Cleaning roller axle center

Abstract

The invention relates to a cleaning roller axis which comprises a shaft body, a hollow inner flow channel located in the shaft body, a plurality of through holes which are formed in the outer wall of the shaft body in a dispersed mode and communicated with the hollow inner flow channel, and a plurality of groove-shaped structures which are arranged in the radial direction and extend to surround the surface of the outer wall of the shaft body. The groove-shaped structures are provided with protruding end edges protruding out of the surface of the outer wall of the shaft body. The axis of the cleaning roller can be used for providing better adhesive force between the foam material and the interface of the outer wall of the foam material.

Description

Technical Field

[0001] The invention relates to a cleaning roller axis, in particular to a cleaning roller axis of a foam brush wheel used for cleaning foreign matter on the surface of a semiconductor wafer or a circuit substrate. Background Art

[0002] In order to effectively and fully remove particles or debris generated by grinding and polishing on the surface of wafers or circuit boards, the industry has changed from the previous method of using large amounts of deionized water and chemical solutions to a cleaning method that combines brushing with a cleaning roller to improve efficiency and reduce water consumption. Without scratching the surface of the object to be cleaned, the part of the cleaning roller that contacts the surface of the object to be cleaned must be made of soft foam material. In order to achieve a sufficient cleaning effect, the cleaning roller must also have a hard axis structure to withstand a certain degree of downward pressure, water pressure, and rotation speed applied to the cleaning roller without causing the cleaning roller to deform.

[0003] However, as the size of the wafers to be cleaned increases or the process speed increases, the downward pressure on the cleaning roller, the rinsing water pressure and the roller speed must also be increased. When the cleaning roller rotates at a speed of at least 500 rpm, the adhesion strength of the interface between the heterogeneous foam material and the axis structure is often unbearable and prone to relative sliding or distortion, making it impossible for the cleaning roller to adhere to the surface of the object to be cleaned, affecting the cleaning effect and even damaging the object to be cleaned.

[0004] Since the cleaning solution, such as deionized water, is often input from one end of the roller axis, and is evenly dispersed through the flow channel inside the roller axis and the connecting holes distributed on the surface of the roller axis to reach the surface of the object to be cleaned through the foam material, the roller axis structure must have a specific flow channel design. However, in order to match the existing machine equipment, the overall size of the cleaning roller cannot be greatly changed. If a fixed structure for the foam material is added to the roller axis structure, it may increase the difficulty of the overall design and manufacturing of the roller axis.

[0005] Therefore, a cleaning roller axis is needed that can increase the adhesion strength between the foam material and the axis structure interface without affecting the main structure and design of the axis, so that even if high downforce, water pressure and rotation speed are used during the cleaning process, there will be no displacement between the foam material and the axis structure, causing the soft foam material to twist and deform. Summary of the invention

[0006] The present invention provides a cleaning roller axis, which includes an axis body and a hollow inner flow channel located in the axis body, wherein the outer wall surface of the axis body is provided with a plurality of through holes dispersedly arranged and connected with the hollow inner flow channel; and a plurality of groove structures are radially arranged and extended around the outer wall surface of the axis body, and the groove structures have protruding end edges protruding from the outer wall surface of the axis body; wherein the angle between the radial extension direction of the groove structures and an axial direction of the axis body is between -80° and 80°, and the developed surface area ratio (Sdr) of the outer wall surface of the axis body having the groove structures is between 300% and 800% and the arithmetic mean height (Sa) is between 70μm and 300μm.

[0007] In another embodiment of the cleaning roller axis, the maximum height (Sp) of the protruding edges of the groove structures is between 500 μm and 900 μm.

[0008] In another embodiment of the cleaning roller axis, the groove structures on the outer wall surface of the axis are arranged and extended in parallel or in a staggered arrangement.

[0009] In another embodiment of the cleaning roller axis, when the groove structures on the outer wall surface of the axis are arranged and extended in a staggered manner, the staggered angle is between 10° and 45°.

[0010] In another embodiment of the cleaning roller axis, the cross-sectional shape of the groove structures on the outer wall surface of the axis in the extending direction is a triangle, a quadrilateral or a partial arc.

[0011] In another embodiment of the cleaning roller axis, the opening widths of the groove structures on the outer wall surface of the axis are between 0.1 mm and 0.9 mm.

[0012] In another embodiment of the cleaning roller axis, the depth of the groove structures is between 0.35 mm and 1.2 mm.

[0013] In the cleaning roller shaft of another embodiment, the groove structures are distributed all over the outer wall surface of the shaft.

[0014] In another embodiment of the cleaning roller axis, the inner diameter of the hollow inner flow channel of the axis is between 9 mm and 22 mm.

