Single crystal furnace

Abstract

The invention discloses a single crystal furnace which comprises a furnace body, a furnace cover, an auxiliary chamber arranged above the furnace cover and a spin valve device arranged between the furnace cover and the auxiliary chamber, the furnace cover is provided with a first through hole for a silicon single crystal rod to pass through, the spin valve device is arranged at the first through hole, the furnace cover is further provided with a second through hole, an observation window is arranged at the second through hole, and the observation window is arranged on the furnace cover. The observation window comprises an observation window main body and two glass assemblies, the observation window main body is mounted at one end of the furnace cover and forms a single window communicated with the second through hole, two mutually independent viewports are formed at one end, far away from the furnace cover, of the observation window main body, the two viewports are communicated with the window, and each glass assembly covers each viewport in a sealing manner; and the two viewports are symmetrically arranged at intervals along the length direction of the window. The observation window of the single crystal furnace adopts a double-viewport and window structure, so that the pressure of the glass assembly is reduced, the problems of damage to the glass assembly and the like are avoided, and the requirement of drawing a large-diameter single crystal silicon rod can be met.

Description

Technical Field

[0001] The present application relates to a single crystal furnace, and in particular to a single crystal furnace for pulling large-diameter single crystal silicon rods. Background Art

[0002] At present, the existing single crystal furnace can only pull single crystal silicon rods with a diameter of 14 inches at most, which cannot meet the demand for pulling single crystal silicon rods with larger diameters, such as pulling single crystal silicon rods with a diameter ≥ 16 inches. If large-diameter silicon rods are to be pulled, the size of the furnace cover observation window, auxiliary chamber and other devices of the single crystal furnace needs to be increased. For example, the furnace cover observation window needs to cover the edge of the single crystal silicon rod to facilitate observation of the diameter of the single crystal silicon rod. However, after the size of the observation window of the furnace cover of the existing single crystal furnace is increased, there are problems such as the window glass is easily damaged and the cooling effect of the observation window is poor. The safety, stability and reliability are low, and it cannot meet the demand for pulling large-diameter single crystal silicon rods. Summary of the invention

[0003] The purpose of this application is to propose a single crystal furnace for pulling large-diameter single crystal silicon rods, which has high safety, stability and reliability and can meet the needs of pulling large-diameter single crystal silicon rods.

[0004] In order to solve at least one of the above technical problems, the technical solution of the present application is as follows:

[0005] A single crystal furnace provided according to an embodiment of the present application includes: a furnace body, a furnace cover, a sub-chamber arranged above the furnace cover, and a rotary valve device arranged between the furnace cover and the sub-chamber, the furnace cover is provided with a first through hole for the single crystal silicon rod to pass through, the rotary valve device is installed at the first through hole, the furnace cover is also provided with a second through hole, an observation window is provided at the second through hole, the observation window includes an observation window body and two glass components, the observation window body is installed at one end of the furnace cover and forms a single window connected to the second through hole, two independent viewports are formed at one end of the observation window body away from the furnace cover, the two viewports are connected to the window, each glass component covers each viewport respectively, and the two viewports are spaced and symmetrically arranged along the length direction of the window.

[0006] In a possible implementation of the above embodiment, the observation window body includes a connecting part, a glass mounting flange and a cover plate which are connected in sequence from close to the furnace cover to far away from the furnace cover, the connecting part is provided with a single window penetrating along its thickness direction, the glass mounting flange is provided with two first viewports penetrating along its thickness direction, and the cover plate is provided with two second viewports penetrating along its thickness direction, the two first viewports and the two second viewports correspond to each other, and the corresponding first viewports and the second viewports together constitute a viewport in the thickness direction.

[0007] In a possible implementation of the above embodiment, each glass assembly includes an inner layer of glass and an outer layer of glass that are parallel to each other and spaced apart.

[0008] In a possible implementation of the above embodiment, a glass mounting flange is provided with a first groove body respectively matching with each inner layer of glass along the periphery of each first viewport for mounting the inner layer of glass; and a second groove body respectively matching with each outer layer of glass along the periphery of each second viewport for mounting the outer layer of glass.

[0009] In a possible implementation of the above embodiment, a first cooling channel surrounding the two first viewports and a first inlet and a first outlet communicating with the first cooling channel are provided in the glass mounting flange.

[0010] In a possible implementation of the above embodiment, a pressurizing port communicating with the first cooling channel is further provided on the glass mounting flange; the pressurizing port is located between the two first viewports.

