Monocrystalline silicon rod clamping mechanism of zone-melting single crystal furnace

Abstract

The utility model discloses a single crystal silicon rod clamping mechanism of a zone-melting single crystal furnace in the technical field of zone-melting single crystal furnaces, which comprises a fixed base and three groups of positioning rods, mounting parts are arranged at the tops of the three groups of positioning rods, a machine box is mounted at the tops of the mounting parts, a gear is rotatably connected to the inner wall of the machine box, and a movable toothed plate is connected to the outer wall of the bottom end of the gear in a meshed manner; the two ends of the movable toothed plates penetrate through the two ends of the machine box, mounting bases are connected to the bottoms of the movable toothed plates, clamping mechanisms are arranged in the mounting bases and comprise bearing plates, side plates are arranged on the outer walls of the two ends of each bearing plate, rotating shafts are rotationally connected between the two side plates, the rotating shafts are sleeved with rolling columns, and the positions of the rolling columns at the bottoms of the three movable toothed plates are adjustable. Single crystal silicon rods with different sizes in the zone-melting single crystal furnace can be clamped, the use limitation is small, and the application range is wide; and moreover, the clamping mechanism can be quickly disassembled and assembled, the clamping mechanism is convenient to replace, and the production cost is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of zone melting single crystal furnaces, in particular to a single crystal silicon rod clamping mechanism for a zone melting single crystal furnace. Background Art

[0002] A zone melting single crystal furnace is a device used to produce single crystal materials. It uses high temperature to melt solid materials, and then controls the temperature and cooling rate to gradually form high-quality single crystals. Zone melting single crystal furnaces are widely used in semiconductors, optoelectronics and other fields. When using a zone melting single crystal furnace, a clamping mechanism is required to clamp the single crystal silicon rod.

[0003] When the existing single crystal silicon rod clamping mechanism of the zone melting single crystal furnace is in use, the clamping head at the bottom is fixedly installed, and the diameters of the single crystal silicon rods in the zone melting single crystal furnace are inconsistent, resulting in the clamping head being able to only clamp single crystal silicon rods of the same size. There are certain limitations in its use. Therefore, we propose a single crystal silicon rod clamping mechanism for the zone melting single crystal furnace. Utility Model Content

[0004] The utility model aims to provide a single crystal silicon rod clamping mechanism for a zone melting single crystal furnace to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A single crystal silicon rod clamping mechanism for a zone melting single crystal furnace comprises a fixed base and three groups of positioning rods, the tops of the three groups of positioning rods are provided with mounting parts, a machine box is installed on the top of the mounting parts, the inner wall of the machine box is rotatably connected with a gear, and the outer wall of the bottom end of the gear is meshingly connected with a movable tooth plate, the two ends of the movable tooth plate pass through the two ends of the machine box, and the bottom of the movable tooth plate is connected with a mounting seat, a clamping mechanism is arranged in the mounting seat, the clamping mechanism comprises a bearing plate, the outer walls of both ends of the bearing plate are provided with side plates, a rotating shaft is rotatably connected between the two groups of side plates, and a rolling column is sleeved on the rotating shaft.

[0007] Furthermore: a card slot is provided on one side of the mounting seat close to the bearing plate, a card block matching the card slot is connected to the outer wall of the bearing plate, and positioning slots are provided on both side outer walls of the card block.

[0008] Furthermore: a motor is installed at the front end of the outer wall of the machine box, and a rotating rod is provided at the output end of the motor, and the outer wall of the rotating rod is connected to the gear.

[0009] Furthermore: both side outer walls of the mounting seat are provided with fixing boxes, and the two groups of fixing boxes are connected to the card slots, the middle parts of the two groups of fixing boxes are vertically connected with sliding rods, and the bottom of the sliding rods is connected with locking blocks adapted to the positioning slots.

[0010] Further: a sliding plate is provided on the outer wall of the bottom end of the sliding rod, both ends of the sliding plate are slidably connected to the inner wall of the fixed box, and a spring is installed between a side of the sliding plate away from the locking block and the inner wall of the fixed box.

[0011] Furthermore: an anti-skid pad is provided on the outer surface of the locking block, and a corrugated protrusion is embedded in the inner wall of the positioning groove.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The utility model can clamp the single crystal silicon rods in the zone melting single crystal furnace through three groups of rotatably connected rolling columns, the operation of the motor on the outer wall of the machine box drives the gear to rotate, and since the gear is meshed and connected with the movable tooth plate, the position of the rolling columns at the bottom of the three groups of movable tooth plates can be adjusted, and the spacing between the three groups of rolling columns is adjustable, so that the single crystal silicon rods of different sizes in the zone melting single crystal furnace can be clamped, the limitation of use is small, and the application range is wide; through the action of the sliding rods, sliding plates and springs in the two groups of fixed boxes, the locking block at the bottom can be connected or disengaged from the positioning groove in the card block, so that the clamping mechanism can be quickly disassembled and assembled, the clamping mechanism is easy to replace, and the production cost is saved. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural schematic diagram of the utility model;

[0015] Figure 2 It is a schematic diagram of the installation structure of the mounting seat and the clamping mechanism of the utility model;

[0016] Figure 3 It is a schematic diagram of the top view of the mounting seat and the clamping mechanism of the utility model.