[0015] In the cleaning roller axis of another embodiment, the diameters of the through holes of the axis are between 2.5 mm and 6 mm.

[0016] In the cleaning roller axis of another embodiment, the hollow inner flow channel of the axis has a closed end and an inlet end that are arranged opposite to each other.

[0017] The cleaning roller axis of the present invention greatly increases the surface area of ​​the shaft body to increase the contact area between the foam material and the cleaning roller axis, strengthen the effective adhesion between the foam material and the cleaning roller axis interface, and prevent the soft foam material from causing the defect of uneven local force and distortion due to factors such as increased roller pressure, water pressure and rotation speed. The following will describe the above description in detail with an implementation method and provide a further explanation of the technical solution of the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to make the above and other purposes, features, advantages and embodiments of the present disclosure more clearly understood, the accompanying drawings are described as follows:

[0019] Figure 1 It is a schematic diagram of an embodiment of the cleaning roller axis of the present invention.

[0020] Figure 2 It is a schematic diagram of another embodiment of the cleaning roller axis of the present invention.

[0021] 3( a ) to 3 ( c ) are schematic cross-sectional views of the extending direction of the groove structure of the axis of the cleaning roller according to an embodiment of the present invention.

[0022] FIG. 4( a ) to FIG. 4( d ) are schematic diagrams of another embodiment of the cleaning roller axis of the present invention.

[0023] The reference numerals are described as follows:

[0024] 100, 200, 400a, 400b, 400c, 400d: Cleaning roller axis

[0025] 110, 210, 310, 410: Axis

[0026] 120: Hollow inner flow channel

[0027] 130, 230, 330, 430: outer wall

[0028] 140, 440: Through hole

[0029] 150, 250, 350, 450a, 450b, 450c, 450d: groove structure

[0030] 151: protruding edge

[0031] D1: Axial direction

[0032] D2, D3: radial extension direction

[0033] h: Depth

[0034] w1: opening width

[0035] r: aperture

[0036] R: Inner diameter

[0037] A2, A3: Angle DETAILED DESCRIPTION

[0038] In order to make the inventive features, contents and advantages of the present invention and the effects that can be achieved by the present invention easier to understand, the present invention is hereby described in detail in the form of embodiments in conjunction with the accompanying drawings. The drawings used therein are only for illustration and auxiliary description purposes, and may not be the actual proportions and precise configurations after the implementation of the present invention. Therefore, the proportions and configuration relationships of the attached drawings should not be interpreted or limited to the scope of rights of the present invention in actual implementation. This should be stated in advance.

[0039] The following will describe embodiments of the cleaning roller shaft of the present invention with reference to the relevant drawings. To facilitate understanding, the same elements in the following embodiments are labeled with the same symbols.

[0040] The present invention provides a cleaning roller axis that can be used for cleaning foreign matter on the surface of semiconductor wafers or circuit substrates. The cleaning roller axis of the foam brush wheel can increase the adhesion strength between the foam material and the axis structure interface, so that even if high pressure, water pressure and rotation speed are applied during the cleaning process, there will be no displacement between the foam material and the axis structure or the foam material will be twisted and deformed. Figure 1 As shown, in one embodiment, the present invention provides a cleaning roller axis 100, which includes an axis body 110 and a hollow inner flow channel 120, and has a plurality of through holes 140 dispersedly arranged on the outer wall 130 of the axis body and connected to the hollow inner flow channel 120; and a plurality of groove structures 150 are radially arranged and extend around the surface of the outer wall 130 of the axis body, and the groove structures 150 have protruding end edges 151 protruding from the surface of the outer wall 130 of the axis body; wherein, the angle A2 between the radial extension direction D2 of the groove structures 150 and the axial direction D1 of the axis body 110 is between -80° and 80°, and the developed surface area ratio (Sdr) of the surface of the outer wall 130 having the groove structures 150 is 300% to 800% and the arithmetic mean height (Sa) of the protruding end edges 151 is between 70μm and 300μm. In one embodiment, the shaft body 110 has four rows of through holes 140 along the axial direction D1 and are equidistantly distributed in the radial direction, and the diameter r of the through holes 140 is between 2.5 mm and 6 mm. In one embodiment, the hollow inner flow channel 120 has a closed end and an inlet end that are oppositely disposed, and the inner diameter R of the hollow inner flow channel 120 of the shaft body 110 is between 9 mm and 22 mm.

[0041] In another embodiment of the cleaning roller axis, the maximum height (Sp) of the protruding edges 151 of the groove structures 150 is between 500 μm and 900 μm.

