Micropore manufacturing equipment based on ultrashort pulse laser

Abstract

The invention relates to the technical field of micropore machining, and discloses ultrashort pulse laser-based micropore manufacturing equipment which comprises a base, and a laser head is mounted at the top of the base; the supporting plate moves in the base through a driving mechanism, a support is fixed to one face of the supporting plate, and a second motor at the end of the support is used for driving the threaded rod to rotate; the connecting plate can drive the electric push rod to move along with the movement of the sliding block; the electric push rod is used for jacking up one side of the bearing plate to enable the bearing plate to be in a horizontal or inclined state; and the clamping assembly is installed in the middle of the bearing plate and used for clamping a workpiece. One side of the bearing plate can be jacked up through the electric push rod, the bearing plate drives the workpiece to be in a horizontal or inclined state, then the angle of the workpiece during machining is adjusted, the second driving motor drives the threaded rod, the sliding block drives the connecting plate, the bottom of the electric push rod moves, the fulcrum position of the electric push rod is adjusted, and the purpose of flexible adjustment of the angle of the workpiece is achieved. The problem that the angle adjusting range of a traditional fixed fulcrum structure is limited is solved, and the machining efficiency and quality are optimized.

Description

Technical Field

[0001] The invention relates to the technical field of micro-hole processing, in particular to a micro-hole manufacturing device based on ultra-short pulse laser. Background Art

[0002] Micropore manufacturing equipment has a wide range of applications in the field of precision machining, especially in the aerospace, medical equipment, microelectronics manufacturing and other industries. It is mainly used to process micropores with small diameter, high depth and complex shape on the surface or inside of various materials. These micropores are often used as functional components for airflow control, liquid channels or signal transmission, so the processing quality and accuracy of the micropores are crucial to the performance of the overall system. With the continuous improvement of the industry's demand for micromachining, higher accuracy, efficiency and adaptability requirements are put forward for micropore manufacturing equipment.

[0003] Micro-hole manufacturing equipment based on ultra-short pulse lasers has unique advantages over traditional mechanical processing or EDM equipment. Ultra-short pulse lasers have concentrated energy and a single pulse action time of extremely short duration, which can achieve cold processing without a heat-affected zone, and are suitable for micro-hole processing of high-precision and high-demand materials. At the same time, ultra-short pulse lasers have good adaptability to hard-to-process materials such as hard and brittle materials and composite materials, and are not prone to defects such as cracks and deformation during processing. In addition, this type of equipment also has the advantages of fast processing speed and a wide range of applications, and has therefore become an important development direction for micro-hole manufacturing technology.

[0004] However, existing ultrashort pulse laser-based micro-hole manufacturing equipment still has deficiencies in angle adjustment and processing flexibility. Most existing equipment uses a fixed fulcrum structure, which results in a limited range of processing angle adjustment and cannot meet the processing requirements of complex workpieces or special positions, which greatly limits the versatility and efficiency of the equipment. At the same time, since the fulcrum position cannot be adjusted, angle adjustment during the processing process usually requires additional mechanical modification or multiple manual adjustments, which increases processing costs and time. Summary of the invention

[0005] In view of the shortcomings of the prior art, the present invention provides a microhole manufacturing equipment based on ultrashort pulse laser, which solves the problem in the prior art that the existing equipment mostly adopts a fixed fulcrum structure, resulting in a limited adjustment range of the processing angle, and the angle adjustment requires additional mechanical modification or multiple manual adjustments, which increases the processing cost and time.

[0006] To achieve the above objectives, the present invention is implemented by the following technical solutions: a micro-hole manufacturing device based on ultrashort pulse laser, comprising:

[0007] A base, on top of which a laser head is installed for processing a workpiece; wherein the laser head is used to emit ultrashort pulse laser;

[0008] A support plate is displaced in the base by a driving mechanism, and a bracket is fixed on one side, and a second motor at the end of the bracket is used to drive the threaded rod to rotate and move the slider in the bracket;

[0009] The connecting plate can drive the electric push rod to move after moving with the slider, and is used to adjust the fulcrum of the electric push rod;

[0010] A carrying plate, which is movably connected to the output end of the electric push rod, and the electric push rod is used to lift one side of the carrying plate to make it horizontal or inclined;

[0011] The clamping assembly is installed in the middle of the carrying plate and is used for clamping the workpiece.

