Contour backlight switching device and detection equipment

Abstract

The invention belongs to the technical field of semiconductors, and discloses a contour backlight switching device and detection equipment. The contour backlight switching device comprises a base plate, blades and a driving assembly, a plurality of positioning columns are arranged on the base plate and evenly distributed in the circumferential direction of the base plate, and the scattering rate of the base plate is larger than that of a to-be-detected piece; the blades are arranged on the base plate, the multiple blades and the multiple positioning columns are arranged in a one-to-one correspondence mode, positioning holes matched with the positioning columns are formed in the blades, and the reflectivity of the blades is larger than that of a piece to be detected; the driving assembly comprises a rotating disc and a driving part capable of driving the rotating disc to rotate, the rotating disc is located above the blades, the blades are in sliding connection with the rotating disc, and when the driving part drives the rotating disc to rotate forwards or reversely, the blades slide along the rotating disc and rotate forwards or reversely around the corresponding positioning columns, so that the blades rotate out or retract. The contour backlight switching device is compact in structure, and continuity and integrity of contour imaging during detection are improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a contour backlight switching device and a detection equipment. Background Art

[0002] In the field of visual inspection of silicon wafers or masks, the inspection surface is divided into inspection area and non-inspection area. The non-inspection area is usually near the edge. When performing full-surface inspection, the edge needs to be photographed. The image includes the silicon wafer or mask and the background. The outline needs to be clearly imaged to filter the background part, that is, it is necessary to achieve clear imaging of the complete outline at the inspection station. When obtaining edge grayscale information, it is necessary to find the point where the grayscale value changes dramatically. This point is considered to be the intersection of the background and the edge of the silicon wafer or mask, that is, the edge position.

[0003] In the field of defect visual inspection, when the silicon wafer or mask is adsorbed or clamped on the stage for contour inspection, the bright field illumination or dark field illumination used for inspection cannot illuminate the stage surface due to differences in the roughness of the stage or the surface morphology. That is, the edge cannot form a high-contrast image with the background, which is not conducive to the positioning of the silicon wafer or mask, and cannot be fully imaged. If materials with different reflectivity are distributed at intervals under the silicon wafer or mask, local edge imaging can be achieved in bright and dark fields, but complete edges and gaps cannot be imaged.

[0004] Therefore, there is an urgent need for a contour backlight switching device and a detection device to solve the above technical problems. Summary of the invention

[0005] The purpose of the present invention is to provide a contour backlight switching device and detection equipment, aiming to solve the problem in the prior art that when edge defects are detected, the contour at the edge cannot form a high-contrast image with the background, and the complete edges and gaps cannot be imaged. The contour backlight switching device and detection equipment have a compact structure and can provide a continuous, high-contrast background for light and dark field detection at the detection station, thereby improving the continuity and integrity of contour imaging during detection and realizing edge area detection.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] A contour backlight switching device, comprising:

[0008] A chassis, wherein a plurality of positioning posts are arranged on the chassis, and the plurality of positioning posts are evenly distributed along the circumference of the chassis, and the scattering rate of the chassis is greater than the scattering rate of the object to be tested;

[0009] A blade is placed on the chassis, a plurality of blades are provided, the plurality of blades and the plurality of positioning posts are provided in one-to-one correspondence, a positioning hole is provided on the blade to cooperate with the positioning post, and the reflectivity of the blade is greater than the reflectivity of the test piece;

[0010] A driving assembly includes a turntable and a driving member capable of driving the turntable to rotate, wherein the driving member is installed on an external workbench, the turntable is located above the blades, the outer diameter of the turntable is smaller than the outer diameter of the chassis, the blades and the turntable are slidably connected, and when the driving member drives the turntable to rotate forward or reverse, the blades slide along the turntable and rotate forward or reverse around the corresponding positioning column, so that the blades rotate out or retract. When rotating out, the outer edges of multiple blades protrude to the outside of the turntable and form a circular structure, and when retracting, the outer edges of multiple blades retreat to the inside of the turntable.

[0011] Preferably, a guide column is provided on the blade, and an elongated guide groove cooperating with the guide column is provided on the turntable. When the turntable rotates, the guide column can slide along the guide groove, and the extension direction of the guide groove is set at an angle to the radial direction of the turntable.

[0012] Preferably, adjacent blades are overlapped with each other.

