Coating equipment and coating method

Abstract

The invention discloses coating equipment and a coating method.The coating equipment comprises a first conveying belt, a second conveying belt, a suction cup and a driving assembly; the first conveyor belt is used for receiving substrates; the second conveying belt is used for driving the substrate to a material receiving position; the suction cup is provided with an adsorption surface used for adsorbing a substrate and an avoiding groove formed by sinking from the adsorption surface, the avoiding groove is used for containing the first conveying belt and the second conveying belt, and the depth of the avoiding groove is larger than or equal to the maximum height of the first conveying belt and the second conveying belt; the driving assembly is used for driving the adsorption face of the suction cup to ascend from the bottom of the first conveying belt to penetrate through the first conveying belt so as to adsorb a substrate to be coated, or driving the adsorption face of the suction cup to descend from the upper portion of the second conveying belt so as to place the coated substrate on the second conveying belt. According to the coating equipment and the coating method, the suction cup moves and takes the base plate on the transmission belt in the vertical direction or places the base plate on the transmission belt, the size of the coating equipment is reduced, and the load of the driving assembly is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of slit coating, and in particular to a coating device. Background Art

[0002] Coating equipment is widely used in fields such as solar cell preparation, and is used to coat liquid films on substrates. Existing coating equipment generally includes a coating head and a transfer assembly. The transfer assembly is used to drive the substrate to move, and the coating head is used to coat the liquid film on the surface of the substrate. The transfer assembly continuously drives different substrates to move under the coating head so that the coating head can coat different substrates, and the transfer assembly removes the substrates after coating, so that the coating equipment can coat substrates in batches.

[0003] In the existing coating equipment, the transfer assembly includes a conveyor belt for moving the substrate onto the suction cup, and an output conveyor belt for moving the coated substrate to the collection position. The conveyor belt includes an upper conveyor belt and a lower conveyor belt. The substrate is placed on the upper conveyor belt and is driven by the upper conveyor belt to move above the lower conveyor belt. Then the upper conveyor belt moves downward so that the substrate is placed on the lower conveyor belt, and the lower conveyor belt transfers the substrate to the suction cup. The output conveyor belt has the same structure as the conveyor belt. This driving method requires the transmission belt to move up and down to complete the movement of the substrate. However, the volume of the transmission belt is large, and the space required for the transmission belt to move up and down is large, which makes the volume of the coating equipment large; and the load of the driving device that drives the transmission belt to move is also large. Summary of the invention

[0004] The object of the present invention is to provide a coating device and a coating method for realizing a suction cup to remove a substrate on a transmission belt or place a substrate on the transmission belt in a vertical direction, thereby reducing the volume of the coating device and reducing the load of a driving component.

[0005] The purpose of the present invention is achieved by the following technical solutions: A coating device, comprising: a first conveyor belt for receiving a substrate to be coated; A second conveyor belt is used to drive the coated substrate to a receiving position; A suction cup, provided with an adsorption surface for adsorbing the substrate and an avoidance groove formed by being recessed from the adsorption surface, wherein the avoidance groove is used to accommodate the first conveyor belt and the second conveyor belt, and the depth of the avoidance groove is greater than or equal to the maximum height of the first conveyor belt and the second conveyor belt; A driving component is used to drive the adsorption surface of the suction cup to rise from the bottom of the first conveyor belt to pass through the first conveyor belt to adsorb the substrate to be coated, or to drive the adsorption surface of the suction cup to descend from the upper part of the second conveyor belt to place the coated substrate on the second conveyor belt.

[0006] Preferably, the avoidance groove passes through the suction cup in a horizontal direction; And / or, the height of the first conveyor belt is the same as that of the second conveyor belt, and the depth of the avoidance groove is greater than the heights of the first conveyor belt and the second conveyor belt.

[0007] Preferably, the suction cup and the driving assembly are respectively provided in plurality, and each suction cup is driven by a corresponding driving assembly; the driving assembly drives the suction cup to circulate among the first conveyor belt, the coating position, and the second conveyor belt to form a circulating path, and the plurality of suction cups are arranged in sequence on the circulating path.

[0008] Preferably, it also includes a carrier for supporting the suction cup, and the suction cup is connected to the driving component through the carrier; the maximum displacement of the carrier and the suction cup in the vertical direction driven by the driving component is greater than the height of the whole formed by the suction cup and the carrier.

[0009] Preferably, the device further comprises a guide rail extending in a first direction, the driving assembly comprises a first driving group and a second driving group, the first driving group comprises a slider connected to the guide rail and a driving member for driving the slider to move in the first direction; the second driving group is respectively connected to the slider and the suction cup, and the second driving group is used to drive the suction cup to move in the second direction; The first direction is a horizontal direction, and the second direction is a vertical direction; or the first direction is a vertical direction, and the second direction is a horizontal direction.

[0010] Preferably, the coating device further comprises a positioning component, wherein the positioning component is disposed above the first conveyor belt and is used for positioning the position of the substrate.

[0011] Preferably, the positioning assembly comprises a horizontal alignment group and a vertical alignment group, the horizontal alignment group is used to locate the position of the substrate on the suction cup, and the vertical alignment group is used to locate the height of the substrate and the suction cup.