[0012] Preferably, the clamping assembly includes motor three, and the motor three is fixed to the bottom surface of the supporting plate through a mounting frame, a rotating plate is installed at the output end of the motor three, a top block is movably arranged inside the supporting plate, the bottom of the top block is fixedly connected to a top rod, and the top of the top block is connected to a clamping block, after the motor three drives the rotating plate to rotate, the arc surface inside the rotating plate will squeeze the top rod to drive the top block to move, and at this time the clamping block will move with the top block and approach the middle of the supporting plate and clamp the workpiece.

[0013] Preferably, an extrusion rod is fixed on one side of the top block, a spring is arranged on one side of the extrusion rod, and both the extrusion rod and the spring are located inside the bearing plate, and when the top block is close to the middle of the bearing plate, the extrusion rod compresses the spring.

[0014] Preferably, ear plates are connected to both sides of the outer wall of the top block, a limiting hole is opened inside the bearing plate, the top block, ear plates, extrusion rod and spring are all in the limiting hole, and the ear plates on both sides are distributed in an inverted V shape.

[0015] Preferably, folding plates are installed on both sides of the inner wall of the limiting hole, and the adjacent sides of the folding plates on the two sides are respectively connected to the opposite sides of the outer wall of the top block.

[0016] Preferably, a guide rod is movably provided on the top of the top block, one side of the guide rod is connected to the clamping block, and a knob is provided on the top surface of the top block, and the bottom of the knob abuts against the outer wall of the guide rod.

[0017] Preferably, a lower ball seat is fixed on the top surface of the connecting plate, an upper ball seat is installed at the edge of the bottom surface of the supporting plate, and the top and bottom of the electric push rod are movably connected to the upper ball seat and the lower ball seat respectively through ball heads.

[0018] Preferably, a slide groove is provided inside the bracket, the slider is slidably connected in the slide groove, and the slider is arranged in an inverted mountain shape.

[0019] Preferably, the driving mechanism includes a motor 1, the motor 1 is located on the outer wall of the base, a gear is installed at the output end of the motor 1, a rack is arranged at the edge of the top surface of the support plate, and the gear is meshed with the rack.

[0020] Preferably, a through hole is opened in the middle of the top surface of the support plate, and the through hole and the bracket are staggered, a collecting box is fixed to the bottom surface of the support plate, the collecting box is set to an inverted cone shape, and a sealing cover is movably provided at the bottom of the collecting box, and baffles are fixed on both sides of the top surface of the support plate.

[0021] The present invention provides a micro-hole manufacturing device based on ultrashort pulse laser. It has the following beneficial effects:

[0022] 1. The present invention can lift one side of the supporting plate through the electric push rod, so that it drives the workpiece to be in a horizontal or inclined state, thereby adjusting the angle of the workpiece during processing. The second driving motor drives the threaded rod to make the slider drive the connecting plate to move the bottom of the electric push rod, and adjust the fulcrum position of the electric push rod, thereby achieving the purpose of flexible adjustment of the workpiece angle, solving the problem of limited angle adjustment range of the traditional fixed fulcrum structure, and optimizing processing efficiency and quality.

[0023] 2. The present invention can drive the rotating plate to rotate through motor three, and after the arc surface on the rotating plate squeezes the ejector rod, the ejector rod will drive the ejector block and the clamping block to move toward the middle of the bearing plate, so that the center of the workpiece and the center of the bearing plate remain coaxial, and the workpiece is clamped and fixed, avoiding the phenomenon of unstable clamping of the workpiece due to the shift of the center of gravity, thereby improving the safety of the device operation and the processing stability.

[0024] 3. The present invention designs the slider to be in an inverted mountain shape and cooperates with the internal slide groove of the bracket. Therefore, the splashes generated by punching will slide along the inclined surface of the slide groove after entering the bracket, and then fall directly into the collection box through the through hole, thereby avoiding the splashes from entering the interior of the bracket and effectively preventing internal jamming and wear problems.

[0025] 4. The present invention arranges folding plates on both sides of the top block. Therefore, when the top block moves, the folding plate on one side is squeezed and folded, while the folding plate on the other side is pulled and stretched. Therefore, the limiting hole can be blocked to prevent splashing objects from entering the interior of the supporting plate, thereby avoiding the accumulation of splashing objects and affecting the normal operation of the device.

