Waste gas collecting device for auxiliary furnace of heavy doping single crystal furnace

Abstract

A heavy doping single crystal furnace auxiliary furnace waste gas collecting device relates to the technical field of waste gas collection and comprises a collecting cavity and a transmission pipe communicated with the collecting cavity in a sealing mode, the collecting cavity is used for being in butt joint with a side hung door inlet and outlet of an auxiliary furnace chamber of a single crystal furnace body, and the collecting cavity is fixed to a supporting frame used for aligning the collecting cavity with the side hung door inlet and outlet of the auxiliary furnace chamber. The supporting frame is fixed to the bottom frame, universal wheels used for assisting movement are arranged at the four corners of the bottom face of the bottom frame, and the conveying pipe is used for communicating the collecting cavity with a waste gas treatment system, so that suction force is generated at the collecting cavity to rapidly collect waste gas exhausted along with waste heat in the single crystal furnace body. Under the condition of keeping the cost of preparing the heavily doped single crystal, the efficiency of preparing the heavily doped single crystal is improved by improving the collection efficiency of waste gas in the single crystal furnace main body.

Description

Technical Field

[0001] The utility model relates to the technical field of waste gas collection, in particular to a waste gas collection device for a secondary furnace of a heavily doped single crystal furnace. Background Art

[0002] In the CZ method, the N-type heavily doped single crystal dopants are mainly phosphorus, arsenic and antimony. The solid solubility of antimony in the silicon lattice is much smaller than that of arsenic and phosphorus, so antimony is destined to be unable to make the silicon single crystal have a particularly low resistivity value, so arsenic and phosphorus are needed to reduce the resistivity value of the silicon single crystal. However, arsenic oxide is a highly toxic substance, and excessive phosphorus can cause various hazards to the human body. Therefore, in order to obtain low-resistivity silicon single crystals, certain protection must be carried out when pulling silicon single crystals doped with phosphorus and arsenic.

[0003] In actual workshop production, the main body of the single crystal furnace is divided into an upper furnace chamber and a lower furnace chamber, also called an auxiliary furnace chamber and a main furnace chamber. Usually, due to the large amount of volatiles in the silicon single crystal pulling process, the auxiliary furnace chamber is designed with a flat door structure to better clean the volatiles. The main body of the single crystal furnace adopts a vacuum system to remove arsenic, phosphorus and other impurities, volatiles and oxides in the main body of the single crystal furnace into the exhaust gas treatment system through the vacuum pipe.

[0004] After the harmful impurity waste gas is extracted by the vacuum system, due to the limitation of the negative pressure value that the single crystal furnace main body can bear and the need to clean the single crystal furnace main body, it is necessary to open the swing door to expose the swing door inlet and outlet of the auxiliary furnace chamber to connect with the outside world, and then clean the volatiles in the single crystal furnace main body after the waste heat is reduced to room temperature. However, in this process, the harmful impurity waste gas will continue to evaporate into the air from the swing door inlet and outlet of the auxiliary furnace chamber along with the residual temperature in the main furnace chamber included in the single crystal furnace main body, causing pollution to the working environment. In this process, if the swing door inlet and outlet of the auxiliary furnace chamber are closed again and the waste gas is extracted by the vacuum system, the work efficiency will inevitably be reduced. If the vacuum system is directly opened for extraction, the energy loss will inevitably increase, resulting in an increase in the cost of preparing heavily doped single crystals. In addition, the suction efficiency of the vacuum system is lower than that of the waste gas treatment system, which will inevitably affect the efficiency of preparing heavily doped single crystals. Utility Model Content

[0005] The utility model aims to provide a waste gas collection device for a secondary furnace of a heavily-doped single crystal furnace, so as to improve the efficiency of preparing heavily-doped single crystals by improving the waste gas collection efficiency in the main body of the single crystal furnace while maintaining the cost of preparing heavily-doped single crystals.

[0006] In order to solve the above technical problems, the specific solution adopted by the utility model is: a waste gas collection device for a heavily-doped single crystal furnace auxiliary furnace, comprising a collecting chamber and a transmission pipe sealed and connected to the collecting chamber, the collecting chamber being used to dock with the inlet and outlet of the auxiliary furnace chamber swing door of the single crystal furnace main body, the collecting chamber being fixed on a support frame for aligning the height of the collecting chamber with the inlet and outlet of the auxiliary furnace chamber swing door, the support frame being fixed on a base frame, and universal wheels for assisting movement are provided at the four corners of the bottom surface of the base frame, the transmission pipe being used to connect the collecting chamber with the waste gas treatment system, thereby generating a suction force at the collecting chamber to quickly collect the waste gas discharged with the residual temperature in the single crystal furnace main body.