[0042] In this article, "maximum peak height (Sp)", "arithmetic mean height (Sa)" and "developed surface area ratio (Sdr)" are parameters generally used to evaluate surface roughness. The values ​​of Sp and Sa refer to the absolute values ​​of the maximum peak height and average height difference of a rough surface relative to the average surface of the surface; "developed surface area ratio (Sdr)" represents the ratio of the increase in surface area due to the change in surface structure, wherein the developed surface area ratio (Sdr) represents the ratio of the increase in the total surface area (A1) caused by the undulation of the surface structure in the measured unit area relative to the projected area (A0) of the measured unit area, and is calculated by formula (1). The developed surface area ratio is an instrumental measurement that can obtain the surface morphology by a laser conjugate microscope, a three-dimensional white light interferometer or a scanning electron microscope in accordance with the method specified in ISO25178.

[0043] Sdr (%) = [(A1 / A0) - 1] x 100% Formula (1).

[0044] In the present invention, the Sp and Sa values ​​refer to the maximum peak height and arithmetic mean height of the protruding edge formed by the groove structure relative to the outer wall surface of the shaft body when the groove structure is formed, respectively; the Sdr value is the surface area of ​​the outer wall surface of the shaft body increased due to the groove structure and the protruding edge after the groove structure is formed.

[0045] The present invention can form the groove structures 150 on the outer wall 130 of the shaft body 110 by using a tool or laser engraving as a structural forming method. When engraving with a tool, by adjusting the cutting depth, angle, etc., or when engraving with a laser, by adjusting the laser energy, angle, moving speed and focus control, etc., the protruding edge 151 protruding from the surface of the outer wall 130 can be formed simultaneously with the formation of the groove structures 150.

[0046] When the cleaning roller shaft 100 of the present invention is combined with a foam material (not shown in the figure), the foam material can penetrate into the groove structures 150. Since the outer wall 130 of the shaft body 110 has the groove structures 150 and the protruding edge 151 relatively protruding from the surface of the outer wall 130, the surface area of ​​the shaft body is greatly increased through the microstructures, so as to increase the contact area between the foam material and the cleaning roller shaft 100, strengthen the effective adhesion between the foam material and the cleaning roller shaft 100, and prevent the soft foam material from causing the defect of uneven local force and distortion due to factors such as increased roller pressure, water pressure and rotation speed.

[0047] Since the radial extension direction D2 of the groove structures 150 and the axial direction D1 of the shaft body 110 have an angle between -80° and 80°, the groove structures 150 can provide the cleaning roller with a component force for fixing the foam material during the rotation of the cleaning roller. When the maximum height (Sp) of the protruding edges 151 of the groove structures 150 is between 500μm and 900μm, and the arithmetic mean height (Sa) is between 70μm and 300μm, a force in the tangential direction of the surface of the outer wall 130 of the shaft body 110 can be provided to prevent the foam material from sliding along the rotation direction.

[0048] refer to Figure 2 , which is another embodiment of the cleaning roller shaft 200 of the present invention. The plurality of groove structures 250 on the outer wall 230 of the shaft body 210 of the cleaning roller shaft 200 have the same parallel radial extension direction, or have a plurality of staggered radial extension directions, and the angles between them and the axial direction D1 are only required to be between -80° and 80°, such as Figure 2 The angles (A2, A3) between the radial extension directions D2, D3 and the axial direction D1 are all between -80° and 80°. When the groove structures 250 are staggered, the angle between the radial extension directions D2 and D3 is between 10° and 45°, preferably between 20° and 30°. On the surface of the outer wall 230 of the shaft body, the staggered arrangement design of the groove structures 250 allows the cleaning roller axis 200 to further provide a better anchoring force when combined with the foam material (not shown in the figure), so that the shaft body 210 and the foam material are more tightly combined.

[0049] FIG. 3 (a) to FIG. 3 (c) are cross-sectional schematic diagrams illustrating the extension direction of the groove structure of the cleaning roller axis of the present invention. The protruding edge of the groove structure 350 is not shown in the figure. The cleaning roller axis of the present invention provides a groove structure 350 on the outer wall 330 of the shaft body 310. The bottom shape of the cross section of the groove structure 350 is not particularly limited, for example, it can be a triangle, a quadrilateral or a partial arc, which can be set according to the method of forming the groove structure 350, such as a structural forming method such as a tool or laser engraving. In a preferred embodiment of the present invention, the opening width w1 of the plurality of groove structures 350 is between 0.1 mm and 0.9 mm, so as to facilitate the penetration and attachment of the foam material (not shown in the figure). Furthermore, the depth h of the plurality of groove structures 350 is between 0.35 mm and 1.2 mm. Since the depth h of the groove structures 350 is much smaller than the conventional wall thickness of the shaft body 310, it does not affect the overall strength of the shaft body 310.