[0011] In a possible implementation of the above embodiment, the first inlet and the first outlet are located at the same end of the length direction of the glass mounting flange, and a first partition is arranged in the first cooling channel, which extends along the length direction of the glass mounting flange and is located between the two first viewports.

[0012] In a possible implementation of the above embodiment, a second cooling channel surrounding the window and a second inlet and a second outlet connected to the second cooling channel are provided in the connecting portion; the second inlet is provided at one end of the connecting portion in the length direction, and the second outlet is provided at the other end of the connecting portion in the length direction.

[0013] In a possible implementation of the above embodiment, an inserting portion for matching with the second through hole on the furnace cover is provided at one end of the connecting portion close to the furnace cover.

[0014] In a possible implementation of the above embodiment, a transition flange is provided on the top of the auxiliary chamber, and a third through hole corresponding to the inner cavity of the auxiliary chamber is provided on the transition flange.

[0015] In a possible implementation of the above embodiment, a third cooling channel surrounding the third through hole, and a third inlet and a third outlet communicating with the third cooling channel are provided in the transition flange.

[0016] In a possible implementation of the above embodiment, the rotary valve device includes: a valve body, a cavity is arranged in the valve body, the cavity is connected with the inner cavity of the auxiliary chamber and the first through hole on the furnace cover; a valve plate, the valve plate is arranged in the cavity; and a driving device, the driving device is used to drive the valve plate to rise and fall and rotate so that the inner cavity of the auxiliary chamber and the first through hole of the furnace cover are connected or separated.

[0017] In a possible implementation of the above embodiment, a plurality of reinforcing ribs extending in a horizontal direction are provided on the valve body.

[0018] In a possible implementation of the above embodiment, an argon gas inlet ring is arranged between the rotary valve device and the furnace cover, and a plurality of lateral blowing holes and a plurality of downward blowing holes are arranged on the argon gas inlet ring.

[0019] The above technical solution of the present application has at least one of the following beneficial effects:

[0020] According to the single crystal furnace of the present application, a second through hole is also provided on the furnace cover, and an observation window is provided at the second through hole, the observation window includes an observation window body and two glass components, the observation window body is installed at one end of the furnace cover and forms a single window connected to the second through hole, and the end of the observation window body away from the furnace cover forms two independent viewports, both viewports are connected to the window, each glass component covers each viewport respectively, and the two viewports are spaced and symmetrically arranged along the length direction of the window, and the diameter of the single crystal silicon rod in the single crystal furnace is observed through the two viewports and the window. Therefore, the observation window of the single crystal furnace of the present application adopts a double viewport and window structure, which not only reduces the area of ​​the glass component, reduces the pressure of the glass component, and avoids problems such as damage to the glass component, but also can ensure that the diameter of the single crystal silicon rod in the single crystal furnace is fully observed, with low safety, stability and reliability, long service life, and can meet the needs of drawing large-diameter single crystal silicon rods.

[0021] In addition, in the technical solution of the present application, unless otherwise specified, the technical solution can be implemented by adopting conventional means in the art. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 A schematic diagram of a partial structure of a single crystal furnace according to an embodiment of the present application;

[0024] Figure 2 This is a schematic structural diagram of an observation window according to an embodiment of the present application;

[0025] Figure 3 A schematic diagram of a partially cutaway structure of an observation window according to an embodiment of the present application;

[0026] Figure 4 A cross-sectional view of a glass mounting flange according to an embodiment of the present application;

[0027] Figure 5 A cross-sectional view of a connecting portion of an embodiment of the present application;

[0028] Figure 6 A cross-sectional view of a transition flange according to an embodiment of the present application;

[0029] Figure 7 This is a schematic structural diagram of a rotary valve device according to an embodiment of the present application;

[0030] Figure 8 A schematic diagram of a partially cutaway structure of a rotary valve device according to an embodiment of the present application;

[0031] Fig. 9 For one embodiment of the present application Figure 8 A partial enlarged view of the middle A;

[0032] Fig.10 For one embodiment of the present application Figure 8 A partial enlarged view of point B in the middle;

[0033] Fig.11 A cross-sectional view of a driving device according to an embodiment of the present application;

[0034] Fig.12 A schematic diagram of a partial structure of a rotary valve device according to an embodiment of the present application;

[0035] Fig.13 A schematic diagram of a partially cutaway structure of an argon gas inlet ring according to an embodiment of the present application;

[0036] Fig.14 A cross-sectional view of an argon gas inlet ring according to an embodiment of the present application.