[0007] As a further optimization of the waste gas collection device of the auxiliary furnace of a heavily doped single crystal furnace of the utility model, the collection chamber is trumpet-shaped, the expanded end of the trumpet-shaped collection chamber is used to connect with the inlet and outlet of the auxiliary furnace chamber swing door, and the closed end of the trumpet-shaped collection chamber is used to be sealed and connected with the transmission pipe.

[0008] As a further optimization of the waste gas collection device of the auxiliary furnace of a heavily-doped single crystal furnace of the utility model, the transmission pipe is composed of a gas collecting pipe and a flexible pipe. One end of the gas collecting pipe is sealed and connected with the collection chamber, and the other end of the gas collecting pipe horizontally passes through the support frame and is sealed and connected with the flexible pipe. The gas collecting pipe is used to cooperate with the support frame to stabilize the collection chamber.

[0009] As a further optimization of the waste gas collection device of the auxiliary furnace of the heavily-doped single crystal furnace of the utility model, the diameter of the gas collecting pipeline is 100-150 mm.

[0010] As a further optimization of the waste gas collection device of the auxiliary furnace of a heavily doped single crystal furnace of the utility model, the gas collecting pipeline and the flexible pipe are butt-jointed and sealed by the butt-joint pipe to achieve rapid disassembly and assembly.

[0011] As a further optimization of the waste gas collection device of the auxiliary furnace of the heavily-doped single crystal furnace of the utility model, a pulling frame is connected to the side of the base frame.

[0012] As a further optimization of the waste gas collection device of the auxiliary furnace of the heavily-doped single crystal furnace of the utility model, the pulling frame is rotatably connected to the connecting pins fixed on the base frame.

[0013] As a further optimization of the waste gas collection device of the auxiliary furnace of a heavily-doped single crystal furnace of the utility model, a discontinuous docking gasket is provided at the docking place between the collection chamber and the inlet and outlet of the swing door of the auxiliary furnace chamber. The docking gasket is used to maintain the connection between the inlet and outlet of the swing door of the auxiliary furnace chamber and the outside world, thereby stabilizing the air pressure in the auxiliary furnace chamber.

[0014] As a further optimization of the waste gas collection device of the auxiliary furnace of a heavily-doped single crystal furnace of the utility model, the universal wheel has a self-locking structure.

[0015] Compared with the prior art, the utility model has the following beneficial effects: the utility model collects harmful impurity gases volatilized from the inlet and outlet of the auxiliary furnace chamber by setting a collection chamber to connect with the inlet and outlet of the auxiliary furnace chamber swing door, and at the same time efficiently collects the exhaust gas in the single crystal furnace by cooperating with the efficient suction force of the exhaust gas treatment system through a transmission pipe that is sealed and connected to the collection chamber. Thus, while maintaining the cost of preparing heavily doped single crystals, the high efficiency of exhaust gas collection is maintained to maintain the high efficiency of preparing heavily doped single crystals. The support frame can position the height of the collection chamber, making it convenient for the staff to quickly connect the collection chamber with the inlet and outlet of the auxiliary furnace chamber swing door, thereby further improving the user's convenience. The support frame is arranged on a base frame with universal wheels, which can be convenient for the staff to pull and move.

[0016] As a further optimization of the utility model, the flexible pipe constituting the transmission pipe can be conveniently stretched for use or shrunk for storage by the staff. A trumpet-shaped collection chamber and a gas collection pipe with a diameter of 100-150 mm are provided to maintain the connection with the auxiliary furnace chamber, that is, to maintain the transmission channel for the transmission of exhaust gas into the exhaust gas treatment system. At the same time, a docking gasket is provided on the collection chamber to stabilize the air pressure in the auxiliary furnace chamber and maintain a stable exhaust gas suction operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the first three-dimensional structure of the utility model;

[0018] Figure 2 It is a second three-dimensional structural schematic diagram of the utility model;

[0019] Figure 3 It is a schematic diagram of the cross-sectional structure of the utility model;

[0020] Figure markings: 1. universal wheel, 2. base frame, 3. connecting nail, 4. pulling frame, 5. supporting frame, 6. transmission pipe, 61. gas collecting pipe, 62. flexible pipe, 7. docking pipe, 8. collecting chamber, 9. docking gasket, 10. single crystal furnace main body, 101. auxiliary furnace chamber, 102. main furnace chamber. DETAILED DESCRIPTION

[0021] The utility model aims to solve the problem that harmful impurity exhaust gas will diffuse from the entrance and exit of the swing door of the auxiliary furnace chamber along with the residual temperature in the main furnace chamber, affecting the working environment. Figure 1 As shown, a collecting chamber 8 is provided which is connected to the inlet and outlet of the swing door of the auxiliary furnace chamber. The collecting chamber 8 is connected to a transmission pipe 6 which is connected to the exhaust gas treatment system, thereby transmitting the exhaust gas to the exhaust gas treatment system for treatment.