[0012] A coating method, the coating method is performed using any one of the above coating devices, the coating method comprising: Step S01: The loading assembly supplies the substrate to be coated to the first conveyor belt; Step S02: The driving component drives the adsorption surface of the suction cup to rise from below the first conveyor belt to pass through the first conveyor belt, and the suction cup adsorbs and fixes the substrate to be coated; Step S03: the driving component drives the suction cup to move to the coating position and coats the substrate to be coated; Step S04: the driving component drives the suction surface of the suction cup to be flush with or higher than the upper surface of the second conveyor belt, and the driving component drives the suction cup to move downward and releases the suction fixation of the suction cup, so that the suction cup is placed on the second conveyor belt; Step S05: The second conveyor belt transports the coated substrate to a receiving position.

[0013] Preferably, the step S02 specifically includes: The driving component drives the adsorption surface of the suction cup to pass through the first conveyor belt and lift up the substrate to be coated, the positioning component is used to position the substrate to be coated, and the suction cup adsorbs and fixes the substrate to be coated.

[0014] Preferably, the two suction cups are driven by the driving assembly at the same time and pass through the first conveyor belt and lift up the substrate to be coated, and the positioning assembly positions the substrate to be coated on the two suction cups at the same time.

[0015] Preferably, a plurality of suction cups are provided, and the plurality of suction cups respectively and cyclically execute steps S01 to S05, the plurality of suction cups are moved to the coating position in sequence, and the coating head continuously coats the substrates on the plurality of suction cups.

[0016] Preferably, the plurality of suction cups include a first suction cup, a second suction cup, a third suction cup and a fourth suction cup, and the substrate on the first suction cup and the substrate on the second suction cup synchronously execute step S02 during the coating process, and the substrate on the third suction cup and the substrate on the fourth suction cup synchronously execute step S02 during the coating process.

[0017] Preferably, when the substrate on the first suction cup performs step S03 during the coating process, the second suction cup moves toward the first suction cup and is close to the first suction cup, and after the substrate on the first suction cup performs step S03 during the coating process, the substrate on the second suction cup performs step S03 during the coating process; When the substrate on the second suction cup performs step S03 during the coating process, the third suction cup moves toward the second suction cup and is close to the second suction cup. After the substrate on the second suction cup performs step S03 during the coating process, the substrate on the third suction cup performs step S03 during the coating process; When the substrate on the third suction cup performs step S03 during the coating process, the fourth suction cup moves toward the third suction cup and is close to the third suction cup. After the substrate on the third suction cup performs step S03 during the coating process, the substrate on the fourth suction cup performs step S03 during the coating process; When the substrate on the fourth suction cup executes step S03 during the coating process, the first suction cup moves toward the fourth suction cup and is close to the fourth suction cup. After the substrate on the fourth suction cup executes step S03 during the coating process, the substrate on the first suction cup executes step S03 during the coating process.

[0018] Compared with the prior art, the beneficial effects of the present invention include at least: By providing a suction cup with an avoidance groove, the adsorption surface of the suction cup can move from bottom to top or from top to bottom in the vertical direction relative to the first conveyor belt or the second conveyor belt, so that the first conveyor belt and the second conveyor belt can be driven to achieve relative movement in the vertical direction relative to the suction cup, and the suction cup can adsorb the substrate to be coated and place the substrate after coating; therefore, the coating equipment does not need to reserve space for the first conveyor belt and the second conveyor belt to move up and down, and the volume of the suction cup is small, so that the volume of the coating equipment can be effectively reduced, and the load when driving the suction cup to move is much smaller than the load when driving the first conveyor belt and the second conveyor belt to move, thereby reducing the driving strength of the driving component. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a schematic structural diagram of a coating device according to an embodiment of the present invention; Figure 2 is a schematic structural diagram of a coating device according to an embodiment of the present invention from another viewing angle; Figure 3 is a cross-sectional view of a coating device according to an embodiment of the present invention; Figure 4 It is a partial structural schematic diagram of a coating device according to an embodiment of the present invention; Figure 5 It is a schematic diagram of another part of the structure of the coating device according to an embodiment of the present invention; Figure 6 It is a schematic diagram of another part of the structure of the coating equipment of an embodiment of the present invention.

[0020] In the figure: 100, substrate; 1, first conveyor belt; 2, second conveyor belt; 3, suction cup; 31, avoidance groove; 32, adsorption surface; 33, carrier; 34, first suction cup; 35, second suction cup; 36, third suction cup; 37, fourth suction cup; 4, drive assembly; 41, first drive group; 411, slider; 42, second drive group; 5, guide rail; 6, positioning assembly; 61, horizontal alignment group; 611, alignment member; 62, vertical alignment group; 7, coating head. DETAILED DESCRIPTION

[0021] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete and to fully convey the concepts of example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their repeated description will be omitted.

[0022] The words expressing positions and directions described in the present invention are all explained with reference to the accompanying drawings as examples, but they can be changed as needed, and all such changes are included in the protection scope of the present invention.

