Stacking device on silicon wafer box conveying line

Abstract

The embodiment of the invention discloses a stacking device on a silicon wafer box conveying line, and particularly relates to the technical field of stacking devices.The stacking device comprises a base, a plurality of supporting columns distributed at intervals are installed at the top of the base, and the same functional assembly used for stacking silicon wafer boxes is installed at the tops of the multiple supporting columns; the functional assembly comprises a supporting table installed on the tops of the multiple supporting columns. The two worms on the fixed shaft drive the corresponding worm gears to rotate, the two worm gears can drive the two movable shafts to synchronously rotate outwards through the corresponding linkage shafts due to the fact that the two worms are opposite in screw direction, and the two material pushing plates located at the material table can jack the silicon wafer box to the supporting table along with operation of the movable shafts. When the silicon wafer boxes are stacked, the pushing plates located on the supporting table can jack up and be slowly separated from the stacked silicon wafer boxes, the silicon wafer boxes can be stacked more effectively and rapidly by means of the cycles of the four pushing plates, and the steps are simple.

Description

Technical Field

[0001] The invention belongs to the technical field of stacking devices, and in particular relates to a stacking device on a silicon wafer box conveyor line. Background Art

[0002] A wafer box is a container used to package and protect semiconductor wafers (such as silicon wafers, sapphire, etc.), providing a safe packaging environment for semiconductor wafers to prevent physical damage during transportation and storage.

[0003] Silicon wafer boxes are needed for silicon wafer processing, and the silicon wafer boxes need to be stacked on the conveyor line, as shown in the prior art with publication number CN111908144B. Although, the prior art starts the lifting cylinder to drive the empty silicon wafer box to rise and rest against the pallet, and then starts the driving cylinder, the driving cylinder drives the bracket to move forward, and uses the inclined structure to realize the movement of both sides of the pallet relative to the fixed seat, so that the empty silicon wafer box on the upper side of the pallet is separated from the pallet and stacked on the empty silicon wafer box on the stacking plate, and the lifting cylinder continues to drive all the empty silicon wafer boxes to move upward. When the lifting cylinder stroke ends, the empty silicon wafer box is located on the upper side of the pallet, the driving cylinder resets, driving the pallet to reset, and then the lifting cylinder resets, the stacking plate descends through the pallets to the starting point, and the empty silicon wafer boxes on the stacking plate are supported by the pallet; at the same time, the stacking of the empty silicon wafer boxes from bottom to top is also realized. However, when stacking silicon wafer boxes, the prior art needs to start the lifting cylinder first, then drive the driving cylinder, clamp and fix the silicon wafer box, and then start the lifting cylinder. This results in more steps in the technical solution, which will affect the stacking efficiency of the technical solution. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art, and discloses a stacking device on a silicon wafer box conveyor line.

[0005] An embodiment of the present invention provides a stacking device on a silicon wafer box conveyor line, comprising:

[0006] Base;

[0007] A plurality of pillars, the plurality of pillars are installed at intervals on the top of the base;

[0008] A functional assembly for stacking wafer boxes, the functional assembly being mounted on top of the plurality of pillars; wherein the functional assembly comprises:

[0009] A support platform, the support platform is installed on the top of the plurality of pillars, and a connected material hole and two through holes are opened inside the support platform, and the two through holes are respectively arranged on both sides of the material hole;

[0010] A movable shaft, the movable shaft is movably installed inside the two through holes through a rotating shaft, and four pusher plates distributed in a ring array are installed outside the movable shaft;

[0011] Two fixed plates are installed on the rear side of the support platform, and a fixed shaft connected movably by a bearing is installed between the two fixed plates. Worms are sleeved on the outside of both ends of the fixed shaft, and the thread directions of the two worms are opposite. A linkage shaft is provided on the top of each worm, and a worm wheel meshing with the worm is sleeved on the outside of the rear end of the linkage shaft, and the front end of the linkage shaft passes through the support platform and is fixed to the movable shaft;

[0012] The material platform is arranged at the bottom of the support platform, and a connecting plate for connecting to the support platform is installed on the top of the rear end of the material platform, and push holes are opened on both sides of the material platform, and one push plate is arranged inside the push hole.

[0013] In some possible embodiments, two spaced-apart side panels are installed on the top of the support platform, and a side hole is opened inside the bottom end of the side panel, the side hole is connected to the through hole, and the push plate located at the top of the movable shaft is arranged inside the side hole.

