Probe card device

Abstract

A probe card device comprises a probe assembly, the probe assembly comprises a probe and a probe seat, and the probe is detachably connected with the probe seat; the fixing device comprises a first fixing piece and a second fixing piece which are oppositely arranged, and the needle seat is movably arranged between the first fixing piece and the second fixing piece. According to the probe card device provided by the embodiment of the invention, the distance between the adjacent probes can be adjusted, the number of the probes can also be adjusted, and the probes can be simply and quickly disassembled and assembled.

Description

Technical Field

[0001] The present invention relates to the technical field of chip testing, and in particular to a probe card device. Background Art

[0002] The probe card is an important device in the field of integrated circuit technology. It is used to perform functional tests on wafers with probes before the integrated circuit is packaged. The probes on the probe card are directly in contact with the pads or bumps on the chip to bring out the chip signals. The chip parameters are then tested in conjunction with peripheral test instruments and software control. Unqualified products are selected for subsequent packaging projects to avoid waste caused by continued processing of defective products.

[0003] Due to the wide variety of chip styles, the number and position of pads or bumps are different. Current probe cards cannot adjust the number of probes and the distance between probes according to different test chips. It is necessary to design a dedicated probe card for the chip to be tested, which increases the test cost. Summary of the invention

[0004] The technical problem solved by the present invention is to provide a probe card device, which can realize the disassembly of probes and the change of the distance between probes, so that the probe card is suitable for different types of chips to be tested.

[0005] To solve the above technical problems, an embodiment of the present invention provides a probe card device, comprising: a probe assembly, the probe assembly comprising a probe and a needle seat, the probe and the needle seat being detachably connected; a fixing device, the fixing device comprising a first fixing member and a second fixing member arranged opposite to each other, the needle seat being movably arranged between the first fixing member and the second fixing member.

[0006] Optionally, the detachable connection between the probe and the needle seat includes a threaded connection or a snap connection.

[0007] Optionally, when the probe and the needle seat are connected by a thread, an external thread is provided on the outer surface of the probe, and an internal thread is provided on the inner surface of the needle seat, and the internal thread matches the external thread.

[0008] Optionally, when the probe and the needle seat are snap-fitted, a protrusion is provided on the outer surface of the probe, and a first groove is provided on the inner surface of the needle seat, and the protrusion is used to snap-fit ​​into the first groove.

[0009] Optionally, the needle seat is clamped between the first fixing member and the second fixing member.

[0010] Optionally, the fixing device further comprises a flexible support member, and the flexible support member is arranged between the needle seat and the first fixing member and between the needle seat and the second fixing member.

[0011] Optionally, the material of the flexible support member includes sponge, rubber or silicone.

[0012] Optionally, the fixing device further comprises a spring and a fixing block, wherein the spring is symmetrically mounted on the first fixing member and the second fixing member, one end of the fixing block is connected to the spring, and the other end of the fixing block is used to abut against the needle seat.

[0013] Optionally, the needle seat is slidably connected between the first fixing member and the second fixing member.

[0014] Optionally, a second groove is provided on the outer surface of the needle seat, and slide rails are provided on the first fixing member and the second fixing member respectively, and the second groove is suitable for accommodating the slide rails so that the needle seat slides between the first fixing member and the second fixing member.

[0015] Optionally, an adapter plate is also included, and the adapter plate is electrically connected to the probe assembly.

[0016] Optionally, a circuit board is also included, and the probe assembly is electrically connected to the circuit board through the adapter board.

[0017] Optionally, it further includes a wire, which includes a movable part and a fixed part, the movable part connects the adapter plate and the probe assembly, and the fixed part connects the adapter plate and the circuit board.

[0018] Compared with the prior art, the technical solution of the embodiment of the present invention has the following beneficial effects:

[0019] The probe card device provided by the technical solution has, on the one hand, a detachable connection between the probe and the needle holder. When a single probe is damaged, the damaged probe can be directly removed without replacing the entire probe card. In addition, when the number of test points of the chip to be tested is different, the number of probes can be increased or decreased, and there is no need to make a new probe card, which can reduce the test cost. On the other hand, the needle holder can be movably arranged between the first fixing member and the second fixing member, and the needle holder can change its position between the first fixing member and the second fixing member. By moving the needle holder, the distance between the needle tips of the probes can be changed. When the distance between the test points of the chip to be tested is different, there is no need to make a new probe card, which is conducive to reducing costs.

