Ion source electrospray device convenient to install

Abstract

The invention relates to the technical field of ion sources, in particular to an ion source electric spraying device convenient to install, which comprises a top seat, and a groove is formed in the inner side of the top seat. The first motor is started to drive the worm and drive the two worm wheels to rotate, the worm wheels drive the lead screws to enable the sliding blocks to slide in the side guide rails, the gears at the inner ends of the sliding blocks are meshed with the racks fixed to the bottom of the top base, and when the sliding blocks conduct linear displacement, the gears roll on the racks to drive the base plate to rotate; during installation, the ion source body is installed on the installation base through bolts, during disassembly, the base plate is driven to move forwards, the base plate is perpendicular when the base plate reaches the foremost end, the ion source body automatically overturns, and the overturning mode that the displacement mechanism, the driving mechanism and the moving mechanism are matched is uniform in speed, stable, free of violent shaking and good in stability. And the overturning of the substrate in the forward moving process can further adjust the ion source body to leave the top seat, so that the maintenance convenience is improved, the labor is saved, and the maintenance stability is high.

Description

Technical Field

[0001] The present application relates to the technical field of ion sources, and in particular to an ion source electrospray device which is easy to install. Background Art

[0002] The ion source electrospray device is a commonly used ionization component in mass spectrometers. Its working process is as follows: the sample is dissolved in a polar volatile solvent, and the solution passes through a quartz capillary at a certain flow rate; then a high positive or negative voltage is applied to the tip of the capillary, and the charge at the tip of the capillary is gathered under the action of a strong electric field to produce charged droplets. Subsequently, the charged droplets are desolvated by auxiliary effects such as sweep gas or heating, and finally ions are produced. This device can generate multi-charged ions from large-mass organic molecules, and it is a soft ionization technology that can relatively completely retain the molecular structure to be analyzed, and has unique advantages in the analysis of biological macromolecules and the study of unstable molecules or highly active species. At present, when the ion source is maintained / repaired, it is usually removed on site. However, due to the limited installation location and operation space, it is particularly difficult to remove or replace parts. In addition, in order to reduce the volume of the chamber of the vacuum etcher, the ion source is usually fixed to the top of the upper plate with a flange. When engineers remove the ion source, they need to lift out the entire ion source structure system, or they need to drill into a very small space to perform maintenance / repair operations in a limited space, which seriously affects the efficiency of maintenance / repair operations. In order to solve the problem of inconvenient inspection and maintenance of the above-mentioned ion source equipment, improved designs have been made in the prior art. For example, a Chinese patent with the announcement number "CN112885697B" discloses an ion source installation structure and vacuum equipment, which is fixed by a connecting plate, a lifting mechanism, a sliding system and a rotating structure of the ion source; when the ion source needs to be maintained / repaired, the connecting plate is lifted by the lifting mechanism, and the connecting plate is lifted a certain distance relative to the panel under the guidance of the sliding system, and then the ion source is flipped around the rotating structure at an angle, and the ion source is turned to a set position; thereby, the working surface of the ion source can be directed to the side, which is convenient for engineers to perform maintenance / repair operations on the ion source, thereby improving the work efficiency; However, as far as the current situation is concerned, there are many drawbacks in the above-mentioned maintenance and disassembly process. In actual operation, maintenance and disassembly still need to rely on manual pulling and flipping of the ion source equipment, but it should be noted that during the entire manual operation, due to the difference in pulling strength of different maintenance personnel, it is very easy to cause violent shaking during the flipping maintenance process. This violent shaking will increase the risk of damage to the ion source equipment, thereby affecting the normal use and life of the equipment; in addition, the ion source equipment usually has a certain weight, especially for those larger ion source equipment. It is obviously very inconvenient to rely solely on manual flipping operations during maintenance. On the one hand, the heavy weight makes maintenance difficult. Personnel need to expend a lot of physical strength during the operation; on the other hand, it also increases the difficulty and instability of the operation; moreover, during the maintenance process, the ion source is still located on the top of the equipment, which means that during maintenance, the overall part of the equipment is still easy to block and hinder the maintenance work. Even if the maintenance personnel have made great efforts to turn the ion source equipment over, due to the limitations of its position, the equipment structure of other parts may still interfere with the smooth progress of the maintenance work; in summary, it can be seen that there are indeed certain defects and deficiencies during its overall application period. In order to improve the maintenance efficiency and safety of the ion source equipment and ensure the stable operation of the equipment, it is urgent to improve its current maintenance method. Summary of the invention

[0003] In order to improve the convenience of maintenance and installation of existing ion source equipment, the present application provides an ion source electrospray device that is easy to install.