[0013] Preferably, the guide column is configured as a pin, and / or the positioning column is configured as a pin.

[0014] Preferably, the driving member and the turntable are connected via a gear ring.

[0015] Preferably, the gear ring is configured as an arc plate-shaped structure, one arc portion of the arc plate-shaped structure is connected to the turntable, and the other arc portion of the arc plate-shaped structure is connected to the output shaft of the driving member.

[0016] Preferably, the chassis is configured as a circular ring structure, which includes a circular ring body and a guide member arranged on the inner wall of the circular ring body, a plurality of positioning columns are evenly distributed along the circumference of the circular ring body, and the turntable is rotatably sleeved on the guide member.

[0017] Preferably, the guide member is configured as an L-shaped structure, and the L-shaped structure includes a first ring body and a second ring body that are perpendicular to each other, the first ring body is perpendicular to the circular ring body and connected to the circular ring body, the turntable is rotatably mounted on the first ring body, and the second ring body extends toward the inner side of the circular ring body.

[0018] Preferably, the driving member is configured as a motor.

[0019] The present invention also provides a detection device, comprising a detector, a lens and a contour backlight switching device as described in any of the above schemes, wherein the lens is arranged above the edge of the chassis, the detector is arranged above the lens, and the detector and the lens are arranged opposite to each other.

[0020] Beneficial effects of the present invention:

[0021] The contour backlight switching device provided by the present invention, when the driving member drives the turntable to rotate forward or reverse, the blades slide along the turntable and rotate forward or reverse around the corresponding positioning column, so that the blades rotate out or retract. When rotating out, the outer edges of multiple blades protrude to the outside of the turntable and form a circular structure. Because the reflectivity of the blades is greater than the reflectivity of the object to be tested, the bright field light source hits the blades, and the reflectivity of the blades is higher than the reflectivity of the object to be tested, so the brightness of the blades is higher than the brightness of the object to be tested. When retracting, the outer edges of multiple blades retreat to the inside of the turntable. Because the outer diameter of the turntable is smaller than the outer diameter of the chassis, and the scattering rate of the chassis is greater than the scattering rate of the object to be tested, the dark field light source hits the chassis, and the scattering rate of the chassis is higher than the scattering rate of the object to be tested, so the brightness of the chassis is higher than the brightness of the object to be tested. That is, in both bright field and dark field lighting states, a high-contrast contour background can be obtained, and the detection of the near-edge area can be achieved. The contour backlight switching device has a compact structure and can provide a continuous, high-contrast background for the bright and dark fields at the detection station, thereby improving the continuity and integrity of contour imaging during detection and realizing the detection of the edge area.

[0022] The present invention also provides a detection device, including a detector, a lens and the above-mentioned contour backlight switching device. The detection device can simultaneously image the contour background in the bright field and dark field states, thereby improving the continuity and integrity of contour background imaging acquisition. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a three-dimensional view of the contour backlight switching device provided by the present invention;

[0024] Figure 2 It is a structural schematic diagram of the chassis provided by the present invention;

[0025] Figure 3 is a schematic diagram of the structure of the blade provided by the present invention;

[0026] Figure 4 It is a schematic diagram of the assembly of the chassis and blades provided by the present invention;

[0027] Figure 5 It is a schematic diagram of the assembly of the drive assembly and the blades provided by the present invention;

[0028] Figure 6 is a top view of the contour backlight switching device provided by the present invention;

[0029] Figure 7 is a partial cross-sectional view of the contour backlight switching device provided by the present invention;

[0030] Figure 8 It is a beam path diagram of the detection device under the bright field light source provided by the present invention;

[0031] Fig. 9It is a beam path diagram of the detection device under the dark field light source provided by the present invention;

[0032] Fig.10 It is a profile diagram of the silicon wafer provided by the present invention under a bright field light source;

[0033] Fig.11 It is a profile diagram of the silicon wafer provided by the present invention under a dark field light source.

