Turnover device of metal plane target

Abstract

The invention relates to the technical field of target material processing, in particular to a metal plane target turnover device which comprises an operation table, a conveying frame is arranged on the operation table, an indium exceeding mechanism located above the conveying frame is arranged on the operation table, a first containing plate and a second containing plate are arranged on the left side and the right side of the conveying frame respectively, and a moving plate is arranged on the conveying frame in a sliding mode. A plurality of adsorption pieces are arranged on the upper end face of the moving plate at equal intervals, a left-right moving piece is arranged on the rear side of the conveying frame, the left-right moving piece is connected with a vertical plate and used for controlling the vertical plate to move left and right, and a sliding block fixedly connected with the moving plate is vertically and slidably connected to the vertical plate. Cylindrical sliding blocks in sliding connection with the track are connected to the lower portions of the two sides of the moving plate, baffles connected with the conveying frame are arranged at the two ends of the track, and semicircular grooves matched with the cylindrical sliding blocks are formed in the opposite sides of the two baffles. The efficiency and quality of the target material are improved.

Description

Technical Field

[0001] The invention relates to the technical field of target material processing, and in particular to a turning device for a metal plane target. Background Art

[0002] In recent years, the size of flat panel displays on the market has become quite large, which has led to an increasing size of sputtering targets, and metal planar targets have been developed towards larger sizes.

[0003] For example, on November 5, 2014, a document with a publication number of CN203918338U was disclosed, and its name was a target material turning machine device, which included: a base, a turning mechanism, and a clamping assembly. The turning mechanism included a turning bracket movably connected to the base through a first rotating shaft, and the turning bracket could turn along a first axis. The clamping assembly was movably mounted on the turning bracket through a second rotating shaft and could rotate around the second rotating shaft. After the clamping assembly clamped the target material substrate coated with solder on the surface, the turning bracket was rotated around the first rotating shaft to turn the target material substrate around the first rotating shaft to a specific angle and leave the original position; after the clamping assembly was rotated around the second rotating shaft to turn the target material substrate around a certain angle, such as 180°, the rotation angle of the target material substrate around the first rotating shaft was adjusted, and the surface of the turned target material substrate coated with solder was attached to the back plate; however, the applicant found that the clamping mechanism clamped the target material substrate, which easily caused scratches on the target material surface after super indium, thereby reducing the quality of the target material substrate. Summary of the invention

[0004] In view of this, an object of the present invention is to provide a turning device for a metal planar target to solve the problem of reduced target material quality.

[0005] Based on the above purpose, the present invention provides a flipping device for a metal plane target, including an operating table, a transport frame is arranged on the operating table, a super indium mechanism is arranged above the transport frame, a first placement plate and a second placement plate are arranged on the left and right sides of the transport frame respectively, a movable plate is slidably arranged on the transport frame, a plurality of adsorption members are arranged at equal intervals on the upper end surface of the movable plate, the adsorption members include a plurality of adsorption suction cups arranged at equal intervals, a left and right movable member is arranged on the rear side of the transport frame, the left and right movable members are connected with a vertical plate, the left and right movable members are used to control the left and right movement of the vertical plate, a sliding block fixedly connected to the movable plate is vertically slidably connected to the vertical plate, at least one track is arranged on the upper end surface of the transport frame, cylindrical sliders slidably connected to the track are connected under both sides of the movable plate, baffles connected to the transport frame are arranged at both ends of the track, two baffles are matched with two cylindrical sliders one by one, the two baffles are symmetrically arranged, and a semicircular groove matched with the cylindrical slider is opened on one side of the two baffles facing each other.

[0006] Optionally, a limiting block is provided on the upper part of one side of the cylindrical slider facing the semicircular groove, a semicircular limiting groove is provided in the semicircular groove and is matched with the limiting block, an arc-shaped clamp is provided on the side wall of the limiting groove, a matching piece matching with the arc-shaped clamp is provided on the limiting block, and the upper end of the limiting groove is connected to an extension port provided on the side wall of the semicircular groove, and the size of the extension port is not less than the size of the limiting block.

