Electron microscope cleaning equipment and method

Abstract

The invention belongs to the technical field of optical auxiliary equipment, and particularly relates to electron microscope cleaning equipment and method. The electron microscope cleaning equipment comprises a vacuum pump and power supply equipment, the vacuum pump is communicated with the electronic optical accessory; the two electrode ends of the power supply device are electrically connected with the electronic optical accessory and a to-be-cleaned assembly in the electronic optical accessory correspondingly. According to the electron microscope cleaning equipment, the two electrode ends of the power supply equipment are electrically connected with the electron optical accessory and the to-be-cleaned assembly in the electron optical accessory correspondingly, and the vacuum degree in the electron optical accessory is adjusted through the vacuum pump; the two electrode ends of the power supply equipment build up luminance under a certain vacuum condition to generate high-energy disordered plasmas, and the plasmas bombard the surface of the to-be-cleaned component to achieve the purpose of cleaning, so that the cleaning of the electron microscope is simpler and more convenient.

Description

Technical Field

[0001] The invention belongs to the technical field of optical auxiliary equipment, and in particular relates to an electron microscope cleaning device and method. Background Art

[0002] The electron gun, ion gun and lens barrel are the electron optical parts of the electron microscope and the focused particle beam. The structures of electron microscopes of different brands are different, but most of them contain multiple electron optical components such as electron optical condenser, deflector, stigmator, objective lens and aperture.

[0003] After an electron microscope has been used for a period of time, the inside of the lens barrel and the electron gun will be contaminated to a certain extent. The contaminants will reduce the image quality of the electron microscope and may even cause discharge inside the lens barrel and a short circuit, rendering the entire electron microscope unable to work normally.

[0004] At present, the solution to the above problem is to directly replace the lens barrel and the electron gun, or to dismantle the lens barrel and the gun and return them to the factory, and then the manufacturer will dismantle them and replace the seriously contaminated components inside; however, this treatment method is expensive and takes a long time. Therefore, providing a device and method for cleaning the optical equipment of an electron microscope is a technical problem that needs to be solved urgently by those skilled in the art. Summary of the invention

[0005] In order to solve the above problems existing in the prior art, the present invention provides an electron microscope cleaning device to solve the technical problems existing in the prior art that the treatment method of the electron microscope after being contaminated is complicated and requires high economic and time costs.

[0006] The present invention is specifically implemented through the following technical solutions:

[0007] In one aspect, the present invention provides an electron microscope cleaning device, comprising a vacuum pump and a power supply device;

[0008] The vacuum pump is connected to the electronic optical accessories;

[0009] The two electrode ends of the power supply device are electrically connected to the electronic optical component and the components to be cleaned inside the electronic optical component respectively.

[0010] In order to better realize the present invention, further optimization is made in the above structure, the electronic optical accessory includes a lens barrel, the vacuum pump is connected to the lens barrel, and the component to be cleaned is arranged inside the lens barrel.

[0011] In order to better implement the present invention, further optimization is made in the above structure, the electronic optical accessories include an electron gun, the vacuum pump is connected to the electron gun, and the component to be cleaned is arranged inside the electron gun.

[0012] In order to better implement the present invention, further optimization is made in the above structure. A conductive support foot A is provided on the lens barrel, and the power supply device is electrically connected to the lens barrel through the conductive support foot A.

[0013] In order to better implement the present invention, further optimization is made in the above structure. A conductive foot B is provided on the component to be cleaned, and the connecting end of the conductive foot B passes through the lens barrel and is electrically connected to the power supply device.

[0014] In order to better implement the present invention, further optimization is made in the above structure, and the power supply device includes a step-up transformer.

[0015] In order to better implement the present invention, further optimization is made in the above structure, and the output voltage of the step-up transformer is 500V AC.

[0016] In order to better realize the present invention, further optimization is made in the above structure, and the two electrode ends of the power supply device are provided with clamping devices, and the power supply device is detachably electrically connected to the electronic optical accessory and the component to be cleaned inside the electronic optical accessory through the clamping device.

[0017] In order to better implement the present invention, further optimization is made in the above structure, and a current detection circuit is provided on the circuit of the power supply device, and a ignition indicator light is provided on the current detection circuit.

[0018] On the other hand, the present invention also provides an electron microscope cleaning method, wherein the method uses the above-mentioned device to perform the following steps:

[0019] Electrically connecting two electrode ends of the power supply device to the electronic optical component and the components to be cleaned inside the electronic optical component respectively;

[0020] Adjust the vacuum degree in the electronic optical components by using a vacuum pump;

[0021] Start the power supply equipment to clean the components to be cleaned.

[0022] This application adopts the above technical solution, which has at least the following beneficial effects:

[0023] The two electrode ends of the power supply device in the electron microscope cleaning equipment provided in the present application are electrically connected to the electron optical accessory and the component to be cleaned inside the electron optical accessory, respectively, and the vacuum degree inside the electron optical accessory is adjusted by a vacuum pump. The two electrode ends of the power supply device ignite under a certain vacuum condition to generate high-energy disordered plasma, and the plasma bombards the surface of the component to be cleaned to achieve the cleaning purpose, making the cleaning of the electron microscope simpler and more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 The utility model is a structural schematic diagram of an electron microscope cleaning device of the present invention.

