Annular opening part of semiconductor etching equipment

Abstract

The invention discloses an annular opening part of semiconductor etching equipment, and aims to overcome the defects of inconvenience in replacement and poor corrosion resistance of the part in the prior art. According to the technical scheme, the split ring comprises a split ring body, a side window is formed in the side wall of the split ring body, and window limiting steps are arranged on the two sides of the side window; a nickel-plated layer is arranged on the outer ring wall of the split ring body; a sand blasting nickel-plated layer is arranged on the inner side wall of the split ring body. According to the split ring, the nickel plating layer is arranged on the outer ring wall of the split ring body, and the sand blasting nickel plating layer is arranged on the inner ring wall of the split ring body, so that the split ring body can have better corrosion resistance, and the service life of the split ring body is prolonged. Besides, by arranging the windowing limiting step at the windowing position on the side face, the split ring body can be conveniently positioned when the split ring body is installed, and therefore the functions of conveniently installing and replacing the split ring body are achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor etching equipment, and more particularly to an annular opening part of semiconductor etching equipment. Background Art

[0002] Semiconductor etching equipment is a key device for manufacturing various microscopic devices. This equipment uses a precision part with a ring opening and a side window. The material is aluminum alloy and is required to have corrosion resistance, high temperature acid and alkali resistance, etc. The side window can connect the inside and the outside.

[0003] This type of annular opening precision part is large in size, requires high precision in form and position tolerances, and has large deformation after processing. Moreover, this part is a consumable part that needs to be replaced frequently. The opening part in the prior art is extremely inconvenient to replace. Furthermore, since this part is used in an inner cavity, it is easily corroded by gas and has poor corrosion resistance.

[0004] Therefore, in order to facilitate installation, a positioning function is required to assist installation, and the product is used in the inner cavity and is easily corroded by gas, so the corrosion resistance needs to be improved. Summary of the Invention

[0005] The present invention overcomes the shortcomings of the prior art that the parts are inconvenient to replace and have poor corrosion resistance. It provides a ring-shaped opening part for semiconductor etching equipment, which is equipped with a positioning function and can be easily replaced. At the same time, a layer of nickel is plated on its surface, which can effectively improve the corrosion resistance.

[0006] In order to solve the above technical problems, the present invention adopts the following technical solution: a ring-shaped opening part of a semiconductor etching device, comprising: an open ring body, a side window is provided on the side wall of the open ring body, and window limit steps are provided on both sides of the side window; the outer ring wall of the open ring body is provided with a nickel-plated layer; the inner side wall of the open ring body is provided with a sandblasted nickel-plated layer.

[0007] The present invention provides a nickel-plated layer on the outer ring wall of the open ring body and a sandblasted nickel-plated layer on the inner ring wall of the open ring body, thereby making the open ring body have better corrosion resistance, thereby increasing the service life of the open ring body. In addition, by providing a window stop step at the side window, the open ring body can be easily positioned during installation, thereby facilitating the installation and replacement of the open ring body.

[0008] Preferably, end face locating pins are provided on the end faces on both sides of the opening of the open ring body.

[0009] The side wall of the circular arc groove is provided with an end face positioning hole adapted to the end face positioning pin. The end face positioning pin cooperates with the end face positioning hole so that when the open ring body is installed in the circular arc groove, it can play a role in positioning the open ring body.

[0010] Preferably, at least two nickel-plated hanging holes are provided on the end face of the open ring, and a line connecting the two nickel-plated hanging holes passes through the center of the open ring body.

[0011] The nickel-plated lifting hole can facilitate the lifting of the open ring body when the open ring body is nickel-plated, thereby facilitating the nickel plating of the open ring body.

[0012] Preferably, window panels parallel to each other are provided on both sides of the side window, and the window limiting steps are provided on the back sides of the two window panels.

[0013] When the split ring body is installed in the base, the window plate can fit on both sides of the window hole to play a role in limiting the position. At the same time, the window limit step can also play a positioning effect, which can prevent the split ring body from rotating in the mounting seat hole of the base.

[0014] Preferably, the inner diameter of the open ring is D1, D1≧370 mm; the outer diameter of the open ring is D2, D2≧390 mm.

[0015] It can better adapt to the arc groove of the installation bottom hole.

[0016] Preferably, the angle corresponding to the opening on the open ring body is A, and A≧60°.

[0017] The open ring body can be conveniently installed in the mounting seat hole.

