Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, recording medium, and control apparatus

Abstract

The invention provides a substrate processing apparatus, a substrate processing method, a method of manufacturing a semiconductor device, a recording medium, and a control apparatus, which can improve operation efficiency in a main screen on which device information used in the substrate processing apparatus can be displayed or operated. A substrate processing apparatus is provided with a control unit that is capable of operating a display unit that displays a first screen on which device information used in the substrate processing apparatus can be displayed or operated, and a second screen on which related information is displayed, in a state in which the second screen on which related information is displayed is displayed on the first screen, the control unit being capable of operating the first screen on which device information used in the substrate processing apparatus can be displayed. The association information associated with the device information can be displayed on a second screen.

Description

Technical Field

[0001] The present invention relates to a substrate processing device, a substrate processing method, a method for manufacturing a semiconductor device, a recording medium and a control device. Background Art

[0002] For example, Patent Document 1 describes a substrate processing apparatus that can display an operable sub-screen in a superimposed manner on a main screen that displays apparatus information used in the substrate processing apparatus.

[0003] Prior art literature

[0004] Patent Document 1: Japanese Patent Application Publication No. 2013-153216 Summary of the invention

[0005] However, when the user operates the substrate processing apparatus, the user operates on the operation screen. Therefore, it is desirable to improve the operation efficiency on the operation screen.

[0006] The present invention provides a technology capable of improving the operation efficiency on a main screen, and can display or operate device information used in a substrate processing device on the main screen.

[0007] According to one embodiment of the present invention, a technology is provided, comprising a control unit, wherein the control unit is capable of operating the first screen while displaying the second screen displaying related information on the first screen with respect to a display unit displaying the first screen and the second screen, wherein device information used in a substrate processing device can be displayed or operated on the first screen, and the related information associated with the device information can be displayed on the second screen.

[0008] Effects of the Invention

[0009] According to the present invention, it is possible to improve the operation efficiency on the main screen on which device information used in the substrate processing apparatus can be displayed or operated. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a perspective view schematically showing an example of a substrate processing apparatus according to an embodiment.

[0011] Figure 2 yes Figure 1 A schematic structural diagram of a processing furnace in a substrate processing apparatus shown in FIG.

[0012] Figure 3 This is a block diagram showing an example of the configuration of a control device included in the substrate processing apparatus according to the embodiment.

[0013] Figure 4This is a block diagram showing an example of the functional structure of the substrate processing apparatus according to the embodiment.

[0014] Figure 5 This is a front view schematically showing an example of the first screen displayed on the display unit.

[0015] Figure 6 This is a front view showing an example of a state in which a plurality of second screens are displayed on a first screen.

[0016] Figure 7 This is an enlarged view of an example of the second screen displayed on the first screen.

[0017] Fig. 8A This is a diagram showing another enlarged example of the second screen displayed on the first screen.

[0018] Figure 8B This is a diagram showing another enlarged example of the second screen displayed on the first screen.

[0019] Fig. 9 This is a front view showing another example of a state in which a plurality of second screens are displayed on a first screen.

[0020] Fig.10 This is a flowchart showing an example of the flow of screen display processing according to the embodiment.

[0021] Description of Reference Numerals

[0022] 2Substrate processing device

[0023] 11. Control Unit

[0024] 24 Display unit

[0025] 240 Screen 1

[0026] 300, 300A, 300B 2nd screen DETAILED DESCRIPTION

[0027] The following mainly refers to Figures 1 to 10 One mode of the present invention is described. It should be noted that the drawings used in the following description are all schematic, and the dimensional relationship of the elements shown in the drawings, the ratio of the elements, etc. may not be consistent with the actual ones. In addition, the dimensional relationship of the elements, the ratio of the elements, etc. may not be consistent between multiple drawings. In addition, the present invention is not limited to the following embodiments, and can be implemented by adding appropriate changes within the scope of the present invention.

[0028] First, refer to Figure 1 and Figure 2 An overview of the substrate processing apparatus according to this embodiment will be described.

[0029] Figure 1 It is a perspective view schematically showing an example of the substrate processing apparatus 2 according to the present embodiment.

[0030] like Figure 1 As shown, the substrate processing apparatus 2 of this embodiment includes a wafer cassette 100 storing a plurality of substrates 200 made of silicon or the like and a housing 101. A wafer cassette stage 105 as a substrate container transfer platform is provided inside the housing 101 at a wafer cassette loading and unloading port (not shown). The wafer cassette 100 is loaded onto the wafer cassette stage 105 by an intra-process transfer device (not shown), and is also unloaded from the wafer cassette stage 105.

[0031] A cassette rack 109 as a substrate container loading rack is provided at a substantially central portion in the front-back direction of the housing 101. The cassette rack 109 is configured to store a plurality of cassettes 100 in multiple layers and rows. The cassette rack 109 is provided with a transfer rack 123 for storing the cassettes 100. In addition, a reserve cassette rack 110 is provided above the cassette stage 105. The reserve cassette rack 110 is configured to store the cassettes 100 in a reserve manner. Between the cassette stage 105 and the cassette rack 109, a cassette lifter 115 and a cassette transfer machine 114 as a substrate container lifting mechanism capable of lifting and lowering while holding the cassettes 100 are provided. The cassette lifter 115 and the cassette transfer machine 114 are configured to transfer the cassettes 100 between the cassette stage 105, the cassette rack 109, and the reserve cassette rack 110 by continuous operation.

[0032] At the rear of the wafer cassette rack 109, there is a substrate transfer machine 112 capable of rotating and linearly moving the substrate 200 in the horizontal direction, and a transfer elevator 113 for lifting and lowering the substrate transfer machine 112. The transfer elevator 113 is provided at the right end of the housing 101. The structure is such that, through the continuous operation of the transfer elevator 113 and the substrate transfer machine 112, the tweezer 111 as the substrate holding body of the substrate transfer machine 112 is used as the loading part of the substrate 200, and the substrate 200 is loaded (loaded) and taken out (unloaded) from the boat 217 as the substrate holding part.