[0023] like Figures 1 to 6 As shown, the present invention provides a coating device, including a coating head 7, a first conveyor belt 1, a second conveyor belt 2, a driving assembly 4 and a suction cup 3, and may also include a guide rail 5, a positioning assembly 6 and a carrier 33 for carrying the suction cup 3.

[0024] Reference Figure 3 and Figure 5 , the first conveyor belt 1 is used to be connected to the loading device to receive the substrate 100 provided by the loading device. A plurality of first conveyor belts 1 may be provided, for example, two first conveyor belts 1 are provided, the two first conveyor belts 1 are spaced apart from each other, and the two first conveyor belts 1 may be driven by the same driving device so that the two first conveyor belts 1 may move synchronously. The two first conveyor belts 1 may be used together to receive and support the substrate 100 provided by the loading device, and the two first conveyor belts 1 may convey the substrate 100. Among them, the loading device has been widely used in the coating equipment, so it will not be described in detail here. The substrate 100 may specifically be a glass substrate. The first conveyor belt 1 may be used to convey the substrate 100 in a direction toward the coating head 7.

[0025] Reference Figure 1 , the second conveyor belt 2 is used to connect with the unloading device, so that the second conveyor belt 2 can transport the coated substrate 100 to the receiving position and be received by the unloading device. There can be multiple second conveyor belts 2, for example, there are two second conveyor belts 2, the two second conveyor belts 2 are spaced apart from each other, and the two second conveyor belts 2 can be driven by the same driving device so that the two second conveyor belts 2 can move synchronously. The two second conveyor belts 2 can be used together to receive the substrate 100 after the coating process, and the two second conveyor belts 2 can transport the substrate 100. Among them, the unloading device has been widely used in the coating equipment, so it will not be described here. The second conveyor belt 2 can be used to transport the substrate 100 in the direction toward the unloading device.

[0026] A coating position in the coating device is formed below the coating head 7. When the substrate 100 is located at the coating position below the coating head 7, the coating head 7 can coat the slurry on the surface of the substrate 100 to form a liquid film on the surface of the substrate 100. Specifically, the coating head 7 can coat the perovskite slurry to form a perovskite layer on the surface of the substrate 100. The coating head 7 can be coated by slit coating. The coating length of the coating head 7 can exceed the substrate 100 to ensure the uniformity of the liquid film on the surface of the substrate 100. The portion of the slurry not coated on the substrate 100 by the coating head 7 can also be taken up by a mask roller. The mask roller can adopt an existing common mask structure, so it is not described here.

[0027] Reference Figure 5 , the suction cup 3 can adsorb and fix the substrate 100. For example, the top surface of the suction cup 3 is formed with an adsorption surface 32, and the adsorption surface 32 is provided with a plurality of adsorption holes. The suction cup 3 is connected to a vacuum pumping device, so that the vacuum pumping device can be connected to the adsorption holes to generate suction at the adsorption holes and then adsorb and fix the substrate 100.

[0028] Reference Figure 2 and Figure 4 , the suction cup 3 can be driven by the driving component 4 to circulate between the first conveyor belt 1, the coating position, and the second conveyor belt 2 to form a circulation path. The suction cup 3 can move to the first conveyor belt 1 to adsorb and fix the substrate 100 on the first conveyor belt 1, and then the suction cup 3 can drive the substrate 100 to move to the coating position for coating operation. After the coating is completed, the substrate 100 moves to the second conveyor belt 2 driven by the suction cup 3, and the suction cup 3 releases the adsorption of the substrate 100. The substrate 100 is transported to the receiving position driven by the second conveyor belt 2 to be received by the unloading device. Each time the suction cup 3 completes a circulation path, the coating operation of a substrate 100 can be realized. Among them, the suction cup 3 can be specifically connected to the driving component 4 through the carrier 33, so that the driving component 4 can drive the suction cup 3 to move; specifically, the suction cup 3 is placed on the carrier 33 and keeps a relatively fixed position with the carrier 33, and the carrier 33 is connected to the driving component 4. The carrier 33 can move under the drive of the driving component 4, thereby driving the suction cup 3 to move synchronously.

[0029] Reference Figure 5, the suction cup 3 may also be provided with an avoidance groove 31 for avoiding the conveyor belt, the avoidance groove 31 is formed by being recessed from the adsorption surface 32 of the suction cup 3, and the depth of the avoidance groove 31 is greater than or equal to the maximum height of the first conveyor belt 1 and the second conveyor belt 2. When the suction cup 3 moves to the first conveyor belt 1, the adsorption surface 32 of the suction cup 3 can pass through the first conveyor belt 1 from the bottom of the first conveyor belt 1 to move to the top of the first conveyor belt 1 or be flush with the first conveyor belt 1, and the avoidance groove 31 of the suction cup 3 is used to accommodate the first conveyor belt 1 to prevent interference between the suction cup 3 and the first conveyor belt 1. Among them, when the heights of the first conveyor belt 1 and the second conveyor belt 2 are the same, the depth of the avoidance groove 31 is greater than or equal to the heights of the first conveyor belt 1 and the second conveyor belt 2; specifically, when the height of the first conveyor belt 1 is greater than the height of the second conveyor belt 2, the depth of the avoidance groove 31 is greater than or equal to the height of the first conveyor belt 1; when the height of the second conveyor belt 2 is greater than the height of the first conveyor belt 1, the depth of the avoidance groove 31 is greater than or equal to the height of the second conveyor belt 2.