[0007] Optionally, when the arc-shaped clamping member is an arc-shaped clamping slot, the matching member is a matching clamping block, or when the arc-shaped clamping member is an arc-shaped clamping strip, the matching member is a matching clamping slot.

[0008] Optionally, a plurality of heating strips are arranged on the movable plate at equal intervals.

[0009] Optionally, the super indium mechanism includes a storage box located in the middle of the front side of the transport rack, indium material is stored in the storage box, a conveying bar located above the movable plate is arranged in the middle above the transport rack, a conveying pipe connected to the storage box is arranged in the conveying bar, a plurality of feed nozzles connected to the conveying pipe are arranged at equal intervals on the lower end surface of the conveying bar, and an ultrasonic vibrator is arranged on one side of the conveying bar close to the second placement plate.

[0010] Optionally, the vertical plate is provided with a vertical sliding groove which is slidably connected to the sliding block.

[0011] Optionally, the left and right moving parts are left and right telescopic cylinders, one end of which is connected to the operating table, the axis of which is arranged parallel to the track, and the telescopic end of which is connected to the vertical plate.

[0012] The beneficial effects of the present invention are as follows: the present invention provides a flipping device for a metal plane target, which places a target material to be processed on a first placement plate, and the left and right moving parts are started to drive the moving plate to move to the left, and the cylindrical slider on the moving plate contacts the semicircular groove, and the moving plate rotates counterclockwise around the cylindrical slider, and the moving plate flips 180 degrees to the left, and the upper end face of the moving plate faces downward, and the adsorption suction cup on the moving plate adsorbs and fixes the target material, and then the left and right moving parts control the moving plate to move right, and the moving plate first flips 180 degrees to the right, so that the upper end face of the moving plate faces upward, and the super indium mechanism processes the target material, and then the cylindrical slider on the right side of the moving plate contacts the semicircular groove, and the moving plate flips 180 degrees to the right again, so that the upper end face of the moving plate faces downward, and the target material is placed on the second placement plate. At the same time, the moving plate is also convenient for pressing and holding the target material placed on the second placement plate, thereby improving the efficiency and quality of the target material. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0014] Figure 1 It is a structural schematic diagram of the present invention;

[0015] Figure 2 for Figure 1 A schematic diagram of the enlarged structure at A in the middle;

[0016] Figure 3 for Figure 1 Schematic diagram of the enlarged structure at point B in the middle.

[0017] In the figure: 1. operating table; 2. first placement plate; 3. second placement plate; 4. transport rack; 5. baffle; 6. semicircular groove; 7. limiting groove; 8. extension port; 9. track; 10. moving plate; 11. cylindrical slider; 12. limiting block; 13. adsorption suction cup; 14. sliding block; 15. vertical slide; 16. vertical plate; 17. left and right moving parts; 18. conveying bar; 19. feeding nozzle; 20. ultrasonic vibrator. DETAILED DESCRIPTION

[0018] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0019] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The "first", "second" and similar words used in the present invention do not represent any order, quantity or importance, but are only used to distinguish different components. "Including" or "comprising" and similar words mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connecting" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0020] like Figure 1 , Figure 2 and Figure 3As shown, a turning device for a metal plane target comprises an operating table 1, a transport rack 4 is arranged on the operating table 1, a super indium mechanism is arranged on the operating table 1 and is located above the transport rack 4, a first placement plate 2 and a second placement plate 3 are arranged on the left and right sides of the transport rack 4, respectively, a moving plate 10 is slidably arranged on the transport rack 4, a plurality of adsorption members are arranged on the upper end surface of the moving plate 10 at equal intervals, the adsorption members comprise a plurality of adsorption suction cups 13 arranged at equal intervals, the adsorption suction cups 13 are connected to a negative pressure machine, a left and right moving member 17 is arranged on the rear side of the transport rack 4, and the left and right moving member 17 is connected to a vertical plate 16, The left and right moving member 17 is used to control the left and right movement of the vertical plate 16. The vertical plate 16 is vertically slidably connected to a sliding block 14 fixedly connected to the moving plate 10. The upper end surface of the transport frame 4 is provided with at least one track 9. The lower sides of the moving plate 10 are connected to cylindrical sliders 11 slidably connected to the track 9. Both ends of the track 9 are provided with baffles 5 connected to the transport frame 4. The two baffles 5 are matched with the two cylindrical sliders 11 one by one. The two baffles 5 are symmetrically arranged. The two baffles 5 are arranged on the opposite sides. A semicircular groove 6 is opened to match the cylindrical slider 11.