[0026] 5. The present invention can drive the gear to drive the rack through a motor, and the driving motor can rotate forward or reverse, which can drive the support plate to move back and forth in the base, and then drive the workpiece to move back and forth. At this time, the relative position of the support plate and the workpiece can be adjusted to facilitate drilling holes at different positions on the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0028] Figure 2 It is a schematic diagram of the internal structure of the base of the present invention;

[0029] Figure 3 This is a disassembled diagram of the support plate structure of the present invention;

[0030] Figure 4 It is a partial structural exploded view of the load-bearing plate of the present invention;

[0031] Figure 5 It is a schematic diagram of the internal structure of the bracket of the present invention;

[0032] Figure 6 It is a schematic diagram of the structure of the slider part of the present invention;

[0033] Figure 7 This is a partial structural diagram of the driving plate of the present invention;

[0034] Figure 8 It is a schematic diagram of the internal structure of the load-bearing plate of the present invention;

[0035] Fig. 9 This is a partial structural diagram of the clamp block of the present invention;

[0036] Fig.10 This is a partial structural diagram of the ear plate of the present invention.

[0037] Among them, 1. base; 2. laser head; 3. driving mechanism; 301. motor one; 302. gear; 303. rack; 4. support plate; 5. bracket; 6. motor two; 7. threaded rod; 8. slider; 9. connecting plate; 10. electric push rod; 11. load-bearing plate; 12. clamping assembly; 13. motor three; 14. rotating plate; 15. arc surface; 16. push rod; 17. push block; 18. clamping block; 19. limiting hole; 20. ear plate; 21. guide rod; 22. knob; 23. folding plate; 24. lower ball seat; 25. upper ball seat; 26. slide groove; 27. collection box; 28. through hole; 29. ​​baffle; 30. mounting frame; 31. extrusion rod; 32. spring. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the specification of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] In order to better understand the present invention, the above contents are described in detail below in conjunction with specific embodiments.

[0040] Please refer to the attached Figure 1, Figure 3 , Figure 4 , Figure 6 , Figure 7 , Fig. 9 and Fig.10 The embodiment of the present invention provides a micro-hole manufacturing device based on ultrashort pulse laser, including: a base 1, a laser head 2 is installed on the top of which is used to process the workpiece; a support plate 4, which is displaced in the base 1 through a driving mechanism 3, and a bracket 5 is fixed on one side, and a motor 6 at the end of the bracket 5 is used to drive the threaded rod 7 to rotate and move the slider 8 in the bracket 5; a connecting plate 9, which can drive the electric push rod 10 to move after moving with the slider 8, and is used to adjust the fulcrum of the electric push rod 10; a supporting plate 11, which is movably connected to the output end of the electric push rod 10, and the electric push rod 10 is used to lift one side of the supporting plate 11 to make it horizontal or inclined; a clamping assembly 12, which is installed in the middle of the supporting plate 11, and is used to clamp the workpiece.

[0041] In the present invention, a laser head 2 is installed on the top of the base 1. The laser head 2 is used to emit ultrashort pulse laser to perform high-precision micro-hole processing on the workpiece. The support plate 4 is linearly displaced in the base 1 through the driving mechanism 3. A bracket 5 is fixed on one side of the support plate 4 to support the operation of the motor 2 6 and the threaded rod 7. The mobility of the support plate 4 allows the workpiece to be flexibly adjusted to the bottom of the laser head 2 or moved out of the processing area. The motor 2 6 drives the threaded rod 7 to rotate so that the threaded rod 7 drives the slider 8 to slide in the bracket 5, thereby achieving precise control of the position of the slider 8, laying the foundation for further adjusting the fulcrum position of the electric push rod 10. When the slider 8 moves, the connecting plate 9 moves accordingly, thereby driving the electric push rod 10 to make corresponding adjustments, ensuring that the electric push rod 10 can flexibly adapt to the processing angle requirements. Through the telescopic movement of the electric push rod 10, one side of the supporting plate 11 can be lifted or pressed down, so that the supporting plate 11 is in a horizontal or inclined state, thereby realizing precise adjustment of the angle of the workpiece to meet the needs of multi-angle processing. The clamping assembly 12 is installed in the middle of the supporting plate 11 to clamp and fix the workpiece to ensure that the workpiece remains stable during the processing and avoid affecting the processing accuracy due to offset or looseness.