[0034] In the figure:

[0035] 10. Contour backlight switching device; 20. Detector; 30. Lens; 40. Bright field light source; 50. Dark field light source; 60. Silicon wafer;

[0036] 100, chassis; 110, annular body; 120, guide member; 121, first ring body; 122, second ring body; 130, positioning column;

[0037] 200, blade; 210, first step surface; 211, positioning hole; 220, second step surface; 230, guide column;

[0038] 310, turntable; 311, guide groove; 320, driving member; 330, gear ring. DETAILED DESCRIPTION

[0039] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0040] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0042] In the description of this embodiment, the terms "upper", "lower", "right", etc., directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0043] This embodiment provides a contour backlight switching device, which aims to solve the problem in the prior art that when edge defects are detected, the contour at the edge cannot form a high-contrast image with the background, and the complete edge and gap cannot be imaged. The contour backlight switching device has a compact structure and can provide a continuous, high-contrast background for light and dark field detection at the detection station, thereby improving the continuity and integrity of contour imaging during detection and realizing edge area detection. Specifically, this embodiment takes the contour detection of a silicon wafer as an example to illustrate the contour backlight switching device.

[0044] See also Figures 1 to 7The contour backlight switching device 10 includes a chassis 100, a blade 200 and a driving assembly. The chassis 100 is provided with a plurality of positioning posts 130, and the plurality of positioning posts 130 are evenly distributed along the circumference of the chassis 100. The scattering rate of the chassis 100 is greater than the scattering rate of the object to be tested. The blade 200 is placed on the chassis 100, and the blade 200 is provided with a plurality of blades 200, and the plurality of blades 200 and the plurality of positioning posts 130 are arranged one by one. The blade 200 is provided with a positioning hole 211 matched with the positioning post 130, and the reflectivity of the blade 200 is greater than the reflectivity of the object to be tested. The driving assembly includes a turntable 310 and a rotating disk 310 that can drive the turntable 310. The drive member 320 for rotating the disk 310 is installed on the external workbench. The turntable 310 is located above the blades 200. The outer diameter of the turntable 310 is smaller than the outer diameter of the chassis 100. The blades 200 and the turntable 310 are slidably connected. When the drive member 320 drives the turntable 310 to rotate forward or reverse, the blades 200 slide along the turntable 310 and rotate forward or reverse around the corresponding positioning column 130, so that the blades 200 rotate out or retract. When rotating out, the outer edges of multiple blades 200 protrude to the outside of the turntable 310 and form a circular structure. When retracting, the outer edges of multiple blades 200 retreat to the inside of the turntable 310. Exemplarily, the drive member 320 can be a motor.

[0045] In the above-mentioned contour backlight switching device 10, when the driving member 320 drives the turntable 310 to rotate forward or reverse, the blades 200 slide along the turntable 310 and rotate forward or reverse around the corresponding positioning column 130, so that the blades 200 rotate out or retract. When rotating out, the outer edges of multiple blades 200 protrude to the outside of the turntable 310 and form a circular structure. Because the reflectivity of the blades 200 is greater than the reflectivity of the object to be tested, the bright field light source 40 hits the blades 200, and the reflectivity of the blades 200 is higher than the reflectivity of the object to be tested, so the brightness of the blades 200 is higher than the brightness of the object to be tested. When retracting, the outer edges of multiple blades 200 retreat to the inside of the turntable 310. Because the outer diameter of the turntable 310 is smaller than the outer diameter of the chassis 100, and the scattering rate of the chassis 100 is greater than the scattering rate of the object to be tested, the dark field light source 50 hits the chassis 100, and the scattering rate of the chassis 100 is higher than the scattering rate of the object to be tested, so the brightness of the chassis 100 is higher than the brightness of the object to be tested. That is, in both bright field and dark field lighting conditions, a high-contrast contour background can be obtained to achieve detection of near edge areas. The contour backlight switching device 10 has a compact structure and can provide a continuous, high-contrast background for bright and dark field detection at the detection station, thereby improving the continuity and integrity of contour imaging during detection and achieving detection of edge areas.

[0046] It is easy to understand that when the part to be tested is a silicon wafer 60, the silicon wafer 60 is arranged above the turntable 310 through a supporting structure (such as an adsorption part), the outer diameter of the turntable 310 is set to be smaller than the diameter of the silicon wafer 60, and the outer diameter of the chassis 100 is set to be larger than the diameter of the silicon wafer 60. When rotating out, the outer edges of the multiple blades 200 protrude to the outside of the turntable 310 and form a circular structure, and the outer diameter of the circular structure is larger than the diameter of the silicon wafer 60. When performing contour detection on the silicon wafer 60, the blades 200 rotate out, and the outer edges of the plurality of blades 200 protrude to the outside of the silicon wafer 60. The bright field light source 40 hits the blades 200, and the reflectivity of the blades 200 is higher than the reflectivity of the silicon wafer 60, so the brightness of the blades 200 is higher than the brightness of the silicon wafer 60. When retracting, the outer edges of the plurality of blades 200 retreat to the inside of the rotating disk 310, and the dark field light source 50 hits the chassis 100. The scattering rate of the chassis 100 is higher than the scattering rate of the silicon wafer 60, so the brightness of the chassis 100 is higher than the brightness of the silicon wafer 60. In other embodiments, the type and size of the test piece can be set as needed.

