Laser repairing light path device and laser repairing equipment

Abstract

The utility model discloses a laser repairing light path device and laser repairing equipment, the laser repairing light path device comprises an attenuation module, an adjusting module and a galvanometer, the attenuation module is used for transmitting a laser beam, and the attenuation module is also used for reducing the energy of the laser beam; the adjusting module is used for receiving the laser beam emitted from the attenuation module, and the adjusting module is further used for adjusting the spot size and the spot shape of the laser beam; and the galvanometer is used for receiving the laser beam emitted from the adjusting module, and the galvanometer is used for adjusting the propagation direction of the laser beam, so that the laser beam is propagated to the display panel. According to the laser repairing light path device, the machining efficiency is considered, and meanwhile, the light spots with the proper shape and size and the proper energy density can be obtained through adjustment.

Description

Technical Field

[0001] The present application relates to the technical field of laser repair of display panels, and in particular to a laser repair optical path device and laser repair equipment. Background Art

[0002] Display panels are the window of human-computer interaction in the information age and are closely related to people's daily lives, such as display panels on ATMs, on-board display panels on cars, display panels on computers and mobile phones, and super-large billboards. CF glass (Color Filter) is a key component of the color display of the display panel. The three primary color pixels are the core part of CF glass, and its size directly affects the size of the display panel and the customer's experience. The miniaturization of pixel units, that is, the size and spacing of pixel units must be reduced to less than 100μm, which means that the display panel needs to have higher luminous brightness, resolution and color saturation. This is the future development trend of products such as LCD (Liquid Crystal Display), OLED (Organic Light Emitting Display) and Micro LED (Micro Light Emitting Diode Display).

[0003] In the production process of LCD, pixel defects such as bright spots, flashing spots or broken spots often occur. To address these pixel defects, a certain film layer of the LCD is usually subjected to a DM process (Direct Method, carbonization process), that is, using the high energy density of the laser beam to carbonize the indium tin oxide layer layer by layer, thereby achieving the purpose of repairing the defects.

[0004] In the related art, due to the unreasonable design of the laser repair optical path device, it is difficult to adjust a light spot with a suitable shape, size and energy density while taking into account the processing efficiency, resulting in poor repair quality. Utility Model Content

[0005] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a laser repair optical path device, which can adjust a light spot with a suitable shape and size and a suitable energy density while taking into account processing efficiency.

[0006] The present application also proposes a laser repair device having the above-mentioned laser repair optical path device.

[0007] According to the first aspect of the present application, a laser repair optical path device includes:

[0008] An attenuation module, used for transmitting the laser beam, and the attenuation module is also used for reducing the energy of the laser beam;

[0009] An adjustment module, used for receiving the laser beam emitted from the attenuation module, and the adjustment module is also used for adjusting the spot size and spot shape of the laser beam;

[0010] The galvanometer is used to receive the laser beam emitted from the adjustment module, and the galvanometer is used to adjust the propagation direction of the laser beam so that the laser beam propagates to the display panel.

[0011] According to the laser repair optical path device of the embodiment of the present application, there are at least the following beneficial effects: by setting an attenuation module, the energy of the laser beam can be attenuated to a suitable energy density, thereby avoiding excessive burning of the repair area; by setting an adjustment module, the spot size and spot shape of the laser beam can be adjusted to a suitable shape and size, so that only the repair area is processed and repaired; by setting a galvanometer, the laser beam can quickly scan the repair area, thereby ensuring the repair efficiency; that is, by setting an attenuation module, an adjustment module and a galvanometer, while taking into account the processing efficiency, a spot with a suitable shape and size and a suitable energy density can be adjusted, which is beneficial to improving the repair quality.

[0012] According to some embodiments of the present application, the attenuation module includes:

[0013] A linear polarizer, used to convert the laser beam from non-polarized light into linear polarized light;

[0014] A quarter wave plate is used to receive the laser beam emitted from the linear polarizer, and the quarter wave plate is used to convert the laser beam from linear polarized light to circular polarized light.

[0015] According to some embodiments of the present application, the attenuation module includes at least one of a beam splitter, an integrating sphere, and a prism pair.

[0016] According to some embodiments of the present application, the adjustment module includes a slit module or a variable aperture.

[0017] According to some embodiments of the present application, a beam expansion module is also included, and the beam expansion module includes:

[0018] A first aperture, used for receiving the laser beam emitted from the attenuation module, and the first aperture is also used for blocking light in an edge area of ​​the laser beam;

[0019] A beam expander, used for receiving the laser beam emitted from the first aperture, and the beam expander is used for expanding the spot size of the laser beam;

[0020] The second aperture is used to receive the laser beam emitted from the beam expander, and the second aperture is also used to block the light in the edge area of ​​the laser beam. The adjustment module is used to receive the laser beam emitted from the second aperture.

