Silicon carbide diode etching and cleaning device

Abstract

The invention relates to the technical field of diode cleaning, and discloses a silicon carbide diode etching cleaning device, which comprises a cleaning box, a liquid storage mechanism, a top surface flushing plate and a diode, second reciprocating lead screws at the output end are driven by a servo motor to rotate, and driving gears and driven gears of the two second reciprocating lead screws and an inner gear ring are in matched transmission, so that the two second reciprocating lead screws can synchronously rotate, the objective table and a diode positioned at the top can horizontally reciprocate in the cleaning box, and meanwhile, the cleaning efficiency is improved. The outer gear ring drives four sets of second synchronous gears, the four sets of second synchronous gears drive first bevel gears connected with the four sets of second synchronous gears, so that the first bevel gears drive second bevel gears, a connecting plate connected with the second bevel gears and a swing arm form a connecting rod structure, and a second sliding table can be pushed to reciprocate in a guide groove. In this way, the upper portion and the lower portion of the diode located on the hollowed-out objective table can be repeatedly washed through the four sets of side face washing plates.

Description

Technical Field

[0001] The invention relates to the technical field of diode cleaning, and in particular to a silicon carbide diode etching and cleaning device. Background Art

[0002] Silicon carbide diode is a semiconductor device made of silicon carbide material. It has many unique properties and wide applications. During the production process of silicon carbide diode, the chip needs to be etched and the etching solution needs to be cleaned after etching.

[0003] For example, the Chinese patent authorization announcement number is CN114664709B, "discloses an etching and cleaning device related to the production of silicon carbide diodes, which can quickly clean and dry the etched silicon carbide diode chips to improve production efficiency; it includes: a cleaning box, a liquid replacement valve is provided on the cleaning box, a plurality of groups of brush rollers are rotatably installed in a circular array inside the cleaning box, a driving device for driving the plurality of groups of brush rollers to rotate is provided on the cleaning box, a plurality of groups of water absorption rollers are rotatably installed at the opening of the cleaning box, and a bracket is provided above the opening of the cleaning box; a lifting mechanism is provided on the bracket, and a fixing tool and an air drying device are installed on the lifting mechanism"; In the above-mentioned comparative document, a fixed tool is used to fix and install the diode chip after etching, and a lifting mechanism is used to drive the fixed tool and the air-drying device to move synchronously relative to each other. The air-drying device is used to air-dry the diode chip after cleaning.

[0004] However, when the above-mentioned silicon carbide diode etching and cleaning device is in use, the diode is fixed on a positioning mechanism in a cleaning box, and the outside of the diode is flushed with cleaning liquid from top to bottom. The contact area between the cleaning liquid and the outside of the diode is limited. After flushing from top to bottom, etching impurities adhere to the bottom of the diode, and the flushing is not sufficient. In addition, it is extremely inconvenient to operate when taking and placing batches of diodes in the cleaning box. Summary of the invention

[0005] The purpose of the present invention is to provide a silicon carbide diode etching and cleaning device, which can fully flush the outside of the diode, achieve better flushing effect of etching impurities on the outside of the diode, and is fast and convenient for taking and placing batches of diodes from the cleaning box.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a silicon carbide diode etching and cleaning device, comprising a cleaning box, a liquid storage mechanism, a top surface flushing plate, and a diode, wherein a waterproof cover is integrally formed on the outside of the cleaning box, and guide grooves are provided at equal intervals on the circumference of the outside of the cleaning box; A synchronization mechanism is installed at one end of the cleaning box, and the synchronization mechanism includes a rotating sleeve rotatably installed at the end of the cleaning box, and an outer gear ring and an inner gear ring are integrally formed on the outer side and the inner side of the rotating sleeve respectively; A transmission mechanism is arranged at equal intervals on the outside of the cleaning box at a circumference near one side of the synchronization mechanism, a loading platform is detachably mounted on the inner wall of the cleaning box near one end of the synchronization mechanism, a plurality of groups of diodes are mounted on the loading platforms, side flushing plates are arranged at equal intervals on the inner circumference of the cleaning box, a top flushing plate is mounted on the top of the inner wall of the cleaning box, brushing mechanisms are symmetrically arranged on both sides of the inner wall of the cleaning box near the loading platform, and reciprocating mechanisms are symmetrically mounted on both sides of the inner wall of the cleaning box, the side flushing plates are used to flush the sides of the diodes, the top flushing plates are used to flush the tops of the diodes, the brushing mechanisms are used to flush impurities on the surfaces of the diodes, and the reciprocating mechanisms are used to reciprocate the diodes placed inside the cleaning box; The transmission mechanism is used to synchronously drive multiple groups of side flushing plates, and the transmission mechanism includes a first angle seat and a second angle seat respectively fixedly mounted on the outer circumference of the cleaning box, a second synchronous gear is rotatably mounted on one side of the first angle seat through a rotating shaft, a first bevel gear is fixedly sleeved on the rotating shaft on one side of the second synchronous gear, and a second bevel gear is rotatably mounted on the top of the inner wall of the second angle seat through a rotating shaft; A second slide is fixedly mounted on the top of the side flushing plate, a swing arm is hinged to the top of the second slide via a hinge seat, a connecting plate is hinged to one end of the swing arm away from the second slide, and one end of the connecting plate away from the swing arm is hinged to the corresponding second bevel gear top rotating shaft; The cleaning mechanism comprises a circular long shaft rotatably mounted at both ends of the inner wall of the waterproof cover, a brush roller is fixedly sleeved in the middle of the circular long shaft, and a transmission belt is arranged at one end of the circular long shaft close to the synchronization mechanism; The reciprocating mechanism includes a guide plate fixedly mounted on the inner wall of the cleaning box, a second reciprocating screw is arranged in the inner wall of the guide plate, a driving gear is fixedly sleeved on one end of the second reciprocating screw close to the synchronization mechanism, a passive gear is rotatably mounted on one end of the guide plate close to the synchronization mechanism, the passive gear is meshed with the outer edge of the active gear on the same side, and a servo motor is fixedly mounted on one end of the cleaning box close to the synchronization mechanism.