[0033] A processing furnace 202 is provided at the upper rear portion of the housing 101. The lower end of the processing furnace 202 is opened and closed by a furnace gate 116 as a furnace opening and closing mechanism. A boat elevator 121 (substrate holder lifting mechanism) as a lifting mechanism for lifting a boat 217 in the processing furnace 202 is provided below the processing furnace 202. A sealing cover 219 as a cover is horizontally mounted on a lifting member 122 as a connecting member connected to the lifting platform of the boat elevator 121. The sealing cover 219 vertically supports the boat 217 and is configured to be able to close the lower end of the processing furnace 202. The boat 217 as a substrate holding part has a plurality of boat columns 221, and is configured to horizontally hold a plurality of substrates 200 (for example, more than 50 and less than 150) in a state where the centers of the substrates 200 are aligned and arranged in a vertical direction.

[0034] like Figure 1 As shown, a cleaning unit 118 composed of a supply fan and a dust filter is provided above the wafer box rack 109 to supply clean gas as ambient gas purified from external air flowing in from the duct 124 , and is configured to allow the clean gas to flow into the interior of the housing 101 .

[0035] Next, the operation of the substrate processing apparatus 2 of this embodiment will be described. Figure 1 As shown, the chip box 100 is carried in from the chip box carry-in / carry-out port, and the chip box 100 is automatically transported and delivered to the designated rack position of the chip box rack 109 or the spare chip box rack 110. After being temporarily stored, the chip box 100 is transferred from the chip box rack 109 or the spare chip box rack 110 to the transfer rack 123, or is directly transported to the transfer rack 123.

[0036] After the wafer box 100 is transferred to the transfer rack 123, the tweezers 111 of the substrate transfer machine 112 pick up the substrate 200 from the wafer box 100 through the substrate entrance and exit, and load it into the boat 217. The substrate transfer machine 112 that delivered the substrate 200 to the boat 217 returns to the wafer box 100 and loads the next substrate 200 into the boat 217.

[0037] After a predetermined number of substrates 200 are loaded into the boat 217, the lower end of the processing furnace 202 which is closed by the furnace gate 116 is opened by the furnace gate 116. Then, the sealing cover 219 is raised by the boat elevator 121, and the boat 217 holding the substrate 200 group is carried (loaded) into the processing furnace 202.

[0038] After loading, the substrate 200 is subjected to any treatment in the treatment furnace 202. After the treatment, the substrate 200 and the wafer cassette 100 are taken out of the housing 101 in the reverse order of the above.

[0039] Figure 2 yes Figure 1 2 is a schematic structural diagram of a processing furnace 202 in the substrate processing apparatus 2 shown.

[0040] The processing furnace 202 includes a reaction tube 203. The reaction tube 203 is made of a heat-resistant non-metal material such as quartz (SiO2) or silicon carbide (SiC), and has a cylindrical shape with a closed upper end and an open lower end.

[0041] A processing chamber 201 is formed inside the reaction tube 203. A boat 217 as a substrate holding portion is inserted from below into the processing chamber 201, and the substrates 200 held in a horizontal position by the boat 217 are accommodated in a state of being arranged in multiple layers in the vertical direction. The rotating shaft 44 is rotated by the rotating mechanism 43, so that the boat 217 accommodated in the processing chamber 201 can rotate in a state where the processing chamber 201 is kept airtight while a plurality of substrates 200 are mounted.

[0042] A manifold 45 is provided concentrically with the reaction tube 203 below the reaction tube 203. The manifold 45 is made of a metal material such as stainless steel and is in a cylindrical shape with an upper end and a lower end open. The reaction tube 203 is supported longitudinally from the lower end side by the manifold 45. That is, the reaction tube 203 forming the processing chamber 201 is vertically erected via the manifold 45, thereby forming the processing furnace 202. The lower end of the manifold 45 is hermetically sealed by a sealing cover 219 when the boat elevator 121 rises. A sealing member 219a such as an O-ring for hermetically sealing the processing chamber 201 is provided between the lower end of the manifold 45 and the sealing cover 219.

[0043] In addition, a gas introduction pipe 47 for introducing raw material gas or purge gas into the processing chamber 201 and an exhaust pipe 48 for exhausting gas from the processing chamber 201 are connected to the manifold 45. The pressure of the processing chamber 201 is controlled by adjusting the APC (Automatic Pressure Control) valve 35 based on the detection result of the pressure sensor (not shown).

[0044] A heater unit 207 as a heating mechanism is disposed concentrically with the reaction tube 203 on the outer circumference of the reaction tube 203. The heater unit 207 is configured to heat the processing chamber 201 so that the entire processing chamber 201 has a uniform or predetermined temperature distribution.

[0045] Here, if Figure 1As shown, the substrate processing apparatus 2 includes a control device 10 as a main controller, and the control device 10 controls the substrate processing apparatus 2. The control device 10 may be built in the substrate processing apparatus 2 or may be provided outside the substrate processing apparatus 2 in an accessible manner. The control device 10 controls the operation of each part constituting the substrate processing apparatus 2 and the processing furnace 202.

[0046] Next, refer to Figure 3 , the structure of the control system of the substrate processing apparatus 2 according to the present embodiment will be described.

[0047] Figure 3 1 is a block diagram showing an example of the configuration of the control device 10 included in the substrate processing apparatus 2 according to the present embodiment.

[0048] like Figure 3 As shown, the substrate processing apparatus 2 includes a control device 10 as a main controller, an external communication unit 21 , an external storage unit 22 , an operation unit 23 , a display unit 24 , a process control unit 25 , and a transport control unit 26 .

[0049] The control device 10 includes a control unit 11 , a storage unit 14 , and an I / O (also referred to as an I / O port) 15 . The control unit 11 includes a CPU (Central Processing Unit) 12 and a RAM (Random Access Memory) 13 .