[0017] In the figure: 1. fixed base; 2. positioning rod; 3. mounting piece; 4. machine box; 5. gear; 6. movable tooth plate; 7. mounting seat; 8. clamping mechanism; 800. load-bearing plate; 801. clamping block; 802. side plate; 803. rotating shaft; 804. rolling column; 9. clamping slot; 11. fixed box; 12. sliding rod; 13. spring; 14. sliding plate; 15. locking block; 16. positioning slot. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] Embodiment 1:

[0020] See also Figure 1-3 The utility model provides a technical solution: a single crystal silicon rod clamping mechanism of a zone melting single crystal furnace, which can be used to prepare single crystal silicon rods. The zone melting single crystal furnace is an existing device, and the specific use method and working principle are not described here. When the zone melting single crystal furnace prepares single crystal silicon rods, a clamping mechanism is required to clamp the single crystal silicon rods. When the existing single crystal silicon rod clamping mechanism of the zone melting single crystal furnace clamps the single crystal silicon rods, the position of the clamping head is mostly fixed, and its position is not easy to adjust, resulting in the clamping mechanism being unable to clamp single crystal silicon rods of different sizes, and there are certain limitations in its use; including a fixed base 1 and three groups of positioning rods 2, the tops of the three groups of positioning rods 2 are all provided with mounting parts 3, the tops of the mounting parts 3 are provided with machine boxes 4, the inner wall of the machine box 4 is rotatably connected with a gear 5, and the outer wall of the bottom end of the gear 5 is meshedly connected with a movable tooth plate 6, the two ends of the movable tooth plate 6 pass through the two ends of the machine box 4, and the bottom of the movable tooth plate 6 is connected with a mounting seat 7, a clamping mechanism 8 is arranged in the mounting seat 7, the clamping mechanism 8 includes a bearing plate 800, the outer walls of both ends of the bearing plate 800 are provided with side plates 802, a rotating shaft 803 is rotatably connected between the two groups of side plates 802, and a rolling column 804 is sleeved on the rotating shaft 803.

[0021] The three groups of positioning rods 2 are arranged in a circular array on the upper surface of the fixed base 1, and the three groups of positioning rods 2 are arranged in a circular array on the outside of the supporting tube. Through the operation of the three groups of motors on the outer wall of the machine box 4, the gear 5 can be driven to rotate forward or reverse. The bottom ends of the outer walls on both sides of the machine box 4 are provided with openings adapted to the movable tooth plate 6, and the openings are slidably connected with the movable tooth plate 6. The operation of the motor drives the tooth plate 5 to rotate. Since the gear 5 is meshed with the movable tooth plate 6, the movable tooth plate 6 can be moved, that is, the mounting seat 7 and the clamping mechanism 8 at the bottom are driven to adjust the position. Through the rotation of the rotating shaft 803 and the rolling column 804 between the adjacent side plates 802, the rotating rolling column 804 can rotate. The three groups of rolling columns 804 can clamp the single crystal silicon rods in the zone melting single crystal furnace, and can clamp single crystal silicon rods of different sizes in the zone melting single crystal furnace. It has small limitations in use and a wide range of applications.

[0022] Among them, preferably, a card slot 9 is opened on one side of the mounting seat 7 close to the supporting plate 800, and the outer wall of the supporting plate 800 is connected with a card block 801 adapted to the card slot 9, and the outer walls on both sides of the card block 801 are provided with positioning grooves 16; the card block 801 is fixedly connected to the supporting plate 800, and the card block 801 is adapted to be connected to the card slot 9 in the mounting seat 7.

[0023] Preferably, a motor is installed at the front end of the outer wall of the machine box 4, and a rotating rod is provided at the output end of the motor, and the outer wall of the rotating rod is connected to the gear 5; the bottom of the rotating rod is rotatably connected to the inner wall of the machine box 4 through a bearing, and the gear 5 is sleeved on the rotating rod.

[0024] Preferably, fixed boxes 11 are provided on the outer walls of both sides of the mounting seat 7, and the two groups of fixed boxes 11 are connected to the card slot 9, the middle parts of the two groups of fixed boxes 11 are vertically connected with sliding rods 12, and the bottoms of the sliding rods 12 are connected with locking blocks 15 that are compatible with the positioning grooves 16; a through opening is opened on the mounting seat 7, the through opening is connected to the inner cavity of the fixed box 11 and the inner cavity of the card slot 9, and the sliding rod 12 is slidably connected to the fixed box 11.