[0007] Preferably, the liquid storage mechanism includes a liquid storage tank and a pump body, the liquid storage tank is communicated with the pump body, a main connecting pipe is connected to the output end of the pump body, a corrugated conduit is installed between the main connecting pipe and the side flushing plate and the top flushing plate respectively, a drain pipe is connected through the bottom of the inner cavity of the cleaning box, and the drain pipe extends to the bottom of the waterproof cover, a drain valve is installed at the outer end of the drain pipe, and slope plates are integrally formed on both sides of the inner wall of the cleaning box.

[0008] Preferably, a fixed plate is fixedly installed on the top of the cleaning box, and a first slide is fixedly installed on the top of the top flushing plate. The first slide slides in the slide groove on the top of the fixed plate. A first reciprocating screw is rotatably installed in the internal slide groove of the fixed plate. The first slide and the first reciprocating screw are connected by threaded fitting.

[0009] Preferably, a first synchronous gear is fixedly sleeved on one end of the first reciprocating screw rod close to the synchronous mechanism, and the outer edge of the first synchronous gear is meshed with the outer edge of the outer gear ring.

[0010] Preferably, outer edges of multiple groups of the second synchronous gears are respectively meshed with outer edges of the outer gear ring, and outer edges of the first bevel gears are meshed with corresponding outer edges of the second bevel gears.

[0011] Preferably, the second slide slides in the corresponding inner wall of the guide groove, and the end of the connecting plate away from the swing arm is hinged on the corresponding top rotating shaft of the second bevel gear.

[0012] Preferably, two ends of the two groups of the second reciprocating screw rods are rotatably mounted on the inner wall of the waterproof cover respectively, and the output end of the servo motor is fixedly connected to the end of the second reciprocating screw rod on the same straight line.

[0013] Preferably, the outer edges of the two groups of passive gears are respectively meshed with the outer edges of the inner gear rings, the circular long axis and the second reciprocating screw located on the same side close to one end of the synchronization mechanism are respectively fixed with tensioning wheels, and the external fixed sleeves of the two groups of tensioning wheels are provided with transmission belts.

[0014] Preferably, a slide plate is sliding inside the guide plate, and the slide plate is connected to the second reciprocating screw rod on the same side by threaded cooperation, convex plates are integrally formed on both sides of the loading platform, slots are respectively penetrated on both sides of the top of the loading platform, and conical stoppers are fixedly installed at equal intervals on the bottom of the loading platform, and two adjacent groups of conical stoppers are respectively located on both sides of the corresponding slots, and the convex plates on both sides of the loading platform slide in the U-shaped grooves on one side of the slide plate respectively, and a positioning pin is inserted on the top of the slide plate, and the positioning pin is used to resist and position the convex plate.

[0015] Preferably, the loading platform is an isosceles trapezoidal structure, the diode is inserted into the corresponding inner wall of the slot, and the bottom of the diode is clamped between two groups of corresponding conical blocks.