[0020] Furthermore, the fixing device further comprises a flexible support member, which is arranged between the needle seat and the first fixing member and between the needle seat and the second fixing member. The flexible support member can reduce the wear between the needle seat and the first fixing member and the second fixing member. In addition, the flexible support member can better wrap the needle seat, which is more conducive to the stability of the needle seat between the first fixing member and the second fixing member. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic diagram of the main structure of a probe card device according to one embodiment of the present invention;

[0022] Figure 2 yes Figure 1 A schematic top view of the structure of the connection between the fixing device and the needle seat shown;

[0023] Figure 3 is a schematic top view of the structure of the connection between the fixing device and the needle holder in another embodiment of the present invention;

[0024] Figure 4 is an enlarged structural schematic diagram of a needle seat in yet another embodiment of the present invention;

[0025] Figure 5 It is a side view structural schematic diagram of the connection between the fixing device and the needle seat in another embodiment of the present invention. DETAILED DESCRIPTION

[0026] As described in the background technology, current probe cards usually have problems such as a fixed number of probes and a fixed distance between the probe tips, and cannot be applied to different styles of chips to be tested. If the number of test points or the distance between the test points of the chip to be tested changes, different probe cards need to be customized to meet different test conditions, resulting in increased testing costs and longer testing cycles.

[0027] In order to solve the above problems, an embodiment of the present invention provides a probe card device, including a probe assembly and a fixing device, wherein the probe of the probe assembly is detachably connected to the needle holder. When a single probe is damaged or the number of probes to be used changes, the probe that needs to be replaced or is not needed can be directly removed, or the probe can be directly installed to increase the number of probes. In addition, the fixing device includes a first fixing member and a second fixing member that are relatively arranged, and the needle holder is movably arranged between the first fixing member and the second fixing member. The position of the needle holder between the first fixing member and the second fixing member can be changed, so that the distance between the needle holders can be changed according to the distance between the test points on the chip to be tested, that is, the distance between the needle tips of the probes is changed. There is no need to formulate a special probe card, and the probe card can be adapted to chips to be tested of different styles, which is beneficial to reducing testing costs and shortening testing cycles.

[0028] In order to make the above-mentioned objects, features and beneficial effects of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0029] Figure 1 is a schematic diagram of the main structure of a probe card device according to one embodiment of the present invention; Figure 2 yes Figure 1A schematic top view of the structure of the connection between the fixing device and the needle seat is shown.

[0030] Combined with reference Figure 1 and Figure 2 The probe card device includes: a probe assembly 10, wherein the probe assembly 10 includes a probe 11 and a needle seat 12, wherein the probe 11 and the needle seat 12 are detachably connected; a fixing device 20, wherein the fixing device 20 includes a first fixing member 21 and a second fixing member 22 that are relatively arranged, and the needle seat 12 is movably arranged between the first fixing member 21 and the second fixing member 22.

[0031] In this embodiment, the probe 11 and the needle holder 12 are detachably connected. When a single probe 11 fails and is damaged, it is not necessary to replace the entire probe card. Instead, the damaged probe 11 can be removed for repair or replacement, which is beneficial to reducing the test cost. In addition, when the number of test points of the chip to be tested changes, the number of probes 11 can be directly changed by installing new probes 11 or removing extra probes 11. It is not necessary to design a dedicated probe card for the chip to be tested, which is beneficial to reducing the test cost and shortening the test cycle.

[0032] In this embodiment, the needle seat 12 is movably disposed between the first fixing member 21 and the second fixing member 22. The position of the needle seat 12 can be adjusted between the first fixing member 21 and the second fixing member 22. By adjusting the distance between adjacent needle seats 12, the distance between adjacent probes can be adjusted accordingly, so that the spacing of the needle tips of the probes 11 can be changed according to the spacing between different test points.