[0030] When the depth of the avoidance groove 31 of the suction cup 3 is equal to the height of the first conveyor belt 1, the adsorption surface 32 of the suction cup 3 moves to be flush with the first conveyor belt 1, and the adsorption surface 32 can contact the substrate 100 on the first conveyor belt 1, and the suction cup 3 adsorbs and fixes the substrate 100 so that the suction cup 3 can remove the substrate 100 on the first conveyor belt 1.

[0031] When the depth of the avoidance groove 31 of the suction cup 3 is greater than the height of the first conveyor belt 1, the adsorption surface 32 of the suction cup 3 moves to exceed the upper surface of the first conveyor belt 1, and the adsorption surface 32 can lift the substrate 100 on the first conveyor belt 1, and the suction cup 3 adsorbs and fixes the substrate 100 so that the suction cup 3 can remove the substrate 100 on the first conveyor belt 1.

[0032] When the depth of the avoidance groove 31 of the suction cup 3 is greater than or equal to the height of the second conveyor belt 2, the adsorption surface 32 of the suction cup 3 moves to be flush with the second conveyor belt 2, the adsorption surface 32 of the suction cup 3 can move to be flush with the upper surface of the second conveyor belt 2, and the substrate 100 on the suction cup 3 can contact the second conveyor belt 2, the suction cup 3 releases the adsorption force on the substrate 100 and moves downward, at this time the substrate 100 can be received by the second conveyor belt 2 and transferred to the receiving position.

[0033] As a preferred embodiment, the first conveyor belt 1 and the second conveyor belt 2 have the same height, and the depth of the avoidance groove 31 of the suction cup 3 is greater than the height of the first conveyor belt 1 and the second conveyor belt 2. In addition, the avoidance groove 31 can penetrate the suction cup 3 in the horizontal direction.

[0034] By arranging an avoidance groove 31 on the suction cup 3, the suction cup 3 can be driven to pass through the first conveyor belt 1 and the second conveyor belt 2 in the vertical direction to adsorb and fix the substrate 100 on the first conveyor belt 1 or place the substrate 100 on the second conveyor belt 2. The first conveyor belt 1 and the second conveyor belt 2 do not need to be moved, so the coating equipment does not need to reserve space for the first conveyor belt 1 and the second conveyor belt 2 to move up and down. The suction cup 3 is relatively small in size, so the volume of the coating equipment can be effectively reduced, and the load when driving the suction cup 3 to move is much smaller than the load when driving the first conveyor belt 1 and the second conveyor belt 2 to move, thereby reducing the driving strength of the driving component 4.

[0035] In addition, the suction cup 3 can realize cyclic movement among the first conveyor belt 1, the coating position, and the second conveyor belt 2 through horizontal movement and vertical movement. The suction cup 3 remains facing upward without being inverted. The movement of the suction cup 3 is more stable and the structure of the driving component 4 that drives the suction cup 3 to move is also relatively simple.

[0036] In order to improve the continuity of the coating operation, multiple suction cups 3 and drive components 4 can be respectively provided, each suction cup 3 is connected to a corresponding drive component 4, and each suction cup 3 can move under the drive of the corresponding drive component 4; specifically, multiple platforms 33 are also provided, each suction cup 3 is supported by a corresponding platform 33, and is connected to the corresponding drive component 4 through the platform 33. When performing the coating operation, multiple suction cups 3 can be arranged in sequence on the circulation path. When the substrate 100 on one suction cup 3 is finished coating, the next suction cup 3 can be moved to the bottom of the coating head 7 to continue the coating operation. The multiple suction cups 3 move in sequence along the circulation path, so that the substrates 100 on the multiple suction cups 3 are successively moved to the coating position, and the coating head 7 can continuously perform the coating operation, thereby improving the efficiency of the coating equipment.

[0037] In the coating device, the first conveyor belt 1 is located at the top and the second conveyor belt 2 is located at the bottom. When the suction cup 3 absorbs the substrate 100 on the first conveyor belt 1 and moves toward the coating position, the suction cup 3 moves at the top; and when the suction cup 3 places the substrate 100 on the second conveyor belt 2 and moves toward the first conveyor belt 1, the suction cup 3 moves at the bottom. When multiple suction cups 3 are provided, some suction cups 3 may move at the top while some suction cups 3 move at the bottom. In order to avoid interference between the suction cups 3 of the upper and lower layers when moving, the driving component 4 drives the suction cup 2 to have a maximum displacement in the vertical direction that is greater than the height of the suction cup 2 and the corresponding platform 33 as a whole. Therefore, the suction cup 2 and the corresponding platform 33 located at the top can be spaced apart from the suction cup 2 and the corresponding platform 33 located at the bottom in the vertical direction. At this time, the horizontal movement of the suction cups 3 located at the upper and lower layers can be undisturbed, avoiding interference when the suction cups 3 in the upper and lower directions move.