[0021] The target material to be processed is placed on the first placement plate 2, and the left and right moving members 17 are started to drive the moving plate 10 to move to the left, and the cylindrical slider 11 on the moving plate 10 contacts the semicircular groove 6, and the moving plate 10 rotates counterclockwise around the cylindrical slider 11, and the moving plate 10 flips 180 degrees to the left, and the upper end face of the moving plate 10 faces downward, and the adsorption suction cup 13 on the moving plate 10 adsorbs and fixes the target material, and then the left and right moving members 17 control the moving plate 10 to move right, and the moving plate 10 first flips 180 degrees to the right, so that the upper end face of the moving plate 10 faces upward, and the super indium mechanism processes the target material, and then, the cylindrical slider 11 on the right side of the moving plate 10 contacts the semicircular groove 6, and the moving plate 10 flips 180 degrees to the right again, so that the upper end face of the moving plate 10 faces downward, and the target material is placed on the second placement plate 3. At the same time, the moving plate 10 is also convenient for pressing and holding the target material placed on the second placement plate 3, thereby improving the efficiency and quality of the target material.

[0022] The cylindrical slider 11 is provided with a limiting block 12 on the upper part of one side facing the semicircular groove 6, a semicircular limiting groove 7 cooperating with the limiting block 12 is provided in the semicircular groove 6, an arc-shaped clamp is provided on the side wall of the limiting groove 7, and a matching piece cooperating with the arc-shaped clamp is provided on the limiting block 12, and the upper end of the limiting groove 7 is connected with an extension port 8 provided on the side wall of the semicircular groove 6, and the size of the extension port 8 is not less than the size of the limiting block 12. When the left and right moving parts 17 control the moving plate 10 to move to the right, the cylindrical slider 1 1 is close to the semicircular groove 6, and the limiting block 12 on the cylindrical slider 11 extends into the extension port 8. Due to the obstruction of the baffle plate 5, the movable plate 10 rotates clockwise around the axis of the cylindrical slider 11, and the limiting block 12 also slides in the limiting groove 7. The limiting groove 7 also limits the cylindrical slider 11 from being separated from the semicircular groove 6 through the limiting block 12, so that the cylindrical slider 11 will not move out of the semicircular groove 6 during the rotation of the movable plate 10, thereby determining that the target material on the movable plate 10 can be placed on the area where the second placement plate 3 needs to be placed, thereby improving the quality of the target material.

[0023] In order to facilitate the limiting block 12 to slide in the limiting groove 7 but not slide out of the limiting groove 7, when the arc-shaped clamping member is an arc-shaped clamping groove, the matching member is a matching clamping block, or when the arc-shaped clamping member is an arc-shaped clamping strip, the matching member is a matching clamping groove.

[0024] A plurality of heating bars are arranged on the movable plate 10 at equal intervals, so as to facilitate heating treatment of the target material clamped on the movable plate 10 .

