Calibration system and method for dose measurement system of ion implanter and electronic equipment

Abstract

The invention provides a calibration system and method for a dose measurement system of an ion implanter and electronic equipment, which are applied to the technical field of control or regulation, and the system comprises a self-defined multi-path constant current source, an automatic switch switching circuit, a high-precision measurement module and a data processing and control module, the self-defined multi-path constant current source comprises a plurality of paths of constant current sources with different current intensities, and a target measurement precision gear is determined through the high-precision measurement module according to a switching result of the automatic switch switching circuit. And the data processing and control module converts the output current of the Faraday cup of the ion implanter equipment into a to-be-calibrated digital signal corresponding to the target measurement precision gear, and the to-be-calibrated digital signal is calibrated according to a preset calibration program. According to the embodiment of the invention, the output current of the Faraday cup can be calibrated automatically by means of the preset calibration program under the condition that the normal production process of the ion implanter equipment is not interrupted, and the production efficiency and the product quality of the ion implanter equipment can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of control or regulation systems, and in particular to a calibration system, method and electronic equipment for a dose measurement system of an ion implanter. Background Art

[0002] In the semiconductor manufacturing process, the ion implanter is one of the key process equipment, which changes the physical properties of semiconductor materials by injecting ion beams into them. In order to accurately determine the dose of ion beam implantation, the industry often uses a dose measurement system to measure the ion beam, especially the Faraday cup in the dose measurement system to measure the current intensity of the ion beam, which makes the accuracy of dose measurement directly affect the quality of the wafer and the yield of the product. However, the existing dose measurement system will gradually produce errors during use. If the error is not calibrated, it will directly affect the accuracy of dose measurement.

[0003] Existing calibration schemes for ion implanter dose measurement systems mostly rely on external calibration equipment or regular manual inspections. This dose measurement system calibration scheme is not only inefficient, but also difficult to cope with the problem of decreased accuracy of dose measurement systems caused by real-time changing environmental factors and equipment aging. Therefore, how to automatically check and calibrate the dose measurement system of ion implanters has become a technical problem that needs to be solved urgently to improve the process accuracy of ion implanters. Summary of the invention

[0004] In view of this, the embodiments of the present application provide a calibration system, method and electronic equipment for an ion implanter dose measurement system to achieve automatic calibration of the ion implanter dose measurement system, which further helps to improve the process accuracy of the ion implanter.

[0005] In a first aspect, an embodiment of the present application provides a calibration system for an ion implanter dose measurement system, wherein the system comprises: a custom multi-channel constant current source, an automatic switch switching circuit, a high-precision measurement module, and a data processing and control module, wherein the custom multi-channel constant current source includes multiple constant current sources with different current intensities; The high-precision measurement module is used to determine the target measurement accuracy gear according to the switching result of the automatic switch switching circuit; The data processing and control module is used to convert the output current of the Faraday cup into a digital signal to be calibrated corresponding to the target measurement accuracy gear, and calibrate the digital signal to be calibrated according to a preset calibration program.

[0006] In some possible embodiments, the automatic switch switching circuit includes a plurality of constant current source switching switch units, and the constant current source switching switch units are used to determine a target constant current source from the plurality of constant current sources with different current intensities in response to an input constant current source switching instruction.

[0007] In some possible embodiments, the automatic switch switching circuit also includes: a self-test test switching switch unit, which is used to control the target signal type connected to the high-precision measurement module and the data processing and control system in response to an input self-test or test switching instruction; the target signal type is the output current of the Faraday cup or the output result of the target constant current source.

[0008] In some possible embodiments, the types of the constant current source switching unit include: a first constant current source switching unit and a second constant current source switching unit; The high-precision measurement module is used to determine the target measurement accuracy level according to the closing status of the first constant current source switching switch unit and the second constant current source switching switch unit; wherein the measurement accuracy level depends on the current intensity of the target constant current source connected after the first constant current source switching switch unit and the second constant current source switching switch unit are closed.

[0009] In some possible embodiments, the preset calibration program is pre-determined by the data processing and control module in the following manner: Receiving a target constant current source corresponding to a target measurement accuracy gear, and converting a current value of the target constant current source into a reference digital signal; A calibration fitting curve is generated based on the least squares fitting according to the reference digital signal, and the preset calibration program is generated based on the calibration fitting curve.