[0018] Preferably, it also includes a base adapted to the cover opening ring body, a mounting seat hole is provided in the middle of the base, and a window hole is provided through the side wall of the mounting seat hole; an arc groove corresponding to the window hole is provided on the inner side wall of the mounting seat hole, and the opening ring body is installed in the arc groove.

[0019] When installing the open ring body, the open ring body can be installed and removed through the window hole.

[0020] Preferably, a limiting convex ball is provided on the end face of the window-opening limiting step, and limiting circular grooves adapted to the limiting convex ball are provided on both sides of the window hole.

[0021] When the split ring body is installed in the mounting seat hole, the limiting circular groove and the limiting convex ball cooperate with each other to achieve a good positioning effect, making the installation of the split ring body more convenient. At the same time, the positioning function of the end face positioning pin is eliminated, the processing of the end face positioning pin is eliminated, and the processing cost of the split ring body is reduced.

[0022] Preferably, a limiting protrusion is provided on the end face of the window limiting step, and limiting grooves cooperating with the limiting protrusion are provided on the two perforations; a first channel is provided in the base, one end of the first channel is connected to the limiting groove, and the other end of the first channel passes through the side wall of the open ring body; when the open ring body needs to be taken out, the first push rod passes through the first channel to push the limiting protrusion, the limiting protrusion disengages from the limiting groove, and the open ring body can be taken out.

[0023] The limiting groove can fix the limiting protrusion. Even if the open ring body is subjected to a large rotational force, the limiting protrusion will not fall out of the limiting groove. However, this undoubtedly increases the complexity of removing the open ring body.

[0024] The first channel is provided so that when the split ring body needs to be removed from the mounting hole, the first push rod can be inserted into the first channel, so that the end of the first push rod acts on the limiting protrusion, causing the limiting protrusion to disengage from the limiting groove, and then the split ring body can be taken out. This facilitates the replacement of the split ring body.

[0025] Preferably, a second channel perpendicular to the first channel is provided in the open ring body, and a second push rod and a thrust spring for pushing the second push rod to move relative to the first channel are provided in the second channel; a waist groove is provided on the side wall of the first push rod; when the first push rod is inserted into the first channel and pushes the limiting protrusion, the second push rod is inserted into the waist groove to limit the first push rod.

[0026] During use, when the first push rod is inserted into the first channel and pushes the limiting protrusion, the second push rod is inserted into the waist groove to limit the first push rod, so that the first push rod can always contact the limiting protrusion, making it easy to remove the open ring body. After that, the first push rod can be pulled out.

[0027] Compared with the prior art, the present invention has the following advantages: by providing a nickel-plated layer on the outer ring wall of the split ring body and a sandblasted nickel-plated layer on the inner ring wall of the split ring body, the split ring body has better corrosion resistance, thereby increasing the service life of the split ring body. In addition, by providing a window stop step at the side window, the split ring body can be easily positioned during installation, thereby facilitating the installation and replacement of the split ring body. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a three-dimensional structural diagram of the open ring body of the present invention.

[0029] Figure 2 It is a three-dimensional structural diagram of the open ring body of the present invention from another angle.

[0030] Figure 3It is a top view of the present invention.

[0031] Figure 4 yes Figure 3 Cross-sectional view along the BB direction.

[0032] Figure 5 It is a bottom view of the present invention.

[0033] Figure 6 It is a side view of the present invention.

[0034] Figure 7 It is a three-dimensional structural diagram of the base of the present invention.

[0035] Figure 8 It is a cross-sectional view of the open ring body of the present invention when it is matched with the base.

[0036] Figure 9 It is a cross-sectional view of the split ring body and the base in another embodiment of the present invention.

[0037] In the figure: 1, open ring body, 11, side window, 111, window limit step, 12, nickel plating, 13, sandblasted nickel plating, 14, end face positioning pin, 15, window plate, 16, reinforcing rib, 17, nickel-plated lifting hole, 18, limit ball, 19, limit block; 2. Base, 21. Mounting seat hole, 22. Window hole, 221. Limiting circular groove, 222. Limiting groove, 23. Arc groove, 24. First channel, 25. Second channel, 26. Thrust spring; 3. First ejector rod; 4. Second push rod, 41. Waist groove. DETAILED DESCRIPTION

[0038] The technical solution of the present invention is further described in detail below through specific embodiments and in conjunction with the accompanying drawings: Example 1: Reference Figures 1 to 7 As shown, a ring-shaped opening part of a semiconductor etching device includes: an open ring body 1, a side window 11 is provided on the side wall of the open ring body 1, and window limit steps 111 are provided on both sides of the side window 11; the outer ring wall of the open ring body 1 is provided with a nickel-plated layer 12; the inner side wall of the open ring body 1 is provided with a sandblasted nickel-plated layer 13.