[0016] Compared with the prior art, the present invention has the following beneficial effects: The present invention drives the second reciprocating screw at the output end to rotate through a servo motor, and the two groups of second reciprocating screw driving gears and passive gears and the inner gear ring cooperate with each other for transmission, so that the two groups of second reciprocating screws can rotate synchronously, so that the loading platform and the diode positioned on the top can reciprocate horizontally in the cleaning box. At the same time, the outer gear ring drives four groups of second synchronous gears, and the four groups of second synchronous gears drive the connected first bevel gears, so that the first bevel gear drives the second bevel gear, and the connecting plate connected to the second bevel gear and the swing arm form a connecting rod structure, which can push the second slide to reciprocate in the guide groove, so that the four groups of side flushing plates can repeatedly flush the upper and lower parts of the diode positioned on the hollow loading platform.

[0017] In the present invention, while the rotating sleeve rotates, the outer gear ring synchronously drives the first synchronous gear, so that the first reciprocating screw can synchronously drive the first slide, so that the top surface flushing plate can synchronously reciprocate in the top slide groove of the fixed plate, so as to perform transverse flushing on the top of the diode, increase the contact surface of the diode flushing liquid on the stage, and achieve better flushing effect on the external etching impurities of batches of diodes.

[0018] When the two sets of driving gears rotate synchronously in the present invention, the circular long axis in the cleaning mechanism can be synchronously driven by the transmission belt, so that the brush roller rotates synchronously inside the cleaning box, and the bristles on the brush roller can clean the diode end lead frame that reciprocates.

[0019] In the present invention, multiple groups of diodes are inserted into corresponding slots on the top of the stage. The hollow stage can position the diodes and divide them into upper and lower protruding parts. The conical stopper made of rubber material at the bottom of the stage can position the multiple groups of diodes at equal intervals, avoiding overlapping placement and incomplete rinsing of impurities when cleaning batches of diodes.

[0020] In the present invention, after multiple groups of diodes are inserted between the conical blocks, the diodes can be taken and placed more conveniently, and the protrusions on both sides of the loading platform are slidably installed on the slide plate and are inserted and positioned by the positioning pins, so that the loading platform and the multiple groups of diodes on the top can be taken and placed from the cleaning box more conveniently. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention; Figure 2 This is a schematic diagram of the cleaning box structure of the present invention; Figure 3 This is a schematic diagram of the internal structure of the cleaning box in the present invention; Figure 4 It is a schematic diagram of the structure of the stage in the present invention; Figure 5 It is a schematic diagram of the fracture structure of the cleaning mechanism in the present invention; Figure 6It is a schematic diagram of the side cross-section structure of the stage in the present invention; Figure 7 for Figure 2 A schematic diagram of the partially enlarged structure at center A; Figure 8 for Figure 3 A schematic diagram of the partially enlarged structure at B in the middle; Fig. 9 for Figure 4 A schematic diagram of the partially enlarged structure at C in the middle; Fig.10 for Figure 6 Schematic diagram of the local enlarged structure at point D in the middle.

[0022] In the figure: 1, cleaning box; 2, liquid storage mechanism; 3, synchronization mechanism; 4, transmission mechanism; 5, loading platform; 6, side flushing plate; 7, top flushing plate; 8, cleaning mechanism; 9, reciprocating mechanism; 10, diode; 11, waterproof cover; 12, drain valve; 120, ramp plate; 13, fixed plate; 130, first slide; 131, first reciprocating screw rod; 132, first synchronization gear; 14, guide groove; 21, main connecting pipe; 22, corrugated conduit; 31, rotating sleeve; 32, outer gear ring; 33 , inner gear ring; 41, first angle seat; 42, second synchronous gear; 43, first bevel gear; 44, second angle seat; 45, second bevel gear; 51, convex plate; 52, slot; 53, conical stopper; 61, second slide; 62, swing arm; 63, connecting plate; 81, brush roller; 82, circular long shaft; 83, transmission belt; 91, guide plate; 92, second reciprocating screw; 920, slide plate; 921, positioning pin; 93, driving gear; 94, passive gear; 95, servo motor. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. The described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Embodiment 1:

[0024] This embodiment introduces a silicon carbide diode etching and cleaning device. Figure 1-Figure 10 As shown, a silicon carbide diode etching cleaning device includes a cleaning box 1, a liquid storage mechanism 2, a top surface flushing plate 7, and a diode 10. A waterproof cover 11 is integrally formed on the outside of the cleaning box 1, and guide grooves 14 are evenly spaced on the outer circumference of the cleaning box 1; A synchronization mechanism 3 is installed at one end of the cleaning box 1. The synchronization mechanism 3 includes a rotating sleeve 31 rotatably installed at the end of the cleaning box 1. The outer side and the inner side of the rotating sleeve 31 are respectively integrally formed with an outer gear ring 32 and an inner gear ring 33. Transmission mechanisms 4 are arranged at equal intervals on the circumference of one side of the outside of the cleaning box 1 near the synchronization mechanism 3, a loading platform 5 is detachably installed on one end of the inner wall of the cleaning box 1 near the synchronization mechanism 3, and multiple groups of diodes 10 are respectively installed on the loading platform 5, and side flushing plates 6 are installed at equal intervals on the inner circumference of the cleaning box 1, and a top flushing plate 7 is installed on the top of the inner wall of the cleaning box 1. Brushing mechanisms 8 are symmetrically arranged on both sides of the inner wall of the cleaning box 1 near the loading platform 5, and reciprocating mechanisms 9 are symmetrically installed on both sides of the inner wall of the cleaning box 1. The side flushing plate 6 is used to flush the sides of the diodes 10, the top flushing plate 7 is used to flush the top of the diodes 10, the brushing mechanism 8 is used to brush impurities on the surface of the diodes 10, and the reciprocating mechanism 9 is used to reciprocate the diodes 10 placed inside the cleaning box 1; The transmission mechanism 4 is used to synchronously drive multiple groups of side flushing plates 6. The transmission mechanism 4 includes a first angle seat 41 and a second angle seat 44 respectively fixedly mounted on the outer circumference of the cleaning box 1. A second synchronous gear 42 is rotatably mounted on one side of the first angle seat 41 through a rotating shaft. A first bevel gear 43 is fixedly sleeved on the rotating shaft on one side of the second synchronous gear 42. A second bevel gear 45 is rotatably mounted on the top of the inner wall of the second angle seat 44 through a rotating shaft. A second slide 61 is fixedly mounted on the top of the side flushing plate 6. A swing arm 62 is hinged to the top of the second slide 61 through a hinge seat. A connecting plate 63 is hinged to one end of the swing arm 62 away from the second slide 61. One end of the connecting plate 63 away from the swing arm 62 is hinged to the corresponding top rotating shaft of the second bevel gear 45. The reciprocating mechanism 9 includes a guide plate 91 fixedly mounted on the inner wall of the cleaning box 1, a second reciprocating screw 92 is arranged in the inner wall of the guide plate 91, a driving gear 93 is fixedly sleeved on the end of the second reciprocating screw 92 close to the synchronization mechanism 3, a passive gear 94 is rotatably mounted on the end of the guide plate 91 close to the synchronization mechanism 3, the passive gear 94 is meshed with the outer edge of the active gear 93 on the same side, and a servo motor 95 is fixedly mounted on the end of the cleaning box 1 close to the synchronization mechanism 3.

[0025] In this embodiment, the cleaning liquid in the liquid storage tank of the liquid storage mechanism 2 is pumped out through the pump body, and through the main connecting pipe 21 and the corrugated conduit 22, the cleaning liquid can be pumped into the four groups of side flushing plates 6 and the top flushing plate 7 respectively, and the flushing plate flushes the surface of the diode 10 passing through the cleaning liquid through the dense spray holes on the surface; In this embodiment, the diode 10 can be positioned in the slot 52 on the inclined surface of the stage 5. After the stage 5 is installed on the reciprocating mechanism 9, the servo motor 95 drives the second reciprocating screw 92 at the output end to rotate. The end of the second reciprocating screw 92 transmits the external meshing passive gear 94 through the active gear 93, the passive gear 94 transmits the internal gear ring 33, and the internal gear ring 33 transmits another set of passive gears 94 and the active gear 93, so that the two sets of second reciprocating screws 92 can rotate synchronously, so that the stage 5 and the diode positioned on the top can reciprocate horizontally in the cleaning box 1. When the inner gear ring 33 rotates, the rotating sleeve 31 rotates at the end of the cleaning box 1, so that the outer gear ring 32 drives four sets of second synchronous gears 42, and the four sets of second synchronous gears 42 drive the connected first bevel gears 43, so that the first bevel gear 43 drives the second bevel gear 45, and the connecting plate 63 connected to the second bevel gear 45 forms a connecting rod structure with the swing arm 62, which can push the second slide 61 to reciprocate in the guide groove 14, so that the four sets of side flushing plates 6 can repeatedly flush the upper and lower parts of the diode 10 positioned on the hollow stage 5; In this embodiment, while the rotating sleeve 31 rotates, the outer gear ring 32 synchronously drives the first synchronous gear 132, so that the first reciprocating screw rod 131 can synchronously drive the first slide 130, so that the top surface flushing plate 7 can synchronously reciprocate in the top slide groove of the fixed plate 13, increasing the contact surface of the flushing liquid with the diode 10 on the stage 5, and achieving a better flushing effect on the external etching impurities of the batch of diodes 10; Among them, the liquid storage mechanism 2 includes a liquid storage tank and a pump body, the liquid storage tank is connected to the pump body, the output end of the pump body is connected to a main connecting pipe 21, and a corrugated conduit 22 is installed between the main connecting pipe 21 and the side flushing plate 6 and the top flushing plate 7 respectively. A drain pipe is connected through the bottom of the inner cavity of the cleaning box 1, and the drain pipe extends to the bottom of the waterproof cover 11. A drain valve 12 is installed at the outer end of the drain pipe. Slope plates 120 are integrally formed on both sides of the inner wall of the cleaning box 1. The cleaning liquid in the liquid storage tank in the liquid storage mechanism 2 is pumped out through the pump body, and the cleaning liquid can be pumped into four groups of side flushing plates 6 and top flushing plates 7 respectively through the main connecting pipe 21 and the corrugated conduit 22. The flushing waste liquid in the cleaning box 1 can be blocked by the symmetrical slope plates 120 below, and can be discharged centrally through the drain valve 12 below.