[0047] Preferably, the blade 200 is provided with a guide post 230, and the turntable 310 is provided with a long guide groove 311 that cooperates with the guide post 230. When the turntable 310 rotates, the guide post 230 can slide along the guide groove 311, and the extension direction of the guide groove 311 is set at an angle with the radial direction of the turntable 310. When the turntable 310 rotates, the guide post 230 slides along the long guide groove 311, and the extension direction of the guide groove 311 is set at an angle with the radial direction of the turntable 310, so that the blade 200 rotates around the corresponding positioning post 130 at the same time. The guide post 230 and the guide groove 311 cooperate with each other, and the structure is simple and easy to process and manufacture.

[0048] Optionally, adjacent blades 200 are overlapped with each other. The overlapping arrangement allows the adjacent blades 200 to be in close contact with each other, thereby increasing the overlap rate of the adjacent blades 200, thereby ensuring that the outer edges of the plurality of blades 200 protrude to the outside of the rotating disk 310 and form a circular structure. Exemplarily, the blades 200 may be arranged as a step-type structure, the positioning holes 211 are arranged on the first step surface 210 of the step-type structure, and the guide posts 230 are arranged on the second step surface 220 of the step-type structure. Alternatively, the blades 200 may also be arranged as a sheet-type structure, which may be arranged as required.

[0049] In this embodiment, the guide column 230 is configured as a pin, and / or the positioning column 130 is configured as a pin. The pin has a simple structure, is reliable to use, and is easy to assemble.

[0050] Optionally, the driving member 320 and the turntable 310 are connected via a gear ring 330. This arrangement improves the convenience of assembling the driving member 320 and the turntable 310. Further, the gear ring 330 is arranged as an arc plate-like structure, one arc portion of the arc plate-like structure is connected to the turntable 310, and the other arc portion of the arc plate-like structure is connected to the output shaft of the driving member 320. The arc plate-like structure matches the structure of the turntable 310, making the overall structure of the contour backlight switching device 10 more beautiful.

[0051] In order to improve the installation reliability of the turntable 310, the chassis 100 is set as a circular ring structure, which includes a circular ring body 110 and a guide member 120 arranged on the inner wall of the circular ring body 110. A plurality of positioning posts 130 are evenly distributed along the circumference of the circular ring body 110, and the turntable 310 is rotatably sleeved on the guide member 120. In this way, the chassis 100 can position the turntable 310 to prevent the turntable 310 from deviating.

[0052] Optionally, the guide member 120 is configured as an L-shaped structure, and the L-shaped structure includes a first ring body 121 and a second ring body 122 which are perpendicular to each other, the first ring body 121 is perpendicular to the annular body 110 and connected to the annular body 110, the turntable 310 is rotatably sleeved on the first ring body 121, and the second ring body 122 extends toward the inner side of the annular body 110. The configuration of the first ring body 121 enables the guide member 120 and the turntable 310 to have a larger contact area, thereby facilitating the improvement of the rotation stability of the turntable 310; the second ring body 122 extends toward the inner side of the annular body 110, and the second ring body 122 can assist in connecting with an external component, for example, the second ring body 122 can be fixedly sleeved on the external component, so as to facilitate the connection between the contour backlight switching device 10 and the external component.

[0053] See also Figures 8 to 11 This embodiment also provides a detection device, including a detector 20, a lens 30 and the above-mentioned contour backlight switching device 10, wherein the lens 30 is arranged above the edge of the chassis 100, the detector 20 is arranged above the lens 30, and the detector 20 and the lens 30 are arranged opposite to each other. The detection device can simultaneously image the contour background in the bright field and dark field states, thereby improving the continuity and integrity of the contour background imaging acquisition.