[0004] The present application provides an ion source electrospray device that is easy to install, which adopts the following technical solution: comprising a top seat, a groove is provided on the inner side of the top seat, displacement mechanisms are fixedly installed at both ends of the groove, a driving mechanism is fixedly installed at the middle of the back side of the top seat, the output end of the driving mechanism is connected to the rear side of the displacement mechanism, a movable mechanism is fixedly installed between the inner sides of the displacement mechanism, a mounting seat is fixedly installed on the top of the movable mechanism, and an ion source body is installed on the top of the mounting seat by bolts; The displacement mechanism includes side guide rails, which are fixedly installed on both sides of the inside of the groove. The inside of the side guide rails is rotatably connected to a first screw rod, and the rear end of the first screw rod passes through the guide rails and is connected to the driving mechanism. The outer surface of the first screw rod is threadedly connected to a slider, and the slider is slidably connected to the inside of the side guide rails. The inner side of the slider is rotatably connected to a transmission assembly, and the movable mechanism is installed on the inner side of the transmission assembly.

[0005] Optionally, the driving mechanism includes side plates and a worm gear, the side plates are fixedly mounted on both ends of the back side of the top seat, a first motor is fixedly connected to the outer side of one side plate, the output end of the first motor passes through the side plate and a worm is fixedly mounted thereon, the worm is rotatably connected between the inner sides of the two side plates, the worm gear is rotatably connected to both sides of the back side of the top seat, the worm and worm gear are transmission connected, and the rear end of the first screw and the front end of the worm are fixedly connected.

[0006] Optionally, a cover plate is fixedly mounted on the back side of the top seat, the cover plate covers the outer sides of the worm and the worm wheel, and the cross-sectional shape of the cover plate is set to be L-shaped.

[0007] Optionally, cylinders are fixedly connected to the four corners of the bottom of the top seat, and a base plate is fixedly installed on the bottom of the cylinder.

[0008] Optionally, the transmission assembly includes a gear and a fixed plate, the gear is rotatably connected to the inner side of the slider, the fixed plate is fixedly installed on the bottom of the top seat on both sides of the concave seat, the top of the fixed plate is fixedly connected with a rack, the rack is meshingly connected to the gear, and the inner side of the gear is fixedly connected to the movable mechanism.

[0009] Optionally, the movable mechanism includes a base plate, which is fixedly mounted on the inner side of the gear, a slide groove is opened in the middle of the top of the base plate, a second screw rod is rotatably connected to the inner side of the slide groove, a sliding block is threadedly connected to the outer surface of the second screw rod, the sliding block is slidably connected to the inside of the slide groove, the top of the sliding block is fixedly connected to the bottom of the mounting seat, a second motor is fixedly connected to the middle of the back side of the base plate, and the output end of the second motor is fixedly connected to the rear end of the second screw rod.

[0010] Optionally, the cross-sectional shape of the inner cavity of the slide groove and the cross-sectional shape of the sliding block are both set to be a convex shape, and the inner cross-sectional shape of the side guide rail and the front view shape of the sliding block are both set to be a cross shape.

[0011] Optionally, both sides of the top of the substrate are provided with supporting reserved grooves, the supporting reserved grooves are provided on both sides of the top of the substrate, the interiors of the supporting reserved grooves are slidably connected with supporting plates, and the top of the supporting plates are fixedly connected to both sides of the bottom of the mounting seat.

[0012] Optionally, the mounting seat, the top seat and the inner wall of the groove are all configured to be arc-shaped, and the outer surfaces of the sliding block and the sliding block are fixedly connected with wear-resistant gaskets.

[0013] Optionally, a protective shell is fixedly mounted on the outer side of the ion source body, and an electronic component chassis is fixedly mounted on the top rear side of the protective shell.