[0050] The control device 10 is connected to the operation unit 23, and is connected to the process control unit 25 and the transport control unit 26 via the I / O 15. The control device 10 is electrically connected to the process control unit 25 and the transport control unit 26 via the I / O 15, so that it is configured to transmit and receive various data and download and upload various files.

[0051] The control device 10 is connected to an external host computer (not shown) via an external communication unit 21. Therefore, even when the substrate processing device 2 is installed in a clean room, the host computer can be arranged in an office outside the clean room. In addition, the control device 10 is connected to an external storage unit 22 as a mounting unit for plugging and unplugging a USB (Universal Serial Bus) memory as an example of a recording medium.

[0052] The operation unit 23 has a display unit 24 integrally, or is connected to the display unit 24 via a video cable or the like. The display unit 24 is, for example, a liquid crystal display panel. The display unit 24 is configured to display various operation screens for operating the substrate processing device 2. The operation screen includes a screen for confirming the status of the substrate process system controlled by the process control unit 25 and the substrate conveying system controlled by the conveying control unit 26. In addition, the display unit 24 can also be provided with various operation buttons as input units for inputting operation instructions for the substrate process system and the substrate conveying system. The operation unit 23 displays information generated in the substrate processing device 2 on the display unit 24 with the help of the operation screen. In addition, the operation unit 23 outputs information displayed on the display unit 24 to a device such as a USB memory inserted in the external storage unit 22. The operation unit 23 receives input data (input instructions) from the operation screen displayed on the display unit 24, and sends the input data to the control device 10. In addition, the operation unit 23 receives an instruction (control instruction) to execute any substrate processing recipe (also called process recipe) among the recipes expanded in the RAM 13 or the plurality of recipes stored in the storage unit 14, and sends it to the control device 10. It should be noted that the operation unit 23 and the display unit 24 may also be composed of a touch panel. Here, the operation unit 23 and the display unit 24 are provided separately from the control device 10, but may also be a structure integrally included in the control device 10.

[0053] The process control unit 25 is omitted from the illustration here, but has a temperature control unit, a gas flow control unit and a pressure control unit. These temperature control units, gas flow control units and pressure control units constitute sub-controllers respectively, and are electrically connected to the process control unit 25, so that the transmission and reception of various data and the download and upload of various files can be performed. It should be noted that the process control unit 25 and each sub-controller (temperature control unit, gas flow control unit and pressure control unit) can be constructed separately or integrally.

[0054] The transport control unit 26 is not shown here, but includes a mechanism control unit. The mechanism control unit is configured to control the drive system, the rotation system, and the lifting system of the substrate processing apparatus 2. The transport control unit 26 is configured to control the transport operation of each transport mechanism of the substrate processing apparatus 2.

[0055] In addition, the processing of the substrate 200 is performed, for example, according to a recipe that defines the processing conditions of the substrate 200. The recipe is stored in the storage unit 14, and the control unit 11 obtains the stored recipe when processing the substrate, and controls the processing of the substrate according to the processing bar defined in the recipe. The recipe can be stored not only in the storage unit 14, but also in the external storage unit 22. As the external storage unit 22, there are, for example, a USB memory, a CD (Compact Disc) or a DVD (Digital Versatile Disc), and an external hard disk. In addition, it can also be obtained from an external device via the external communication unit 21.

[0056] In addition, the control device 10, the process control unit 25, and the transport control unit 26 of the present embodiment can be implemented using a common computer system instead of relying on a dedicated system. For example, by installing the program for executing the above-mentioned processing from a recording medium (CD-ROM, USB, etc.) storing the program to a general-purpose computer, each controller that executes the predetermined processing can be configured.

[0057] Furthermore, the means for supplying these programs is arbitrary, and in addition to being able to be supplied via a predetermined recording medium as described above, they may also be supplied via, for example, a communication line, a communication network, a communication system, or the like.

[0058] The control device 10 is configured as a computer having a CPU 12, a RAM 13, a storage unit 14, and an I / O 15. The storage unit 14 stores: various recipe files such as recipes that define processing conditions and processing sequences, control program files for executing these recipe files, parameter files (setting value files) for setting processing conditions and processing sequences, and error handling program files and error handling parameter files. In addition, various screen files including input screens for inputting process parameters, various icon files, etc. are stored (all omitted in the figure). It should be noted that the control device 10 uses an external communication unit 21 as an example to connect to a network such as the Internet, a LAN (Local Area Network), or a WAN (Wide Area Network), and can communicate with external devices via the network.

[0059] In addition, as the storage unit 14, for example, a HDD (Hard Disk Drive), an SSD (Solid State Drive), a flash memory, etc. The storage unit 14 stores a screen display processing program for executing the screen display processing of the present embodiment.

[0060] The screen display processing program may be installed in advance in the substrate processing device 2, for example. The screen display processing program may also be realized by recording it in a non-volatile recording medium or distributing it via a network and appropriately installing it in the substrate processing device 2. It should be noted that examples of non-volatile recording media include CD-ROM (Compact Disc Read Only Memory), optical magnetic disk, HDD, DVD-ROM (Digital Versatile Disc Read Only Memory), flash memory, memory card, USB, etc.

[0061] The CPU 12 of the substrate processing apparatus 2 of the present embodiment writes the screen display processing program stored in the storage unit 14 into the RAM 13 and executes the program, thereby serving as a Figure 4 The display processing unit 12A shown in FIG.

[0062] Figure 4 It is a block diagram showing an example of the functional structure of the substrate processing apparatus 2 according to the present embodiment.

[0063] like Figure 4 As shown, the display unit 24 includes a UI (user interface) unit 24A and a screen unit 24B. The UI unit 24A obtains at least a portion of information displayed on the screen unit 24B as image data and forwards it to the screen unit 24B. In addition, the UI unit 24A accepts input from the user and processes it. The screen unit 24B presents the image data forwarded from the UI unit 24A to the operator.