[0037] Description of the reference numerals in the accompanying drawings:

[0038] Observation window 100; observation window body 110; window 101; viewport 102; connection portion 111; second cooling channel 1111; second inlet 1112; second outlet 1113; plug-in portion 1114; glass mounting flange 112; first viewport 1121; first cooling channel 1122; first inlet 1123; first outlet 1124; pressurizing port 1125; first partition 1126; cover plate 113; second viewport 1131; second trough 1132; sealing ring 114; glass assembly 120; inner glass 121; outer glass 122;

[0039] Furnace cover 200;

[0040] Auxiliary chamber 300; transition flange 310; third through hole 311; third cooling channel 312; third inlet 313; third outlet 314; second partition plate 315;

[0041] Rotary valve device 400; valve body 410; cavity 411; valve plate 420; driving device 430; lifting shaft 431; first driving member 432; second driving member 433; linear bearing 434; upper flange ring 440; fifth cooling channel 441; second opening 442; fourth outlet 443; lower flange ring 450; fourth cooling channel 451; fourth inlet 452; first opening 453; rear cover 460; stopper 461; vacuum exhaust hole 470; reinforcing rib 480;

[0042] Argon gas inlet ring 500; lateral blowing hole 510; lower blowing hole 520; first annular blowing channel 530; second annular blowing channel 540; splitter 550; inlet hole 560. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are part of the embodiments of the present application, rather than all of the embodiments, and are only used to explain the present application, and are not used to limit the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0044] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "inside", "outside", "two ends", "both sides", "bottom", "top" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred elements must have a specific orientation or be constructed and operated in a specific orientation, and therefore cannot be understood as limitations on the present application. In addition, the terms "first", "second", "superior", "inferior", "primary", "secondary" and the like are only used for descriptive purposes and can be simply used to more clearly distinguish different components, but cannot be understood as indicating or implying relative importance.

[0045] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0046] refer to Figures 1 to 14As shown, a single crystal furnace provided according to an embodiment of the present application is schematically shown, which may include: a furnace body (not shown), a furnace cover 200, a sub-chamber 300 arranged above the furnace cover 200, and a rotary valve device 400 arranged between the furnace cover 200 and the sub-chamber 300.

[0047] The furnace cover 200 is provided with a first through hole (not shown) for the single crystal silicon rod to pass through, the rotary valve device 400 is installed at the first through hole, and the furnace cover 200 is also provided with a second through hole (not shown), the second through hole runs through the thickness of the furnace cover 200, and an observation window 100 is provided at the second through hole, and the observation window 100 is used to observe the diameter of the single crystal silicon rod in the single crystal furnace. The observation window may include an observation window body 110 and two glass components 120, the observation window body 110 is installed at one end of the furnace cover 200 and is formed with a single window 101 connected to the second through hole, and the observation window body 110 is formed with two independent viewports 102 at one end away from the furnace cover 200, and the two viewports 102 are both connected to the window 101, and each glass component 120 covers each viewport 102 respectively, and the two viewports 102 are spaced and symmetrically arranged along the length direction of the window 101.

[0048] The rotary valve device 400 is used to isolate the furnace cover 200 from the auxiliary chamber 300. The auxiliary chamber 300 can be pressed on the rotary valve device 400 by gravity, and the auxiliary chamber 300 can be locked or unlocked with the pin on the rotary valve device 400 by rotation. The observation window body 110, the glass component 120, the viewport 102 and the window 101 can adopt waist-shaped holes or other suitable shapes. The observation window body 110 can be welded and connected to the furnace cover 200 of the single crystal furnace. Each glass component 120 and its corresponding viewport 102 can be connected by adhesive sealing. In addition, the single crystal furnace also includes a crucible, a water cooling screen, a heating device, a crystal pulling device and other mechanisms. These mechanisms can adopt the corresponding mechanisms in the single crystal furnace in the prior art, which will not be repeated here.