[0014] In some possible embodiments, air supply ducts are provided on both the front and rear sides of the push plate located at the top of the movable shaft, and one end of the air supply duct close to the support platform extends to the inside of the side panel, and one end of the air supply duct close to the side panel is set to be inclined.

[0015] In some possible embodiments, a bellows is installed on the top of the base;

[0016] A fan is installed inside the rear end of the bellows, and both sides of the front end of the bellows are fixedly connected with a delivery pipe;

[0017] One end of the delivery pipe away from the wind box extends to the top of the support platform and is fixedly connected with a connecting pipe, and the front and rear ends of the connecting pipe are respectively fixedly connected with one side of the two air supply pipes away from the side plates.

[0018] In some possible embodiments, the tops of the two side panels are provided with a same mounting plate, and the bottoms of the front and rear ends of the mounting plate are provided with pressing plates, and the pressing plates are arranged between the two side panels;

[0019] A mounting bracket is provided on the side away from the two pressure plates, the top of the mounting bracket is fixed to the bottom of the mounting plate, two spaced electric push rods are installed on the side of the mounting bracket close to the pressure plate, and the end of the electric push rod away from the mounting bracket is fixed to the pressure plate.

[0020] In some possible embodiments, two spaced-apart mounting seats are installed on the top of the rear end of the support platform, and a mounting shaft movably connected by a bearing is installed between the two mounting seats, and support plates are provided on the outside of both ends of the mounting shaft, and the end of the support plate away from the mounting shaft is fixed to one side of the mounting plate.

[0021] In some possible embodiments, a first servo motor is installed on a side of one of the fixing plates away from the fixing shaft, and an output shaft of the first servo motor passes through the fixing plate and is fixed to the fixing shaft.

[0022] In some possible embodiments, a second servo motor is installed on a side of one of the mounting seats away from the mounting shaft, and an output shaft of the second servo motor passes through the mounting seat and is fixed to the mounting shaft.

[0023] In some possible embodiments, two guide plates are installed on the top of the front end of the material table, and the two guide plates are symmetrically distributed about the central axis of the material table.

[0024] In some possible embodiments, a dustproof net is provided on the rear side of the fan, and the dustproof net is installed inside the rear end of the wind box.

[0025] Beneficial effects:

[0026] The stacking device on the wafer box conveyor line of the embodiment of the present invention drives the corresponding worm gears to rotate through the two worms on the fixed shaft. Since the two worms have opposite screw directions, the two worm gears can drive the two movable shafts to rotate outward synchronously through the corresponding linkage shafts, and the two pusher plates located at the material table can lift the wafer box onto the support table with the operation of the movable shaft, and the pusher plates located on the support table will lift and slowly separate from the stacked wafer boxes, and the unsupported wafer boxes will fall onto the subsequent wafer boxes on top, and with the help of the repetitive operation of the four pusher plates, the wafer boxes can be stacked more effectively and quickly, and the steps are simple;

[0027] Furthermore, the stacking device on the wafer box conveyor line of the embodiment of the present invention sucks external air into the air box through the fan, and conveys it to the air supply pipe through the conveying pipe and the connecting pipe, and then conveys the air to between the two side plates through the air supply pipe, thereby generating an upward force at the bottom of the wafer box, thereby slowing down the falling speed of the wafer box, avoiding damage caused by excessive falling impact, and thus ensuring the integrity of the wafer box;

[0028] Furthermore, the stacking device on the silicon wafer box conveyor line of the embodiment of the present invention drives the pressure plate to squeeze and fix the silicon wafer box by extending the electric push rod, and then drives the mounting shaft and the support plate thereon to rotate by the second servo motor. The two support plates then drive the mounting plate to rotate outward with the mounting shaft as the center, thereby flipping and moving the silicon wafer box fixed by the pressure plate to the ground, so that the staff can conveniently collect the silicon wafer box. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The above and other features, advantages and aspects of the embodiments of the present invention will become more apparent with reference to the following detailed description in conjunction with the accompanying drawings. Throughout the accompanying drawings, the same or similar reference numerals represent the same or similar elements. It should be understood that the drawings are schematic and that components and elements are not necessarily drawn to scale.

[0030] Figure 1 It is a schematic diagram of the overall structure of a stacking device on a silicon wafer box conveyor line according to an embodiment of the present invention;

[0031] Figure 2 A rear view of a support platform according to an embodiment of the present invention;

[0032] Figure 3 For the present invention Figure 2 Enlarged view of part A;

[0033] Figure 4 A schematic diagram of a mounting plate after adjustment according to an embodiment of the present invention;

[0034] Figure 5 A cross-sectional view of a support platform according to an embodiment of the present invention;

[0035] Figure 6 A top view of a support platform according to an embodiment of the present invention;

[0036] Figure 7 It is a side sectional view of a bellows according to an embodiment of the present invention.