[0064] The display unit 24 can display a first screen and a second screen. The first screen is a main screen (also called a main screen), and the second screen is a sub-screen (also called a child screen). The first screen is a screen that can display or operate device information used in the substrate processing device 2, for example, a screen that can operate buttons in the screen and can edit recipes and parameters, etc. The device information displayed on the first screen is, for example, information showing the state of the substrate processing device 2, information including recipes and parameters that are edited. On the other hand, the second screen is a screen that can display related information associated with the device information of the first screen, for example, a screen that displays an image obtained by capturing at least a portion of the first screen, a pre-stored image, a text message, a dynamic image, etc. The related information displayed on the second screen is, for example, device information recorded in the captured image, information including a text message, etc.

[0065] The display processing unit 12A can operate the first screen with respect to the display unit 24 while displaying the second screen displaying the associated information on the first screen. That is, operations in the first screen, such as button pressing, scroll bar operation, data input or modification, etc., can be performed while displaying the second screen displaying the associated information in an overlapping manner on the first screen. It should be noted that the display processing unit 12A can load, save, and change the file name of an image file stored in the storage unit 14. The display processing unit 12A can add or delete text, images, etc. to image data such as captured images. Thus, the first screen can be operated while comparing the device information of the first screen and the associated information of the second screen on the same screen, such as the same display screen.

[0066] Figure 5 It is a front view schematically showing an example of the first screen 240 displayed on the display unit 24 .

[0067] Figure 5 The first screen 240 shown is composed of a guide panel 241, a title panel 242, and an apparatus information display area 244. The first screen 240 is a screen for displaying apparatus information used in the substrate processing apparatus 2, and has a layer structure.

[0068] A plurality of buttons for specifying the first screen 240 to be displayed are arranged on the guide panel 241. The guide panel 241 is an area where a plurality of buttons are fixed. The plurality of buttons arranged on the guide panel 241 are, for example, a "Job" button, a "System" button, a "Transfer" button, a "Maintenance" button, a "Setup" button, and an "Alarm" button. When any of the plurality of buttons arranged on the guide panel 241 is pressed, the screen changes to the corresponding device information 245 screen.

[0069] Specifically, when the "Work" button is selected, the screen changes to the screen displaying device information related to the work. When the "System" button is selected, the screen changes to the screen displaying device information related to the system. When the "Transport" button is selected, the screen changes to the screen displaying device information related to substrate transport. When the "Maintenance" button is selected, the screen changes to the screen displaying device information related to maintenance. When the "Install" button is selected, the screen changes to the screen displaying device information related to installation. When the "Alarm" button is selected, the screen changes to the screen displaying device information related to alarm. Figure 5 In the example of FIG. 1 , the “alarm” button is selected and the status of the corresponding device information is displayed.

[0070] The title panel 242 is an area for displaying information related to the entire system. A button configuration area 243 is fixedly provided in the title panel 242. In the button configuration area 243, for example, a Sc (screenshot) button 243A is configured. The Sc button 243A is a button for indicating a screenshot, and is an example of an indication unit. The so-called screenshot is, for example, a function of storing the device information as image data, and a function of copying at least a part of the area of ​​the first screen. The image obtained by the "screenshot" can also be displayed on the main screen as a sub-screen and overlapped. In addition to the Sc button 243A, the button configuration area 243 also includes a Me button for indicating the display of a message, a Ta button for indicating the execution of a task, a Pr button for switching between English and Japanese, and the like.

[0071] The device information display area 244 is an area on the same layer as the layer where the buttons of the guide panel 241 are arranged, and displays the device information 245 to be edited. That is, the guide panel 241 and the device information display area 244 are displayed in the first layer area, and the device information 245 is displayed in the second layer area.

[0072] exist Figure 5 In the example of FIG. 2 , the “alarm” button of the guide panel 241 is selected, so the device information 245 corresponding to the “alarm” button is displayed. The device information 245 includes various items such as “current alarm”, “alarm history”, “alarm monitor”, etc. These “current alarm”, “alarm history”, “alarm monitor”, etc. can be switched and displayed by tags.

[0073] exist Figure 5 In the example, the "Current Alarm" tab is selected, so the device information 245 corresponding to the "Current Alarm" tab is displayed in the third layer area. The device information 245 includes various items such as "File list", "Line status", etc. These "File list", "Line status", etc. can be switched and displayed by tags. Here, the "File list" tab is selected to display the file list 247 of the editing object. In addition, the "A42" file in the displayed file list 247 is selected to display the alarm information 248 corresponding to "A42".

[0074] The second screen 300 displays related information associated with the device information on the first screen 240. The display processing unit 12A can operate the first screen 240 while the second screen 300 displaying the related information is displayed on the first screen 240. Specifically, while the second screen 300 is displayed on the first screen 240, various buttons arranged on the guide panel 241 and the title panel 242 can be operated, and various information on the first screen 240 can be edited.

[0075] The Sc button 243A may also instruct, for example, the generation of a copy image (i.e., a captured image) that is a copy of the image of the first screen 240. In this case, the associated information displayed on the second screen 300 is a copy image of the first screen 240 that is generated based on the instruction of the Sc button 243A. Thus, a captured image that is a copy of the first screen 240 can be generated by a simple method. It should be noted that the captured image obtained from the first screen 240 can be copied by specifying the entire first screen 240 in a range, or can be copied by specifying a part of the first screen 240 in a range.

[0076] In addition, the copy image of the first screen 240 may be stored as the associated information in the storage unit 14. In addition, it is desirable that when the associated information is stored in the storage unit 14, the pre-specified information of the first screen 240 is stored in correspondence. The so-called pre-specified information of the first screen 240 is, for example, the name of the item of the guide panel 241, the layer name under the item name, and other information. As an example, when "maintenance" of the guide panel 241 is selected and "monitor", "editor" and "monitor" in "log" are selected as the layers under the item, "maintenance" and "monitor" are established as the pre-specified information of the first screen 240. In addition, in addition to the item name and the layer name, the date and time when the captured image is generated may be established in correspondence. Thereby, it is easy to select the associated information when reading the associated information later. In particular, if the date and time are established in correspondence, the history of alarms and the like can be added through the time axis, so the image operation efficiency can be further improved.