[0010] In some possible embodiments, calibrating the digital signal to be calibrated according to a preset calibration procedure includes: The digital signal to be calibrated is input into the preset calibration program, a deviation is calculated according to the calibration fitting curve, and error compensation is performed on the digital signal to be calibrated based on the deviation to obtain the calibrated digital signal.

[0011] In some possible embodiments, the calibration system further includes: a host computer, the host computer includes a user interaction interface, the data processing and control module is connected to the host computer, and the data processing and control module is further used to output the digital signal to be calibrated and the calibrated digital signal to the host computer; The host computer is used to send a constant current source switching instruction to the automatic switch switching circuit, and display the digital signal to be calibrated and the calibrated digital signal on the user interaction interface.

[0012] In a second aspect, an embodiment of the present application provides a calibration method for an ion implanter dose measurement system, wherein the method is applied to the calibration system for the ion implanter dose measurement system according to the first aspect, and the method comprises: Determining a target measurement accuracy gear according to a switching result of an automatic switch switching circuit in the calibration system; The output current of the Faraday cup is converted into a digital signal to be calibrated corresponding to the target measurement accuracy gear, and the digital signal to be calibrated is calibrated according to a preset calibration procedure.

[0013] In a third aspect, an embodiment of the present application provides an electronic device, wherein the electronic device includes: Processor; and Memory for storing programs, Wherein, the program includes instructions, and when the instructions are executed by the processor, the processor executes the calibration method of the ion implanter dose measurement system described in the second aspect.

[0014] In a fourth aspect, an embodiment of the present application provides a non-transitory computer-readable storage medium storing computer instructions, wherein the computer instructions are used to enable a computer to execute the calibration method of the ion implanter dose measurement system described in the second aspect.

[0015] Beneficial effects of this application: The embodiment of the present application provides a calibration system, method and electronic device for an ion implanter dose measurement system, wherein the system includes: a custom multi-channel constant current source, an automatic switch switching circuit, a high-precision measurement module, and a data processing and control module. The custom multi-channel constant current source includes multiple constant current sources with different current intensities. The high-precision measurement module in the system determines the specific target measurement accuracy gear according to the switching result of the automatic switch switching circuit. The data processing and control module converts the output current of the Faraday cup in the ion implanter equipment into a digital signal to be calibrated corresponding to the target measurement accuracy gear according to the target measurement accuracy gear, and calibrates the digital signal to be calibrated according to a preset calibration program. When the embodiment of the present application is selected, there is no need to connect an external calibration device. The output current of the Faraday cup can be automatically calibrated with the help of a preset calibration program without interrupting the normal production process of the ion implanter equipment, so as to realize automatic calibration of the measurement system, which helps to improve the production efficiency and product quality of the ion implanter equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Further details, features and advantages of the present application are disclosed in the following description of exemplary embodiments in conjunction with the accompanying drawings, in which: Figure 1 A schematic diagram of a system architecture of a calibration system for an ion implanter dose measurement system provided in an embodiment of the present application is shown; Figure 2 Another system architecture schematic diagram of a calibration system for an ion implanter dose measurement system provided in an embodiment of the present application is shown; Figure 3 A circuit connection diagram of a calibration system of an ion implanter dose measurement system provided by an embodiment of the present application is shown; Figure 4 A schematic flow chart of a calibration method for an ion implanter dose measurement system provided in an embodiment of the present application is shown; Figure 5 A structural block diagram of an exemplary electronic device provided by an embodiment of the present application and capable of being used to implement an embodiment of the present application is shown. DETAILED DESCRIPTION

[0017] The embodiments of the present application will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be construed as being limited to the embodiments described herein. Instead, these embodiments are provided to provide a more thorough and complete understanding of the present application. It should be understood that the drawings and embodiments of the present application are only for exemplary purposes and are not intended to limit the scope of protection of the present application.

[0018] It should be understood that the various steps described in the method implementation of the present application can be performed in different orders and / or performed in parallel. In addition, the method implementation may include additional steps and / or omit the steps shown. The scope of the present application is not limited in this respect.

