Flat grinding wheel for quartz boat machining and machining method

Abstract

The invention relates to the technical field of quartz boat production, in particular to a flat grinding wheel for quartz boat machining and a machining method. The machining method comprises the steps that quartz ingot raw materials are obtained and detected, the quartz ingot raw materials are machined based on a numerical control machining center, and groove rods and side plates are obtained; the groove rods and the side plates are cleaned and dried; heating two ends of the groove rod by using a blow lamp, and pressing the side plates on two sides of the groove rod to obtain a semi-finished product; feeding the semi-finished product into an annealing furnace to anneal and relieve stress, and taking out and cooling after annealing to obtain an annealed finished product; according to the machining method, the two ends of the groove rod are heated at the same time through the blowtorch to enable the groove rod to be in a semi-melting state, then the side plates are connected to the two ends of the groove rod through the connecting and dismounting device, bonding is completed, welding is not needed, no welded junction exists, later manual welded junction grinding is not needed, bonding is completed mechanically, and the machining efficiency is improved. Therefore, the production time of the quartz boat finished product is shortened, and the production efficiency of the quartz boat finished product is improved.

Description

Technical Field

[0001] The invention relates to the technical field of quartz boat production, in particular to a flat grinding wheel for quartz boat processing and a processing method thereof. Background Art

[0002] Quartz boat is a tool for carrying semiconductor silicon wafers. It is currently most widely used for two purposes: First, there is a critical step in the production of solar cells called diffusion. In this step, a quartz boat is needed as a carrying fixture to fix the semi-finished silicon solar cell wafers in the diffusion furnace; Second, there are multiple process steps in the production of semiconductor silicon wafers. Quartz boats are needed to carry semi-finished silicon wafers from one process to the next. For example, in the production process of LED epitaxial wafers, multiple inspections of silicon wafer appearance and product performance are required, and the products before and after inspection need to be carried by quartz boats.

[0003] The traditional quartz boat preparation method requires fixing the relative positions of the slot rods and the side plates by welding. However, the quartz boats produced by the welding production method have rough welds and require manual grinding, which is time-consuming, has a high rework rate, and has low production efficiency. Summary of the invention

[0004] The purpose of the present invention is to provide a flat grinding wheel for quartz boat processing and a processing method, aiming to solve the problems of rough welds, manual grinding, long time consumption, high rework rate and low production efficiency in the traditional quartz boat preparation method.

[0005] To achieve the above object, in a first aspect, the present invention provides a quartz boat processing method, comprising the following steps:

[0006] Acquire and detect quartz ingot raw materials, and process the quartz ingot raw materials based on a CNC machining center to obtain slot rods and side plates;

[0007] Cleaning and drying the slot rods and the side plates;

[0008] Using a blowtorch to heat the two ends of the groove rod, and then pressing the side plates on both sides of the groove rod to obtain a semi-finished product;

[0009] The semi-finished product is sent to an annealing furnace for annealing to relieve stress, and after the annealing is completed, it is taken out and cooled to obtain an annealed finished product;

[0010] The annealed finished product is cleaned, tested and packaged to obtain a quartz boat finished product.

[0011] In the embodiment of the present invention, the specific method of obtaining and detecting the quartz ingot raw material, and processing the quartz ingot raw material based on a CNC machining center to obtain the slot rods and the side plates is as follows:

[0012] Obtain and test quartz ingot raw materials;

[0013] Processing the quartz raw material based on a CNC machining center to obtain a quartz sheet;

[0014] The quartz sheet is processed to obtain slot rods and side plates.

[0015] In the embodiment of the present invention, during the processing of the quartz ingot raw material and the quartz sheet, the abrasive is collected and poured into an abrasive conveyor, and the dust is absorbed by a dust suction device.

[0016] In the embodiment of the present invention, the specific method of processing the quartz sheet to obtain the slot rods and the side plates is:

[0017] Cutting the quartz sheet to obtain strips and plates;

[0018] The strips and the plates are subjected to surface grinding, chamfering and polishing operations to obtain grooved bars and side plates.

[0019] In the embodiment of the present invention, the specific method of cleaning and drying the slot rods and the side plates is:

[0020] Preliminarily cleaning the slot rods and the side plates using a pickling solution;

[0021] Using pure water to wash the groove rod and the side plate for a second time;

[0022] The cleaned slot rods and side plates are blown dry with nitrogen to perform a drying process.