[0042] Please refer to the attached Figure 4 , Figure 6 , Figure 7 , Fig. 9 and Fig.10 The clamping assembly 12 includes a motor 3 13, which is fixed to the bottom surface of the carrier plate 11 through a mounting frame 30. A rotating plate 14 is installed at the output end of the motor 3 13. A top block 17 is movably arranged inside the carrier plate 11. The bottom of the top block 17 is fixedly connected to a top rod 16, and a clamping block 18 is connected to the top of the top block 17. After the motor 3 13 drives the rotating plate 14 to rotate, the arc surface 15 inside the rotating plate 14 will squeeze the top rod 16 to drive the top block 17 to move. At this time, the clamping block 18 will move with the top block 17 and approach the middle of the carrier plate 11 and clamp the workpiece.

[0043] In the present invention, the motor three 13 is fixed to the bottom surface of the carrier plate 11 through the mounting frame 30. When the motor three 13 is started, the rotating plate 14 rotates, and the arc surface 15 designed inside the rotating plate 14 gradually squeezes the push rod 16. The push rod 16 pushes the top block 17 to move toward the middle of the carrier plate 11. When the top block 17 moves, it drives the clamping block 18 to approach the middle of the carrier plate 11, thereby clamping and fixing the workpiece. Moreover, multiple clamping blocks 18 can keep the center of the workpiece coaxial with the center of the carrier plate 11, avoiding the phenomenon of unstable clamping due to the offset of the center of gravity, and significantly improving the processing accuracy and stability.

[0044] Please refer to the attached Figure 7 and Figure 8 A squeezing rod 31 is fixed to one side of the top block 17, and a spring 32 is provided on one side of the squeezing rod 31. Both the squeezing rod 31 and the spring 32 are located inside the bearing plate 11. When the top block 17 is close to the middle of the bearing plate 11, the squeezing rod 31 compresses the spring 32.

[0045] In the present invention, while the top block 17 moves, it will also be further buffered and fixed through the interaction between the spring 32 and the extrusion rod 31, ensuring the stable distribution of the clamping force. When the clamping is canceled, the motor 3 13 reverses to make the arc surface 15 gradually move away from the top rod 16. At this time, the spring 32 extends the extrusion rod 31, thereby driving the top block 17 and the clamping block 18 to return to their initial positions, completing the workpiece unclamping operation. Finally, the operator removes the processed workpiece and prepares for the next processing, thereby improving the convenience of using the device.

[0046] Please refer to the attached Figure 7-10 , ear plates 20 are connected to both sides of the outer wall of the top block 17, a limiting hole 19 is opened inside the bearing plate 11, the top block 17, the ear plate 20, the extrusion rod 31 and the spring 32 are all in the limiting hole 19, and the ear plates 20 on both sides are distributed in an inverted V shape.

[0047] In the present invention, ear plates 20 are connected to both sides of the outer wall of the top block 17. The ear plates 20 make the top block 17 more stable during movement, and a limiting hole 19 is opened inside the supporting plate 11. The top block 17, the ear plate 20, the extrusion rod 31 and the spring 32 are all located in the limiting hole 19, so that the top block 17 can be effectively guided to move along a fixed track to avoid tilting or shaking during movement, thereby improving the stability and accuracy of the clamping action. The inverted V-shaped distribution of the ear plate 20 can also support the top block 17. At the same time, it can better withstand the force generated during the clamping process, avoid wear or failure of components due to offset or uneven force, and improve the reliability and durability of the device operation.

[0048] Please refer to the attached Figure 4 and Figure 7Folding plates 23 are installed on both sides of the inner wall of the limiting hole 19, and the adjacent sides of the folding plates 23 on both sides are respectively connected to the opposite sides of the outer wall of the top block 17.

[0049] In the present invention, folding plates 23 are installed on both sides of the inner wall of the limiting hole 19, and the adjacent sides of the folding plates 23 on both sides are respectively connected to the opposite sides of the outer wall of the top block 17. When the top block 17 moves in the limiting hole 19, the folding plate 23 on one side will be squeezed and folded, and the folding plate 23 on the other side will be stretched and unfolded. This allows the limiting hole 19 to be dynamically blocked during the movement of the top block 17, effectively preventing splashes generated during the punching process from entering the interior of the carrier plate 11, thereby avoiding the adverse effects of splash accumulation on the internal structure and operation of the device. In addition, the flexibility and dynamic adaptability of the folding plate 23 enable the device to maintain cleanliness without affecting the normal movement trajectory of the top block 17. This not only improves the reliability of the device, but also extends the service life of the equipment, and reduces the downtime caused by splash cleaning and maintenance.