[0077] In addition, a plurality of related information may be stored in the storage unit 14. The display processing unit 12A reads the related information from the storage unit 14 and displays the read related information on the second screen 300. Thus, a plurality of related information can be read and referenced at a desired time. The related information may also be an image obtained by copying at least a part of the area of ​​the first screen 240. For example, Figure 6 As shown, a plurality of second screens 300A and 300B obtained by copying at least a partial area of ​​the first screen 240 may be displayed on the first screen 240 .

[0078] Figure 6 This is a front view showing an example of a state where a plurality of second screens 300A and 300B are displayed on the first screen 240 . Figure 6 The first screen 240 shown is a screen displayed when the "Transport" button of the guide panel 241 is selected. Figure 5 When the "Transport" button of the operation guide panel 241 is selected while the plurality of second screens 300A and 300B are displayed on the first screen 240 of the device information 245 shown in FIG. Figure 6 That is, even if the first screen 240 is operated and the screen of the device information 245 is changed, the plurality of second screens 300A and 300B are still displayed on the first screen 240.

[0079] exist Figure 6 The second screen 300A on the upper side, that is, the side of the title panel 242, is the copy and Figure 5 The image obtained by the alarm information corresponding to "A11" of the file list 247 shown in the figure, the second screen 300B on the lower side, that is, on the guide panel 241 side, is the copy and Figure 5 The image is obtained based on the alarm information corresponding to "A42" of the file list 247 shown.

[0080] By setting the entire area of ​​the first screen 240 as related information, the information of the first screen 240 can be recorded without omission and can be referenced in any screen. In addition, by setting a part of the area of ​​the first screen 240 as related information, the position to be confirmed can be immediately determined when reading from the storage unit 14 later.

[0081] The related information displayed on the second screen 300 may be information pre-stored in previous operations. The information pre-stored in previous operations may be, for example, initial setting data stored in the factory before shipment to customers, data from experiments performed by customers after delivery to customers, etc.

[0082] Figure 7 This is an enlarged diagram of an example of the second screen 300 displayed on the first screen 240.

[0083] like Figure 7 As shown, at least one of the second screen 300 and the related information may be displayed in an enlarged or reduced manner.

[0084] exist Figure 7In the second screen 300 shown, as an example, the captured image P1 of the first screen 240 is displayed as the related information. The second screen 300 is provided with a minimize button 301 for minimizing the second screen 300, a reduce button 302 for reducing the captured image P1, an enlarge button 303 for enlarging the captured image P1, a text button 304 for adding text information to the captured image P1, a read button 305 for reading new image data from the storage unit 14 and displaying it, a save button 306 for saving the captured image P1, a close button 307 for closing the second screen 300, and a scroll bar 308 for scrolling the captured image P1. The capture image P1 can be enlarged or reduced by the reduce button 302 and the enlarge button 303. Thus, the items to be confirmed on the first screen 240 can be easily compared with the information on the second screen 300. In addition, for example, the second screen 300 can be enlarged or reduced by dragging the frame around the second screen 300.

[0085] In addition, the second screen 300 may be moved on the first screen 240. That is, the second screen 300 may be moved to approach the item to be confirmed on the first screen 240. As a moving method, for example, a method of dragging the second screen 300 to move the second screen 300 is used. This makes it easy to compare the item to be confirmed on the first screen 240 with the information on the second screen 300.

[0086] Here, as an example, as mentioned above Figure 6 As shown, the related information displayed on the second screen 300 is information indicating the content of an alarm related to the substrate processing apparatus 2, or information explaining the items displayed on the first screen 240. For example, while the information indicating the content of the alarm is displayed on the second screen 300, the first screen 240 can be operated to move to a display screen related to the alarm. It should be noted that the information explaining the items displayed on the first screen 240 is, for example, help information for the items, information indicating explanations of terms, or information explaining the operations.

[0087] In addition, the related information displayed on the second screen 300 may be information indicating the contents of a plurality of alarms related to the substrate processing apparatus 2, or information explaining a plurality of items displayed on the first screen 240. In this case, the first screen 240 can be operated while a plurality of second screens 300 indicating the contents of the alarms or a plurality of second screens 300 indicating the items displayed on the first screen 240 are displayed on the first screen 240. For example, when the factors of each alarm are associated with a plurality of factors, the first screen 240 can be operated to switch to the display screen related to the alarm while the information indicating the contents of the alarms is displayed on the plurality of second screens 300.

[0088] In addition, the information indicating the content of the alarm may be, for example, information related to troubleshooting set for each alarm or for each item. Thus, it is possible to move to various display screens while comparing with information related to multiple troubleshooting, thereby efficiently solving the fault.

[0089] In addition, the recipe information (main recipe information or sub-recipe information) defining the processing conditions of the substrate 200 may be displayed on the first screen 240. Furthermore, the associated information displayed on the second screen 300 may be at least one piece of information associated with the recipe information. In this case, the first screen 240 can be operated while displaying one or more second screens 300 displaying information associated with the recipe information on the first screen 240. Thus, the recipe information on the first screen 240 can be confirmed while the information associated with the recipe information is displayed on the second screen 300, so that the recipe information can be confirmed and edited efficiently.

[0090] In addition, the related information displayed on the second screen 300 may be sub-recipe information or main recipe information linked to the recipe information (main recipe information or sub-recipe information) on the first screen 240. Thus, the main recipe information can be confirmed and edited on the first screen 240 while the sub-recipe information is displayed on the second screen 300. Alternatively, the sub-recipe information can be confirmed and edited on the first screen 240 while the main recipe information is displayed on the second screen 300.