[0039] The inner diameter of the open ring is D1, D1≧370mm; the outer diameter of the open ring is D2, D2≧390mm.

[0040] The side window 11 has a length not greater than 325 mm and a width not greater than 30 mm.

[0041] The open ring body 1 is adapted to the base 2, and a mounting seat hole 21 is provided in the middle of the base 2, and a window hole 22 is provided on the side wall of the mounting seat hole 21; an arc groove 23 corresponding to the window hole 22 is provided on the inner side wall of the mounting seat hole 21, and the open ring body 1 is installed in the arc groove 23.

[0042] During use, the outer ring wall of the split ring body 1 contacts the inner wall of the mounting seat hole 21 of the base 2. Because this easily contacts the inner wall of the mounting seat hole 21 of the base 2, the outer ring wall of the split ring body 1 is nickel-plated. The nickel layer must not fall off at 300°C for 24 hours. The outer ring wall of the split ring body 1 must maintain a tolerance of within 0.05mm.

[0043] The inner ring wall of the open ring body 1 is rounded to prevent exposure of the base material at sharp corners. In the etching equipment, since the open ring body 1 is installed in the base 2, the inner ring wall of the open ring body 1 is flush with the inner wall of the mounting seat hole 21 of the base 2, and the tolerance between the inner wall of the open ring body 1 and the inner cavity of the base 2 is controlled within 0.05mm. Because the inner ring wall of the open ring body 1 is easily contaminated and corroded, the inner ring wall of the open ring is roughened by sandblasting to ensure that the roughness of the inner ring wall of the open ring meets Ra5.0 to 7.0, thereby increasing the bonding strength between the nickel layer and the inner ring wall of the open ring. The thickness of the nickel layer is 20 to 30μm.

[0044] The angle corresponding to the opening on the open ring body 1 is A, and A≧60°. An angle greater than 60° enables the open ring body 1 to be easily installed in the mounting seat hole 21.

[0045] End face locating pins 14 are provided on the end faces of the opening on either side of the split ring body 1. These two end face locating pins 14 protrude from the end faces of the split ring body 1, and end face locating holes are provided on the sidewalls of the arc groove 23 to accommodate the end face locating pins 14. The end face locating pins 14 cooperate with the end face locating holes to position the split ring body 1 when installed in the arc groove 23.

[0046] At least two nickel-plated hanging holes 17 are provided on the end surface of the split ring, wherein the line connecting the two nickel-plated hanging holes 17 passes through the center of the split ring body 1. The nickel-plated hanging holes 17 facilitate hoisting the split ring body 1 when nickel plating the split ring body 1, thereby facilitating the nickel plating of the split ring body 1.

[0047] Parallel window panels 15 are provided on either side of the side window opening 11, with window-limiting steps 111 positioned on the backsides of the two window panels 15. When the open ring body 1 is installed within the base 2, the window panels 15 fit closely against the sides of the window opening 22, acting as a position limiter. The window-limiting steps 111 also serve as a positioning mechanism, preventing the open ring body 1 from rotating within the mounting hole 21 of the base 2.

[0048] In addition, reinforcing ribs 16 are provided along the edges of the side windows 11 to improve the overall strength. In this embodiment, the thickness of the reinforcing ribs 16 is not greater than 30 mm.

[0049] Before processing, the open ring body 1 is made of a complete ring by setting an opening on the side of the ring. Before opening, the ring needs to be tempered at high temperature and supplemented with low temperature to ensure the accuracy of the part when used.

[0050] In the present application, by providing a nickel-plated layer 12 on the outer ring wall of the open ring body 1 and providing a sandblasted nickel-plated layer 13 on the inner ring wall of the open ring body 1, the open ring body 1 can have better corrosion resistance, thereby improving the service life of the open ring body 1. In addition, by providing a window stop step 111 at the side window 11, the positioning of the open ring body 1 can be facilitated when installing the open ring body 1, thereby achieving the function of facilitating the installation and replacement of the open ring body 1.