[0050] Please refer to the attached Fig.10 A guide rod 21 is movably provided on the top of the top block 17 , one side of the guide rod 21 is connected to the clamping block 18 , and a knob 22 is provided on the top surface of the top block 17 , and the bottom of the knob 22 abuts against the outer wall of the guide rod 21 .

[0051] In the present invention, a guide rod 21 is movably provided on the top of the top block 17, and the bottom of the knob 22 abuts against the outer wall of the guide rod 21. By rotating the knob 22 away from the guide rod 21, the guide rod 21 can be pulled to move inside the top block 17, and the position of the top block 17 can be adjusted or the clamping force of the clamping block 18 can be fine-tuned to meet the clamping requirements of different workpiece sizes and shapes. The clamping assembly 12 has an additional manual adjustment function on the basis of automatic clamping, further improving the adaptability and flexibility of the device, while simplifying the adjustment process of the operator, and effectively improving the processing efficiency and processing accuracy.

[0052] Please refer to the attached Figure 1 , Figure 4 and Figure 6 A lower ball seat 24 is fixed on the top surface of the connecting plate 9, an upper ball seat 25 is installed at the edge of the bottom surface of the bearing plate 11, and the top and bottom of the electric push rod 10 are movably connected to the upper ball seat 25 and the lower ball seat 24 respectively through ball heads.

[0053] In the present invention, a lower ball seat 24 is fixed to the top surface of the connecting plate 9, an upper ball seat 25 is installed at the edge of the bottom surface of the bearing plate 11, and the top and bottom of the electric push rod 10 are movably connected to the upper ball seat 25 and the lower ball seat 24 through the ball head respectively. By utilizing the flexible and movable characteristics of the ball head and the ball seat, the electric push rod 10 can freely adjust the position and inclination angle of the bearing plate 11 at different angles, thereby meeting the needs of multi-angle processing. The ball seat connection not only provides reliable support, but also allows the bearing plate 11 to have a certain angle self-adaptive ability during the pushing process, avoiding the situation where the force transmission is limited or the device is damaged due to the fixed connection. Thereby improving the processing accuracy and the durability of the equipment.

[0054] Please see attached Figure 1-Figure 5 A slide groove 26 is provided inside the bracket 5, and the slider 8 is slidably connected in the slide groove 26, and the slider 8 is set in an inverted mountain shape. A through hole 28 is provided in the middle of the top surface of the support plate 4, and the through hole 28 and the bracket 5 are staggered. A collection box 27 is fixed to the bottom surface of the support plate 4, and the collection box 27 is set in an inverted cone shape. A sealing cover is movably provided at the bottom of the collection box 27, and baffles 29 are fixed on both sides of the top surface of the support plate 4.

[0055] In the present invention, a slide groove 26 is provided inside the bracket 5, and the slider 8 is slidably connected in the slide groove 26. The slider 8 is designed in an inverted mountain shape, and its shape is closely matched with the slide groove 26, which can effectively prevent the slider 8 from tilting or getting stuck during the sliding process. At the same time, the inverted mountain structure can also guide the splashes generated during the processing process to slide down the inclined surface, prevent the splashes from entering the inside of the slide groove 26, and protect the cleanliness of the slide groove 26 and the operation stability of the device. A through hole 28 is provided in the middle of the top surface of the support plate 4, and the through hole 28 and the bracket 5 are staggered, so that the splashes generated during the processing can be directly dropped through the through hole 28, and the splashes can be prevented from accumulating on the surface of the device. The collection box 27 is designed in an inverted cone shape, which helps to collect the splashes in a centralized manner and facilitate subsequent cleaning; a sealing cover is movably provided at the bottom of the collection box 27, which can be opened when cleaning the splashes to prevent the splashes from leaking out and keep the working environment clean. In addition, baffles 29 are fixed on both sides of the top surface of the support plate 4, which can further improve the cleanliness and safety of the device operation. This achieves efficient management and convenient cleaning of splashes, while protecting key components of the equipment and extending its service life.