[0091] In addition, the parameter information of the substrate processing apparatus 2 may be displayed on the first screen 240. Furthermore, the comparison parameter information to be compared with the parameter information may be displayed on the second screen 300. The parameter information on the first screen 240 is information obtained from the substrate processing apparatus 2 in real time, and the comparison parameter information on the second screen 300 is information pre-stored for comparison. Thus, the parameter information on the first screen 240 and the comparison parameter information on the second screen 300 can be compared, so that the state of the apparatus can be easily understood.

[0092] In addition, the display processing unit 12A may be capable of setting a plurality of permissions for the device information, and setting the permissions for reading or operating the device information for each of the permissions set. It should be noted that, as an example, the permissions mentioned here are set for the customer's supervisor, the customer's person in charge, the person in charge of the device manufacturer, etc. For example, it is set that only the customer's supervisor and the customer's person in charge can read, and the person in charge of the device manufacturer cannot read, so that the person in charge of the device manufacturer cannot read parameter information that only the customer can know. By making it possible to read or operate the device information according to the permissions, it is possible to perform appropriate information management according to the permissions.

[0093] Fig. 8A and Figure 8B This is an enlarged view of another example of the second screen 300 displayed on the first screen 240 .

[0094] Alternatively, the display processing unit 12A can add new information to the related information displayed on the second screen 300. The addition of new information can be performed, for example, by pressing the text button 304. The new information referred to here is, for example, text information or information that prompts attention. Specifically, Fig. 8A and Figure 8B As shown in the figure, as an example of information to draw attention, a surrounding line 310 is added, or as an example of text information, a remark 311 is added. The information to draw attention may be information other than the surrounding line 310, for example, a circle, an underline, a check mark, a marking, etc. By adding the surrounding line 310 and the remark 311 to the captured image P1 as related information, the previous state can be easily grasped when the captured image P1 is read next time.

[0095] In addition, the related information displayed on the second screen 300 may be information other than images, and may be text information. The second screen 300 can be used as a text message to the user (operator), so the work efficiency can be improved.

[0096] Fig. 9 This is a front view showing another example of a state in which a plurality of second screens 300A and 300B are displayed on the first screen 240 . Fig. 9 The first screen 240 shown is a screen displayed by selecting the "alarm" button of the guide panel 241 and further selecting the "monitoring data" tab.

[0097] Fig. 9In the embodiment of the present invention, a monitoring data list 250 is displayed on the first screen 240. The monitoring data list 250 includes an information button 251. When the information button 251 is pressed, the second screen 300A is displayed on the first screen 240. The second screen 300A includes a moving button 320 (as an example of a button) that receives an operation by a touch of a user and instructs the movement of the second screen 300A. The moving button 320 is provided at the top, bottom, left, and right of the second screen 300A, and can move the second screen 300A up, down, left, and right. The moving button 320 can receive an operation based on a touch and move the second screen 300A even when the user is wearing gloves.

[0098] The associated information of the monitoring data list 250 is displayed on the second screen 300B. The associated information displayed on the second screen 300B is monitoring data showing the operating status of the substrate processing device 2. In this case, the first screen 240 can be edited while viewing the monitoring data. The second screen 300B includes a move button 320 (as an example of a button) that accepts an operation based on a touch of the user to indicate the movement of the second screen 300B, similarly to the second screen 300A. The move button 320 is provided on the top, bottom, left, and right of the second screen 300B, and can move the second screen 300B up, down, left, and right. The move button 320 can accept an operation based on touch to move the second screen 300B even when the user is wearing gloves.

[0099] The monitoring data list 250 of the first screen 240 displays the name of the monitoring data indicating the operating status of the substrate processing device 2, that is, the monitoring data name and a plurality of items related to the monitoring data name. "aa01" to "aa11" in the monitoring data list 250 are examples of monitoring data names. In addition, the monitoring data name and a part of the plurality of items are displayed on the second screen 300B. There is a case where all the data cannot be displayed in the monitoring data list 250 of the first screen 240 due to the screen size. Fig. 9 In the example of , the monitoring data is, for example, "aa01" to "aa40", but only "aa01" to "aa11" can be displayed in the monitoring data list 250 of the first screen 240. In contrast, all the monitoring data names "aa01" to "aa40" are displayed on the second screen 300B, but a part of the multiple items in the monitoring data list 250 (here, the item "Data") is selected and displayed. In this way, the monitoring data names and part of the items that cannot be fully displayed on the first screen 240 can be displayed on the second screen 300B for editing.

[0100] In addition, only a list of monitoring data names may be displayed on the second screen 300B. That is, in this case, a plurality of items included in the monitoring data list 250 are not displayed on the second screen 300B. Thus, a list of monitoring data names that cannot be fully displayed on the first screen 240 can be displayed on the second screen 300B for editing. In addition, the items displayed on the second screen 300B may be appropriately selected by the user. In this way, only information that meets the user's purpose can be displayed, and the desired information can be easily grasped.

[0101] Next, refer to Fig.10 The operation of the substrate processing apparatus 2 according to the present embodiment will be described.

[0102] Fig.10 This is a flowchart showing an example of the flow of screen display processing in this embodiment.

[0103] exist Fig.10 In step S101, as an example, CPU 12 causes the above Figure 5 The first screen 240 shown is displayed on the display unit 24, waiting for user input.

[0104] In step S102, the CPU 12 determines whether a screen transition button (for example, various buttons arranged on the guide panel 241) is pressed for the first screen 240. If it is determined that the screen transition button is pressed (in the case of positive determination), the process moves to step S103, and if it is determined that the screen transition button is not pressed (in the case of negative determination), the process moves to step S104.

[0105] In step S103 , the CPU 12 changes the screen to the screen corresponding to the screen transition button pressed in step S102 , returns to step S101 , and repeats the process.

[0106] On the other hand, in step S104, CPU 12 determines whether the screenshot button (e.g., Sc button 243A) is pressed. If it is determined that the screenshot button is not pressed (negative determination), the process returns to step S101 and repeats the process. If it is determined that the screenshot button is pressed (positive determination), the process proceeds to step S105.