[0054] It is easy to understand that when the device to be tested is a silicon wafer 60, in the bright field state, see Figure 8 and Fig.10 , the lens 30 moves to the top of the edge of the silicon wafer 60, and the edge of the silicon wafer 60 is in the field of view of the lens 30, the light beam emitted by the bright field light source 40 hits the blade 200 through the lens 30, and after the blade 200 reflects, the light beam enters the detector 20 through the lens 30 for imaging; in the dark field state, see Fig. 9 and Fig.11The dark field light source 50 hits the chassis 100, and the light beam is scattered by the chassis 100 and enters the detector 20 through the lens 30 to form an image.

[0055] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A contour backlight switching device, characterized in that: include: A chassis (100), wherein a plurality of positioning posts (130) are arranged on the chassis (100), the plurality of positioning posts (130) are evenly distributed along the circumference of the chassis (100), and the scattering rate of the chassis (100) is greater than the scattering rate of the object to be tested; A blade (200) is placed on the chassis (100), a plurality of blades (200) are provided, the plurality of blades (200) and the plurality of positioning posts (130) are arranged in one-to-one correspondence, a positioning hole (211) is provided on the blade (200) and matches the positioning post (130), and the reflectivity of the blade (200) is greater than the reflectivity of the object to be tested; A driving assembly comprises a turntable (310) and a driving member (320) capable of driving the turntable (310) to rotate, wherein the driving member (320) is installed on an external workbench, the turntable (310) is located above the blade (200), the outer diameter of the turntable (310) is smaller than the outer diameter of the chassis (100), the blade (200) and the turntable (310) are slidably connected, and when the driving member (320) drives the turntable (310) to rotate forward or reverse, the blade (200) slides along the turntable (310) and rotates forward or reversely around the corresponding positioning column (130), so that the blade (200) rotates out or retracts, and when rotating out, the outer edges of multiple blades (200) protrude to the outside of the turntable (310) and form a circular structure, and when retracting, the outer edges of multiple blades (200) retreat to the inside of the turntable (310).

2. The contour backlight switching device according to claim 1, characterized in that: The blade (200) is provided with a guide column (230), and the rotating disk (310) is provided with a long strip guide groove (311) matched with the guide column (230); when the rotating disk (310) rotates, the guide column (230) can slide along the guide groove (311), and the extension direction of the guide groove (311) is arranged at an angle with the radial direction of the rotating disk (310).

3. The contour backlight switching device according to claim 2, characterized in that: Adjacent blades (200) are arranged to overlap each other.

4. The contour backlight switching device according to claim 2, characterized in that: The guide column (230) is configured as a pin, and / or the positioning column (130) is configured as a pin.

5. The contour backlight switching device according to claim 1, characterized in that: The driving member (320) and the rotating disk (310) are connected via a gear ring (330).

6. The contour backlight switching device according to claim 5, characterized in that: The gear ring (330) is configured as an arc plate-shaped structure, one arc portion of the arc plate-shaped structure is connected to the rotating disk (310), and the other arc portion of the arc plate-shaped structure is connected to the output shaft of the driving member (320).

7. The contour backlight switching device according to claim 1, characterized in that: The chassis (100) is configured as a circular ring structure, the circular ring structure comprising a circular ring body (110) and a guide member (120) disposed on the inner wall of the circular ring body (110), a plurality of positioning posts (130) are evenly distributed along the circumference of the circular ring body (110), and the rotating disk (310) is rotatably sleeved on the guide member (120).

8. The contour backlight switching device according to claim 7, characterized in that: The guide member (120) is configured as an L-shaped structure, the L-shaped structure comprising a first ring body (121) and a second ring body (122) which are perpendicular to each other, the first ring body (121) being perpendicular to the circular ring body (110) and connected to the circular ring body (110), the turntable (310) being rotatably sleeved on the first ring body (121), and the second ring body (122) extending toward the inner side of the circular ring body (110).

9. The contour backlight switching device according to claim 1, characterized in that: The driving member (320) is configured as a motor.

10. A detection device, characterized in that, The invention comprises a detector (20), a lens (30) and a contour backlight switching device as described in any one of claims 1 to 9, wherein the lens (30) is arranged above the edge of the chassis (100), the detector (20) is arranged above the lens (30), and the detector (20) and the lens (30) are arranged opposite to each other.

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