[0051] Example 2: Reference Figures 1 to 7 As shown, a ring-shaped opening part of a semiconductor etching device includes: an open ring body 1, a side window 11 is provided on the side wall of the open ring body 1, and window limit steps 111 are provided on both sides of the side window 11; the outer ring wall of the open ring body 1 is provided with a nickel-plated layer 12; the inner side wall of the open ring body 1 is provided with a sandblasted nickel-plated layer 13.

[0052] The inner diameter of the open ring is D1, D1≧370mm; the outer diameter of the open ring is D2, D2≧390mm.

[0053] The side window 11 has a length not greater than 325 mm and a width not greater than 30 mm.

[0054] The open ring body 1 is adapted to the base 2, and a mounting seat hole 21 is provided in the middle of the base 2, and a window hole 22 is provided on the side wall of the mounting seat hole 21; an arc groove 23 corresponding to the window hole 22 is provided on the inner side wall of the mounting seat hole 21, and the open ring body 1 is installed in the arc groove 23.

[0055] During use, the outer ring wall of the split ring body 1 contacts the inner wall of the mounting seat hole 21 of the base 2. Because this easily contacts the inner wall of the mounting seat hole 21 of the base 2, the outer ring wall of the split ring body 1 is nickel-plated. The nickel layer must not fall off at 300°C for 24 hours. The outer ring wall of the split ring body 1 must maintain a tolerance of within 0.05mm.

[0056] The inner ring wall of the open ring body 1 is rounded to prevent exposure of the base material at sharp corners. In the etching equipment, since the open ring body 1 is installed in the base 2, the inner ring wall of the open ring body 1 is flush with the inner wall of the mounting seat hole 21 of the base 2, and the tolerance between the inner wall of the open ring body 1 and the inner cavity of the base 2 is controlled within 0.05mm. Because the inner ring wall of the open ring body 1 is easily contaminated and corroded, the inner ring wall of the open ring is roughened by sandblasting to ensure that the roughness of the inner ring wall of the open ring meets Ra5.0 to 7.0, thereby increasing the bonding strength between the nickel layer and the inner ring wall of the open ring. The thickness of the nickel layer is 20 to 30μm.

[0057] The angle corresponding to the opening on the open ring body 1 is A, and A≧60°. An angle greater than 60° enables the open ring body 1 to be easily installed in the mounting seat hole 21.

[0058] End face locating pins 14 are provided on the end faces of the opening on either side of the split ring body 1. These two end face locating pins 14 protrude from the end faces of the split ring body 1, and end face locating holes are provided on the sidewalls of the arc groove 23 to accommodate the end face locating pins 14. The end face locating pins 14 cooperate with the end face locating holes to position the split ring body 1 when installed in the arc groove 23.

[0059] Parallel window panels 15 are provided on either side of the side window opening 11, with window-limiting steps 111 positioned on the backsides of the two window panels 15. When the open ring body 1 is installed within the base 2, the window panels 15 fit closely against the sides of the window opening 22, acting as a position limiter. The window-limiting steps 111 also serve as a positioning mechanism, preventing the open ring body 1 from rotating within the mounting hole 21 of the base 2.

[0060] In addition, reinforcing ribs 16 are provided along the edges of the side windows 11 to improve the overall strength. In this embodiment, the thickness of the reinforcing ribs 16 is not greater than 30 mm.

[0061] Before processing, the open ring body 1 is made of a complete ring by setting an opening on the side of the ring. Before opening, the ring needs to be tempered at high temperature and supplemented with low temperature to ensure the accuracy of the part when used.

[0062] Reference Figures 1 to 8As shown, this embodiment has a similar structure to that of Example 1, differing in that a limiting protrusion 18 is provided on the end face of the window-limiting step 111, and a limiting circular groove 221 is provided on either side of the window opening 22, adapted to the limiting protrusion 18. When the open ring body 1 is installed in the mounting seat 21, the limiting circular groove 221 and the limiting protrusion 18 cooperate to provide a good positioning effect, thereby facilitating the installation of the open ring body 1. This also eliminates the need for end face locating pins 14 for positioning, eliminating the need for machining the end face locating pins 14 and reducing the manufacturing cost of the open ring body 1.

[0063] In the present application, by providing a nickel-plated layer 12 on the outer ring wall of the open ring body 1 and providing a sandblasted nickel-plated layer 13 on the inner ring wall of the open ring body 1, the open ring body 1 can have better corrosion resistance, thereby improving the service life of the open ring body 1. In addition, by providing a window stop step 111 at the side window 11, the positioning of the open ring body 1 can be facilitated when installing the open ring body 1, thereby achieving the function of facilitating the installation and replacement of the open ring body 1.

