Graphite boat and coating equipment

Abstract

The utility model relates to a graphite boat and coating equipment. The graphite boat comprises a boat body and conductive boat feet, the boat body is used for bearing a silicon wafer, and the boat body is provided with an inlet end for the silicon wafer to enter and a bottom end opposite to the inlet end. The conductive boat foot is arranged at the bottom end, a protruding part is arranged on the side, away from the boat body, of the conductive boat foot, the protruding part protrudes out of the conductive boat foot in the direction away from the boat body, and the protruding part is used for being matched with a conductive support of coating equipment in an attached mode and electrically connected with the conductive support. According to the graphite boat and the coating equipment, the problem of poor conductive contact of the graphite boat is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of solar cell production equipment, and in particular to graphite boats and coating equipment. Background Art

[0002] As conventional fossil fuels are increasingly depleted, solar energy is undoubtedly the cleanest, most common and most promising alternative energy source among the existing sustainable energy sources. In the solar cell manufacturing process, the cell needs to go through cleaning, PECVD (Plasma Enhanced Chemical Vapor Deposition) coating, PVD (Physical Vapor Deposition) coating and screen printing.

[0003] In the PECVD coating process, a graphite boat is used as a carrier to carry silicon wafers so as to send the silicon wafers into the coating equipment for coating. During the coating process, it is necessary to ensure good electrical contact between the graphite boat and the coating equipment to ensure the coating quality. In the related art, the conductive method of the graphite boat is generally to place the boat feet of the graphite boat on a horizontal conductive block for contact and conduction. However, this conductive method easily leads to poor conductive contact of the graphite boat, resulting in coating quality problems. Summary of the invention

[0004] Based on this, it is necessary to provide a graphite boat and a coating device to reduce the problem of poor conductive contact of the graphite boat.

[0005] A graphite boat, comprising:

[0006] A boat body, the boat body is used to carry silicon wafers, the boat body has an inlet end for the silicon wafers to enter and a bottom end arranged opposite to the inlet end; and

[0007] A conductive boat foot is arranged at the bottom end, and a protrusion is provided on the side of the conductive boat foot away from the boat body. The protrusion protrudes from the conductive boat foot in a direction away from the boat body, and the protrusion is used to fit with a conductive support of a coating device and be electrically connected to the conductive support.

[0008] The graphite boat is provided with a protrusion on the conductive boat foot, the protrusion protrudes from the conductive boat foot in a direction away from the boat body, and the protrusion can fit with the conductive support of the coating equipment, so that the conductive boat foot and the conductive support form multi-faceted contact, which greatly increases the contact area between the conductive boat foot and the conductive support, and reduces the problem of poor conductive contact in the graphite boat. At the same time, the fit between the protrusion and the conductive support can also effectively position the graphite boat, ensuring that the graphite boat is easier to place in the correct position of the conductive support, thereby ensuring good contact between the conductive boat foot and the conductive support, and further reducing the problem of poor conductive contact in the graphite boat.

[0009] The technical solution is further described below:

[0010] In one of the embodiments, the horizontal cross-sectional area of ​​the protrusion gradually decreases in a direction away from the boat body.

[0011] In one embodiment, the shape of the protrusion is an inverted pyramid; or, the shape of the protrusion is an inverted cone; or, the shape of the protrusion is an inverted cone; or, the shape of the protrusion is an inverted truncated cone.

[0012] In one embodiment, there are multiple conductive boat pins, and the multiple conductive boat pins are distributed at intervals at the bottom.

[0013] In one embodiment, the boat body includes a plurality of first boat sheets, a plurality of second boat sheets and a first insulating rod, the first boat sheets and the second boat sheets are alternately arranged and spaced apart from each other, a slot for accommodating the silicon wafer is formed between the first boat sheets and the second boat sheets; the first insulating rod connects all the first boat sheets and all the second boat sheets, an insulating ring is arranged between adjacent first boat sheets and second boat sheets, and the insulating ring is sleeved on the first insulating rod.

[0014] In one embodiment, the boat body further includes a second insulating rod and a first conductive block, the first conductive block electrically connects all the first boat pieces, the second insulating rod connects all the first boat pieces and passes through the first conductive block; and / or,

[0015] The boat body further includes a third insulating rod and a second conductive block, the second conductive block is electrically connected to all the second boat pieces, and the third insulating rod connects all the second boat pieces and penetrates the second conductive block.

[0016] The present application also provides a coating device, including a furnace body, the furnace body is provided with a coating cavity, the coating cavity is provided with a conductive support for electrically connecting to the above-mentioned graphite boat, the conductive support is provided with a groove for accommodating the protrusion, and the groove wall of the groove is tightly fitted with the protrusion.