[0014] In summary, this application includes the following beneficial technical effects: 1. The driving mechanism and the displacement mechanism cooperate with each other so that when the device needs to be repaired and disassembled, the first motor is started, and the motor drives the worm to rotate. Since the worm wheel is connected to the worm, and the two worm wheels are driven by a worm, the first motor can synchronously drive the two worm wheels to rotate. The rotation of the worm wheel drives the first screw inside the side guide rail to rotate, and then drives the slider to slide smoothly in the side guide rail. The sliding of the slider drives the substrate to move forward and backward. In this way, when repairing, the ion source body on the substrate can be removed from the groove, avoiding the obstruction of the top seat to the repair when the ion source body is located on the top of the top seat. This design facilitates the repair of the ion source body and makes the overall repair and maintenance of the device more convenient; 2. The movable mechanism and the transmission assembly cooperate so that when the device is in use, the first motor can be started to drive the worm, drive the two worm wheels to rotate, and the worm wheels then drive the lead screw to make the slider slide in the side guide rail. The gear at the inner end of the slider meshes with the rack fixed at the bottom of the top seat. When the slider is linearly displaced, the gear rolls on the rack, driving the substrate to rotate. When installing, the ion source body is bolted to the mounting seat. When disassembling, the substrate is driven to move forward. When it reaches the front end, the substrate is vertical and the ion source body automatically flips. This flipping method coordinated by the displacement mechanism, the driving mechanism and the movable mechanism is uniform and stable, without violent shaking, and has good stability. The flipping of the substrate during the forward movement can further adjust the ion source body to leave the top seat, improve the convenience of maintenance, save labor and have strong maintenance stability; 3. By setting up a movable mechanism, during use, the second motor can be started to drive the second screw to rotate in the slide groove, and the sliding block connected to the mounting seat can be auxiliary driven to move forward and backward in the slide groove. After the adjustment substrate is flipped to make the ion source body vertical, the second motor drives the second screw to drive the mounting seat to move, thereby raising the height of the ion source body and improving the convenience of disassembly and installation. The supporting plate in the supporting reserved groove is connected to both sides of the mounting seat to auxiliary support the mounting seat, so that the mounting seat can move up and down more stably. The protective shell outside the ion source body can play a protective role. The cylinder can assist in lifting the top seat, which is convenient for adjustment and disassembly of the ion source after installation, making the overall disassembly and maintenance of the ion source equipment convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure in the embodiment of the present application; Figure 2 This is a schematic diagram of the structure viewed from above in an embodiment of the present application; Figure 3 It is a schematic diagram of a top view structure in an embodiment of the present application; Figure 4 This is a schematic diagram of a top view structure in a separated state in an embodiment of the present application; Figure 5 This is a schematic diagram of the structure in a separated state viewed from above in an embodiment of the present application; Figure 6is a schematic diagram of the rear view structure of the displacement mechanism in the embodiment of the present application; Figure 7 It is a front view structural diagram of the displacement mechanism in the embodiment of the present application; Figure 8 In the embodiment of this application Figure 2 A is an enlarged structural diagram of FIG.

[0016] Figure numerals: 1. top seat; 2. groove; 3. displacement mechanism; 31. side guide rail; 32. first screw rod; 33. slider; 34. transmission assembly; 341. gear; 342. fixed plate; 343. rack; 4. mounting seat; 5. ion source body; 6. movable mechanism; 61. base plate; 62. slide groove; 63. second screw rod; 64. sliding block; 65. second motor; 66. support reserved groove; 67. support plate; 7. driving mechanism; 71. side plate; 72. worm gear; 73. worm; 74. first motor; 75. cover plate; 8. cylinder; 9. bottom plate; 10. protective housing; 11. electronic component chassis. DETAILED DESCRIPTION

[0017] The following is combined with Figure 1-8 This application is described in further detail.