[0022] like Figure 1 and 2As shown, the collecting chamber 8 is trumpet-shaped, so that the collecting chamber 8 can collect exhaust gas when docking with the swing door inlet and outlet of the auxiliary furnace chamber, and the exhaust gas can be concentrated and gathered into the transmission pipe 6, and then the exhaust gas is transported to the exhaust gas treatment system through the transmission pipe 6 for exhaust gas treatment. A docking gasket 9 is fixed at the docking point between the expanded end face of the collecting chamber 8 and the auxiliary furnace chamber. The docking gasket 9 is L-shaped, and there are four docking gaskets 9 respectively fixed at the four corners of the expanded end face of the collecting chamber 8, and the four docking gaskets 9 are not continuous between each other. Therefore, the docking gasket 9 can prevent the auxiliary furnace chamber from docking with the collecting chamber 8 to be relatively closed, that is, to prevent the exhaust gas treatment system from generating load negative pressure in the auxiliary furnace chamber under continuous suction conditions to affect the collection of exhaust gas.

[0023] like Figure 3 As shown, the transmission pipe 6 is composed of a gas collecting pipe 61 and a flexible pipe 62. One end of the gas collecting pipe 61 is sealed and connected with the collection chamber 8, and the other end of the gas collecting pipe 61 is sealed and connected with the flexible pipe 62 through the sealing ring in the butt pipe 7, thereby realizing the sealed connection between the flexible pipe 62 and the collection chamber 8, that is, realizing the connection between the collection barrel 8 and the exhaust gas treatment system to collect the exhaust gas. At the same time, the butt pipe 7 can quickly and seal the transmission pipe 6 and the collection chamber 8, thereby facilitating the inspection and replacement of the staff while maintaining the sealing of the transmission pipe 6 and the collection chamber 8.

[0024] The diameter of the gas collecting pipe 61 is 125 mm, which can stably guide the waste gas collected by the collecting chamber 8 to the transmission pipe 6, thereby achieving efficient waste gas transmission. After the transmission pipe 6 is connected to the waste gas treatment system, the suction force of the waste gas treatment system will also accelerate the cooling of the single crystal furnace body.

[0025] like Figure 1 As shown, the collection chamber 8 and the gas collecting pipe 61 are both connected to the support frame 5. The support frame 5 makes the height of the collection chamber 8 level with the height of the auxiliary furnace chamber, so that the collection chamber 8 can quickly dock with the auxiliary furnace chamber to collect exhaust gas. The gas collecting pipe 61 is connected to the support frame 5 to assist in stabilizing the position of the collection chamber 8, thereby maintaining the stability of the collection chamber 8. The support frame 5 is fixedly connected to the base frame 2, and universal wheels 1 are fixed at the four corners of the bottom surface of the base frame 2, so that the staff can easily move the collection chamber 8 to dock with different auxiliary furnace chambers for exhaust gas collection. The base frame 2 is also connected to a pulling frame 4 to assist the staff in pulling the base frame 2 to move for use.

[0026] The pulling frame 4 is rotatably connected to the connecting pins 3 fixedly connected to the base frame 2. The pulling frame 4 can rotate to adapt to the heights of different workers when the workers pull the collection chamber 8 to move the position, so that different workers can pull it conveniently. It can also be rotated and placed on the side of the base frame 2 for folding and storage, thereby assisting the workers to place the collection chamber 8 for storage in a low-occupied space.

[0027] The universal wheel 1 has a self-locking function, and after the collection chamber 8 and the auxiliary furnace chamber swing door inlet and outlet are quickly connected, the self-locking function of the universal wheel 1 can be used to position and maintain the stability of the connection. A pulling frame 4 is provided on the support frame 5 to assist the staff to pull the collection chamber 8 to move the position for use.

[0028] The flexible tube 62 and the universal wheel 1 provided in this embodiment can be replaced with other structural shapes as long as they can meet the use requirements.