[0064] Example 3: Reference Figures 1 to 7 、 Figure 9 As shown, a ring-shaped opening part of a semiconductor etching device includes: an open ring body 1, a side window 11 is provided on the side wall of the open ring body 1, and window limit steps 111 are provided on both sides of the side window 11; the outer ring wall of the open ring body 1 is provided with a nickel-plated layer 12; the inner side wall of the open ring body 1 is provided with a sandblasted nickel-plated layer 13.

[0065] The inner diameter of the open ring is D1, D1≧370mm; the outer diameter of the open ring is D2, D2≧390mm.

[0066] The side window 11 has a length not greater than 325 mm and a width not greater than 30 mm.

[0067] The open ring body 1 is adapted to the base 2, and a mounting seat hole 21 is provided in the middle of the base 2, and a window hole 22 is provided on the side wall of the mounting seat hole 21; an arc groove 23 corresponding to the window hole 22 is provided on the inner side wall of the mounting seat hole 21, and the open ring body 1 is installed in the arc groove 23.

[0068] During use, the outer ring wall of the split ring body 1 contacts the inner wall of the mounting seat hole 21 of the base 2. Because this easily contacts the inner wall of the mounting seat hole 21 of the base 2, the outer ring wall of the split ring body 1 is nickel-plated. The nickel layer must not fall off at 300°C for 24 hours. The outer ring wall of the split ring body 1 must maintain a tolerance of within 0.05mm.

[0069] The inner ring wall of the open ring body 1 is rounded to prevent exposure of the base material at sharp corners. In the etching equipment, since the open ring body 1 is installed in the base 2, the inner ring wall of the open ring body 1 is flush with the inner wall of the mounting seat hole 21 of the base 2, and the tolerance between the inner wall of the open ring body 1 and the inner cavity of the base 2 is controlled within 0.05mm. Because the inner ring wall of the open ring body 1 is easily contaminated and corroded, the inner ring wall of the open ring is roughened by sandblasting to ensure that the roughness of the inner ring wall of the open ring meets Ra5.0 to 7.0, thereby increasing the bonding strength between the nickel layer and the inner ring wall of the open ring. The thickness of the nickel layer is 20 to 30μm.

[0070] The angle corresponding to the opening on the open ring body 1 is A, and A≧60°. An angle greater than 60° enables the open ring body 1 to be easily installed in the mounting seat hole 21.

[0071] End face locating pins 14 are provided on the end faces of the opening on either side of the split ring body 1. These two end face locating pins 14 protrude from the end faces of the split ring body 1, and end face locating holes are provided on the sidewalls of the arc groove 23 to accommodate the end face locating pins 14. The end face locating pins 14 cooperate with the end face locating holes to position the split ring body 1 when installed in the arc groove 23.

[0072] Parallel window panels 15 are provided on either side of the side window opening 11, with window-limiting steps 111 positioned on the backsides of the two window panels 15. When the open ring body 1 is installed within the base 2, the window panels 15 fit closely against the sides of the window opening 22, acting as a position limiter. The window-limiting steps 111 also serve as a positioning mechanism, preventing the open ring body 1 from rotating within the mounting hole 21 of the base 2.

[0073] In addition, reinforcing ribs 16 are provided along the edges of the side windows 11 to improve the overall strength. In this embodiment, the thickness of the reinforcing ribs 16 is not greater than 30 mm.

[0074] Before processing, the open ring body 1 is made of a complete ring by setting an opening on the side of the ring. Before opening, the ring needs to be tempered at high temperature and supplemented with low temperature to ensure the accuracy of the part when used.

[0075] Reference Figures 1 to 8As shown, this embodiment has a similar structure to that of Example 1, differing in that a limiting protrusion 18 is provided on the end face of the window-limiting step 111, and a limiting circular groove 221 is provided on either side of the window opening 22, adapted to the limiting protrusion 18. When the open ring body 1 is installed in the mounting seat 21, the limiting circular groove 221 and the limiting protrusion 18 cooperate to provide a good positioning effect, thereby facilitating the installation of the open ring body 1. This also eliminates the need for end face locating pins 14 for positioning, eliminating the need for machining the end face locating pins 14 and reducing the manufacturing cost of the open ring body 1.