[0018] The present application discloses an ion source electrospray device that is easy to install. Figure 1-8 As shown, it includes a top seat 1, a groove 2 is opened on the inner side of the top seat 1, and displacement mechanisms 3 are fixedly installed at both ends of the groove 2. A driving mechanism 7 is fixedly installed in the middle of the back side of the top seat 1, and the output end of the driving mechanism 7 is connected to the rear side of the displacement mechanism 3. A movable mechanism 6 is fixedly installed between the inner sides of the displacement mechanism 3, and a mounting seat 4 is fixedly installed on the top of the movable mechanism 6. An ion source body 5 is installed on the top of the mounting seat 4 by bolts;

[0019] The displacement mechanism 3 includes a side guide rail 31, which is fixedly installed on both sides of the inside of the groove 2. The inside of the side guide rail 31 is rotatably connected with a first screw rod 32, and the rear end of the first screw rod 32 passes through the guide rail and is connected to the driving mechanism 7. The outer surface of the first screw rod 32 is threadedly connected with a slider 33, and the slider 33 is slidably connected to the inside of the side guide rail 31. The inner side of the slider 33 is rotatably connected with a transmission assembly 34, and the movable mechanism 6 is installed on the inner side of the transmission assembly 34. The side guide rail 31 is fixedly installed on both sides of the inside of the groove 2, providing a stable installation and operation environment for the first screw rod 32 and the slider 33. The first screw rod 32 rotates inside the side guide rail 31 and is connected to the driving mechanism 7, so that the driving mechanism 7 can accurately control the rotation of the first screw rod 32. When the first screw rod 32 rotates, the slider 33 with a threaded outer surface can be inside the side guide rail 31 Smooth sliding, this design ensures the movement accuracy and stability of the slider 33, and provides a reliable basis for the subsequent movement of the movable mechanism 6 and the ion source body 5. The inner side of the slider 33 is rotatably connected to the transmission assembly 34, and the movable mechanism 6 is installed on the inner side of the transmission assembly 34, which enables the displacement mechanism 3 to cooperate closely with the movable mechanism 6 to achieve precise position adjustment of the ion source body 5. When maintenance or installation is required, the displacement mechanism 3 can move the ion source body 5 from a specific position in the groove 2 to a convenient position for operation, thereby improving the convenience of operation. At the same time, this design also enables the ion source body 5 to be adjusted in position according to actual needs during operation to obtain the best working effect. In addition, the various components of the displacement mechanism 3 cooperate with each other, have a compact structure, occupy a small space, and will not cause too much impact on the overall layout of the device.

[0020] Please refer to Figure 1-Figure 5 and Figure 8The driving mechanism 7 includes a side plate 71 and a worm gear 72. The side plate 71 is fixedly installed at the two ends of the back side of the top seat 1. A first motor 74 is fixedly connected to the outer side of one side plate 71. The output end of the first motor 74 passes through the side plate 71 and is fixedly installed with a worm 73. The worm 73 is rotatably connected between the inner sides of the two side plates 71. The worm gear 72 is rotatably connected to the two sides of the back side of the top seat 1. The worm 73 and the worm gear 72 are transmission connected. The rear end of the first screw rod 32 is fixedly connected to the front end of the worm 73. A covering plate 75 is fixedly installed on the back side of the top seat 1. The covering plate 75 covers the outer sides of the worm 73 and the worm gear 72. The cross-sectional shape of the covering plate 75 is set to be L-shaped. The four corners of the bottom of the top seat 1 are fixedly connected with a cylinder 8. The bottom of the cylinder 8 is fixedly installed with a bottom plate 9. The side plate 71 is fixedly installed at the two ends of the back side of the top seat 1. A motor 74, a worm 73 and a worm wheel 72 provide a stable installation foundation. The first motor 74 is fixed on the outside of a side plate 71, and its output end passes through the side plate 71 to connect the worm 73, so that the motor can accurately drive the worm 73 to rotate. The worm 73 is rotatably connected between the inner sides of the two side plates 71, ensuring the stable operation of the worm 73. The worm wheel 72 is rotatably connected to both sides of the back of the top seat 1 and is transmission-connected to the worm 73. This design enables a first motor 74 to synchronously drive the two worm wheels 72 to rotate. The rear end of the first screw 32 and the front end of the worm 73 are fixedly connected, realizing the precise control of the motor over the first screw 32, thereby driving the slider 33 in the displacement mechanism 3 to slide in the side guide rail 31. The cover plate 75 on the back of the top seat 1 covers the outside of the worm 73 and the worm wheel 72, and the cross-sectional shape is L shape, which can effectively protect the worm 73 and the worm wheel 72 from the influence of the external environment, such as dust, debris, etc., and also prevent the operator from accidentally contacting the rotating parts during operation, thereby improving the safety of the device. The cylinders 8 fixedly connected at the four corners of the bottom of the top seat 1 can assist in lifting the top seat 1. After the ion source is installed on the equipment, it can be easily adjusted and disassembled, thereby improving the convenience of the overall installation and maintenance of the device. The various components of the driving mechanism 7 cooperate with each other, have a reasonable structure, and can accurately control the operation of the device, providing reliable power and control guarantees for the normal operation of the ion source electrospray device.