[0026] Among them, a fixed plate 13 is fixedly installed on the top of the cleaning box 1, and a first slide 130 is fixedly installed on the top of the top flushing plate 7. The first slide 130 slides in the sliding groove at the top of the fixed plate 13, and a first reciprocating screw rod 131 is rotatably installed in the internal sliding groove of the fixed plate 13. The first slide 130 and the first reciprocating screw rod 131 are connected by threaded cooperation. A first synchronous gear 132 is fixedly sleeved on one end of the first reciprocating screw rod 131 close to the synchronous mechanism 3. The outer edge of the first synchronous gear 132 is meshed with the outer edge of the outer gear ring 32. The second reciprocating screw rod 92 at the output end is driven to rotate by the servo motor 95. The two groups of second reciprocating screw rods 92 cooperate with the active gear 93, the passive gear 94, the outer gear ring 32, and the inner gear ring 33. The rotating sleeve 31 rotates, and the first reciprocating screw rod 131 can synchronously drive the first slide 130, so that the top flushing plate 7 can synchronously reciprocate in the sliding groove at the top of the fixed plate 13, so that a large range of mobile flushing can be performed above the diode 10.

[0027] Among them, the outer edges of multiple groups of second synchronous gears 42 are respectively meshed with the outer edges of the outer gear ring 32, the outer edges of the first bevel gear 43 are meshed with the outer edges of the corresponding second bevel gear 45, the second slide 61 slides in the inner wall of the corresponding guide groove 14, the connecting plate 63 is hinged on the top rotating shaft of the corresponding second bevel gear 45 away from the swing arm 62, and the rotating sleeve 31 rotates at the end of the cleaning box 1, so that the outer gear ring 32 drives four groups of second synchronous gears 42, and the four groups of second synchronous gears 42 drive the connected first bevel gears 43, so that the first bevel gear 43 drives the second bevel gear 45, and the connecting plate 63 connected to the second bevel gear 45 and the swing arm 62 form a connecting rod structure, which can push the second slide 61 to reciprocate in the guide groove 14, so that the four groups of side flushing plates 6 can repeatedly flush the upper and lower parts of the diode 10 positioned on the hollow loading platform 5. Embodiment 2:

[0028] Based on Example 1, this example introduces a silicon carbide diode etching and cleaning device, such as Figure 3-Figure 5 As shown, the cleaning mechanism 8 includes a circular long shaft 82 rotatably mounted on both ends of the inner wall of the waterproof cover 11, a brush roller 81 is fixedly sleeved in the middle of the circular long shaft 82, and a transmission belt 83 is arranged at one end of the circular long shaft 82 close to the synchronization mechanism 3; In this embodiment, when the two sets of driving gears 93 rotate synchronously, the circular long shaft 82 in the cleaning mechanism 8 can be synchronously driven by the transmission belt 83, so that the brush roller 81 rotates synchronously inside the cleaning box 1, and the bristles on the brush roller 81 can clean the reciprocating lead frame at the end of the diode 10; Among them, the two ends of the two groups of second reciprocating screw rods 92 are respectively rotatably installed on the inner wall of the waterproof cover 11, the output end of the servo motor 95 is fixedly connected to the end of the second reciprocating screw rod 92 on the same straight line, the outer edges of the two groups of passive gears 94 are respectively meshed with the outer edges of the inner gear ring 33, and the circular long axis 82 located on the same side and the end of the second reciprocating screw rod 92 close to the synchronization mechanism 3 are respectively fixedly sleeved with tensioning wheels, and the external fixed sleeves of the two groups of tensioning wheels are provided with transmission belts 83. When the two groups of active gears 93 rotate synchronously, the circular long axis 82 in the cleaning mechanism 8 can be synchronously driven through the transmission belt 83, so that the brush roller 81 rotates synchronously inside the cleaning box 1, and the bristles on the brush roller 81 can clean the reciprocating end lead frame of the diode 10. Embodiment 3:

[0029] Based on Example 2, this example introduces a silicon carbide diode etching and cleaning device, such as Figure 5 , 6 As shown in FIG. 10 , in this embodiment, multiple groups of diodes 10 are inserted into corresponding slots 52 at the top of the stage 5. The hollow stage 5 can position the diodes 10 and divide them into upper and lower protruding parts. The conical stopper 53 made of rubber material at the bottom of the stage 5 can position the multiple groups of diodes 10 at equal intervals, so as to avoid overlapping placement of batches of diodes 10 during cleaning, and prevent impurities from being rinsed incompletely. In this embodiment, after the batches of diodes 10 are inserted between the conical stoppers 53, it is more convenient to take and put the diodes 10, and the convex plates 51 on both sides of the stage 5 are slidably mounted on the slide plate 920 and are inserted and positioned by the positioning pins 921, so that the stage 5 and the multiple groups of diodes 10 on the top can be taken and put from the cleaning box 1 more conveniently; Among them, a slide plate 920 is slidably arranged inside the guide plate 91, and the slide plate 920 is connected to the second reciprocating screw rod 92 on the same side by threaded cooperation. A convex plate 51 is integrally formed on both sides of the stage 5, and slots 52 are respectively provided on both sides of the top of the stage 5. Conical stoppers 53 are fixedly installed at equal intervals on the bottom of the stage 5, and two adjacent groups of conical stoppers 53 are respectively located on both sides of the corresponding slots 52. The convex plates 51 on both sides of the stage 5 slide in the U-shaped grooves on one side of the slide plate 920, and a positioning pin 921 is inserted on the top of the slide plate 920. The positioning pin 921 is used to contact and position the convex plate 51. The stage 5 is an isosceles trapezoidal structure, and the diode 10 is inserted into the inner wall of the corresponding slot 52, and the bottom of the diode 10 is clamped on the two The plurality of diodes 10 are inserted into the corresponding slots 52 on the top of the stage 5, and the hollow stage 5 can divide the diodes 10 into upper and lower protruding parts after positioning. The conical stops 53 made of rubber at the bottom of the stage 5 can position the plurality of diodes 10 at equal intervals to avoid overlapping and incomplete rinsing of impurities when cleaning batches of diodes 10. At the same time, after the batches of diodes 10 are inserted between the conical stops 53, it is more convenient to take and put the diodes 10. The convex plates 51 on both sides of the stage 5 are slidably installed on the slide plate 920 and are inserted and positioned by the positioning pins 921. In this way, the stage 5 and the plurality of diodes 10 on the top can be taken and put from the cleaning box 1 more conveniently.

