat to the outside, thereby achieving the technical effect of cooling the pure gas in the pure gas exhaust pipeline 8.

[0040] In this embodiment, a raw gas inlet first valve 15 and a raw gas inlet second valve 16 are provided on the raw gas inlet main line 3, the raw gas inlet first valve 15 is closer to the first gas pipeline 1, the raw gas inlet second valve 16 is closer to the second gas pipeline 2, and one end of the raw gas inlet pipeline 4 is located between the raw gas inlet first valve 15 and the raw gas inlet second valve 16.

[0041] Similarly, a first regeneration gas intake valve 17 and a second regeneration gas intake valve 18 are provided on the regeneration gas intake main line 5. The first regeneration gas intake valve 17 is closer to the first gas pipeline 1, and the second regeneration gas intake valve 18 is closer to the second gas pipeline 2. One end of the regeneration gas intake pipeline 6 is located between the first regeneration gas intake valve 17 and the second regeneration gas intake valve 18.

[0042] Similarly, a first pure gas discharge valve 19 and a second pure gas discharge valve 20 are provided on the pure gas discharge trunk line 7. The first pure gas discharge valve 19 is closer to the first gas pipeline 1, and the second pure gas discharge valve 20 is closer to the second gas pipeline 2. One end of the pure gas discharge pipeline 8 is located between the first pure gas discharge valve 19 and the second pure gas discharge valve 20.

[0043] Similarly, a first exhaust valve 21 and a second exhaust valve 22 are provided on the exhaust trunk line 9. The first exhaust valve 21 is closer to the first gas pipeline 1, and the second exhaust valve 22 is closer to the second gas pipeline 2. One end of the exhaust pipeline 10 is located between the first exhaust valve 21 and the second exhaust valve 22.

[0044] The first raw gas inlet valve 15, the second raw gas inlet valve 16, the first regenerated gas inlet valve 17, the second regenerated gas inlet valve 18, the first pure gas discharge valve 19, the second pure gas discharge valve 20, the first exhaust valve 21 and the second exhaust valve 22 are all existing electric control valves, and are all electrically connected to the control unit, so as to achieve remote control of their opening and closing by the staff. In addition, the above-mentioned heating blanket and electric heating rod are also electrically connected to the control unit.

[0045] In this embodiment, the control unit includes a PLC controller, which controls the switches of various devices. Further, it also includes a solid-state relay, which is electrically connected to the PLC controller. The PLC controller sends a signal to the solid-state relay, and then the solid-state relay controls the temperature of the first preheater 13, the first reaction tank 11, the second preheater 14 and the second reaction tank 12 through a time proportion PID control method, so as to achieve a high-precision temperature control effect and uniform temperature in the first reaction tank 11 and the second reaction tank 12.

[0046] In this embodiment, a flow meter is provided on the raw gas inlet pipeline 4 to monitor the inflow amount of the raw gas.

[0047] Pressure sensors are provided at the inlet of the raw gas inlet pipeline 4 and the outlet of the pure gas exhaust pipeline 8 for real-time monitoring of the gas pressure at the raw gas inlet pipeline 4 and the pure gas exhaust pipeline 8 .

[0048] Temperature sensors are provided on the inner and outer sides of the first reaction tank 11 and the second reaction tank 12 for real-time monitoring of the heating temperature, thereby achieving a technical effect of precise temperature control.

[0049] The flow meter, pressure sensor and temperature sensor are all electrically connected to the control unit. The data detected by the flow meter, pressure sensor and temperature sensor can be transmitted to the control unit in real time, and the control unit will collect and analyze the data in a unified manner.

[0050] Embodiment 2

[0051] This embodiment provides a control method for an automatic regeneration type purifier control system, which is used to control the automatic regeneration type purifier control system disclosed in the first embodiment, and includes the following steps:

[0052] The raw gas to be purified enters the system from the raw gas inlet pipeline 4. The purity of the raw gas is 99.999%. At this time, the first raw gas inlet valve 15 is controlled to be opened, and the second raw gas inlet valve 16 is controlled to be closed. The raw gas enters the first reaction tank 11. The control system uses the flow meter, pressure sensor and temperature sensor on the first gas pipeline 1 to control the pressure, flow rate and temperature and other parameters inside the first reaction tank 11. The raw gas is purified in the first reaction tank 11 and enters the first preheater 13. At this time, the first regeneration gas inlet valve 17 is closed, and the first pure gas discharge valve 19 is opened. After the purified gas enters the cooling device 23, it is discharged from the pure gas discharge pipeline 8 after cooling, achieving the gas purification effect. The gas purity can reach 99.99999999%. At the same time as the raw gas enters the system, the regenerated gas enters the system through the regenerated gas inlet pipeline 6. At this time, the first regenerated gas inlet valve 17 is closed, the second regenerated gas inlet valve 18 is opened, and the second pure gas discharge valve 20 is closed. The regenerated gas enters the second preheater 14 and then enters the second reaction tank 12. The control unit uses the flow meter, pressure sensor and temperature sensor on the second gas pipeline 2 to control the pressure, flow rate and temperature and other parameters inside the second reaction tank 12, so that the purified filler in the second reaction tank 12 is regenerated. At this time, the second raw gas inlet valve 16 is closed, the second pure gas discharge valve 20 is opened, the first pure gas discharge valve 19 is closed, and the impurity-containing gas is discharged from the system from the exhaust pipeline 10.