[0019] The term "including" and its variations used in this document are open inclusions, that is, "including but not limited to". The term "based on" means "based at least in part on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one other embodiment"; the term "some embodiments" means "at least some embodiments". Relevant definitions of other terms will be given in the description below. It should be noted that the concepts of "first", "second", etc. mentioned in this application are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0020] It should be noted that the modifications of "one" and "plurality" mentioned in the present application are illustrative rather than restrictive, and those skilled in the art should understand that unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0021] In ion implantation equipment, a Faraday cup is usually used to measure the ion beam. Specifically, the Faraday cup uses Faraday's law to measure the current to infer the number of ions. To put it simply, a large number of Faraday cups are used in the ion implantation machine to measure the current by using Faraday's law to infer the number of ions in the ion beam. During the process, the current in the Faraday cup is transferred to the external circuit through a connector. By measuring this current, the incident intensity of the ion beam can be determined, thereby determining the specific injection dose of the ion implantation equipment during ion implantation. However, as described in the background technology, the existing dose calibration system for whether the Faraday cup measurement is accurate relies on external calibration equipment or regular manual inspections, which is prone to low calibration efficiency.

[0022] In view of this, the present application provides a calibration system, method and electronic device for an ion implanter dose measurement system. In the first aspect, the present application provides a calibration system for an ion implanter dose measurement system. The calibration system is essentially a data system combining software and hardware, which can be set in the ion implanter, and can also be set as an external calibration system for the ion implanter through a designated data interface.

[0023] Among them, in some possible embodiments, it can be as follows Figure 1 As shown, the calibration system of the ion implanter dose measurement system specifically includes the following parts: a custom multi-channel constant current source, an automatic switching circuit, a high-precision measurement module, and a data processing and control module, wherein the custom multi-channel constant current source is connected to the automatic switching circuit, which is also connected to the Faraday cup. The automatic switching circuit is connected to the high-precision measurement module, and the high-precision measurement module is connected to the data processing and control module.

[0024] In the embodiment of the present application, the custom multi-channel constant current source includes multiple channels of constant current sources with different current strengths. In the embodiment of the present application, the number of channels of the constant current source can be flexibly set according to the actual process requirements, and the present application does not strictly limit it. As a preferred implementation, it can be as follows Figure 2 As shown, the multiple constant current sources with different current strengths can be specifically 4 constant current sources, which can be specifically as follows Figure 3As shown, the 4-way constant current source is subdivided into 200μA, 800μA, 1mA, and 5mA to achieve dose calibration for Faraday cups of different ranges. In the embodiment of the present application, the Faraday cup is any Faraday cup in the ion implanter, that is, the calibration system provided in the embodiment of the present application is calibrated for a single Faraday cup. In actual application, each Faraday cup can be connected to a calibration system provided in the embodiment of the present application, and then calibrated for each Faraday cup respectively.

[0025] In an embodiment of the present application, the switching result of the automatic switch switching circuit determines the signal type input to the high-precision measurement module and the specific measurement accuracy gear. In an embodiment of the present application, the automatic switch switching circuit can be composed of a plurality of switch units, wherein, as a preferred embodiment, each switch unit can be a single-pole double-throw switch, that is, a single single-pole double-throw switch has a total of three terminals, and the three terminals are subdivided into two input terminals and one output terminal. Among them, as a preferred embodiment, the switch unit used to control the type of constant current source specifically connected to the high-precision measurement module is determined as a constant current source switching switch unit. In other words, the constant current source switching switch unit is used to control the constant current source specifically connected to the high-precision measurement module.

[0026] Based on this, in some possible embodiments, the automatic switch switching circuit includes: multiple constant current source switching switch units, and the constant current source switching switch units are used to respond to the input constant current source switching instructions and determine the target constant current source from the multiple constant current sources with different current intensities.

[0027] As an implementation method, the multiple constant current source switching switch units may be intelligent switches that can perform an opening or closing action in response to an input control signal. The control signal may be a constant current source switching instruction input by a host computer. For example, a user may input a constant current source switching instruction in a display interface of the host computer, so that the calibration system provided in the present application performs a calibration of the dose measurement system according to the constant current source switching instruction input by the user.

[0028] As another implementation, the constant current source switching instruction may also be set by a preset calibration program. For example, the user may write a calibration program in the system in advance, and when certain conditions are met, such as when a calibration cycle is reached, a constant current source switching instruction is triggered to generate a constant current source switching instruction, so that the calibration system provided in the present application performs a calibration of the dose measurement system according to the constant current source switching instruction.

