Air floatation guide wheel device

Abstract

The invention discloses a wire cutting machine using an air floatation guide wheel device, belongs to the field of application of air floatation bearings, and solves a series of problems on a diamond wire silicon crystal bar slicing machine using a ball bearing guide wheel originally: a ball bearing and a guide wheel are easy to damage, a diamond wire is easy to break and is frequently replaced, so that the benefits during production halt are damaged, and the service life of the diamond wire silicon crystal bar slicing machine is prolonged. And the production cost is high. The invention relates to a diamond wire slicing machine using a guide wheel device of an air bearing. The air bearing guide wheel device is configured according to specific requirements of a machine tool. The ball bearing can be widely used in occasions where ball bearings need to be replaced, the service life of equipment can be prolonged, cost is reduced, and production efficiency is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of application of air bearings, and in particular relates to a diamond wire silicon crystal rod slicer using an air floating guide wheel device. Background Art

[0002] Among the numerous wire cutting machines, the diamond wire / resin wire silicon crystal rod slicer is one of them, with a line speed of up to 2400 meters per minute. It uses the high-speed reciprocating motion of the diamond wire to cut the silicon crystal into slices. From the wire barrel of the slicer to the cutting chamber, the diamond wire needs to be adjusted in direction or tension by the guide wheel. The bearings currently used for the guide wheel are all ball bearings. Driven by the diamond wire, the guide wheel itself is prone to heat and wear. In addition, the environment of the diamond wire silicon crystal slicer cutting chamber is full of water, dust, and silicon mud. Under such high-speed and harsh working conditions, the damage of the existing diamond wire guide wheel and ball bearing will cause the diamond wire to break. It takes an average of 1 hour to reconnect each time the wire is broken. The life of the ball bearing of the guide wheel is very short and needs to be replaced twice a month on average. Each replacement requires about 1 hour of downtime. The output value of the single crystal silicon cutting wire saw per hour is about 10,000 yuan, and each machine has six bearings. The average monthly loss caused by the replacement of bearings is about 60,000 yuan. Since the unit output value of the diamond wire silicon slicer is very high, the loss caused by each downtime is very large. Summary of the invention

[0003] The present invention aims to solve the problems of short life of ball bearings on wire saws such as diamond wire silicon crystal slicers using ball bearings, easy wear of guide wheels, and easy breakage of wire saws such as diamond wires, which lead to losses.

[0004] The present invention relates to an air-floating guide wheel device that can also be used on a wire cutting machine such as a diamond wire silicon crystal slicer. The air-floating guide wheel device includes a shaft system component and an air-floating shell component with a guide wheel sleeved on the shaft system component. The two components have not only radial mating surfaces, but also axial mating surfaces, and can rotate relative to each other; the guide wheel and the air-floating shell component can be made into one piece, or the guide wheel can be installed on the air-floating shell component; the air-floating shell component includes an air-floating shell and an air-floating end cover; the two shaft ends of the shaft system component respectively extend out of the end face of the air-floating shell component; the shaft system component is provided with an axis Center hole, one end of the shaft system assembly is opened with an inflation hole connected to the axis center hole, and the other end is sealed and is also the installation end of the air floating guide wheel device; in the matching section of the shaft system assembly and the air floating shell assembly, small ventilation holes radiating outward are opened along the axis center hole, so that the compressed gas entering the axis center hole from the inflation hole can flow to all matching surfaces, forming radial air floating surfaces and axial air floating surfaces with air flow films during relative rotation; exhaust grooves are opened at the intersection of the two ends of the radial air floating surface and the edge of the axial air floating surface, and exhaust holes leading to the outside are opened on the exhaust grooves, so that the air flow can be discharged from the matching surface, ensuring the suspended rotation movement of the air floating shell assembly.

[0005] In the technical scheme for specific implementation, the mounting end of the air floating guide wheel device can be set at the shaft end, or it can be connected to the shaft end separately; the inflation hole can be at any position on the shaft extending out of the air floating bearing housing, as long as it is connected to the center hole of the axis; a standard inflation connector is preferably installed on the inflation hole; the inflation connector can also be a tightening, pagoda-insertion type.