[0023] In the embodiment of the present invention, the specific method of heating the two ends of the slot rod with a blowtorch and then pressing the side panels on both sides of the slot rod to obtain the semi-finished product is as follows:

[0024] placing the slot rod on a graphite jig;

[0025] Using a blowtorch to heat both ends of the slot rod at the same time, so that both ends of the slot rod reach a semi-melted state;

[0026] The side panels are then connected to both ends of the slot rods through a loading and unloading device to obtain a semi-finished product.

[0027] In a second aspect, the present invention further provides a flat grinding wheel for processing a quartz boat, which is used to perform the quartz boat processing method described in the first aspect, and is characterized in that:

[0028] It includes a dust hood, a grinding wheel, a grinding machine, an air intake pipe and a dust removal box. The grinding wheel is detachably connected to the grinding machine and is located on one side of the grinding machine. The dust hood is fixedly connected to the grinding machine and is located on the side of the grinding machine close to the grinding wheel. The air intake pipe is connected to the dust hood and is located on one side of the dust hood. The dust removal box is connected to the air intake pipe and is located on the side of the air intake pipe away from the air intake hood.

[0029] The invention discloses a quartz boat processing method, which comprises the following steps: obtaining and detecting quartz ingot raw materials, processing the quartz ingot raw materials based on a numerical control machining center to obtain a slot rod and a side plate; cleaning and drying the slot rod and the side plate; heating the two ends of the slot rod with a blowtorch, and then pressing the side plate on both sides of the slot rod to obtain a semi-finished product; sending the semi-finished product into an annealing furnace for annealing to relieve stress, taking it out and cooling it after the annealing is completed, and cleaning, detecting and packaging the annealed product to obtain a quartz boat finished product. The processing method heats the two ends of the slot rod with a blowtorch at the same time to make it a semi-melted state, and then connects the side plate to the two ends of the slot rod with a connecting and unloading device to complete the bonding, without welding and without weld joints, so there is no need to manually grind the weld joints later, and the bonding is completed by a machine, and the accuracy is guaranteed, thereby shortening the production time of the quartz boat finished product, improving the production efficiency of the quartz boat finished product, and solving the problem that the traditional quartz boat preparation method for preparing the quartz boat has rough weld joints, requires manual grinding, takes a long time, has a high rework rate, and has low production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0031] Figure 1 The present invention provides a flow chart of a quartz boat processing method.

[0032] Figure 2 The invention discloses a flow chart of a specific method for obtaining and testing quartz ingot raw materials, processing the quartz ingot raw materials based on a numerical control machining center, and obtaining groove rods and side plates.

[0033] Figure 3 It is a flow chart of a specific method of processing the quartz sheet to obtain the groove rods and side plates.

[0034] Figure 4 It is a flow chart of a specific method for cleaning and drying the groove rods and the side plates.

[0035] Figure 5 The present invention is a flow chart of a specific method of heating the two ends of the groove rod by using a blowtorch and then pressing the side plates on both sides of the groove rod to obtain a semi-finished product.

[0036] Figure 6 The present invention is a flow chart of cleaning, testing and packaging the annealed finished product to obtain a quartz boat finished product.

[0037] Figure 7 The present invention is a schematic diagram of a flat grinding wheel for processing a quartz boat.

[0038] In the figure: 1-dust hood, 2-grinding wheel, 3-grinding machine, 4-intake pipe, 5-dust removal box. DETAILED DESCRIPTION

[0039] Embodiments of the present invention are described in detail below, examples of the embodiments are shown in the accompanying drawings, and the same or similar reference numerals throughout the embodiments of the present invention represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0040] See also Figure 1 In the first aspect, the present invention provides a flow chart of a quartz boat processing method. Figure 1 As shown, the quartz boat processing method comprises the following steps:

[0041] S1 obtains and detects quartz ingot raw materials, and processes the quartz ingot raw materials based on a CNC machining center to obtain slot rods and side plates;

[0042] like Figure 2 As shown, Figure 2 The specific method flow chart of obtaining and testing quartz ingot raw materials, processing the quartz ingot raw materials based on a CNC machining center, and obtaining slot rods and side plates is as follows:

[0043] S11 obtains and tests quartz ingot raw materials;

[0044] Specifically, quartz ingot raw materials are purchased, and the quartz ingot raw materials are tested based on the testing standards for quartz ingot to eliminate foreign minerals.

[0045] S12 processes the quartz raw material based on a CNC machining center to obtain a quartz sheet;

[0046] Specifically, the quartz ingot raw material that has passed the inspection is sent to a CNC machining center, and the CNC machining center is controlled by a pre-set program to slice the quartz ingot raw material to obtain the quartz sheet.

[0047] S13 processes the quartz sheet to obtain slot rods and side plates.