[0107] In step S105, as an example, the CPU 12 Figure 5 At least a portion of the device information displayed on the first screen 240 is converted into image data.

[0108] In step S106, as an example, the CPU 12 performs the above Figure 6As shown, the image data converted in step S105 is displayed on the second screens 300A and 300B, and the second screens 300A and 300B are displayed on the first screen 240 .

[0109] In step S107, as an example, the CPU 12 waits for the user to respond to the above Figure 7 Input of the second screen 300 shown.

[0110] In step S108, as an example, the CPU 12 determines whether Figure 7 As shown in FIG. 1 , a zoom-in / zoom-out button (e.g., zoom-out button 302, zoom-in button 303) is pressed for the captured image P1 of the second screen 300. If it is determined that the zoom-in / zoom-out button is pressed (affirmative determination), the process proceeds to step S109, and if it is determined that the zoom-in / zoom-out button is not pressed (negative determination), the process proceeds to step S110.

[0111] In step S109 , the CPU 12 enlarges or reduces the captured image P1 , returns to step S107 , and repeats the process.

[0112] On the other hand, in step S110, the CPU 12 determines whether a text adding button (for example, the text button 304) is pressed for the captured image P1 of the second screen 300. If it is determined that the text adding button is pressed (in the case of affirmative determination), the process moves to step S111, and if it is determined that the text adding button is not pressed (in the case of negative determination), the process moves to step S112.

[0113] In step S111, as an example, the CPU 12 Fig. 8A and Figure 8B As shown, text (for example, comment 311) is added to the captured image P1, and the process returns to step S107 and repeats the process.

[0114] On the other hand, in step S112, as an example, the CPU 12 determines whether Fig. 9 As shown in FIG. 1 , the second screen moving button (for example, moving button 320) is pressed for the second screen 300A or the second screen 300B. If it is determined that the second screen moving button is pressed (in the case of positive determination), the process proceeds to step S113, and if it is determined that the second screen moving button is not pressed (in the case of negative determination), the process proceeds to step S114.

[0115] In step S113 , the CPU 12 moves the second screen 300A or the second screen 300B according to the touch operation of the user, and returns to step S107 to repeat the process.

[0116] On the other hand, in step S114, as an example, the CPU 12 determines whether Fig. 9 As shown, the second screen 300A or the second screen 300B is instructed to zoom in or out. If it is determined that zoom in or out is instructed (affirmative determination), the process moves to step S115, and if it is determined that zoom in or out is not instructed (negative determination), the process moves to step S116.

[0117] In step S115 , the CPU 12 enlarges or reduces the second screen 300A or the second screen 300B, and returns to step S107 to repeat the process.

[0118] On the other hand, in step S116, as an example, the CPU 12 determines whether Figure 7 As shown in FIG. 1 , a read button (e.g., Read button 305) for instructing to read new image data from storage unit 14 is pressed. It is determined whether the read button is instructed. If it is determined that the read button is pressed (in the case of positive determination), the process moves to step S117. If it is determined that the read button is not pressed (in the case of negative determination), the process moves to step S118.

[0119] In step S117 , the CPU 12 reads new image data from the storage unit 14 in accordance with the user's operation, displays the new image data on the second screen 300 , and returns to step S107 to repeat the process.

[0120] On the other hand, in step S118, as an example, the CPU 12 determines whether Figure 7 As shown, a save button (for example, save button 306) is pressed for captured image P1 of second screen 300. If it is determined that the save button is pressed (affirmative determination), the process proceeds to step S119, and if it is determined that the save button is not pressed (negative determination), the process proceeds to step S120.

[0121] In step S119 , the CPU 12 stores the captured image P1 of the second screen 300 in the storage unit 14 , and the process proceeds to step S121 .

[0122] On the other hand, in step S120, as an example, the CPU 12 determines whether Figure 7 As shown in FIG. 1 , a close button (for example, close button 307) is pressed on the second screen 300. If it is determined that the close button is pressed (in the case of positive determination), the process moves to step S121, and if it is determined that the close button is not pressed (in the case of negative determination), the process returns to step S107 and repeats the process.

[0123] In step S121 , the CPU 12 closes the second screen image 300 and terminates the present screen display process.

[0124] Next, a method for processing a substrate using the substrate processing apparatus 2 is described. These processes are controlled by the control unit 11 according to the contents of a preset recipe. After the boat 217 carrying a plurality of substrates 200 is moved into the processing chamber 201, the processing chamber 201 is set to a predetermined pressure and temperature, and a predetermined gas is supplied into the processing chamber 201 from the gas introduction pipe 47.

[0125] The gas introduced from the gas introduction pipe 47 processes each substrate 200. For example, a film is formed on the substrate 200. After a predetermined time has passed, the gas supply from the gas introduction pipe 47 is stopped, and the processing of the substrate is completed. After the substrate 200 is processed, the boat 217 is unloaded from the processing chamber 201.

[0126] In addition, the present embodiment can also be set as a substrate processing method including the following steps: for the display unit 24, a step of operating the first screen 240 while the second screen 300 displaying related information is displayed on the first screen 240, and a step of moving the substrate 200 into the substrate processing device 2 on which the first screen 240 is operated.

[0127] Alternatively, a method of manufacturing a semiconductor device may be provided that includes a step of processing the substrate 200 in the processing chamber 201 included in the substrate processing apparatus 2 .

[0128] As described above, according to this embodiment, the main screen can be operated while the sub-screen (second screen) displaying the related information is displayed on the main screen (first screen). Thus, the device information of the main screen can be edited while viewing the related information of the sub-screen, thereby improving the operation efficiency on the main screen.

[0129] The above describes the substrate processing apparatus and control apparatus according to the exemplary embodiments. The embodiments may be in the form of a program for causing a computer to execute the functions of the substrate processing apparatus and the control apparatus. The embodiments may be in the form of a computer-readable non-transitory recording medium storing these programs.