[0029] As an implementation method, the constant current source switching instruction can not only be used to calibrate the dose measurement system, but as another implementation method, the constant current source switching instruction can also be used to calibrate the accuracy of the constant current source. Specifically, when the output current of the Faraday cup is not connected to the high-precision measurement module, but the output result of the constant current source is input to the high-precision measurement module, the constant current source can be calibrated using the subsequently connected data processing and control module.

[0030] Specifically, the types of the constant current source switching switch unit include: a first constant current source switching switch unit and a second constant current source switching switch unit; the high-precision measurement module is used to determine the target measurement accuracy gear according to the closing status of the first constant current source switching switch unit and the second constant current source switching switch unit; wherein the measurement accuracy gear depends on the current intensity of the target constant current source connected after the first constant current source switching switch unit and the second constant current source switching switch unit are closed. Based on this, in an embodiment of the present application, the high-precision measurement module can determine the final target accuracy measurement accuracy gear according to the target constant current source. In an embodiment of the present application, the first constant current source switching switch unit is a switch unit directly connected to multiple constant current sources, and the second constant current source switching switch unit is a switch unit indirectly connected to multiple constant current sources with the help of the first constant current source switching switch unit.

[0031] As an implementation method, multiple constant current source switching units can be as follows Figure 3 As shown, it includes: a constant current source switching unit K1, a constant current source switching unit K2, and a constant current source switching unit K3. In the embodiment of the present application, Figure 3 The types of the constant current source switch units in the circuit can all be single-pole double-throw intelligent switches, that is, K1~K3 are all single-pole double-throw switches, which can switch the contacts according to the signals input to the switches, wherein the input ends of K1 and K2 are respectively connected to constant current sources of different paths, for example, Figure 3 As shown, the two input ends of K1 are connected to the constant current sources of 200μA and 800μA respectively, and the input end of K2 is connected to the constant current sources of 1mA and 5mA respectively. The output ends of K1 and K2 are connected to the two input ends of K3 respectively, and the output end of K3 is connected to K4. K1 determines whether the current intensity of the constant current source connected to the subsequent circuit is 200μA or 800μA, and K2 determines whether the current intensity of the constant current source connected to the subsequent circuit is 1mA or 5mA.

[0032] Then the output end of the K1 and K2 switches is connected to the input end of K3, and K3 can select the final target constant current source from the constant current source output by K1 or K2 according to the constant current source switching instruction passed in. To put it simply, the three switches K1, K2 and K3 cooperate with each other to select a target constant current source from the four constant current sources. In this way, the self-test gear selection signal is determined by K1 and K2, and the high and low gear selection signals are determined by K1, K2 and K3.

[0033] As an implementation method, a constant current source with a unit of μA can correspond to a high-precision gear, and a constant current source with a unit of mA can correspond to a low-precision gear. That is, when K1 and K3 are closed and K2 is disconnected, the state corresponding to the input of K3 to the high-precision measurement module is determined as the high-precision gear, and when K2 and K3 are closed and K1 is disconnected, the state corresponding to the input of K3 to the high-precision measurement module is determined as the low-precision gear.

[0034] As another implementation, different precision levels can be determined according to the four current intensities corresponding to the four constant current sources: the highest precision level 200μA, the higher precision level 800μA, the normal precision level 1mA, and the lowest precision level 5mA. Different precision levels determine the subsequent sampling frequency of the Faraday cup output signal or the constant current source output signal during analog-to-digital conversion. The precision level is positively correlated with the sampling frequency, that is, the higher the precision level, the higher the corresponding sampling frequency during analog-to-digital conversion.

[0035] In some possible embodiments, the automatic switch switching circuit further includes: a self-test test switching switch unit, which can be similar to the previous constant current source switching switch unit, and the self-test test switching switch unit is also an intelligent switch that can execute closing and opening in response to an input control signal. Based on this, the self-test test switching switch unit is used to control the target signal type connected to the high-precision measurement module and the data processing and control system in response to the input self-test or test switching instruction; the target signal type is the output current of the Faraday cup, or the output result of the target constant current source.

[0036] In the embodiment of the present application, the self-test switching switch unit is specifically used to switch between two states of the circuit: self-test state and test state. The self-test state refers to the automatic inspection state of the target constant current source connected to the high-precision measurement module and the data processing and control module, and the test state refers to the calibration test state of the Faraday cup connected to the high-precision measurement module and the data processing and control module to calibrate the Faraday cup test results.