[0026] Reference numerals:

[0027] 1. Power supply equipment;

[0028] 21. Lens barrel; 22. Components to be cleaned;

[0029] 31. Conductive support A; 32. Conductive support B;

[0030] 4. Current detection circuit; 41. Start indicator light. DETAILED DESCRIPTION

[0031] To make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be described in detail below. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other implementation methods obtained by ordinary technicians in this field without creative work belong to the scope of protection of the present invention.

[0032] Embodiment 1:

[0033] like Figure 1 As shown:

[0034] An electron microscope cleaning device comprises a vacuum pump and a power supply device 1; wherein:

[0035] The vacuum pump is connected to the electronic optical accessories;

[0036] The two electrode ends of the power supply device 1 are electrically connected to the electronic optical component and the component to be cleaned 22 inside the electronic optical component respectively.

[0037] During the cleaning process, the staff can start the vacuum pump to put the interior of the electronic optical accessory in a vacuum state, and then start the power supply device 1. At this time, the staff can adjust the power of the vacuum pump to adjust the vacuum degree inside the electronic optical accessory, so that the two electrode ends of the power supply device 1 can ignite under a certain vacuum condition and generate high-energy disordered plasma, which bombards the surface of the component to be cleaned 22 through the plasma to achieve the cleaning purpose.

[0038] The method of cleaning the electron microscope by using the electron microscope cleaning device can simplify the cleaning steps, and there is no need to disassemble the electron microscope during the entire cleaning process, which makes the cleaning of the electron microscope more convenient and effectively reduces the cleaning cost and time cost of the electron microscope.

[0039] It should be noted that the above-mentioned vacuum pump can adopt the vacuum equipment that comes with the electron microscope. During operation, the vacuum pump can also suck out the dirt bombarded by the plasma from the inside of the electron optical accessories to avoid the situation where this part of the dirt adheres to the components inside the electron optical accessories again, thereby improving the cleaning effect of the electron microscope cleaning equipment.

[0040] Optimally, the circuit of the power supply device 1 is provided with a current detection circuit 4, and a ignition indicator light 41 is provided on the current detection circuit 4;

[0041] The current detection circuit 4 can detect the vacuum condition inside the lens barrel 21 to determine whether there is a ignition discharge between the electronic optical component and the component to be cleaned 22 inside the electronic optical component, that is, whether plasma can be generated between the electronic optical component and the component to be cleaned 22 inside the electronic optical component, thereby determining whether the electron microscope cleaning equipment can clean the component to be cleaned 22.

[0042] Optimally, the above-mentioned electronic optical accessories include a lens barrel 21; wherein,

[0043] The above-mentioned component to be cleaned 22 is arranged inside the lens barrel 21, and the vacuum pump is connected to the lens barrel 21, which can suck the air inside the lens barrel 21 to adjust the vacuum degree inside the lens barrel 21, so that the two electrode ends of the power supply device 1 can ignite under a certain vacuum condition and generate high-energy disordered plasma.

[0044] The components to be cleaned 22 include various electronic optical components such as an electronic optical condenser, a deflector, an stigmator, an objective lens, and an aperture, which are arranged inside the lens barrel 21 .

[0045] Optimally, the lens barrel 21 is provided with a conductive foot A31, and the provision of the conductive foot A31 makes it more convenient to connect the electrode end of the power supply device 1 with the lens barrel 21, so that the cleaning of the electron microscope is simpler and more convenient.

[0046] Optimally, the above-mentioned component to be cleaned 22 is provided with a conductive foot B32, and the connecting end of the conductive foot B32 passes through the lens barrel 21 and is electrically connected to the power supply device 1, so that the connection between the electrode end of the power supply device 1 and the lens barrel 21 is more convenient.

[0047] It should be noted that the above-mentioned conductive support A31 and conductive support B32 are both made of metal materials with good conductivity, and their structures can be set to rod-shaped or linear structures, and an insulating protective layer is provided in the middle of the conductive support A31 and the middle of the conductive support B32 to make the use of the electron microscope cleaning equipment safer.

[0048] Optimally, both electrode ends of the power supply device 1 are provided with a clamping device; wherein,

[0049] The power supply device 1 is detachably electrically connected to the electronic optical component and the component to be cleaned 22 inside the electronic optical component through a clamping device, so that the connection between the power supply device 1 and the electronic optical component and the component to be cleaned 22 inside the electronic optical component is more convenient.

[0050] It should be noted that the clamping device can be an alligator clip; the alligator clip is also called a spring clip or an electric clip, which can be used for temporary circuit connection. The terminal block shaped like an alligator's mouth is generally made of pure copper, nickel-plated iron, zinc-plated iron, copper-plated iron or stainless steel.

[0051] Preferably, the power supply device 1 includes a step-up transformer, which can be directly plugged into a power source to provide the electron microscope cleaning device with the electrical energy required for its operation.