[0021] According to some embodiments of the present application, the beam expander includes a Galilean beam expander or a Keplerian beam expander.

[0022] According to some embodiments of the present application, it further includes:

[0023] A reflector module is used to reflect the laser beam emitted by the attenuation module to the first aperture.

[0024] According to some embodiments of the present application, the reflector module includes a total reflector or a half reflector, and the total reflector or the half reflector is used to reflect the laser beam emitted by the attenuation module to the first aperture.

[0025] The laser repair device according to the second aspect of the present application includes:

[0026] The above-mentioned laser repair optical path device;

[0027] The laser is used to emit a laser beam, and the attenuation module is used to receive the laser beam emitted by the laser.

[0028] The laser repair equipment according to the embodiment of the present application has at least the following beneficial effects: by using the above-mentioned laser repair optical path device, while taking into account the processing efficiency, it is possible to adjust a light spot with a suitable shape and size and a suitable energy density, which is beneficial for the laser repair equipment to improve the repair quality.

[0029] According to some embodiments of the present application, it further includes:

[0030] The carrier is used to carry the display panel, and the carrier is used to adjust the spatial position of the display panel.

[0031] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The present application is further described below with reference to the accompanying drawings and embodiments, wherein:

[0033] Figure 1 A schematic diagram of a laser repair optical path device according to an embodiment of the present application;

[0034] Figure 2 for Figure 1 Schematic diagram of the attenuation module of the laser repair optical path device;

[0035] Figure 3 for Figure 1 Schematic diagram of the slit module of the laser repair optical path device;

[0036] Figure 4 for Figure 1 Schematic diagram of the beam expansion module of the laser repair optical path device;

[0037] Figure 5 A schematic diagram of a laser repair device according to an embodiment of the present application.

[0038] Reference numerals: laser 100, laser beam 110;

[0039] Attenuation module 200, linear polarizer 210, quarter wave plate 220;

[0040] Reflector module 300;

[0041] Beam expansion module 400, first aperture 410, beam expander 420, second aperture 430, Galilean beam expander 440, concave lens 441, convex lens 442;

[0042] Adjustment module 500, first light shielding sheet 510, second light shielding sheet 520;

[0043] Galvanometer 600;

[0044] Objective lens module 700;

[0045] Display panel 810 and carrier 820 . DETAILED DESCRIPTION

[0046] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0047] In the description of the present application, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0048] In the description of this application, "several" means one or more than one, "more" means two or more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0049] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0050] In the description of the present application, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0051] Reference Figure 1 According to the laser repair optical path device of the first aspect embodiment of the present application, it includes an attenuation module 200, an adjustment module 500 and a galvanometer 600. The attenuation module 200 is used to transmit the laser beam 110, and the attenuation module 200 is also used to reduce the energy of the laser beam 110. The adjustment module 500 is used to receive the laser beam 110 emitted from the attenuation module 200, and the adjustment module 500 is also used to adjust the spot size and spot shape of the laser beam 110. The galvanometer 600 is used to receive the laser beam 110 emitted from the adjustment module 500, and the galvanometer 600 is used to adjust the propagation direction of the laser beam 110 so that the laser beam 110 propagates to the display panel 810.

[0052] According to the laser repair optical path device of the embodiment of the present application, there are at least the following beneficial effects: by setting the attenuation module 200, the energy of the laser beam 110 can be attenuated to a suitable energy density, thereby avoiding excessive burning of the repair area; by setting the adjustment module 500, the spot size and spot shape of the laser beam 110 can be adjusted to a suitable shape and size, so that only the repair area is processed and repaired; by setting the galvanometer 600, the laser beam 110 can quickly scan the repair area, thereby ensuring the repair efficiency; that is, by setting the attenuation module 200, the adjustment module 500 and the galvanometer 600, while taking into account the processing efficiency, a spot with a suitable shape and size and a suitable energy density can be adjusted, which is beneficial to improving the repair quality.

[0053] It should be noted that the galvanometer 600 generally includes two first reflectors whose rotation axes are perpendicular to each other, and motors for driving the two first reflectors to rotate. The structure of the galvanometer 600 is a conventional structure, which is only briefly described here and will not be described in detail.

[0054] It should be noted that after the galvanometer 600 adjusts the propagation direction of the laser beam 110 , the laser beam 110 usually passes through the objective lens module 700 , and the objective lens module 700 can focus the laser beam 110 , thereby focusing the laser beam 110 on the display panel 810 .

[0055] Reference Figure 2 In some embodiments of the present application, the attenuation module 200 includes a linear polarizer 210 and a quarter wave plate 220. The linear polarizer 210 is used to convert the laser beam 110 from non-polarized light to linear polarized light. The quarter wave plate 220 is used to receive the laser beam 110 emitted from the linear polarizer 210, and the quarter wave plate 220 is used to convert the laser beam 110 from linear polarized light to circular polarized light.