[0037] Specific examples include Figure 3As shown, the self-test switching switch unit includes: a self-test switching switch unit K4 and a self-test switching switch unit K5, wherein K4 and K5 are both single-pole double-throw intelligent switches, and the specific closed contacts are also determined based on the input control signal, one contact of K5 is connected to an input contact of K4, and the other input contact of K4 is connected to the output contact of K3. In this way, when K4 is closed and connected to K3, it means that the constant current source is connected to the subsequent high-precision measurement module, data processing and control module, and the Faraday cup cannot be connected to the subsequent high-precision measurement module, data processing and control module, and the state at this time is the self-test state. When K4 is closed and connected to K5, and K5 closes the contact between the Faraday cup and K4, the Faraday cup is connected to the subsequent high-precision measurement module, data processing and control module, and the constant current source cannot be connected to the amplifier in the subsequent high-precision measurement module, and the state at this time is the test state.

[0038] In the embodiment of the present application, the automatic switch circuit determines whether the data type that is subsequently connected to the high-precision measurement module and the data processing and control module for data conversion processing is a constant current source or the output current of the Faraday cup. In the embodiment of the present application, the high-precision measurement module includes an amplifier and a filter, which are used to amplify and filter the output current of the input Faraday cup or the output result of the constant current source to remove noise interference in the signal. Among them, the first input end of the amplifier is connected to the output end of the automatic switch circuit, the second input end of the amplifier is grounded, and the output end of the amplifier is connected to the input end of the filter.

[0039] In the embodiment of the present application, the high-precision measurement module also includes a precision switching switch unit. Figure 3 The precision switching switch unit K6 is included. The precision switching switch unit, like the switch units K1 to K5 above, is an intelligent switch that can control specific closed contacts based on the input control signal, especially according to the high / low gear selection signal in the automatic switch circuit. The output end of the amplifier is also connected to the first contact of the precision switching switch unit K6, and the second contact and the third contact of the precision switching switch unit K6 are respectively connected to the resistors R1 and R2 of different resistance values ​​and then connected to the first input end of the amplifier.

[0040] In this way, the output current of the input Faraday cup or the output result of the constant current source can be amplified and filtered with corresponding precision by means of the high-precision measurement module at different gears after the closure of K6, and the noise interference in the signal can be removed to obtain analog signals of different precisions. The output end of the filter is connected to the digital conversion unit in the data processing and control module, and the digital conversion unit performs analog-to-digital conversion on the output result Ain of the filter to obtain the corresponding digital signal Dout.

[0041] In the embodiments of the present application, Figure 2As shown, the data processing and control module is mainly composed of a digital conversion unit, a first data processing unit, a second data processing unit, and an Ethercat network sub-board. Specifically, as an implementation, the digital conversion unit is an analog-to-digital conversion function module, which is used to convert the input analog signal into a digital signal. The digital conversion unit can be 24AD, that is, a 24-bit analog-to-digital converter. As another possible implementation, the digital conversion unit also includes a current I / voltage V conversion function module, so as to realize the conversion of the current collected by the Faraday cup or the current of the constant current source into a voltage, so as to perform linear data processing according to the voltage signal.

[0042] In an embodiment of the present application, the first data processing unit is used to perform initial data processing on the digital signal to ensure that the converted digital signal can be quickly and accurately processed and stored in a preset order, and the second data processing unit is used to calibrate the signal processed by the FPGA according to a set preset calibration procedure.

[0043] In the embodiment of the present application, the input of the first processing unit is connected to the output of the digital conversion unit, the output of the first processing unit is connected to the input of the second processing unit, and the output of the second processing unit is connected to the input of the Ethercat network daughter board. Figure 3 As shown, the first data processing unit is a programmable logic device FPGA. The second data processing unit can be a microprocessor unit MCU.

[0044] In an embodiment of the present application, the preset calibration program is a pre-developed data processing algorithm, and is pre-stored in the second data processing unit. After receiving the signal transmitted from the FPGA, the second data processing unit performs data processing on the signal based on the pre-stored data processing algorithm. Among them, the pre-developed data processing algorithm may include: data filtering, curve fitting, error compensation and other data processing logic. In some possible embodiments, the preset calibration program is pre-determined by the data processing and control module in the following manner: Receiving a target constant current source corresponding to a target measurement accuracy gear, and converting a current value of the target constant current source into a reference digital signal; A calibration fitting curve is generated based on the least squares fitting according to the reference digital signal, and the preset calibration program is generated based on the calibration fitting curve.