[0053] In the next cycle, the raw gas enters the system from the raw gas inlet pipeline 4, the first raw gas inlet valve 15 is closed, the second raw gas inlet valve 16 is closed, the gas source to be purified enters the second reaction tank 12 for purification, and then enters the second preheater 14. At this time, the second regeneration gas inlet valve 18 is closed, and the second pure gas outlet valve 20 is opened. The purified gas enters the cooling device 23 for cooling and is then discharged from the pure gas outlet pipeline 8. At the same time, the first regeneration gas inlet valve 17 is opened, and the regeneration gas source enters the first preheater 13 and then enters the first reaction tank 11. The regeneration gas regenerates the gas purification filler in the first reaction tank 11. At this time, the first raw gas inlet valve 15 is closed, the second exhaust valve 22 is closed, and the first exhaust valve 21 is opened, and the impurity gas is discharged from the system from the exhaust pipeline 10.

[0054] The control unit controls each valve of the pipeline system to control the gas flow direction. The two gas flow directions are automatically switched periodically to achieve automatic purification and automatic regeneration of the gas.

[0055] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. An automatic regeneration type purifier control system, characterized in that: The invention comprises a first gas pipeline and a second gas pipeline, wherein the first gas pipeline and the second gas pipeline are arranged in parallel, and a raw gas inlet trunk line, a regenerated gas inlet trunk line, a pure gas exhaust trunk line and an exhaust trunk line are connected between the first gas pipeline and the second gas pipeline, the raw gas inlet trunk line is connected to the raw gas inlet pipeline, the end of the raw gas inlet pipeline away from the raw gas inlet trunk line is connected to a raw gas source, the regenerated gas inlet trunk line is connected to the regenerated gas inlet pipeline, the end of the regenerated gas inlet pipeline away from the regenerated gas inlet trunk line is connected to the regenerated gas source, the pure gas exhaust trunk line is connected to the pure gas exhaust pipeline, a cooling device is provided on the pure gas exhaust pipeline, the exhaust trunk line is connected to the exhaust pipeline, a first reaction tank and a first preheater are provided on the first gas pipeline, a second reaction tank and a second preheater are provided on the second gas pipeline, and gas purification fillers are provided in the first reaction tank and the second reaction tank.

2. The automatic regeneration type purifier control system according to claim 1, characterized in that: The outer sides of the first reaction tank and the second reaction tank are both provided with heating blankets.

3. The automatic regeneration type purifier control system according to claim 2, characterized in that: The heating blanket comprises a glass fiber layer, a ceramic fiber layer is arranged inside the glass fiber layer, and a heating resistance wire is arranged inside the ceramic fiber layer.

4. The automatic regeneration type purifier control system according to claim 1, characterized in that: Electric heating rods are provided in the first preheater and the second preheater.

5. The automatic regeneration type purifier control system according to claim 1, characterized in that: The cooling device comprises a radiator and a heat dissipation fan. The radiator is provided with heat dissipation fins, and the heat dissipation fan can blow air to the heat dissipation fins.

6. The automatic regeneration type purifier control system according to claim 1, characterized in that: The raw gas intake trunk line is provided with a first raw gas intake valve and a second raw gas intake valve, and one end of the raw gas intake pipeline is located between the first raw gas intake valve and the second raw gas intake valve; The regeneration gas intake main line is provided with a first regeneration gas intake valve and a second regeneration gas intake valve, and one end of the regeneration gas intake pipeline is located between the first regeneration gas intake valve and the second regeneration gas intake valve; The pure gas discharge main line is provided with a first pure gas discharge valve and a second pure gas discharge valve, and one end of the pure gas discharge pipeline is located between the first pure gas discharge valve and the second pure gas discharge valve; The exhaust main line is provided with an exhaust first valve and an exhaust second valve, and one end of the exhaust pipeline is located between the exhaust first valve and the exhaust second valve; The first raw gas intake valve, the second raw gas intake valve, the first regenerated gas intake valve, the second regenerated gas intake valve, the first pure gas exhaust valve, the second pure gas exhaust valve, the first exhaust valve and the second exhaust valve are all electrically connected to the control unit.

7. The automatic regeneration type purifier control system according to claim 6, characterized in that: The control unit includes a PLC controller.

8. The automatic regeneration type purifier control system according to claim 6, characterized in that: A flow meter is provided on the raw gas inlet pipeline; The raw gas inlet pipeline and the pure gas outlet pipeline are provided with pressure sensors; Temperature sensors are provided on the inner and outer sides of the first reaction tank and the second reaction tank; The flow meter, the pressure sensor and the temperature sensor are all electrically connected to the control unit.

9. A control method for an automatic regeneration type purifier control system, characterized in that: A control system for controlling the automatic regeneration type purifier according to any one of claims 1 to 8, comprising the following steps: The raw gas to be purified enters from the raw gas inlet pipeline, enters the first reaction tank, enters the first preheater after being purified in the first reaction tank, and then the purified gas enters the cooling device, and is discharged from the pure gas exhaust pipeline after being cooled; while the raw gas enters, the regeneration gas inlet pipeline is opened, and the regeneration gas enters along the regeneration gas inlet pipeline, and the regeneration gas first enters the second preheater, and then enters the second reaction tank, so as to realize the regeneration of the gas purification filler in the second reaction tank, and the gas containing impurities in the second reaction tank is discharged from the exhaust pipeline; In the next cycle, the gas flow direction in the pipeline is opposite to that of the previous cycle. The raw gas to be purified enters from the raw gas inlet pipeline, enters the second reaction tank, and enters the second preheater after purification in the second reaction tank. The purified gas enters the cooling device and is discharged from the pure gas exhaust pipeline after cooling. At the same time as the raw gas enters, the regeneration gas inlet pipeline is opened, and the regeneration gas enters along the regeneration gas inlet pipeline. The regeneration gas will first enter the first preheater and then enter the first reaction tank to achieve the regeneration of the gas purification filler in the first reaction tank, and the gas containing impurities in the first reaction tank is discharged from the exhaust pipeline.

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