[0021] Please refer to Figure 1-Figure 7The transmission assembly 34 includes a gear 341 and a fixed plate 342. The gear 341 is rotatably connected to the inner side of the slider 33. The fixed plate 342 is fixedly installed at the bottom of the top seat 1 on both sides of the concave seat. A rack 343 is fixedly connected to the top of the fixed plate 342. The rack 343 is meshed with the gear 341. The inner side of the gear 341 is fixedly connected to the movable mechanism 6. The gear 341 is rotatably connected to the inner side of the slider 33. When the slider 33 slides under the action of the displacement mechanism 3, the gear 341 can move accordingly. The fixed plate 342 is fixedly installed at the bottom of the top seat 1 on both sides of the concave seat, providing a stable installation foundation for the rack 343. The rack 343 is fixedly connected to the top of the fixed plate 342 and meshed with the gear 341. During the sliding process of the slider 33 Since the rack 343 is fixed, the gear 341 rotates under the meshing action with the rack 343. This design enables the linear displacement of the slider 33 to be converted into the rotation of the gear 341, thereby driving the movable mechanism 6 fixedly connected thereto to perform corresponding movements. The meshing connection between the gear 341 and the rack 343 has high precision and reliability, which can ensure the accuracy and stability of the transmission. Through this transmission method, the movable mechanism 6 can be accurately controlled, thereby further realizing the position adjustment and operation of the ion source body 5 installed on the movable mechanism 6. The various components of the transmission assembly 34 cooperate with each other, and the structure is compact, which can effectively transmit the movement of the displacement mechanism 3 to the movable mechanism 6, providing important transmission guarantee for the overall operation of the ion source electrospray device.

[0022] Please refer to Figure 1-Figure 7The movable mechanism 6 includes a base plate 61, which is fixedly mounted on the inner side of the gear 341. A slide groove 62 is provided in the middle of the top of the base plate 61. A second screw rod 63 is rotatably connected to the inner side of the slide groove 62. A sliding block 64 is threadedly connected to the outer surface of the second screw rod 63. The sliding block 64 is slidably connected to the inside of the slide groove 62. The top of the sliding block 64 is fixedly connected to the bottom of the mounting seat 4. A second motor 65 is fixedly connected to the middle of the back side of the base plate 61. The output end of the second motor 65 is fixedly connected to the rear end of the second screw rod 63. The cross-sectional shape of the internal cavity of the slide groove 62 and the cross-sectional shape of the sliding block 64 are both set to be convex. The internal cross-sectional shape of the side guide rail 31 and the front view of the slider 33 are The shapes are all set to be cross-shaped, and support reserved grooves 66 are opened on both sides of the top of the base plate 61. The support reserved grooves 66 are opened on both sides of the top of the base plate 61. The inside of the support reserved grooves 66 is slidably connected with support plates 67. The top of the support plate 67 is fixedly connected to the bottom sides of the mounting seat 4. The base plate 61 is fixedly installed on the inner side of the gear 341, so that the movable mechanism 6 can be closely matched with the transmission component 34, and the movement of the base plate 61 is driven by the rotation of the gear 341. The slide groove 62 opened in the middle of the top of the base plate 61 provides a space for installation and operation for the second screw rod 63 and the sliding block 64. The second screw rod 63 is rotatably connected to the inner side of the slide groove 62. When the second motor 65 drives the first When the second screw rod 63 rotates, the sliding block 64 connected by the thread on the outer surface can slide smoothly inside the slide groove 62, and the top of the sliding block 64 is fixedly connected to the bottom of the mounting seat 4, so that the position of the mounting seat 4 can be adjusted by controlling the position of the sliding block 64. This design enables the position of the ion source body 5 to be accurately adjusted when it is necessary to operate it. The second motor 65 fixedly connected in the middle of the back of the substrate 61 provides power for the rotation of the second screw rod 63, ensuring that the movement of the sliding block 64 can be accurately carried out as required. The cross-sectional shape of the internal cavity of the slide groove 62 and the cross-sectional shape of the sliding block 64 are both set to a convex shape, and the internal cross-sectional shape of the side guide 31 and the sliding block 3 The front view shape of 3 is set to a cross shape. This special shape design can effectively prevent the sliding block 64 and the slider 33 from getting off the track during the movement, ensuring the stability and reliability of the movement. The supporting reserved grooves 66 opened on both sides of the top of the substrate 61 are slidably connected to the supporting plates 67. The top of the supporting plate 67 is fixedly connected to the bottom sides of the mounting seat 4. During the up and down movement of the mounting seat 4, the supporting plate 67 can assist in supporting the mounting seat 4, making the movement of the mounting seat 4 more stable and reducing the possibility of shaking and deviation. The various components of the movable mechanism 6 cooperate with each other and have a reasonable structure, providing flexible and stable support for the installation, adjustment and operation of the ion source body 5.