[0006] The technical solution of the optional air-floating guide wheel device is that the shaft system component is integrally machined from the central axis in the mating section with the air-floating shell component, and multiple small holes are radially radiated along the axis to ensure that the gas entering the central hole of the axis is radiated toward the air-floating mating surface.

[0007] Preferably, the shaft system assembly includes a shaft and a sleeve sleeved on the shaft, the sleeve containing multiple throttling holes, the throttling holes are connected to the center hole of the axis, and can pass the gas entering the center hole of the axis from the inflation hole to the mating surface of the air floating shell assembly, forming an air floating surface supported by a gas film, thereby becoming an air floating bearing mechanism.

[0008] Preferably, the shaft sleeve may be porous carbon, porous graphite or other porous non-metallic materials with a certain porosity, and the shaft and the shaft sleeve are fixed by interference fit or adhesive connection.

[0009] Preferably, the shaft sleeve containing multiple throttling holes is made of metal material, and the shaft sleeve and the shaft are interference fit to form a shaft system component; optionally, a throttling hole with a diameter of 0.1~0.2mm is punched on the shaft sleeve.

[0010] Regarding the application of the air-floating guide wheel device in the wire cutting machine, the original ball bearings of the wire cutting machine are directly replaced by the air-floating guide wheel device, that is, the mounting joint on the shaft system of the air-floating guide wheel device is the same as the mounting joint of the original ball bearing guide wheel device; and after the guide wheel is installed on the air-floating bearing housing, its position relative to the machine tool does not change, and the cutting machine can work normally.

[0011] A more specific wire cutting machine using an air-floating guide wheel device, wherein the mounting joint of the air-floating guide wheel device is designed according to the actual interface mode and size of the machine tool; and the size of the air-floating shell and the size of the selected guide wheel are designed according to the position of the diamond wire on the wire cutting machine. The machine tool and the guide wheel are mounted in a threaded manner, or in a rotating snap-in manner, or in other fixed mounting manners.

[0012] The wire cutting machine using the air floating guide wheel device can optionally use the air floating guide wheel device on a diamond wire / resin wire silicon rod slicing machine.

[0013] The present invention optimizes the original ball bearing guide wheel device and designs the guide wheel on a static pressure air bearing mechanism. The air bearing has the advantages of low friction, high rotation speed, and the interior of the bearing is always filled with positive pressure gas, which can prevent foreign matter from entering the interior of the bearing. The service life of the guide wheel device is extended, the comprehensive cost of replacing the guide wheel bearing and the wire saw is reduced, and the purpose of increasing the production efficiency of the enterprise is achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 A diamond wire silicon crystal rod slicer using an air floating guide wheel device Figure 2 The air floating guide wheel device is installed on the wire arrangement device of the diamond wire silicon crystal rod slicer Figure 3 Schematic diagram of the installation relationship between the air floating guide wheel device and the cutting machine Figure 4 Structural diagram of air floating guide wheel device Figure 5 Schematic diagram of the structure of the static pressure air bearing separated from the guide wheel Figure 6 Comparison chart of air floating guide wheel device replacing ball bearing guide wheel device Numbers in the above figure: 1 air flotation shell; 2 end cover of air flotation shell; 3 inflation hole at inflation joint; 4 throttling hole; 5 shaft; 6 exhaust hole; 7 exhaust groove; 8 installation end of shaft system assembly; 9 cutting line; 10 guide wheel; 11 connecting parts on cutting machine Specific embodiments

[0015] First embodiment: like Figure 1The figure shows a diamond wire cutting machine using an air floating guide wheel device; the air floating guide wheel device on the wire arrangement device of the diamond wire cutting machine is as shown in FIG. Figure 2 As shown, the installation relationship is as follows Figure 3 As shown; the structure of the air floating guide wheel device is as shown Figure 4 As shown, it includes a guide wheel 10 and Figure 5 The air bearing mechanism shown in the present embodiment is a static pressure air bearing mechanism.