[0038] Reference Figure 2 and Figure 4 , the driving assembly 4 may specifically include a first driving group 41 and a second driving group 42. The first driving group 41 includes a slider 411 that slides with the guide rail 5 and a driving member for driving the slider 411 to move. The driving member drives the slider 411 to slide relative to the extension direction of the guide rail 5, and the guide rail 5 may specifically extend along the first direction. The second driving group 42 is mounted on the slider 411 of the first driving group 41 so that the second driving group 42 can move synchronously with the slider 411. The second driving group 42 is connected to the carrier 33 and is used to drive the carrier 33 to move along the second direction. Therefore, the carrier 33 and the suction cup 3 can move in the first direction and the second direction under the drive of the driving assembly 4. Wherein, the first direction is a horizontal direction, and the second direction is a vertical direction; or, the first direction is a vertical direction, and the second direction is a horizontal direction. In this embodiment, the first direction is specifically a horizontal direction, and the second direction is specifically a vertical direction. The manner in which the driving member in the first driving group 41 drives the slider 411 to move and the manner in which the second driving group 42 drives the stage 33 to move is a common driving manner, and thus will not be described in detail herein.

[0039] When there are multiple suction cups 3, there are multiple drive assemblies 4 correspondingly, and the sliders 411 in the multiple drive assemblies 4 can slide with one guide rail 5. Alternatively, there are two guide rails 5, and the sliders 411 in a certain number of drive assemblies 4 slide with one guide rail 5, and the sliders 411 in the remaining number of drive assemblies 4 slide with another guide rail 5. In this embodiment, in order to avoid mutual interference when multiple drive assemblies 4 cooperate with the same guide rail 5, multiple drive assemblies 4 cooperate with two guide rails 5.

[0040] Reference Figure 2 and Figure 6 To ensure that the substrate 100 can be accurately moved to the coating position, the substrate 100 is positioned using a positioning assembly 6 before moving to the coating position. The positioning assembly 6 can be arranged above the first conveyor belt 1, and the positioning assembly 6 can include a horizontal alignment group 61 and a vertical alignment group 62. When the suction cup 3 moves to the first conveyor belt 1 and lifts up the substrate 100 on the first conveyor belt 1, the suction cup 3 may not generate an adsorption force. At this time, the horizontal alignment group 61 aligns the horizontal position of the substrate 100 on the suction cup 3. After the substrate 100 is horizontally aligned, the suction cup 3 can adsorb and fix the substrate 100. The vertical alignment group 62 positions the height of the substrate 100 and the suction cup 3. Then, the suction cup 3 moves toward the coating position driven by the driving assembly 4. Among them, the suction cup 3 may not be adsorbed after the substrate 100 is horizontally aligned. After the substrate 100 is horizontally and vertically aligned, the suction cup 3 fixes the substrate 100.

[0041] The horizontal alignment group 61 may include a plurality of alignment members 611. When the suction cup 3 lifts the substrate 100 of the first conveyor belt 1, the plurality of alignment members 611 are arranged around the substrate 100. The plurality of alignment members 611 may move toward the substrate 100 to push the substrate 100 to a predetermined position, thereby completing the horizontal alignment of the substrate 100. The alignment members 611 may be rollers or baffles.

[0042] The vertical alignment group 62 may include multiple laser rangefinders, which measure the position of the upper surface of the substrate 100 and adjust the height of the suction cup 3 according to the data measured by the laser rangefinder so that the upper surface of the substrate 100 on the suction cup 3 reaches a predetermined coating plane height.

[0043] The positioning assembly 6 can position only one substrate 100 on a suction cup 3 at a time, or the positioning assembly 6 can position substrates 100 on multiple suction cups 3 at a time. In the present embodiment, the positioning assembly 6 positions substrates 100 on two suction cups 3 at a time. That is, the alignment members 611 are arranged around the whole formed by the two substrates 100, so that the horizontal alignment group 61 can horizontally align the two substrates 100 at the same time, and laser rangefinders are arranged above the two substrates 100, so that the vertical alignment group 62 can vertically align the two substrates 100. Among them, the positioning assembly 6 can also be provided with a partition, which is used to be arranged between adjacent substrates 100 to control the spacing between adjacent substrates 100.

[0044] The present invention further provides a coating method, which is performed using the above-mentioned coating device, and includes steps S01 to S05.

[0045] Step S01 : a loading assembly supplies a substrate 100 to be coated to a first conveyor belt 1 .

[0046] Step S02: The driving component 4 drives the adsorption surface 32 of the suction cup 3 to rise from the bottom of the first conveyor belt 1 to pass through the first conveyor belt 1, and the suction cup 3 adsorbs and fixes the substrate 100 to be coated. The adsorption surface 32 of the suction cup 3 can rise to just pass through the first conveyor belt 1, so that the adsorption surface 32 of the suction cup 3 is flush with the upper surface of the first conveyor belt 1, or the adsorption surface 32 of the suction cup 3 rises to exceed the first conveyor belt 1, so that the suction cup 3 can lift the substrate 100 on the first conveyor belt 1.