[0023] Please refer to Figure 1-Figure 5The mounting seat 4, the top seat 1 and the inner wall of the groove 2 are all arranged in an arc shape, the outer surfaces of the sliding block 64 and the slider 33 are fixedly connected with wear-resistant gaskets, the outer side of the ion source body 5 is fixedly installed with a protective shell 10, and the top rear side of the protective shell 10 is fixedly installed with an electronic component chassis 11, the mounting seat 4, the top seat 1 and the inner wall of the groove 2 are all arranged in an arc shape, this design makes the transition between the components smoother, reduces the scratches and damage that may be caused to the ion source body 5 during operation, and at the same time, the arc-shaped design also contributes to the smooth flow of airflow, avoids airflow obstruction caused by edges and corners, thereby improving the overall performance of the device, the outer surfaces of the sliding block 64 and the slider 33 are fixedly connected with wear-resistant gaskets, which can effectively reduce the wear during the sliding process and extend the sliding block 6 4 and the slider 33, which helps to maintain the accuracy and stability of the device and reduce the motion error caused by wear. The protective shell 10 is fixedly installed on the outside of the ion source body 5, which can play a good protective role on the ion source body 5 and prevent the external collision, dust and moisture from damaging the ion source body 5. The protective shell 10 can improve the durability of the ion source body 5 and ensure that it can operate stably in various environments. The electronic component chassis 11 is fixedly installed on the top rear side of the protective shell 10, so that the electronic components can be installed in a specific position for easy management and maintenance. This layout is also conducive to reducing the clutter of the lines and improving the overall reliability of the device. The various designs cooperate with each other to jointly improve the performance, durability and maintenance convenience of the ion source electrospray device.