[0016] In this embodiment, the guide wheel is installed on Figure 5 The air bearing mechanism shown in FIG. Figure 4 The air floating guide wheel device shown; Figure 5 The present invention shows a static pressure air-floating bearing mechanism, which includes a shaft system component that can be inflated and vented, and an air-floating shell component sleeved on the shaft system component, and there is not only a radial mating surface A between the two, but also an axial mating surface B, and the two can rotate relative to each other; the two shaft ends of the shaft system component extend out of the end surface of the air-floating shell component respectively; the shaft system component is provided with an axial center hole, one end of the shaft system component is provided with an inflation hole connected to the axial center hole, and the other end of the shaft is a sealing end, which is also the mounting end of the air-floating bearing mechanism; in the mating section between the shaft system component and the air-floating shell component 1, that is, the A surface, a small vent hole 4 radiating outward is provided along the axial center hole, so that the compressed gas entering the axial center hole from the inflation hole 3 can flow to all the mating surfaces, forming a radial air-floating surface and an axial air-floating surface with an air flow film when relatively rotating; an exhaust groove 7 is provided at the intersection of the two ends of the radial air-floating surface and the edge of the axial air-floating surface, and an exhaust hole 6 leading to the outside is provided on the exhaust groove 7, so that the air flow can be discharged from the mating surface, thereby ensuring the suspended rotation movement of the air-floating shell component.

[0017] In this embodiment, the air-floating guide wheel device uses a standard threaded joint; in practice, joints with special sizes and connection methods can also be customized as needed. In this embodiment, the dimensions of the air-floating shell assembly and the shaft system installation parts are as follows: Figure 5 As shown, of course, other connection modes can also be designed according to needs or preferences, such as plug-in type or rotation snap-in type.

[0018] The diamond wire cutting machine in this embodiment originally used a ball bearing guide wheel device; during the current implementation, the original state of the cutting machine is maintained, and the original ball bearing guide wheel device is directly replaced by an air floating guide wheel device, and the original guide wheel and its installation method and installation position are maintained; wherein, the design made is that the size and installation position of the air floating bearing housing for installing the guide wheel should maintain the original installation state in the ball bearing guide wheel device; the installation head and size are made according to the original ball bearing guide wheel device.

[0019] In this embodiment Figure 4 The installation dimensions of the air-floating shell and the guide wheel shown are based on Figure 6 The appearance and installation dimensions of the ball bearing guide wheel device shown are copied, which realizes the random replacement of the ball bearing guide wheel device without changing any dimensions of the diamond wire cutting machine. During the implementation process, the matching clearance of the air bearing surface A is controlled between 3μ and 20μ.

[0020] After repeated experiments, we overcame various problems in the trial-production process and finally obtained satisfactory results: the life of the air bearing mechanism, guide wheel, and diamond wire were greatly extended, and there was no need to replace them as frequently as the original ball bearing guide wheel device that was easily damaged.

[0021] Second embodiment: Another feasible embodiment is that the air-floating guide wheel device cannot directly replace the ball bearing guide wheel device because the position and path of the cutting line on the wire cutting machine, the size of the guide wheel, and the installation interface on the machine tool body have all changed. In this case, one of the design methods for configuring the air-floating guide wheel device for the wire cutting machine is as follows: the first step is to determine the number and position of the cutting line guide wheels according to the path and position of the cutting line relative to the machine tool body; the second step is to determine the shell size of the air-floating bearing and the position of the guide wheel after selecting the guide wheel according to the required position of the cutting line; the size of the guide wheel on the mating surface can also be designed according to the size of the air-floating bearing shell; the third step is to equip the installation structure of the air-floating guide wheel device on the machine tool body and arrange the appropriate installation size in general. This is a wire cutting machine with a customized air-floating guide wheel device.

[0022] The installation and connection methods in this embodiment, whether it is the installation connection between the guide wheel device and the wire cutting machine, or the installation connection between the guide wheel and the air bearing housing assembly, are not unique in their structural form and can be determined according to actual needs, such as thread, plug-in, and rotating buckle.

[0023] According to the above design ideas, the air flotation guide wheel device can be customized according to the actual needs of various wire cutting machines, so that the air flotation technology can be more widely used. Although the above embodiment is specifically implemented on a diamond wire / resin wire silicon rod slicer, it can of course also be used on most cutting machines with similar principles.

[0024] The present invention solves the problems pointed out in the background technology. Through the application of the air floating guide wheel device, the damage of the guide wheel, the bearing, the diamond wire, etc. is reduced, so as to save the production cost and increase the output value of the equipment.