[0050] FIG. 4(a) to FIG. 4(d) are schematic diagrams illustrating the implementation of the groove structure of the cleaning roller axis of the present invention. Referring to FIG. 4(a) and FIG. 4(b), it is shown that the multiple groove structures 450a and 450b on the cleaning roller axis 400a and 400b are evenly distributed at periodic intervals and arranged in parallel or staggered on the surface of the outer wall 430 of the shaft body 410. Referring to FIG. 4(c) and FIG. 4(d), it is shown that the multiple groove structures 450c and 450d on the cleaning roller axis 400c and 400d are arranged in parallel or staggered and completely cover the surface of the outer wall 430 of the shaft body 410. The groove structures 450a to 450d on the outer wall 430 of the shaft body 410 can provide a good and uniform adhesion interface between the outer wall 430 of the shaft body 410 and the foam material, so as to achieve a close combination with the foam material without generating relative sliding and distortion.

[0051] In addition, when the outer edge of the through hole 450 on the outer wall 430 of the shaft body 410 is connected to the groove structures 450a to 450d, the cleaning liquid in the hollow inner flow channel can flow out from the through hole 440 and partially flow to the groove structures 450a to 450d so as to flow more quickly from the side to the outer wall surface of the cleaning roller axis when the cleaning roller axis rotates, thereby achieving a better overall uniform dispersion effect.

[0052] In another embodiment of the cleaning roller axis of the present invention, the hollow inner flow channel has a closed end and an inlet end that are relatively arranged, and the inner diameter of the hollow inner flow channel of the shaft body is between 9mm and 22mm. Furthermore, the distribution number, arrangement method and aperture size of the through holes on the shaft body of the cleaning roller axis of the present invention can be designed according to the needs of actual application. In a preferred embodiment of the cleaning roller axis of the present invention, the through holes are evenly distributed in the radial direction and arranged along the axial direction of the shaft body. In a preferred embodiment of the present invention, the shaft body has 4 rows of through holes in the axial direction and are evenly distributed in the radial direction and the aperture is between 2.5mm and 6mm.

[0053] The embodiments described above are only for illustrating the technical ideas and features of the present invention, and their purpose is to enable people skilled in the art to understand the contents of the present invention and implement them accordingly. They cannot be used to limit the claims of the present invention. That is, all equivalent changes or modifications made according to the spirit disclosed by the present invention should still be included in the claims of the present invention.

Claims

1. A cleaning roller axis, characterized in that: Include: A shaft body and a hollow inner flow channel located in the shaft body, wherein a plurality of through holes are dispersedly arranged on the outer wall surface of the shaft body and communicate with the hollow inner flow channel; and A plurality of groove-like structures are radially arranged and extend around the outer wall surface of the shaft body, and the plurality of groove-like structures have protruding end edges protruding from the outer wall surface of the shaft body; Among them, the angle between the radial extension direction of the multiple groove structures and the axial direction of the shaft body is between -80° and 80°, and the developed surface area ratio (Sdr) of the outer wall surface of the shaft body having the multiple groove structures is 300% to 800% and the arithmetic mean height (Sa) is between 70μm and 300μm.

2. The cleaning roller axis according to claim 1, characterized in that: The maximum height (Sp) of the protruding edges of the plurality of groove structures is between 500 μm and 900 μm.

3. The cleaning roller axis according to claim 1, characterized in that: The plurality of groove structures are arranged and extended in parallel or in a staggered arrangement.

4. The cleaning roller axis according to claim 3, characterized in that: When the plurality of groove-like structures are arranged and extended in a staggered manner, the staggered angle thereof is between 10° and 45°.

5. The cleaning roller axis according to claim 1, characterized in that: The cross-sectional shape of the plurality of groove-shaped structures in the extending direction is a triangle, a quadrilateral or a partial arc.

6. The cleaning roller axis according to claim 5, characterized in that: The opening width of the plurality of groove structures is between 0.1 mm and 0.9 mm.

7. The cleaning roller axis according to claim 1, characterized in that: The depth of the plurality of groove structures is between 0.35 mm and 1.2 mm.

8. The cleaning roller axis according to claim 1, characterized in that: The plurality of groove-like structures are distributed all over the outer wall surface of the shaft body.

9. The cleaning roller axis according to claim 1, characterized in that: The inner diameter of the hollow inner flow channel is between 9 mm and 22 mm.

10. The cleaning roller shaft according to claim 1, characterized in that: The diameters of the through holes of the shaft body are between 2.5 mm and 6 mm.

11. The cleaning roller shaft according to claim 1, characterized in that: The hollow inner flow channel has a closed end and an inlet end which are arranged opposite to each other.

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