[0024] The implementation principle of an ion source electrospray device that is easy to install in the embodiment of the present application is as follows: by setting the driving mechanism 7 and the displacement mechanism 3 to cooperate with each other, the device can be operated by starting the first motor 74 when it needs to be repaired. When the first motor 74 is started, the worm 73 can be driven to rotate, and the worm wheel 72 and the worm 73 are in a transmission connection state. As the first motor 74 drives the worm 73 to rotate, the worm wheel 72 connected to it can be driven to rotate synchronously. It is worth mentioning that the two worm wheels 72 are connected by a worm 73. This design makes it possible to synchronously drive the two worm wheels 72 to rotate by the first motor 74. When the two When the worm gear 72 rotates, the first screw rod 32 located inside the side guide rail 31 can be synchronously driven to rotate. After the first screw rod 32 rotates, the slider 33 can be driven to slide smoothly inside the side guide rail 31. Through the sliding of the slider 33, the substrate 61 can be driven to move forward and backward. It can be seen that when the device needs to be repaired, it is only necessary to move the ion source body 5 on the substrate 61 out of the groove 2. This operation method greatly facilitates the maintenance of the ion source body 5, because the ion source body 5 is no longer located on the top of the top seat 1, thereby avoiding the problem that the top seat 1 causes obstruction to the maintenance work during the maintenance period, making the overall maintenance of the device more convenient; By setting the movable mechanism 6 and the transmission component 34 to cooperate with each other, the device can be used during use. By starting the first motor 74 to drive the worm 73, the two worm wheels 72 are driven to rotate, and the worm wheel 72 drives the lead screw to rotate, so that the slider 33 can be driven to slide inside the side guide 31. During the sliding, the inner end of the slider 33 rotates and connects to the gear 341, and the gear 341 is meshed with the rack 343, and the rack 343 is fixed to the bottom of the top seat 1. Therefore, when the slider 33 is linearly displaced and the rack 343 is stationary, the gear 341 can be reversely driven to roll on the rack 343. At this time, as the substrate 61 moves back and forth, the corresponding gear 341 will also drive the substrate 61 to be in a rotating state. When installation is required, the ion source body 5 is bolted. Installed on the mounting seat 4; when it is necessary to disassemble, the driving substrate 61 is moved forward. When the substrate 61 is moved forward to the front end, the substrate 61 is just in a state perpendicular to the ground. At this time, the ion source body 5 is easy to realize automatic flipping. The displacement mechanism 3 and the driving mechanism 7 are used in conjunction with the movable mechanism 6 to drive the ion source body 5 to automatically flip. This method makes the flipping more uniform and stable, and there will be no violent shaking. The overall stability is good, and the substrate 61 is flipped again during the forward movement, which can further adjust the ion source body 5 to leave the top seat 1, which can further improve the convenience of maintenance, and the overall maintenance is more labor-saving. At the same time, the flipping stability is strong during the maintenance, which can further improve the maintenance stability while improving the convenience of maintenance. By setting the movable mechanism 6, the device can be operated by starting the second motor 65 during use. When the second motor 65 is running, the second screw rod 63 can be driven to rotate. The second screw rod 63 is located on the inner side of the slide groove 62 and rotates, thereby assisting in driving the sliding block 64 to move back and forth on the inner side of the slide groove 62. The sliding block 64 is connected to the mounting seat 4, and the ion source body 5 is installed on the mounting seat 4 by bolts. After the substrate 61 is flipped and adjusted, the ion source body 5 is in a vertical state. At this time, the second motor 65 drives the second screw rod 63 to drive the mounting seat 4 to move, which can assist in raising the height of the ion source body 5, so that the device can be adjusted again after flipping and adjustment during use. The height of the ion source body 5 can further improve the convenience of disassembly and installation of the ion source body 5, and the supporting plate 67 is slidably connected inside the supporting reserved groove 66, and can be connected to both sides of the mounting seat 4 through the supporting plate 67, so that the mounting seat 4 can have better stability during the up and down movement. If a protective shell 10 of the same specification is set on the outside of the ion source body 5, it can play a better protective role for the ion source body 5, and during its use, a cylinder 8 is set, which can assist in lifting the top seat 1, so that the ion source can be installed on the equipment after adjustment and disassembly, which makes the overall disassembly and maintenance of the ion source equipment more convenient.

[0025] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. An ion source electrospray device that is easy to install, comprising a top seat (1), characterized in that; A groove (2) is provided on the inner side of the top seat (1), and displacement mechanisms (3) are fixedly mounted at both ends of the groove (2). A driving mechanism (7) is fixedly mounted on the middle of the back side of the top seat (1), and the output end of the driving mechanism (7) is connected to the rear side of the displacement mechanism (3). A movable mechanism (6) is fixedly mounted between the inner sides of the displacement mechanism (3), and a mounting seat (4) is fixedly mounted on the top of the movable mechanism (6). An ion source body (5) is mounted on the top of the mounting seat (4) via bolts. The displacement mechanism (3) comprises a side guide rail (31), the side guide rail (31) being fixedly mounted on both sides of the inside of the groove (2), the inside of the side guide rail (31) being rotatably connected to a first screw rod (32), the rear end of the first screw rod (32) passing through the guide rail and being connected to the driving mechanism (7), the outer surface of the first screw rod (32) being threadedly connected to a slider (33), the slider (33) being slidably connected to the inside of the side guide rail (31), the inside of the slider (33) being rotatably connected to a transmission assembly (34), and the movable mechanism (6) being mounted on the inner side of the transmission assembly (34).