[0049] During the crystal pulling process of the single crystal furnace, the operator observes the diameter of the single crystal silicon rod in the single crystal furnace through the two viewports 102 and the window 101 of the observation window 100. It should be noted that the operator's field of vision when observing the single crystal furnace through the two viewports 102 and the window 101 should cover the edge of the single crystal silicon rod. When preparing large-sized single crystal silicon rods greater than or equal to 16 inches, the furnace body diameter of the corresponding single crystal furnace increases accordingly, and the diameter of the single crystal silicon rod increases accordingly. The size of the observation window on the original furnace cover is limited, and the operator cannot observe the edge of the single crystal furnace silicon rod through the observation window on the existing furnace cover. If the size of the observation window is simply increased, it will lead to problems such as easy damage to the window glass and poor cooling effect of the observation window, and low safety, stability and reliability.

[0050] Therefore, in the single crystal furnace of the present application, the observation window 100 adopts the structure of double viewports 102 and window 101, which not only reduces the area of ​​the glass component 120, reduces the pressure of the glass component 120, and avoids problems such as damage to the glass component 120, but also can ensure that the diameter of the single crystal silicon rod in the single crystal furnace can be fully observed, with low safety, stability and reliability, long service life, and can meet the needs of drawing large-diameter single crystal silicon rods.

[0051] In some embodiments, reference Figures 2 to 5 As shown, the observation window body 110 includes a connecting portion 111, a glass mounting flange 112 and a cover plate 113 which are sequentially connected from close to the furnace cover 200 to far away from the furnace cover 200. The connecting portion 111 is provided with a single window 101 penetrating along its thickness direction, the glass mounting flange 112 is provided with two first viewports 1121 penetrating along its thickness direction, and the cover plate 113 is provided with two second viewports 1131 penetrating along its thickness direction. The two first viewports 1121 and the two second viewports 1131 correspond to each other, and the first viewports 1121 and the second viewports 1131 corresponding to each other together form the viewport 102 in the thickness direction. As a result, the operations such as processing, manufacturing, assembly, disassembly and maintenance are more convenient and quick, and the structure is more stable, safer and more reliable.

[0052] In some embodiments, reference Figure 3 As shown, the glass assembly 120 is a double-layer structure, and each glass assembly 120 includes an inner layer of glass 121 and an outer layer of glass 122 which are parallel to each other and spaced apart. The inner layer of glass 121 can be arranged on the glass mounting flange 112, and the outer layer of glass 122 can be arranged on the cover plate 113. Therefore, the glass assembly 120 adopts a double-layer glass structure, which has higher structural strength, higher safety and reliability, and longer service life.

[0053] Furthermore, the glass mounting flange 112 is provided with a first groove body (not shown) matched with each inner glass 121 around each first viewport 1121, for mounting the inner glass 121; the cover plate 113 is provided with a second groove body 1132 matched with each outer glass 122 around each second viewport 1131, for mounting the outer glass 122. Thus, the structure is more compact and stable, the connection is tighter, the sealing is better, the volume is reduced, and the operation is more convenient.

[0054] Furthermore, a gap is left between the inner layer of glass 121 and its corresponding outer layer of glass 122. Thus, the inner layer of glass 121 and the outer layer of glass 122 form an isolation layer, which is safer and more reliable.

[0055] Furthermore, the inner glass 121 can be made of quartz glass, and the surface of the outer glass 122 can be provided with a metal coating. The outer glass 122 can be provided with a metal coating only on the outer surface, or on both the inner surface and the outer surface. The outer glass 122 can also be made of quartz glass, and a metal coating is provided on the surface of the quartz glass. Thus, the structural strength is higher, the safety and reliability are higher, and the service life is longer. It can be understood by those skilled in the art that the inner glass 121 and the outer glass 122 can be made of other suitable glasses in the prior art.

[0056] In some embodiments, reference Figure 4 As shown, the glass mounting flange 112 is provided with a first cooling channel 1122 surrounding the two first viewports 1121, and a first inlet 1123 and a first outlet 1124 communicating with the first cooling channel 1122. The first inlet 1123 is used for circulating cooling fluid to flow into the first cooling channel 1122, and the first outlet 1124 is used for circulating cooling fluid in the first cooling channel 1122 to flow out. The first cooling channel 1122 may be annular, and the circulating cooling fluid may be cooling water or other cooling fluids.

[0057] In the crystal pulling process, taking cooling water as the cooling fluid, refer to Figure 4 As shown, the cooling water supply device injects cooling water into the first cooling channel 1122 from the first inlet 1123. After the cooling water circulates along the first cooling channel 1122, the cooling water flows out from the first outlet 1124, thereby cooling the glass mounting flange 112 to prevent the observation window 100 from exceeding the temperature limit and damaging the equipment, thereby delaying the service life of the equipment, etc.