[0076] Reference Figures 1 to 8 、 Figure 9 As shown, a limiting protrusion 19 is provided on the end face of the window limiting step 111, and a limiting groove 222 cooperating with the limiting protrusion 19 is provided on the two perforations; a first channel 24 is provided in the base 2, one end of the first channel 24 is connected to the limiting groove 222, and the other end of the first channel 24 passes through the side wall of the open ring body 1; when the open ring body 1 needs to be taken out, the first push rod 3 passes through the first channel 24 to push the limiting protrusion 19, and the limiting protrusion 19 is disengaged from the limiting groove 222, and the open ring body 1 can be taken out.

[0077] This embodiment has a similar structure to that of embodiment 3, except that a limiting protrusion 19 is provided on the end surface of the window-opening limiting step 111. The limiting protrusion 18 and the limiting circular groove 221 cooperate to achieve a positioning function primarily by utilizing the elastic force of the open ring body 1 itself. This allows the limiting protrusion 18 to be directly disengaged from the limiting circular groove 221 when a large rotational force is applied to the open ring body 1.

[0078] Therefore, to ensure a more stable installation of the split ring body 1 within the mounting seat hole 21, the retaining protrusion 19 is adapted to fit within the retaining groove 222. Once the retaining protrusion 19 and the retaining groove 222 are engaged, the retaining groove 222 secures the retaining protrusion 19. This prevents the retaining protrusion 19 from dislodging from the retaining groove 222, even when the split ring body 1 is subjected to significant rotational force. However, this undoubtedly complicates the removal of the split ring body 1.

[0079] Therefore, the present application provides a first channel 24 so that when the split ring body 1 needs to be removed from the mounting seat hole 21, the first push rod 3 can be inserted into the first channel 24, so that the end of the first push rod 3 acts on the limiting protrusion 19, so that the limiting protrusion 19 is disengaged from the limiting groove 222, and then the split ring body 1 can be taken out. This facilitates the replacement of the split ring body 1.

[0080] In the present application, by providing a nickel-plated layer 12 on the outer ring wall of the open ring body 1 and providing a sandblasted nickel-plated layer 13 on the inner ring wall of the open ring body 1, the open ring body 1 can have better corrosion resistance, thereby improving the service life of the open ring body 1. In addition, by providing a window stop step 111 at the side window 11, the positioning of the open ring body 1 can be facilitated when installing the open ring body 1, thereby achieving the function of facilitating the installation and replacement of the open ring body 1.

[0081] Example 4: Reference Figures 1 to 7 、 Figure 9 As shown, a ring-shaped opening part of a semiconductor etching device includes: an open ring body 1, a side window 11 is provided on the side wall of the open ring body 1, and window limit steps 111 are provided on both sides of the side window 11; the outer ring wall of the open ring body 1 is provided with a nickel-plated layer 12; the inner side wall of the open ring body 1 is provided with a sandblasted nickel-plated layer 13.

[0082] The inner diameter of the open ring is D1, D1≧370mm; the outer diameter of the open ring is D2, D2≧390mm.

[0083] The side window 11 has a length not greater than 325 mm and a width not greater than 30 mm.

[0084] The open ring body 1 is adapted to the base 2, and a mounting seat hole 21 is provided in the middle of the base 2, and a window hole 22 is provided on the side wall of the mounting seat hole 21; an arc groove 23 corresponding to the window hole 22 is provided on the inner side wall of the mounting seat hole 21, and the open ring body 1 is installed in the arc groove 23.

[0085] During use, the outer ring wall of the split ring body 1 contacts the inner wall of the mounting seat hole 21 of the base 2. Because this easily contacts the inner wall of the mounting seat hole 21 of the base 2, the outer ring wall of the split ring body 1 is nickel-plated. The nickel layer must not fall off at 300°C for 24 hours. The outer ring wall of the split ring body 1 must maintain a tolerance of within 0.05mm.

[0086] The inner ring wall of the open ring body 1 is rounded to prevent exposure of the base material at sharp corners. In the etching equipment, since the open ring body 1 is installed in the base 2, the inner ring wall of the open ring body 1 is flush with the inner wall of the mounting seat hole 21 of the base 2, and the tolerance between the inner wall of the open ring body 1 and the inner cavity of the base 2 is controlled within 0.05mm. Because the inner ring wall of the open ring body 1 is easily contaminated and corroded, the inner ring wall of the open ring is roughened by sandblasting to ensure that the roughness of the inner ring wall of the open ring meets Ra5.0 to 7.0, thereby increasing the bonding strength between the nickel layer and the inner ring wall of the open ring. The thickness of the nickel layer is 20 to 30μm.