2. The ion source electrospray device that is easy to install according to claim 1, characterized in that: The driving mechanism (7) comprises a side plate (71) and a worm wheel (72); the side plate (71) is fixedly mounted on two ends of the back side of the top seat (1); a first motor (74) is fixedly connected to the outer side of one side plate (71); an output end of the first motor (74) passes through the side plate (71) and is fixedly mounted with a worm (73); the worm (73) is rotatably connected between the inner sides of the two side plates (71); the worm wheel (72) is rotatably connected to both sides of the back side of the top seat (1); the worm (73) and the worm wheel (72) are transmission-connected; and a rear end of the first screw rod (32) and a front end of the worm (73) are fixedly connected.

3. The ion source electrospray device that is easy to install according to claim 2, characterized in that: A covering plate (75) is fixedly mounted on the back of the top seat (1), the covering plate (75) covers the outer sides of the worm (73) and the worm wheel (72), and the cross-sectional shape of the covering plate (75) is set to be L-shaped.

4. The ion source electrospray device that is easy to install according to claim 1, characterized in that: The four corners of the bottom of the top seat (1) are all fixedly connected to a cylinder (8), and the bottom of the cylinder (8) is fixedly mounted with a bottom plate (9).

5. The ion source electrospray device that is easy to install according to claim 1, characterized in that: The transmission assembly (34) comprises a gear (341) and a fixed plate (342); the gear (341) is rotatably connected to the inner side of the slider (33); the fixed plate (342) is fixedly mounted on the bottom of the top seat (1) and located on both sides of the concave seat; a rack (343) is fixedly connected to the top of the fixed plate (342); the rack (343) is meshingly connected to the gear (341); and the inner side of the gear (341) is fixedly connected to the movable mechanism (6).

6. The ion source electrospray device that is easy to install according to claim 5, characterized in that: The movable mechanism (6) comprises a base plate (61), the base plate (61) is fixedly mounted on the inner side of the gear (341), a slide groove (62) is provided in the middle of the top of the base plate (61), a second screw rod (63) is rotatably connected to the inner side of the slide groove (62), a sliding block (64) is threadedly connected to the outer surface of the second screw rod (63), the sliding block (64) is slidably connected to the inside of the slide groove (62), the top of the sliding block (64) is fixedly connected to the bottom of the mounting seat (4), a second motor (65) is fixedly connected to the middle of the back side of the base plate (61), and an output end of the second motor (65) is fixedly connected to the rear end of the second screw rod (63).

7. The ion source electrospray device that is easy to install according to claim 6, characterized in that: The cross-sectional shape of the internal cavity of the slide groove (62) and the cross-sectional shape of the sliding block (64) are both arranged in a convex shape, and the cross-sectional shape of the internal cavity of the side guide rail (31) and the front view shape of the sliding block (33) are both arranged in a cross shape.

8. The ion source electrospray device that is easy to install according to claim 6, characterized in that: Both sides of the top of the base plate (61) are provided with support reserved grooves (66), the support reserved grooves (66) are provided on both sides of the top of the base plate (61), the interiors of the support reserved grooves (66) are slidably connected with support plates (67), and the top of the support plate (67) is fixedly connected to both sides of the bottom of the mounting seat (4).

9. The ion source electrospray device that is easy to install according to claim 7, characterized in that: The mounting seat (4), the top seat (1) and the inner wall of the groove (2) are all arranged in an arc shape, and the outer surfaces of the sliding block (64) and the sliding block (33) are fixedly connected with wear-resistant gaskets.

10. The ion source electrospray device that is easy to install according to claim 5, characterized in that: A protective shell (10) is fixedly mounted on the outer side of the ion source body (5), and an electronic component chassis (11) is fixedly mounted on the top rear side of the protective shell (10).

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