[0058] In some embodiments, a dead zone (such as a dead water zone) where cooling fluid is retained may be formed in the first cooling channel 1122, resulting in excessive temperature and poor cooling effect. Figure 4 As shown, the glass mounting flange 112 is also provided with a pressurizing port 1125 connected to the first cooling channel 1122. The pressurizing port 1125 may be one, two or more, and the number and arrangement of the pressurizing port 1125 may be determined according to the length, shape and other specific conditions of the first cooling channel 1122. For example, the pressurizing port 1125 is located at a position in the first cooling channel 1122 where a dead zone is easily formed. After cooling water is introduced into the first cooling channel 1122, the corresponding area is forcibly flushed by the cooling water introduced through the pressurizing port 1125, thereby avoiding the formation of a dead water zone in the first cooling channel 1122 and causing the temperature here to exceed the standard, ensuring the circulation of the cooling fluid in the first cooling channel 1122, more sufficient cooling, better cooling effect, more stable and reliable, and improving the service life of the equipment.

[0059] Furthermore, the pressurizing port 1125 is located between the two first viewports 1121. Thus, it is convenient to better force flush the first cooling channel 1122, avoid the formation of a dead zone of cooling fluid retention in the first cooling channel 1122 and cause the temperature here to exceed the standard, and ensure the circulation of the cooling fluid in the first cooling channel 1122, so as to achieve more sufficient cooling and better cooling effect.

[0060] Furthermore, the first inlet 1123 and the first outlet 1124 are located at the same end in the length direction of the glass mounting flange 112, and a first partition 1126 is provided in the first cooling channel 1122. The first partition 1126 extends along the length direction of the glass mounting flange 112 and is located between the first inlet 1123 and the first outlet 1124, and the first partition 1126 partitions the first cooling channel 1122. Thus, it is ensured that the circulating cooling fluid more fully fills the entire first cooling channel 1122, and the cooling effect is better.

[0061] In some embodiments, reference Figure 5 As shown, the connecting portion 111 may be provided with a second cooling channel 1111 surrounding the viewing window 101, and a second inlet 1112 and a second outlet 1113 communicating with the second cooling channel 1111. The second inlet 1112 is used for circulating cooling fluid to flow into the second cooling channel 1111, and the second outlet 1113 is used for circulating cooling fluid in the second cooling channel 1111 to flow out. The second cooling channel 1111 may be annular, and the circulating cooling fluid may be cooling water or other cooling fluids.

[0062] That is, the connecting portion 111 can be cooled through the second cooling channel 1111, and the glass mounting flange 112 can be cooled through the first cooling channel 1122, so that the cooling is more comprehensive and the cooling effect is better.

[0063] Furthermore, the second inlet 1112 is arranged at one end of the length direction of the connecting portion 111, and the second outlet 1113 is arranged at the other end of the length direction of the connecting portion 111. Thus, it is ensured that the circulating cooling fluid more fully fills the entire second cooling channel 1111, and the cooling effect is better. In addition, the second cooling channel 1111 can also be provided with the structure of the above-mentioned pressurizing port 1125, which will not be repeated here.

[0064] In some embodiments, reference Figure 3 As shown, one end of the connecting portion 111 close to the furnace cover 200 is provided with a plug-in portion 1114 for matching with the second through hole on the furnace cover 200. Thus, the connection between the connecting portion 111 and the furnace cover 200 is tighter and the structure is more stable.

[0065] In some embodiments, reference Figure 1 , 6As shown, a transition flange 310 is provided on the top of the auxiliary chamber 300, and a third through hole 311 corresponding to the inner cavity of the auxiliary chamber 300 is provided on the transition flange 310, and the third through hole 311 is used for the lifting rod of the crystal pulling device to pass through. Therefore, by providing the transition flange 310, it is convenient to connect with the corresponding crystal pulling device.

[0066] In some embodiments, reference Figure 6 As shown, the transition flange 310 is provided with a third cooling channel 312 surrounding the third through hole 311, and a third inlet 313 and a third outlet 314 connected to the third cooling channel 312. The third inlet 313 is used for circulating cooling fluid to flow into the third cooling channel 312, and the third outlet 314 is used for circulating cooling fluid in the third cooling channel 312 to flow out. The circulating cooling fluid can be cooling water or other cooling fluids. Thus, the transition flange 310 is cooled and lowered through the third cooling channel 312 to prevent the transition flange 310 from being overheated, which is safer and more reliable.