[0052] Preferably, the output voltage of the above-mentioned step-up transformer is 500V AC.

[0053] It should be noted that the electron microscope cleaning device can also clean the electron gun in the electron microscope, and its installation method is the same as the installation method of the lens barrel 21, that is, one electrode end of the power supply device 1 is connected to the housing of the electron gun, and the other electrode end is connected to the part to be cleaned in the electron gun;

[0054] Then, start the vacuum pump to put the interior of the electronic optical accessory in a vacuum state, and then start the power supply device 1. At this time, the staff can adjust the power of the vacuum pump to adjust the vacuum degree inside the electronic optical accessory, so that the two electrode ends of the power supply device 1 can ignite under a certain vacuum condition and generate high-energy disordered plasma, which bombards the surface of the component 22 to be cleaned through the plasma to achieve the cleaning purpose.

[0055] Embodiment 2:

[0056] like Figure 1 As shown:

[0057] A method for cleaning an electron microscope, the method using the electron microscope cleaning device described in Example 1 to perform the following steps:

[0058] The two electrode ends of the power supply device 1 are electrically connected to the electronic optical component and the component to be cleaned 22 inside the electronic optical component, and the vacuum pump is turned on to suck the air from the electronic optical component to make the inside of the electronic optical component in a vacuum state;

[0059] Then, the staff can start the power supply device 1. Since the vacuum degree inside the electronic optical component is relatively good, there is no glow discharge between the electronic optical component and the component to be cleaned 22 inside the electronic optical component, and no plasma will be generated between the electronic optical component and the component to be cleaned 22 inside the electronic optical component.

[0060] The staff can operate the vacuum pump to reduce the vacuum degree inside the electronic optical accessories, and observe the start indicator light 41 on the electron microscope cleaning equipment at the same time; if the start indicator light 41 is on, it means that it has been started and plasma has begun to be generated. At this time, the staff can stabilize the vacuum pump to stop changing the vacuum degree inside the electronic optical accessories, so that the electron microscope cleaning equipment can perform stable cleaning work. At this time, the component to be cleaned 22 inside the electronic optical accessories will clean the dirt under the bombardment of plasma, and the dirt will be sucked away by the vacuum pump to complete the cleaning work of the electron microscope.

[0061] If the ignition indicator light 41 goes out again when the vacuum degree inside the electronic optical component stops changing, the vacuum degree needs to be readjusted so that the electron microscope cleaning device can reach a stable cleaning state.

[0062] It should be noted that the working time of the electron microscope cleaning equipment is 2-3 hours; the staff can determine the cleaning time according to the cleanliness of the component 22 to be cleaned inside the electronic optical accessory.

[0063] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. An electron microscope cleaning device, characterized in that: It comprises a vacuum pump and a power supply device (1); The vacuum pump is connected to the electronic optical accessories; The two electrode ends of the power supply device (1) are electrically connected to the electronic optical component and the component to be cleaned (22) inside the electronic optical component, respectively.

2. The electron microscope cleaning device according to claim 1, characterized in that: The electronic optical accessory comprises a lens barrel (21), the vacuum pump is connected to the lens barrel (21), and the component to be cleaned (22) is arranged inside the lens barrel (21).

3. The electron microscope cleaning device according to claim 1, characterized in that: The electronic optical accessory comprises an electron gun, the vacuum pump is connected to the electron gun, and the component to be cleaned (22) is arranged inside the electron gun.

4. The electron microscope cleaning device according to claim 2, characterized in that: The lens barrel (21) is provided with a conductive support foot A (31), and the power supply device (1) is electrically connected to the lens barrel (21) via the conductive support foot A (31).

5. The electron microscope cleaning device according to claim 4, characterized in that: The component to be cleaned (22) is provided with a conductive support foot B (32), and the connection end of the conductive support foot B (32) passes through the lens barrel (21) and is electrically connected to the power supply device (1).

6. The electron microscope cleaning device according to claim 1, characterized in that: The power supply device (1) comprises a step-up transformer.

7. The electron microscope cleaning device according to claim 6, characterized in that: The output voltage of the step-up transformer is 500V AC.

8. The electron microscope cleaning device according to claim 7, characterized in that: Both electrode ends of the power supply device (1) are provided with clamping devices, and the power supply device (1) is detachably electrically connected to the electronic optical component and the component to be cleaned (22) inside the electronic optical component via the clamping devices.

9. The electron microscope cleaning device according to any one of claims 1 to 8, characterized in that: A current detection circuit (4) is provided on the circuit of the power supply device (1), and a ignition indicator light (41) is provided on the current detection circuit (4).

10. A method for cleaning an electron microscope, characterized in that: The method uses the device described in any one of claims 1 to 9 to carry out the following steps: The two electrode ends of the power supply device (1) are electrically connected to the electronic optical component and the component to be cleaned (22) inside the electronic optical component respectively; Adjust the vacuum degree in the electronic optical components by using a vacuum pump; The power supply device (1) is started to clean the component to be cleaned (22).

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