[0087] The angle corresponding to the opening on the open ring body 1 is A, and A≧60°. An angle greater than 60° enables the open ring body 1 to be easily installed in the mounting seat hole 21.

[0088] End face locating pins 14 are provided on the end faces of the opening on either side of the split ring body 1. These two end face locating pins 14 protrude from the end faces of the split ring body 1, and end face locating holes are provided on the sidewalls of the arc groove 23 to accommodate the end face locating pins 14. The end face locating pins 14 cooperate with the end face locating holes to position the split ring body 1 when installed in the arc groove 23.

[0089] Parallel window panels 15 are provided on either side of the side window opening 11, with window-limiting steps 111 positioned on the backsides of the two window panels 15. When the open ring body 1 is installed within the base 2, the window panels 15 fit closely against the sides of the window opening 22, acting as a position limiter. The window-limiting steps 111 also serve as a positioning mechanism, preventing the open ring body 1 from rotating within the mounting hole 21 of the base 2.

[0090] In addition, reinforcing ribs 16 are provided along the edges of the side windows 11 to improve the overall strength. In this embodiment, the thickness of the reinforcing ribs 16 is not greater than 30 mm.

[0091] Before processing, the open ring body 1 is made of a complete ring by setting an opening on the side of the ring. Before opening, the ring needs to be tempered at high temperature and supplemented with low temperature to ensure the accuracy of the part when used.

[0092] Reference Figures 1 to 8 As shown, this embodiment has a similar structure to that of Example 1, differing in that a limiting protrusion 18 is provided on the end face of the window-limiting step 111, and a limiting circular groove 221 is provided on either side of the window opening 22, adapted to the limiting protrusion 18. When the open ring body 1 is installed in the mounting seat 21, the limiting circular groove 221 and the limiting protrusion 18 cooperate to provide a good positioning effect, thereby facilitating the installation of the open ring body 1. This also eliminates the need for end face locating pins 14 for positioning, eliminating the need for machining the end face locating pins 14 and reducing the manufacturing cost of the open ring body 1.

[0093] Reference Figures 1 to 8 、 Figure 9As shown, a limiting protrusion 19 is provided on the end face of the window limiting step 111, and a limiting groove 222 cooperating with the limiting protrusion 19 is provided on the two perforations; a first channel 24 is provided in the base 2, one end of the first channel 24 is connected to the limiting groove 222, and the other end of the first channel 24 passes through the side wall of the open ring body 1; when the open ring body 1 needs to be taken out, the first push rod 3 passes through the first channel 24 to push the limiting protrusion 19, and the limiting protrusion 19 is disengaged from the limiting groove 222, and the open ring body 1 can be taken out.

[0094] This embodiment has a similar structure to that of embodiment 3, except that a limiting protrusion 19 is provided on the end surface of the window-opening limiting step 111. The limiting protrusion 18 and the limiting circular groove 221 cooperate to achieve a positioning function primarily by utilizing the elastic force of the open ring body 1 itself. This allows the limiting protrusion 18 to be directly disengaged from the limiting circular groove 221 when a large rotational force is applied to the open ring body 1.

[0095] Therefore, to ensure a more stable installation of the split ring body 1 within the mounting seat hole 21, the retaining protrusion 19 is adapted to fit within the retaining groove 222. Once the retaining protrusion 19 and the retaining groove 222 are engaged, the retaining groove 222 secures the retaining protrusion 19. This prevents the retaining protrusion 19 from dislodging from the retaining groove 222, even when the split ring body 1 is subjected to significant rotational force. However, this undoubtedly complicates the removal of the split ring body 1.

[0096] Therefore, the present application provides a first channel 24 so that when the split ring body 1 needs to be removed from the mounting seat hole 21, the first push rod 3 can be inserted into the first channel 24, so that the end of the first push rod 3 acts on the limiting protrusion 19, so that the limiting protrusion 19 is disengaged from the limiting groove 222, and then the split ring body 1 can be taken out. This facilitates the replacement of the split ring body 1.

[0097] In Example 3, when using the first push rod 3 to remove the open ring body 1, the first push rod 3 must be kept pressed against the limiting protrusion 19 to remove the open ring body 1. If the first push rod 3 is not pressed against the limiting protrusion 19, the limiting protrusion 19 will return to the limiting groove 222 due to the self-resetting effect of the open ring body 1.