[0037] The accompanying drawings are marked as follows: 1. base; 2. pillar; 3. support platform; 4. material hole; 5. through hole; 6. movable shaft; 7. push plate; 8. fixed plate; 9. fixed shaft; 10. worm; 11. linkage shaft; 12. worm gear; 13. material platform; 14. connecting plate; 15. side plate; 16. side hole; 17. air supply duct; 18. bellows; 19. fan; 20. conveying pipe; 21. connecting pipe; 22. mounting plate; 23. pressure plate; 24. mounting bracket; 25. electric push rod; 26. mounting seat; 27. mounting shaft; 28. support plate; 29. ​​first servo motor; 30. second servo motor; 31. guide plate; 32. dustproof net; 33. push hole. DETAILED DESCRIPTION

[0038] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the described embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work are within the scope of protection of the present invention.

[0039] Unless otherwise specified, the technical terms or scientific terms used in the embodiments of the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. "Including" or "comprising" used in the embodiments of the present invention neither limit the shapes, numbers, steps, actions, operations, components, originals and / or their groups mentioned, nor exclude the appearance or addition of one or more other different shapes, numbers, steps, actions, operations, components, originals and / or their groups, or the addition of these. In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number and order of the indicated technical features. Thus, the features defined as "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the embodiments of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0040] Unless otherwise specifically stated, the relative arrangement of the components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that for ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship, and the techniques, methods and devices known to ordinary technicians in the relevant fields may not be discussed in detail, but where appropriate, the techniques, methods and devices shown should be considered as part of the authorized specification. In all examples shown and discussed here, any specific other examples may have different values. It should be noted that similar symbols and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0041] In the description of the embodiments of the present invention, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In the embodiments of the present invention, the schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in the embodiments of the present invention and the features of the different embodiments or examples, without contradiction.

[0042] Refer to the instruction manual Figure 1-7 An embodiment of the present invention provides a stacking device on a silicon wafer box conveyor line, including a base 1, a plurality of spaced-apart pillars 2 are installed on the top of the base 1, and the same functional component for stacking silicon wafer boxes is installed on the top of the plurality of pillars 2.

[0043] like Figure 1 , 2 , 3, 5 and 6, the functional component includes a support platform 3 installed on the top of multiple pillars 2, and a connected material hole 4 and two through holes 5 are opened inside the support platform 3, and the two through holes 5 are respectively arranged on both sides of the material hole 4, and a movable shaft 6 movably connected through a rotating shaft is installed inside the two through holes 5, and four push plates 7 distributed in a ring array are installed outside the movable shaft 6, and the cross-section of the push plate 7 is set to be L-shaped; two fixed plates 8 are installed on the rear side of the support platform 3, and a fixed shaft 9 movably connected through a bearing is installed between the two fixed plates 8, and worms 10 are sleeved on the outside of both ends of the fixed shaft 9, and the thread directions of the two worms 10 are opposite, and each worm 10 is on the top A linkage shaft 11 is provided on each of the parts, and a worm wheel 12 meshing with the worm 10 is sleeved on the outer rear end of the linkage shaft 11, and the front end of the linkage shaft 11 passes through the support table 3 and is fixed together with the movable shaft 6; a material table 13 is provided at the bottom of the support table 3, and a connecting plate 14 for connecting to the support table 3 is installed on the top of the rear end of the material table 13, and pushing holes 33 are opened on both sides of the material table 13, and one of the pushing plates 7 is arranged inside the pushing hole 33, and two guide plates 31 are installed on the top of the front end of the material table 13, and the two guide plates 31 are symmetrically distributed about the central axis of the material table 13, and the movement of the silicon wafer box is limited by the guide plates 31, so as to ensure the movement stability of the silicon wafer box.

[0044] The silicon wafer box is transported to the material table 13 through the conveyor line, and then the staff drives the two worms 10 on the fixed shaft 9 to rotate by the first servo motor 29, and the two worms 10 then drive the corresponding worm wheels 12 to rotate. Because the two worms 10 have opposite screw directions, the two worm wheels 12 can drive the two movable shafts 6 to rotate outward synchronously through the corresponding linkage shafts 11. When the two movable shafts 6 rotate outward synchronously, the two push plates 7 located at the material table 13 can lift the silicon wafer box onto the support table 3 with the operation of the movable shaft 6, and the push plates 7 located on the support table 3 will be lifted and slowly separated from the stacked silicon wafer boxes, and the unsupported silicon wafer boxes will fall onto the subsequent top silicon wafer boxes, so that the stacking process of the silicon wafer boxes can be completed, and with the help of the repetitive operation of the four push plates 7, the silicon wafer boxes can be stacked more effectively and quickly.