[0056] Please see attached Figure 1-Figure 3 The driving mechanism 3 includes a motor 301, which is located on the outer wall of the base 1. A gear 302 is installed at the output end of the motor 301. A rack 303 is arranged at the edge of the top surface of the support plate 4, and the gear 302 is meshed with the rack 303.

[0057] In the present invention, the driving mechanism 3 includes a motor 301, which is mounted on the outer wall of the base 1, and a gear 302 is fixed to the output end thereof, and the gear 302 is meshed with a rack 303 provided at the edge of the top surface of the support plate 4. Driven by the motor 301, the gear 302 rotates to drive the rack 303 to move linearly, thereby achieving precise displacement of the support plate 4 inside the base 1. Therefore, it is ensured that the support plate 4 can flexibly move the carrier plate 11 and the workpiece to the processing area below the laser head 2 or move it out of the processing area, thereby improving the operating efficiency and processing flexibility of the equipment.

[0058] Working principle: When in use, first start the motor 1 301, through the meshing transmission of the gear 302 and the rack 303, the motor 1 301 drives the support plate 4 together with the carrier plate 11 to move out of the processing area of ​​the laser head 2 and move to one side of the base 1, then the operator places the workpiece to be processed on the carrier plate 11, and then starts the motor 3 13 to drive the rotating plate 14 to rotate, and gradually squeezes the ejector rod 16 by the arc surface 15 on the rotating plate 14, so that the ejector rod 16 pushes the ejector block 17 and the clamping block 18 to move toward the middle of the carrier plate 11, and as the ejector block 17 moves, the clamping block 18 gradually moves closer, and finally clamps the workpiece, and ensures that the center of the workpiece is aligned with the carrier plate 11 The center remains coaxial to avoid the phenomenon of unstable clamping caused by the deviation of the center of gravity. When clamping the workpiece, the extrusion rod 31 will also squeeze the spring 32, and the motor 1 301 is started again to make the support plate 4 drive the carrier plate 11 and the workpiece to move to the processing area below the laser head 2, turn on the laser head 2, and use the ultra-short pulse laser to open a hole in the workpiece. During the processing, the electric push rod 10 is started to lift one side of the carrier plate 11. The workpiece can be kept horizontal or inclined according to the processing requirements to meet the processing requirements of different angles. After starting the motor 2 6 to drive the threaded rod 7 to rotate, the threaded rod 7 drives the connecting plate 9 to adjust the electric push rod 1 through the slider 8 0 bottom position, and then adjust the fulcrum position of the electric push rod 10, and the change of the fulcrum position can further expand the adjustment range of the angle of the carrying plate 11, so that the equipment can adapt to more complex processing tasks and improve flexibility. In the processing, the slider 8 is designed to be inverted mountain shape and cooperates with the slide groove 26 inside the bracket 5. Therefore, the splashes generated during the punching process will slide along the inclined surface of the slider 8 and the slide groove 26, and the splashes that slide down will directly fall into the collection box 27 through the through hole 28 on the support plate 4, so as to avoid the splashes from accumulating inside the device. Folding plates 23 are installed on both sides of the limit hole 19. When the top block 17 moves, one side folds The stacking plate 23 is squeezed and folded, and the other side is pulled and stretched, which can dynamically block the limit hole 19 to prevent splashing objects from entering the interior of the carrier plate 11, thereby ensuring the cleanliness and operational stability of the device. After the laser head 2 is processed, the motor 1 301 is started to move the support plate 4 together with the carrier plate 11 and the workpiece from the processing area back to the side of the base 1, and the motor 3 13 is started to rotate the rotating plate 14 in the opposite direction, so that the arc surface 15 gradually moves away from the push rod 16. At this time, the spring 32 extends the push rod 31, thereby driving the push block 17 and the clamping block 18 to return to their initial positions, completing the workpiece unclamping operation. Finally, the operator removes the processed workpiece and prepares for the next processing.