[0098] Therefore, in order to make it more convenient to remove the open ring body 1 through the first push rod 3, a second channel 25 perpendicular to the first channel 24 is provided in the open ring body 1, and a second push rod 4 and a thrust spring 26 for pushing the second push rod 4 to move relative to the first channel 24 are provided in the second channel 25; the side wall of the first push rod 3 is provided with a waist groove 41.

[0099] During use, when the first push rod 3 is inserted into the first channel 24 and pushes the limiting protrusion 19, the second push rod 4 is inserted into the waist groove 41 to limit the first push rod 3, so that the first push rod 3 can always contact the limiting protrusion 19, making it easy to remove the open ring body 1. After that, the first push rod 3 can be pulled out.

[0100] In the present application, by providing a nickel-plated layer 12 on the outer ring wall of the open ring body 1 and providing a sandblasted nickel-plated layer 13 on the inner ring wall of the open ring body 1, the open ring body 1 can have better corrosion resistance, thereby improving the service life of the open ring body 1. In addition, by providing a window stop step 111 at the side window 11, the positioning of the open ring body 1 can be facilitated when installing the open ring body 1, thereby achieving the function of facilitating the installation and replacement of the open ring body 1.

[0101] The above-described embodiments are only preferred solutions of the present invention and are not intended to limit the present invention in any form. Other variations and modifications are possible without exceeding the technical solutions described in the claims.

Claims

1. A circular opening part of a semiconductor etching device, characterized in that: include: The open ring body has a side window on its side wall, and window limiting steps are arranged on both sides of the side window; the outer ring wall of the open ring body is provided with a nickel-plated layer; and the inner side wall of the open ring body is provided with a sandblasted nickel-plated layer.

2. The annular opening part of the semiconductor etching equipment according to claim 1, characterized in that: End surface positioning pins are arranged on the end surfaces at both sides of the opening of the open ring body.

3. The annular opening part of the semiconductor etching equipment according to claim 1, characterized in that: At least two nickel-plated hanging holes are arranged on the end surface of the open ring, and a connecting line of the two nickel-plated hanging holes passes through the center of the circle of the open ring body.

4. The annular opening part of the semiconductor etching equipment according to claim 1, characterized in that: Window panels parallel to each other are arranged on both sides of the side window, and the window limiting steps are arranged on the back sides of the two window panels.

5. The annular opening part of the semiconductor etching equipment according to any one of claims 1 to 4, characterized in that: The inner diameter of the open ring is D1, D1≧370mm; the outer diameter of the open ring is D2, D2≧390mm.

6. The annular opening part of the semiconductor etching equipment according to any one of claims 1 to 4, characterized in that: The angle corresponding to the opening on the open ring body is A, and A≧60°.

7. The annular opening part of the semiconductor etching equipment according to any one of claims 1 to 4, characterized in that: It also includes a base adapted to the cover opening ring body, a mounting seat hole is arranged in the middle of the base, a window hole is arranged through the side wall of the mounting seat hole; an arc groove corresponding to the window hole is arranged on the inner side wall of the mounting seat hole, and the opening ring body is installed in the arc groove.

8. The annular opening part of the semiconductor etching equipment according to claim 7, characterized in that: A limiting convex ball is arranged on the end surface of the window opening limiting step, and limiting circular grooves matched with the limiting convex ball are arranged on both sides of the window opening hole.

9. The annular opening part of the semiconductor etching equipment according to claim 7, characterized in that: A limiting protrusion is arranged on the end face of the window limiting step, and limiting grooves cooperating with the limiting protrusion are arranged on two of the through holes; a first channel is arranged in the base, one end of the first channel is connected with the limiting groove, and the other end of the first channel passes through the side wall of the open ring body; when the open ring body needs to be taken out, the first push rod passes through the first channel to push the limiting protrusion, the limiting protrusion is disengaged from the limiting groove, and the open ring body can be taken out.

10. The annular opening part of the semiconductor etching equipment according to claim 9, characterized in that: A second channel perpendicular to the first channel is arranged in the open ring body, and a second push rod and a thrust spring for pushing the second push rod to move relative to the first channel are arranged in the second channel; a waist groove is arranged on the side wall of the first push rod; when the first push rod is inserted into the first channel and pushes the limiting protrusion, the second push rod is inserted into the waist groove to limit the first push rod.

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