[0033] In this embodiment, the first fixing member 21 and the second fixing member 22 extend along a first direction X, and are disposed opposite to each other along a second direction Y, and the second direction Y is perpendicular to the first direction X.

[0034] In this embodiment, the probe 11 is perpendicular to the test point on the chip to be tested, and the probe 11 extends along a third direction Z, and the third direction Z is perpendicular to the first direction X and the second direction Y.

[0035] Continue to refer Figure 1 The probe card device further includes an adapter plate 30 , and the adapter plate 30 is electrically connected to the probe assembly 10 .

[0036] In this embodiment, the adapter plate 30 is electrically connected to the needle holder 12 of the probe assembly 10 .

[0037] The adapter board 30 is an intermediate converter and a circuit substrate with a multi-layer structure.

[0038] Continue to refer Figure 1The probe card device further includes a circuit board 40 , and the probe assembly 10 is electrically connected to the circuit board 40 through the adapter board 30 .

[0039] In this embodiment, the adapter plate 30 is disposed between the circuit board 40 and the fixing device 20 , one side of the adapter plate 30 is electrically connected to the circuit board 40 , and the other side of the adapter plate 30 is electrically connected to the probe assembly 10 .

[0040] Continue to refer Figure 1 The probe card device also includes a wire, which includes a movable part 51 and a fixed part 52 , the movable part 51 connects the adapter board 30 and the probe assembly 10 , and the fixed part 52 connects the adapter board 30 and the circuit board 40 .

[0041] In this embodiment, the movable portion 51 of the wire connects the adapter plate 30 and the needle seat 12 of the probe assembly 10 , and one end of the wire is welded to the needle seat 12 .

[0042] In this embodiment, the length of the movable portion 51 of the wire can be determined according to the spacing between the test points on the chip to be tested, so that the movement range of the needle seat 12 can meet the needs of different test points. If the spacing between the test points of the replaced chips to be tested is too large, a plurality of spaced probes 11 can be used to test adjacent test points. For example, the first and third probes are used to test the first and second test points, so that there is enough wire when the needle seat 12 moves between the first fixing member 21 and the second fixing member 22, thereby preventing the movement of the needle seat 12 from being restricted due to the wire being too short.

[0043] Continue to refer Figure 1 The probe 11 includes a first end and a second end. The first end of the probe 11 is detachably connected to the needle holder 12, and the second end of the probe 11 contacts a test point such as a pad or a bump on the chip to be tested to transmit an electrical signal on the chip.

[0044] In this embodiment, the number of the probes 11 is one or more, and the number of the probes 11 can be determined according to the test points of the chip to be actually tested.

[0045] In this embodiment, the number of the needle seats 12 is greater than or equal to the number of the probes 11 . When the number of test points of the chip to be tested is reduced, the probes 11 that are not needed can be directly removed to reduce the number of the probes 11 .

[0046] In this embodiment, the probe 11 is connected to the needle seat 12 by threads. Specifically, an outer thread is provided on the outer surface of the probe 11, and an inner thread is provided on the inner surface of the needle seat 12, and the inner thread matches the outer thread.

[0047] In this embodiment, an external thread is provided on the outer surface of the first end of the probe 11 .

[0048] In this embodiment, the probe 11 can be installed on the needle seat 12 or removed from the needle seat 12 by rotating placement, which is simple to operate and saves time and effort.

[0049] In another embodiment, the probe 11 and the needle seat 12 can be connected by snapping. Specifically, a protrusion is provided on the outer surface of the probe 11, and a first groove is provided on the inner surface of the needle seat 12, and the first groove matches the protrusion. The probe 11 can be directly installed on the needle seat 12 or removed from the needle seat 12 by plugging and unplugging.

[0050] Continue to refer Figure 1 and Figure 2 In this embodiment, the needle seat 12 is clamped between the first fixing member 21 and the second fixing member 22 .

[0051] In this embodiment, the fixing device 20 further includes a flexible support member 23 , and the flexible support member 23 is disposed between the needle seat 12 and the first fixing member 21 and between the needle seat 12 and the second fixing member 22 .