[0067] Furthermore, a second baffle 315 is provided in the third cooling channel 312, the second baffle 315 extends radially along the transition flange 310, the second baffle 315 separates the third cooling channel 312, and the second baffle 315 is close to the third inlet 313 and the third outlet 314 and is located between the third inlet 313 and the third outlet 314. Thus, it is ensured that the circulating cooling fluid fills the entire third cooling channel 312 more fully, the cooling is more uniform, and the cooling effect is better. In addition, the third cooling channel 312 can also be provided with the structure of the above-mentioned pressurizing port 1125, which will not be repeated here.

[0068] In some embodiments, reference Figures 7-8 As shown, the rotary valve device 400 includes: a valve body 410, a valve plate 420 and a driving device 430. Among them, a cavity 411 is arranged in the valve body 410, and the cavity 411 is connected with the inner cavity of the auxiliary chamber 300 and the first through hole on the furnace cover 200. The valve plate 420 is arranged in the cavity 411, and the driving device 430 is used to drive the valve plate 420 to rise and fall and rotate so that the inner cavity of the auxiliary chamber 300 and the first through hole of the furnace cover 200 are connected or separated. Therefore, the furnace cover 200 is isolated from the auxiliary chamber 300 by the rotary valve device 400, which better provides a relatively closed and stable environment for the growth of single crystals, and is also convenient for the pulling of single crystal silicon rods.

[0069] In some embodiments, reference Figures 7-8 As shown, the top of the valve body 410 is provided with an upper flange ring 440 for connecting with the auxiliary chamber 300, and the upper flange ring 440 surrounds the top opening of the cavity 411. The bottom of the valve body 410 is provided with a lower flange ring 450 for connecting with the furnace cover 200, and the lower flange ring 450 surrounds the bottom opening of the cavity 411. Therefore, the operation is more convenient and the structure is more stable.

[0070] In some embodiments, reference Figures 8 to 10 As shown, a fifth cooling channel 441 surrounding the first opening and a second opening 442 and a fourth outlet 443 communicating with the fifth cooling channel 441 are provided in the upper flange ring 440, a fourth cooling channel 451 surrounding the top opening of the cavity 411 and a fourth inlet 452 and a first opening 453 communicating with the fourth cooling channel 451 are provided in the side wall of the lower flange ring 450, a sixth cooling channel (not shown) is provided in the side wall of the cavity 411 corresponding to the upper flange ring 440 and the lower flange ring 450, the first opening 453 and the second opening 442 are respectively communicated with the sixth cooling channel, the fourth inlet 452 is used for circulating cooling fluid to flow into the fourth cooling channel 451, and the fourth outlet 443 is used for circulating cooling fluid in the fifth cooling channel 441 to flow out.

[0071] That is, the cooling fluid supply device injects the cooling fluid from the fourth inlet 452 of the lower flange ring 450 into the fourth cooling channel 451 for communication, the cooling fluid flows around the fourth cooling channel 451 once and then enters the sixth cooling channel from the first opening 453, then the cooling fluid in the sixth cooling channel flows upward layer by layer and enters the fifth cooling channel 441 of the upper flange ring 440 from the second opening 442, and finally the cooling fluid flows around the fifth cooling channel 441 once and then flows out from the fourth outlet 443, thereby cooling the rotary valve device 400. Thus, the cooling is more uniform and the cooling effect is better.

[0072] In some embodiments, reference Fig.11 As shown, the driving device 430 includes a lifting shaft 431, a first driving member 432 and a second driving member 433. The lifting shaft 431 is arranged in the vertical direction and connected to the valve plate 420. The first driving member 432 is used to drive the lifting shaft 431 and the valve plate 420 to lift together. The second driving member 433 is used to drive the lifting shaft 431 and the valve plate 420 to rotate together. The first driving member 432 and the second driving member 433 can be driving members such as cylinders. In this way, the valve plate 420 can be lifted and rotated better.

[0073] Furthermore, a linear bearing 434 is provided on the valve body 410 to match the lifting shaft 431. Thus, the lifting shaft 431 is prevented from being stuck due to the valve plate 420 being too large, and the lifting shaft 431 is ensured to move more smoothly.

