Wafer picking machine

By setting up a protective plate on the periphery of the moving track of the wafer picker, the problem of the frame robot moving parts throwing lubricant onto the workbench and contaminating the wafer is solved, ensuring the cleanliness of the machine and improving product yield.

CN119490038APending Publication Date: 2025-02-21GALAXYCORE ZHEJIANG LTD CORP
View PDF 7 Cites 0 Cited by

Patent Information

Application Number
CN202411703716.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-11-25
Publication Date
2025-02-21

AI Technical Summary

Technical Problem

In existing wafer pickers, the moving parts of the frame robot can easily throw lubricant onto the workbench below when they move, contaminating the wafer.

Method used

Set a protective plate on the periphery of the moving track to prevent lubricating oil from splashing on the working platform below when moving parts move.

Benefits of technology

It effectively isolates the lubricant of moving parts, prevents it from contaminating the product working area, ensures the cleanliness of the machine and improves product yield.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN119490038A_ABST
    Figure CN119490038A_ABST
Patent Text Reader

Abstract

The invention provides a wafer picking machine which comprises a frame robot, the frame robot comprises a plurality of moving parts and a matched moving track, and a protection plate is arranged on the periphery of the moving track and used for preventing lubricating oil on the moving track from being splashed to a working platform below when the moving parts move. The frame robot is used for solving the problem that in the prior art, when a moving part in a frame robot moves, lubricating oil on a moving track is easily thrown to a workbench below, and a wafer is polluted.
Need to check novelty before this filing date? Find Prior Art

Citation Information

Patent Citations

  • Mechanical arm mechanism used for picking and choosing wafer

    CN102019614A

  • Graphite boat carrying device

    CN118439321A

  • Conveyor of wafer

    CN208120095U

  • Circular cutting device for wafer after film pasting

    CN219819859U

  • Dual alignment optical system and apparatus for bonding die used the same

    KR1020090063375A