[0017] In one of the embodiments, a through hole penetrating the conductive support is formed on the bottom wall of the groove.

[0018] In one embodiment, the depth of the groove is less than or equal to the height of the protrusion protruding from the conductive boat pin.

[0019] The above-mentioned coating equipment is provided with a groove on the conductive support, the groove can accommodate the raised part of the conductive boat foot, and the groove wall of the groove is closely fitted with the raised part to form a conductive contact surface, so that the conductive boat foot and the conductive support form a multi-faceted contact, which greatly increases the contact area between the conductive boat foot and the conductive support, and reduces the problem of poor conductive contact of the graphite boat. At the same time, the groove on the conductive support and the raised part on the conductive boat foot can also effectively position the graphite boat, ensuring that the graphite boat is easier to place in the correct position of the conductive support, thereby ensuring good contact between the conductive boat foot and the conductive support, and further reducing the problem of poor conductive contact of the graphite boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The drawings constituting a part of the present application are used to provide a further understanding of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application.

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0022] In addition, the drawings are not drawn to a 1:1 scale, and the relative sizes of the various elements are drawn only as examples in the drawings and are not necessarily drawn according to the true scale.

[0023] FIG. 1 is a left side view of a graphite boat according to an embodiment.

[0024] FIG. 2 is a top view of the graphite boat shown in FIG. 1 .

[0025] FIG. 3 is a front view of the graphite boat shown in FIG. 1 .

[0026] Description of reference numerals:

[0027] 10. boat body; 101. entrance end; 102. bottom end; 111. first boat piece; 112. second boat piece; 113. slot; 114. first insulating rod; 115. insulating ring; 116. second insulating rod; 117. first conductive block; 118. third insulating rod; 119. second conductive block; 20. conductive boat foot; 21. raised portion; 30. conductive support; 31. groove. DETAILED DESCRIPTION

[0028] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0029] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0030] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0031] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0032] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0033] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0034] As mentioned above, in the related art, the graphite boat is generally conductive by the boat foot, that is, the boat foot of the graphite boat is placed on the horizontal conductive block of the coating equipment to form contact conduction. However, in such a conductive method, only a single-plane contact can be formed between the boat foot of the graphite boat and the horizontal conductive block. During the movement of the graphite boat, if foreign matter such as silicon wafers or small parts on the graphite boat fall on the horizontal conductive block, the contact area between the boat foot of the graphite boat and the horizontal conductive block will be reduced, which is prone to poor contact, resulting in unstable RF power and coating quality problems. In addition, foreign matter falling on the horizontal conductive block will also cause the boat foot of the graphite boat to form a tip discharge, causing arcing, resulting in increased losses on the production line. Furthermore, if there is a deviation in the placement of the graphite boat in the front and back or left and right directions, it will also cause the contact area between the boat foot of the graphite boat and the horizontal conductive block to become smaller, which will lead to poor contact problems.

[0035] Based on this, an embodiment of the present application provides a graphite boat, which is used to carry silicon wafers and is used to be electrically connected to a conductive support 30 of a coating device. Specifically, referring to FIG. 1 , a graphite boat of an embodiment includes a boat body 10 and a conductive boat foot 20, wherein the boat body 10 is used to carry silicon wafers, and the boat body 10 has an inlet end 101 for silicon wafers to enter and a bottom end 102 arranged opposite to the inlet end 101. The conductive boat foot 20 is arranged at the bottom end 102, and a protrusion 21 is provided on the side of the conductive boat foot 20 away from the boat body 10, and the protrusion 21 protrudes from the conductive boat foot 20 in a direction away from the boat body 10, and the protrusion 21 is used to fit and cooperate with the conductive support 30 of the coating device and be electrically connected to the conductive support 30. Specifically, in an embodiment, the conductive support 30 is provided with a groove 31 matching the protrusion 21, and the protrusion 21 is arranged in the groove 31 and is tightly fitted with the groove wall of the groove 31 to form a conductive contact surface.

[0036] The graphite boat is provided with a protrusion 21 on the conductive boat foot 20, the protrusion 21 protrudes from the conductive boat foot 20 in a direction away from the boat body 10, and the protrusion 21 can fit with the conductive support 30 of the coating equipment, so that the conductive boat foot 20 and the conductive support 30 form a multi-faceted contact, which greatly increases the contact area between the conductive boat foot 20 and the conductive support 30, and reduces the problem of poor conductive contact in the graphite boat. At the same time, the fit between the protrusion 21 and the conductive support 30 can also effectively position the graphite boat, ensuring that the graphite boat is easier to place in the correct position of the conductive support 30, thereby ensuring good contact between the conductive boat foot 20 and the conductive support 30, and further reducing the problem of poor conductive contact in the graphite boat.