[0047] Step S03: the driving assembly 4 drives the suction cup 3 to move to the coating position and coats the substrate 100 to be coated.

[0048] Step S04: When the coating of the substrate 100 on the suction cup 3 is completed, the driving component 4 drives the suction cup 3 to move to the second conveyor belt 2, and the driving component 4 drives the adsorption surface 32 of the suction cup 3 to be flush with or higher than the upper surface of the second conveyor belt 2. The driving component 4 drives the suction cup 3 to move downward and releases the adsorption and fixation of the suction cup 3 so that the suction cup 3 is placed on the second conveyor belt 2.

[0049] Step S05 : the second conveyor belt 2 transports the coated substrate 100 to a receiving position, and the suction cup 3 moves to below the first conveyor belt 1 .

[0050] In step S02, the driving component 4 specifically drives the adsorption surface 32 of the suction cup 3 to pass through the first conveyor belt 1 and lift up the substrate 100 to be coated. The positioning component 6 is used to position the substrate 100 to be coated, and the suction cup 3 adsorbs and fixes the substrate 100 to be coated. Among them, the positioning component 6 positions the horizontal position and vertical position of the substrate 100. The positioning component 6 can use the above-mentioned horizontal alignment group 61 to horizontally align the substrate 100, and use the above-mentioned vertical alignment group 62 to position the vertical position of the substrate 100. When the substrate 100 completes horizontal alignment, the suction cup 3 adsorbs and fixes the substrate 100, or, when the substrate 100 completes horizontal alignment and vertical alignment, the suction cup 3 adsorbs and fixes the substrate 100.

[0051] The positioning component 6 can position multiple suction cups 3 simultaneously. For example, two suction cups 3 are driven by the driving component 4 at the same time and pass through the first conveyor belt 1 and lift up the substrate 100 to be coated. The positioning component 6 simultaneously positions the substrate 100 to be coated on the two suction cups 3.

[0052] In step S03, the coating head 7 can coat the substrate 100 with the perovskite slurry by slit coating to coat the perovskite layer on the substrate 100. During the coating process, the coating head 7 remains fixed, and the suction cup 3 moves at a constant speed relative to the coating head 7 driven by the corresponding driving component 4, so that the upper surface of the substrate 100 on the suction cup 3 can be coated to form a complete and uniform liquid film.

[0053] In step S04, when the coating of the substrate 100 on the suction cup 3 is completed, the driving component 4 can drive the suction surface 32 of the suction cup 3 to be slightly higher than the upper surface of the second conveyor belt 2, and the lowest point of the second conveyor belt 2 is higher than the lowest point of the avoidance groove 31 in the suction cup 3. The driving component 4 drives the suction cup 3 to move horizontally from one side of the second conveyor belt 2 until the second conveyor belt 2 penetrates the avoidance groove 31. When the substrate 100 on the suction cup 3 is completely placed above the second conveyor belt 2, the suction cup 3 releases the adsorption of the substrate 100, and the suction cup 3 moves downward, and the substrate 100 falls onto the second conveyor belt 2.

[0054] The coating method can use only one suction cup 3 to cyclically move at the first conveyor belt 1, the coating position, and the second conveyor belt 2. As a preferred mode, in order to enable the coating device to perform continuous coating, multiple suction cups 3 can be cyclically moved in the coating method. Each suction cup 3 can be cyclically moved under the drive of the corresponding driving component 4, and multiple suction cups 3 are arranged in sequence along the circulation path.

[0055] Each substrate 100 will cyclically perform the above steps S01 to S05 during the coating process, and the multiple substrates 100 can be moved to the coating position in sequence under the action of the multiple suction cups 3, that is, when the coating head 7 finishes coating the substrate 100 on one suction cup 3, the substrate 100 on the next suction cup 3 will be moved to the coating position for coating. Therefore, the coating head 7 can perform continuous coating, and the coating equipment can achieve continuous operation with high efficiency.

[0056] Reference Figure 3 and Figure 4 In this embodiment, four suction cups 3 may be provided, namely, a first suction cup 34, a second suction cup 35, a third suction cup 36, and a fourth suction cup 37. Each substrate 100 may perform step S02 individually during the coating process, or multiple substrates 100 may perform step S02 synchronously during the coating process. Specifically, the feeding assembly needs to supply multiple substrates 100 to the first conveyor belt 1, multiple suction cups 3 rise simultaneously, and each suction cup 3 lifts up a corresponding substrate 100, and multiple substrates 100 on multiple suction cups 3 are positioned simultaneously. In this embodiment, step S02 may be performed synchronously for two substrates 100 during the coating process, the first suction cup 34 and the second suction cup 35 rise simultaneously and are used to lift up the two substrates 100, or the third suction cup 36 and the fourth suction cup 37 rise simultaneously and are used to lift up the two substrates 100. The driving assembly 4 corresponding to the connection of the first suction cup 34 and the second suction cup 35 cooperates with one guide rail 5 , and the driving assembly 4 corresponding to the connection of the third suction cup 36 and the fourth suction cup 37 cooperates with another guide rail 5 .