[0030] Working principle: When in use, first insert the corresponding diode 10 into the corresponding slot 52 on the stage 5, and the diode 10 is inserted between the conical stoppers 53 and is positioned at equal intervals. Then, the convex plates 51 on both sides of the stage 5 can be slidably installed on the slide plate 920 and inserted and positioned by the positioning pins 921, so that the stage 5 and the multiple groups of diodes 10 on the top can be taken out of the cleaning box 1 more conveniently; Then, the pump body and the servo motor 95 in the liquid storage mechanism 2 are turned on in sequence, so that the cleaning liquid in the liquid storage tank in the liquid storage mechanism 2 is pumped into the flushing plate through the pump body; Finally, the servo motor 95 drives the second reciprocating screw rod 92 at the output end to rotate, and the end of the second reciprocating screw rod 92 transmits the external meshing passive gear 94 through the active gear 93, the passive gear 94 transmits the inner gear ring 33, and the inner gear ring 33 transmits another set of passive gears 94 and the active gear 93, so that the two sets of second reciprocating screw rods 92 can rotate synchronously, so that the stage 5 and the diode 10 positioned on the top can reciprocate horizontally in the cleaning box 1, and while the inner gear ring 33 rotates, the rotating sleeve 31 rotates in the cleaning box 1 end rotates, so that the outer gear ring 32 drives four sets of second synchronous gears 42, and the four sets of second synchronous gears 42 drive the connected first bevel gears 43, so that the first bevel gear 43 drives the second bevel gear 45, and the connecting plate 63 connected to the second bevel gear 45 and the swing arm 62 form a connecting rod structure, which can push the second slide 61 to reciprocate in the guide groove 14, so that the four sets of side washing plates 6 can repeatedly wash the upper and lower parts of the diode 10 positioned on the hollow stage 5; While the rotating sleeve 31 rotates, the outer gear ring 32 synchronously drives the first synchronous gear 132, so that the first reciprocating screw rod 131 can synchronously drive the first slide 130, so that the top surface flushing plate 7 can synchronously reciprocate in the top slide groove of the fixed plate 13, thereby increasing the contact surface of the flushing liquid with the diode 10 on the loading platform 5. When the two sets of active gears 93 rotate synchronously, the circular long axis 82 in the cleaning mechanism 8 can be synchronously driven by the transmission belt 83, so that the brush roller 81 rotates synchronously inside the cleaning box 1, and the bristles on the brush roller 81 can clean the reciprocating end lead frame of the diode 10, thereby achieving a better flushing effect on the external etched impurities of the batch of diodes 10.

[0031] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes and modifications may be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A silicon carbide diode etching and cleaning device, comprising a cleaning box (1), a liquid storage mechanism (2), a top surface flushing plate (7), and a diode (10), characterized in that: The cleaning box (1) is integrally formed with a waterproof cover (11) on the outside, and guide grooves (14) are provided at equal intervals on the circumference of the outside of the cleaning box (1); A synchronization mechanism (3) is installed at one end of the cleaning box (1), and the synchronization mechanism (3) comprises a rotating sleeve (31) rotatably installed at the end of the cleaning box (1), and an outer toothed ring (32) and an inner toothed ring (33) are integrally formed on the outer side and the inner side of the rotating sleeve (31); The outside of the cleaning box (1) is provided with a transmission mechanism (4) at equal intervals on the circumference of one side near the synchronization mechanism (3); the inner wall of the cleaning box (1) is provided with a detachable loading platform (5) at one end near the synchronization mechanism (3); a plurality of groups of diodes (10) are respectively mounted on the loading platform (5); side flushing plates (6) are installed at equal intervals on the inner circumference of the cleaning box (1); a top flushing plate (7) is installed on the top of the inner wall of the cleaning box (1); cleaning mechanisms (8) are symmetrically provided on both sides of the inner wall of the cleaning box (1) near the loading platform (5); reciprocating mechanisms (9) are symmetrically installed on both sides of the inner wall of the cleaning box (1); the side flushing plates (6) are used to flush the sides of the diodes (10); the top flushing plates (7) are used to flush the tops of the diodes (10); the cleaning mechanisms (8) are used to flush impurities on the surfaces of the diodes (10); and the reciprocating mechanisms (9) are used to reciprocate the diodes (10) placed inside the cleaning box (1); The transmission mechanism (4) is used to synchronously drive the plurality of side flushing plates (6), and the transmission mechanism (4) comprises a first angle seat (41) and a second angle seat (44) respectively fixedly mounted on the outer circumference of the cleaning box (1); a second synchronous gear (42) is rotatably mounted on one side of the first angle seat (41) via a rotating shaft; a first bevel gear (43) is fixedly sleeved on the rotating shaft on one side of the second synchronous gear (42); and a second bevel gear (45) is rotatably mounted on the top of the inner wall of the second angle seat (44) via a rotating shaft; A second slide (61) is fixedly mounted on the top of the side flushing plate (6); a swing arm (62) is hingedly connected to the top of the second slide (61) via a hinge seat; an end of the swing arm (62) away from the second slide (61) is hingedly connected to a connecting plate (63); an end of the connecting plate (63) away from the swing arm (62) is hingedly connected to a corresponding rotating shaft at the top of the second bevel gear (45); The cleaning mechanism (8) comprises a circular long shaft (82) rotatably mounted on both ends of the inner wall of the waterproof cover (11), a brush roller (81) is fixedly sleeved in the middle of the circular long shaft (82), and a transmission belt (83) is arranged at one end of the circular long shaft (82) close to the synchronization mechanism (3); The reciprocating mechanism (9) comprises a guide plate (91) fixedly mounted on the inner wall of the cleaning box (1); a second reciprocating screw (92) is arranged in the inner wall of the guide plate (91); a driving gear (93) is fixedly sleeved on one end of the second reciprocating screw (92) close to the synchronizing mechanism (3); a driven gear (94) is rotatably mounted on one end of the guide plate (91) close to the synchronizing mechanism (3); the driven gear (94) is meshed with the outer edge of the driving gear (93) on the same side; and a servo motor (95) is fixedly mounted on one end of the cleaning box (1) close to the synchronizing mechanism (3).