[0037] Optionally, in one embodiment, the horizontal cross-sectional area of ​​the protrusion 21 gradually decreases in the direction away from the boat body 10, that is, the end of the protrusion 21 close to the boat body 10 is larger, and the end away from the boat body 10 is smaller, so that the protrusion 21 is easier to insert into the groove 31 of the conductive support 30. Even if the placement position of the graphite boat has a small deviation front to back or left to right in some cases, under the action of gravity, the protrusion 21 and the groove 31 can automatically correct the position deviation of the graphite boat, so that the graphite boat is placed in the correct position, further reducing the problem of poor conductive contact in the graphite boat.

[0038] Specifically, in one embodiment, the shape of the protrusion 21 is an inverted pyramid, for example, an inverted triangular pyramid, so that the contact surface of the protrusion 21 and the groove 31 are both inclined surfaces. Even if foreign matter such as a silicon wafer or a small component on the graphite boat falls on the conductive support 30, the foreign matter will not stay on the contact surface between the protrusion 21 and the groove 31, thereby reducing the problem of reduced contact area between the graphite boat foot and the conductive support 30 caused by foreign matter, thereby ensuring the good conductivity of the graphite boat. When the placement position of the graphite boat has a small deviation such as front and back or left and right, the inclined surface can also play a good guiding role for the protrusion 21, thereby automatically correcting the position deviation of the graphite boat, thereby ensuring the good conductivity of the graphite boat. It is worth noting that the shape of the protrusion 21 can also be an inverted quadrangular pyramid, an inverted pentagonal pyramid, etc., which is not limited here.

[0039] Similarly, in another embodiment, the shape of the protrusion 21 is a chamfered pyramid, for example, an inverted triangular pyramid, so that at least part of the contact surface between the protrusion 21 and the groove 31 is also an inclined surface, thereby reducing the problem of poor conductive contact of the graphite boat caused by falling foreign objects or position deviation of the graphite boat, which will not be elaborated here.

[0040] In other embodiments, the shape of the protrusion 21 is an inverted cone, so that the contact surface of the protrusion 21 and the groove 31 are both conical surfaces. Even if foreign objects such as silicon wafers or small parts on the graphite boat fall on the conductive support 30, the foreign objects will not stay on the contact surface of the protrusion 21 and the groove 31, thereby reducing the problem of reduced contact area between the graphite boat foot and the conductive support 30 caused by foreign objects, thereby ensuring good conductivity of the graphite boat. When the placement position of the graphite boat has a small deviation such as front and back or left and right, the conical surface can also play a good guiding role for the protrusion 21, thereby automatically correcting the position deviation of the graphite boat, thereby ensuring good conductivity of the graphite boat.

[0041] Similarly, in another embodiment, the shape of the protrusion 21 is an inverted cone, so that at least part of the contact surface between the protrusion 21 and the groove 31 is also a conical surface, thereby reducing the problem of poor conductive contact of the graphite boat caused by falling foreign objects or position deviation of the graphite boat, which will not be elaborated here.

[0042] Optionally, in one embodiment, the conductive boat foot 20 is detachably connected to the boat body 10, so that when the protrusion 21 is worn or damaged by impact, the conductive boat foot 20 can be replaced at any time without stopping the coating equipment, and the operation is simple and convenient. Further, the conductive boat foot 20 and the protrusion 21 are an integrally formed structure, which is more convenient to process and saves costs. Preferably, the conductive boat foot 20 and the protrusion 21 are both made of graphite.

[0043] In conjunction with FIG. 1 and FIG. 3 , optionally, in one embodiment, the number of the conductive boat pins 20 is multiple, and the multiple conductive boat pins 20 are distributed at intervals at the bottom end 102 of the boat body 10. For example, in this embodiment, the number of the conductive boat pins 20 is four, and the four conductive boat pins 20 are distributed at the four corners of the bottom end 103 of the boat body 10, and the four conductive boat pins 20 are used to abut against the four conductive supports 30 of the coating equipment in a one-to-one correspondence, so as to keep the graphite boat balanced. Further, two of the four conductive boat pins 20 are respectively connected to the positive and negative poles of the power supply through the corresponding conductive supports 30, and the other two may not be connected to electricity.