[0045] In order to avoid damage caused by excessive impact of the silicon wafer box falling, it is necessary to slow down the impact of the silicon wafer box falling, such as Figure 1 , 2 As shown in Figures 4, 5 and 7, two side panels 15 are installed at intervals on the top of the support platform 3, and a side hole 16 is opened inside the bottom end of the side panel 15, the side hole 16 is connected to the through hole 5, and the push plate 7 located at the top of the movable shaft 6 is arranged inside the side hole 16; the push plate 7 located at the top of the movable shaft 6 is provided with an air supply pipe 17 on both the front and rear sides, the end of the air supply pipe 17 close to the support platform 3 extends to the inside of the side panel 15, and the end of the air supply pipe 17 close to the side panel 15 is set to an inclined shape, a bellows 18 is installed on the top of the base 1, a fan 19 is installed inside the rear end of the bellows 18, a dustproof net 32 ​​is provided on the rear side of the fan 19, and the dustproof net 32 ​​is installed inside the rear end of the bellows 18, and dust and other impurities are blocked by the dustproof net 32 To prevent dust and other impurities from entering the bellows 18 and causing pollution, both sides of the front end of the bellows 18 are fixedly connected with a delivery pipe 20, and the end of the delivery pipe 20 away from the bellows 18 extends to the top of the support platform 3 and is fixedly connected with a connecting pipe 21, and the front and rear ends of the connecting pipe 21 are respectively fixedly connected with the two air supply pipes 17 on one side away from the side plate 15. The external air is sucked into the bellows 18 by the fan 19, and is transported to the inside of the air supply pipe 17 through the delivery pipe 20 and the connecting pipe 21, and then the air is transported to between the two side plates 15 through the air supply pipe 17, thereby generating an upward force at the bottom of the silicon wafer box, thereby slowing down the falling speed of the silicon wafer box and avoiding damage caused by excessive falling impact, thereby ensuring the integrity of the silicon wafer box.

[0046] To improve the convenience of staff receiving wafer boxes, Figure 1 , 2As shown in Figure 4, the top of the two side panels 15 is provided with a same mounting plate 22, and the bottom of the front and rear ends of the mounting plate 22 are provided with a pressing plate 23, and the pressing plate 23 is arranged between the two side panels 15; the two pressing plates 23 are provided with a mounting bracket 24 on the side away from each other, and the top of the mounting bracket 24 is fixed to the bottom of the mounting plate 22, and the side of the mounting bracket 24 close to the pressing plate 23 is provided with two spaced electric push rods 25, and the end of the electric push rod 25 away from the mounting bracket 24 is fixed to the pressing plate 23, and the top of the rear end of the support platform 3 is provided with two spaced mounting seats 26, and the two mounting seats A mounting shaft 27 movably connected by a bearing is installed between the seats 26, and support plates 28 are sleeved on the outside of both ends of the mounting shaft 27. The end of the support plate 28 away from the mounting shaft 27 is fixed together with one side of the mounting plate 22. The extension of the electric push rod 25 drives the pressure plate 23 to squeeze and fix the silicon wafer box, and then the second servo motor 30 drives the mounting shaft 27 and the support plate 28 thereon to rotate, and the two support plates 28 drive the mounting plate 22 to rotate outward with the mounting shaft 27 as the center, thereby the silicon wafer box fixed by the pressure plate 23 can be flipped and moved to the ground, so that the staff can easily collect the silicon wafer box.

[0047] In order to improve the rotation efficiency of the worm 10 and the worm wheel 12, Figure 2 , 3 As shown in 5, a first servo motor 29 is installed on one side of one of the fixed plates 8 away from the fixed shaft 9, and the output shaft of the first servo motor 29 passes through the fixed plate 8 and is fixed to the fixed shaft 9. By connecting the output shaft of the first servo motor 29 with the fixed shaft 9, the first servo motor 29 can drive the two worms 10 on the fixed shaft 9 to rotate, and the worm 10 then drives the worm wheel 12 to rotate.