[0056] When the linear polarizer 210 transmits linear polarized light in a certain direction, the polarized light in the orthogonal direction is absorbed or deflected, so only a portion of the laser beam 110 will pass through the linear polarizer 210, thereby achieving the purpose of energy attenuation. After the quarter wave plate 220 converts the laser beam 110 from linear polarized light to circular polarized light, the processing quality of the laser beam 110 in all directions is more consistent.

[0057] In some embodiments of the present application, the attenuation module 200 includes at least one of a beam splitter, an integrating sphere, and a prism pair.

[0058] The beam splitter and the prism pair both split a beam of light into multiple beams of light by reflection and refraction. In actual use, one of the reflected or refracted beams is taken to achieve energy attenuation. The integrating sphere absorbs part of the energy of the laser beam 110 during multiple reflections of the laser beam 110, thereby achieving energy attenuation. The beam splitter, the integrating sphere, and the prism pair all achieve energy attenuation of the laser beam 110 at a low cost, which is conducive to reducing the production cost of the laser repair optical path device.

[0059] In some embodiments of the present application, the adjustment module 500 includes a slit module or a variable aperture.

[0060] The slit module or the variable aperture can adjust the spot size and spot shape of the laser beam 110, which is beneficial to improving the repair quality of defective pixels.

[0061] Specifically, the slit module can adjust the circular light spot into a rectangular light spot, and adjust the length and width of the rectangular light spot. Figure 3The slit module includes two first light shielding sheets 510 and two second light shielding sheets 520. The two first light shielding sheets 510 are arranged in parallel and spaced along the X-axis direction, and the two second light shielding sheets 520 are arranged in parallel and spaced along the Y-axis direction, and the two first light shielding sheets 510 are located on the negative Z-axis side of the two second light shielding sheets 520. The X-axis, the Y-axis and the Z-axis are perpendicular to each other, and the positive direction of the Z-axis is perpendicular to the paper and outward (refer to Figure 3 ).

[0062] The projections of the two first light blocking sheets 510 and the two second light blocking sheets 520 in the Z-axis direction enclose a rectangular slit. When the laser beam 110 passes through the rectangular slit, the light in the edge area where the energy density of the laser beam 110 is relatively low is blocked, and the light in the central area where the energy density of the laser beam 110 is relatively high is used for processing, thereby achieving high-quality processing of defective pixels.

[0063] The distance between the two first light blocks 510 is adjustable (for example, by a linear motor or a lead screw nut, etc.), and the distance between the two second light blocks 520 is adjustable (for example, by a linear motor or a lead screw nut, etc.), thereby adjusting the length and width of the rectangular slit.

[0064] Reference Figure 4 In some embodiments of the present application, the laser repair optical path device further includes a beam expansion module 400, and the beam expansion module 400 includes a first aperture 410, a beam expander 420, and a second aperture 430. The first aperture 410 is used to receive the laser beam 110 emitted from the attenuation module 200, and the first aperture 410 is also used to block the light in the edge area of ​​the laser beam 110. The beam expander 420 is used to receive the laser beam 110 emitted from the first aperture 410, and the beam expander 420 is used to expand the spot size of the laser beam 110. The second aperture 430 is used to receive the laser beam 110 emitted from the beam expander 420, and the second aperture 430 is also used to block the light in the edge area of ​​the laser beam 110, and the adjustment module 500 is used to receive the laser beam 110 emitted from the second aperture 430.

[0065] The beam expander 420 can expand the spot size of the laser beam 110, so as to facilitate the subsequent adjustment module 500 to adjust the spot with a suitable shape and size. The first aperture 410 and the second aperture 430 can both block the light in the edge area of ​​the laser beam 110, thereby facilitating the high-quality light in the central area of ​​the laser beam 110 to participate in the repair of defective pixels, and the quality of the repair of defective pixels is higher.

[0066] Reference Figure 4 In an improved solution of the above embodiment, the beam expander 420 includes a Galilean beam expander 440 .

[0067] The Galilean beam expander 440 includes a concave lens 441 and a convex lens 442. The laser beam 110 passing through the first aperture 410 is first diffused by the concave lens 441 and then becomes a parallel beam by the convex lens 442. The Galilean beam expander 440 can not only expand the beam, but also has no focusing point between the concave lens 441 and the convex lens 442, so there is no problem of wavefront error caused by air ionization at the focusing point.

[0068] Reference Figure 4 In an improved solution of the above embodiment, the beam expander 420 includes a Keplerian beam expander.

[0069] The Kepler beam expander includes two first convex lenses, and the Kepler beam expander can also achieve beam expansion, which is beneficial for the subsequent adjustment module 500 to adjust a light spot with a suitable shape and size.