[0074] In some embodiments, reference Fig.12As shown, the valve body 410 is provided with a rear cover 460 corresponding to the valve plate 420, and the rear cover 460 can be rotated to open, and a limiter 461 for limiting its opening angle is provided on the rear cover 460. The valve body 410 and the rear cover 460 can be hinged by a rotating shaft, and the rear cover 460 can be locked by a locking handle or other locking parts after being closed. Therefore, it is convenient to perform maintenance by opening the rear cover 460, and the maximum opening angle of the rear cover 460 is limited by the limiter 461 to prevent the rear cover 460 from opening too far, so that the operation is more convenient, and the safety and reliability are higher.

[0075] In some embodiments, reference Figures 7-8 As shown, the valve body 410 is provided with a vacuum evacuation hole 470 for communicating with the cavity 411. Thus, the cavity 411 can be evacuated easily.

[0076] In some embodiments, reference Fig.12 As shown, the valve body 410 is provided with reinforcing ribs 480. The reinforcing ribs 480 may be multiple and extend in the horizontal direction. Thus, when the rotary valve device 400 receives a vertical force, the deformation of the flange and other parts can be effectively prevented, and the structure is more stable.

[0077] In some embodiments, reference Figure 1 , 13 As shown in Figures 14 to 15, an argon gas inlet ring 500 is provided between the rotary valve device 400 and the furnace cover 200. The argon gas inlet ring 500, the rotary valve device 400 and the furnace cover 200 can be connected respectively by fasteners such as screws. Therefore, by providing the argon gas inlet ring 500 and blowing at the throat of the furnace cover 200, the volatiles on the liquid surface in the single crystal furnace can be effectively suppressed from floating up, the influence of the volatiles on the liquid surface is reduced, the cleanliness of the liquid surface and above is increased, and the probability of crystal pulling is improved.

[0078] In some embodiments, reference Figures 13-14As shown, the argon gas inlet ring 500 is provided with a plurality of transverse blowing holes 510 and a plurality of lower blowing holes 520. The plurality of transverse blowing holes 510 are evenly distributed on the inner wall of the center hole of the argon gas inlet ring 500 along the circumferential direction of the argon gas inlet ring 500, the plurality of transverse blowing holes 510 extend along the radial direction of the argon gas inlet ring 500 and are connected with the center hole of the argon gas inlet ring 500, and the plurality of lower blowing holes 520 are evenly distributed on the lower end surface of the argon gas inlet ring 500 along the circumferential direction of the argon gas inlet ring 500, and the openings of the plurality of lower blowing holes 520 are downward and close to the center hole of the argon gas inlet ring 500. A first annular blowing channel 530 and a second annular blowing channel 540 are provided in the side wall of the argon inlet ring 500. The first annular blowing channel 530 and the second annular blowing channel 540 are coaxial with the argon inlet ring 500. The first annular blowing channel 530 is used to communicate with each lateral blowing hole 510, and the second annular blowing channel 540 is used to communicate with each lower blowing hole 520. Thus, through multiple lateral blowing holes 510 and multiple lower blowing holes 520, two horizontal and vertical wind curtains can be formed at the throat of the furnace cover 200, which can better suppress the floating of volatiles on the liquid surface in the single crystal furnace, reduce the influence of volatiles on the liquid surface, increase the cleanliness of the liquid surface and above, and improve the probability of crystal pulling.

[0079] Further, refer to Fig.14 As shown, the first annular blowing channel 530 includes two concentric annular channels, the outer annular channel is connected to the inner annular channel through a plurality of uniform flow holes evenly distributed in the circumferential direction, and a plurality of transverse blowing holes 510 are respectively connected to the inner annular channel. The argon gas inlet ring 500 is provided with a flow divider 550 and two inlet holes 560 connected to the outer annular channel. The two inlet holes 560 are symmetrically arranged along the radial direction of the argon gas inlet ring 500, and the flow divider 550 is respectively connected to the two inlet holes 560. Thus, a lower-speed, uniform, and stable transverse airflow can be provided, and the blowing effect is better. In addition, the second annular blowing channel 540 can be set with reference to the first annular blowing channel 530, which will not be described in detail here.

[0080] Based on the above-mentioned embodiments of the present application, in the absence of explicit negation or conflict, the technical features of one embodiment may be beneficially combined with one or more other embodiments.