[0045] In the embodiment of the present application, the constant current source corresponding to different current intensities can correspond to the output current of the Faraday cup of different ranges, so that the ion implanter dose measurement system provided in the embodiment of the present application can cope with the calibration of the output results of the Faraday cup of different ranges. As an implementation method, the constant current source specifically refers to a device or module that can continuously provide a stable current output. In the embodiment of the present application, the data processing and control module can be used to pre-receive the target constant current source of different current intensities, and the current value of the target constant current source can be converted into a reference digital signal, which is a calibration benchmark, and then a calibration fitting curve is generated based on the least squares fitting method. The calibration fitting curve can be directly used to calibrate the output current of the Faraday cup. Then, a preset processing algorithm is developed based on the calibration fitting curve to obtain the preset calibration program.

[0046] Based on this, in some embodiments, the calibrating the digital signal to be calibrated according to a preset calibration procedure includes: The digital signal to be calibrated is input into the preset calibration program, a deviation is calculated according to the calibration fitting curve, and error compensation is performed on the digital signal to be calibrated based on the deviation to obtain the calibrated digital signal.

[0047] Specifically, by inputting the digital signal to be calibrated corresponding to the Faraday cup into the preset calibration program, the preset calibration program can automatically calculate the deviation between the digital signal to be calibrated and the digital signal corresponding to the precise current signal based on the input digital signal to be calibrated and the calibration fitting curve, and then use the deviation to perform error compensation, or adjust the parameters of the amplifier, filter and digital conversion unit according to the deviation to calibrate the digital signal to be calibrated into a digital signal with higher accuracy, and output it, so that the ion implantation equipment can perform the ion implantation process based on the calibrated digital signal.

[0048] In some possible embodiments, the calibration system further includes: a host computer, the host computer includes a user interaction interface, the data processing and control module is connected to the host computer, and the data processing and control module is further used to output the digital signal to be calibrated and the calibrated digital signal to the host computer; The host computer is used to send a constant current source switching instruction to the automatic switch switching circuit, and display the digital signal to be calibrated and the calibrated digital signal on the user interaction interface.

[0049] In an embodiment of the present application, the host computer is a computer system that can issue control commands, and can be connected to the data processing and control module through an Ethercat network daughter board. The data processing and control module outputs the digital signal to be calibrated and the calibrated digital signal to the host computer according to the output result requirements set by the user, or the host computer sends a constant current source switching instruction and a gear switching instruction to the automatic switch switching circuit to adjust the accuracy of the entire calibration system, and facilitate users to view the real-time status of the self-test status and test status, and can provide clear charts and report output functions for users to conduct further analysis and decision-making.

[0050] In a second aspect, the present application provides a calibration method for ion implanter dose measurement, which is applied to any electronic device having a calibration function for an ion implanter dose measurement system, including but not limited to a personal mobile terminal, a computer or a server. As a preferred embodiment, the calibration method can be applied to the ion implanter dose measurement system described in the first aspect, such as Figure 4 As shown, the method comprises the following steps: S41, determining a target measurement accuracy gear according to a switching result of an automatic switch switching circuit in a calibration system; S42, converting the output current of the Faraday cup into a digital signal to be calibrated corresponding to the target measurement accuracy level, and calibrating the digital signal to be calibrated according to a preset calibration procedure.

[0051] The specific description of the above steps S41 and S42 can be referred to the description of the calibration system in the first aspect, which will not be repeated here.

[0052] The names of the messages or information exchanged between multiple devices in the embodiments of the present application are only used for illustrative purposes and are not used to limit the scope of these messages or information.

[0053] In a third aspect, the exemplary embodiments of the present application further provide an electronic device, comprising: at least one processor; and a memory connected to the at least one processor in communication. The memory stores a computer program that can be executed by the at least one processor, and the computer program is used to enable the electronic device to perform a method according to an embodiment of the present application when executed by the at least one processor.

[0054] The exemplary embodiment of the present application further provides a non-transitory computer-readable storage medium storing a computer program, wherein the computer program, when executed by a processor of a computer, is used to cause the computer to perform a method according to an embodiment of the present application.