2. The silicon carbide diode etching and cleaning device according to claim 1, characterized in that: The liquid storage mechanism (2) comprises a liquid storage tank and a pump body, the liquid storage tank and the pump body are in communication, the pump body output end is connected to a main connecting pipe (21), a corrugated conduit (22) is installed between the main connecting pipe (21) and the side flushing plate (6) and the top flushing plate (7), respectively, a drain pipe is connected through the bottom of the inner cavity of the cleaning box (1), and the drain pipe extends to the bottom of the waterproof cover (11), a drain valve (12) is installed at the outer end of the drain pipe, and ramp plates (120) are integrally formed on both sides of the inner wall of the cleaning box (1).

3. The silicon carbide diode etching and cleaning device according to claim 2, characterized in that: A fixed plate (13) is fixedly installed on the top of the cleaning box (1), and a first slide (130) is fixedly installed on the top of the top flushing plate (7). The first slide (130) slides in the top slide groove of the fixed plate (13), and a first reciprocating screw (131) is rotatably installed in the internal slide groove of the fixed plate (13). The first slide (130) and the first reciprocating screw (131) are connected by threaded fitting.

4. The silicon carbide diode etching and cleaning device according to claim 3, characterized in that: A first synchronous gear (132) is fixedly sleeved on one end of the first reciprocating screw rod (131) close to the synchronous mechanism (3), and an outer edge of the first synchronous gear (132) is meshed with an outer edge of the outer gear ring (32).

5. The silicon carbide diode etching and cleaning device according to claim 4, characterized in that: The outer edges of the plurality of sets of the second synchronous gears (42) are respectively meshed with the outer edges of the outer gear ring (32), and the outer edges of the first bevel gears (43) are meshed with the outer edges of the corresponding second bevel gears (45).

6. The silicon carbide diode etching and cleaning device according to claim 5, characterized in that: The second slide (61) slides in the inner wall of the corresponding guide groove (14), and one end of the connecting plate (63) away from the swing arm (62) is hinged on the corresponding top rotating shaft of the second bevel gear (45).

7. The silicon carbide diode etching and cleaning device according to claim 6, characterized in that: The two ends of the two groups of the second reciprocating screw rods (92) are rotatably mounted on the inner wall of the waterproof cover (11), and the output end of the servo motor (95) is fixedly connected to the end of the second reciprocating screw rod (92) on the same straight line.

8. The silicon carbide diode etching and cleaning device according to claim 7, characterized in that: The outer edges of the two sets of passive gears (94) are respectively meshed with the outer edges of the inner gear ring (33); the circular long shaft (82) and the second reciprocating screw rod (92) located on the same side are respectively fixedly sleeved with tensioning wheels at one end close to the synchronization mechanism (3); and the outer fixed sleeves of the two sets of tensioning wheels are provided with transmission belts (83).

9. The silicon carbide diode etching and cleaning device according to claim 8, characterized in that: A slide plate (920) slides inside the guide plate (91), and the slide plate (920) is connected to the second reciprocating screw rod (92) on the same side by threaded engagement. Convex plates (51) are integrally formed on both sides of the loading platform (5), and slots (52) are respectively provided on both sides of the top of the loading platform (5). Conical stoppers (53) are fixedly installed at equal intervals on the bottom of the loading platform (5), and two adjacent groups of conical stoppers (53) are respectively located on both sides of the corresponding slots (52). The convex plates (51) on both sides of the loading platform (5) slide in the U-shaped grooves on one side of the slide plate (920), and a positioning pin (921) is inserted on the top of the slide plate (920). The positioning pin (921) is used to contact and position the convex plate (51).

10. The silicon carbide diode etching and cleaning device according to claim 9, characterized in that: The object carrier (5) is an isosceles trapezoidal structure, the diode (10) is inserted into the inner wall of the corresponding slot (52), and the bottom of the diode (10) is clamped between two sets of corresponding conical stoppers (53).

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