[0059] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A micro-hole manufacturing device based on ultrashort pulse laser, characterized in that: include: A base (1) with a laser head (2) mounted on the top thereof for processing a workpiece; A support plate (4) is displaced in the base (1) through a driving mechanism (3) and has a bracket (5) fixed on one side. A second motor (6) at the end of the bracket (5) is used to drive the threaded rod (7) to rotate and move the slider (8) in the bracket (5); The connecting plate (9) can drive the electric push rod (10) to move after moving with the slider (8) and is used to adjust the fulcrum of the electric push rod (10); A carrying plate (11) is movably connected to an output end of an electric push rod (10), wherein the electric push rod (10) is used to lift one side of the carrying plate (11) to place it in a horizontal or inclined state; A clamping assembly (12) is installed in the middle of the carrying plate (11) and is used for clamping a workpiece.

2. The micro-hole manufacturing device based on ultrashort pulse laser according to claim 1, characterized in that: The clamping assembly (12) comprises a motor three (13), wherein the motor three (13) is fixed to the bottom surface of the bearing plate (11) through a mounting frame (30), a rotating plate (14) is installed at the output end of the motor three (13), a top block (17) is movably arranged inside the bearing plate (11), the bottom of the top block (17) is fixedly connected to a top rod (16), and the top of the top block (17) is connected to a clamping block (18), after the motor three (13) drives the rotating plate (14) to rotate, the arc surface (15) inside the rotating plate (14) will squeeze the top rod (16) to drive the top block (17) to move, and at this time, the clamping block (18) will move with the top block (17) and approach the middle part of the bearing plate (11) to clamp the workpiece.

3. The micro-hole manufacturing device based on ultrashort pulse laser according to claim 2, characterized in that: A squeezing rod (31) is fixed on one side of the top block (17), and a spring (32) is arranged on one side of the squeezing rod (31). Both the squeezing rod (31) and the spring (32) are located inside the bearing plate (11), and when the top block (17) is close to the middle of the bearing plate (11), the squeezing rod (31) compresses the spring (32).

4. The micro-hole manufacturing device based on ultrashort pulse laser according to claim 3 is characterized in that: Ear plates (20) are connected to both sides of the outer wall of the top block (17), a limiting hole (19) is provided inside the bearing plate (11), the top block (17), the ear plates (20), the extrusion rod (31) and the spring (32) are all located in the limiting hole (19), and the ear plates (20) on both sides are arranged in an inverted V shape.

5. The micro-hole manufacturing device based on ultrashort pulse laser according to claim 4, characterized in that: Folding plates (23) are installed on both sides of the inner wall of the limiting hole (19), and the adjacent sides of the folding plates (23) on the two sides are respectively connected to the opposite sides of the outer wall of the top block (17).

6. The micro-hole manufacturing device based on ultrashort pulse laser according to claim 4, characterized in that: A guide rod (21) is movably provided on the top of the top block (17), one side of the guide rod (21) is connected to the clamping block (18), and a knob (22) is provided on the top surface of the top block (17), the bottom of the knob (22) abuts against the outer wall of the guide rod (21).

7. The micro-hole manufacturing device based on ultrashort pulse laser according to claim 1, characterized in that: A lower ball seat (24) is fixed on the top surface of the connecting plate (9), an upper ball seat (25) is installed at the edge of the bottom surface of the supporting plate (11), and the top and bottom of the electric push rod (10) are movably connected to the upper ball seat (25) and the lower ball seat (24) respectively through ball heads.

8. The micro-hole manufacturing device based on ultrashort pulse laser according to claim 1, characterized in that: A sliding groove (26) is provided inside the bracket (5), and the sliding block (8) is slidably connected in the sliding groove (26), and the sliding block (8) is arranged in an inverted mountain shape.

9. The micro-hole manufacturing device based on ultrashort pulse laser according to claim 1, characterized in that: The driving mechanism (3) comprises a motor (301), the motor (301) being located on the outer wall of the base (1), a gear (302) being installed at the output end of the motor (301), a rack (303) being arranged at the edge of the top surface of the support plate (4), and the gear (302) being meshed with the rack (303).

10. The micro-hole manufacturing device based on ultrashort pulse laser according to claim 1, characterized in that: A through hole (28) is provided in the middle of the top surface of the support plate (4), and the through hole (28) and the bracket (5) are staggeredly distributed. A collecting box (27) is fixed to the bottom surface of the support plate (4), and the collecting box (27) is set to be an inverted cone. A sealing cover is movably provided at the bottom of the collecting box (27), and baffles (29) are fixed to both sides of the top surface of the support plate (4).

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