[0057] When performing coating operation, the first suction cup 34 and the second suction cup 35 move to the bottom of the first conveyor belt 1, and the loading assembly supplies the substrate 100 to be coated to the first conveyor belt 1, and at least two substrates 100 to be coated are present on the first conveyor belt 1. The first suction cup 34 and the second suction cup 35 rise synchronously and lift up one substrate 100 to be coated respectively, and then the substrates 100 on the first suction cup 34 and the second suction cup 35 are positioned by the positioning assembly 6 at the same time. After positioning, the first suction cup 34 moves to the coating position, and then the first suction cup 34 moves at a uniform speed so that the coating head 7 coats the substrate 100 on the first suction cup 34, and the second suction cup 35 gradually moves close to the first suction cup 34 and moves at the same uniform speed as the first suction cup 34. When the substrate 100 on the first suction cup 34 is subjected to coating operation. The third suction cup 36 and the fourth suction cup 37 start to perform step S02 and subsequent steps, that is, the third suction cup 36 and the fourth suction cup 37 move to the bottom of the first conveyor belt 1, and the loading assembly supplies the substrate 100 to be coated to the first conveyor belt 1, and at least two substrates 100 to be coated are present on the first conveyor belt 1. The third suction cup 36 and the fourth suction cup 37 rise synchronously and lift up one substrate 100 to be coated respectively, and then the substrates 100 on the third suction cup 36 and the fourth suction cup 37 are positioned by the positioning assembly 6 at the same time.

[0058] After the coating is completed, the substrate 100 on the first suction cup 34 moves to the second conveyor belt 2, and the second suction cup 35 moves to the coating position for coating. After the positioning is completed, the third suction cup 36 gradually moves to close to the second suction cup 35 and moves at the same speed as the second suction cup 35. After the coating is completed, the substrate 100 on the second suction cup 35 moves to the second conveyor belt 2, and the third suction cup 36 moves to the coating position for coating. After the positioning is completed, the fourth suction cup 37 gradually moves to close to the third suction cup 36 and moves at the same speed as the third suction cup 36. After the first suction cup 34 places the suction cup 3 after coating on the second conveyor belt 2, it moves to the bottom of the first conveyor belt 1, and after the second suction cup 35 places the suction cup 3 after coating on the second conveyor belt 2, it moves to the bottom of the first conveyor belt 1.

[0059] The first suction cup 34 and the second suction cup 35 can rise synchronously and lift up a substrate 100 to be coated respectively, and the positioning assembly 6 positions the substrate 100 on the first suction cup 34 and the second suction cup 35. When the substrate 100 on the fourth suction cup 37 is coated, the substrate 100 on the first suction cup 34 is gradually moved to the substrate 100 on the fourth suction cup 37 after positioning is completed, and moves at the same speed as the fourth suction cup 37. After the substrate 100 on the fourth suction cup 37 is coated, it moves to the second conveyor belt 2, and the first suction cup 34 moves to the coating position for coating. After positioning, the second suction cup 35 gradually moves to the first suction cup 34 and moves at the same speed as the first suction cup 34. The third suction cup 36 places the suction cup 3 after coating on the second conveyor belt 2 and then moves to the bottom of the first conveyor belt 1; the fourth suction cup 37 places the suction cup 3 after coating on the second conveyor belt 2 and then moves to the bottom of the first conveyor belt 1.

[0060] The above steps are repeated cyclically so that the coating equipment can perform continuous coating operation.

[0061] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, substitute and modify the above embodiments within the scope of the invention without departing from the principles and purpose of the present invention. All such changes should fall within the scope of protection of the claims of the present invention.

Claims

1. A coating device, characterized in that: include: A first conveyor belt (1) for receiving a substrate (100) to be coated; A second conveyor belt (2) is used to drive the coated substrate (100) to a receiving position; A suction cup (3) provided with an adsorption surface (32) for adsorbing the substrate (100) and an avoidance groove (31) formed by being recessed from the adsorption surface (32), wherein the avoidance groove (31) is used to accommodate the first conveyor belt (1) and the second conveyor belt (2), and the depth of the avoidance groove (31) is greater than or equal to the maximum height of the first conveyor belt (1) and the second conveyor belt (2); The driving component (4) is used to drive the adsorption surface (32) of the suction cup (3) to rise from the bottom of the first conveyor belt (1) to pass through the first conveyor belt (1) to adsorb the substrate (100) to be coated, or to drive the adsorption surface (32) of the suction cup (3) to descend from the upper part of the second conveyor belt (2) to place the coated substrate (100) on the second conveyor belt (2).

2. The coating device according to claim 1, characterized in that: The avoidance groove (31) passes through the suction cup (3) in the horizontal direction; And / or, the height of the first conveyor belt (1) is the same as that of the second conveyor belt (2), and the depth of the avoidance groove (31) is greater than the height of the first conveyor belt (1) and the second conveyor belt (2).

3. The coating device according to claim 1, characterized in that: The suction cup (3) and the drive assembly (4) are respectively provided in plurality, and each of the suction cups (3) is driven by a corresponding one of the drive assemblies (4); the drive assembly (4) drives the suction cup (3) to cyclically move between the first conveyor belt (1), the coating position, and the second conveyor belt (2) to form a circulation path, and the plurality of suction cups (3) are sequentially arranged on the circulation path.