[0029] After the silicon single crystal is pulled, harmful impurities and waste gas are extracted through the vacuum system. Because the main furnace chamber and the auxiliary furnace chamber constitute the main body of the single crystal furnace, which can bear the limit of negative pressure value and the need to clean the main body of the single crystal furnace, it is necessary to open the swing door to expose the swing door inlet and outlet of the auxiliary furnace chamber and connect them to the outside world. After the residual heat dissipates and the main furnace chamber is lowered to room temperature, the volatiles in the single crystal furnace body are cleaned. However, in this process, harmful impurities and waste gas will continue to evaporate into the air from the swing door inlet and outlet of the auxiliary furnace chamber along with the residual temperature in the main furnace chamber, causing pollution to the working environment. At this time, the universal wheel 1 and the pulling frame 4 can be used for assistance, so that the support frame 5 can drive the collection chamber 8 to move. The support frame 5 will assist the staff to quickly align the collection chamber 8 with the swing door of the auxiliary furnace chamber, so that the collection chamber 8 and the swing door inlet and outlet of the auxiliary furnace chamber can be quickly docked, and then the transmission pipe 6 in the exhaust gas treatment system for the gas in the collection chamber 8 to be output to the exhaust gas treatment system through the connecting collection chamber 8, so that the exhaust gas discharged from the swing door inlet and outlet of the auxiliary furnace chamber is directly guided to the exhaust gas treatment system, and during the guiding process, the exhaust gas treatment system will also use its own suction force to maintain the high efficiency of suction. This prevents the exhaust gas from affecting the quality of the environment and the physical safety of the staff.

[0030] The parts not explained in the above embodiments, such as how the exhaust gas treatment system performs exhaust gas treatment, how the transmission pipe 6 is connected to the exhaust gas treatment system, the shape connection method of the main furnace chamber and the auxiliary furnace chamber, how the self-locking structure of the universal wheel 1 self-locks and unlocks, the composition of the self-locking structure of the universal wheel 1, and the shape structure of the bellows, should be understood as the prior art known or should be known to those skilled in the art.

Claims

1. A device for collecting waste gas from a secondary furnace of a heavily doped single crystal furnace, characterized in that: The invention comprises a collecting chamber (8) and a transmission pipe (6) which is sealed and connected to the collecting chamber (8); the collecting chamber (8) is used to connect with the inlet and outlet of the swing door of the auxiliary furnace chamber of the single crystal furnace main body; the collecting chamber (8) is fixed on a support frame (5) which is used to align the height of the collecting chamber (8) with the inlet and outlet of the swing door of the auxiliary furnace chamber; the support frame (5) is fixed on a base frame (2); universal wheels (1) for assisting movement are provided at the four corners of the bottom surface of the base frame (2); the transmission pipe (6) is used to connect the collecting chamber (8) with the exhaust gas treatment system, so that a suction force is generated at the collecting chamber (8) to quickly collect the exhaust gas discharged with the residual temperature in the single crystal furnace main body.

2. The exhaust gas collection device for the secondary furnace of a heavily doped single crystal furnace according to claim 1 is characterized in that: The collecting chamber (8) is trumpet-shaped, the expanded end of the trumpet-shaped collecting chamber (8) is used to connect with the inlet and outlet of the auxiliary furnace chamber swing door, and the closed end of the trumpet-shaped collecting chamber (8) is used to be sealed and connected with the transmission pipe (6).

3. The exhaust gas collection device for the secondary furnace of a heavily doped single crystal furnace according to claim 1 is characterized in that: The transmission pipe (6) is composed of a gas collecting pipe (61) and a flexible pipe (62). One end of the gas collecting pipe (61) is sealed and connected to the collection chamber (8). The other end of the gas collecting pipe (61) horizontally passes through the support frame (5) and is sealed and connected to the flexible pipe (62). The gas collecting pipe (61) is used to cooperate with the support frame (5) to stabilize the collection chamber (8).

4. The device for collecting waste gas from a secondary furnace of a heavily doped single crystal furnace according to claim 3, characterized in that: The diameter of the gas collecting pipe (61) is 100-150 mm.

5. The exhaust gas collection device for the secondary furnace of a heavily doped single crystal furnace according to claim 1 is characterized in that: The gas collecting pipeline (61) and the flexible pipe (62) are butt-jointed and sealed via a butt-joint pipe (7) to achieve rapid assembly and disassembly.

6. The device for collecting waste gas from a secondary furnace of a heavily doped single crystal furnace according to claim 1, characterized in that: A pulling frame (4) is connected to the side of the base frame (2).

7. The device for collecting waste gas from a secondary furnace of a heavily doped single crystal furnace according to claim 6, characterized in that: The pulling frame (4) is rotatably connected to a connecting nail (3) fixed on the base frame (2).

8. The device for collecting waste gas from a secondary furnace of a heavily doped single crystal furnace according to claim 1, characterized in that: A discontinuous butt gasket (9) is provided at the butt joint between the collecting chamber (8) and the inlet and outlet of the auxiliary furnace chamber swing door. The butt gasket (9) is used to maintain the connection between the inlet and outlet of the auxiliary furnace chamber swing door and the outside, thereby stabilizing the air pressure in the auxiliary furnace chamber.

9. The device for collecting waste gas from a secondary furnace of a heavily doped single crystal furnace according to claim 1, characterized in that: The universal wheel (1) has a self-locking structure.

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