[0055] The exemplary embodiments of the present application further provide a computer program product, including a computer program, wherein when the computer program is executed by a processor of a computer, it is used to enable the computer to execute the method according to the embodiment of the present application.

[0056] refer to Figure 5 , the structural block diagram of the electronic device 500 that can be used as the server or client of the present application will now be described, which is an example of hardware devices that can be applied to various aspects of the present application. The electronic device is intended to represent various forms of digital electronic computer equipment, such as laptop computers, desktop computers, workbenches, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processing, cellular phones, smart phones, wearable devices and other similar computing devices. The components shown herein, their connections and relationships, and their functions are only examples, and are not intended to limit the implementation of the present application described and / or required herein.

[0057] like Figure 5 As shown, the electronic device 500 includes a computing unit 501, which can perform various appropriate actions and processes according to a computer program stored in a read-only memory ROM 502 or a computer program loaded from a storage unit 508 into a random access memory RAM 503. In the RAM 503, various programs and data required for the operation of the electronic device 500 can also be stored. The computing unit 501, the ROM 502 and the RAM 503 are connected to each other via a bus 504. An input / output I / O interface 505 is also connected to the bus 504.

[0058] A plurality of components in the electronic device 500 are connected to the I / O interface 505, including: an input unit 506, an output unit 507, a storage unit 508, and a communication unit 509. The input unit 506 may be any type of device capable of inputting information to the electronic device 500, and the input unit 506 may receive input digital or character information, and generate key signal inputs related to user settings and / or function control of the electronic device. The output unit 507 may be any type of device capable of presenting information, and may include, but is not limited to, a display, a speaker, a video / audio output terminal, a vibrator, and / or a printer. The storage unit 508 may include, but is not limited to, a disk, an optical disk. The communication unit 509 allows the electronic device 500 to exchange information / data with other devices through a computer network such as the Internet and / or various telecommunication networks, and may include, but is not limited to, a modem, a network card, an infrared communication device, a wireless communication transceiver, and / or a chipset, such as a Bluetooth™ device, a WiFi device, a WiMax device, a cellular communication device, and / or the like.

[0059] The computing unit 501 may be a variety of general and / or special processing components with processing and computing capabilities. Some examples of the computing unit 501 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various dedicated artificial intelligence (AI) computing chips, various computing units running machine learning model algorithms, digital signal processors (DSPs), and any appropriate processors, controllers, microcontrollers, etc. The computing unit 501 performs the various methods and processes described above. For example, in some embodiments, the calibration method of the aforementioned ion implanter dose measurement system may be implemented as a computer software program, which is tangibly contained in a machine-readable medium, such as a storage unit 508. In some embodiments, part or all of the computer program may be loaded and / or installed on the electronic device 500 via the ROM 502 and / or the communication unit 509. In some embodiments, the computing unit 501 may be configured to perform the calibration method of the aforementioned ion implanter dose measurement system by any other appropriate means (e.g., by means of firmware).

[0060] The program code for implementing the method of the present application can be written in any combination of one or more programming languages. These program codes can be provided to a processor or controller of a general-purpose computer, a special-purpose computer, or other programmable data processing device, so that the program code, when executed by the processor or controller, implements the functions / operations specified in the flow chart and / or block diagram. The program code can be executed entirely on the machine, partially on the machine, partially on the machine and partially on a remote machine as a stand-alone software package, or entirely on a remote machine or server.

[0061] In the context of the present application, a machine-readable medium may be a tangible medium that may contain or store a program for use by or in conjunction with an instruction execution system, device, or equipment. A machine-readable medium may be a machine-readable signal medium or a machine-readable storage medium. A machine-readable medium may include, but is not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, device, or device, or any suitable combination of the foregoing. A more specific example of a machine-readable storage medium may include an electrical connection based on one or more lines, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.

[0062] As used herein, the terms "machine-readable medium" and "computer-readable medium" refer to any computer program product, apparatus, and / or device (e.g., disk, optical disk, memory, programmable logic device (PLD)) for providing machine instructions and / or data to a programmable processor, including a machine-readable medium that receives machine instructions as a machine-readable signal. The term "machine-readable signal" refers to any signal for providing machine instructions and / or data to a programmable processor.

[0063] To provide interaction with a user, the systems and techniques described herein can be implemented on a computer having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and pointing device (e.g., a mouse or trackball) through which the user can provide input to the computer. Other types of devices can also be used to provide interaction with the user; for example, the feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including acoustic input, voice input, or tactile input).