4. The coating device according to claim 3, characterized in that: It also comprises a carrier (33) for supporting the suction cup (3), the suction cup (3) being connected to the driving assembly (4) via the carrier (33); the driving assembly (4) driving the carrier (33) and the suction cup (3) to achieve a maximum displacement in the vertical direction that is greater than the height of the whole formed by the suction cup (3) and the carrier (33).

5. The coating device according to claim 1, characterized in that: The device further comprises a guide rail (5) extending in a first direction, the drive assembly (4) comprising a first drive group (41) and a second drive group (42), the first drive group (41) comprising a slider (411) connected to the guide rail (5) and a drive member for driving the slider (411) to move in the first direction; the second drive group (42) is respectively connected to the slider (411) and the suction cup (3), and the second drive group (42) is used to drive the suction cup (3) to move in the second direction; The first direction is a horizontal direction, and the second direction is a vertical direction; or the first direction is a vertical direction, and the second direction is a horizontal direction.

6. The coating device according to claim 1, characterized in that: The coating device further comprises a positioning component (6), wherein the positioning component (6) is arranged above the first conveyor belt (1), and the positioning component (6) is used to locate the position of the substrate (100).

7. The coating device according to claim 6, characterized in that: The positioning assembly (6) comprises a horizontal alignment group (61) and a vertical alignment group (62); the horizontal alignment group (61) is used to locate the position of the substrate (100) on the suction cup (3); and the vertical alignment group (62) is used to locate the height of the substrate (100) and the suction cup (3).

8. A coating method, characterized in that: The coating method is performed using the coating device according to any one of claims 1 to 7, and the coating method comprises: Step S01: The loading component supplies the substrate to be coated to the first conveyor belt (1); Step S02: the driving component (4) drives the adsorption surface (32) of the suction cup (3) to rise from below the first conveyor belt (1) to pass through the first conveyor belt (1), and the suction cup (3) adsorbs and fixes the substrate to be coated; Step S03: the driving component (4) drives the suction cup (3) to move to the coating position and coats the substrate to be coated; Step S04: the driving component (4) drives the adsorption surface (32) of the suction cup (3) to be flush with or higher than the upper surface of the second conveyor belt (2), and the driving component (4) drives the suction cup (3) to move downward and releases the adsorption fixation of the suction cup (3), so that the suction cup (3) is placed on the second conveyor belt (2); Step S05: The second conveyor belt (2) transports the coated substrate to a receiving position.

9. The coating method according to claim 8, characterized in that: The step S02 specifically includes: The driving component (4) drives the adsorption surface (32) of the suction cup (3) to pass through the first conveyor belt (1) and lift up the substrate to be coated, the positioning component (6) is used to position the substrate to be coated, and the suction cup (3) adsorbs and fixes the substrate to be coated.

10. The coating method according to claim 9, characterized in that: The two suction cups (3) are simultaneously driven by the driving component (4) and pass through the first conveyor belt (1) and lift up the substrate to be coated, and the positioning component (6) simultaneously positions the substrate to be coated on the two suction cups (3).

11. The coating method according to claim 8, characterized in that: The suction cups (3) are provided in plurality, and the plurality of suction cups (3) respectively and cyclically execute steps S01 to S05, the plurality of suction cups (3) are moved to the coating position in sequence, and the coating head (7) continuously coats the substrates on the plurality of suction cups (3).

12. The coating method according to claim 11, characterized in that: The plurality of suction cups (3) include a first suction cup (34), a second suction cup (35), a third suction cup (36) and a fourth suction cup (37); the substrate on the first suction cup (34) and the substrate on the second suction cup (35) synchronously execute step S02 during the coating process; and the substrate on the third suction cup (36) and the substrate on the fourth suction cup (37) synchronously execute step S02 during the coating process.

13. The coating method according to claim 12, characterized in that: When the substrate on the first suction cup (34) performs step S03 during the coating process, the second suction cup (35) moves toward the first suction cup (34) and is close to the first suction cup (34), and after the substrate on the first suction cup (34) performs step S03 during the coating process, the substrate on the second suction cup (35) performs step S03 during the coating process; When the substrate on the second suction cup (35) performs step S03 during the coating process, the third suction cup (36) moves toward the second suction cup (35) and is close to the second suction cup (35), and after the substrate on the second suction cup (35) performs step S03 during the coating process, the substrate on the third suction cup (36) performs step S03 during the coating process; When the substrate on the third suction cup (36) performs step S03 during the coating process, the fourth suction cup (37) moves toward the third suction cup (36) and is close to the third suction cup (36), and after the substrate on the third suction cup (36) performs step S03 during the coating process, the substrate on the fourth suction cup (37) performs step S03 during the coating process; When the substrate on the fourth suction cup (37) performs step S03 during the coating process, the first suction cup (34) moves toward the fourth suction cup (37) and is close to the fourth suction cup (37). After the substrate on the fourth suction cup (37) performs step S03 during the coating process, the substrate on the first suction cup (34) performs step S03 during the coating process.

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