[0052] In this embodiment, the relatively arranged first fixing member 21 and the second fixing member 22 clamp the needle seat 12, and a flexible support member 23 is arranged between the first fixing member 21 and the needle seat 12 and between the second fixing member 22 and the needle seat 12. On the one hand, the flexible support member 23 has a certain elasticity and can provide a certain space for the needle seat 12 to move between the first fixing member 21 and the second fixing member 22; on the other hand, the flexible support member 23 can better wrap the needle seat 12, and can prevent the needle seat 12 from directly contacting the first fixing member 21 and the second fixing member 22, thereby reducing wear.

[0053] In this embodiment, the flexible support member 23 is made of sponge material; in other embodiments, the flexible support member 23 may also be made of elastic materials such as silicone, rubber, etc.

[0054] In this embodiment, the needle seat 12 can be directly moved between the first fixing member 21 and the second fixing member 22 to change the distance between adjacent probes 11; or the needle seat 12 can be first taken out from between the first fixing member 21 and the second fixing member 22, and then re-clamped between the first fixing member 21 and the second fixing member 22 at the required position, which is simple and convenient to operate.

[0055] Figure 3 It is a schematic top view of the structure of the connection between the fixing device and the needle seat in another embodiment of the present invention.

[0056] refer to Figure 3 In this embodiment, the needle seat 12 is clamped between the first fixing member 21 and the second fixing member 22 .

[0057] The difference between this embodiment and the above-mentioned embodiment is that, in this embodiment, the fixing device 20 also includes a spring 24 and a fixing block 25, the spring 24 is symmetrically mounted on the first fixing member 21 and the second fixing member 22, one end of the fixing block 25 is connected to the spring 24, and the other end of the fixing block 25 is used to abut against the needle seat 12.

[0058] In this embodiment, the spring 24 includes a first spring and a second spring, the first spring is mounted on the first fixing member 21, the second spring is mounted on the second fixing member 22, and the first spring and the second spring are arranged opposite to each other in the second direction Y.

[0059] In this embodiment, the fixed block 25 includes a first fixed block and a second fixed block, one end of the first spring is connected to the first fixing piece 21, and the other end of the first spring is connected to the first fixed block; one end of the second spring is connected to the second fixing piece 22, and the other end of the second spring is connected to the second fixed block, and the first fixed block and the second fixed block are arranged opposite to each other in the second direction Y.

[0060] In this embodiment, when the needle holder 12 is not clamped between the first fixing block and the second fixing block, the first spring and the second spring are in an extended state; when the needle holder 12 is clamped between the first fixing block and the second fixing block, the first spring and the second spring are in a compressed state, and the elastic force of the first spring and the second spring clamps the needle holder 12 between the first fixing member 21 and the second fixing member 22. Because the compression amount of the spring can be adjusted, the needle holder 12 can be easily adjusted between the first fixing block and the second fixing block, thereby changing the distance between adjacent probes 11, so that the probe card can be suitable for different chips to be tested.

[0061] In this embodiment, the distance between adjacent fixing blocks 25 located on the same side is set to one third of the diameter of the needle seat 12, that is, the spacing between adjacent first fixing blocks is one third of the diameter of the needle seat 12, and the spacing between adjacent second fixing blocks is one third of the diameter of the needle seat 12, to prevent the spacing between the fixing blocks 25 from being too large to cause the needle seat 12 to be unable to engage.

[0062] In this embodiment, the width of the fixing block 25 in the first direction X is one third of the diameter of the needle seat 12 , which can ensure that the contact surface with the needle seat 12 is larger, thereby ensuring that the needle seat 12 can be firmly engaged.

[0063] In this embodiment, the spacing between the relatively arranged fixed blocks 25 in the second direction Y is set to the radius of the needle seat 12, that is, the radius of the needle seat 12 between the relatively arranged first fixed block and the second fixed block in the second direction Y can improve the stability of the needle seat 12 engaged between the first fixed block and the second fixed block.

[0064] The contents not recorded in this embodiment are consistent with those in the previous embodiments and will not be repeated here.