[0130] In addition, the configurations of the substrate processing apparatus and the control apparatus described in the above embodiments are merely examples and may be modified according to circumstances without departing from the spirit and scope of the invention.

[0131] Furthermore, the flow of program processing described in the above-mentioned embodiment is only an example, and unnecessary steps may be deleted, new steps may be added, or the processing order may be changed without departing from the gist.

[0132] In the above embodiments, the processing of the embodiments is implemented by software configuration using a computer by executing a program, but the present invention is not limited thereto. The embodiments may also be implemented by hardware configuration, or a combination of hardware configuration and software configuration.

[0133] In the above embodiment, an example of performing a predetermined process on the surface of a substrate using a batch-type substrate processing device that processes a plurality of substrates at a time is described. The present invention is not limited to the above embodiment, and for example, it can also be suitably applied to a case where a predetermined process is performed on the surface of a substrate using a cluster-type substrate processing device that processes one or more substrates at a time. In addition, in the above embodiment, an example of performing a predetermined process on the surface of a substrate using a substrate processing device having a hot-wall type processing furnace is described. The present invention is not limited to the above embodiment, and it can also be suitably applied to a case where a predetermined process is performed on the surface of a substrate using a substrate processing device having a cold-wall type processing furnace.

[0134] Also when these substrate processing apparatuses are used, each process can be performed in the same process order and process conditions as those in the above-described embodiment, and the same effects as those in the above-described embodiment can be obtained.

Claims

1. A substrate processing device, characterized in that: A control unit is provided, which is for a display unit that displays a first screen and a second screen, and can operate the first screen while displaying the second screen that displays related information on the first screen, wherein device information used in a substrate processing device can be displayed or operated on the first screen, and the related information associated with the device information can be displayed on the second screen.

2. The substrate processing device according to claim 1, characterized in that: The apparatus further comprises an instruction unit for instructing generation of a copy image, which is an image obtained by copying the first screen. The related information is the copied image of the first screen generated in accordance with an instruction issued by the instruction unit.

3. The substrate processing device according to claim 1, characterized in that: further comprising a storage unit for storing a plurality of the related information, The control unit can perform control to read the related information from the storage unit and display the read related information on the second screen.

4. The substrate processing device according to claim 1, characterized in that: The related information is an image obtained by copying at least a partial area of ​​the first screen.

5. The substrate processing apparatus according to claim 1, wherein: The control unit may display at least one of the second screen and the related information in an enlarged or reduced manner.

6. The substrate processing device according to claim 4, characterized in that: The control unit can move the second screen on the first screen.

7. The substrate processing apparatus according to claim 1, wherein: The second screen includes a button for accepting an operation based on a touch by a user to instruct movement of the second screen.

8. The substrate processing apparatus according to claim 1, wherein: The related information is information indicating the content of an alarm related to the substrate processing apparatus or information explaining an item displayed on the first screen.

9. The substrate processing apparatus according to claim 1, wherein: The related information is information indicating the contents of a plurality of alarms related to the substrate processing apparatus, or information describing a plurality of items displayed on the first screen. The control unit can operate the first screen in a state where the plurality of second screens displaying information indicating the content of the alarm or the plurality of second screens displaying information explaining the items displayed on the first screen are displayed on the first screen.

10. The substrate processing apparatus according to claim 8, wherein: The information indicating the content of the alarm is information related to troubleshooting set for each of the alarms or for each of the information describing the items.

11. The substrate processing apparatus according to claim 1, wherein: The recipe information defining the processing conditions of the substrate is displayed on the first screen. The associated information is sub-recipe information or main recipe information linked to the recipe information.

12. The substrate processing apparatus according to claim 1, wherein: displaying parameter information of the substrate processing apparatus on the first screen, Comparative parameter information to be compared with the parameter information can be displayed on the second screen.

13. The substrate processing apparatus according to claim 1, wherein: The control unit can set a plurality of permissions for the device information, and set a reading or operation permission for the device information for each of the set permissions.

14. The substrate processing apparatus according to claim 1, wherein: The control unit can add new information to the related information displayed on the second screen.

15. The substrate processing apparatus according to claim 14, wherein: The new information is text information or attention-provoking information.

16. The substrate processing apparatus according to claim 1, wherein: The related information displayed on the second screen is text information.

17. The substrate processing apparatus according to claim 1, wherein: The related information is monitoring data indicating an operating status of the substrate processing apparatus.

18. The substrate processing apparatus according to claim 1, wherein: A monitoring data name and a plurality of items related to the monitoring data name are displayed on the first screen, wherein the monitoring data name is a name of monitoring data indicating an operating status of the substrate processing apparatus, The monitoring data name and a part of the plurality of items are displayed on the second screen.

19. The substrate processing apparatus according to claim 1, wherein: A monitoring data name and a plurality of items related to the monitoring data name are displayed on the first screen, wherein the monitoring data name is a name of monitoring data indicating an operating status of the substrate processing apparatus, A list of the monitoring data names is displayed on the second screen.

20. A substrate processing method, characterized in that: Including the following processes: For a display unit that displays a first screen and a second screen, the first screen is operated while the second screen that displays associated information is displayed on the first screen, wherein device information used in a substrate processing device can be displayed or operated on the first screen, and the associated information associated with the device information can be displayed on the second screen; and A substrate is carried into the substrate processing apparatus operated on the first screen.

21. A method for manufacturing a semiconductor device, characterized in that: The method comprises the step of processing the substrate in a processing chamber provided in a substrate processing apparatus for executing the substrate processing method according to claim 20.

22. A recording medium, which is a computer-readable recording medium and has a program recorded thereon, characterized in that: The program is for causing a substrate processing apparatus to execute each step of the substrate processing method according to claim 20.

23. A control device, characterized in that: A control unit is provided, which is for a display unit that displays a first screen and a second screen, and can operate the first screen while displaying the second screen that displays related information on the first screen, wherein device information used in a substrate processing device can be displayed or operated on the first screen, and the related information associated with the device information can be displayed on the second screen.

Images