[0025] Preferably, a sliding plate 14 is provided on the outer wall of the bottom end of the sliding rod 12, and both ends of the sliding plate 14 are slidably connected to the inner wall of the fixed box 11, and a spring 13 is installed between the side of the sliding plate 14 away from the locking block 15 and the inner wall of the fixed box 11; when the position of the rolling column 804 needs to be adjusted, the two sets of sliding rods 12 on the fixed box 11 are pulled outward to move the sliding plate 14 outward. At this time, the spring 13 is in a compressed state, and the locking block 15 is stored in the fixed box 11. At this time, the card block 801 on the carrier plate 800 can be smoothly connected to the card slot 9, and the card The two groups of positioning grooves 16 on block 801 are aligned with the locking block 15, and the two groups of sliding rods 12 are loosened, and the compressed spring 13 can automatically return to its position, which drives the sliding plate 14 to move inward, and the locking block 15 moves and connects with the positioning groove 16 in the card block 801, and the disassembly of the clamping mechanism 8 is completed. During installation, the card block 801 is connected to the card groove 9, and the locking block 15 is connected to the positioning groove 16 in the card block 801, and the installation of the clamping mechanism 8 is completed. The disassembly and assembly method of the clamping mechanism 8 is simple, and it is convenient to replace the rolling column 804.

[0026] Embodiment 2:

[0027] Reference Figure 2 This embodiment is different from the first embodiment in that an anti-skid pad is provided on the outer surface of the locking block 15, and a corrugated protrusion is embedded in the inner wall of the positioning groove 16. The anti-skid pad and the protrusion increase the friction between the two, further improving the stability of the connection between the clamping mechanism 8 and the mounting seat 7.

[0028] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A single crystal silicon rod clamping mechanism for a zone melting single crystal furnace, comprising a fixed base (1) and three sets of positioning rods (2), Features: The tops of the three groups of positioning rods (2) are all provided with mounting parts (3), and a machine box (4) is installed on the top of the mounting parts (3). The inner wall of the machine box (4) is rotatably connected with a gear (5), and the outer wall of the bottom end of the gear (5) is meshingly connected with a movable tooth plate (6), and the two ends of the movable tooth plate (6) pass through the two ends of the machine box (4), and the bottom of the movable tooth plate (6) is connected with a mounting seat (7), and a clamping mechanism (8) is arranged inside the mounting seat (7), and the clamping mechanism (8) includes a bearing plate (800), and the outer walls of both ends of the bearing plate (800) are provided with side plates (802), and a rotating shaft (803) is rotatably connected between the two groups of side plates (802), and a rolling column (804) is sleeved on the rotating shaft (803).

2. The single crystal silicon rod clamping mechanism for a zone melting single crystal furnace according to claim 1, Features: A slot (9) is provided on one side of the mounting seat (7) close to the carrier plate (800); a block (801) adapted to the slot (9) is connected to the outer wall of the carrier plate (800); and positioning slots (16) are provided on both side outer walls of the block (801).

3. The single crystal silicon rod clamping mechanism for a zone melting single crystal furnace according to claim 1, Features: A motor is installed at the front end of the outer wall of the machine box (4), and a rotating rod is provided at the output end of the motor. The outer wall of the rotating rod is connected to the gear (5).

4. The single crystal silicon rod clamping mechanism for a zone melting single crystal furnace according to claim 1, Features: The outer walls on both sides of the mounting seat (7) are provided with fixing boxes (11), and two groups of fixing boxes (11) are connected to the card slot (9).

5. The single crystal silicon rod clamping mechanism for a zone melting single crystal furnace according to claim 4, Features: The middle parts of the two sets of fixed boxes (11) are vertically connected with sliding rods (12), and the bottoms of the sliding rods (12) are connected with locking blocks (15) that are matched with the positioning grooves (16).

6. The single crystal silicon rod clamping mechanism for a zone melting single crystal furnace according to claim 5, Features: A sliding plate (14) is provided on the outer wall of the bottom end of the sliding rod (12), and both ends of the sliding plate (14) are slidably connected to the inner wall of the fixed box (11), and a spring (13) is installed between a side of the sliding plate (14) away from the locking block (15) and the inner wall of the fixed box (11).

7. The single crystal silicon rod clamping mechanism for a zone melting single crystal furnace according to claim 5, Features: The outer surface of the locking block (15) is provided with an anti-slip pad, and the inner wall of the positioning groove (16) is embedded with a corrugated protrusion.

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