[0044] Referring to FIG. 1 and FIG. 2 , optionally, in one embodiment, the boat body 10 includes a plurality of first boat pieces 111, a plurality of second boat pieces 112, and a first insulating rod 114. The first boat pieces 111 and the second boat pieces 112 are alternately arranged and spaced from each other, and a slot 113 for accommodating a silicon wafer is formed between the first boat piece 111 and the second boat piece 112. Specifically, in this embodiment, the first boat piece 111 is used to connect the positive electrode of the power supply through the cooperation of the conductive boat foot 20 and the conductive support 30, and the second boat piece 112 is used to connect the negative electrode of the power supply through the cooperation of the conductive boat foot 20 and the conductive support 30, so that a magnetic field can be generated between the slots 113, so that the coating material is deposited on the surface of the silicon wafer in the slot 113, thereby forming a film layer on the surface of the silicon wafer. Preferably, the two outermost boat pieces of the boat body 10 are both the first boat pieces 111, that is, the number of the first boat pieces 111 is one more than the number of the second boat pieces 112.

[0045] Further, the first insulating rod 114 connects all the first boat pieces 111 and all the second boat pieces 112, and an insulating ring 115 is provided between adjacent first boat pieces 111 and second boat pieces 112, and the insulating ring 115 is sleeved on the first insulating rod 114. All the first boat pieces 111 and all the second boat pieces 112 are connected by the first insulating rod 114, and the insulating ring 115 is provided between adjacent first boat pieces 111 and second boat pieces 112, so as to avoid short circuit between the first boat pieces 111 and the second boat pieces 112. Further, the two ends of the first insulating rod 114 respectively pass through the two outermost first boat pieces 111 of the boat body 10, and the two ends of the first insulating rod 114 are respectively connected with first nuts to lock the first boat piece 111 and the second boat piece 112. Preferably, the materials of the first nut, the first insulating rod 114 and the insulating ring 115 are all insulating materials such as ceramics.

[0046] Continuing to refer to FIG. 1 , in one embodiment, the boat body 10 further includes a second insulating rod 116 and a first conductive block 117, and the first conductive block 117 electrically connects all the first boat sheets 111 to achieve electrical conduction between all the first boat sheets 111. Preferably, the material of the first conductive block 117 is a conductive material such as graphite. The second insulating rod 116 connects all the first boat sheets 111 and penetrates the first conductive block 117 to fix all the first boat sheets 111 and the first conductive block 117. Further, the two ends of the second insulating rod 116 respectively pass through the two outermost first boat sheets 111 and the two ends of the second insulating rod 116 are respectively connected to second nuts to lock the first boat sheets 111 and the first conductive block 117. Preferably, the material of the second nut and the material of the second insulating rod 116 are both insulating materials such as ceramics.

[0047] Similarly, in one embodiment, the boat body 10 further includes a third insulating rod 118 and a second conductive block 119, the second conductive block 119 electrically connects all the second boat sheets 112 to achieve electrical conduction between all the second boat sheets 112, and preferably, the material of the second conductive block 119 is a conductive material such as graphite. The third insulating rod 118 connects all the second boat sheets 112 and penetrates the second conductive block 119 to fix all the second boat sheets 112 and the second conductive block 119. Further, the two ends of the third insulating rod 118 respectively penetrate the two outermost second boat sheets 112, and the two ends of the third insulating rod 118 are respectively connected to third nuts to lock the second boat sheets 112 and the second conductive block 119. Preferably, the material of the third nut and the material of the third insulating rod 118 are both insulating materials such as ceramics.

[0048] Furthermore, the present application also provides a coating device for use with the above-mentioned graphite boat. Specifically, the coating device of one embodiment includes a furnace body, the furnace body has a coating cavity for accommodating the graphite boat, a conductive support 30 for electrically connecting to the graphite boat is arranged in the coating cavity, the conductive support 30 is provided with a groove 31 for accommodating the protrusion 21, and the groove wall of the groove 31 is tightly fitted with the protrusion 21 to form a conductive contact surface.

[0049] The above-mentioned coating equipment is provided with a groove 31 on the conductive support 30, and the groove 31 can accommodate the protrusion 21 of the conductive boat foot 20, and the groove wall of the groove 31 is closely fitted with the protrusion 21 to form a conductive contact surface, so that the conductive boat foot 20 and the conductive support 30 form a multi-faceted contact, which greatly increases the contact area between the conductive boat foot 20 and the conductive support 30, and reduces the problem of poor conductive contact of the graphite boat. At the same time, the groove 31 on the conductive support 30 cooperates with the protrusion 21 on the conductive boat foot 20 to effectively position the graphite boat, ensuring that the graphite boat is easier to place in the correct position of the conductive support 30, thereby ensuring good contact between the conductive boat foot 20 and the conductive support 30, and further reducing the problem of poor conductive contact of the graphite boat. In addition, compared with the protrusion structure, the groove 31 structure on the conductive support 30 is less prone to wear or collision damage, thereby ensuring the service life of the conductive support 30, avoiding the need to frequently replace the conductive support 30, and reducing the need to cool the high-temperature furnace body before replacing the conductive support 30, which causes cumbersome operations and affects the equipment utilization rate and output.