[0025] The super indium mechanism includes a storage box located in the middle of the front side of the transport rack 4, indium material is stored in the storage box, a conveying bar 18 located above the movable plate 10 is arranged in the middle above the transport rack 4, a conveying pipe connected to the storage box is arranged in the conveying bar 18, a pump body is arranged between the storage box and the conveying pipe, a plurality of feeding nozzles 19 connected to the feeding pipe are arranged at equal intervals on the lower end surface of the conveying bar 18, an ultrasonic vibrator 20 is arranged on one side of the conveying bar 18 close to the second placement plate 3, when the left and right moving parts 17 control the movable plate 10 to move to the right, when the movable plate 10 moves to the middle of the transport rack 4, the indium material in the storage box can be transported to the target material clamped on the movable plate 10 through the conveying pipe and the feeding nozzle 19 in sequence, and the ultrasonic vibrator 20 disperses the indium material on the target material so that the indium material is evenly distributed on the target material.

[0026] The vertical plate 16 is provided with a vertical slide groove 15 slidably connected to the sliding block 14 , so that the vertical slide groove 15 limits the vertical movement of the sliding block 14 .

[0027] The left-right moving member 17 can be a left-right motor located on the operating table 1, and the output end of the left-right motor is connected to a reciprocating screw, and the reciprocating screw is provided with a ball connected to the vertical plate 16, and the operating table 1 is provided with a guide rail slidably connected to the ball. When the left-right motor is started, the reciprocating screw is driven to rotate, and then the ball and the vertical plate 16 are driven to reciprocate left and right.

[0028] The left-right moving member 17 can be replaced. The left-right moving member 17 can be a left-right telescopic cylinder. One end of the left-right telescopic cylinder is connected to the operating table 1. The axis of the left-right telescopic cylinder is arranged parallel to the track 9. The telescopic end of the left-right telescopic cylinder is connected to the vertical plate 16. The telescopic movement of the left-right telescopic cylinder is used to control the left-right movement of the vertical plate 16. In addition, the left-right moving member 17 is not limited to the above structure.

[0029] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention is limited to these examples. Under the concept of the present invention, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity.

[0030] The embodiments of the present invention are intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A turning device for a metal plane target, comprising an operating table, on which a transport frame is arranged, characterized in that: The lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of 2. The turning device of a metal plane target according to claim 1, characterized in that: A limiting block is provided on the upper part of one side of the cylindrical slider facing the semicircular groove, a semicircular limiting groove is provided in the semicircular groove to cooperate with the limiting block, an arc-shaped clamp is provided on the side wall of the limiting groove, a matching piece to cooperate with the arc-shaped clamp is provided on the limiting block, and the upper end of the limiting groove is connected to an extension port provided on the side wall of the semicircular groove, and the size of the extension port is not less than the size of the limiting block.

3. The turning device of a metal plane target according to claim 2, characterized in that: The arc-shaped clamping piece is an arc-shaped clamping groove, and the matching piece is a matching clamping block.

4. The turning device of a metal plane target according to claim 2, characterized in that: The arc-shaped clamping piece is an arc-shaped clamping strip, and the matching piece is a matching clamping groove.

5. The turning device of a metal plane target according to claim 1, characterized in that: A plurality of heating strips are arranged on the movable plate at equal intervals.

6. The turning device of a metal plane target according to claim 2, characterized in that: The super indium mechanism includes a storage box located in the middle of the front side of the transport rack, indium material is stored in the storage box, a conveying bar is arranged in the middle above the transport rack and located above the movable plate, a conveying pipe connected to the storage box is arranged in the conveying bar, a plurality of feeding nozzles connected to the conveying pipe are arranged at equal intervals on the lower end surface of the conveying bar, and an ultrasonic vibrator is arranged on one side of the conveying bar close to the second placement plate.

7. The turning device of a metal plane target according to claim 1, characterized in that: The vertical plate is provided with a vertical sliding groove which is slidably connected with the sliding block.

8. The turning device of a metal plane target according to claim 1, characterized in that: The left and right moving parts are left and right telescopic cylinders, the axes of which are arranged parallel to the track, one end of which is connected to the operating table, and the telescopic end of which is connected to the vertical plate.

Images