[0070] Reference Figure 1 In some embodiments of the present application, the laser repair optical path device further includes a reflector module 300 , and the reflector module 300 is used to reflect the laser beam 110 emitted by the attenuation module 200 to the first aperture 410 .

[0071] By providing the reflector module 300, it is helpful to reasonably distribute the spatial positions of the attenuation module 200 and the beam expansion module 400, thereby shortening the length of the laser repair optical path device and further reducing the space occupied by the laser repair optical path device.

[0072] Reference Figure 1 In an improved solution of the above embodiment, the reflector module 300 includes a full reflector or a half reflector, and the full reflector or the half reflector is used to reflect the laser beam 110 emitted by the attenuation module 200 to the first aperture 410 .

[0073] The full reflection mirror or the half reflection mirror can change the propagation direction of the laser beam 110, which is conducive to the reasonable distribution of the spatial positions of the attenuation module 200 and the beam expansion module 400. After being reflected by the full reflection mirror, most of the energy of the laser beam 110 is retained, and after being reflected by the half reflection mirror, part of the energy of the laser beam 110 is retained.

[0074] Reference Figure 5 According to the second embodiment of the present application, the laser repair device comprises the above-mentioned laser repair optical path device and a laser 100. The laser 100 is used to emit a laser beam 110, and the attenuation module 200 is used to receive the laser beam 110 emitted by the laser 100.

[0075] The laser repair equipment according to the embodiment of the present application has at least the following beneficial effects: by using the above-mentioned laser repair optical path device, while taking into account the processing efficiency, it is possible to adjust a light spot with a suitable shape and size and a suitable energy density, which is beneficial for the laser repair equipment to improve the repair quality.

[0076] Reference Figure 5 In an improved solution of the above embodiment, the laser repair equipment further includes a carrier 820 , and the carrier 820 is used to carry the display panel 810 , and the carrier 820 is used to adjust the spatial position of the display panel 810 .

[0077] After the stage 820 adjusts the spatial position of the display panel 810 , it is helpful to adjust the position of the defective pixel of the display panel 810 , thereby facilitating the laser beam 110 to accurately repair the defective pixel of the display panel 810 .

[0078] The embodiments of the present application are described in detail above in conjunction with the accompanying drawings, but the present application is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. Laser repair optical path device, characterized in that: include: An attenuation module, used for transmitting the laser beam, and the attenuation module is also used for reducing the energy of the laser beam; An adjustment module, used for receiving the laser beam emitted from the attenuation module, and the adjustment module is also used for adjusting the spot size and spot shape of the laser beam; The galvanometer is used to receive the laser beam emitted from the adjustment module, and the galvanometer is used to adjust the propagation direction of the laser beam so that the laser beam propagates to the display panel.

2. The laser repair optical path device according to claim 1, characterized in that: The attenuation module comprises: A linear polarizer, used to convert the laser beam from non-polarized light into linear polarized light; A quarter wave plate is used to receive the laser beam emitted from the linear polarizer, and the quarter wave plate is used to convert the laser beam from linear polarized light to circular polarized light.

3. The laser repair optical path device according to claim 1, characterized in that: The attenuation module includes at least one of a beam splitter, an integrating sphere and a prism pair.

4. The laser repair optical path device according to any one of claims 1 to 3, characterized in that: The adjustment module includes a slit module or a variable iris.

5. The laser repair optical path device according to any one of claims 1 to 3, characterized in that: Also included is a beam expansion module, the beam expansion module comprising: A first aperture, used for receiving the laser beam emitted from the attenuation module, and the first aperture is also used for blocking light in an edge area of ​​the laser beam; A beam expander, used for receiving the laser beam emitted from the first aperture, and the beam expander is used for expanding the spot size of the laser beam; The second aperture is used to receive the laser beam emitted from the beam expander, and the second aperture is also used to block the light in the edge area of ​​the laser beam. The adjustment module is used to receive the laser beam emitted from the second aperture.

6. The laser repair optical path device according to claim 5, characterized in that: The beam expander includes a Galilean beam expander or a Keplerian beam expander.

7. The laser repair optical path device according to claim 5, characterized in that: Also includes: A reflector module is used to reflect the laser beam emitted by the attenuation module to the first aperture.

8. The laser repair optical path device according to claim 7, characterized in that: The reflector module includes a total reflector or a half reflector, and the total reflector or the half reflector is used to reflect the laser beam emitted by the attenuation module to the first aperture.

9. Laser repair equipment, characterized in that, include: The laser repair optical path device according to any one of claims 1 to 8; The laser is used to emit a laser beam, and the attenuation module is used to receive the laser beam emitted by the laser.

10. The laser repair equipment according to claim 9, characterized in that: Also includes: The carrier is used to carry the display panel, and the carrier is used to adjust the spatial position of the display panel.

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