[0048] Specifically, the quartz sheet is processed, cut into strips and plates, and groove rods and side plates are obtained.

[0049] like Figure 3 As shown, Figure 3 This is a flow chart of a specific method of processing the quartz sheet to obtain the slot rods and side plates. The specific method is:

[0050] S131 cutting the quartz sheet to obtain strips and plates;

[0051] S132 performs surface grinding, chamfering and polishing operations on the strips and the plates to obtain grooved bars and side plates.

[0052] In this embodiment, during the processing of the quartz ingot raw material and the quartz sheet, abrasives are collected and poured into an abrasive conveyor, and dust is absorbed by a dust suction device to avoid dust from floating and polluting the working environment and to prevent workers from inhaling it. Abrasives can be recycled during the processing of the slot rods to reduce waste of resources.

[0053] S2: cleaning and drying the slot rods and the side plates;

[0054] like Figure 4 As shown, Figure 4 This is a flow chart of a specific method for cleaning and drying the slot rods and the side plates. The specific method is:

[0055] S21 preliminarily cleans the slot rods and the side plates using a pickling solution;

[0056] Specifically, the initial cleaning takes 1-5 minutes.

[0057] S33 uses pure water to secondary clean the groove rods and the side plates;

[0058] Specifically, purified water can be replaced with deionized water and rinsed twice for 1-5 minutes.

[0059] S23 uses nitrogen to blow dry the cleaned slot rods and the side plates to perform a drying process.

[0060] S3 uses a blowtorch to heat the two ends of the groove rod, and then presses the side plates on both sides of the groove rod to obtain a semi-finished product;

[0061] like Figure 5 As shown, a flow chart of a specific method of heating the two ends of the groove rod by using a blowtorch, and then pressing the side plates on both sides of the groove rod to obtain a semi-finished product, a specific method;

[0062] S31 placing the slot rod on a graphite jig;

[0063] S32 uses a blowtorch to heat both ends of the slot rod simultaneously, so that both ends of the slot rod reach a semi-melted state;

[0064] Specifically, the temperature at which both ends of the slot rod reach semi-melting is 2000°C.

[0065] S33 connects the side plates to the two ends of the slot rod through the loading and unloading device to obtain a semi-finished product.

[0066] S4: sending the semi-finished product into an annealing furnace for annealing to relieve stress, taking it out and cooling it after the annealing is completed to obtain an annealed finished product;

[0067] Specifically, the semi-finished product is pushed into an annealing furnace for annealing to relieve stress. The quartz boat semi-finished product is supported by an annealing support table in the furnace and placed on quartz wool, and the quartz wool is laid flat on a quartz rack. After the annealing is completed, the annealed semi-finished product is pulled out and placed on a graphite plate to slowly cool to obtain an annealed product. The annealing temperature is 1000-1150°C and the annealing time is 35-55min.

[0068] S5: cleaning, testing and packaging the annealed product to obtain a quartz boat product.

[0069] like Figure 6 As shown, Figure 6 This is a flow chart of cleaning, testing and packaging the annealed finished product to obtain a quartz boat finished product. The specific method is:

[0070] S51: pickling and water washing the annealed product in sequence, and drying the annealed product with nitrogen again;

[0071] Specifically, the pickling and water washing time is 3 minutes.

[0072] S52 inspects the appearance of the annealed finished product based on the required standard, removes defective products, and obtains a quartz boat finished product;

[0073] S53 packages the qualified quartz boat finished products.

[0074] See also Figure 7 The present invention also provides a flat grinding wheel for quartz boat processing, which is used to perform the quartz boat processing method described in the first aspect, and is characterized in that:

[0075] It includes a dust hood 1, a grinding wheel 2, a grinding machine 3, an air intake pipe 4 and a dust removal box 5. The grinding wheel 2 is detachably connected to the grinding machine 3 and is located on one side of the grinding machine 3. The dust hood 1 is fixedly connected to the grinding machine 3 and is located on the side of the grinding machine 3 close to the grinding wheel 2. The air intake pipe 4 is connected to the dust hood 1 and is located on one side of the dust hood 1. The dust removal box 5 is connected to the air intake pipe 4 and is located on the side of the air intake pipe 4 away from the air intake hood.

[0076] In this embodiment, the dust removal box 5 is connected to an air suction pump, and the grinding wheel 2 is driven by the grinding machine 3 to grind and chamfer the surface of the strips and plates. During the grinding process, the air suction pump is turned on, so that the dust hood 1 generates adsorption force, thereby absorbing the dust generated by the grinding, and then the dust is introduced into the dust removal box 5 through the suction pipe 4 for filtration and dust removal, thereby avoiding dust from floating and polluting the working environment, and preventing the staff from inhaling dust and affecting their health.