[0050] Optionally, in one embodiment, a through hole (not shown) is formed on the bottom wall of the groove 31 and passes through the conductive support 30, so that when foreign matter such as broken silicon wafers fall into the groove 31, they can slide out of the groove 31 through the through hole, thereby preventing the foreign matter from affecting the effective contact area between the conductive boat foot 20 and the conductive support 30.

[0051] Optionally, in one embodiment, the depth of the groove 31 is less than or equal to the height of the protrusion 21 protruding from the conductive boat pin 20. Preferably, the ratio of the depth of the groove 31 to the height of the protrusion 21 protruding from the conductive boat pin 20 is in the range of 0.75 to 1. By configuring the depth of the groove 31 to be less than or equal to the height of the protrusion 21 protruding from the conductive boat pin 20, the protrusion 21 of the conductive boat pin 20 and the groove wall of the groove 31 can still form good contact in the event of wear.

[0052] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0053] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A graphite boat, characterized in that: include: A boat (10), the boat (10) being used to carry silicon wafers, the boat (10) having an inlet end (101) for the silicon wafers to enter and a bottom end (102) disposed opposite to the inlet end (101); and, A conductive boat foot (20), wherein the conductive boat foot (20) is arranged at the bottom end (102), and a protrusion (21) is provided on the side of the conductive boat foot (20) facing away from the boat body (10), wherein the protrusion (21) protrudes from the conductive boat foot (20) in a direction away from the boat body (10), and the protrusion (21) is used to fit with a conductive support (30) of a coating device and be electrically connected to the conductive support (30).

2. The graphite boat according to claim 1, characterized in that: In a direction away from the boat body (10), the horizontal cross-sectional area of ​​the protrusion (21) gradually decreases.

3. The graphite boat according to claim 2, characterized in that: The shape of the protrusion (21) is an inverted pyramid; or, the shape of the protrusion (21) is an inverted truncated cone; or, the shape of the protrusion (21) is an inverted cone; or, the shape of the protrusion (21) is an inverted truncated cone.

4. The graphite boat according to claim 1, characterized in that: The conductive boat foot (20) is detachably connected to the boat body (10); and / or the conductive boat foot (20) and the protruding portion (21) are an integrally formed structure.

5. The graphite boat according to claim 1, characterized in that: There are a plurality of conductive boat pins (20), and the plurality of conductive boat pins (20) are distributed at intervals at the bottom end (102).

6. The graphite boat according to claim 1, characterized in that: The boat body (10) comprises a plurality of first boat sheets (111), a plurality of second boat sheets (112) and a first insulating rod (114); the first boat sheets (111) and the second boat sheets (112) are alternately arranged and spaced from each other; a slot (113) for accommodating the silicon wafer is formed between the first boat sheets (111) and the second boat sheets (112); the first insulating rod (114) connects all the first boat sheets (111) and all the second boat sheets (112); an insulating ring (115) is arranged between adjacent first boat sheets (111) and second boat sheets (112); the insulating ring (115) is sleeved on the first insulating rod (114).

7. The graphite boat according to claim 6, characterized in that: The boat body (10) further comprises a second insulating rod (116) and a first conductive block (117), wherein the first conductive block (117) is electrically connected to all the first boat pieces (111), and the second insulating rod (116) is connected to all the first boat pieces (111) and passes through the first conductive block (117); and / or, The boat body (10) further comprises a third insulating rod (118) and a second conductive block (119), wherein the second conductive block (119) is electrically connected to all the second boat pieces (112), and the third insulating rod (118) is connected to all the second boat pieces (112) and passes through the second conductive block (119).

8. A coating device, characterized in that: The invention comprises a furnace body, wherein the furnace body is provided with a coating cavity, wherein a conductive support (30) for electrically connecting to the graphite boat according to any one of claims 1 to 7 is provided in the coating cavity, wherein the conductive support (30) is provided with a groove (31) for accommodating the protrusion (21), and the groove wall of the groove (31) is tightly fitted with the protrusion (21).

9. The coating device according to claim 8, characterized in that: A through hole penetrating the conductive support (30) is formed on the bottom wall of the groove (31).

10. The coating device according to claim 8, characterized in that: The depth of the groove (31) is less than or equal to the height of the protruding portion (21) protruding from the conductive boat foot (20).

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