Claims

1. An air floating guide wheel device, characterized in that: The invention comprises a shaft system component and an air-floating shell component with a guide wheel sleeved on the shaft system component. The two components have not only radial mating surfaces but also axial mating surfaces and can rotate relative to each other. The guide wheel and the air-floating shell component can be made into one piece, or the guide wheel can be installed on the air-floating shell component. The air-floating shell component comprises an air-floating shell and an air-floating end cover. The two shaft ends of the shaft system component extend out of the end faces of the air-floating shell component respectively. The shaft system component is provided with an axial center hole, and one end of the shaft system component has a hole connected to the axial center hole. The air filling hole at one end is sealed and is also the mounting end of the air floating guide wheel device; in the matching section between the shaft system assembly and the air floating shell assembly, small ventilation holes radiating outward are opened along the central hole of the axis, so that the compressed gas entering the central hole of the axis from the air filling hole can flow to all matching surfaces, forming radial air floating surfaces and axial air floating surfaces with air flow films during relative rotation; exhaust grooves are opened at the intersections of the two ends of the radial air floating surface and the edges of the axial air floating surface, and exhaust holes leading to the outside are opened on the exhaust grooves, so that the air flow can be discharged from the matching surfaces, thereby ensuring the suspended rotation movement of the air floating shell assembly.

2. The air floating guide wheel device according to claim 1, characterized in that: The mounting end of the air floating guide wheel device can be formed integrally with the shaft end, or can be separately mounted and connected to the shaft end.

3. The air floating guide wheel device according to claim 1, characterized in that: The inflation hole can be at any position on the shaft extending out of the air bearing housing to ensure communication with the center hole of the axis.

4. The air floating guide wheel device according to claim 3, characterized in that: The inflation hole can be installed with a standard inflation connector, which can be a threaded inflatable connector or a pagoda-inserted inflatable connector.

5. The air floating guide wheel device according to claim 1, characterized in that: The shaft system assembly includes a shaft and a sleeve sleeved on the shaft. The sleeve contains multiple throttling holes, which are connected to the center hole of the axis. The throttling holes can pass the gas entering the center hole of the axis from the inflation hole to the matching surface of the air floating shell assembly, forming an air floating surface supported by a gas film, thereby becoming an air floating bearing mechanism.

6. The air floating guide wheel device according to claim 5, characterized in that: The shaft sleeve is made of porous carbon, porous graphite or other porous non-metallic materials with a certain porosity, and the shaft and the shaft sleeve are fixed by interference fit or adhesive connection.

7. The air floating guide wheel device according to claim 5, characterized in that: The shaft sleeve containing a plurality of throttling holes is made of metal material, and the shaft sleeve and the shaft are interference fit to form a shaft system component.

8. A method for designing an air-floating guide wheel device as claimed in any of the above claims for a wire cutting machine: the first step is to determine the number and installation position of the guide wheels according to the path and position of the cutting wire on the cutting machine; the second step is to determine the size of the guide wheel and the air-floating shell and the position of the mating surface after determining the installation position of each air-floating guide wheel device; the size of the guide wheel on the mating surface can also be determined according to the size of the air-floating shell; the third step is to configure the installation structure and size of the air-floating guide wheel device on the machine tool body according to the actual installation interface of the machine tool; wherein, The third step and the second step should be balanced and calculated back and forth, and finally the appropriate installation dimensions should be arranged overall to obtain the appropriate configuration of the air float guide wheel device on the machine tool.

9. A wire cutting machine using an air floating guide wheel device, originally equipped with a ball bearing guide wheel device, characterized in that: According to the design method of claim 8, an air floating guide wheel device is designed that can directly replace the original ball bearing guide wheel on the wire cutting machine without changing any part of the wire cutting machine itself.

10. The wire cutting machine using the air floating guide wheel device according to claim 9, characterized in that: The cutting machine is a diamond wire / resin wire silicon rod slicer. The diameter of the mounting surface of the guide wheel on the air-floating shell is 42, the distance from the mounting surface of the shaft end on the machine tool is 16, the diameter of the shaft is 8, the sleeve on the shaft system assembly is made of metal material and has a throttling hole with a diameter of 0.1~0.2mm; the matching clearance between the metal sleeve and the air-floating shell assembly is controlled between 3μ~20μ; the pressure of the compressed gas entering the inflation hole is between 0.15Mpa~0.8Mpa.

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