[0048] In order to facilitate driving the mounting shaft 27 to rotate, Figure 2 and 3 As shown, a second servo motor 30 is installed on one side of one of the mounting seats 26 away from the mounting shaft 27, and the output shaft of the second servo motor 30 passes through the mounting seat 26 and is fixed to the mounting shaft 27. Since the output shaft of the second servo motor 30 is connected to the mounting shaft 27, the second servo motor 30 can drive the mounting shaft 27 and the support plate 28 thereon to rotate, thereby achieving the effect of flipping and adjusting the mounting plate 22.

[0049] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A stacking device on a silicon wafer box conveyor line, characterized in that: include: Base; A plurality of pillars, the plurality of pillars are installed at intervals on the top of the base; A functional assembly for stacking wafer boxes, the functional assembly being mounted on top of the plurality of pillars; wherein the functional assembly comprises: A support platform, the support platform is installed on the top of the plurality of pillars, and a connected material hole and two through holes are opened inside the support platform, and the two through holes are respectively arranged on both sides of the material hole; A movable shaft, the movable shaft is movably installed inside the two through holes through a rotating shaft, and four pusher plates distributed in a ring array are installed outside the movable shaft; Two fixed plates are installed on the rear side of the support platform, and a fixed shaft connected movably by a bearing is installed between the two fixed plates. Worms are sleeved on the outside of both ends of the fixed shaft, and the thread directions of the two worms are opposite. A linkage shaft is provided on the top of each worm, and a worm wheel meshing with the worm is sleeved on the outside of the rear end of the linkage shaft, and the front end of the linkage shaft passes through the support platform and is fixed to the movable shaft; The material platform is arranged at the bottom of the support platform, and a connecting plate for connecting to the support platform is installed on the top of the rear end of the material platform, and push holes are opened on both sides of the material platform, and one push plate is arranged inside the push hole.

2. A stacking device on a silicon wafer box conveyor line according to claim 1, characterized in that: Two spaced-apart side plates are installed on the top of the support platform, and a side hole is opened inside the bottom end of the side plate, the side hole is connected with the through hole, and the push plate located on the top of the movable shaft is arranged inside the side hole.

3. The stacking device on a silicon wafer box conveyor line according to claim 2, characterized in that: Air supply pipes are arranged on both the front and rear sides of the push plate located at the top of the movable shaft. One end of the air supply pipe close to the support platform extends to the inside of the side plate, and one end of the air supply pipe close to the side plate is arranged to be inclined.

4. The stacking device on a silicon wafer box conveyor line according to claim 3, characterized in that: A bellows is installed on the top of the base; A fan is installed inside the rear end of the bellows, and both sides of the front end of the bellows are fixedly connected with a delivery pipe; One end of the delivery pipe away from the wind box extends to the top of the support platform and is fixedly connected with a connecting pipe, and the front and rear ends of the connecting pipe are respectively fixedly connected with one side of the two air supply pipes away from the side plates.

5. The stacking device on a silicon wafer box conveyor line according to claim 4, characterized in that: The tops of the two side panels are provided with a same mounting plate, and the bottoms of the front and rear ends of the mounting plate are provided with pressing plates, and the pressing plates are arranged between the two side panels; A mounting bracket is provided on the side away from the two pressure plates, the top of the mounting bracket is fixed to the bottom of the mounting plate, two spaced electric push rods are installed on the side of the mounting bracket close to the pressure plate, and the end of the electric push rod away from the mounting bracket is fixed to the pressure plate.

6. The stacking device on a silicon wafer box conveyor line according to claim 5, characterized in that: Two spaced-apart mounting seats are installed on the top of the rear end of the support platform, and a mounting shaft movably connected by a bearing is installed between the two mounting seats. Support plates are sleeved on the outside of both ends of the mounting shaft, and the end of the support plate away from the mounting shaft is fixed to one side of the mounting plate.

7. A stacking device for a silicon wafer box conveyor line according to any one of claims 1 to 6, characterized in that: A first servo motor is installed on one side of one of the fixing plates away from the fixing shaft, and an output shaft of the first servo motor passes through the fixing plate and is fixed to the fixing shaft.

8. The stacking device on a silicon wafer box conveyor line according to claim 6, characterized in that: A second servo motor is installed on one side of one of the mounting seats away from the mounting shaft, and an output shaft of the second servo motor passes through the mounting seat and is fixed to the mounting shaft.

9. A stacking device on a silicon wafer box conveyor line according to any one of claims 1 to 6, characterized in that: Two guide plates are installed on the top of the front end of the material platform, and the two guide plates are symmetrically distributed about the central axis of the material platform.

10. The stacking device on a silicon wafer box conveyor line according to claim 4, characterized in that: A dustproof net is arranged at the rear side of the fan and is installed inside the rear end of the bellows.

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