[0077] The invention discloses a quartz boat processing method, which comprises the following steps: obtaining and detecting quartz ingot raw materials, processing the quartz ingot raw materials based on a numerical control machining center to obtain a slot rod and a side plate; cleaning and drying the slot rod and the side plate; heating the two ends of the slot rod with a blowtorch, and then pressing the side plate on both sides of the slot rod to obtain a semi-finished product; sending the semi-finished product into an annealing furnace for annealing to relieve stress, taking it out and cooling it after the annealing is completed, and cleaning, detecting and packaging the annealed product to obtain a quartz boat finished product. The processing method heats the two ends of the slot rod with a blowtorch at the same time to make it a semi-melted state, and then connects the side plate to the two ends of the slot rod with a connecting and unloading device to complete the bonding, without welding and without weld joints, so there is no need to manually grind the weld joints later, and the bonding is completed by a machine, and the accuracy is guaranteed, thereby shortening the production time of the quartz boat finished product, improving the production efficiency of the quartz boat finished product, and solving the problem that the traditional quartz boat preparation method for preparing the quartz boat has rough weld joints, requires manual grinding, takes a long time, has a high rework rate, and has low production efficiency.

[0078] The above disclosure is only a preferred embodiment of a flat grinding wheel and a processing method for quartz boat processing of the present invention. Of course, this cannot be used to limit the scope of rights of the present invention. Ordinary technicians in this field can understand that all or part of the processes of the above embodiments and equivalent changes made according to the claims of the present invention still fall within the scope of the invention.

Claims

1. A quartz boat processing method, characterized in that: The following steps are involved: Acquire and detect quartz ingot raw materials, and process the quartz ingot raw materials based on a CNC machining center to obtain slot rods and side plates; Cleaning and drying the slot rods and the side plates; Using a blowtorch to heat the two ends of the groove rod, and then pressing the side plates on both sides of the groove rod to obtain a semi-finished product; The semi-finished product is sent to an annealing furnace for annealing to relieve stress, and after the annealing is completed, it is taken out and cooled to obtain an annealed finished product; The annealed finished product is cleaned, tested and packaged to obtain a quartz boat finished product.

2. The quartz boat processing method according to claim 1, characterized in that: The specific method of obtaining and testing the quartz ingot raw material, processing the quartz ingot raw material based on a CNC machining center, and obtaining the slot rod and the side plate is as follows: Obtain and test quartz ingot raw materials; Processing the quartz raw material based on a CNC machining center to obtain a quartz sheet; The quartz sheet is processed to obtain slot rods and side plates.

3. The quartz boat processing method according to claim 2, characterized in that: During the processing of the quartz ingot raw material and the quartz sheet, the abrasive is collected and poured into an abrasive conveyor, and dust is absorbed by a dust suction device.

4. The quartz boat processing method according to claim 2, characterized in that: The specific method of processing the quartz sheet to obtain the slot rods and the side plates is as follows: Cutting the quartz sheet to obtain strips and plates; The strips and the plates are subjected to surface grinding, chamfering and polishing operations to obtain grooved bars and side plates.

5. The quartz boat processing method according to claim 1, characterized in that: The specific method of cleaning and drying the slot rods and the side plates is as follows: Preliminarily cleaning the slot rods and the side plates using a pickling solution; Using pure water to wash the groove rod and the side plate for a second time; The cleaned slot rods and side plates are blown dry with nitrogen to perform a drying process.

6. The quartz boat processing method according to claim 1, characterized in that: The specific method of heating the two ends of the groove rod with a blowtorch and then pressing the side plates on both sides of the groove rod to obtain the semi-finished product is as follows: placing the slot rod on a graphite jig; Using a blowtorch to heat both ends of the slot rod at the same time, so that both ends of the slot rod reach a semi-melted state; The side panels are then connected to both ends of the slot rods through a loading and unloading device to obtain a semi-finished product.

7. A flat grinding wheel for processing a quartz boat, used to perform the quartz boat processing method according to any one of claims 1 to 6, characterized in that: It includes a dust hood, a grinding wheel, a grinding machine, an air intake pipe and a dust removal box. The grinding wheel is detachably connected to the grinding machine and is located on one side of the grinding machine. The dust hood is fixedly connected to the grinding machine and is located on the side of the grinding machine close to the grinding wheel. The air intake pipe is connected to the dust hood and is located on one side of the dust hood. The dust removal box is connected to the air intake pipe and is located on the side of the air intake pipe away from the air intake hood.

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