[0081] The above are only some embodiments of the present application, which are only used to illustrate the technical solution of the present application, rather than to limit it. It should be understood that, for those skilled in the art, without departing from the creative concept of the present application, it is possible to improve or replace it according to the above description, and all these improvements and replacements should belong to the protection scope of the claims attached to the present application. In this case, all details can be replaced by equivalent elements, and the materials, shapes and sizes can also be arbitrary.

Claims

1. A single crystal furnace, characterized in that: include: A furnace body, a furnace cover, a secondary chamber arranged above the furnace cover, and a rotary valve device arranged between the furnace cover and the secondary chamber, wherein the furnace cover is provided with a first through hole for the single crystal silicon rod to pass through, and the rotary valve device is installed at the first through hole, The furnace cover is also provided with a second through hole, and an observation window is provided at the second through hole. The observation window includes an observation window body and two glass components. The observation window body is installed at one end of the furnace cover and is formed with a single viewing window connected to the second through hole. The end of the observation window body away from the furnace cover is formed with two independent viewing ports, both of which are connected to the viewing window. Each of the glass components covers each of the viewing ports. The two viewports are spaced apart and symmetrically arranged along the length direction of the window.

2. The single crystal furnace according to claim 1, characterized in that: The observation window body includes a connecting portion, a glass mounting flange and a cover plate which are sequentially connected from close to the furnace cover to far away from the furnace cover. The connecting portion is provided with a single viewing window penetrating along the thickness direction thereof, the glass mounting flange is provided with two first viewing ports penetrating along the thickness direction thereof, and the cover plate is provided with two second viewing ports penetrating along the thickness direction thereof, the two first viewing ports and the two second viewing ports correspond to each other, and the first viewing ports and the second viewing ports corresponding to each other together constitute the viewport in the thickness direction.

3. The single crystal furnace according to claim 2, characterized in that: Each of the glass components comprises an inner layer of glass and an outer layer of glass which are parallel to each other and spaced apart; The glass mounting flange is provided with a first groove body matched with each inner layer of glass respectively around each first viewport and used for mounting the inner layer of glass; The cover plate is provided with a second groove body matched with each of the outer layers of glass respectively around each of the second viewing ports, and is used for installing the outer layers of glass.

4. The single crystal furnace according to claim 3, characterized in that: The glass mounting flange is provided with a first cooling channel surrounding the two first viewports and a first inlet and a first outlet communicating with the first cooling channel; The glass mounting flange is also provided with a pressurizing port communicating with the first cooling channel; The pressurizing port is located between the two first viewports.

5. The single crystal furnace according to claim 4, characterized in that: The first inlet and the first outlet are located at the same end in the length direction of the glass mounting flange. A first baffle is arranged in the first cooling channel. The first baffle extends along the length direction of the glass mounting flange and is located between the two first viewports.

6. The single crystal furnace according to claim 3, characterized in that: The connecting portion is provided with a second cooling channel surrounding the viewing window and a second inlet and a second outlet communicating with the second cooling channel; The second inlet is disposed at one end of the connecting portion in the length direction, and the second outlet is disposed at the other end of the connecting portion in the length direction.

7. The single crystal furnace according to claim 2, characterized in that: An inserting portion for matching with the second through hole on the furnace cover is provided at one end of the connecting portion close to the furnace cover.

8. The single crystal furnace according to any one of claims 1 to 7, characterized in that: A transition flange is provided on the top of the auxiliary chamber, and a third through hole corresponding to the inner cavity of the auxiliary chamber is provided on the transition flange; A third cooling channel surrounding the third through hole, and a third inlet and a third outlet communicating with the third cooling channel are arranged in the transition flange.

9. The single crystal furnace according to any one of claims 1 to 7, characterized in that: The rotary valve device comprises: A valve body, wherein a cavity is provided in the valve body, and the cavity is communicated with the inner cavity of the auxiliary chamber and the first through hole on the furnace cover; a valve plate, the valve plate being disposed in the cavity; A driving device, the driving device is used to drive the valve plate to rise and fall and rotate so that the inner cavity of the auxiliary chamber and the first through hole of the furnace cover are connected or separated; Wherein, the valve body is provided with a plurality of reinforcing ribs extending in a horizontal direction.

10. The single crystal furnace according to any one of claims 1 to 7, characterized in that: An argon gas inlet ring is arranged between the rotary valve device and the furnace cover, and a plurality of transverse blowing holes and a plurality of downward blowing holes are arranged on the argon gas inlet ring.

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