[0064] The systems and techniques described herein may be implemented in a computing system that includes back-end components (e.g., as a data server), or a computing system that includes middleware components (e.g., an application server), or a computing system that includes front-end components (e.g., a user computer with a graphical user interface or a web browser through which a user can interact with implementations of the systems and techniques described herein), or a computing system that includes any combination of such back-end components, middleware components, or front-end components. The components of the system may be interconnected by any form or medium of digital data communication (e.g., a communication network). Examples of communication networks include: a local area network (LAN), a wide area network (WAN), and the Internet.

[0065] A computer system may include clients and servers. Clients and servers are generally remote from each other and usually interact through a communication network. The relationship of client and server is generated by computer programs running on respective computers and having a client-server relationship to each other.

Claims

1. A calibration system for an ion implanter dose measurement system, characterized in that: The system includes: a custom multi-channel constant current source, an automatic switch switching circuit, a high-precision measurement module, and a data processing and control module, wherein the custom multi-channel constant current source includes multiple channels of constant current sources with different current intensities; The high-precision measurement module is used to determine the target measurement accuracy gear according to the switching result of the automatic switch switching circuit; The data processing and control module is used to convert the output current of the Faraday cup into a digital signal to be calibrated corresponding to the target measurement accuracy gear, and calibrate the digital signal to be calibrated according to a preset calibration program.

2. The calibration system according to claim 1, characterized in that The automatic switch switching circuit includes a plurality of constant current source switching units, and the constant current source switching units are used to determine a target constant current source from the plurality of constant current sources with different current intensities in response to an input constant current source switching instruction.

3. The calibration system according to claim 2, characterized in that The automatic switch switching circuit also includes: a self-test test switching switch unit, which is used to control the target signal type connected to the high-precision measurement module and the data processing and control system in response to the input self-test or test switching instruction; the target signal type is the output current of the Faraday cup or the output result of the target constant current source.

4. The calibration system according to claim 2, characterized in that: The types of the constant current source switching unit include: a first constant current source switching unit and a second constant current source switching unit; The high-precision measurement module is used to determine the target measurement accuracy level according to the closing status of the first constant current source switching switch unit and the second constant current source switching switch unit; wherein the measurement accuracy level depends on the current intensity of the target constant current source connected after the first constant current source switching switch unit and the second constant current source switching switch unit are closed.

5. The calibration system according to claim 1, characterized in that: The preset calibration procedure is determined in advance by the data processing and control module in the following manner: Receiving a target constant current source corresponding to a target measurement accuracy gear, and converting a current value of the target constant current source into a reference digital signal; A calibration fitting curve is generated based on the least squares fitting according to the reference digital signal, and the preset calibration program is generated based on the calibration fitting curve.

6. The calibration system according to claim 5, characterized in that The step of calibrating the digital signal to be calibrated according to a preset calibration procedure includes: The digital signal to be calibrated is input into the preset calibration program, a deviation is calculated according to the calibration fitting curve, and error compensation is performed on the digital signal to be calibrated based on the deviation to obtain the calibrated digital signal.

7. The calibration system according to claim 1, characterized in that: The calibration system further comprises: a host computer, the host computer comprises a user interaction interface, the data processing and control module is connected to the host computer, and the data processing and control module is further used to output the digital signal to be calibrated and the calibrated digital signal to the host computer; The host computer is used to send a constant current source switching instruction to the automatic switch switching circuit, and display the digital signal to be calibrated and the calibrated digital signal on the user interaction interface.

8. A calibration method for an ion implanter dose measurement system, characterized in that: The method is applied to a calibration system of an ion implanter dose measurement system as claimed in any one of claims 1 to 7, and the method comprises: Determining a target measurement accuracy gear according to a switching result of an automatic switch switching circuit in the calibration system; The output current of the Faraday cup is converted into a digital signal to be calibrated corresponding to the target measurement accuracy gear, and the digital signal to be calibrated is calibrated according to a preset calibration procedure.

9. An electronic device, characterized in that: The electronic device comprises: A processor and a memory for storing programs, The program includes instructions, which, when executed by the processor, cause the processor to perform the method according to claim 8.

10. A non-transitory computer-readable storage medium storing computer instructions, characterized in that: The computer instructions are used to make a computer execute the method according to claim 8.

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