[0065] Figure 4 is an enlarged structural schematic diagram of a needle seat in yet another embodiment of the present invention; Figure 5 It is a side view structural schematic diagram of the connection between the fixing device and the needle seat in another embodiment of the present invention.

[0066] Combined with reference Figure 4 and Figure 5 In this embodiment, the needle seat 12 is slidably connected between the first fixing member 21 and the second fixing member 22 .

[0067] In this embodiment, a second groove 120 is provided on the outer surface of the needle seat 12, and a slide rail 60 is respectively provided on the first fixing member 21 and the second fixing member 22, and the second groove 120 is used to accommodate the slide rail 60 so that the needle seat 12 slides between the first fixing member 21 and the second fixing member 22.

[0068] In this embodiment, a first slide rail 61 is provided on the first fixing member 21, a second slide rail 62 is provided on the second fixing member 22, and second grooves 120 are symmetrically provided on the outer surface of the needle seat 12. During installation, the first slide rail 61 and the second slide rail 62 are inserted into the second groove 120. When the needle seat 12 needs to change its position, it only needs to be moved along the first slide rail 61 and the second slide rail 62, which is simple and convenient to operate.

[0069] In this embodiment, the first slide rail 61 is a continuous long strip, and the second slide rail 62 is a continuous long strip, which can ensure that the needle seat 12 moves or stays at any position between the first slide rail 61 and the second slide rail 62.

[0070] In other embodiments, a slide groove may be respectively provided on the first fixing member 21 and the second fixing member 22 , and a protrusion may be provided on the outer surface of the needle seat 12 , and the slide groove is used to accommodate the protrusion so that the needle seat 12 slides between the first fixing member 21 and the second fixing member 22 .

[0071] The contents not recorded in this embodiment are consistent with those in the previous embodiments and will not be repeated here.

[0072] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A probe card device, characterized in that: include: A probe assembly, the probe assembly comprising a probe and a needle seat, the probe and the needle seat being detachably connected; The fixing device comprises a first fixing member and a second fixing member which are arranged opposite to each other, and the needle seat is movably arranged between the first fixing member and the second fixing member.

2. The probe card device according to claim 1, wherein: The detachable connection between the probe and the needle seat includes a threaded connection or a snap connection.

3. The probe card device according to claim 2, wherein: When the probe and the needle seat are connected by threads, an external thread is arranged on the outer surface of the probe, and an internal thread is arranged on the inner surface of the needle seat, and the internal thread matches the external thread.

4. The probe card device according to claim 2, wherein: When the probe and the needle seat are connected by a snap connection, a protrusion is provided on the outer surface of the probe, and a first groove is provided on the inner surface of the needle seat, and the protrusion is used to be snapped into the first groove.

5. The probe card device according to claim 1, wherein: The needle seat is clamped between the first fixing member and the second fixing member.

6. The probe card device according to claim 5, wherein: The fixing device further comprises a flexible support member, and the flexible support member is arranged between the needle seat and the first fixing member and between the needle seat and the second fixing member.

7. The probe card device according to claim 6, wherein: The material of the flexible support member includes sponge, rubber or silicone.

8. The probe card device according to claim 5, wherein: The fixing device further comprises a spring and a fixing block, wherein the spring is symmetrically mounted on the first fixing member and the second fixing member, one end of the fixing block is connected to the spring, and the other end of the fixing block is used to abut against the needle seat.

9. The probe card device according to claim 1, wherein: The needle seat is slidably connected between the first fixing member and the second fixing member.

10. The probe card device according to claim 9, wherein: A second groove is arranged on the outer surface of the needle seat, and slide rails are arranged on the first fixing member and the second fixing member respectively. The second groove is suitable for accommodating the slide rails so that the needle seat slides between the first fixing member and the second fixing member.

11. The probe card device according to claim 1, wherein: It also includes an adapter plate, which is electrically connected to the probe assembly.

12. The probe card device according to claim 11, wherein: A circuit board is also included, and the probe assembly is electrically connected to the circuit board through the adapter board.

13. The probe card device according to claim 12, wherein: It also includes a wire, which includes a movable part and a fixed part. The movable part connects the adapter plate and the probe assembly, and the fixed part connects the adapter plate and the circuit board.

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